CN115355161A - Multi-cavity compression constant-pressure output jet piezoelectric fan - Google Patents

Multi-cavity compression constant-pressure output jet piezoelectric fan Download PDF

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Publication number
CN115355161A
CN115355161A CN202211292859.5A CN202211292859A CN115355161A CN 115355161 A CN115355161 A CN 115355161A CN 202211292859 A CN202211292859 A CN 202211292859A CN 115355161 A CN115355161 A CN 115355161A
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cavity
air inlet
air
elastic rubber
piezoelectric
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CN202211292859.5A
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CN115355161B (en
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胡汇明
杜文艺
申桃
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Chengdu Huitong West Electronic Co ltd
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Chengdu Huitong West Electronic Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/102Adaptations or arrangements of distribution members the members being disc valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention discloses a multi-cavity compression constant-pressure output jet piezoelectric fan, which comprises: the middle part of the elastic rubber cushion B is provided with a first cavity penetrating along the thickness direction, and the side wall of the elastic rubber cushion B is provided with an air outlet communicated with the first cavity; the air inlet cavity is respectively arranged on two sides of the elastic rubber cushion B; an air inlet is formed in one side of the air inlet cavity, and a ventilation opening is formed in the other side of the air inlet cavity; the piezoelectric ceramic piece is arranged in the air inlet cavity, and the air inlet cavity is closed by the piezoelectric ceramic piece while air is fed from the air inlet; or the air in the air inlet cavity enters the first cavity through the vent and is discharged from the air outlet, and the air inlet is closed at the same time. This application is through the use of check valve piece, avoids traditional efflux fan business turn over wind, and the low, the high shortcoming of wind temperature of output of radiating efficiency at same exit.

Description

Multi-cavity compression constant-pressure output jet piezoelectric fan
Technical Field
The invention relates to the technical field of jet piezoelectric fans, in particular to a multi-cavity compression constant-voltage output jet piezoelectric fan.
Background
The main structural component of the jet piezoelectric fan consists of a jet piezoelectric fan and a driving power supply, and the working principle of the jet piezoelectric fan is that the piezoelectric property, the dielectric property and the elasticity of piezoelectric ceramic are utilized, and the piezoelectric ceramic material causes the center of positive and negative charges in the ceramic to relatively displace and polarize under the action of mechanical stress, so that bound charges with opposite signs, namely the positive piezoelectricity of the piezoelectric ceramic material, appear on the surfaces of two ends of the piezoelectric ceramic material. Conversely, when the piezoelectric ceramic is electrified, the piezoelectric ceramic generates displacement and vibration, which is the inverse piezoelectric effect of the piezoelectric ceramic. The jet piezoelectric fan is designed by utilizing the principle of the inverse piezoelectric effect of piezoelectric ceramics.
The existing jet flow piezoelectric fan has only one cavity and a common inlet and outlet, and the air inlet and the air outlet are at the same opening without a valve. The defects are obvious, and firstly, the same inlet and outlet need to suck air and spit air. The air outlet efficiency is low, and only 50% of the inlet and the outlet are separated at most; secondly, the fan is used for radiating, and because the jet flow fan is close to a heat source for radiating, when air is blown and sucked for radiating, part of hot air from the heat source is sucked, the temperature of the discharged air is continuously increased, and therefore, the jet flow piezoelectric fan mixed with the inlet air and the outlet air has low radiating efficiency; third, the piezoelectric ceramics of the jet piezoelectric fan are minute vibrations, and although the displacement of the entire diaphragm is very small through amplification of the metal film. Therefore, the air quantity of the jet piezoelectric fan is relatively small, and the heat dissipation effect is not good.
Disclosure of Invention
The invention provides a multi-cavity compression constant-pressure output jet flow piezoelectric fan, which aims to solve the technical problem.
In order to achieve the purpose, the invention adopts the following technical scheme:
a multi-chamber compression constant pressure output jet piezoelectric fan comprising:
the middle part of the elastic rubber cushion B is provided with a first cavity penetrating along the thickness direction, and the side wall of the elastic rubber cushion B is provided with an air outlet communicated with the first cavity;
the air inlet cavities are respectively arranged on two sides of the elastic rubber cushion B;
an air inlet is formed in one side of the air inlet cavity, and a ventilation opening is formed in the other side of the air inlet cavity; the air inlet cavity is internally provided with a piezoelectric ceramic piece, and the metal vibration steel sheet is utilized to realize the purpose of compressing the air in the cavity through the tiny vibration of the piezoelectric ceramic piece, and the air inlet cavity can realize the closing of the air inlet and the air outlet when the air is fed from the air inlet; or the air in the air inlet cavity enters the first cavity through the vent and is discharged from the air outlet, and the air inlet is closed at the same time.
In some embodiments, the air intake cavity further comprises: the middle part of the elastic rubber cushion A is provided with a second cavity penetrating through the elastic rubber cushion A along the thickness direction; the middle part of the one-way valve plate is provided with a third cavity penetrating through the thickness direction; the two one-way valve plates are arranged on two sides of the elastic rubber cushion A; the two metal vibration steel sheets are respectively attached to the one-way valve sheets on the two sides, a vent is formed in one side, far away from the air outlet, of the metal vibration steel sheet close to one side of the elastic rubber cushion B, and a plurality of air inlets are formed in the positions, opposite to the side edges of the one-way valve sheets, of the metal vibration steel sheet far away from one side of the elastic rubber cushion B; the cathodes of the two piezoelectric ceramic pieces are respectively and correspondingly arranged on one side, facing the elastic rubber mat A, of the metal vibrating steel sheet;
the two auxiliary electrodes are respectively and correspondingly arranged on the positive electrodes of the piezoelectric ceramic pieces;
the one-way valve sheet can open the air inlet and close the vent simultaneously or close the air inlet and open the vent under the vibration of the metal vibration steel sheet. The vibration of the metal vibrating steel sheet is driven by the piezoelectric ceramic sheet.
In some embodiments, the piezoceramic wafer has a piezoelectric constant d 33 High performance piezoelectric ceramics of more than 700 PC/N.
In some embodiments, the check valve plate is a metal diaphragm.
In some embodiments, the current driving the piezoceramic wafer is self-oscillating current driven or driven with separately oscillating square wave voltage.
The multi-cavity compression constant-pressure output jet piezoelectric fan provided by the application has the advantages that the fan is not limited to:
the piezoelectric fan is provided with one-way control, independent air inlet and air outlet and multi-cavity compression, and is simple in structure, wherein a compression cavity is formed by metal vibration steel sheets, and a one-way valve sheet is reused to control air to enter and exit; thirdly, a plurality of compression cavities are connected by utilizing a one-way valve plate and an elastic rubber pad A (B), so that multi-stage compression, multi-stage air storage, pressurization and constant pressure are realized.
Drawings
Fig. 1 is a schematic structural diagram of a jet piezoelectric fan according to the present invention.
FIG. 2 is a schematic structural diagram of a metal vibrating steel sheet and a vibrating diaphragm arranged in a piezoelectric ceramic array of the jet piezoelectric fan according to the present invention.
Fig. 3 is a part view of a jet piezoelectric fan of the present invention.
The labels in the figure are: 1-piezoelectric ceramic piece, 2-metal vibrating steel piece, 3-auxiliary electrode, 4-one-way valve piece, 5-elastic rubber pad A, 6-elastic rubber pad B, 7-air inlet, 8-air vent, 9-first cavity and 10-air outlet.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described in more detail below with reference to the accompanying drawings in the preferred embodiments of the present application. In the drawings, the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The described embodiments are a subset of the embodiments in the present application and not all embodiments in the present application. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present application and should not be construed as limiting the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Embodiments of the present application will be described in detail below with reference to the accompanying drawings.
In the description of the present application, it should be noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning a fixed connection, an indirect connection through intervening media, a connection between two elements, or an interaction between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations and positional relationships based on the drawings, are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application.
Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or display that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or display.
A multi-chamber compression constant-pressure output jet piezoelectric fan according to an embodiment of the present application will be described in detail below with reference to fig. 1 to 3. It should be noted that the following examples are only for explaining the present application and do not constitute a limitation to the present application.
A multi-cavity compression constant-pressure output jet piezoelectric fan comprises an elastic rubber cushion B6 and an air inlet cavity, wherein the middle part of the elastic rubber cushion B is provided with a first cavity 9 penetrating through the elastic rubber cushion B along the thickness direction, and the side wall of the elastic rubber cushion B is provided with an air outlet 10 communicated with the first cavity; the air inlet cavity is respectively arranged at two sides of the elastic rubber cushion B.
An air inlet 7 is formed in one side of the air inlet cavity, and a ventilation opening is formed in the other side of the air inlet cavity; the metal vibrating steel sheet in the air inlet cavity is provided with a piezoelectric ceramic piece, and the air inlet cavity is closed by the opening 8 while air is fed from the air inlet through the vibration of the piezoelectric ceramic piece; or the air in the air inlet cavity enters the first cavity through the vent and is discharged from the air outlet, and the air inlet is closed at the same time.
The air inlet cavity comprises a plurality of piezoelectric ceramic pieces 1, a metal vibration steel piece 2, an auxiliary electrode 3, a one-way valve piece 4, an elastic rubber pad A5 and an elastic rubber pad B6.
The middle part of the elastic rubber cushion B is provided with a second cavity which penetrates through the elastic rubber cushion B along the thickness direction; the middle part of the one-way valve plate is provided with a third cavity penetrating through the thickness direction; the two one-way valve plates are arranged on two sides of the elastic rubber cushion B; the two metal vibrating steel sheets are respectively attached to the one-way valve sheets on the two sides, a vent 8 is arranged on one side, away from the air outlet, of the metal vibrating steel sheet on one side close to the elastic rubber gasket A, a common rectangular vent is arranged at the lower end of the metal vibrating steel sheet on the right side of the elastic rubber gasket A of the cavity 1, and a plurality of air inlets are formed in the positions, opposite to the one-way valve sheets, of the metal vibrating steel sheet on one side outside the cavity 1; the cathodes of the two piezoelectric ceramic pieces are respectively and correspondingly arranged on the metal vibrating steel sheet and bonded together with the steel sheet;
the two auxiliary electrodes are respectively and correspondingly arranged on the positive electrodes of the piezoelectric ceramic pieces;
the one-way valve sheet can resonate the metal vibrating steel sheet under the drive of the piezoelectric ceramic sheet, and the air inlet is opened while the vent is closed or the air inlet is closed to open the vent.
The one-way valve plate can open the air inlet and close the vent simultaneously or close the air inlet and open the vent under the vibration of the piezoelectric ceramic plate.
Each piece of piezoelectric ceramic in the piezoelectric ceramic pieces 1 is polarized to have two poles, and the positive face and the negative face are respectively a positive pole and a negative pole. The positive electrodes of the piezoelectric ceramic pieces 1 face outwards, and the negative electrodes of the piezoelectric ceramic pieces face inwards to the metal vibrating steel piece 2. The auxiliary electrode is pasted on the positive electrode of the piezoelectric ceramic piece, so that the mutual connection among a plurality of ceramic pieces is kept, and meanwhile, the piezoelectric ceramic inner electrode can be more reliably and conveniently ledThus, the electrode is prevented from falling off under strong vibration. The piezoelectric ceramic piece 1 is adhered to the metal vibrating steel piece 2 according to the design requirement, and the auxiliary electrode 3 is adhered to the positive electrode surface of the piezoelectric ceramic piece 1. Piezoelectric constant d of piezoelectric ceramic sheet 1 33 More than 700PC/N, and is high-performance piezoelectric ceramic. The negative electrodes of the piezoelectric ceramic pieces are respectively adhered to the two metal vibration steel sheets according to array arrangement, and the vibrating pieces vibrate to a larger extent under the driving of the piezoelectric ceramic pieces, so that powerful kinetic energy is continuously output to the jet fan, and power is provided for opening and closing the one-way valve.
And bonding the metal vibrating steel sheets arranged in the piezoelectric ceramic piece array into an air inlet cavity by using a one-way valve sheet. The two metal vibration films are connected through the elastic rubber pad A to form a compression cavity. And an air inlet cavity combination is formed by utilizing the elastic rubber cushion B, so that the combination of outputting high-wind-speed gas is realized.
The driving power supply adopts self-excited oscillation (current driving) and separately excited square wave oscillation (voltage driving) to meet the requirements of different users. Two groups of piezoelectric ceramic pieces on the two piezoelectric ceramic pieces are connected in series under the drive of self-oscillation current; the separately excited oscillation is driven by square waves, and two groups of piezoelectric ceramics on the two piezoelectric ceramic pieces are connected in parallel.
The invention relates to a jet piezoelectric fan with unidirectional control, independent air inlet and outlet, multi-cavity compression and constant-pressure output. And each air inlet cavity is combined by adopting a one-way valve plate and an elastic rubber pad A. The air enters the air cavity from the air inlet, enters the first cavity through the one-way valve sheet under the continuous vibration and compression of the two metal vibration steel sheet films, is further compressed in the second cavity, and finally outputs high-speed jet flow outwards through the air outlet of the third cavity, so that the purposes of increasing the air speed, improving the air pressure and increasing the air storage capacity are achieved. The whole jet fan can output high-speed and continuous constant-pressure wind.
If the air inlet cavity is required to be increased, the number of the air inlet cavities can be increased by the method under the condition that the volume is allowed, and the use requirement is met. For example, the left side and the right side of the elastic rubber cushion A are respectively provided with a plurality of groups of parallel air inlet cavities of the embodiment, and each air inlet cavity is connected with the elastic rubber cushion A by adopting the structure to form a plurality of air inlets corresponding to the same air outlet.
Referring to fig. 2, the cavity 1 and the cavity 2 are air inlet cavities at two sides of the elastic rubber mat a, and the cavity 3 is a third cavity of the elastic rubber mat B; the working process of the cavity 1 is described as an example, and the working of the cavity 2 is synchronous with the cavity 1, which is not described again. The piezoelectric ceramic piece vibrates after being electrified, when the metal vibration steel sheet at the outermost side of the cavity 1 is electrified in the positive direction, the piezoelectric ceramic vibration steel sheet protrudes outwards, a local gap is generated between the air inlet hole in the metal vibration steel sheet and the one-way valve sheet, and air enters the cavity 1 from the air inlet hole of the metal vibration steel sheet. Meanwhile, the metal vibrating steel sheets on the other side of the elastic rubber cushion A of the cavity 1 are also protruded out of the cavity 1 under the vibration driving of the piezoelectric ceramic pieces, and the metal vibrating steel sheets on the two sides of the cavity 1 are all outward, so that the volume of the cavity 1 is increased, and the air pressure in the cavity is reduced. When the pottery that gives the metal vibration steel sheet leads to reverse electricity, two metal steel sheet shrink, and both sides metal steel sheet is to cavity 1 internal motion, and the metal hole on the metal vibration steel sheet does not have the clearance with the sheetmetal of check valve, therefore the air intake is closed for volume reduces in the cavity 1, and the air in the cavity 1 receives the compression, and intracavity gas pressure increases, and gas can be extruded the air outlet of cavity 1.
The jet piezoelectric fan is adhered to the metal vibration steel sheet through the array combination of a plurality of piezoelectric ceramic sheets, and the array arrangement is adopted, so that the vibration mode of the piezoelectric ceramic sheets is changed. The piezoelectric ceramic plate can output large-amplitude energy, the frequency reduction and noise reduction can be realized, and the performance of the jet piezoelectric fan is improved.
This application is through the use of check valve piece, avoids traditional efflux fan business turn over wind, and the shortcoming such as the wind temperature height of low, the output of radiating efficiency at same exit because in same mouth business turn over gas, both blow and breathe in, when exporting wind, also inhale and come from the gas of heat-generating body high temperature, the air outlet is only outwards jet-propelled. The one-way valve plate and the elastic rubber pad A (B) are adopted, so that air is not directly fed from the outlet, but is fed through the air inlet of the cavity. The air inlet and the air outlet are completely separated, and hot air suction is also avoided. The combined multi-cavity is designed according to requirements, so that the wind speed is improved, the pressure of wind and the constant pressure of air pressure are increased, and the continuity of output wind can be kept.
The jet fan has a very wide practical scene in the market, can be produced in large batch, and has higher economic benefit and social effect.
The above description is intended to be illustrative of the preferred embodiment of the present invention and should not be taken as limiting the invention, but rather, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

Claims (5)

1. A multi-cavity compression constant-pressure output jet piezoelectric fan is characterized by comprising:
the middle part of the elastic rubber cushion B is provided with a first cavity penetrating along the thickness direction, and the side wall of the elastic rubber cushion B is provided with an air outlet communicated with the first cavity;
the air inlet cavity is respectively arranged on two sides of the elastic rubber cushion B;
an air inlet is formed in one side of the air inlet cavity, and a ventilation opening is formed in the other side of the air inlet cavity; the air inlet cavity is internally provided with a piezoelectric ceramic piece, and the air inlet cavity is closed by the piezoelectric ceramic piece when air is fed from the air inlet; or the air in the air inlet cavity enters the first cavity through the vent and is discharged from the air outlet, and the air inlet is closed at the same time.
2. A multi-chamber compression constant pressure output jet piezoelectric fan in accordance with claim 1, wherein the inlet chamber further comprises:
the middle part of the elastic rubber cushion A is provided with a second cavity penetrating along the thickness direction;
the middle part of the one-way valve plate is provided with a third cavity penetrating through the thickness direction; the two one-way valve plates are arranged on two sides of the elastic rubber cushion A;
the metal vibration steel sheets are respectively attached to the one-way valve sheets on the two sides, a ventilation opening is formed in one side, away from the air outlet, of the metal vibration steel sheet close to one side of the elastic rubber mat B, and a plurality of air inlets are formed in positions, opposite to the side edges of the one-way valve sheets, of the metal vibration steel sheet far away from one side of the elastic rubber mat B;
the negative electrodes of the two piezoelectric ceramic pieces are respectively and correspondingly arranged on one side of the metal vibrating steel sheet facing the elastic rubber mat A;
the two auxiliary electrodes are respectively and correspondingly arranged on the positive electrodes of the piezoelectric ceramic pieces;
the one-way valve sheet can open the air inlet and close the vent or close the air inlet and open the vent through the metal vibrating steel sheet under the vibration of the piezoelectric ceramic sheet.
3. The multi-cavity compression constant-pressure-output jet piezoelectric fan as claimed in claim 2, wherein the piezoceramics sheet has a piezoelectric constant d 33 High performance piezoelectric ceramics of more than 700 PC/N.
4. The multi-cavity compression constant-pressure-output jet piezoelectric fan as claimed in claim 2, wherein the check valve plate is a metal diaphragm.
5. The multi-chamber compression constant voltage output jet piezoelectric fan according to claim 2, wherein the current driving the piezoelectric ceramic plate is self-excited oscillation current driving and/or separately excited oscillation square wave voltage driving.
CN202211292859.5A 2022-10-21 2022-10-21 Multi-cavity compression constant-pressure output jet piezoelectric fan Active CN115355161B (en)

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CN110985360A (en) * 2019-11-29 2020-04-10 昆山龙朋精密电子有限公司 Miniature piezoelectric fan
CN111911393A (en) * 2020-09-08 2020-11-10 王洋中 Piezoelectric ceramic micro-fluidic pump with pre-tightening valve and use method thereof
CN112128088A (en) * 2019-06-25 2020-12-25 精工爱普生株式会社 Diaphragm-type compressor, cooling unit, projector, and recording apparatus
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Publication number Priority date Publication date Assignee Title
JP2001193657A (en) * 1999-10-27 2001-07-17 Seiko Instruments Inc Pump and its driving method
JP2002339900A (en) * 2001-05-11 2002-11-27 Sony Corp Piezoelectric fan
JP2004353638A (en) * 2003-05-26 2004-12-16 Honda Motor Co Ltd Micropump
JP2009097393A (en) * 2007-10-16 2009-05-07 Murata Mfg Co Ltd Piezoelectric micro blower
JP2010029759A (en) * 2008-07-28 2010-02-12 Fujikura Ltd Piezoelectric fan device
CN102072137A (en) * 2009-11-20 2011-05-25 株式会社村田制作所 Piezoelectric fan and cooling device
CN104272481A (en) * 2012-05-09 2015-01-07 高通股份有限公司 Piezoelectric active cooling device
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JP2014088790A (en) * 2012-10-29 2014-05-15 Murata Mfg Co Ltd Blower
CN105628469A (en) * 2015-12-28 2016-06-01 电子科技大学 Cross section sample preparation mold and method for preparing cross section sample
CN107524584A (en) * 2016-06-22 2017-12-29 于平 New more oscillator piezoelectric pumps
CN206571656U (en) * 2017-03-10 2017-10-20 广东捷成科创电子股份有限公司 A kind of superposed type multi-cavity piezoelectricity air pump
CN109681414A (en) * 2018-03-09 2019-04-26 常州威图流体科技有限公司 A kind of minitype piezoelectric pump, piezoelectricity pump group and assembly method based on optical transmission weldering
CN112128088A (en) * 2019-06-25 2020-12-25 精工爱普生株式会社 Diaphragm-type compressor, cooling unit, projector, and recording apparatus
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CN114251255A (en) * 2020-09-25 2022-03-29 研能科技股份有限公司 Miniature fluid conveying device

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