CN115148892A - Signal isolator and preparation method thereof - Google Patents

Signal isolator and preparation method thereof Download PDF

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CN115148892A
CN115148892A CN202210579256.7A CN202210579256A CN115148892A CN 115148892 A CN115148892 A CN 115148892A CN 202210579256 A CN202210579256 A CN 202210579256A CN 115148892 A CN115148892 A CN 115148892A
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electrode
signal
piezoelectric material
piezoelectric
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刘明
朱家训
吴金根
关蒙萌
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Zhuhai Duochuang Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K19/00Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
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    • H03K19/017545Coupling arrangements; Impedance matching circuits
    • HELECTRICITY
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Abstract

A signal isolator and a method for manufacturing the same, the signal isolator includes: the signal input part is a block made of piezoelectric materials, a first electrode and a second electrode are respectively arranged on two opposite surfaces of the block, the first electrode is grounded, and the second electrode is connected with an input signal; the signal output part is a block formed by alternately superposing piezoelectric material layers and electrode material layers, the plane of the piezoelectric material layers and the plane of the electrode material layers are perpendicular to the connection interface of the signal input part and the signal output part, and the first electrode is positioned on the connection interface of the signal input part and the signal output part; the electrode material layer forms a first internal electrode and a second internal electrode in the signal output part, the first internal electrode outputs signals, and the second internal electrode is grounded. The invention is based on the piezoelectric effect of the piezoelectric material, realizes the transmission of signals under the condition of electrical isolation by using the coupling among different forms of piezoelectric strain, and has the characteristics of small volume, low power consumption, long service life and the like.

Description

Signal isolator and preparation method thereof
Technical Field
The invention belongs to the technical field of interface data signal communication, and particularly relates to a signal isolator and a preparation method thereof.
Background
The signal isolator can realize data transmission under electrical isolation, and has very wide application in the fields of network interfaces, communication, data transmission, mobile electronics and the like. The existing signal isolator mainly comprises an optical-electrical signal isolation coupler, a transformer isolator, a magnetic coupling isolator and the like. The photoelectric signal isolation coupler is called a photoelectric coupler for short, and generally comprises three parts: light emission, light reception and signal amplification. Because the input and the output of the photoelectric coupler are isolated from each other, the electric signal transmission is unidirectional, thereby having good electric insulation capability and interference resistance capability. However, the photoelectric coupler has the disadvantages of large volume, low speed, easy aging, difficult integration, no radiation protection and the like, and the requirement of a high-speed and integratable isolation coupling device is difficult to meet. The transformer isolator is based on the mutual inductance principle of coils, an isolation barrier is constructed by using the transformer coils, current changes at the front end of the isolator are induced by the coils, and current changes are generated at the rear end of the isolator. The transformer isolation has the advantages of high speed and capability of supplying power to an isolation end, but the transformer isolation also has the defect of larger volume. The american Analog Devices (ADI) developed a magnetic coupling isolator suitable for high voltage environment based on a chip-size transformer, rather than a photo coupler using a structure in which a light emitting diode is combined with a photo triode. Because the magnetic coupling isolator adopts a high-speed iCOMS process, the magnetic coupling isolator is superior to a photoelectric coupler in the aspects of volume, integration level, speed and the like. However, in the magnetic coupling isolator, a driving circuit is required to generate a magnetic field for a coil input current, and then a magnetic field signal is read by using a magnetic sensitive probe, so that data reading and reconstruction are realized, thereby generating large power consumption. In addition, barkhausen noise also exists in the magnetic sensitive material, which affects the fidelity of the signal.
Disclosure of Invention
The invention aims to provide a piezoelectric strain coupling-based signal isolator with low power consumption, high transmission rate and high integration and a preparation method thereof.
In order to achieve the purpose, the invention adopts the following technical solutions:
a signal isolator comprising: the signal input part is a block made of piezoelectric materials, a first electrode and a second electrode are respectively arranged on two opposite surfaces of the block, the first electrode is grounded, and the second electrode is connected with an input signal; the signal output part is a block formed by alternately overlapping piezoelectric material layers and electrode material layers, the plane of the piezoelectric material layers and the plane of the electrode material layers are perpendicular to the connection interface of the signal input part and the signal output part, and the first electrode is positioned on the connection interface of the signal input part and the signal output part; the electrode material layer forms a first internal electrode and a second internal electrode inside the signal output part, the first internal electrode outputs signals, and the second internal electrode is grounded.
Furthermore, the first electrode and the second electrode are film electrodes respectively covering the surfaces of the first electrode and the second electrode.
Further, the first internal electrodes and the second internal electrodes are interdigital electrodes.
Further, the piezoelectric material layer is located at an outermost layer of the signal output part.
Further, the piezoelectric material used by the piezoelectric material layers in the signal input part and the signal output part is a piezoelectric ceramic material, a piezoelectric single crystal material or a piezoelectric polymer material; and/or the material used by the first electrode and the second electrode is one or more of Au, ag, al, cu, pt, W, fe, co, ni and Ti; and/or the material used by the electrode material layer is one or more of Au, ag, al, cu, pt, W, fe, co, ni and Ti.
Further, the volume ratio of the piezoelectric material in the signal output part to the piezoelectric material in the signal input part is 0.01-10; and/or the thickness ratio of the piezoelectric material layer to the electrode material layer in the signal output part is 0.1-100.
Further, when the signal input part is subjected to electric field polarization, the direction of the electric field is perpendicular to the plane of the first electrode.
Further, when the piezoelectric material layers in the signal output part are subjected to electric field polarization, the direction of an electric field is parallel to the thickness direction of the piezoelectric material layers, and the polarization directions of two adjacent piezoelectric material layers are opposite.
Furthermore, the electric field polarization is performed by the electric field with the size of 2 to 3 times of the coercive field of the piezoelectric material used.
The invention also provides a preparation method of the signal isolator, which comprises the following steps:
step 1, preparing a piezoelectric material layer of a signal output part, and preparing a first internal electrode and a second internal electrode on the side surface of the piezoelectric material layer;
step 2, processing the piezoelectric material into a square signal input part;
step 3, preparing a first electrode and a second electrode on two opposite surfaces of the signal input part;
step 4, combining the signal input part and the signal output part together, wherein the first electrode is positioned on a connecting interface of the signal input part and the signal output part;
step 5, grounding the second inner electrode and the first electrode;
step 6, applying voltage on the first internal electrode and the second internal electrode to polarize the piezoelectric material of the signal output part;
step 7, applying voltage on the first electrode and the second electrode to polarize the piezoelectric material of the signal input part;
and 8, taking the first inner electrode as an output end of the signal separator, and taking the second electrode as an input end of the signal separator.
According to the technical scheme, the signal isolator disclosed by the invention is based on the principle of piezoelectric strain coupling, and realizes signal isolation by utilizing the coupling of piezoelectric strain in the piezoelectric material. According to the distribution of the input end and the output end of an isolation signal, piezoelectric materials in different structural forms are respectively used as input and output carriers of the signal, the piezoelectric material of the signal input part and the piezoelectric material of the signal output part work in different piezoelectric modes, by utilizing the strain coupling characteristic between the two working modes, after the piezoelectric material used as the input end is connected with electric signals such as voltage or current, strain is generated due to the inverse piezoelectric effect, the strain is transmitted to the piezoelectric material used as the output end through the interface coupling between the upper part and the lower part of the piezoelectric material, and the strain is converted into the voltage or the current under the action of the piezoelectric effect, so that the signal output of the voltage or the current is realized; meanwhile, the first electrode is grounded, when the piezoelectric material is broken down due to overhigh voltage, the input signal is immediately grounded and cannot be transmitted to the output end, and therefore electrical isolation of the signal is achieved. The signal isolator realizes the electrical isolation of signals by utilizing the coupling between the piezoelectric materials of the upper part and the lower part of the piezoelectric strain, realizes high transmission rate, low power consumption and easy integration, has the characteristics of low power consumption, long service life, high integration level and the like compared with a common photoelectric coupler and a magnetic coupling isolator, can realize the data transmission under the electrical isolation, and can be widely applied to the fields of network interfaces, communication, data transmission, mobile electronics and the like.
Drawings
In order to illustrate the embodiments of the present invention more clearly, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained by those skilled in the art without inventive effort.
FIG. 1 is a schematic diagram of a signal isolator according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a signal isolator according to the present invention;
FIG. 3 is an equivalent circuit diagram of the signal isolator of the present invention;
FIG. 4 is a simulation data diagram of an embodiment of the present invention.
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Detailed Description
The invention will be described in detail below with reference to the accompanying drawings, wherein for the purpose of illustrating embodiments of the invention, the drawings showing the structure of the device are not to scale but are partly enlarged, and the schematic drawings are only examples, and should not be construed as limiting the scope of the invention. It should be noted that the drawings are in simplified form and are not to precise scale, which is provided for the purpose of facilitating and clearly facilitating the description of the embodiments of the present invention. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated; the terms "front," "back," "bottom," "upper," "lower," and the like refer to an orientation or positional relationship relative to an orientation or positional relationship shown in the drawings, which is for convenience and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
As shown in fig. 1, the signal isolator of the present embodiment includes a signal input portion 1 and a signal output portion 2 connected together, and the signal input portion 1 is a block made of a piezoelectric material, and the block may be a cube or a rectangular parallelepiped. A first electrode 1-1 is provided on one surface of the signal input portion 1, and the first electrode 1-1 is grounded for conducting an electrical signal. A second electrode 1-2 is arranged on the other surface of the signal input part 1 opposite to the surface provided with the first electrode 1-1, and the second electrode 1-2 is used as a signal input end of the signal isolator and is used for accessing input signals such as current, voltage and the like. The first electrode 1-1 is located on the connection interface of the signal input section 1 and the signal output section 2. Because the first electrode 1-1 is grounded, when the input voltage is too high and the piezoelectric material cannot bear the too high input voltage and break down, the input signal is grounded, the high voltage cannot be transmitted to the output end, the electrical isolation effect of the signal is realized, and the effect of high-voltage isolation is achieved. The first electrode 1-1 and the second electrode 1-2 of this embodiment are both end face electrodes in the form of thin films, and the electrodes respectively cover two opposite surfaces of the piezoelectric material block.
The signal output part 2 is a square block formed by alternately overlapping the piezoelectric material layer 2-1 and the electrode material layer 2-2, the signal output part 2 and the signal input part 1 are both of block structures, the length and the width are the same, and the thickness (height) can be the same or different. Specifically, the length (dimension in the X-axis direction in fig. 1) of the two block structures may be 0 to 10mm, the width (dimension in the Y-axis direction in fig. 1) may be 0 to 10mm, and the thickness (dimension in the Z-axis direction in fig. 1) may be 0 to 10mm (all values are not included). The plane of the piezoelectric material layer 2-1 and the plane of the electrode material layer 2-2 are both perpendicular to the connection interface (the surface on which the first electrode is located) between the signal input part 1 and the signal output part 2. The outermost layer of the signal output part 2 of the present embodiment is a piezoelectric material layer 2-1, and the electrode material layer 2-2 is located inside the signal output part 2. The piezoelectric material layer 2-1 is located at the outermost layer of the signal output section 2 of the multilayer structure, and has an electrical insulating function. The electrode material layer 2-2 forms a first internal electrode 2-2a and a second internal electrode 2-2b in the signal output section 2, and the first electrode 1-1 and the first and second internal electrodes 2-2a and 2-2b are each used for conducting an electric signal inside the piezoelectric material. In order to extract the electrical signal between the layers in the multilayer structure of the signal output part 2, the first internal electrode 2-2a and the second internal electrode 2-2b of this embodiment adopt the structure of an interdigital electrode, the first internal electrode 2-2a is a positive electrode which is used as the signal output end of the signal isolator for outputting signals, the second internal electrode 2-2b is a negative electrode which is in short-circuit contact with the first electrode 1-1 of the signal input part 1 and is commonly grounded. The interdigital electrode is used as an inner electrode, a positive electrode surface and a negative electrode surface which are alternated can be formed in the horizontal direction of the signal output part 2, and the interdigital electrode has the advantage of being flexibly adjusted according to the performance of the device, for example, when the thickness of each layer in the multilayer structure of the signal output part 2 is adjusted according to the performance parameter index of the device, the interdigital electrode can also flexibly adapt to the adjustment, thereby being beneficial to ensuring the stable output of the signal output part. However, the inner electrodes may be interdigital electrodes, or may be in other electrode forms.
The signal input part 1 and the signal output part 2 can be connected together by co-firing, bonding, soldering, and the like. Fig. 2 is a schematic diagram of the principle of the isolator based on piezoelectric strain coupling according to the present invention, and the signal isolator according to the present invention utilizes inverse piezoelectric effect of piezoelectric material and coupling between piezoelectric effects to realize electrical isolation. The piezoelectric material in the signal input part 1 and the piezoelectric material in the signal output part 2 work in different piezoelectric coupling modes, the piezoelectric material in the signal input part 1 generates strain under the action of input end voltage, and the piezoelectric material in the signal output part 2 generates signal output at an output end under the action of the strain coupling. That is, after the piezoelectric material of the signal input unit 1 is connected to the electrical signal such as voltage or current, strain is generated by inverse piezoelectric effect, and the strain is transmitted to the piezoelectric material layer of the signal output unit 2 through the interface coupling between the piezoelectric materials of the signal input unit and the signal output unit, and the strain of the piezoelectric material layer is converted into the electrical signal such as voltage or current under the action of piezoelectric effect, thereby realizing the signal output of voltage or current.
The piezoelectric material used in the invention can be a piezoelectric ceramic material, a piezoelectric single crystal material, a piezoelectric polymer material, and a composite structure or a composite material formed by the materials, and specifically can be as follows: one or more of PVDF, alN, quartz, liNbO3, baTiO3, znO, pb (Zr, ti) O3, pb (Mg, nb) O3-PbTiO3, pb (Mg, nb) O3-Pb (Zr, ti) O3, pb (Zn, nb) O3-PbTiO3, pb (Zn, nb) O3-Pb (Zr, ti) O3, or BiScO3-PbTiO 3. Each electrode is a film electrode and can be prepared by silver paste annealing, co-firing, evaporation or magnetic control, and the used material is one or more of Au, ag, al, cu, pt, W, fe, co, ni or Ti.
The output voltage and the input voltage of the signal isolator have a certain proportional relation when the signal isolator works, and the ratio of the input voltage and the output voltage of the signal isolator is related to parameters such as the piezoelectric coefficient of a piezoelectric material, the volume ratio of the piezoelectric material in a signal input part and the piezoelectric material in a signal output part, the thickness ratio of a piezoelectric material layer and an electrode material layer in the signal output part, the number of layers of the signal output part and the like. Alternatively, the piezoelectric coefficient of the selected piezoelectric material of the present invention may be 0 to 2000pC/N. The ratio of the volume of the piezoelectric material in the signal output part to the volume of the piezoelectric material in the signal input part may be 0.01 to 10. The thickness ratio of the piezoelectric material layer and the electrode material layer in the signal output portion may be 0.1 to 100. The working performance of the isolator can be optimized through the design of the parameters, for example, the ratio (intensity ratio) of the input/output voltage of the signal isolator is changed through designing the number of layers of the signal output part, the thickness of each layer, selecting the corresponding piezoelectric material and the like, so that the amplitude regulation and control of the signal are realized. When the number of layers of the piezoelectric material in the signal output section of the present invention is 3 or more (including two layers for insulation on the outermost sides), a basic signal isolation function can be realized. When the piezoelectric material is used, a good isolation function can be realized, the ratio of input/output voltage can be accurately set, and the number of layers of the piezoelectric material is changed within the range of 3-1000. When the circuit is applied, when no voltage or current is input, an initial bias value can be set at the output end to represent a '0' state; when the input end is connected with voltage or current, the output end has output voltage or output current, and the state can be represented by a 1 state.
The piezoelectric materials in the signal input part and the signal output part of the signal isolator of the invention need to be polarized by an electric field, and the size of the electric field during polarization is 2-3 times of the coercive field of the piezoelectric materials. When the piezoelectric material of the signal input portion is subjected to electric field polarization, the direction of the electric field is perpendicular to the plane in which the end face electrodes (first and second electrodes) are located (i.e., the direction of the electric field is parallel to the thickness direction of the signal input portion, as shown by arrow a in fig. 1), and the electric field is directly applied to the first electrode and the second electrode of the signal input portion. When the piezoelectric material of the signal output section is electric field polarized, the direction of the electric field is parallel to the thickness direction of the gap between the positive and negative interdigital electrodes (see the enlarged view of part a of fig. 1), and the thickness direction of the gap between the positive and negative interdigital electrodes is also the thickness direction of the piezoelectric material layer 2-1. Due to the structure of the interdigital electrode, the polarization directions of the adjacent two piezoelectric material layers in the signal output part are opposite, and the polarization directions of the piezoelectric material layers are in the directions indicated by white arrows in fig. 1.
The following explains the preparation method of the signal isolator of this embodiment, including the following steps:
step 1, preparing a piezoelectric material layer 2-1 of a signal output part 2 by utilizing tape casting and low-temperature co-firing processes, and leading out a first internal electrode 2-2a and a second internal electrode 2-2b (positive and negative electrodes) in an interdigital mode on the side surface of the piezoelectric material layer 2-1;
step 2, processing the piezoelectric material into a signal input part 1 with a required size and shape, and ultrasonically cleaning the signal input part with ultrapure water;
step 3, plating a first electrode 1-1 and a second electrode 1-2 on two opposite surfaces of the signal input part 1 in a silver paste annealing or evaporation or magnetron sputtering mode;
step 4, combining the signal input part 1 and the signal output part 2 together in a co-firing or welding or bonding mode, and the like, wherein the first electrode 1-1 is positioned on a bonding surface (connecting interface) of the two;
step 5, grounding the second inner electrode 2-2b and the first electrode 1-1 together;
step 6, applying voltage on the first inner electrode 2-2a and the second inner electrode 2-2b to polarize the piezoelectric material of the signal output part 2; dividing the voltage value by the thickness of each piezoelectric material layer in the multilayer structure to obtain an electric field (intensity), namely, the electric field (intensity) = the voltage value is divided by the thickness of the single-layer piezoelectric material layer 2-1, the size of the electric field (intensity) = the thickness of the voltage value is 2-3 times of the coercive field of the piezoelectric material used by the signal output part 2, when the piezoelectric material of the signal output part is subjected to electric field polarization, the direction of the electric field is parallel to the thickness direction of the piezoelectric material layer in the signal output part, and the polarization directions of the adjacent two piezoelectric material layers are opposite;
step 7, applying voltage on the first electrode 1-1 and the second electrode 1-2 to polarize the piezoelectric material of the signal input part 1; dividing the voltage value by the thickness of the signal input part to obtain an electric field (intensity), namely, the electric field intensity = the voltage value divided by the thickness of the signal input part, wherein the electric field intensity is 2-3 times of the coercive field of the piezoelectric material used by the signal input part 1, and when the signal input part is subjected to electric field polarization, the direction of the electric field is vertical to the plane of the end surface electrode;
and 8, the first inner electrode 2-2a is used as the output end of the signal separator, and the second electrode 1-2 is used as the input end of the signal separator, so that the transmission of voltage or current signals under electrical isolation can be realized.
The execution sequence of each step in the preparation method can be changed correspondingly according to production requirements, and if the preparation sequence of the signal output part and the signal input part has no specific requirements, the signal output part can be prepared first, and the signal input part can be prepared first; the order of the steps of poling the piezoelectric material may also be varied, without the sequence of these steps affecting the structure of the final product.
FIG. 3 is an equivalent circuit diagram of the signal isolator of the present invention, where R in FIG. 3 is an equivalent resistor, L is an equivalent inductor, C is an equivalent capacitor, and C is d1 Is an input capacitance, C d2 For the output capacitance, there are:
Figure BDA0003661695330000081
Figure BDA0003661695330000082
Figure BDA0003661695330000083
Figure BDA0003661695330000084
Figure BDA0003661695330000085
Figure BDA0003661695330000086
t in the formula 1 Is the total thickness of the piezoelectric material of the signal input part, t 2 Is the total thickness of the piezoelectric material of the signal output section, r is the length of the signal isolator (polarization direction of the piezoelectric material of the signal output section), σ is the poisson's ratio, ρ is the density of the piezoelectric material,
Figure BDA0003661695330000087
is relative dielectric constant, Q m Is a mechanical quality factor, d 31 Is the transverse piezoelectric constant of the piezoelectric material,
Figure BDA0003661695330000088
is a compliance coefficient, f 0 Is the resonant frequency.
Under the resonance state of the circuit, the ratio A of the output voltage and the input voltage of the signal isolator is as follows:
Figure BDA0003661695330000089
conversion efficiency η 0 Comprises the following steps:
Figure BDA00036616953300000810
in the formula L Is a load resistor.
In the non-resonant state (quasi-static state), the ratio of the output voltage (Vout) and the input voltage (Vin) of the signal isolator can be derived by the derivation of the piezoelectric equation:
Figure BDA00036616953300000811
wherein t is the thickness of the single-layer piezoelectric material layer in the signal output part, t 0 N is the number of the smallest repeating units (number of layers) of the piezoelectric material and the electrode material adjacent to each other in the signal output section, d 31 Is the transverse piezoelectric constant of the piezoelectric material, d 33 Is the longitudinal piezoelectric constant of the piezoelectric material.
Finite element simulation verification is carried out on the signal isolator in the embodiment of the invention by adopting COMSOL Multiphysics software, the signal input part in the embodiment is of a single-layer structure, and the size of the signal input part is as follows: 4.5mm long, 4.5mm wide and 1mm thick. The signal output part is of a multilayer structure, and the size of the signal output part is as follows: the length is 4.5mm, the width is 4.5mm, the thickness is 3mm, the structure is a multilayer structure along the length direction, and the thickness of each layer is 0.5mm. The piezoelectric material layer in the signal output section was 9 layers each having a thickness of 0.5mm. The layers of electrode material are 8 layers alternating between 9 layers of piezoelectric material. The electrode material is a metal material, and is an equipotential body when electrified, and the influence of the thickness of the equipotential body can be ignored. The adopted piezoelectric material is PZT-5H, and the electrode material is copper. The boundary surface in the horizontal direction of each layer of piezoelectric material is defined as an electrode material in simulation, and the piezoelectric material is fully polarized by default and does not need to be polarized again.
FIG. 4 is a diagram illustrating a theoretical verification of the simulation output result of the isolator of the present invention, and it can be seen from FIG. 4 that the ratio of the output voltage Vout to the input voltage Vin of the signal isolator of the embodiment substantially conforms to the formula
Figure BDA0003661695330000091
The linear relation in (3) shows that the signal output part and the signal input part can realize good signal transmission under the condition of electrical insulation, the signals can realize one-to-one correspondence, and the coupling among different forms of piezoelectric strain is utilized to realize signal isolation.
The invention realizes the transmission of signals under the condition of electrical isolation by utilizing the coupling among different forms of piezoelectric strain, has the characteristics of small volume, low power consumption, long service life and the like, and is a novel high-speed and low-power consumption signal isolator. Compared with the existing isolator, the signal isolator based on piezoelectric strain coupling has the following advantages:
(1) The invention has low power consumption, realizes the strain coupling in the material by utilizing the high electromechanical coupling characteristic of the piezoelectric material, and does not relate to the coupling process of multiple physical fields, thereby having high energy conversion efficiency; in contrast, the magnetic coupling isolator needs a large input current to generate a signal magnetic field, the signal magnetic field is read by the magnetic sensitive probe and then isolated and transmitted, and the process introduces great power consumption due to the existence of the input current;
(2) The service life of the signal isolator based on piezoelectric strain coupling is determined by the stability of the polarization vector inside the piezoelectric material, generally speaking, the polarization vector inside the piezoelectric material can be stored for decades, and compared with a luminescent material in a photoelectric coupler, the signal isolator has longer service life;
(3) The piezoelectric strain coupling-based isolator is high in integration level, functions of the piezoelectric strain coupling-based isolator are realized by means of strain coupling of different forms in materials, conversion of physical quantities such as light-electricity and magnetism-electricity is not involved, device components are few, and high integration level can be realized.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A signal isolator, comprising:
the signal input part is a block made of piezoelectric materials, a first electrode and a second electrode are respectively arranged on two opposite surfaces of the block, the first electrode is grounded, and the second electrode is connected with an input signal;
the signal output part is a block formed by alternately overlapping piezoelectric material layers and electrode material layers, the plane of the piezoelectric material layers and the plane of the electrode material layers are perpendicular to the connection interface of the signal input part and the signal output part, and the first electrode is positioned on the connection interface of the signal input part and the signal output part; the electrode material layer forms a first internal electrode and a second internal electrode inside the signal output part, the first internal electrode outputs signals, and the second internal electrode is grounded.
2. The signal isolator of claim 1, wherein: the first electrode and the second electrode are film electrodes and respectively cover the surfaces of the first electrode and the second electrode.
3. The signal isolator of claim 1, wherein: the first internal electrodes and the second internal electrodes are interdigital electrodes.
4. The signal isolator of claim 1, wherein: the piezoelectric material layer is located at an outermost layer of the signal output section.
5. The signal isolator of claim 1, wherein: the piezoelectric material used by the piezoelectric material layers in the signal input part and the signal output part is a piezoelectric ceramic material or a piezoelectric single crystal material or a piezoelectric polymer material; and/or the material used by the first electrode and the second electrode is one or more of Au, ag, al, cu, pt, W, fe, co, ni and Ti; and/or the material used by the electrode material layer is one or more of Au, ag, al, cu, pt, W, fe, co, ni and Ti.
6. The signal isolator of claim 1, wherein: the volume ratio of the piezoelectric material in the signal output part to the piezoelectric material in the signal input part is 0.01-10; and/or the thickness ratio of the piezoelectric material layer to the electrode material layer in the signal output part is 0.1-100.
7. The signal isolator of claim 1, wherein: and when the signal input part is subjected to electric field polarization, the direction of the electric field is vertical to the plane of the first electrode.
8. The signal isolator of claim 1, wherein: when the piezoelectric material layers in the signal output part are subjected to electric field polarization, the direction of an electric field is parallel to the thickness direction of the piezoelectric material layers, and the polarization directions of the two adjacent piezoelectric material layers are opposite.
9. The signal isolator of claim 7 or 8, wherein: the size of the electric field is 2-3 times of the coercive field of the used piezoelectric material when the electric field is polarized.
10. A method of manufacturing a signal isolator as claimed in any one of claims 1 to 9, comprising the steps of:
step 1, preparing a piezoelectric material layer of a signal output part, and preparing a first internal electrode and a second internal electrode on the side surface of the piezoelectric material layer;
step 2, processing the piezoelectric material into a square signal input part;
step 3, preparing a first electrode and a second electrode on two opposite surfaces of the signal input part;
step 4, combining the signal input part and the signal output part together, wherein the first electrode is positioned on a connecting interface of the signal input part and the signal output part;
step 5, grounding the second inner electrode and the first electrode;
step 6, applying voltage on the first internal electrode and the second internal electrode to polarize the piezoelectric material of the signal output part;
step 7, applying voltage on the first electrode and the second electrode to polarize the piezoelectric material of the signal input part;
and 8, taking the first inner electrode as an output end of the signal separator, and taking the second electrode as an input end of the signal separator.
CN202210579256.7A 2022-05-25 2022-05-25 Signal isolator and preparation method thereof Pending CN115148892A (en)

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Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE895397A (en) * 1981-12-21 1983-04-15 Gte Atea Nv MECHANISCH GEKOPPELDE ELEKTRISCHE ISOLATOR MET MEERVOUDIGE UITGANG EN UITGANGSSTABILISATIE
CN1278950A (en) * 1997-09-04 2001-01-03 摩托罗拉公司 Piezoelectric trazsformer with voltage feedback
US6417743B1 (en) * 1999-09-21 2002-07-09 Rockwell Science Center, Llc Micro electromechanical isolator
JP2002261340A (en) * 2001-02-27 2002-09-13 Kyocera Corp Laminated piezoelectric element and injection device
CN1604354A (en) * 2004-11-03 2005-04-06 西安康鸿信息技术股份有限公司 Polarity interleaving type piezo-electric ceramic transformer having reversed phase twin-output
JP2007281164A (en) * 2006-04-06 2007-10-25 Olympus Medical Systems Corp Piezoelectric transformer, controlling method of same transformer, and manufacturing method of same transformer
JP2008011483A (en) * 2006-05-30 2008-01-17 Kyocera Corp Acoustic wave resonator, filter, and communication equipment
CN102130291A (en) * 2010-12-27 2011-07-20 广州金升阳科技有限公司 Piezoelectric ceramic wafer type isolating signal transformer and manufacturing method thereof
CN102130290A (en) * 2010-12-27 2011-07-20 广州金升阳科技有限公司 Isolated Rosen type piezoelectric ceramic transformer
CN103999312A (en) * 2011-10-06 2014-08-20 凯萨·拉德朗·德古瓦拉 Input/output power and signal transfer isolator device
CN204538088U (en) * 2012-11-13 2015-08-05 株式会社村田制作所 Piezoelectric transformer
CN105762272A (en) * 2016-04-29 2016-07-13 南京信息工程大学 Zinc oxide nano array strain sensor based on giant piezoelectric effects and measuring circuit, calibration system and preparation method
JP6019379B1 (en) * 2016-03-11 2016-11-02 株式会社エム・システム技研 Pulse isolator using piezoelectric transformer
CN106158371A (en) * 2016-08-04 2016-11-23 清华大学 Multilayer ceramic capacitor
CN109888086A (en) * 2019-02-27 2019-06-14 北京信息科技大学 A kind of piezoelectric transformer and preparation method thereof based on scissoring vibration
US20200271698A1 (en) * 2014-04-01 2020-08-27 Qortek, Inc. Galvanic Isolated Ceramic Based Voltage Sensors

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE895397A (en) * 1981-12-21 1983-04-15 Gte Atea Nv MECHANISCH GEKOPPELDE ELEKTRISCHE ISOLATOR MET MEERVOUDIGE UITGANG EN UITGANGSSTABILISATIE
CN1278950A (en) * 1997-09-04 2001-01-03 摩托罗拉公司 Piezoelectric trazsformer with voltage feedback
US6417743B1 (en) * 1999-09-21 2002-07-09 Rockwell Science Center, Llc Micro electromechanical isolator
JP2002261340A (en) * 2001-02-27 2002-09-13 Kyocera Corp Laminated piezoelectric element and injection device
CN1604354A (en) * 2004-11-03 2005-04-06 西安康鸿信息技术股份有限公司 Polarity interleaving type piezo-electric ceramic transformer having reversed phase twin-output
JP2007281164A (en) * 2006-04-06 2007-10-25 Olympus Medical Systems Corp Piezoelectric transformer, controlling method of same transformer, and manufacturing method of same transformer
JP2008011483A (en) * 2006-05-30 2008-01-17 Kyocera Corp Acoustic wave resonator, filter, and communication equipment
CN102130290A (en) * 2010-12-27 2011-07-20 广州金升阳科技有限公司 Isolated Rosen type piezoelectric ceramic transformer
CN102130291A (en) * 2010-12-27 2011-07-20 广州金升阳科技有限公司 Piezoelectric ceramic wafer type isolating signal transformer and manufacturing method thereof
CN103999312A (en) * 2011-10-06 2014-08-20 凯萨·拉德朗·德古瓦拉 Input/output power and signal transfer isolator device
CN204538088U (en) * 2012-11-13 2015-08-05 株式会社村田制作所 Piezoelectric transformer
US20200271698A1 (en) * 2014-04-01 2020-08-27 Qortek, Inc. Galvanic Isolated Ceramic Based Voltage Sensors
JP6019379B1 (en) * 2016-03-11 2016-11-02 株式会社エム・システム技研 Pulse isolator using piezoelectric transformer
CN105762272A (en) * 2016-04-29 2016-07-13 南京信息工程大学 Zinc oxide nano array strain sensor based on giant piezoelectric effects and measuring circuit, calibration system and preparation method
CN106158371A (en) * 2016-08-04 2016-11-23 清华大学 Multilayer ceramic capacitor
CN109888086A (en) * 2019-02-27 2019-06-14 北京信息科技大学 A kind of piezoelectric transformer and preparation method thereof based on scissoring vibration

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