CN115112636A - Photo-thermal three-dimensional feature reconstruction system and method based on phase control array laser cluster excitation - Google Patents

Photo-thermal three-dimensional feature reconstruction system and method based on phase control array laser cluster excitation Download PDF

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CN115112636A
CN115112636A CN202210784544.6A CN202210784544A CN115112636A CN 115112636 A CN115112636 A CN 115112636A CN 202210784544 A CN202210784544 A CN 202210784544A CN 115112636 A CN115112636 A CN 115112636A
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王飞
刘俊岩
孟祥林
王永辉
宋鹏
岳卓言
强桂燕
陈明君
岳洪浩
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Wuhu Robot Technology Research Institute of Harbin Institute of Technology
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Abstract

The invention provides a photo-thermal three-dimensional characteristic reconstruction system and a photo-thermal three-dimensional characteristic reconstruction method based on phase control array laser cluster excitation. The reconstruction system comprises a computer, a multi-channel data line, a first data acquisition card, a second data acquisition card, a third data acquisition card, a data acquisition card integrator, a multi-channel signal output line, a laser power supply, a cooling water pipe, a refrigerator, an optical fiber bundle, a collimating mirror, a first polaroid, a sample piece, a two-dimensional moving platform, a second polaroid, a magnetic base, a focal plane thermal infrared imager, a lifting platform, a BNC data line and an Ethernet line. The system adopts the phase control array type laser cluster to carry out active thermal loading on the sample piece, and single laser beams in the array type laser cluster can be independently controlled, so that the spatial modulation of the heat flow of the sample piece can be realized, the high-precision detection of the defect size can be realized, and the defect detection deviation is controlled within 5 percent.

Description

Photo-thermal three-dimensional feature reconstruction system and method based on phase control array laser cluster excitation
Technical Field
The invention belongs to the technical field of photo-thermal science, detection and signal processing, and particularly relates to a photo-thermal three-dimensional characteristic reconstruction system and a reconstruction method based on phase control array laser cluster excitation. The reconstruction method and the reconstruction system are suitable for the field of accurate nondestructive detection and evaluation of material defects/damages such as aerospace, microelectronics, micro-nano structures and the like.
Background
The active infrared thermal wave imaging detection technology provides an effective solution for detecting defects of metal materials, composite materials, high polymer material surfaces and shallow surfaces. However, in the conventional active infrared detection method, the internal characteristics of the near-surface layer of the material are mainly detected by adopting a surface source heat flow excitation and two-dimensional imaging mode, only the diffusion process of the heat flow along the depth direction is considered, but the plane diffusion process is often ignored, so that an illusion that the infrared thermal wave imaging detection technology can only determine the approximate position of the defect and cannot acquire the accurate edge morphology of the defect is formed in the subconscious of nondestructive testing personnel. Although the fault imaging and the defect three-dimensional reconstruction are realized by the technologies such as dynamic thermal tomography and the like, the fault detection is still realized by utilizing the one-dimensional diffusion interference characteristic of the thermal wave along the depth direction, and the problems of poor surface defect detection effect, low defect plane size precision and the like exist in the type of fault detection method. The infrared detection method based on point/line heat source excitation utilizes three-dimensional diffusion of heat flow, has good detection effect on surface defects, can realize effective detection of defect edges, and has the defects of low detection efficiency, poor signal-to-noise ratio of internal defect detection and the like. Therefore, the traditional active infrared detection method is difficult to realize the non-contact on-line accurate three-dimensional reconstruction detection requirement of defect forms and scale characteristics; how to fuse the heat flow loading advantages of a surface heat source and a point/line heat source, the accurate and efficient detection of depth type and surface type defects is guaranteed, meanwhile, the heat wave three-dimensional direction heat diffusion process can be fully considered, the three-dimensional high-resolution tomography of the internal state is realized by utilizing heat wave diffusion interference and diffraction characteristics, and the bottleneck problem of accurate detection of an infrared heat wave imaging detection technology is expected to be solved.
In the existing research, which Yun et al (patent number: CN201510124036.5) invented a microwave step thermal imaging detection and tomography method and system, and through theoretical analysis and test, the quantitative relation between characteristic value and depth was established, and the depth of unknown defect was quantified; and realizing tomography in different depth ranges by using the temperature rise rates in different time ranges. The method realizes tomography by utilizing the quantitative relation between the characteristic value and the depth, only considers the diffusion process in the depth direction, and the proposed tomography technology has lower reconstruction precision on the defect edge. Wangceng et al (patent number: CN201610841827.4) invented a nondestructive testing method based on temperature field tomography, which first considers the testing process as the depth direction heat conduction process of the temperature heat source to obtain the temperature field rigidity coefficient matrix, and then selects different heat insulation protection device models according to the different tested parts; secondly, the surface temperature of the exposed part of the detected part is obtained, different points of the surface temperature to be obtained are selected and determined according to the size of the detected part, and the three-dimensional image is reconstructed by utilizing the temperature field rigidity coefficient matrix and adopting a generalized vector sampling mode matching method. The method is still based on the tomography in the one-dimensional depth direction, and the three-dimensional diffusion process of heat flow is not considered. Liujun rock and the like (patent number: CN201611054089.5
CN201710207453.5) in two patents, respectively, a system and a method for shortening correlation thermal chromatography and dynamic thermal chromatography detection are proposed, both of which only establish the relationship between thermal wave characteristics and depth direction, and the edge identification accuracy is poor. Chenli (patent number: CN201310130694.6) invented a laser scanning thermal wave tomography system and method, which adopts high power laser beam, and uses laser scanning device to quickly scan the surface of sample, and implements pulse thermal excitation, and adopts a method similar to dynamic thermal chromatography to implement three-dimensional morphology characterization of defect, and in essence of the method, said method is identical to dynamic thermal chromatography principle. What Yun et al (patent No. CN201510034897.4) invented a method and system for defect detection and tomography by window scanning thermal imaging, in which a heat source and a thermal imager scan a detected object at a fixed speed, the heat source heats the detected object during the scanning process, and the thermal imager records the temperature information of the detected object after the surface is heated, which changes with time, as the original data; reconstructing the original data to obtain a temperature change sequence of each point of the detected object as a detection signal; adopting or generating a specific signal as a reference signal; and performing time domain, frequency domain and cross-correlation processing on the detection signal and the reference signal, and extracting a time domain characteristic value, a frequency domain characteristic value, a cross-correlation amplitude characteristic value and a cross-correlation phase characteristic value to realize defect detection and tomography. According to the method, the thermal wave signal time-frequency transformation is considered, and the spatial domain transformation is not considered, so that the defect edge cannot be effectively identified.
The invention relates to a photo-thermal three-dimensional feature reconstruction method and a photo-thermal three-dimensional feature reconstruction system based on phase control array laser cluster excitation, which are used for realizing three-dimensional accurate detection of defect size/morphology by fully utilizing the three-dimensional diffusion characteristic of heat flow, and can realize efficient accurate detection and three-dimensional feature reconstruction aiming at composite materials, metal materials and high polymer superficial layer defects (less than 4mm, the diameter/depth ratio is more than 1.5) based on a heat flow interference and diffraction characteristic mechanism and an infrared thermal wave imaging detection theory.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a photo-thermal three-dimensional characteristic reconstruction system and a reconstruction method based on phase control array laser cluster excitation. The invention is suitable for the field of nondestructive testing of conductive materials such as aerospace, microelectronics, micro-nano structures and the like.
The invention is realized by the following technical scheme, and provides a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation, which comprises a computer, a multi-channel data line, a first data acquisition card, a second data acquisition card, a third data acquisition card, a data acquisition card integrator, a multi-channel signal output line, a laser power supply, a cooling water pipe, a refrigerator, an optical fiber cluster, a collimating mirror, a first polaroid, a sample piece, a two-dimensional mobile platform, a second polaroid, a magnetic base, a focal plane thermal infrared imager, a lifting platform, a BNC data line and an Ethernet line; the computer is provided with three signal ends, one signal output end of the computer is connected with the signal input end of the data acquisition card integrator through a multi-channel data line, the second signal input end of the computer is connected with the signal output end of the focal plane thermal infrared imager through an Ethernet line, the third signal output end of the computer is connected with the input end of the focal plane thermal infrared imager through a BNC data line, the first data acquisition card, the second data acquisition card and the third data acquisition card are arranged in the data acquisition card integrator through clamping grooves, the output end of the data acquisition card integrator is connected with the power input end of the laser through a multi-channel signal output line so as to control the power modulation change of the laser, the power input end of the laser is connected with the refrigerator through a cooling water pipe, and the power output end of the laser is connected with the laser collimating mirror through an optical fiber bundle, the laser collimating lens is connected with the first polaroid, the sample piece is placed on the two-dimensional moving platform, the infrared heat radiation signal radiated by the sample piece is cast through the second polaroid and transmitted to the focal plane thermal infrared imager, the second polaroid is fixed through the magnetic base, and the focal plane thermal infrared imager is placed on the lifting platform.
The invention also provides a reconstruction method of the photo-thermal three-dimensional feature reconstruction system based on the phase control array laser cluster excitation, and the reconstruction method specifically comprises the following steps:
the method comprises the following steps: defining a sample to be detected, and placing the sample on a two-dimensional mobile platform;
step two: starting a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation;
step three: starting a laser power supply and a refrigerator, and further maintaining the working temperature of the laser power supply to a certain temperature so as to ensure the normal operation of the laser equipment;
step four: starting a focal plane thermal infrared imager and imaging a test sample in real time, starting an array laser to irradiate the sample, and adjusting a two-dimensional mobile platform to ensure that the irradiation positions of phased array laser beams are all in the field of vision of the focal plane thermal infrared imager;
step five: the phase control array laser beams are arranged in an NxN matrix, wherein N xN analog signal output channels are arranged on the first data acquisition card, the second data acquisition card and the third data acquisition card, and each laser beam is controlled by an independent analog signal;
step six: extracting the phase characteristics of the surface radiation signals by adopting a phased array space frequency modulation signal-based fractional Fourier correction method;
step seven: extracting a phase section curve of the characteristic image vertical to the space fluctuation direction, and setting the space fluctuation direction as
Figure BDA0003719845110000031
M is 0,1,2, … M; repeating the fifth step, the sixth step and the seventh step until M is equal to M and stops;
step eight: performing one-dimensional Fourier transform on the acquired section curves in different fluctuation directions, performing multidirectional reconstruction on the section curves, and acquiring a characteristic image of a specific depth;
step nine: varying different initial frequencies f s And a fixed termination frequency f e Obtaining characteristic information of different depths, and repeating the steps from five to eight, and finallyAnd finally, obtaining the characteristic image sequences of different depths, carrying out binarization reconstruction on the characteristic images of different depths, and finally obtaining the high-precision reconstruction of the three-dimensional structure of the test sample.
Further, in the second step, the computer, the first data acquisition card, the second data acquisition card, the third data acquisition card and the data acquisition card integrator are started.
Further, in step three, the laser power supply operating temperature was maintained to 20 ℃.
Further, in the fourth step, the polarizing film arranged on the laser is consistent with the polarizing direction of the polarizing film in front of the thermal infrared imager of the focal plane, so that effective filtering of signals is realized.
Further, in step five, the spatial fluctuation direction is set to
Figure BDA0003719845110000046
The intensity of the laser light in the first column perpendicular to the direction of the wave motion is modulated as follows,
Figure BDA0003719845110000041
wherein Q (t) is the first column laser intensity perpendicular to the wave direction, Q 0 Is the peak light intensity, f s Is an initial frequency, f e Is a stop frequency, and f s <f e T is scanning time;
the wave equations of the laser beams in the second and nth rows are,
Figure BDA0003719845110000042
where n is the nth row of laser beams, the surface radiation signal obtained in this spatially fluctuating state is S (t).
Further, the phased array spatial frequency modulation signal-based fractional order fourier correction method specifically includes:
Figure BDA0003719845110000043
Figure BDA0003719845110000044
Figure BDA0003719845110000045
in the formula, K p Is a fractional Fourier transform kernel function, alpha is a rotation angle, p is a Fourier series, phi FrFT Is the FrFT characteristic phase.
Further, after the ninth step, the method further comprises:
step ten: and after the test is finished and after 5 minutes, turning off a laser power supply, a water-cooling refrigerator, a data acquisition card and focal plane thermal infrared imager equipment.
The invention further provides an electronic device, which comprises a memory and a processor, wherein the memory stores a computer program, and the processor realizes the steps of the method for reconstructing the photo-thermal three-dimensional feature reconstruction system based on the laser beam bundle excitation of the phase control array when executing the computer program.
The invention also provides a computer readable storage medium for storing computer instructions, which when executed by a processor implement the steps of the reconstruction method of the photo-thermal three-dimensional feature reconstruction system based on the phased control array laser bundle excitation.
The invention has the beneficial effects that:
(1) the invention discloses a photo-thermal three-dimensional feature reconstruction method based on phase control array laser cluster excitation, which can fully utilize three-dimensional diffusion of heat flow and accurately reconstruct defects from a two-dimensional angle by changing different space fluctuation states of the heat flow compared with the traditional detection methods such as pulse heat wave imaging, phase-locked heat wave imaging, heat wave radar imaging and the like, thereby improving the detection depth and the detection efficiency, and simultaneously realizing material quantization representation and three-dimensional chromatographic reconstruction of a geometric structure, wherein aiming at realizing high-efficiency accurate detection and three-dimensional feature reconstruction aiming at composite materials, metal materials and high polymer superficial defects (less than 4mm, and the diameter/depth ratio is more than 1.5);
(2) the invention discloses a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation, which adopts a phase control array laser cluster to carry out active thermal loading on a sample piece, wherein single laser beams in the array laser cluster can be independently controlled, so that the spatial modulation of the heat flow of the sample piece can be realized, the high-precision detection of the defect size can be realized, and the defect detection deviation is controlled within 5 percent.
Drawings
FIG. 1 is a schematic diagram of a photo-thermal three-dimensional feature reconstruction method based on phase control array laser cluster excitation;
FIG. 2 is a structural diagram of a photo-thermal three-dimensional feature reconstruction system based on phase control array laser cluster excitation;
FIG. 3 is a diagram illustrating the distribution of heat flow and the reconstruction of defects by phased array spatial modulation.
In the figure: the system comprises a computer 1, a 2-multichannel data line, a 3-first data acquisition card, a 4-second data acquisition card, a 5-third data acquisition card, a 6-data acquisition card integrator, a 7-multichannel signal output line, an 8-laser power supply, a 9-cooling water pipe, a 10-refrigerator, an 11-optical fiber bundle, a 12-collimating mirror, a 13-first polaroid, a 14-sample piece, a 15-two-dimensional moving table, a 16-second polaroid, a 17-magnetic base, an 18-focal plane infrared thermal imager, a 19-lifting table, a 20-BNC data line and a 21-Ethernet line.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention aims to provide a photo-thermal three-dimensional feature reconstruction method and a photo-thermal three-dimensional feature reconstruction system based on phase control array laser cluster excitation, which aim to solve the problems that the existing infrared thermal wave chromatography detection technology (dynamic thermal tomography, shortened related thermal tomography, laser scanning thermal wave chromatography, window scanning thermal imaging defect detection, chromatography and the like) only utilizes a thermal wave diffusion process along the depth one-dimensional direction and does not consider the defect of a heat flow transverse diffusion process, and the photo-thermal three-dimensional feature reconstruction method (or the technology) based on the phase control array laser cluster excitation integrates various technical fields of time domain/frequency domain/space domain heat flow modulation, multi-dimensional feature extraction, a thermal wave interference/diffraction characteristic mechanism, thermal wave dispersion characteristics and the like, and can realize the aim at the shallow surface defects (less than 4 mm) of composite materials, metal materials and high molecular polymers, diameter/depth ratio > 1.5) and three-dimensional feature reconstruction.
The invention provides a photo-thermal three-dimensional feature reconstruction method based on phase control array laser cluster excitation, and the basic principle of the method is shown in figure 1. The method adopts an NxN array laser cluster to carry out active thermal loading on a test piece, wherein the light intensity of a single laser beam in the array laser cluster can be independently controlled, the array laser can be controlled to realize space fluctuation change through multi-channel analog signal output of a data acquisition card (function generator function), and different space fluctuation change directions are changed (namely, different space fluctuation change directions are changed)
Figure BDA0003719845110000061
Angle) can make full use of heat flow three-dimensional diffusion to realize multi-directional accurate characterization of a defect plane. According to the dispersion characteristics of the thermal wave, at a certain fixed angle
Figure BDA0003719845110000062
And then, different frequencies are changed to extract different depth information of the defect, and finally, high-precision reconstruction of the defect scale can be realized from a three-dimensional angle.
With reference to fig. 1-3, the invention provides a photo-thermal three-dimensional feature reconstruction system based on phase control array laser cluster excitation, which comprises a computer, a multi-channel data line, a first data acquisition card, a second data acquisition card, a third data acquisition card, a data acquisition card integrator, a multi-channel signal output line, a laser power supply, a cooling water pipe, a refrigerator, an optical fiber cluster, a collimating mirror, a first polarizer, a sample piece, a two-dimensional mobile platform, a second polarizer, a magnetic base, a focal plane infrared thermal imager, a lifting platform, a BNC data line and an ethernet line; the computer is provided with three signal ends, one signal output end of the computer is connected with the signal input end of the data acquisition card integrator through a multi-channel data line, the second signal input end of the computer is connected with the signal output end of the focal plane thermal infrared imager through an Ethernet line, the third signal output end of the computer is connected with the input end of the focal plane thermal infrared imager through a BNC data line, the first data acquisition card, the second data acquisition card and the third data acquisition card are arranged in the data acquisition card integrator through clamping grooves, the output end of the data acquisition card integrator is connected with the power input end of the laser through a multi-channel signal output line so as to control the power modulation change of the laser, the power input end of the laser is connected with the refrigerator through a cooling water pipe, and the power output end of the laser is connected with the laser collimating mirror through an optical fiber bundle, the laser collimating lens is connected with the first polaroid, the sample piece is placed on the two-dimensional moving platform, the infrared heat radiation signal radiated by the sample piece is cast through the second polaroid and transmitted to the focal plane thermal infrared imager, the second polaroid is fixed through the magnetic base, and the focal plane thermal infrared imager is placed on the lifting platform.
The invention also provides a reconstruction method of the photo-thermal three-dimensional feature reconstruction system based on the phase control array laser cluster excitation, and the reconstruction method specifically comprises the following steps:
the method comprises the following steps: defining a sample to be detected, and placing the sample on a two-dimensional mobile platform;
step two: starting a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation;
step three: starting a laser power supply and a refrigerator, and further maintaining the working temperature of the laser power supply to a certain temperature so as to ensure the normal operation of the laser equipment;
step four: starting a focal plane thermal infrared imager and imaging a test sample in real time, starting an array laser to irradiate the sample, and adjusting a two-dimensional mobile platform to ensure that the irradiation positions of phased array laser beams are all in the field of vision of the focal plane thermal infrared imager;
step five: the phase control array laser beams are arranged in an NxN matrix, wherein N xN analog signal output channels are arranged on the first data acquisition card, the second data acquisition card and the third data acquisition card, and each laser beam is controlled by an independent analog signal;
step six: extracting the phase characteristics of the surface radiation signals by adopting a phased array space frequency modulation signal-based fractional Fourier correction method;
step seven: extracting a phase section curve of the characteristic image vertical to the space fluctuation direction, and setting the space fluctuation direction as
Figure BDA0003719845110000072
M is 0,1,2, … M; repeating the fifth step, the sixth step and the seventh step until M is equal to M and stops;
step eight: performing one-dimensional Fourier transform on the acquired section curves in different fluctuation directions, performing multidirectional reconstruction on the section curves, and acquiring a characteristic image of a specific depth;
step nine: varying different initial frequencies f s And a fixed termination frequency f e And obtaining characteristic information of different depths, repeating the fifth step to the eighth step, finally obtaining characteristic image sequences of different depths, carrying out binarization reconstruction on the characteristic images of different depths, and finally obtaining the high-precision reconstruction of the three-dimensional structure of the test sample.
And in the second step, the computer, the first data acquisition card, the second data acquisition card, the third data acquisition card and the data acquisition card integrator are started.
In step three, the working temperature of the laser power supply is maintained to 20 ℃ so as to ensure the normal operation of the laser device.
In the fourth step, the polarizing film arranged on the laser is consistent with the polarizing direction of the polarizing film in front of the thermal infrared imager of the focal plane, so that the effective filtering of the signals is realized.
In step five, setting the spatial fluctuation direction as
Figure BDA0003719845110000073
The intensity of the laser light in the first column perpendicular to the direction of the wave motion is modulated as follows,
Figure BDA0003719845110000071
wherein Q (t) is the first column laser intensity perpendicular to the wave direction, Q 0 Is the peak light intensity, f s Is an initial frequency, f e Is a stop frequency, and f s <f e T is scanning time;
the wave equations of the laser beams in the second and nth rows are,
Figure BDA0003719845110000081
where n is the nth row of laser beams, the surface radiation signal obtained in this spatially fluctuating state is S (t).
The phased array space frequency modulation signal-based fractional Fourier correction method specifically comprises the following steps:
Figure BDA0003719845110000082
Figure BDA0003719845110000083
Figure BDA0003719845110000084
in the formula, K p Is a fractional Fourier transform kernel function, alpha is a rotation angle, p is a Fourier series, phi FrFT Is the FrFT characteristic phase.
After the ninth step, the method further comprises the following steps:
step ten: and after the test is finished and after 5 minutes, turning off a laser power supply, a water-cooling refrigerator, a data acquisition card and focal plane thermal infrared imager equipment.
Examples
The computer 1 of the invention is provided with three signal terminals, one signal output terminal of the computer 1 is connected with the signal input terminal of a data acquisition card integrator 6 through a multi-channel data line 2, the second signal input terminal of the computer 1 is connected with the signal output terminal of a focal plane thermal infrared imager 18 through an Ethernet line 21, the third signal output terminal of the computer 1 is connected with the input terminal of the focal plane thermal infrared imager 18 through a BNC data line 20, a first data acquisition card 3, a second data acquisition card 4 and a third data acquisition card 5 are installed in the data acquisition card integrator 6 through a card slot, the output terminal of the data acquisition card integrator 6 is connected with the input terminal of a laser power supply 8 through a multi-channel signal output line 7, thereby controlling the power modulation change of the laser power supply 8, the input terminal of the laser power supply 8 is connected with a refrigerator 10 through a cooling water pipe 9, the output end of a laser power supply 8 is connected with a laser collimating mirror 12 through an optical fiber bundle 11, the laser collimating mirror 12 is connected with a first polaroid 13 through threaded connection, a sample piece 14 is placed on a two-dimensional moving platform 15, an infrared heat radiation signal radiated by the sample piece 14 is cast on a second polaroid 16 and transmitted to a focal plane thermal infrared imager 18, wherein the second polaroid 16 is fixed through a magnetic base, and the focal plane thermal infrared imager 18 is placed on a lifting platform 19.
According to the schematic diagram building system of the photo-thermal three-dimensional feature reconstruction system based on the phase control array laser cluster excitation, which is shown in fig. 2, in the embodiment, the model of the thermal infrared imager 18 is FLIR SC7000, the response wavelength is 3.6-5.2 μm, the maximum frame frequency is 100Hz, the adopted test piece 14 is a carbon fiber composite material with a prefabricated flat bottom hole and a debonding defect simulation function, the array laser cluster is a 7 × 7 array, and a single laser is 5W.
The method comprises the following steps: defining a sample 14 to be detected, and placing the sample 14 on a two-dimensional mobile platform 15;
step two: starting a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation, wherein the step comprises the starting of equipment such as a computer 1, a first data acquisition card 3, a second data acquisition card 4, a third data acquisition card 5, a data acquisition card integrator 6 and the like;
step three: starting the laser power supply 8 and the refrigerator 10, and further keeping the working temperature of the laser power supply 8 to 20 ℃ so as to ensure the normal operation of the laser equipment;
step four: starting a focal plane thermal infrared imager 18, imaging a test sample 14 in real time, starting an array laser to irradiate the sample 14, and adjusting a two-dimensional mobile platform 15 to ensure that the irradiation positions of phased array laser beams are all in the field of view of the focal plane thermal infrared imager 18, wherein a polaroid arranged on a laser is consistent with the polarization direction of a polaroid 16 in front of the focal plane thermal infrared imager 18, so that effective filtering of signals is realized;
step five: the phase control array laser beams are arranged in a 7 multiplied by 7 matrix, wherein the number of analog signal output channels of the first data acquisition card 3, the second data acquisition card 4 and the third data acquisition card 5 is 7 multiplied by 7, each laser beam is controlled by an independent analog signal, and at the moment, the spatial fluctuation direction is set as
Figure BDA0003719845110000093
(shown in fig. 1), the intensity of the laser light in the first column perpendicular to the direction of the wave motion is modulated as follows,
Figure BDA0003719845110000091
wherein Q (t) is the first column laser intensity perpendicular to the wave direction, Q 0 Is the peak light intensity, f s Is an initial frequency, f e To the termination frequency (f) s <f e ) And T is the scanning time. Wherein Q 0 =5000W/m 2 ,f s =0.05Hz,f e 0.1Hz and T20 s. The wave equations of the laser beams in the second and nth rows are,
Figure BDA0003719845110000092
wherein n is the nth row laser beam. The surface radiation signal is obtained as s (t) in this state of spatial fluctuation.
Step six: the method for extracting the phase characteristics of the surface radiation signal by adopting the fractional Fourier correction method based on the phased array space frequency modulation signal comprises the following steps of,
Figure BDA0003719845110000101
Figure BDA0003719845110000102
Figure BDA0003719845110000103
in the formula, K p Is a fractional Fourier transform kernel function, alpha is a rotation angle, p is a Fourier series, phi FrFT Is the FrFT characteristic phase.
Step seven: and extracting a phase section curve of the characteristic image vertical to the spatial fluctuation direction. And setting the direction of spatial fluctuation
Figure BDA0003719845110000104
m is 0,1,2, … 36. Repeating the fifth step, the sixth step and the seventh step until m is 36;
step eight: performing one-dimensional Fourier transform on the acquired section curves in different fluctuation directions, performing multidirectional reconstruction on the section curves, and acquiring a characteristic image of a specific depth;
step nine: varying different initial frequencies f s Fixed termination frequency f e The feature information of different depths can be obtained, the fifth step to the eighth step are repeated, finally, the feature image sequences of different depths can be obtained, the feature images of different depths are subjected to binarization reconstruction, and finally, the high-precision reconstruction of the three-dimensional structure of the test sample can be obtained;
step ten: and after the test is finished and after 5 minutes, turning off the laser power supply, the water-cooling refrigerator, the data acquisition card, the focal plane thermal infrared imager and other equipment.
Fig. 3 is a schematic diagram showing the phased array spatial modulation heat flow distribution and defect reconstruction results.
The invention further provides an electronic device, which comprises a memory and a processor, wherein the memory stores a computer program, and the processor realizes the steps of the reconstruction method of the photo-thermal three-dimensional feature reconstruction system based on the laser beam bundle excitation of the phase control array when executing the computer program.
The invention also provides a computer readable storage medium for storing computer instructions, which when executed by a processor implement the steps of the reconstruction method of the photo-thermal three-dimensional feature reconstruction system based on the phased control array laser bundle excitation.
The memory in the embodiments of the present application may be either volatile memory or nonvolatile memory, or may include both volatile and nonvolatile memory. The non-volatile memory may be a Read Only Memory (ROM), a Programmable ROM (PROM), an Erasable PROM (EPROM), an electrically Erasable EPROM (EEPROM), or a flash memory. Volatile memory can be Random Access Memory (RAM), which acts as external cache memory. By way of example, but not limitation, many forms of RAM are available, such as Static Random Access Memory (SRAM), Dynamic Random Access Memory (DRAM), Synchronous Dynamic Random Access Memory (SDRAM), double data rate SDRAM, enhanced SDRAM, SLDRAM, Synchronous Link DRAM (SLDRAM), and direct rambus RAM (DR RAM). It should be noted that the memories of the methods described herein are intended to comprise, without being limited to, these and any other suitable types of memories.
In the above embodiments, all or part of the implementation may be realized by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, cause the processes or functions described in accordance with the embodiments of the application to occur, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored on a computer readable storage medium or transmitted from one computer readable storage medium to another, for example, from one website, computer, server, or data center to another website, computer, server, or data center via wire (e.g., coaxial cable, fiber optic, Digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device, such as a server, a data center, etc., that incorporates one or more of the available media. The usable medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a magnetic tape), an optical medium (e.g., a Digital Video Disk (DVD)), or a semiconductor medium (e.g., a Solid State Disk (SSD)), among others.
In implementation, the steps of the above method may be performed by integrated logic circuits of hardware in a processor or instructions in the form of software. The steps of the method disclosed in connection with the embodiments of the present application may be directly implemented by a hardware processor, or implemented by a combination of hardware and software modules in a processor. The software module may be located in ram, flash memory, rom, prom, or eprom, registers, etc. storage media as is well known in the art. The storage medium is located in a memory, and a processor reads information in the memory and combines hardware thereof to complete the steps of the method. To avoid repetition, it is not described in detail here.
It should be noted that the processor in the embodiments of the present application may be an integrated circuit chip having signal processing capability. In implementation, the steps of the above method embodiments may be performed by integrated logic circuits of hardware in a processor or instructions in the form of software. The processor described above may be a general purpose processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components. The various methods, steps, and logic blocks disclosed in the embodiments of the present application may be implemented or performed. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like. The steps of the method disclosed in connection with the embodiments of the present application may be directly implemented by a hardware decoding processor, or implemented by a combination of hardware and software modules in the decoding processor. The software module may be located in ram, flash memory, rom, prom, or eprom, registers, etc. storage media as is well known in the art. The storage medium is located in a memory, and a processor reads information in the memory and completes the steps of the method in combination with hardware of the processor.
The photothermal three-dimensional feature reconstruction system and the reconstruction method based on the phase control array laser beam-gathering excitation proposed by the invention are described in detail above, and specific examples are applied in the description to explain the principle and the implementation of the invention, and the description of the above embodiments is only used to help understanding the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (10)

1. A photo-thermal three-dimensional feature reconstruction system based on phase control array laser cluster excitation is characterized by comprising a computer, a multi-channel data line, a first data acquisition card, a second data acquisition card, a third data acquisition card, a data acquisition card integrator, a multi-channel signal output line, a laser power supply, a cooling water pipe, a refrigerator, an optical fiber cluster, a collimating mirror, a first polaroid, a sample piece, a two-dimensional moving platform, a second polaroid, a magnetic base, a focal plane infrared thermal imager, a lifting platform, a BNC data line and an Ethernet line; the computer is provided with three signal ends, one signal output end of the computer is connected with the signal input end of the data acquisition card integrator through a multi-channel data line, the second signal input end of the computer is connected with the signal output end of the focal plane thermal infrared imager through an Ethernet line, the third signal output end of the computer is connected with the input end of the focal plane thermal infrared imager through a BNC data line, the first data acquisition card, the second data acquisition card and the third data acquisition card are arranged in the data acquisition card integrator through clamping grooves, the output end of the data acquisition card integrator is connected with the power input end of the laser through a multi-channel signal output line so as to control the power modulation change of the laser, the power input end of the laser is connected with the refrigerator through a cooling water pipe, and the power output end of the laser is connected with the laser collimating mirror through an optical fiber bundle, the laser collimating lens is connected with the first polaroid, the sample piece is placed on the two-dimensional moving platform, the infrared heat radiation signal radiated by the sample piece is cast through the second polaroid and transmitted to the focal plane thermal infrared imager, the second polaroid is fixed through the magnetic base, and the focal plane thermal infrared imager is placed on the lifting platform.
2. The method for reconstructing the photo-thermal three-dimensional feature reconstruction system based on the phased array laser bundle excitation according to claim 1, wherein the method specifically comprises the following steps:
the method comprises the following steps: defining a sample to be detected, and placing the sample on a two-dimensional mobile platform;
step two: starting a photo-thermal three-dimensional characteristic reconstruction system based on phase control array laser cluster excitation;
step three: starting a laser power supply and a refrigerator, and further maintaining the working temperature of the laser power supply to a certain temperature so as to ensure the normal operation of the laser equipment;
step four: starting a focal plane thermal infrared imager and imaging a test sample in real time, starting an array laser to irradiate the sample, and adjusting a two-dimensional mobile platform to ensure that the irradiation positions of phased array laser beams are all in the field of vision of the focal plane thermal infrared imager;
step five: the phase control array laser beams are arranged in an NxN matrix, wherein N xN analog signal output channels are arranged on the first data acquisition card, the second data acquisition card and the third data acquisition card, and each laser beam is controlled by an independent analog signal;
step six: extracting the phase characteristics of the surface radiation signals by adopting a phased array space frequency modulation signal-based fractional Fourier correction method;
step seven: extracting a phase section curve of the characteristic image vertical to the space fluctuation direction, and setting the space fluctuation direction as
Figure FDA0003719845100000011
M is 0,1,2, … M; repeating the fifth step, the sixth step and the seventh step until M is equal to M and stops;
step eight: performing one-dimensional Fourier transform on the acquired section curves in different fluctuation directions, performing multidirectional reconstruction on the section curves, and acquiring a characteristic image of a specific depth;
step nine: varying different initial frequencies f s And a fixed termination frequency f e And obtaining characteristic information of different depths, repeating the fifth step to the eighth step, finally obtaining characteristic image sequences of different depths, carrying out binarization reconstruction on the characteristic images of different depths, and finally obtaining the high-precision reconstruction of the three-dimensional structure of the test sample.
3. The reconstruction method according to claim 2, wherein in the second step, the computer, the first data acquisition card, the second data acquisition card, the third data acquisition card and the data acquisition card integrator are turned on.
4. The method of claim 3, wherein in step three, the laser power supply operating temperature is maintained at 20 ℃.
5. The reconstruction method according to claim 2, wherein in step four, the polarizer arranged in front of the thermal infrared imager is arranged in the same polarization direction as the polarizer in front of the focal plane infrared imager, so as to realize effective filtering of the signal.
6. The reconstruction method according to claim 2, wherein in step five, the spatial fluctuation direction is set to
Figure FDA0003719845100000025
The intensity of the laser light in the first column perpendicular to the direction of the wave motion is modulated as follows,
Figure FDA0003719845100000021
wherein Q (t) is the first column laser intensity perpendicular to the wave direction, Q 0 Is the peak light intensity, f s As an initial frequency, f e Is a stop frequency, and f s <f e T is scanning time;
the wave equations of the laser beams in the second and nth rows are,
Figure FDA0003719845100000022
where n is the nth row laser beam, and the surface radiation signal obtained in this spatially fluctuating state is S (t).
7. The reconstruction method according to claim 2, wherein the phased array spatial frequency modulation signal-based fractional Fourier correction method is specifically:
Figure FDA0003719845100000023
Figure FDA0003719845100000024
Figure FDA0003719845100000031
in the formula, K p Is a fractional Fourier transform kernel function, alpha is a rotation angle, p is a Fourier series, phi FrFT Is the FrFT characteristic phase.
8. The reconstruction method according to claim 2, further comprising, after step nine:
step ten: and after the test is finished and after 5 minutes, turning off a laser power supply, a water-cooling refrigerator, a data acquisition card and focal plane thermal infrared imager equipment.
9. An electronic device comprising a memory and a processor, the memory storing a computer program, wherein the processor implements the steps of the reconstruction method according to any one of claims 2 to 8 when executing the computer program.
10. A computer readable storage medium storing computer instructions for implementing the steps of the reconstruction method according to any one of claims 2 to 8 when executed by a processor.
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