CN115112056A - Crystal surface flatness detection equipment and use method thereof - Google Patents
Crystal surface flatness detection equipment and use method thereof Download PDFInfo
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- CN115112056A CN115112056A CN202211043170.9A CN202211043170A CN115112056A CN 115112056 A CN115112056 A CN 115112056A CN 202211043170 A CN202211043170 A CN 202211043170A CN 115112056 A CN115112056 A CN 115112056A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention relates to the field of crystal detection, in particular to crystal surface flatness detection equipment and a using method thereof, wherein the crystal surface flatness detection equipment comprises a detection platform and a detection box arranged on the detection platform; the placing frame corresponds to the detection box, and the abutting part is arranged in the placing frame; the detection system is arranged in the detection box, and the bottom of the detection box is provided with an opening; the side blocks are arranged on the side surfaces of the side blocks and are rotatably connected with the rotating holes; the driving part is used for driving the flat plate to move along the detection platform; locate the adjustment portion on the flat board, the adjustment portion is used for the corresponding frame of placing of drive to keep away from the opening, and after placing the frame and keeping away from the opening, the frame rotation 180 degrees is placed in the drive. By the aid of the method and the device, after the detection system finishes detecting one surface of the crystal, the other surface of the crystal can be rapidly switched to a position right opposite to the detection system for detection, and detection efficiency is improved.
Description
Technical Field
The invention relates to the field of crystal detection, in particular to crystal surface flatness detection equipment and a use method thereof.
Background
The crystal can realize the interaction and conversion of electricity, magnetism, light, sound, force and the like, is an important material indispensable in the development of modern science and technology, and the processed crystal generally needs to be measured for flatness.
In a patent with application number CN 202120863519.8, entitled as a tool for measuring flatness of a wafer attached to a ceramic disc, the tool includes a bearing plate, at least three rows of screw holes are distributed on the bearing plate, each row of screw holes is rotationally symmetrical with the center of the bearing plate, and the screw holes are used for fixing supporting legs; the bearing plate is also provided with an insertion hole, and the insertion hole is used for fixing the flatness tester; the stability of this frock is good, and need not change the frock and can measure the wafer surface smoothness of laminating not unidimensional on ceramic dish, nevertheless does not solve above-mentioned technical problem.
Disclosure of Invention
In view of the above, the present invention provides a crystal surface flatness detecting apparatus and a method for using the same, so as to solve the problem of low detection efficiency due to the need of taking out a crystal after one surface of the crystal is detected by a detecting system, transferring the crystal to another surface, and then placing the other surface into the detecting system for measurement after the other surface is opposite to the detecting system.
Based on the above object, the present invention provides a crystal surface flatness detection apparatus, including a detection platform and at least one detection box disposed on the detection platform, the crystal surface flatness detection apparatus further including:
the holding part is used for fixing the crystal in the placing frame;
the detection system is arranged in the detection box, an opening is formed in the bottom of the detection box, and when the crystal is located at the opening, the detection system detects the surface flatness of the crystal;
the side blocks are provided with rotating holes towards the side surface of the placing frame, and the front ends of the extension rods are rotatably connected with the rotating holes;
the driving part is used for driving the flat plate to move along the detection platform;
locate adjustment portion on the flat board, the adjustment portion with place the frame corresponding, adjustment portion are used for the corresponding frame of placing of drive to keep away from the opening to after placing the frame and keeping away from the opening, the frame rotation 180 degrees is placed in the drive.
Further, detecting system is including locating CCD camera, pointolite, lens, glass lens and the standard model in the detection case, the standard model is located the opening part, and the standard model is the slope setting, the CCD camera is just to the opening, the glass lens is located between CCD camera and the standard model, and the glass lens is the slope setting, lens are located one side of glass lens, the pointolite is just to lens, and after the light that the point light source sent passed through the lens, light was parallel state to after the reflection of glass lens, vertical shooting to crystal surface.
Further, the abutting portion includes:
the stabilizing plates are arranged in the placing frame, two opposite side walls of the placing frame are provided with stabilizing grooves, and the end parts of the stabilizing plates are in sliding connection with the stabilizing grooves;
one end and the first spring of stabilizer plate's side surface fixed connection, the other end of first spring is fixed in places the inside wall of frame.
Further, the driving part includes:
the detection platform comprises at least two first motors arranged on one side of the flat plate and a fixed seat arranged on the other side of the flat plate, wherein the first motors and the fixed seat are both fixed on the detection platform, and the fixed seat corresponds to the first motors;
one end of the first screw is fixedly connected with an output shaft of the first motor, the flat plate is provided with a screw hole, the first screw is rotatably connected with the screw hole, and the other end of the first screw is rotatably connected with the fixing seat.
Further, the wafer surface flatness detecting apparatus further includes:
the second motor is arranged on the side surface of the flat plate, and the main bevel gear is arranged on an output shaft of the second motor;
the auxiliary bevel gear is arranged on the side face of the flat plate, the rotating shaft penetrates through a shaft hole in the fixed block, and the auxiliary bevel gear is meshed with the main bevel gear;
the adjustment unit includes:
the side block is provided with a through hole penetrating through the side surface of the side block, and the second screw rod penetrates through the through hole;
the side face, facing the through hole, of the arc-shaped plate is an arc-shaped face, a first thread is arranged on the arc-shaped face, a second thread is arranged on the side surface of the second screw rod, and the first thread is matched with the second thread;
one end of the ejector rod is fixed on the side face of the flat plate, the side block is provided with a through groove penetrating through the side face of the side block, the through groove is communicated with the side hole, the arc-shaped plate is provided with a top groove penetrating through the upper surface and the lower surface of the arc-shaped plate, the top groove is communicated with the through groove, and the ejector rod penetrates through the through groove and the top groove;
the sliding groove is arranged on the side surface of the ejector rod, the sliding block is connected with the sliding groove in a sliding mode, one end of the fixing rod is fixedly connected with the side surface of the sliding block, the sliding groove faces the second screw rod, and the fixing rod is connected with an inner wall hole formed in the side wall of the top groove in a sliding mode;
the second spring is sleeved on the fixed rod, one end of the second spring is fixed on the side surface of the sliding block, and the other end of the second spring is fixed on the side wall of the top groove;
a driving bevel gear installed on the extension rod;
the linkage bevel gear is provided with a through hole, the through hole penetrates through the upper end surface and the lower end surface of the linkage bevel gear, the central axis of the through hole is superposed with the central axis of the linkage bevel gear, the diameter of the rotating shaft is equal to that of the through hole, and the rotating shaft penetrates through the through hole;
the linkage block is arranged on the inner wall of the through hole and is in sliding connection with the side groove arranged on the side surface of the rotating shaft;
the device comprises a cylinder arranged on the outer side surface of a flat plate, a connecting rod with one end fixedly connected with an output shaft of the cylinder, a second connecting rod with one end fixedly connected with the side surface of the connecting rod, and a rotating rod with the top end rotatably connected with a rotating groove arranged on the bottom end surface of a linkage bevel gear, wherein the bottom end of the rotating rod is fixedly connected with the side surface of the second connecting rod;
one end and the first connecting rod of the side surface fixed connection of connecting rod, bottom and the push rod of the side surface fixed connection of first connecting rod, the side surface of push rod and the side surface contact of ejector pin, and the ejector pin is located between push rod and the second push rod, the preceding terminal surface of push rod is the inclined plane, the inclined plane leans out gradually from the lateral mass to linkage bevel gear, and the inclined plane is used for in-process entering apical groove, promotes the arc and moves to the direction of keeping away from the second screw rod.
Further, the wafer surface flatness detecting apparatus further includes:
the embedded block is embedded into the connecting rod, and an inner hole is formed in the end face, facing the ejector rod, of the embedded block;
the inserting rod is connected with the inner hole in a sliding mode, and the front end of the inserting rod extends to the outside of the inner hole;
one end of the third spring is fixedly connected with the bottom of the inner hole, and the other end of the third spring is fixed at the rear end of the inserted rod;
the second electromagnet is fixed at the bottom of the inner hole;
the side of arc second screw rod dorsad is equipped with the jack, the side opening runs through the side of side piece placing the frame dorsad, the inserted bar with the jack is corresponding.
Further, the wafer surface flatness detecting apparatus further includes:
the side rod is fixedly connected with the surface, facing the flat plate, of the arc-shaped plate, and the other end of the side rod is fixedly connected with the side surface of the connecting plate;
the limiting rod is arranged at one end of the connecting plate, the limiting rod is vertically arranged, a surface annular groove is formed in the side surface of the extension rod, two limiting grooves are formed in the side wall, close to the placing frame, of the surface annular groove, the two limiting grooves are symmetrically arranged, a bottom groove is formed in the side wall of the rotary hole, the limiting rod penetrates through the bottom groove, and when one end of the limiting rod is located in the surface annular groove, the extension rod freely rotates in the rotary hole; one end of the limiting rod is located in the limiting groove, and the extension rod is fixed in the rotating hole.
For preventing to place the frame and take place to rotate at the testing process and place frame fortune power detection case in-process, before the push rod gos deep into the apical groove, the front end of gag lever post is located the spacing inslot, the extension rod will be fixed at the commentaries on classics downthehole like this, it will remain stable to place the frame, after the push rod gos deep into the apical groove, will drive the gag lever post through the arc and move to the surface annular in, can drive through the second motor like this and place the frame and rotate, after placing the frame and rotate 180 degrees, the cylinder will drive the push rod and break away from the apical groove, the front end of gag lever post will enter into another spacing inslot like this.
Further, crystal surface roughness check out test set still includes first electro-magnet and fourth spring, the connecting plate is equipped with the board groove that runs through its upper and lower surface, the gag lever post passes the board groove, and gag lever post and board groove sliding connection, first electro-magnet is fixed in the lateral wall that the frame was placed to board groove orientation, the one end of fourth spring is fixed in the lateral wall that the frame was placed to board groove orientation, and the other end of fourth spring is fixed in the side surface of gag lever post.
Furthermore, the detection boxes are two, and the two detection boxes are arranged oppositely.
The invention also provides a use method of the crystal surface flatness detection equipment, which adopts the crystal surface flatness detection equipment and comprises the following steps that after a crystal is placed in a placing frame, the crystal is fixed in the placing frame through a supporting part, at the moment, two surfaces to be detected of the crystal are parallel to the plane of an opening, then a driving part drives a flat plate to move towards the direction of a detection box, when the crystal moves to the opening, a detection system detects the flatness of the surface to be detected of the crystal opposite to the opening, after the detection is finished, an adjusting part drives the corresponding placing frame to be far away from the opening, and after the placing frame is far away from the opening, the placing frame is driven to rotate 180 degrees, so that the other surface to be detected of the crystal is opposite to the opening, after the detection is finished, the adjusting part drives the placing frame to move towards the opening again, and finally the other surface to be detected of the crystal moves to the opening, and then the detection system detects the flatness of the other surface to be detected of the crystal, and after the detection is finished, the driving part drives the flat plate to be far away from the detection box.
The invention has the beneficial effects that: by adopting the crystal surface flatness detection equipment and the use method thereof, after the crystal is placed in the placing frame and is fixed on the placing frame by the abutting part, the crystal is driven to the lower part of the opening of the corresponding detection box by the driving part, after the detection of one surface to be detected by the detection system is finished, the other surface to be detected can be adjusted to the position right opposite to the opening by the adjusting part, and then the detection is carried out.
Drawings
In order to more clearly illustrate the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a front view of the present invention;
FIG. 2 is a side view of the present invention at the flat plate and the first screw;
FIG. 3 is a schematic structural diagram of an adjusting part according to the present invention;
FIG. 4 is a cross-sectional view of the linkage bevel gear of the present invention;
FIG. 5 is a cross-sectional view at the side block of the present invention;
FIG. 6 is a schematic view of the connection of the connecting plate and the stopper rod of the present invention;
FIG. 7 is a side cross-sectional view of an extension pole of the present invention;
FIG. 8 is an enlarged view of an insert of the present invention;
FIG. 9 is a top view of an arcuate plate of the present invention;
fig. 10 is a top view of the placement frame of the present invention.
Labeled as:
1. a detection box; 2. a CCD camera; 3. a point light source; 4. a lens; 5. a glass lens; 6. a standard template; 7. a flat plate; 8. a first screw; 9. a rotating shaft; 10. a secondary bevel gear; 11. a fixed block; 12. a second screw; 13. a main bevel gear; 14. a first motor; 15. a second motor; 16. a fixed seat; 17. a cylinder; 18. linkage bevel gear; 19. a drive bevel gear; 20. placing the frame; 21. a side block; 22. a top rod; 23. a push rod; 24. a connecting rod; 25. a first link; 26. a rotating rod; 27. an insert block; 28. a second link; 29. rotating the groove; 30. a through hole; 31. a side groove; 32. a linkage block; 33. an extension rod; 34. perforating; 35. hole turning; 36. a side hole; 37. penetrating a groove; 38. an arc-shaped plate; 39. a chute; 40. a slider; 41. an inner wall hole; 42. fixing the rod; 43. a second spring; 44. a jack; 45. a connecting plate; 46. a top groove; 47. a side lever; 48. a surface ring groove; 49. a limiting groove; 50. a bottom groove; 51. a limiting rod; 52. a plate groove; 53. a first electromagnet; 54. a fourth spring; 55. an inner bore; 56. a third spring; 57. inserting a rod; 58. a second electromagnet; 59. a first spring; 60. a stabilizing plate; 61. and a stabilizing groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to specific embodiments below.
It is to be noted that technical terms or scientific terms used herein should have the ordinary meaning as understood by those having ordinary skill in the art to which the present invention belongs, unless otherwise defined. The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
In a first aspect of the present invention, a crystal surface flatness detecting apparatus is provided, as shown in fig. 1 and 3, including a detecting platform and at least one detecting box 1 disposed on the detecting platform, where the crystal surface flatness detecting apparatus further includes:
the crystal detecting box comprises a placing frame 20 corresponding to the detecting box 1 and a butting part arranged in the placing frame 20, wherein the butting part is used for fixing a crystal in the placing frame 20;
the detection system is arranged in the detection box 1, an opening is formed in the bottom of the detection box 1, and when the crystal is located at the opening, the detection system detects the surface flatness of the crystal;
the side blocks 21 are provided with rotating holes 35 towards the side surface of the placing frame 20, and the front ends of the extension rods 33 are rotatably connected with the rotating holes 35;
the flat plate 7 and the driving part arranged on the detection platform are used for driving the flat plate 7 to move along the detection platform;
and the adjusting part is arranged on the flat plate 7, corresponds to the placing frame 20 and is used for driving the corresponding placing frame 20 to be away from the opening, and after the placing frame 20 is away from the opening, the placing frame 20 is driven to rotate for 180 degrees.
In this embodiment, the invention preferably measures a flaky crystal, after the crystal is placed in the placement frame 20, the crystal is fixed in the placement frame 20 through the abutting portion, at this time, two surfaces to be measured of the crystal are parallel to the plane of the opening, then the driving portion drives the flat plate 7 to move towards the direction of the detection box 1, when the crystal moves to the opening, the detection system detects the flatness of the surface to be measured of the crystal facing the opening, after the detection is completed, the adjusting portion drives the corresponding placement frame 20 to move away from the opening, and after the placement frame 20 moves away from the opening, the placement frame 20 is driven to rotate 180 degrees, so that the other surface to be measured of the crystal faces the opening, after the detection is completed, the adjusting portion drives the placement frame 20 to move towards the opening again, and finally the other surface to be measured of the crystal moves to the opening, then the detection system performs the flatness detection on the other surface to be measured of the crystal, after the detection is finished, the driving part drives the flat plate 7 to be far away from the detection box 1. According to the invention, after the detection system finishes detecting one surface to be detected of the crystal, the other surface to be detected of the crystal can be adjusted to the position right opposite to the opening through the adjusting part, and then the detection is carried out, so that through the invention, after the detection system finishes detecting one surface of the crystal, the other surface of the crystal can be rapidly switched to the position right opposite to the detection system for detection, and the detection efficiency is improved.
As an embodiment, as shown in fig. 1, the detection system includes a CCD camera 2, a point light source 3, a lens 4, a glass lens 5 and a standard template 6 which are arranged in a detection box 1, the standard template 6 is located at an opening, the standard template 6 is arranged in an inclined manner, the CCD camera 2 faces the opening, the glass lens 5 is located between the CCD camera 2 and the standard template 6, the glass lens 5 is arranged in an inclined manner, the lens 4 is located at one side of the glass lens 5, the point light source 3 faces the lens 4, and after light emitted from the point light source 3 passes through the lens 4, the light is in a parallel state and after being reflected by the glass lens 5, the light is emitted vertically to the surface of the crystal.
In this embodiment, the flatness is detected through the interference of light, the glass lens 5 is a lens with two sides transmitting light, the standard sample plate 6 refers to a glass sheet with the composite flatness requirement, after the crystal moves to a position close to the lower part of the standard sample plate 6, a wedge-shaped air film is formed between the crystal and the standard sample plate, light rays are reflected by the glass lens 5 and then vertically irradiate to the surface of the crystal after irradiating to the wedge-shaped air film, if the surface of the crystal is flat, the thickness of the wedge-shaped air film is uniformly changed, in the place with the same thickness, because the optical path difference of two reflected light is the same, the two reflected light is mutually enhanced or weakened, so that the CCD camera 2 can shoot interference fringes with alternate light and shade and uniformly distributed, and if some places on the surface of the crystal are uneven, the interference fringes can be bent to form a convex starting point.
As an embodiment, as shown in fig. 10, the holding portion includes:
the stabilizing plate 60 is arranged in the placing frame 20, two opposite side walls of the placing frame 20 are provided with stabilizing grooves 61, and the end parts of the stabilizing plate 60 are in sliding connection with the stabilizing grooves 61;
a first spring 59 having one end fixedly connected to a side surface of the stabilizing plate 60, and the other end of the first spring 59 is fixed to an inner sidewall of the placing frame 20.
In this embodiment, after the crystal is placed in the placement frame 20, the stabilizing plate 60 is released, and the crystal is fixed in the placement frame 20 by the pressing force of the first spring 59.
As an embodiment, as shown in fig. 1 and 2, the driving part includes:
the detection device comprises at least two first motors 14 arranged on one side of a flat plate 7 and a fixed seat 16 arranged on the other side of the flat plate 7, wherein the first motors 14 and the fixed seat 16 are both fixed on a detection platform, and the fixed seat 16 corresponds to the first motors 14;
one end and the first screw rod 8 of the output shaft fixed connection of first motor 14, dull and stereotyped 7 is equipped with the screw, first screw rod 8 rotates with the screw to be connected, and the other end and the fixing base 16 of first screw rod 8 rotate to be connected.
In this embodiment, the first motor 14 rotates the first screw 8, so as to move the plate 7.
As an embodiment, as shown in fig. 1, 3, 4, 5, and 9, the apparatus for detecting flatness of a surface of a crystal further includes:
the second motor 15 is arranged on the side surface of the flat plate 7, and the main bevel gear 13 is arranged on an output shaft of the second motor 15;
the rotating shaft 9 is positioned at two sides of the main bevel gear 13, the auxiliary bevel gear 10 is installed on the rotating shaft 9, and the fixing block 11 is fixed on the side face of the flat plate 7, the rotating shaft 9 penetrates through a shaft hole formed in the fixing block 11, and the auxiliary bevel gear 10 is meshed with the main bevel gear 13;
the adjustment unit includes:
a second screw 12 with one end fixedly connected with one end of the rotating shaft 9, wherein the side block 21 is provided with a through hole 34 penetrating through the side surface thereof, and the second screw 12 penetrates through the through hole 34;
a side hole 36 arranged on the side wall of the through hole 34, and an arc-shaped plate 38 connected with the side hole 36 in a sliding manner, wherein the side surface of the arc-shaped plate 38 facing the through hole 34 is an arc-shaped surface, the arc-shaped surface is provided with a first thread, the side surface of the second screw 12 is provided with a second thread, and the first thread is matched with the second thread;
the ejector rod 22 is fixed on the side surface of the flat plate 7 at one end, the side block 21 is provided with a through groove 37 penetrating through the side surface of the side block, the through groove 37 is communicated with the side hole 36, the arc-shaped plate 38 is provided with a top groove 46 penetrating through the upper surface and the lower surface of the arc-shaped plate, the top groove 46 is communicated with the through groove 37, and the ejector rod 22 penetrates through the through groove 37 and the top groove 46;
the sliding groove 39 is arranged on the side surface of the top rod 22, the sliding block 40 is connected with the sliding groove 39 in a sliding mode, one end of the fixing rod 42 is fixedly connected with the side surface of the sliding block 40, the sliding groove 39 faces the second screw rod 12, and the fixing rod 42 is connected with an inner wall hole 41 arranged on the side wall of the top groove 46 in a sliding mode;
a second spring 43 sleeved on the fixing rod 42, wherein one end of the second spring 43 is fixed on the side surface of the sliding block 40, and the other end of the second spring 43 is fixed on the side wall of the top groove 46;
a drive bevel gear 19 attached to the extension rod 33;
the linkage bevel gear 18 is provided with a through hole 30, the through hole 30 penetrates through the upper end surface and the lower end surface of the linkage bevel gear 18, the central axis of the through hole 30 is overlapped with the central axis of the linkage bevel gear 18, the diameter of the rotating shaft 9 is equal to that of the through hole 30, and the rotating shaft 9 penetrates through the through hole 30;
the linkage block 32 is arranged on the inner wall of the through hole 30, and the linkage block 32 is in sliding connection with the side groove 31 arranged on the side surface of the rotating shaft 9;
the device comprises an air cylinder 17 arranged on the outer side surface of a flat plate 7, a connecting rod 24 with one end fixedly connected with an output shaft of the air cylinder 17, a second connecting rod 28 with one end fixedly connected with the side surface of the connecting rod 24, and a rotating rod 26 with the top end rotatably connected with a rotating groove 29 arranged on the bottom end surface of a linkage bevel gear 18, wherein the bottom end of the rotating rod 26 is fixedly connected with the side surface of the second connecting rod 28;
the first connecting rod 25 with one end fixedly connected with the side surface of the connecting rod 24, the push rod 23 with the bottom end fixedly connected with the side surface of the first connecting rod 25, the side surface of the push rod 23 is contacted with the side surface of the push rod 22, the push rod 22 is positioned between the push rod 23 and the second push rod 23, the front end surface of the push rod 23 is an inclined plane, the inclined plane is gradually inclined outwards from the side block 21 to the linkage bevel gear 18, and the inclined plane is used for pushing the arc-shaped plate 38 to move towards the direction far away from the second screw 12 in the process of entering the top groove 46.
In this embodiment, after the crystal is placed in the placement frame 20, the crystal is fixed in the placement frame 20 through the abutting portion, at this time, two surfaces to be measured of the crystal are parallel to the plane where the opening is located, then the driving portion drives the flat plate 7 to move in the direction of the detection box 1, when the crystal moves to the opening, the measurement system performs flatness detection on the surface to be measured of the crystal facing the opening, after the detection is completed, the second motor 15 is started, at this time, due to the elastic force of the second spring 43, the first thread is engaged with the second thread, therefore, after the second motor 15 is started, the second screw 12 is driven to rotate through the rotating shaft 9, so as to drive the side block 21 to move in the direction away from the detection box 1, that is, the placement frame 20 is driven to move, when the front end face of the push rod 23 just enters the top groove 46, and the front end face of the push rod 23 is contacted with the side edge of the top groove 46, and the second motor 15 stops driving, the cylinder 17 is started to drive the front end face of the push rod 23 to gradually penetrate into the top groove 46, in the process of entering the top groove 46, the front end face of the push rod 23 pushes the arc-shaped plate 38 to overcome the elastic force of the second spring 43 and move towards the direction far away from the second screw 12, and when the first thread is completely separated from the second thread, the cylinder 17 stops driving. In addition, in the process that the air cylinder 17 drives the push rod 23, the linkage bevel gear 18 also approaches the driving bevel gear 19, when the air cylinder 17 stops driving, the linkage bevel gear 18 is meshed with the driving bevel gear 19, at this time, the second motor 15 is started again, so that the driving bevel gear 19 is driven to rotate through the rotating shaft 9, the extension rod 33 is driven to rotate, when the placing frame 20 rotates 180 degrees, another to-be-measured surface of the crystal rotates to a position right opposite to the opening, after the completion, the second motor 15 stops driving, the air cylinder 17 is started, the push rod 23 is separated from the top groove 46, so that the first thread is meshed with the second thread again, the linkage bevel gear 18 is separated from the driving bevel gear 19 again, after the completion, the second motor 15 is started again, the placing frame 20 moves to the previous position, and after the completion, the detection system can perform measurement.
As an embodiment, as shown in fig. 3, 5, and 8, the apparatus for detecting flatness of a surface of a crystal further includes:
the insert 27 is embedded in the connecting rod 24, and the end face, facing the ejector rod 22, of the insert 27 is provided with an inner hole 55;
an insert rod 57 slidably connected with the inner hole 55, wherein the front end of the insert rod 57 extends to the outside of the inner hole 55;
a third spring 56 with one end fixedly connected with the bottom of the inner hole 55, and the other end of the third spring 56 is fixed at the rear end of the inserted link 57;
a second electromagnet 58 fixed to the bottom of the inner bore 55;
the side of the arc-shaped plate 38 facing away from the second screw 12 is provided with an insertion hole 44, the side hole 36 penetrates through the side of the side block 21 facing away from the placement frame 20, and the insertion rod 57 corresponds to the insertion hole 44.
In the embodiment, before the side block 21 moves to the position just before the front end face of the push rod 23 enters the top groove 46, the second electromagnet 58 is powered on, so that a part of the inserting rod 57 is contracted into the inner hole 55, when the side block 21 moves to the position just before the front end face of the push rod 23 enters the top groove 46, the inserting rod 57 is just opposite to the inserting hole 44, the second electromagnet 58 is powered off, and a part of the inserting rod 57 enters the inserting hole 44 under the action of the third spring 56, so that the side block 21 can be prevented from moving upwards in the process that the push rod 23 further penetrates the top groove 46.
As an embodiment, as shown in fig. 5, 6, and 7, the apparatus for detecting flatness of a surface of a crystal further includes:
the connecting plate 45 and one end of the side rod 47 are fixedly connected with the surface of the arc-shaped plate 38 facing the flat plate 7, and the other end of the side rod 47 is fixedly connected with the side surface of the connecting plate 45;
the limiting rod 51 is arranged at one end of the connecting plate 45, the limiting rod 51 is vertically arranged, a surface annular groove 48 is formed in the side surface of the extension rod 33, two limiting grooves 49 are formed in the side wall, close to the placing frame 20, of the surface annular groove 48, the two limiting grooves 49 are symmetrically arranged, a bottom groove 50 is formed in the side wall of the rotary hole 35, the limiting rod 51 penetrates through the bottom groove 50, and when one end of the limiting rod 51 is located in the surface annular groove 48, the extension rod 33 freely rotates in the rotary hole 35; one end of the limiting rod 51 is positioned in the limiting groove 49, and the extension rod 33 is fixed in the rotating hole 35.
In this embodiment, for preventing to place frame 20 and place frame 20 fortune power detection case 1 in-process and take place to rotate in the testing process, before push rod 23 deepened top slot 46, the front end of gag lever post 51 is located the spacing groove 49, extension rod 33 will be fixed in changeing the hole 35 like this, it will remain stable to place frame 20, after push rod 23 deepened top slot 46, will drive gag lever post 51 through arc 38 and move to in the surface annular 48, can drive through second motor 15 like this and place frame 20 and rotate, after placing frame 20 and rotate 180 degrees, cylinder 17 will drive push rod 23 and break away from top slot 46, the front end of gag lever post 51 will enter into another spacing groove 49 like this.
As an embodiment, as shown in fig. 6, the apparatus for detecting flatness of a surface of a wafer further includes a first electromagnet 53 and a fourth spring 54, the connecting plate 45 is provided with a plate groove 52 penetrating through upper and lower surfaces of the connecting plate, the limiting rod 51 penetrates through the plate groove 52, the limiting rod 51 is slidably connected with the plate groove 52, the first electromagnet 53 is fixed in a side wall of the plate groove 52 facing the placing frame 20, one end of the fourth spring 54 is fixed in a side wall of the plate groove 52 facing the placing frame 20, and the other end of the fourth spring 54 is fixed in a side surface of the limiting rod 51.
In this embodiment, when the linkage bevel gear 18 is engaged with the driving bevel gear 19, the second motor 15 is started to drive the placing frame 20 to rotate 180 degrees, at this time, the top end of the limiting rod 51 is located in the surface ring groove 48, in order to prevent the top end of the push rod 23 from moving out of the top groove 46, the placing frame 20 rotates, at this time, the first electromagnet 53 is electrified, so that the top end of the limiting rod 51 enters the limiting groove 49, after the push rod 23 completely moves out of the top groove 46, the first electromagnet 53 is electrified, and at this time, under the action of the second spring 43, the top end of the limiting rod 51 is still kept in the limiting groove 49.
In addition, as shown in fig. 1, preferably, two detection boxes 1 are provided, and the two detection boxes 1 are disposed to face each other. Therefore, two crystals can be measured at one time, and the detection efficiency can be further improved.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to those examples; within the idea of the invention, also features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The present invention is intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. The utility model provides a crystal surface roughness check out test set, includes testing platform and locates at least one detection case (1) on the testing platform, its characterized in that, crystal surface roughness check out test set still includes:
the crystal detecting box comprises a placing frame (20) corresponding to the detecting box (1) and a butting part arranged in the placing frame (20), wherein the butting part is used for fixing a crystal in the placing frame (20);
the detection system is arranged in the detection box (1), an opening is formed in the bottom of the detection box (1), and when the crystal is located at the opening, the detection system detects the surface flatness of the crystal;
the side block (21) is provided with a rotating hole (35) towards the side surface of the placing frame (20), and the front end of the extension rod (33) is rotatably connected with the rotating hole (35);
the detection device comprises a flat plate (7) and a driving part arranged on the detection platform, wherein the driving part is used for driving the flat plate (7) to move along the detection platform;
the adjusting part is arranged on the flat plate (7) and corresponds to the placing frame (20), and the adjusting part is used for driving the corresponding placing frame (20) to be away from the opening, and driving the placing frame (20) to rotate 180 degrees after the placing frame (20) is away from the opening.
2. The apparatus for detecting flatness of a surface of a crystal according to claim 1, the detection system comprises a CCD camera (2), a point light source (3), a lens (4), a glass lens (5) and a standard sample plate (6) which are arranged in a detection box (1), wherein the standard sample plate (6) is positioned at an opening, the standard sample plate (6) is arranged in an inclined way, the CCD camera (2) is right opposite to the opening, the glass lens (5) is positioned between the CCD camera (2) and the standard template (6), the glass lens (5) is obliquely arranged, the lens (4) is positioned at one side of the glass lens (5), the point light source (3) is opposite to the lens (4), after light emitted by the point light source (3) passes through the lens (4), the light is in a parallel state, and after being reflected by the glass lens (5), the light vertically shoots to the surface of the crystal.
3. The apparatus of claim 2, wherein the abutting portion comprises:
the stabilizing plate (60) is arranged in the placing frame (20), two opposite side walls of the placing frame (20) are provided with stabilizing grooves (61), and the end parts of the stabilizing plate (60) are in sliding connection with the stabilizing grooves (61);
and a first spring (59) with one end fixedly connected with the side surface of the stabilizing plate (60), wherein the other end of the first spring (59) is fixed on the inner side wall of the placing frame (20).
4. The apparatus according to claim 3, wherein the driving unit includes:
the detection device comprises at least two first motors (14) arranged on one side of a flat plate (7) and a fixed seat (16) arranged on the other side of the flat plate (7), wherein the first motors (14) and the fixed seat (16) are fixed on a detection platform, and the fixed seat (16) corresponds to the first motors (14);
one end and the first screw rod (8) of the output shaft fixed connection of first motor (14), dull and stereotyped (7) are equipped with the screw, first screw rod (8) rotate with the screw to be connected, and the other end and the fixing base (16) of first screw rod (8) rotate to be connected.
5. The crystal surface flatness detecting apparatus of claim 4, wherein said crystal surface flatness detecting apparatus further comprises:
the second motor (15) is arranged on the side surface of the flat plate (7), and the main bevel gear (13) is arranged on an output shaft of the second motor (15);
the bevel gear mechanism comprises a rotating shaft (9) positioned on two sides of a main bevel gear (13), an auxiliary bevel gear (10) arranged on the rotating shaft (9), and a fixed block (11) fixed on the side surface of a flat plate (7), wherein the rotating shaft (9) penetrates through a shaft hole formed in the fixed block (11), and the auxiliary bevel gear (10) is meshed with the main bevel gear (13);
the adjustment unit includes:
a second screw rod (12) with one end fixedly connected with one end of the rotating shaft (9), wherein the side block (21) is provided with a through hole (34) penetrating through the side surface of the side block, and the second screw rod (12) penetrates through the through hole (34);
the side face, facing the through hole (34), of the arc-shaped plate (38) is an arc-shaped face, first threads are arranged on the arc-shaped face, second threads are arranged on the side surface of the second screw (12), and the first threads are matched with the second threads;
one end of the ejector rod (22) is fixed on the side face of the flat plate (7), the side block (21) is provided with a through groove (37) penetrating through the side surface of the side block, the through groove (37) is communicated with the side hole (36), the arc-shaped plate (38) is provided with an ejector groove (46) penetrating through the upper surface and the lower surface of the arc-shaped plate, the ejector groove (46) is communicated with the through groove (37), and the ejector rod (22) penetrates through the through groove (37) and the ejector groove (46);
the sliding groove (39) is arranged on the side surface of the ejector rod (22), the sliding block (40) is connected with the sliding groove (39) in a sliding mode, one end of the fixing rod (42) is fixedly connected with the side surface of the sliding block (40), the sliding groove (39) faces the second screw rod (12), and the fixing rod (42) is connected with an inner wall hole (41) arranged on the side wall of the top groove (46) in a sliding mode;
the second spring (43) is sleeved on the fixing rod (42), one end of the second spring (43) is fixed on the side surface of the sliding block (40), and the other end of the second spring (43) is fixed on the side wall of the top groove (46);
a drive bevel gear (19) mounted to the extension rod (33);
the linkage bevel gear (18) is provided with a through hole (30), the through hole (30) penetrates through the upper end surface and the lower end surface of the linkage bevel gear (18), the central axis of the through hole (30) is overlapped with the central axis of the linkage bevel gear (18), the diameter of the rotating shaft (9) is equal to that of the through hole (30), and the rotating shaft (9) penetrates through the through hole (30);
the linkage block (32) is arranged on the inner wall of the through hole (30), and the linkage block (32) is in sliding connection with the side groove (31) arranged on the side surface of the rotating shaft (9);
the device comprises a cylinder (17) arranged on the outer side surface of a flat plate (7), a connecting rod (24) with one end fixedly connected with an output shaft of the cylinder (17), a second connecting rod (28) with one end fixedly connected with the side surface of the connecting rod (24), and a rotating rod (26) with the top end rotatably connected with a rotating groove (29) arranged on the bottom end surface of a linkage bevel gear (18), wherein the bottom end of the rotating rod (26) is fixedly connected with the side surface of the second connecting rod (28);
one end and the first connecting rod (25) of the side surface fixed connection of connecting rod (24), the bottom and push rod (23) of the side surface fixed connection of first connecting rod (25), the side surface of push rod (23) and the side surface contact of ejector pin (22), and ejector pin (22) are located between push rod (23) and second push rod (23), the preceding terminal surface of push rod (23) is the inclined plane, the inclined plane is outwards inclined from side piece (21) to linkage bevel gear (18) gradually, the inclined plane is used for getting into top groove (46) the in-process, promotes arc (38) to the direction motion of keeping away from second screw rod (12).
6. The wafer surface flatness detecting apparatus of claim 5, further comprising:
the insert block (27) is embedded into the connecting rod (24), and an inner hole (55) is formed in the end face, facing the ejector rod (22), of the insert block (27);
the insert rod (57) is connected with the inner hole (55) in a sliding mode, and the front end of the insert rod (57) extends to the outside of the inner hole (55);
a third spring (56) with one end fixedly connected with the bottom of the inner hole (55), and the other end of the third spring (56) is fixed at the rear end of the inserted rod (57);
a second electromagnet (58) fixed at the bottom of the inner hole (55);
the side of arc (38) second screw rod (12) dorsad is equipped with jack (44), side hole (36) run through side piece (21) and place the side of frame (20) dorsad, inserted bar (57) with jack (44) correspond.
7. The wafer surface flatness detecting apparatus of claim 6, further comprising:
the device comprises a connecting plate (45) and a side rod (47) of which one end is fixedly connected with the surface of the arc-shaped plate (38) facing the flat plate (7), wherein the other end of the side rod (47) is fixedly connected with the side surface of the connecting plate (45);
the limiting rod (51) is arranged at one end of the connecting plate (45), the limiting rod (51) is vertically arranged, a surface annular groove (48) is formed in the side surface of the extension rod (33), two limiting grooves (49) are formed in the side wall, close to the placement frame (20), of the surface annular groove (48), the two limiting grooves (49) are symmetrically arranged, a bottom groove (50) is formed in the side wall of the rotary hole (35), the limiting rod (51) penetrates through the bottom groove (50), and when one end of the limiting rod (51) is located in the surface annular groove (48), the extension rod (33) freely rotates in the rotary hole (35); one end of the limiting rod (51) is positioned in the limiting groove (49), and the extension rod (33) is fixed in the rotating hole (35).
8. A crystal surface flatness detecting apparatus according to claim 7, wherein said crystal surface flatness detecting apparatus further comprises a first electromagnet (53) and a fourth spring (54), said connecting plate (45) is provided with a plate groove (52) penetrating its upper and lower surfaces, said limiting rod (51) penetrates through the plate groove (52), and the limiting rod (51) is slidably connected with the plate groove (52), said first electromagnet (53) is fixed in the side wall of the plate groove (52) facing the placing frame (20), one end of said fourth spring (54) is fixed in the side wall of the plate groove (52) facing the placing frame (20), and the other end of said fourth spring (54) is fixed in the side surface of the limiting rod (51).
9. A crystal surface flatness detecting apparatus according to claim 1, wherein there are two detecting boxes (1), and the two detecting boxes (1) are arranged oppositely.
10. The use method of the crystal surface flatness detection equipment according to any one of claims 1 to 9 is characterized by comprising the following steps of fixing the crystal in the placing frame (20) through the abutting part after the crystal is placed in the placing frame (20), wherein two surfaces to be detected of the crystal are parallel to the plane where the opening is located, then driving the flat plate (7) to move towards the detection box (1) by the driving part, detecting the flatness of the surface to be detected of the crystal opposite to the opening by the detection system when the crystal moves to the opening, driving the corresponding placing frame (20) to be far away from the opening by the adjusting part after the detection is finished, driving the placing frame (20) to rotate 180 degrees after the placing frame (20) is far away from the opening, enabling the other surface to be detected of the crystal to be opposite to the opening, and driving the placing frame (20) to move towards the opening again by the adjusting part after the detection is finished, and finally, the other surface to be detected of the crystal moves to the opening, then the detection system detects the flatness of the other surface to be detected of the crystal, and after the detection is finished, the driving part drives the flat plate (7) to be far away from the detection box (1).
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| CN202211043170.9A CN115112056A (en) | 2022-08-29 | 2022-08-29 | Crystal surface flatness detection equipment and use method thereof |
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| CN202211043170.9A CN115112056A (en) | 2022-08-29 | 2022-08-29 | Crystal surface flatness detection equipment and use method thereof |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
| CN210135882U (en) * | 2019-07-25 | 2020-03-10 | 湖南暖丰电热工程有限公司 | Leveling device |
| CN110954007A (en) * | 2019-11-27 | 2020-04-03 | 长江存储科技有限责任公司 | Wafer detection system and detection method |
| CN211042069U (en) * | 2019-07-29 | 2020-07-17 | 苏州荣炫电器有限公司 | Double-sided detection tool for injection molding part |
| CN212747705U (en) * | 2020-08-05 | 2021-03-19 | 浙江惠盛新材料有限公司 | Flatness detection device for epoxy resin plate |
| CN213208987U (en) * | 2020-11-12 | 2021-05-14 | 深圳市鹏辉模具钢材有限公司 | Die steel flatness detection device capable of working on double faces |
| US20210199597A1 (en) * | 2019-12-26 | 2021-07-01 | Nanjing LiAn Semiconductor Limited | Wafer shape and flatness measurement apparatus and method |
| CN114526667A (en) * | 2022-02-27 | 2022-05-24 | 苏州腾益达精密机械有限公司 | Aviation aluminum product testing arrangement |
-
2022
- 2022-08-29 CN CN202211043170.9A patent/CN115112056A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
| CN210135882U (en) * | 2019-07-25 | 2020-03-10 | 湖南暖丰电热工程有限公司 | Leveling device |
| CN211042069U (en) * | 2019-07-29 | 2020-07-17 | 苏州荣炫电器有限公司 | Double-sided detection tool for injection molding part |
| CN110954007A (en) * | 2019-11-27 | 2020-04-03 | 长江存储科技有限责任公司 | Wafer detection system and detection method |
| US20210199597A1 (en) * | 2019-12-26 | 2021-07-01 | Nanjing LiAn Semiconductor Limited | Wafer shape and flatness measurement apparatus and method |
| CN212747705U (en) * | 2020-08-05 | 2021-03-19 | 浙江惠盛新材料有限公司 | Flatness detection device for epoxy resin plate |
| CN213208987U (en) * | 2020-11-12 | 2021-05-14 | 深圳市鹏辉模具钢材有限公司 | Die steel flatness detection device capable of working on double faces |
| CN114526667A (en) * | 2022-02-27 | 2022-05-24 | 苏州腾益达精密机械有限公司 | Aviation aluminum product testing arrangement |
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Application publication date: 20220927 |