CN114999876A - Cold cathode X-ray source and application thereof - Google Patents

Cold cathode X-ray source and application thereof Download PDF

Info

Publication number
CN114999876A
CN114999876A CN202210623505.8A CN202210623505A CN114999876A CN 114999876 A CN114999876 A CN 114999876A CN 202210623505 A CN202210623505 A CN 202210623505A CN 114999876 A CN114999876 A CN 114999876A
Authority
CN
China
Prior art keywords
layer
cold cathode
substrate
cathode
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210623505.8A
Other languages
Chinese (zh)
Inventor
陈军
康颂
邓少芝
许宁生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sun Yat Sen University
Original Assignee
Sun Yat Sen University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sun Yat Sen University filed Critical Sun Yat Sen University
Priority to CN202210623505.8A priority Critical patent/CN114999876A/en
Publication of CN114999876A publication Critical patent/CN114999876A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • Radiation-Therapy Devices (AREA)

Abstract

The invention relates to a cold cathode X-ray source and application thereof. The anode of the cold cathode X-ray source comprises an anode substrate and a transmission anode target layer which are sequentially overlapped; the cathode comprises a cathode substrate and a nano cold cathode electron source layer for emitting electron beams, which are sequentially stacked; the transmission anode target layer and the nanometer cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode. In the cold cathode X-ray source, the nano cold cathode electron source layer emits electron beams under the action of an electric field, and the transmission anode target layer and the nano cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode, so that the electron beams can bombard the transmission anode target layer along the vertical direction and form X rays vertical to the direction of the transmission anode target layer, the cold cathode X-ray source can uniformly emit the X rays in all directions, and the cold cathode X-ray source can be applied to conformal imaging or conformal radiotherapy.

Description

Cold cathode X-ray source and application thereof
Technical Field
The invention relates to the technical field of X-ray, in particular to a cold cathode X-ray source and application thereof.
Background
The X-ray is an electromagnetic wave, has the characteristics of short wavelength and high energy, and can be used in the fields of clinical diagnosis and treatment, security inspection, nondestructive inspection, material analysis and the like.
X-ray sources currently in commercial use are primarily hot cathode X-ray sources. The hot cathode X-ray source generates electrons by a cathode filament, and the electrodes are focused by a focusing electrode and are accelerated by an accelerating device to bombard on an anode target to generate X-rays. The cathode of the hot cathode X-ray source is a filament made of hot cathode materials, and the principle is that the filament is heated to generate thermionic emission. Therefore, the hot cathode X-ray source has the defects of high working temperature, slow response speed, short service life, large volume, high energy consumption and the like. Cold cathode X-ray sources use a field emission cathode as the electron source, which can solve the problems of hot cathode X-ray sources described above. In addition, for a hot cathode X-ray source emitting light from a curved surface (such as a spherical curved surface), since the electron beam emitted by the cathode is radial, the electron beam can only partially impinge on the curved anode transmission target, and thus it is difficult for the hot cathode X-ray source to uniformly emit light from the curved surface.
In recent years, research on cold cathode X-ray sources is more popular, but with the expansion of application scenes, the performance requirements of cold cathode X-ray sources are also higher and higher. For example, in medical imaging of narrow spaces such as pipelines and hollow objects in diagnosis and radiotherapy treatment of tumors in a tumor bed and a natural cavity of a human body, X-rays uniformly distributed in a curved surface or multiple surfaces are required to achieve better imaging and treatment effects. The existing method for realizing uniform emission of X-rays is to arrange a focusing structure with a grid on a cathode and control the size of an electron beam emitted by an anode through a focusing electrode to control the size of an X-ray micro focal spot emitted by the anode, so that the uniform emission of the X-rays is realized. However, the cold cathode X-ray source of the method has a complex structure, the compatibility between the manufacturing process of the grid focusing structure and the manufacturing process of the cold cathode electron source is poor, and the realization of uniform emission of the X-rays of the cold cathode X-ray source in a curved surface or multiple surfaces is inevitably more complex and difficult. The patent with publication number CN109768051A provides an addressable cold cathode flat panel X-ray source device driven by TFT, but the X-ray source device of the patent cannot realize uniform emission of X-rays of the cold cathode X-ray source in curved surface or multi-surface direction.
Therefore, it is particularly important to develop a cold cathode X-ray source capable of emitting X-rays uniformly in a curved or multi-faceted direction.
Disclosure of Invention
The invention aims to overcome the problem that the cold cathode X-ray source in the prior art cannot uniformly emit X-rays in a curved surface or a multi-surface direction, and provides the cold cathode X-ray source. In the cold cathode X-ray source, the nano cold cathode electron source layer emits electron beams under the action of an electric field, and the transmission anode target layer and the nano cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode, so that the electron beams can bombard the transmission anode target layer along the vertical direction and form X rays vertical to the direction of the transmission anode target layer, the cold cathode X-ray source can uniformly emit the X rays in all directions, and the cold cathode X-ray source can be applied to conformal imaging or conformal radiotherapy.
It is a further object of the invention to provide the use of a cold cathode X-ray source as described above in conformal imaging or conformal radiotherapy.
The above object of the present invention is achieved by the following technical solutions:
a cold cathode X-ray source comprising an anode and a cathode;
the anode comprises an anode substrate and a transmission anode target layer which are stacked; the cathode comprises a cathode substrate and a nano cold cathode electron source layer capable of emitting electron beams, which are stacked;
the transmission anode target layer and the nanometer cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode.
It should be understood that the concentric vacuum nesting of the present invention means that the transmissive anode target layer and the nano cold cathode electron source layer are concentrically nested and the air pressure state between the two is vacuum.
In the cold cathode X-ray source, the nano cold cathode electron source layer emits electron beams under the action of an electric field, and the transmission anode target layer and the nano cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode, so that the electron beams can bombard the transmission anode target layer in the vertical direction and form X-rays vertical to the direction of the transmission anode target layer, the cold cathode X-ray source can uniformly emit X-rays in all directions, and the cold cathode X-ray source can be applied to conformal imaging or conformal radiotherapy.
Preferably, the cold cathode X-ray source further comprises an envelope enclosing the anode substrate and forming a vacuum region between the transmissive anode target layer and the nano-cold cathode electron source layer.
More preferably, the housing is provided with an air discharge member.
Further preferably, the exhaust member is an exhaust hole.
Further preferably, the cold cathode X-ray source further comprises an exhaust pipe, and the exhaust pipe is communicated with the exhaust hole to realize the exhaust of air, so that the transmission anode target layer, the nanometer cold cathode electron source layer and the shell form a vacuum area.
More preferably, a getter containing cavity is arranged on the housing, the getter containing cavity is communicated with the vacuum area, and the getter containing cavity is used for containing a getter so as to improve the vacuum degree of the vacuum area.
More preferably, the vacuum degree of the vacuum area is less than or equal to 1 multiplied by 10 -4 Pa。
Further preferably, the vacuum degree of the vacuum area is less than or equal to 1 multiplied by 10 -6 Pa。
Preferably, the anode substrate is a beryllium substrate, a silicon substrate, a glass substrate, a quartz substrate, a ceramic substrate or a high-temperature-resistant plastic substrate.
Preferably, the cathode substrate is a conductive substrate or a non-conductive substrate.
More preferably, the conductive substrate is a gold substrate, a silver substrate, a copper substrate, an iron substrate, a zinc substrate, a manganese substrate, a cadmium substrate, a nickel substrate, a titanium substrate, a platinum substrate, an aluminum substrate, or a chromium substrate.
More preferably, the non-conductive substrate is a mica substrate, a glass substrate, a quartz substrate, a ceramic substrate, or a high temperature resistant plastic substrate.
Preferably, the thickness of the anode substrate is 30 μm to 10 mm.
More preferably, the thickness of the anode substrate is 1mm to 3 mm.
Preferably, the transmission anode target layer is a tungsten target layer, a molybdenum target layer, a rhodium target layer, a silver target layer, a copper target layer, a gold target layer, a chromium target layer, an aluminum target layer, a niobium target layer, a tantalum target layer, or a rhenium target layer.
Preferably, the thickness of the transmission anode target layer is 1nm to 1 mm.
More preferably, the thickness of the transmissive anode target layer is 1 μm to 2 μm.
Preferably, the anode further comprises an anode lead electrically connected to the transmissive anode target layer to enable application of a high potential to the transmissive anode target layer.
The cold cathode X-ray source can design the nano cold cathode electron source layer capable of emitting electron beams into different shapes according to the requirement of the X-ray emitting direction in use.
Preferably, the shape of the electron source layer of the nanometer cold cathode is as follows: one or more of a spherical curved surface, a hemispherical curved surface, an ellipsoidal curved surface, a regular pear-shaped curved surface, a polyhedral side surface, a prismatic side surface, a conical side surface, a cylindrical side surface or a pyramidal side surface; the shape of the transmission anode target layer is one or more of a spherical curved surface, a hemispherical curved surface, an ellipsoid curved surface, a regular pear-shaped curved surface, a polyhedral side surface, a prismatic side surface, a conical side surface, a cylindrical side surface or a pyramid side surface which is matched with the nanometer cold cathode electron source layer.
Preferably, the nano cold cathode electron source layer is composed of nanotubes or nanowires.
Preferably, the electron source layer of the nano cold cathode is a carbon layer, a zinc oxide layer, a copper oxide layer, a tungsten oxide layer, a molybdenum oxide layer, an iron oxide layer, a titanium oxide layer or a tin oxide layer.
More preferably, the cold cathode electron source layer is a carbon nanotube layer, a zinc oxide nanowire layer, a copper oxide nanowire layer, a tungsten oxide nanowire layer, a molybdenum oxide nanowire layer, an iron oxide nanowire layer, a titanium oxide nanowire layer, or a tin oxide nanowire layer.
Preferably, the nano cold cathode electron source layer completely covers or partially covers the cathode substrate.
When the nano cold cathode electron source layer partially covers the cathode substrate, the cold cathode X-ray source can uniformly emit X-rays in different areas, and the X-rays can be emitted in an addressing mode through different areas.
Preferably, the thickness of the cathode substrate is 1mm to 100 mm.
More preferably, the thickness of the cathode substrate is 3mm to 10 mm.
Preferably, the cathode further comprises a conductive cathode support, and the cathode support is located below the cathode substrate and electrically connected with the cathode substrate to electrify the cathode substrate, so as to apply a low potential to the nano cold cathode electron source layer.
Preferably, the cathode further comprises a conductive layer disposed between the cathode substrate and the nano-cold cathode electron source layer.
When the cathode substrate is a non-conductive cathode substrate, a conductive layer is further arranged between the cathode substrate and the nano cold cathode electron source layer so as to apply a low potential to the nano cold cathode electron source layer.
More preferably, the cathode further comprises a cathode lead electrically connected to the conductive layer to energize the conductive layer, thereby applying a low potential to the nano cold cathode electron source layer.
More preferably, the conductive layer is a gold layer, a silver layer, a copper layer, an iron layer, a zinc layer, a manganese layer, a cadmium layer, a nickel layer, a titanium layer, a platinum layer, an aluminum layer, a chromium layer, an indium tin oxide layer, a magnetite layer, a titanium oxide layer, a sodium oxide layer, a magnesium oxide layer, a potassium oxide layer, or a zinc oxide layer.
More preferably, the thickness of the conductive layer is 1nm to 10 μm.
Further preferably, the thickness of the conductive layer is 50nm to 1 μm.
Preferably, the minimum distance between the transmission anode target layer and the nanometer cold cathode electron source layer is 1 mm-100 mm.
More preferably, the minimum distance between the transmission anode target layer and the nanometer cold cathode electron source layer is 5 mm-10 mm.
The cold cathode X-ray source is applied to the preparation of a conformal imager or a conformal radiotherapy instrument.
Compared with the prior art, the invention has the beneficial effects that:
in the cold cathode X-ray source, the nano cold cathode electron source layer emits electron beams under the action of an electric field, and the transmission anode target layer and the nano cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode, so that the electron beams can bombard the transmission anode target layer along the vertical direction and form X-rays vertical to the direction of the transmission anode target layer, the cold cathode X-ray source can uniformly emit the X-rays in all directions, and the cold cathode X-ray source can be applied to conformal imaging or conformal radiotherapy.
Drawings
Fig. 1 is a schematic structural diagram of a cold cathode X-ray source of embodiment 2.
Fig. 2 is a partial structural schematic diagram of a cold cathode X-ray source according to embodiment 3, wherein the left drawing of fig. 2 is a front view, and the right drawing of fig. 2 is a side view.
Fig. 3 is a partial structural schematic diagram of a cold cathode X-ray source according to embodiment 4, wherein the left drawing in fig. 3 is a front view, and the right drawing in fig. 3 is a side view.
Fig. 4 is a partial structural schematic diagram of a cold cathode X-ray source according to embodiment 5, in which the left drawing of fig. 4 is a front view, and the right drawing of fig. 4 is a side view.
Fig. 5 is a partial structural schematic diagram of a cold cathode X-ray source according to embodiment 6, in which the left drawing of fig. 5 is a front view, and the right drawing of fig. 5 is a side view.
Wherein, 1 is anode, 11 is anode substrate, 12 is transmission anode target layer, 13 is anode lead, 2 is cathode, 21 is cathode substrate, 22 is nanometer cold cathode electron source layer, 23 is conducting layer, 24 is cathode lead, 25 is cathode support, 3 is outer shell, 31 is exhaust piece, 32 is getter containing cavity, 4 is exhaust pipe, 5 is X-ray.
Detailed Description
In order to more clearly and completely describe the technical scheme of the invention, the invention is further described in detail by the specific embodiments, and it should be understood that the specific embodiments described herein are only used for explaining the invention, and are not used for limiting the invention, and various changes can be made within the scope defined by the claims of the invention.
Example 1
The present embodiment provides a cold cathode X-ray source comprising an anode and a cathode; the anode comprises an anode substrate and a transmission anode target layer which are sequentially stacked; the cathode comprises a cathode substrate and a nano cold cathode electron source layer capable of emitting electron beams, which are sequentially stacked; the transmission anode target layer and the nanometer cold cathode electron source layer are arranged oppositely and are nested in a concentric vacuum mode. The cold cathode X-ray source can design a nano cold cathode electron source layer capable of emitting electron beams into different shapes according to the requirement of the X-ray emitting direction during use, for example, the shape combining a hemispherical shape in figure 1, a hemispherical curved surface in figure 2 and a cylindrical side surface, and then the transmission anode target layer and the nano cold cathode electron source layer are arranged in a relative and concentric nested mode, so that the cold cathode X-ray source can uniformly emit X-rays in all directions, and the cold cathode X-ray source can be applied to conformal imaging or conformal radiotherapy.
Example 2
The present embodiment provides a cold cathode X-ray source comprising, as shown in fig. 1, an anode 1, a cathode 2, a housing 3 and an exhaust tube 4. The anode 1 includes an anode substrate 11 and a transmissive anode target layer 12 stacked in this order, and an anode lead 13 electrically connected to the transmissive anode target layer 12. The cathode 2 includes a cathode substrate 21 and a nano-cold cathode electron source layer 22 stacked in this order, and a cathode support 25 located below the cathode substrate 21 and electrically connected to the cathode substrate 21. The shell 3 encloses the anode substrate 11 and forms a vacuum region between the transmission anode target layer 12 and the nano cold cathode electron source layer 22, and the pressure in the vacuum region is 1 × 10 - 6 Pa, an exhaust part 31 and a getter containing cavity 32 are arranged on the shell 3, the exhaust part 31 is an exhaust hole, the exhaust hole is communicated with the exhaust pipe 4, and the getter containing cavity 32 is communicated with the vacuum area.
The anode substrate 11 is a quartz substrate with a thickness of 1mm, and the anode transmissive target 12 is a tungsten layer with a thickness of 1 μm. The cathode substrate 21 is an aluminum substrate with a thickness of 3mm, and the nano cold cathode electron source layer 22 is a CuO nanowire layer. The minimum distance between the transmission anode target layer 12 and the nano-cold cathode electron source layer 22 is 5 mm.
The anode 1 and the cathode 2 are shaped as shown in fig. 1, wherein the cathode substrate 21 includes a hemispherical upper portion and a semi-ellipsoidal lower portion, the upper portion and the lower portion are combined to form a closed shape, the nano cold cathode electron source layer 22 is fully covered on the hemispherical curved surface of the cathode substrate 21, that is, the nano cold cathode electron source layer 22 is shaped as a hemispherical curved surface, the transmission anode target layer 12 is shaped as a hemispherical curved surface, and the nano cold cathode electron source layer 22 and the transmission anode target layer 12 are opposite and concentrically nested. The cold cathode X-ray source of the embodiment can uniformly emit X-rays on a hemispherical curved surface, and the emitting direction of the X-rays is shown as the X-rays 5 in figure 1.
Example 3
The present embodiment provides a cold cathode X-ray source comprising an anode 1, a cathode 2, a housing 3 and an exhaust tube 4. The anode 1 includes an anode substrate 11 and a transmissive anode target layer 12 stacked in this order, and an anode lead 13 electrically connected to the transmissive anode target layer 12. The cathode 2 includes a cathode substrate 21 and a nano-cold cathode electron source layer 22, which are sequentially stacked, and a cathode lead 24 electrically connected to the cathode substrate 21. The shell 3 encloses the anode substrate 11 and forms a vacuum region between the transmission anode target layer 12 and the nano cold cathode electron source layer 22, and the pressure in the vacuum region is 5 × 10 -7 Pa, the shell 3 is provided with an exhaust part 31 and a getter containing cavity 32, the exhaust part 31 is an exhaust hole, the exhaust hole is communicated with the exhaust pipe 4, and the getter containing cavity 32 is communicated with the vacuum area.
The anode substrate 11 is a glass substrate with a thickness of 2mm, and the anode transmissive target 12 is a molybdenum layer with a thickness of 1 μm. The cathode substrate 21 is a brass substrate with a thickness of 5mm, and the nano cold cathode electron source layer 22 is a ZnO nanowire layer. The minimum distance between the transmission anode target layer 12 and the nanometer cold cathode electron source layer 22 is 5 mm.
The anode 1 and the cathode 2 are shaped as shown in fig. 2, the left drawing of fig. 2 is a front view, the right drawing of fig. 2 is a side view, wherein the cathode substrate 21 comprises a right part in a hemispherical shape and a left part in a cylindrical shape, the hemispherical bottom surface of the right part and the cylindrical bottom surface of the left part are combined and sealed, the nano cold cathode electron source layer 22 is fully covered on the hemispherical curved surface of the right part and the cylindrical side surface of the left part of the cathode substrate 21, i.e. the nano cold cathode electron source layer 22 is shaped as a combination of the hemispherical curved surface and the cylindrical side surface, the transmissive anode target layer 12 is also shaped as a combination of the hemispherical curved surface and the cylindrical side surface, and the nano cold cathode electron source layer 22 is opposite to and concentrically nested with the transmissive anode target layer 12. The cold cathode X-ray source of the embodiment can uniformly emit X-rays on the curved surface and the cylindrical side surface of the hemisphere. The direction in which the X-rays exit is shown as X-rays 5 in fig. 2.
Example 4
The present embodiment provides a cold cathode X-ray source comprising an anode 1, a cathode 2, a housing 3 and an exhaust tube 4. The anode 1 includes an anode substrate 11 and a transmissive anode target layer 12 stacked in this order, and an anode lead 13 electrically connected to the transmissive anode target layer 12. The cathode 2 includes a cathode substrate 21, a conductive layer 23, and a nano-cold cathode electron source layer 22, which are sequentially stacked, and a cathode lead 24 electrically connected to the conductive layer 23. The shell 3 encloses the anode substrate 11 and forms a vacuum region between the transmission anode target layer 12 and the nano cold cathode electron source layer 22, and the pressure of the vacuum region is 2 × 10 -6 Pa, an exhaust part 31 and a getter containing cavity 32 are arranged on the shell 3, the exhaust part 31 is an exhaust hole, the exhaust hole is communicated with the exhaust pipe 4, and the getter containing cavity 32 is communicated with the vacuum area.
The anode substrate 11 is a glass substrate with a thickness of 3mm, and the anode transmission target 12 is a gold layer with a thickness of 1 μm. The cathode substrate 21 is a glass substrate with a thickness of 6mm, the conductive layer 23 is an ITO (indium tin oxide) layer with a thickness of 50nm, and the nano cold cathode electron source layer 22 is a ZnO nanowire layer. The minimum distance between the transmission anode target layer 12 and the nanometer cold cathode electron source layer 22 is 5 mm.
The anode 1 and the cathode 2 are shaped as shown in fig. 3, the left drawing of fig. 3 is a front view, the right drawing of fig. 3 is a side view, wherein the cathode substrate 21 comprises a right part in a hemispherical shape and a left part in a cylindrical shape, the bottom surface of the right part in the hemispherical shape is combined with the bottom surface of the left part in the cylindrical shape and is closed, the nano cold cathode electron source layer 22 is fully covered on the hemispherical curved surface of the cathode substrate 21 and is covered on the side surface of the cylindrical shape far away from the hemispherical curved surface, the side surface of the cylindrical shape not covered with the hemispherical curved surface, the shape close to, i.e., the nano cold cathode electron source layer 22 comprises a shape separating the hemispherical curved surface shape and the cylindrical side surface from each other, the shape of the transmission anode target layer 12 is a shape combining the hemispherical curved surface and the cylindrical side surface, and the nano cold cathode electron source layer 22 is arranged opposite to and concentrically nested with the transmission anode target layer 12. The cold cathode X-ray source of the embodiment can uniformly emit X-rays on the curved surface and the cylindrical partial side surface of the hemisphere, and the X-ray emitting area is divided into areas, so that the X-rays can be emitted in an addressing mode through different areas. The direction in which the X-rays exit is shown as X-rays 5 in fig. 3.
Example 5
The present embodiment provides a cold cathode X-ray source comprising an anode 1, a cathode 2, a housing 3 and an exhaust tube 4. The anode 1 includes an anode substrate 11 and a transmissive anode target layer 12 stacked in this order, and an anode lead 13 electrically connected to the transmissive anode target layer 12. The cathode 2 includes a cathode substrate 21, a conductive layer 23, and a nano-cold cathode electron source layer 22, which are sequentially stacked, and a cathode lead 24 electrically connected to the conductive layer 23. The casing 3 encloses the anode substrate 11 and forms a vacuum region between the transmission anode target layer 12 and the nano cold cathode electron source layer 22, and the pressure in the vacuum region is 5 × 10 -6 Pa, an exhaust part 31 and a getter containing cavity 32 are arranged on the shell 3, the exhaust part 31 is an exhaust hole, the exhaust hole is communicated with the exhaust pipe 4, and the getter containing cavity 32 is communicated with the vacuum area.
The anode substrate 11 is a glass substrate with a thickness of 2mm, and the anode transmissive target 12 is a tungsten layer with a thickness of 2 μm. The cathode substrate 21 is a glass substrate with a thickness of 10mm, the conductive layer 23 is an aluminum layer with a thickness of 100nm, and the nano cold cathode electron source layer 22 is WO 3 And a nanowire layer. The minimum distance between the transmission anode target layer 12 and the nanometer cold cathode electron source layer 22 is 10 mm.
The shapes of the anode 1 and the cathode 2 are shown in fig. 4, the left drawing of fig. 4 is a front view, the right drawing of fig. 4 is a side view, wherein the cathode substrate 21 is spherical, the nano cold cathode electron source layer 22 covers the upper half part and the lower half part of the spherical curved surface of the cathode substrate 21, and does not cover the middle part where the upper hemisphere and the lower hemisphere are connected, i.e. the shape of the nano cold cathode electron source layer 22 comprises two hemispherical partially curved surface shapes separated from each other, the shape of the transmission anode target layer 12 is spherical, and the nano cold cathode electron source layer 22 is opposite to and concentrically nested with the transmission anode target layer 12. The cold cathode X-ray source of the embodiment can realize uniform emission of X-rays on a spherical part of a curved surface, and the X-rays can be emitted in an addressing mode through different areas because the X-ray emitting area is divided into areas. The direction in which the X-rays exit is shown as X-rays 5 in fig. 4.
Example 6
The present embodiment provides a cold cathode X-ray source comprising an anode 1, a cathode 2, a housing 3 and an exhaust tube 4. The anode 1 includes an anode substrate 11 and a transmissive anode target layer 12 stacked in this order, and an anode lead 13 electrically connected to the transmissive anode target layer 12. The cathode 2 includes a cathode substrate 21, a conductive layer 23, and a nano cold cathode electron source layer 22, which are sequentially stacked, and a cathode lead 24 electrically connected to the conductive layer 23. The shell 3 encloses the anode substrate 11 and forms a vacuum region between the transmission anode target layer 12 and the nano cold cathode electron source layer 22, and the pressure in the vacuum region is 4 × 10 -7 Pa, an exhaust part 31 and a getter containing cavity 32 are arranged on the shell 3, the exhaust part 31 is an exhaust hole, the exhaust hole is communicated with the exhaust pipe 4, and the getter containing cavity 32 is communicated with the vacuum area.
The anode substrate 11 is a ceramic substrate with a thickness of 1mm, and the anode transmission target 12 is a molybdenum layer with a thickness of 2 μm. The cathode substrate 21 is a ceramic substrate with a thickness of 10mm, the conductive layer 23 is a chromium layer with a thickness of 1 μm, and the nano cold cathode electron source layer 22 is a carbon nanotube layer. The minimum distance between the transmission anode target layer 12 and the nanometer cold cathode electron source layer 22 is 8 mm.
The shapes of the anode 1 and the cathode 2 are shown in fig. 5, the left drawing of fig. 5 is a front view, the right drawing of fig. 5 is a side view, wherein the cathode substrate 21 is in the shape of a triangular prism, the nano cold cathode electron source layer 22 covers the side surfaces of the triangular prism of the cathode substrate 21, and the connected parts of the side surfaces are not covered, namely, the nano cold cathode electron source layer 22 has the shape of three plane shapes independent of each other, the transmission anode target layer 12 is in the shape of a triangular prism, and the nano cold cathode electron source layer 22 is opposite to and concentrically nested with the transmission anode target layer 12. The cold cathode X-ray source of the embodiment can uniformly emit X-rays on three planes, and because the X-ray emitting area is divided into areas, the X-rays can be emitted by addressing through different areas. The direction in which the X-rays exit is shown as X-rays 5 in fig. 5.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. A cold cathode X-ray source, characterized by comprising an anode (1) and a cathode (2);
the anode (1) comprises an anode substrate (11) and a transmission anode target layer (12) which are stacked; the cathode (2) comprises a cathode substrate (21) and a nano cold cathode electron source layer (22) which can emit electron beams which are overlapped;
the transmission anode target layer (12) is arranged opposite to the nanometer cold cathode electron source layer (22) and is nested in a concentric vacuum mode.
2. Cold cathode X-ray source according to claim 1, characterized in that it further comprises an envelope (3) for enclosing the anode substrate (11) and forming a vacuum region between the transmissive anode target layer (12) and the nano-cold cathode electron source layer (22).
3. Cold cathode X-ray source according to claim 1, wherein the anode substrate (11) is a beryllium substrate, a silicon substrate, a glass substrate, a quartz substrate, a ceramic substrate or a high temperature resistant plastic substrate; the cathode substrate (21) is a conductive substrate or a non-conductive substrate.
4. Cold cathode X-ray source according to claim 1, wherein the transmitting anode target layer (12) is a tungsten target layer, a molybdenum target layer, a rhodium target layer, a silver target layer, a copper target layer, a gold target layer, a chromium target layer, an aluminum target layer, a niobium target layer, a tantalum target layer or a rhenium target layer.
5. Cold cathode X-ray source according to claim 1, wherein the nano cold cathode electron supply layer (22) has the shape: one or more of a spherical curved surface, a hemispherical curved surface, an ellipsoidal curved surface, a regular pear-shaped curved surface, a polyhedral side surface, a prismatic side surface, a conical side surface, a cylindrical side surface or a pyramidal side surface; the shape of the transmission anode target layer (12) is one or more of a spherical curved surface, a hemispherical curved surface, an ellipsoid curved surface, a regular pear-shaped curved surface, a polyhedral side surface, a prismatic side surface, a conical side surface, a cylindrical side surface or a pyramid side surface which is matched with the nanometer cold cathode electron source layer (22).
6. Cold cathode X-ray source according to claim 1, wherein the nano cold cathode electron source layer (22) consists of nanotubes or nanowires.
7. Cold cathode X-ray source according to claim 1, wherein the nano cold cathode electron source layer (22) is a carbon layer, a zinc oxide layer, a copper oxide layer, a tungsten oxide layer, a molybdenum oxide layer, an iron oxide layer, a titanium oxide nano layer or a tin oxide layer.
8. Cold cathode X-ray source according to claim 1, wherein the nano cold cathode electron source layer (22) is completely or partially covered on the cathode substrate (21).
9. Cold cathode X-ray source according to one of claims 1 or 8, wherein the cathode (2) further comprises an electrically conductive layer (23) arranged between the cathode substrate (21) and the nano-cold cathode electron source layer (22).
10. Use of the cold cathode X-ray source of any one of claims 1 to 9 in the manufacture of a conformal imager or a conformal radiotherapy apparatus.
CN202210623505.8A 2022-06-02 2022-06-02 Cold cathode X-ray source and application thereof Pending CN114999876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210623505.8A CN114999876A (en) 2022-06-02 2022-06-02 Cold cathode X-ray source and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210623505.8A CN114999876A (en) 2022-06-02 2022-06-02 Cold cathode X-ray source and application thereof

Publications (1)

Publication Number Publication Date
CN114999876A true CN114999876A (en) 2022-09-02

Family

ID=83030514

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210623505.8A Pending CN114999876A (en) 2022-06-02 2022-06-02 Cold cathode X-ray source and application thereof

Country Status (1)

Country Link
CN (1) CN114999876A (en)

Similar Documents

Publication Publication Date Title
KR101068680B1 (en) Ultra-small X-ray tube using nanomaterial field emission source
WO2016029811A1 (en) Electron source, x-ray source and device using x-ray source
KR100766907B1 (en) X-ray tube system with disassembled carbon nanotube substrate for generating micro focusing level electron-beam
US20070025516A1 (en) Magnetic head for X-ray source
CN105793952B (en) The electron emission structure configured with resistance to ion bombardment
CN101101848B (en) Field-emissive cathode X ray tube
KR101026863B1 (en) Super miniature x-ray tube using carbon nanotube field emitter
US9818569B2 (en) High dose output, through transmission target X-ray system and methods of use
JP2007538359A (en) High-dose X-ray tube
CN105632857B (en) Packaging structure of cold cathode X-ray generator and vacuumizing method thereof
US20140254755A1 (en) X-ray generation tube, x-ray generation device including the x-ray generation tube, and x-ray imaging system
TW201731156A (en) An electron guiding and receiving element
US7469039B2 (en) Device and method for generating an x-ray point source by geometric confinement
US11101096B2 (en) High dose output, through transmission and relective target X-ray system and methods of use
KR101586342B1 (en) Soft x-ray generator with improved neutralizing range and heat-dissipating function
CN106409638A (en) Flat-plate type X ray source device with double surfaces radiating X rays simultaneously
CN114999876A (en) Cold cathode X-ray source and application thereof
JP4268471B2 (en) Cold cathode manufacturing method and apparatus using cold cathode
CN117038419A (en) Carbon nanotube cold cathode micro-focus X-ray tube
RU2563879C1 (en) Miniature x-ray source
JP2005243331A (en) X-ray tube
JP2002042705A (en) Transmissive radiation type x-ray tube and manufacturing method thereof
CN109698105B (en) High dose delivery, transmission and reflection target X-ray system and method of use
CN105051858A (en) Shaped cathode for field emission arrangement
KR20100005858A (en) X-ray generation apparatus using carbon nano-tube

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination