CN114995052A

CN114995052A - Photomask plate cleaning device

Info

Publication number: CN114995052A
Application number: CN202210563067.0A
Authority: CN
Inventors: 孙宏
Original assignee: Shanghai Turing Intelligent Computing Quantum Technology Co Ltd
Current assignee: Shanghai Turing Intelligent Computing Quantum Technology Co Ltd
Priority date: 2022-05-18
Filing date: 2022-05-18
Publication date: 2022-09-02

Abstract

The invention discloses a photomask plate cleaning device, which is used for cleaning a photomask plate, and comprises: the device comprises a frame, a first groove and a second groove; the first tank is arranged on the frame and is used for containing cleaning liquid medicine, and the photomask plate is immersed in the cleaning liquid medicine; the second groove is arranged on the frame, the second groove and the first groove are arranged at intervals, and the second groove is used for flushing the photomask plate. Utilize first groove splendid attire washing liquid medicine to with the light cover version dip in washing liquid medicine, thereby can be comprehensive, thorough dissolve the pollutant, recycle the second groove and wash the light cover version, pollutant on the clearance light cover version that can be more thorough can avoid the light cover version to remain debris, and then can improve photoetching technology product yield, reduce the production of photoetching process defect. Meanwhile, the first groove and the second groove are arranged, so that the cleaning operation of the two photomask plates can be synchronously completed, and the cleaning efficiency of the photomask plate cleaning device can be improved.

Description

Photomask plate cleaning device

Technical Field

The invention relates to the field of chip manufacturing, in particular to a photomask plate cleaning device.

Background

The photomask plate is also called a photomask plate and a mask plate, and the photomask plate is a graphic master plate used in the photoetching process. The photomask plate can be used for manufacturing various functional patterns on a film, plastic or glass substrate material and accurately positioning the functional patterns, thereby facilitating the selective exposure of a photoresist coating. The mask plate is widely used, and the fields related to the photolithography process almost all need to use the mask plate, such as IC (Integrated Circuit), FPD (Flat Panel Display), PCB (Printed Circuit Boards), MEMS (Micro Electro Mechanical Systems ), and the like.

In the photolithography process, photolithography dust is often generated, and the mask plate may be contaminated by dust or other reasons, thereby affecting the yield of photolithography products.

Disclosure of Invention

The invention provides a photomask plate cleaning device, aiming at overcoming the defect that a photomask plate is polluted in the using process in the prior art.

The invention solves the technical problems through the following technical scheme:

a reticle plate cleaning apparatus for cleaning a reticle plate, the reticle plate cleaning apparatus comprising: the device comprises a frame, a first groove and a second groove; the first tank is arranged on the frame and is used for containing cleaning liquid medicine, and the photomask plate is immersed in the cleaning liquid medicine; the second groove is arranged in the rack, the second groove and the first groove are arranged at intervals, and the second groove is used for flushing the photomask plate.

In this scheme, through structure more than adopting, utilize first groove splendid attire washing liquid medicine to dip the light shield version in the washing liquid medicine, thereby can be comprehensive, thorough dissolve the pollutant, recycle the second groove and wash the light shield version, pollutant on the clearance light shield version that can be more thorough can avoid the light shield version to remain debris, and then can improve photoetching technology product yield, reduce the production of photoetching processing procedure defect. Meanwhile, the first groove and the second groove are arranged, so that the cleaning operation of the two photomask plates can be synchronously completed, and the cleaning efficiency of the photomask plate cleaning device can be improved.

Preferably, the device for cleaning the reticle plate further comprises a curtain part, the curtain part is arranged in the first groove, and the curtain part is used for spraying cleaning liquid to wash the reticle plate.

In this scheme, through adopting above structure, utilize curtain portion to wash the light shield version, can more thorough wash away residual cleaning solution and pollutant on the light shield version.

Preferably, the curtain portion comprises a pipe, a liquid storage cavity and an outlet which are communicated in sequence, cleaning liquid flows into the liquid storage cavity through the pipe, and the cleaning liquid is sprayed to the photomask plate through the outlet.

In this scheme, through adopting above structure, utilize the stock solution chamber can stabilize the pressure of washing liquid for the washing liquid flows more stably, controllable. The curtain part comprises an inlet pipe, a liquid storage cavity and an outlet which are communicated in sequence, and the curtain part is simple in structure and convenient to assemble.

Preferably, the height of the outlet corresponds to the height of the side edge of the photomask plate close to the outlet;

and/or the length of the outlet is greater than the length of the side edge of the photomask plate close to the outlet;

and/or, the inlet pipe comprises a main pipe and a plurality of branch pipes, the main pipe is communicated with the liquid storage cavity through the branch pipes, and the branch pipes are uniformly arranged at intervals along the length direction of the liquid storage cavity.

In this scheme, through structure more than adopting, the height of export is close to the high correspondence of the side of export with the light shield version for the washing liquid can directly wash the light shield version.

The length of the outlet is greater than that of the side edge of the photomask plate close to the outlet, so that the photomask plate can be cleaned more comprehensively, and dead angles of the photomask plate are avoided.

The branch pipes are arranged at even intervals along the length direction of the liquid storage cavity, so that the cleaning liquid can enter the liquid storage cavity at multiple positions simultaneously, the cleaning liquid flows into the liquid storage cavity more evenly, and the cleaning liquid in the liquid storage cavity is prevented from fluctuating on a large scale.

Preferably, the included angle between the bottom surface of the first groove and the horizontal plane ranges from 7 degrees to 25 degrees; the bottom surface of the first groove inclines downwards along the placing direction of the photomask plate;

the included angle between the bottom surface of the second groove and the horizontal plane ranges from 7 degrees to 25 degrees; the bottom surface of the second groove inclines downwards along the direction of putting the photomask plate.

In the scheme, by adopting the structure, the included angle ranges from 7 degrees to 25 degrees, so that the cleaning liquid medicine and the cleaning liquid are convenient to collect.

Preferably, the photomask plate cleaning device further comprises a plurality of supporting pieces, the supporting pieces are arranged at the bottom of the first groove at intervals, and the photomask plate is placed on the upper side face of each supporting piece;

or the upper side surface of the support piece is arranged on the anti-skid step;

and/or the photomask plate cleaning device further comprises a rectangular groove, and the rectangular groove is arranged on the side surface of the first groove;

and/or, the reticle plate cleaning device further comprises a circular groove, and the circular groove is arranged on the side surface of the first groove.

In this scheme, through adopting above structure, through placing support piece with the light shield version on, the light shield version of being convenient for get, put, also be convenient for wash the light shield version better.

The anti-slip step can improve the stability of the photomask plate and prevent the photomask plate from accidentally sliding in the cleaning process.

The rectangular groove can be used for placing cleaning liquid medicine, such as NAOH and the like, and the circular groove can be used for placing a beaker for containing sulfuric acid.

Preferably, the mask plate cleaning device further comprises a flushing port, the flushing port is arranged in the second groove, and the flushing port is used for flowing out flushing liquid.

In this scheme, through adopting above structure, the mouth is washed in the utilization, the washing light cover version that can be more thorough.

Preferably, the reticle plate cleaning device further comprises a first waste discharge pipeline, and the first waste discharge pipeline is used for discharging liquid in the first groove to the outside of the reticle plate cleaning device;

and/or, the photomask plate cleaning device further comprises a second waste discharge pipeline, and the second waste discharge pipeline is used for discharging and placing the liquid in the second groove outside the photomask plate cleaning device.

In this scheme, through structure more than adopting, utilize first exhaust pipe, the exhaust pipe of second to discharge the raffinate, can be so that the light cover version washs cleaner.

Preferably, the photomask plate cleaning device further comprises an air exhaust assembly, the air exhaust assembly is arranged at the top of the rack, an operation space is formed above the first groove and the second groove, and the air exhaust assembly is used for exhausting gas in the operation space to be placed outside the photomask plate cleaning device.

In this scheme, through adopting above structure, utilize the subassembly of bleeding to extract the gas in the operating space, can be so that the operating space forms the negative pressure, avoid the gas overflow in the operating space.

Preferably, the photomask plate cleaning device further comprises a first pedal operation part, a first control part and a first execution part which are in communication connection, wherein the first pedal operation part is arranged on the ground close to the first groove, and the first pedal operation part is used for sending an opening signal to the first control part; the first control part is used for receiving the starting signal and sending a starting signal to the first execution part; the first execution part is used for receiving the starting signal, and the first execution part is also used for opening the curtain part of the first groove;

and/or the photomask plate cleaning device further comprises a second pedal operation part, a second control part and a second execution part which are in communication connection, wherein the second pedal operation part is arranged on the ground close to the second groove and used for sending an opening signal to the second control part; the second control part is used for receiving the starting signal and sending a starting signal to the second execution part; the second execution part is used for receiving the starting signal and opening a flushing port of the second groove.

On the basis of the common knowledge in the field, the above preferred conditions can be combined randomly to obtain the preferred embodiments of the invention.

The positive progress effects of the invention are as follows:

according to the invention, the first tank is used for containing the cleaning liquid medicine, and the photomask plate is immersed in the cleaning liquid medicine, so that pollutants can be completely dissolved, and then the second tank is used for washing the photomask plate, so that the pollutants on the photomask plate can be more completely cleaned, the residual impurities on the photomask plate can be avoided, the yield of photoetching process products can be improved, and the generation of photoetching process defects can be reduced. Meanwhile, the first groove and the second groove are arranged, so that the cleaning operation of the two photomask plates can be synchronously completed, and the cleaning efficiency of the photomask plate cleaning device can be improved.

Drawings

FIG. 1 is a schematic diagram of a reticle cleaning apparatus in a reticle cleaning system according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional diagram of the reticle cleaning apparatus of FIG. 1.

FIG. 3 is a schematic view of the first groove and the curtain portion of the reticle cleaning apparatus of FIG. 1.

Fig. 4 is a structural schematic view of the first slot and the curtain portion in fig. 3 from another perspective.

FIG. 5 is a schematic side view of a first groove of the reticle cleaning apparatus of FIG. 1.

FIG. 6 is a schematic side view of the curtain portion of the reticle cleaning apparatus of FIG. 1.

FIG. 7 is a schematic diagram of a second groove and a flushing port of the reticle cleaning apparatus of FIG. 1.

FIG. 8 is a side view of the second tank and the flushing port of FIG. 7.

FIG. 9 is a schematic diagram of a reticle drying apparatus in a reticle cleaning system according to an embodiment of the present invention.

FIG. 10 is a schematic cross-sectional view of the mask drying apparatus of FIG. 9.

FIG. 11 is a schematic cross-sectional view of the mask blank drying apparatus of FIG. 9 from another perspective.

FIG. 12 is a schematic view of a drying rack of the mask plate drying apparatus shown in FIG. 9.

Description of reference numerals:

photomask plate cleaning device 100

Frame 11

Rectangular groove 12

Circular groove 13

Air extraction assembly 14

Partition 15

Air inlet 16

Operating space 17

Lower level space 18

Lifting door 19

First groove 20

Bottom surface 21

Support member 22

Anti-slip step 221

First waste pipe 23

First pedal operation part 24

Second groove 30

Flushing port 31

Second waste pipe 32

Second pedal operation part 33

Air gun 34

Water pistol 35

Curtain part 40

Inlet pipe 41

Trunk 411

Branch pipe 412

Reservoir 42

An outlet 43

Regulating valve 44

Electromagnetic valve 45

Photomask plate drying device 500

Case 51

Box door 511

Longitudinal partition plate 52

Front space 53

Rear space 54

Supporting rod 55

Air vent 56

Blowing filter 57

Drying rack 60

Vertical support part 61

Bottom 62

Projecting member 63

Blocking member 64

Exhaust part 70

Bottom row assembly 80

Confluence cabin 81

Liquid outlet 82

Liquid inlet 83

Photomask plate 90

Detailed Description

The present invention will be more clearly and completely described below by way of examples in conjunction with the accompanying drawings, but the present invention is not limited thereto.

Referring to fig. 1-12, the present embodiment is a reticle cleaning system for cleaning a reticle 90, the reticle cleaning system comprising a reticle cleaning device 100 and a reticle drying device 500, the reticle cleaning device 100 being configured to clean the reticle 90, and the reticle drying device 500 being configured to dry the reticle 90 processed by the reticle cleaning device 100. The photomask plate cleaning device 100 of the photomask plate cleaning system is used for physically or chemically cleaning the photomask plate 90, then the cleaned photomask plate 90 is placed into the photomask plate drying device 500, and impurities such as residual liquid and the like of the photomask plate 90 are taken out by the photomask plate drying device 500, so that the photomask plate 90 is cleaned, the impurities or the residual liquid of the photomask plate 90 can be avoided, the yield of photoetching process products can be improved, and the generation of photoetching process defects can be reduced.

In one embodiment, the reticle cleaning device 100 and the reticle drying device 500 of the reticle cleaning system may be disposed independently of each other, or the reticle cleaning device 100 and the reticle drying device 500 may be disposed as an integral structure.

By adopting the photomask plate cleaning system to clean the photomask plate 90, the average cleaning time can be controlled to be about 20min, the cleaning efficiency and the quality yield of the yellow light station process can be improved, the cost of cleaning the photomask plate 90 once is about 150 yuan, the conventional cleaning treatment cost is about 300 yuan, and the cleaning cost of the photomask plate 90 can be obviously reduced by using the photomask plate cleaning system of the embodiment.

Referring to fig. 1-8, the present embodiment is a system for cleaning a photomask plate 90, the system comprising a photomask plate cleaning apparatus 100 and a photomask plate drying apparatus 500, the photomask plate cleaning apparatus 100 is used for cleaning the photomask plate 90, and the photomask plate drying apparatus 500 is used for drying the photomask plate 90 processed by the photomask plate cleaning apparatus 100. The photomask plate cleaning device 100 of the photomask plate cleaning system is used for physically or chemically cleaning the photomask plate 90, then the cleaned photomask plate 90 is placed into the photomask plate drying device 500, and impurities such as residual liquid and the like of the photomask plate 90 are taken out by the photomask plate drying device 500, so that the photomask plate 90 is cleaned, the impurities or the residual liquid of the photomask plate 90 can be avoided, the yield of photoetching process products can be improved, and the generation of photoetching process defects can be reduced.

In one embodiment, the reticle cleaning device 100 and the reticle drying device 500 of the reticle cleaning system may be provided separately from each other, or the reticle cleaning device 100 and the reticle drying device 500 may be provided as an integral structure.

As shown in fig. 1-8, the present embodiment is a reticle plate cleaning apparatus 100 for cleaning a reticle plate 90, the reticle plate cleaning apparatus 100 comprising: a frame 11, a first tank 20, and a second tank 30; the first tank 20 is arranged on the frame 11, the first tank 20 is used for containing cleaning liquid medicine, and the photomask plate 90 is immersed in the cleaning liquid medicine; second groove 30 is disposed in frame 11, second groove 30 is spaced apart from first groove 20, and second groove 30 is used for rinsing reticle plate 90. Utilize first groove 20 splendid attire washing liquid medicine to with light cover version 90 dip in washing liquid medicine, thereby can be comprehensive, thorough dissolve the pollutant, recycle second groove 30 washes light cover version 90, pollutant on clearance light cover version 90 that can be more thorough can avoid light cover version 90 to remain debris, and then can improve photoetching technology product yield, reduce the production of photoetching process defect. Meanwhile, the first groove 20 and the second groove 30 are arranged, so that the cleaning operation of the two photomask plates 90 can be completed synchronously, and the cleaning efficiency of the photomask plate cleaning device 100 can be improved.

The reticle cleaning apparatus 100 further includes a curtain portion 40, the curtain portion 40 is provided in the first tank 20, and the curtain portion 40 is used for spraying a cleaning solution to wash the reticle 90. The curtain portion 40 is used for washing the photomask plate 90, so that residual cleaning liquid medicine and pollutants on the photomask plate 90 can be more thoroughly washed away. The curtain portion 40 may be embodied as a water curtain-like structure, such as may include a nozzle, shower-like structure. The structure with strip-shaped gaps and the like can form a water curtain.

As shown in fig. 3-6, the curtain portion 40 includes a tube 41, a reservoir 42 and an outlet 43, which are sequentially connected to each other, and the cleaning liquid flows into the reservoir 42 through the tube 41 and is sprayed to the reticle 90 through the outlet 43. The pressure of the cleaning liquid can be stabilized by the liquid storage cavity 42, so that the flow of the cleaning liquid is more stable and controllable. The curtain part 40 comprises an inlet pipe 41, a liquid storage cavity 42 and an outlet 43 which are communicated in sequence, and the structure is simple and the assembly is convenient.

The inlet pipe 41 comprises a main pipe 411 and a plurality of branch pipes 412, the main pipe 411 is communicated with the liquid storage cavity 42 through the branch pipes 412, and the plurality of branch pipes 412 are uniformly arranged at intervals along the length direction of the liquid storage cavity 42. The plurality of branch pipes 412 are arranged along the length direction of the liquid storage cavity 42 at uniform intervals, so that the cleaning liquid can enter the liquid storage cavity 42 at multiple positions simultaneously, the cleaning liquid can more uniformly flow into the liquid storage cavity 42, and the cleaning liquid in the liquid storage cavity 42 is prevented from fluctuating in a large range.

The height of outlet 43 corresponds to the height of the side of reticle plate 90 near outlet 43; the height of outlet 43 corresponds to the height of the side of reticle plate 90 near outlet 43, so that the cleaning solution can directly wash reticle plate 90.

The length of outlet 43 is greater than the length of the side of reticle plate 90 near outlet 43; the length of the outlet 43 is larger than that of the side edge of the light shield plate 90 close to the outlet 43, so that the light shield plate 90 can be cleaned more comprehensively, and dead angles of the light shield plate 90 are avoided.

In one embodiment, the reservoir 42 may be a rectangular parallelepiped, and the trunk 411 may be connected in parallel with 3 branch pipes 412 arranged at regular intervals. Each branch 412 is provided with a regulating valve 44, and the regulating valve 44 can control the flow rate of each branch 412, so that three branches 412 with different positions can supply liquid to the liquid storage cavity 42 at controllable flow rates. The outlet 43 is in a long strip slit shape, the cleaning liquid flows out through the outlet 43 to form a curtain shape, the height of the outlet 43 is consistent with that of the photomask plate 90, and the cleaning liquid can directly flow onto the photomask plate 90.

The trunk pipe 411 may be provided with a solenoid valve 45, and the solenoid valve 45 may control the opening or closing of the curtain portion 40.

The included angle between the bottom surface 21 of the first groove 20 and the horizontal plane is 7-25 degrees; the bottom surface 21 of the first groove 20 is inclined downward in the direction in which the mask blank 90 is placed. The included angle between the bottom surface 21 of the second groove 30 and the horizontal plane is 7-25 degrees; the bottom surface 21 of the second groove 30 is inclined downward in the direction in which the mask blank 90 is placed. The included angle is 7-25 degrees, which is convenient for collecting the cleaning liquid medicine and the cleaning liquid. Specifically, the included angle between the bottom surface 21 of the first groove 20 and the horizontal plane and the included angle between the bottom surface 21 of the second groove 30 and the horizontal plane may be 10 °, 15 ° or 20 °.

As shown in fig. 4, the reticle plate cleaning apparatus 100 further includes a plurality of supporting members 22, the plurality of supporting members 22 are spaced apart from the bottom of the first groove 20, and the reticle plate 90 is placed on the upper side of the supporting members 22; by placing reticle plate 90 on support 22, the taking and placing of reticle plate 90 is facilitated, as well as better cleaning of reticle plate 90. As an embodiment, the supporting member 22 may be a plate, and the supporting member 22 may be integrally formed with the first groove 20. The upper side of support member 22 is lower than the liquid outlet of curtain portion 40, and the distance between the upper side of support member 22 and the liquid outlet of curtain portion 40 may range less than 13 mm. The thickness of the supporting member 22 may be 5mm, the length may be 700mm, and the distance between two adjacent supporting members 22 may be 40 mm. When the mask plate 90 is washed, the mask plate 90 is placed on the supporting member 22 for washing, so that the cleaning effect is improved, and the cleaning dead angle is avoided.

The upper side surface of the supporting piece 22 is arranged on the anti-skid step 221; the anti-slip step 221 can improve the stability of the mask plate 90 and prevent the mask plate 90 from accidentally slipping during the cleaning process.

Reticle plate cleaning apparatus 100 further includes a rectangular slot 12, rectangular slot 12 being disposed on a side of first slot 20. The reticle plate cleaning device 100 further includes a circular groove 13, and the circular groove 13 is provided on a side surface of the first groove 20. The rectangular tank 12 can be used for placing cleaning liquid medicine, such as NAOH and the like, and the circular tank 13 can be used for placing a beaker for containing sulfuric acid. The rectangular groove 12 and the circular groove 13 are arranged in series, and the circular groove 13 is closer to the operator.

In one embodiment, a drain pipe may be disposed at the bottom of the rectangular tank 12 for draining the waste liquid in the rectangular tank 12.

As shown in fig. 1, an air gun 34 and a water gun 35 are further disposed on the side of the circular groove 13, so that the mask plate 90 can be cleaned more thoroughly.

As shown in fig. 7 and 8, the reticle plate cleaning apparatus 100 further includes a rinse port 31, the rinse port 31 is provided in the second tank 30, and the rinse port 31 is used for discharging rinse liquid. By using the rinse port 31, the reticle plate 90 can be cleaned more thoroughly.

The reticle plate cleaning apparatus 100 further includes a first waste pipe 23, and the first waste pipe 23 is used for discharging the liquid in the first tank 20 to the outside of the reticle plate cleaning apparatus 100. The reticle plate cleaning apparatus 100 further includes a second waste conduit 32, the second waste conduit 32 being configured to drain liquid from the second tank 30 to an exterior of the reticle plate cleaning apparatus 100. Residual liquid is discharged by the first waste discharge pipeline 23 and the second waste discharge pipeline 32, so that the photomask blank 90 can be cleaned more cleanly. The first waste discharge pipeline 23 and the second waste discharge pipeline 32 discharge liquid independently, so that the cleaning liquid medicine is convenient to recycle, and the chemical reagent liquid medicine can be prevented from falling on the working table.

In one embodiment, the first groove 20 and the second groove 30 may be rectangular grooves 12 as a whole.

The reticle plate cleaning device 100 further comprises an air pumping assembly 14, the air pumping assembly 14 is arranged at the top of the frame 11, an operation space 17 is formed above the first groove 20 and the second groove 30, and the air pumping assembly 14 is used for exhausting air in the operation space 17 to the outside of the reticle plate cleaning device 100. The air in the operation space 17 is extracted by the air extraction assembly 14, so that the operation space 17 forms a negative pressure, and the air in the operation space 17 is prevented from overflowing.

As shown in fig. 1 and 2, the reticle cleaning apparatus 100 is a cube shape as a whole, and four types of the reticle cleaning apparatus 100 have a surrounding plate to form a space independent of each other. The upper part of the first and

second tanks

20 and 30 is an operation space 17, and the lower part of the first and

second tanks

20 and 30 is a lower space 18. The lower space 18 can house the pneumatic and electric equipment of the reticle cleaning apparatus 100.

The reticle plate cleaning device 100 further comprises a partition 15, the partition 15 divides the interior of the reticle plate cleaning device 100 into a front part and a rear part, and the first groove 20 and the second groove 30 are both in front of the partition 15. The baffle 15 is provided with a plurality of air inlets 16, and the air extraction assembly 14 is arranged behind the baffle 15. The exhaust of the pumping assembly 14 is disposed at the top of the reticle plate cleaning apparatus 100. Other components required by reticle cleaning apparatus 100 may also be disposed behind spacer 15. The partition 15 prevents corrosive gas in the operating space 17 from entering behind the partition 15, and prevents parts behind the partition 15 from being corroded.

To facilitate operation, reticle plate cleaning apparatus 100 may also have lift gate 19, and by opening lift gate 19, an operator may place reticle plate 90 into first slot 20 or second slot 30.

The photomask blank cleaning device 100 further comprises a first pedal operation part 24, a first control part and a first execution part which are in communication connection, wherein the first pedal operation part 24 is arranged on the ground close to the first groove 20, and the first pedal operation part 24 is used for sending an opening signal to the first control part; the first control part is used for receiving the starting signal and sending a starting signal to the first execution part; the first executing part is used for receiving a starting signal and opening the curtain part 40 of the first groove 20;

the reticle plate cleaning device 100 further comprises a second foot-operated part 33, a second control part and a second execution part which are in communication connection, wherein the second foot-operated part 33 is arranged on the ground close to the second groove 30, and the second foot-operated part 33 is used for sending an opening signal to the second control part; the second control part is used for receiving the starting signal and sending a starting signal to the second execution part; the second actuator is used to receive the start signal and also to open the flushing port 31 of the second tank 30.

By providing the first foot operation unit 24 and the second foot operation unit 33, the first and second execution units can be controlled by the foot units, and the operation of the operator's hand is not delayed. In one embodiment, the first and second foot-operated

portions

24 and 33 may be foot switches, the first and second control portions may control circuit components, the first and second actuators may be solenoid valves 45, and the solenoid valves 45 may control the curtain portion 40 and the flushing port 31.

As an embodiment, the mask plate 90 may be held by a hand or a mechanical arm, and the mask plate 90 may be placed in the first tank 20, a cleaning agent such as sulfuric acid may be placed in the first tank 20, the mask plate 90 may be brushed by the brush simultaneously for 60s, and the mask plate 90 may be rinsed by the curtain portion 40, the rinsing liquid may be deionized water, and then the mask plate 90 may be placed in the second tank 30, and the rinsing of the mask plate 90 may be continued for 2 min.

As shown in fig. 9-12, there is shown a reticle drying apparatus 500 for drying a reticle 90 in a reticle cleaning system, the reticle drying apparatus 500 comprising: the drying device comprises a box body 51, a drying rack 60 and an air exhaust part 70, wherein the drying rack 60 is arranged in the box body 51, and the drying rack 60 is used for fixing a photomask plate 90; the exhaust portion 70 is used to exhaust the gas inside the case 51 to the outside of the case 51. The cleaned light mask plate 90 can be placed on the drying rack 60, and meanwhile, the air in the box body 51 is extracted by the air exhaust part 70, so that residual liquid on the light mask plate 90 is taken away, the light mask plate 90 is dried, residual liquid on the light mask plate 90 can be avoided, the yield of photoetching process products can be improved, and the generation of photoetching process defects is reduced.

The drying rack 60 includes a vertical supporting portion 61 and a bottom portion 62 connected to each other, the bottom portion 62 is used for supporting the lower side of the mask plate 90, the vertical supporting portion 61 is used for supporting the upper side of the mask plate 90, and the mask plate 90 leans against between the bottom portion 62 and the vertical supporting portion 61. The drying rack 60 comprises a vertical supporting part 61 and a bottom part 62 which are connected, the structure is simple and stable, the photomask plate 90 can stably lean against the space between the vertical supporting part 61 and the bottom part 62, and the photomask plate 90 can be conveniently placed into the drying rack 60 or taken out from the drying rack 60. In this embodiment, the vertical supporting portion 61 and the bottom portion 62 may be plate-shaped, net-shaped, fence-shaped, etc., the vertical supporting portion 61 and the bottom portion 62 may be joined in an L-shape, and in other embodiments, the drying rack 60 may have other configurations.

The drying rack 60 has a width smaller than that of the case 51. The width of the drying rack 60 is smaller than that of the box body 51, so that a gap is formed between the drying rack 60 and the side wall of the box body 51, thereby facilitating the gas flow in the box body 51 and improving the drying efficiency.

The mask plate drying device 500 further comprises a plurality of protruding members 63, the protruding members 63 are arranged on the side faces of the vertical supporting portions 61 at intervals, and the mask plate 90 leans against the vertical supporting portions 61 through the protruding members 63. The plurality of protruding members 63 are arranged on the upper side of the bottom 62 at intervals, and the lower side of the photomask plate 90 is pressed on the protruding members 63. The protruding part 63 separates the light shield plate 90 from the vertical supporting part 61 and the bottom part 62, so that the air can flow between the light shield plate 90 and the vertical supporting part 61 and the bottom part 62, and the residual liquid on the light shield plate 90 can flow out conveniently. In this embodiment, the protruding member 63 may have a long plate shape, and in other embodiments, the protruding member 63 may have a columnar shape, a triangular shape, or the like.

Reticle plate drying apparatus 500 further includes a stop member 64, stop member 64 being disposed along the length of base 62, stop member 64 being configured to prevent reticle plate 90 from sliding. The blocking member 64 prevents the mask plate 90 from sliding, thereby improving the stability of the mask plate 90. In the present embodiment, the blocking member 64 may be a long angle iron, a square tube, or the like. The blocking member 64 extends across the bottom 62 and the protruding members 63 are provided on both sides of the blocking member 64.

The mask plate drying device 500 further comprises a bottom row assembly 80, the bottom row assembly 80 is used for discharging liquid in the drying rack 60, and a liquid inlet 83 of the bottom row assembly 80 is arranged at the bottom 62. Bottom row element 80 facilitates the draining of residual liquid that flows down from reticle plate 90.

As shown in fig. 11 and 12, the bottom row assembly 80 further includes a plurality of confluence chambers 81 and liquid outlets 82, the liquid inlets 83 are disposed on the bottom 62, and the liquid in the drying rack 60 flows out through the liquid inlets 83, the confluence chambers 81 and the liquid outlets 82 in sequence. The bottom row assembly 80 comprises a plurality of liquid inlets 83, a confluence chamber 81 and a liquid outlet 82, and has a simple structure. As an embodiment, a liquid inlet 83 may be disposed between the two blocking members 64 for facilitating the flow of the residual liquid into the confluence module 81.

As shown in fig. 10 and 11, the mask plate drying device 500 further includes a vertical partition plate 52, the vertical partition plate 52 is provided in the case 51, the vertical partition plate 52 divides the case 51 into a front space 53 and a rear space 54, and the drying rack 60 is provided in the front space 53. The longitudinal partition plate 52 divides the box body 51 into a front space 53 and a rear space 54, so that the internal space of the box body 51 is divided, different functions can be realized in different spaces conveniently, and the damage of corrosive gas in the front space 53 to parts of the rear space 54 can be avoided. In this embodiment, the longitudinal partition 52 extends upward from the bottom 62 of the case 51 to the top of the case 51. The front space 53 is provided with a drying rack 60, and the rear space 54 may be provided with auxiliary components of the reticle drying apparatus 500, such as various pipes, lines, electric components, illumination components, and the like. A gap is also provided between the vertical partition plate 52 and the vertical support part 61 of the drying rack 60, so that gas fluid in the box body 51 can be facilitated.

The mask plate drying device 500 further includes a plurality of support rods 55, and the plurality of support rods 55 are disposed between the drying rack 60 and the vertical partition plate 52. The drying rack 60 is connected to the longitudinal partition plate 52 by the support rod 55, so that the stability of the drying rack 60 can be improved. In this embodiment, the support rod 55 may be a profile, a plate, or the like. The plurality of support rods 55 are arranged at regular intervals.

The vertical partition plate 52 has a plurality of ventilation openings 56, and the exhaust portion 70 exhausts the gas in the front space 53 through the ventilation openings 56. Specifically, the ventilation openings 56 may be slit-shaped or circular-hole-shaped, and a plurality of ventilation openings 56 are provided at intervals.

The reticle drying device 500 further includes an air supply filter 57, and the air supply filter 57 filters air and supplies the filtered air to the front space 53 in the box body 51. The blowing filter 57 filters the outside air and then introduces the air into the case 51, thereby preventing impurities in the air from contaminating the mask plate 90.

In one embodiment, the box 51 is generally cubic, and the box 51 is provided with a door 511 for allowing the mask plate 90 to enter. When the door 511 is opened, the mask plate 90 can be put in or taken out.

While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.

Claims

1. A reticle plate cleaning apparatus for cleaning a reticle plate, the reticle plate cleaning apparatus comprising:

a frame;

the first tank is arranged on the rack and used for containing cleaning liquid medicine, and the photomask plate is immersed in the cleaning liquid medicine;

and the second groove is arranged on the rack, is arranged at an interval with the first groove and is used for flushing the photomask plate.

2. The reticle plate cleaning device of claim 1 further comprising a curtain portion disposed in the first groove, the curtain portion for ejecting a cleaning fluid to rinse the reticle plate.

3. The apparatus of claim 2, wherein the curtain portion comprises an inlet tube, a reservoir chamber, and an outlet in communication with each other, wherein the cleaning solution flows into the reservoir chamber through the inlet tube, and the cleaning solution is sprayed onto the reticle through the outlet.

4. The reticle plate cleaning apparatus of claim 3, wherein the height of the outlet corresponds to the height of a side of the reticle plate proximate the outlet;

5. The reticle plate cleaning device of claim 1, wherein the bottom surface of the first groove is at an angle in the range of 7 ° -25 ° to the horizontal; the bottom surface of the first groove inclines downwards along the direction of placing the photomask plate;

6. The reticle plate cleaning device of claim 1, further comprising a plurality of support members spaced apart from the bottom of the first groove, the reticle plate being disposed on an upper side of the support members;

and/or, the photomask plate cleaning device also comprises a circular groove which is arranged on the side surface of the first groove.

7. The reticle plate cleaning apparatus of claim 1 further comprising a rinse port disposed in the second tank, the rinse port for flowing rinse solution.

8. The reticle plate cleaning apparatus of claim 1, further comprising a first waste conduit for draining liquid in the first tank outside the reticle plate cleaning apparatus;

9. The reticle plate cleaning apparatus of claim 1 further comprising an air extractor disposed at a top of the frame, wherein an operating space is formed above the first and second slots, and wherein the air extractor is configured to exhaust air from the operating space to an exterior of the reticle plate cleaning apparatus.

10. The reticle plate cleaning device according to any one of claims 1 to 8, further comprising a first foot operation part, a first control part and a first execution part which are in communication connection, wherein the first foot operation part is arranged on the ground surface close to the first groove, and the first foot operation part is used for sending an opening signal to the first control part; the first control part is used for receiving the starting signal and sending a starting signal to the first execution part; the first executing part is used for receiving the starting signal and opening the curtain part of the first groove;