CN114921766B - Diamond/metal composite cooling fin and preparation method thereof - Google Patents
Diamond/metal composite cooling fin and preparation method thereof Download PDFInfo
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- CN114921766B CN114921766B CN202210578458.XA CN202210578458A CN114921766B CN 114921766 B CN114921766 B CN 114921766B CN 202210578458 A CN202210578458 A CN 202210578458A CN 114921766 B CN114921766 B CN 114921766B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
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Abstract
The application relates to a diamond/metal composite radiating fin and a preparation method thereof, belonging to the technical field of radiating materials. The radiating fin mainly comprises a continuous diamond film with grooves on two sides and filling metal filled in the grooves, and a strong carbide forming element transition layer can be arranged between the continuous diamond film and the filling metal. During preparation, a continuous patterned groove body is firstly processed on the surface of a substrate, then a chemical vapor deposition method is used for growing a continuous diamond film with grooves on two sides, then filling metal in the grooves, then the substrate is removed, the grooves on the other side are filled with the filling metal, and finally the filling metal with interference on two sides is removed. The main body of the radiating fin is a continuous diamond film, the structural strength is high, the heat dissipation and the wear resistance are extremely high, the filling metal is completely isolated by the diamond film, the insulating performance is excellent, the heat conductivity and the thermal expansion coefficient of the radiating fin are controllable through the patterning of the grooves, and the radiating fin is simple to prepare and low in cost.
Description
Technical Field
The application belongs to the technical field of heat dissipation materials, and particularly relates to a diamond/metal composite heat dissipation sheet and a preparation method thereof.
Background
Thermal management materials are typically present between the heat sink and the heat sink of the high power device, and mainly serve to dissipate heat, support the stationary chip, electrically connect, relax stresses, transition dimensions, and stabilize component parameters. Along with the rising of the microelectronics industry, the preparation of electronic components such as chips is continuously developed to nanocrystallization so as to adapt to high integration and high-power rapid operation speed. The higher the power used in the working process, the higher the heat generated by the electronic element, the faster the temperature rise, and the reliability of the normal use of the element is seriously affected, and even the element is possibly damaged directly. Therefore, it is imperative to find a high thermal conductivity heat dissipation material that matches the chip.
The diamond has excellent thermophysical properties, is the material with the highest thermal conductivity in nature, and can reach 2000W/(m.K), about 4 times of silver, 5 times of copper and 9 times of aluminum. Meanwhile, diamond has a low thermal expansion coefficient, and is about 1.0 to 2.3X10 at normal temperature -6 and/K, the deformation amount can be kept small during heat transfer. The metal-based composite radiating fin taking diamond as the reinforcing phase integrates the advantages of high heat conduction of diamond, easiness in processing of metal, low cost and the like, and the thermal expansion coefficient of the radiating fin can be adjusted by introducing the diamond, so that the radiating fin is better matched with a chip, and further, the higher radiating requirement is met.
However, the current metal-based diamond composite fins all have one or several of the following problems: (1) The single diamond radiating fin has high brittleness and is easy to break and destroy in the process of bearing pressure; (2) The composite radiating fin prepared by introducing granular diamond as the reinforcing phase has random heat conductivity, is not easy to adjust, and the dispersed diamond particles are difficult to form a good radiating network, so that the radiating performance is improved only to a limited extent; (3) The laminated diamond composite radiating fin has certain interface thermal resistance between the diamond laminated layer and the metal matrix, so that the overall thermal conductivity is seriously reduced; (4) The problems of poor wettability between diamond and metal, difference of thermal expansion coefficients and the like can reduce the bonding strength of the diamond and the metal, and influence the service performance of the radiating fin.
Disclosure of Invention
In order to solve the problems in the prior art, and simultaneously meet the performance requirements of high heat dissipation and the like of current electronic components, the application provides the diamond/metal composite cooling fin with a brand new structure.
The application is realized by the following two technical schemes:
the first technical scheme is as follows:
the utility model provides a diamond/metal composite cooling fin, includes the diamond film, has the recess that many intervals set up on the top surface and the bottom surface of diamond film respectively equipartition, and each recess on the top surface and each recess dislocation on the bottom surface are distributed in turn, all are filled with filling metal in the recess.
Preferably, the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.4-4 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, the thickness d2 of the diamond film is 0.05-1 mm, and the distance between one adjacent top surface groove and one bottom surface groove (the center distance between the two grooves) is d1+d2, which is 0.55-4 mm.
Preferably, the filling metal is made of any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
Further, the application also provides a preparation method of the diamond/metal composite cooling fin, which comprises the following steps:
1) According to the design requirement of the diamond/metal composite cooling fin, a patterned groove body structure is processed on the surface of a substrate, wherein the width d3=d1+2×d2, the depth h3=h2 and the spacing d4=2 (d1+d2) of adjacent groove bodies of a single groove body are processed;
2) Depositing a continuous diamond film on the surface of the patterned groove body structure by using a chemical vapor deposition method so as to form a diamond film with groove structures on both sides;
3) Filling metal in each groove on the top surface of the diamond film;
4) Removing the matrix, inverting the diamond film, and filling metal in each groove on the bottom surface of the diamond film;
5) And removing the metal interference parts of the two sides of the diamond film outside the grooves to form filling metal which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
Preferably, in step 1), the substrate is monocrystalline silicon or molybdenum, and the method for processing the patterned groove structure on the substrate adopts laser etching or machining; in the steps 3) and 4), the method for filling the metal adopts electroplating, composite electrodeposition or powder metallurgy, and the material of the metal adopts any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
The second technical scheme is as follows:
the utility model provides a diamond/metal composite fin, includes the diamond film, has the recess that many intervals set up on the top surface and the bottom surface of diamond film respectively, and each recess on the top surface and each recess dislocation on the bottom surface are distributed in turn, all are filled with filling metal in the recess to be provided with strong carbide between filling metal and the recess and form the element transition layer.
Preferably, the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.5-3 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, the thickness d2 of the diamond film is 0.05-1 mm, and the distance between one adjacent top surface groove and one bottom surface groove (the center distance between the two grooves) is d1+d2, which is 0.55-4 mm.
Preferably, the filling metal is made of any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
Preferably, the material of the strong carbide forming element transition layer is any one metal or alloy composed of a plurality of metals in Ti, mo, ta, cr, W, hf, zr, nb, and the thickness of the strong carbide forming element transition layer is 100 nm-5 mu m.
Further, the application also provides a preparation method of the diamond/metal composite cooling fin, which comprises the following steps:
1) According to the design requirement of the diamond/metal composite cooling fin, a patterned groove body structure is processed on the surface of a substrate, wherein the width d3=d1+2×d2, the depth h3=h2 and the spacing d4=2 (d1+d2) of adjacent groove bodies of a single groove body are processed;
2) Preparing a carbide forming element transition layer on the surface of the graphical groove body structure;
3) Depositing a continuous diamond film on the surface of the carbide forming element transition layer by using a chemical vapor deposition method so as to form a diamond film with groove structures on both sides;
4) Preparing a carbide forming element transition layer on the surface of the groove structure on the top surface of the diamond film;
5) Filling metal in the groove structure on the top surface of the diamond film;
6) Removing the matrix, inverting the diamond film, preparing a layer of carbide forming element transition layer on the surface of the groove structure on the bottom surface of the diamond film, and filling metal in each groove;
7) And removing the metal interference parts and carbide forming element transition layer interference parts of the two sides of the diamond film outside the grooves to form a filling metal and carbide forming element transition layer which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
Preferably, in step 1), the substrate is graphite, monocrystalline silicon or molybdenum, and the method for processing the patterned groove structure on the substrate is laser etching or machining; in the steps 2) and 4), the method for preparing the carbide forming element transition layer adopts electroplating, magnetron sputtering, vacuum evaporation method or molten salt method, the material of the strong carbide forming element transition layer adopts any one metal or alloy composed of a plurality of metals in Ti, mo, ta, cr, W, hf, zr, nb, and the thickness of the alloy is 100 nm-5 mu m; in the steps 5) and 6), the metal filling method adopts electroplating, composite electrodeposition or powder metallurgy, and the metal adopts any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
Compared with the prior art, the application has the following beneficial effects:
1) The heat radiating fin takes the continuous diamond film with grooves on two sides as an integral framework, takes the convex part of the diamond film on one side as a heat source contact surface, utilizes the excellent thermophysical property of the diamond film to rapidly guide away heat along the diamond film framework, ensures the integral excellent heat radiating property of the composite material, and takes metal filled in the grooves as a tough filler to improve the integral toughness of the diamond film, so that brittle fracture of the diamond film in the use process is avoided, and in a word, the integral diamond/metal composite heat radiating fin has good mechanical property and excellent heat conducting property, wear resistance, corrosion resistance and chemical stability.
2) The diamond film in the radiating fin has space continuity, and the filling metal filled in the grooves at two sides is completely isolated by the diamond film, so that the radiating fin has excellent insulation performance as a whole.
3) According to the application, the strong carbide forming element transition layer is introduced between the diamond film and the filling metal, so that a carbide interface layer can be formed with the diamond film, and an infiltration interface can be formed with the filling metal, thereby effectively enhancing the bonding strength and relieving the interface thermal resistance.
5) The application can control the structure and distribution state of the filling metal by adjusting the patterning of the grooves, thereby adjusting and controlling the heat conductivity and the thermal expansion coefficient of the radiating fin.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a diamond/metal composite heat sink according to embodiment 1.
Fig. 2 is a schematic structural diagram of a diamond/metal composite heat sink according to embodiment 2.
Fig. 3 is a schematic diagram of a process for preparing a diamond/metal composite heat sink according to example 1.
Fig. 4 is a schematic flow chart of the preparation of the diamond/metal composite heat sink in example 2.
In the figure: 1-diamond film, 2-filling metal, 3-groove, 4-matrix, 5-groove body and 6-strong carbide forming element transition layer.
Detailed Description
The present application will be described in further detail with reference to the following examples, which are intended to facilitate an understanding of the present application and are not to be construed as limiting in any way.
Example 1
A diamond/metal composite heat sink, as shown in fig. 1, is composed of a continuous diamond film 1 with grooves on both sides and a filler metal 2 filled in the grooves, namely: the continuous diamond film 1 is used as an integral framework, a plurality of grooves 3 which are arranged at intervals and in parallel are respectively and uniformly distributed on the top surface and the bottom surface of the diamond film 1, the grooves 3 on the top surface and the grooves 3 on the bottom surface are identical in size and alternatively distributed in a staggered manner, filling metal 2 is filled in all the grooves 3, and Al is adopted as the material of the filling metal 2.
The preparation method of the diamond/metal composite cooling fin comprises the following steps:
1) The structural dimensions of the designed diamond are as follows: groove width d1= mm, diamond film thickness d2=1 mm, groove depth h2=2 mm, total thickness (distance from upper end face to lower end face) h1=h2+d2=3 mm, and continuous patterned groove body 5 structure is processed on the surface of Si round base body 4 with diameter of 60 mm and thickness of 5 mm by laser, wherein the cross section of groove body 5 is rectangular, depth h3=h2= 2 mm, width d3=d1+2×d2=4 mm, center distance d4=2 (d1+d2) =6 mm of two adjacent groove bodies 5 is distributed in continuous strip shape as a in fig. 3;
2) Depositing a continuous diamond film 1 on the surface of the patterned groove body 5 structure by utilizing a microwave plasma chemical vapor deposition method to form a diamond film 1 with grooves 3 on both sides, wherein the thickness d2=1 mm of the diamond film 1 is shown as b in fig. 3;
3) Filling interference metal into the groove 3 structure on the top surface of the diamond film 1 by using a powder metallurgy method, wherein the material adopts Al, as shown by c in fig. 3;
4) Removing the matrix 4, inverting the diamond film 1, filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using a powder metallurgy method, wherein the material adopts Al, as shown by d in fig. 3;
7) The metal Al interference parts on the two sides of the diamond film 1 outside the grooves 3 are removed to form filling metal 2 meeting the requirements, and finally the diamond/metal composite cooling fin is obtained, as shown by e in fig. 3.
Example 2
As shown in fig. 2, the diamond/metal composite heat sink is composed of a continuous diamond film 1 with grooves 3 on both sides, a filler metal 2 filled in the grooves 3, and a strong carbide forming element transition layer 6 therebetween, namely: the continuous diamond film 1 is used as an integral skeleton, a plurality of grooves 3 which are spaced and arranged in parallel are uniformly distributed on the top surface and the bottom surface of the diamond film 1 respectively, the grooves 3 on the top surface and the grooves 3 on the bottom surface are identical in size and distributed alternately in a staggered mode, filling metal 2 is filled in all the grooves 3, a strong carbide forming element transition layer 6 is arranged between the filling metal 2 and the grooves 3, wherein Ag is adopted as a material of the filling metal 2, and Ti is adopted as a material of the strong carbide forming element transition layer 6.
The preparation method of the diamond/metal composite cooling fin comprises the following steps:
1) The structural dimensions of the designed diamond are as follows: groove width d1=0.6 mm, diamond film thickness d2=0.05 mm, groove depth h2=0.3 mm, overall thickness h1=h2+d2=0.35 mm. Processing continuous patterned groove bodies 5 on the surface of a graphite circular substrate 4 with the diameter of 10 mm and the thickness of 1.5 mm by using laser, wherein the cross section of each groove body 5 is rectangular, the depth h3=h2=0.3 mm, the width d3=d1+2×d2=0.7 mm, and the center distance d4=2 (d1+d2) =1.3 mm of each two adjacent groove bodies 5 is distributed in a continuous strip shape as a whole, as shown in a in fig. 4;
2) Preparing a carbide forming element transition layer on the surface of the structure of the patterned tank body 5 by using an electroplating method, wherein the material adopts Ti, and the thickness is controlled at 100 nm, as shown in b in fig. 4;
3) Depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by using a microwave plasma chemical vapor deposition method to form the diamond film 1 with both sides having a groove 3 structure, wherein the thickness d2=0.05 mm of the diamond film 1 is shown as c in fig. 4;
4) Preparing a carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using an electroplating method, wherein the material adopts Ti, and the thickness is controlled at 100 nm, as shown as d in fig. 4;
5) Filling interference metal into the groove 3 structure on the top surface of the diamond film 1 by using a vacuum evaporation method, wherein the material adopts Ag, as shown by e in fig. 4;
6) Removing the matrix 4, inverting the diamond film 1, preparing a layer of carbide forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using an electroplating method, wherein the material adopts Ti and the thickness is controlled at 100 nm; then filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using a vacuum evaporation method, wherein Ag is adopted as a material, and the materials are shown as f, g and h in fig. 4;
7) And removing the interference parts of the metal Ag and the carbide forming element transition layer Ti on the two sides of the diamond film 1 outside the groove 3 to form a filling metal 2 and the carbide forming element transition layer which meet the requirements, and finally obtaining the diamond/metal composite radiating fin, as shown by i in fig. 4.
Example 3
A diamond/metal composite radiating fin is composed of a continuous diamond film 1 with grooves 3 on two sides, filling metal 2 filled in the grooves 3 and a strong carbide forming element transition layer 6 between the two, namely: with continuous diamond film 1 as whole skeleton, equipartition has many interval and parallel arrangement's recess 3 respectively on diamond film 1's top surface and bottom surface, and each recess 3 on the top surface and each recess 3 on the bottom surface are the same size and dislocation alternate distribution, all are filled with filling metal 2 in the recess 3 to be provided with strong carbide between filling metal 2 and the recess 3 and form element transition layer 6, wherein the material of filling metal 2 adopts Cu, and the material of strong carbide forms element transition layer 6 adopts the TaMo alloy.
The preparation method of the diamond/metal composite cooling fin comprises the following steps:
1) The structural dimensions of the designed diamond are as follows: groove width d1=0.4 mm, diamond film thickness d2=0.15 mm, groove depth h2=0.7 mm, overall thickness h1=h2+d2=0.85 mm. Processing a continuous patterned groove body 5 structure on the surface of a Mo circular substrate 4 with the diameter of 40 mm and the thickness of 3mm by using a milling machine, wherein the cross section of the groove body 5 is square, the depth h3=h2=0. mm, the width d3=d1+2×d2=0. mm, and the center distances d4=2 (d1+d2) =1.1 mm of two adjacent groove bodies 5 are distributed in a continuous strip shape as a whole;
2) Preparing a layer of carbide forming element transition layer on the surface of the structure of the patterned groove body 5 by using a magnetron sputtering method, wherein the material adopts TaMo alloy, and the thickness is controlled to be 0.5 mu m;
3) Depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by utilizing a microwave plasma chemical vapor deposition method to form a diamond film 1 with grooves 3 on both sides, wherein the thickness of the diamond film 1 is 0.15 and mm;
4) Preparing a layer of carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using a magnetron sputtering method, wherein the material adopts TaMo alloy, and the thickness is controlled to be 1 mu m;
5) Filling interference metal into the groove 3 structure on the top surface of the diamond film 1 by using an electroplating method, wherein Cu is adopted as a material;
6) Removing the matrix 4, inverting the diamond film 1, preparing a layer of carbide forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using a magnetron sputtering method, wherein the material adopts TaMo alloy, and the thickness is controlled to be 0.5 mu m; then, filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using an electroplating method, wherein Cu is adopted as a material;
7) And removing the interference parts of metal Cu and carbide forming element transition layer TaMo alloy on the two sides of the diamond film 1 outside the groove 3 to form a filling metal 2 and carbide forming element transition layer meeting the requirements, and finally obtaining the diamond/metal composite radiating fin.
Example 4
A diamond/metal composite radiating fin is composed of a continuous diamond film 1 with grooves 3 on two sides, filling metal 2 filled in the grooves 3 and a strong carbide forming element transition layer 6 between the two, namely: the continuous diamond film 1 is used as an integral skeleton, a plurality of grooves 3 which are spaced and are arranged in parallel are uniformly distributed on the top surface and the bottom surface of the diamond film 1 respectively, the grooves 3 on the top surface and the grooves 3 on the bottom surface are identical in size and are alternately distributed in a staggered mode, filling metal 2 is filled in all the grooves 3, a strong carbide forming element transition layer 6 is arranged between the filling metal 2 and the grooves 3, agCuAl alloy is adopted as the material of the filling metal 2, hf is adopted as one surface of the material of the strong carbide forming element transition layer 6, and Zr is adopted as the other surface of the material of the strong carbide forming element transition layer 6.
The preparation method of the diamond/metal composite cooling fin comprises the following steps:
1) The structural dimensions of the designed diamond are as follows: groove width d1=1 mm, diamond film thickness d2=1 mm, groove depth h2=0.3 mm, overall thickness h1=h2+d2=1.3 mm. Processing a continuous patterned groove body 5 structure on the surface of a Si circular substrate 4 with the diameter of 60 mm and the thickness of 5 mm by utilizing laser, wherein the cross section of the groove body 5 is rectangular, the depth h3=h2=0.3 mm, the width d3=d1+2×d2=3 mm, and the center distance d4=2 (d1+d2) =4 mm of two adjacent groove bodies 5 are distributed in a continuous strip shape as a whole;
2) Preparing a layer of carbide forming element transition layer on the surface of the structure of the patterned groove body 5 by using a magnetron sputtering method, wherein the material adopts Hf and the thickness is controlled to be 10 mu m;
3) Depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by utilizing a microwave plasma chemical vapor deposition method to form a diamond film 1 with grooves 3 on both sides, wherein the thickness of the diamond film 1 is 1 mm;
4) Preparing a layer of carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using a molten salt method, wherein Zr is adopted as a material, and the thickness is controlled to be 1 mu m;
5) Filling interference metal into the groove 3 structure on the top surface of the diamond film 1 by using a powder metallurgy method, wherein the material adopts AgCuAl alloy;
6) Removing the matrix 4, inverting the diamond film 1, preparing a carbide forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using a magnetron sputtering method, wherein the material adopts Hf and the thickness is controlled to be 2 mu m; then filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using a powder metallurgy method, wherein the material adopts AgCuAl alloy;
7) And removing interference parts of the AgCuAl alloy and the carbide forming element transition layers Hf and Zr on the two sides of the diamond film 1 outside the groove 3 to form a filling metal 2 and the carbide forming element transition layer which meet the requirements, and finally obtaining the diamond/metal composite radiating fin.
Claims (7)
1. A diamond/metal composite fin comprising a diamond film, characterized in that: the top surface and the bottom surface of the diamond film are respectively and uniformly provided with a plurality of grooves which are arranged at intervals, each groove on the top surface and each groove on the bottom surface are alternately distributed in a staggered way, and all the grooves are filled with filling metal; the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.4-4 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, and the thickness d2 of the diamond film is 0.05-1 mm; the filling metal is made of any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
2. The method for manufacturing a diamond/metal composite heat sink according to claim 1, comprising the steps of:
1) According to the design requirement of the diamond/metal composite cooling fin, a patterned groove body structure is processed on the surface of a substrate, wherein the width d3=d1+2×d2, the depth h3=h2 and the spacing d4=2 (d1+d2) of adjacent groove bodies of a single groove body are processed;
2) Depositing a continuous diamond film on the surface of the patterned groove body structure by using a chemical vapor deposition method to form a diamond film with a groove structure on both sides, wherein the thickness of the diamond film is d2;
3) Filling metal in each groove on the top surface of the diamond film;
4) Removing the matrix, inverting the diamond film, and filling metal in each groove on the bottom surface of the diamond film;
5) And removing the metal interference parts of the two sides of the diamond film outside the grooves to form filling metal which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
3. The method for manufacturing a diamond/metal composite heat sink according to claim 2, wherein: in the step 1), a substrate adopts monocrystalline silicon or molybdenum, and a method for processing a patterned groove body structure on the substrate adopts laser etching or mechanical processing; in the steps 3) and 4), the method for filling the metal adopts electroplating, composite electrodeposition or powder metallurgy, and the material of the metal adopts any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
4. A diamond/metal composite fin comprising a diamond film, characterized in that: the top surface and the bottom surface of the diamond film are respectively and uniformly provided with a plurality of grooves which are arranged at intervals, each groove on the top surface and each groove on the bottom surface are alternately distributed in a staggered way, filling metal is filled in all the grooves, and a strong carbide forming element transition layer is arranged between the filling metal and the grooves; the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.5-3 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, and the thickness d2 of the diamond film is 0.05-1 mm; the filling metal is made of any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
5. A diamond/metal composite heat sink according to claim 4, wherein: the material of the strong carbide forming element transition layer is any one metal or alloy composed of a plurality of metals in Ti, mo, ta, cr, W, hf, zr, nb, and the thickness of the strong carbide forming element transition layer is 100 nm-5 mu m.
6. The method for manufacturing a diamond/metal composite heat sink according to claim 4, comprising the steps of:
1) According to the design requirement of the diamond/metal composite cooling fin, a patterned groove body structure is processed on the surface of a substrate, wherein the width d3=d1+2d2, the depth h3=h2 and the spacing d4=2 (d1+d2) of adjacent groove bodies of the single groove body are formed;
2) Preparing a carbide forming element transition layer on the surface of the graphical groove body structure;
3) Depositing a continuous diamond film on the surface of the carbide forming element transition layer by using a chemical vapor deposition method to form a diamond film with a groove structure on both sides, wherein the thickness of the diamond film is d2;
4) Preparing a carbide forming element transition layer on the surface of the groove structure on the top surface of the diamond film;
5) Filling metal in the groove structure on the top surface of the diamond film;
6) Removing the matrix, inverting the diamond film, preparing a layer of carbide forming element transition layer on the surface of the groove structure on the bottom surface of the diamond film, and filling metal in each groove;
7) And removing the metal interference parts and carbide forming element transition layer interference parts of the two sides of the diamond film outside the grooves to form a filling metal and carbide forming element transition layer which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
7. The method for manufacturing a diamond/metal composite heat sink according to claim 6, wherein: in the step 1), a matrix adopts graphite, monocrystalline silicon or molybdenum, and a method for processing a patterned groove body structure on the matrix adopts laser etching or machining; in the steps 2) and 4), the method for preparing the carbide forming element transition layer adopts electroplating, magnetron sputtering, vacuum evaporation method or molten salt method, the material of the strong carbide forming element transition layer adopts any one metal or alloy composed of a plurality of metals in Ti, mo, ta, cr, W, hf, zr, nb, and the thickness of the alloy is 100 nm-5 mu m; in the steps 5) and 6), the metal filling method adopts electroplating, composite electrodeposition or powder metallurgy, and the metal adopts any one metal or alloy composed of a plurality of metals of Ag, cu and Al.
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