CN114921766A - Diamond/metal composite radiating fin and preparation method thereof - Google Patents
Diamond/metal composite radiating fin and preparation method thereof Download PDFInfo
- Publication number
- CN114921766A CN114921766A CN202210578458.XA CN202210578458A CN114921766A CN 114921766 A CN114921766 A CN 114921766A CN 202210578458 A CN202210578458 A CN 202210578458A CN 114921766 A CN114921766 A CN 114921766A
- Authority
- CN
- China
- Prior art keywords
- diamond film
- diamond
- metal
- groove
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The invention discloses a diamond/metal composite radiating fin and a preparation method thereof, belonging to the technical field of radiating materials. The heat radiating fin mainly comprises a continuous diamond film with grooves on two sides and filling metal filled in the grooves, and a strong carbide forming element transition layer can be arranged between the continuous diamond film and the filling metal. The preparation method comprises the steps of processing a continuous graphical groove body on the surface of a substrate, growing a continuous diamond film with grooves on two sides by using a chemical vapor deposition method, filling metal into the grooves, removing the substrate, filling the metal into the grooves on the other side, and removing the interference metal on the two sides. The main body of the radiating fin is the continuous diamond film, the structural strength is high, the heat dissipation performance and the wear resistance are extremely high, the filling metal is completely isolated by the diamond film, the insulating performance is excellent, the heat conductivity and the thermal expansion coefficient of the radiating fin are controllable due to the patterning of the grooves, the preparation is simple, and the cost is low.
Description
Technical Field
The invention belongs to the technical field of heat dissipation materials, and particularly relates to a diamond/metal composite heat dissipation fin and a preparation method thereof.
Background
The heat management material is generally arranged between a heat dissipation element and a radiator of the high-power device and mainly plays a role in heat dissipation, chip supporting and fixing, electrical connection, stress relaxation, size transition and element parameter stabilization. With the rise of the microelectronic industry, the preparation of electronic components such as chips and the like is continuously developing towards nanocrystallization so as to adapt to the high integration and high-power and rapid operation speed. The larger the power used in the working process, the higher the heat generated by the electronic component, which leads to the faster the temperature rise, seriously affecting the reliability of the normal use of the component, and even possibly directly causing the damage of the component. Therefore, it is imperative to find a heat dissipation material with high thermal conductivity matching with the chip.
Diamond has excellent thermophysical properties, is a material with the highest thermal conductivity in nature, and can reach 2000W/(m.K), which is about 4 times of silver, 5 times of copper and 9 times of aluminum. Meanwhile, the diamond has a low thermal expansion coefficient which is about 1.0-2.3 multiplied by 10 at normal temperature -6 and/K, the deformation amount can be kept small during heat transfer. The metal-based composite radiating fin taking the diamond as the reinforcing phase integrates the advantages of high heat conduction of the diamond, easiness in processing of metal, low cost and the like, and the introduction of the diamond can adjust the thermal expansion coefficient of the radiating fin, so that the radiating fin is better matched with a chip, and the higher radiating requirement is met.
However, the current metal-based diamond composite heat sinks all have one or more of the following problems: (1) the single diamond radiating fin has high brittleness, and is easy to break and damage in the process of bearing pressure; (2) the heat conductivity of the composite radiating fin prepared by introducing the granular diamond as the reinforcing phase is arbitrary and is not easy to adjust, and the diamond grains in dispersion distribution are difficult to form a good radiating network, so that the improvement of the radiating performance is limited; (3) the diamond composite radiating fin with the layered sheet has certain interface thermal resistance between the diamond sheet layer and the metal substrate, so that the overall thermal conductivity is seriously reduced; (4) the problems of poor wettability between diamond and metal, difference of thermal expansion coefficient and the like can reduce the bonding strength of the diamond and the metal and influence the service performance of the radiating fin.
Disclosure of Invention
In order to solve the problems in the prior art and simultaneously meet the performance requirements of high heat dissipation and the like of the current electronic component, the invention provides a diamond/metal composite heat sink with a brand new structure.
The invention is realized by the following two technical schemes:
the first technical scheme is as follows:
a diamond/metal composite radiating fin comprises a diamond film, wherein a plurality of grooves arranged at intervals are uniformly distributed on the top surface and the bottom surface of the diamond film respectively, the grooves on the top surface and the grooves on the bottom surface are alternately distributed in a staggered mode, and filling metal is filled in all the grooves.
Preferably, the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.4-4 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, the thickness d2 of the diamond film is 0.05-1 mm, and the distance between one top surface groove and one bottom surface groove (the central distance between the two grooves) which are adjacent to each other is d1+ d2, and the value is 0.55-4 mm.
Preferably, the filler metal is made of one or more metals selected from Ag, Cu, and Al.
Further, the invention also provides a preparation method of the diamond/metal composite radiating fin, which comprises the following steps:
1) processing a patterned groove body structure on the surface of a base body according to the design requirements of the diamond/metal composite radiating fin, wherein the width d3= d1+2d2, the depth h3= h2 and the spacing d4=2 (d1+ d2) of adjacent groove bodies;
2) depositing a continuous diamond film on the surface of the patterned groove body structure by using a chemical vapor deposition method to form the diamond film with groove structures on two sides;
3) filling metal in each groove on the top surface of the diamond film;
4) removing the matrix, inverting the diamond film, and filling metal in each groove on the bottom surface of the diamond film;
5) and removing the metal interference parts of the two surfaces of the diamond film outside the grooves to form filling metal which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
Preferably, in the step 1), the substrate is monocrystalline silicon or molybdenum, and the method for processing the graphical groove body structure on the substrate is laser etching or mechanical processing; in the steps 3) and 4), the method for filling metal adopts electroplating, composite electrodeposition or powder metallurgy, and the material of the metal adopts any one metal or alloy consisting of a plurality of metals of Ag, Cu and Al.
The second technical scheme is as follows:
the diamond/metal composite radiating fin comprises a diamond film, wherein a plurality of grooves which are arranged at intervals are uniformly distributed on the top surface and the bottom surface of the diamond film respectively, the grooves on the top surface and the grooves on the bottom surface are alternately distributed in a staggered mode, filling metal is filled in all the grooves, and a strong carbide forming element transition layer is arranged between the filling metal and the grooves.
Preferably, the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.5-3 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, the thickness d2 of the diamond film is 0.05-1 mm, and the distance between one top surface groove and one bottom surface groove (the central distance between the two grooves) which are adjacent to each other is d1+ d2, and the value is 0.55-4 mm.
Preferably, the filler metal is made of one or more metals selected from Ag, Cu, and Al.
Preferably, the material of the transition layer of the strong carbide forming element is any one metal or an alloy of a plurality of metals selected from Ti, Mo, Ta, Cr, W, Hf, Zr and Nb, and the thickness of the transition layer is 100 nm to 5 μm.
Further, the invention also provides a preparation method of the diamond/metal composite radiating fin, which comprises the following steps:
1) processing a patterned groove structure on the surface of a substrate according to the design requirements of the diamond/metal composite radiating fin, wherein the width d3= d1+ 2+ d2, the depth h3= h2 and the distance d4=2 (d1+ d2) of adjacent grooves of a single groove;
2) preparing a carbide forming element transition layer on the surface of the patterned groove structure;
3) depositing a continuous diamond film on the surface of the carbide forming element transition layer by using a chemical vapor deposition method to form the diamond film with the groove structure on two surfaces;
4) preparing a carbide forming element transition layer on the surface of the groove structure on the top surface of the diamond film;
5) filling metal in the groove structure on the top surface of the diamond film;
6) removing the matrix, inverting the diamond film, preparing a carbide forming element transition layer on the surface of the groove structure on the bottom surface of the diamond film, and then filling metal in each groove;
7) and removing the metal interference part and the carbide forming element transition layer interference part outside the groove on the two surfaces of the diamond film to form a filling metal and carbide forming element transition layer which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
Preferably, in the step 1), the substrate is made of graphite, monocrystalline silicon or molybdenum, and the method for processing the graphical groove body structure on the substrate is laser etching or machining; in the step 2) and the step 4), the method for preparing the carbide forming element transition layer adopts electroplating, magnetron sputtering, vacuum evaporation method or molten salt method, the material of the strong carbide forming element transition layer adopts any one metal or alloy consisting of a plurality of metals of Ti, Mo, Ta, Cr, W, Hf, Zr and Nb, and the thickness of the alloy is 100 nm-5 mu m; in the steps 5) and 6), the method for filling metal adopts electroplating, composite electrodeposition or powder metallurgy, and the metal adopts any one metal or alloy consisting of a plurality of metals of Ag, Cu and Al.
Compared with the prior art, the invention has the following beneficial effects:
1) the heat radiating fin uses the continuous diamond film with grooves on two sides as an integral framework, the convex part of the diamond film on one side is used as a heat source contact surface, the excellent thermophysical property of the diamond film is utilized to quickly conduct heat away along the diamond film framework, the excellent heat radiating performance of the integral composite material is ensured, the metal filled in the grooves is used as a tough filler, the toughness of the integral diamond film is improved, and the diamond film is prevented from brittle fracture in the using process.
2) The diamond film in the radiating fin has space continuity, and the filling metal filled in the grooves on two sides is completely isolated by the diamond film, so that the radiating fin has excellent insulation performance.
3) According to the invention, the strong carbide is introduced between the diamond film and the filling metal to form the element transition layer, so that a carbide interface layer can be formed with the diamond film, and a wetting interface can be formed with the filling metal, thus the bonding strength is effectively enhanced, and the interface thermal resistance is relieved.
5) The invention can control the structure and distribution state of the filling metal by adjusting the patterning of the groove, thereby regulating and controlling the heat conductivity and the thermal expansion coefficient of the radiating fin.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic structural view of a diamond/metal composite heat sink in example 1.
Fig. 2 is a schematic structural view of a diamond/metal composite heat sink in example 2.
Fig. 3 is a schematic view of a process for manufacturing a diamond/metal composite heat sink in example 1.
Fig. 4 is a schematic view of a process for manufacturing the diamond/metal composite heat sink in example 2.
In the figure: 1-diamond film, 2-filling metal, 3-groove, 4-matrix, 5-groove body and 6-strong carbide forming element transition layer.
Detailed Description
The following examples further describe the present application in detail, it is noted that the following examples are intended to facilitate the understanding of the present application, but do not limit the present application in any way.
Example 1
A diamond/metal composite heat sink, as shown in figure 1, is composed of a continuous diamond film 1 with grooves on two sides and a filling metal 2 filled in the grooves, namely: the continuous diamond film 1 is used as an integral framework, a plurality of grooves 3 which are arranged at intervals and in parallel are respectively uniformly distributed on the top surface and the bottom surface of the diamond film 1, the grooves 3 on the top surface and the grooves 3 on the bottom surface have the same size and are alternately distributed in a staggered manner, all the grooves 3 are filled with filling metal 2, and the material of the filling metal 2 is Al.
The preparation method of the diamond/metal composite radiating fin comprises the following steps:
1) the structural dimensions of the diamond were designed as follows: the groove width d1=2 mm, the diamond film thickness d2=1 mm, the groove depth h2=2 mm, the overall thickness (distance from the upper end face to the lower end face) h1= h2+ d2= 3mm, and a continuous patterned groove body 5 structure is machined on the surface of a Si circular base 4 with the diameter of 60 mm and the thickness of 5 mm by using laser, wherein the cross section of the groove body 5 is rectangular, the depth h3= h2=2 mm, the width d3= d1+2 × d2=4 mm, the center distance d4=2 (d1+ d2) =6 mm between every two adjacent groove bodies 5 is distributed in a continuous strip shape as shown in a in fig. 3;
2) depositing a continuous diamond film 1 on the surface of the patterned groove body 5 structure by using a microwave plasma chemical vapor deposition method to form the diamond film 1 with a groove 3 structure on both sides, wherein the thickness d2=1 mm of the diamond film 1 is shown as b in fig. 3;
3) filling interference metal in the groove 3 structure on the top surface of the diamond film 1 by using a powder metallurgy method, wherein the material is Al, and is shown as c in figure 3;
4) removing the matrix 4, inverting the diamond film 1, and then filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using a powder metallurgy method, wherein the material is Al, and is shown as d in figure 3;
7) and removing the metal Al interference parts of the two surfaces of the diamond film 1 outside the grooves 3 to form filling metal 2 meeting the requirements, and finally obtaining the diamond/metal composite radiating fin as shown by e in figure 3.
Example 2
A diamond/metal composite heat sink, as shown in figure 2, is composed of a continuous diamond film 1 with grooves 3 on both sides, a filling metal 2 filled in the grooves 3 and a strong carbide forming element transition layer 6 between the two, namely: the continuous diamond film 1 is used as an integral framework, a plurality of grooves 3 which are arranged at intervals and in parallel are respectively and evenly distributed on the top surface and the bottom surface of the diamond film 1, the grooves 3 on the top surface and the grooves 3 on the bottom surface are the same in size and are alternately distributed in a staggered manner, filling metal 2 is filled in all the grooves 3, a strong carbide forming element transition layer 6 is arranged between the filling metal 2 and the grooves 3, the material of the filling metal 2 is Ag, and the material of the strong carbide forming element transition layer 6 is Ti.
The preparation method of the diamond/metal composite radiating fin comprises the following steps:
1) the structural dimensions of the diamond were designed as follows: groove width d1=0.6 mm, diamond film thickness d2=0.05 mm, groove depth h2=0.3 mm, overall thickness h1= h2+ d2=0.35 mm. Processing a continuous patterned groove body 5 on the surface of a graphite circular base body 4 with the diameter of 10 mm and the thickness of 1.5 mm by using laser, wherein the cross section of the groove body 5 is rectangular, the depth h3= h2=0.3 mm, the width d3= d1+2 × d2=0.7 mm, the center distance d4=2 × between two adjacent groove bodies 5 (d1+ d2) =1.3 mm, and the groove bodies are distributed in a continuous strip shape as a whole, as shown in fig. 4;
2) preparing a carbide forming element transition layer on the surface of the patterned groove body 5 structure by using an electroplating method, wherein the material is Ti, and the thickness is controlled to be 100 nm, as shown in b in fig. 4;
3) depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by using a microwave plasma chemical vapor deposition method to form the diamond film 1 with a groove 3 structure on both sides, wherein the thickness d2=0.05 mm of the diamond film 1 is shown as c in fig. 4;
4) preparing a carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using an electroplating method, wherein the material is Ti, and the thickness is controlled to be 100 nm, as shown in d in figure 4;
5) filling interference metal in the groove 3 structure on the top surface of the diamond film 1 by using a vacuum evaporation method, wherein the material is Ag, as shown in e in figure 4;
6) removing the matrix 4, inverting the diamond film 1, preparing a carbide-forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using an electroplating method, wherein the material is Ti, and the thickness is controlled to be 100 nm; then filling interference metal into each groove 3 on the bottom surface of the diamond film 1 by using a vacuum evaporation method, wherein the material is Ag, and is shown as f, g and h in figure 4;
7) and removing the interference part of the metal Ag and the interference part of the carbide forming element transition layer Ti outside the groove 3 on the two surfaces of the diamond film 1 to form the filling metal 2 and the carbide forming element transition layer which meet the requirements, and finally obtaining the diamond/metal composite radiating fin as shown in i in figure 4.
Example 3
A diamond/metal composite radiating fin is composed of a continuous diamond film 1 with grooves 3 on two sides, filling metal 2 filled in the grooves 3 and a strong carbide forming element transition layer 6 between the two, namely: regard as whole skeleton with continuous diamond membrane 1, the equipartition has many interval and parallel arrangement's recess 3 respectively on the top surface of diamond membrane 1 and bottom surface, each recess 3 on the top surface and each recess 3 on the bottom surface size the same and dislocation distribution in turn, all are filled with filler metal 2 in the recess 3 to be provided with strong carbide between filler metal 2 and the recess 3 and form element transition layer 6, wherein the material of filler metal 2 adopts Cu, and the material of strong carbide formation element transition layer 6 adopts TaMo alloy.
The preparation method of the diamond/metal composite radiating fin comprises the following steps:
1) the structural dimensions of the diamond were designed as follows: groove width d1=0.4 mm, diamond film thickness d2=0.15 mm, groove depth h2=0.7 mm, overall thickness h1= h2+ d2=0.85 mm. Processing a continuous graphical groove body 5 structure on the surface of a Mo circular base body 4 with the diameter of 40 mm and the thickness of 3mm by using a milling machine, wherein the cross section of the groove body 5 is square, the depth h3= h2=0.7 mm, the width d3= d1+2 × d2=0.7 mm, the central distance d4=2 × between two adjacent groove bodies 5 (d1+ d2) =1.1 mm, and the two groove bodies are distributed in a continuous strip shape on the whole;
2) preparing a carbide forming element transition layer on the surface of the patterned tank body 5 structure by using a magnetron sputtering method, wherein the material is TaMo alloy, and the thickness is controlled to be 0.5 mu m;
3) depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by using a microwave plasma chemical vapor deposition method to form the diamond film 1 with the two surfaces both having the groove 3 structure, wherein the thickness of the diamond film 1 is 0.15 mm;
4) preparing a carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using a magnetron sputtering method, wherein the material is TaMo alloy, and the thickness is controlled to be 1 mu m;
5) filling interference metal in the groove 3 structure on the top surface of the diamond film 1 by using an electroplating method, wherein the material is Cu;
6) removing the matrix 4, inverting the diamond film 1, and preparing a carbide-forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using a magnetron sputtering method, wherein the material is TaMo alloy and the thickness is controlled to be 0.5 mu m; then, filling interference metal in each groove 3 on the bottom surface of the diamond film 1 by using an electroplating method, wherein the material is Cu;
7) and removing the interference part of the metal Cu outside the groove 3 and the interference part of the TaMo alloy of the carbide forming element transition layer on the two surfaces of the diamond film 1 to form the filling metal 2 and the carbide forming element transition layer which meet the requirements, and finally obtaining the diamond/metal composite radiating fin.
Example 4
A kind of diamond/metal compound air-cooling fin, by the continuous diamond film 1 with groove 3 of both sides, pack in the filler metal 2 and strong carbide forming element transition layer 6 between the two in the groove 3, namely: the continuous diamond film 1 is used as an integral framework, a plurality of grooves 3 which are arranged at intervals and in parallel are respectively and evenly distributed on the top surface and the bottom surface of the diamond film 1, the grooves 3 on the top surface and the grooves 3 on the bottom surface are the same in size and are alternately distributed in a staggered manner, filling metal 2 is filled in all the grooves 3, and a strong carbide forming element transition layer 6 is arranged between the filling metal 2 and the grooves 3, wherein the material of the filling metal 2 is AgCuAl alloy, one surface of the strong carbide forming element transition layer 6 is made of Hf, and the other surface of the strong carbide forming element transition layer 6 is made of Zr.
The preparation method of the diamond/metal composite radiating fin comprises the following steps:
1) the structural dimensions of the diamond were designed as follows: groove width d1=1 mm, diamond film thickness d2=1 mm, groove depth h2=0.3 mm, overall thickness h1= h2+ d2=1.3 mm. Processing a continuous graphical groove body 5 structure on the surface of a Si circular substrate 4 with the diameter of 60 mm and the thickness of 5 mm by utilizing laser, wherein the cross section of the groove body 5 is rectangular, the depth h3= h2=0.3 mm, the width d3= d1+2 × d2= 3mm, the center distance d4=2 × (d1+ d2) =4 mm between two adjacent groove bodies 5 is distributed in a continuous strip shape on the whole;
2) preparing a carbide forming element transition layer on the surface of the structure of the graphical groove body 5 by using a magnetron sputtering method, wherein the material is Hf, and the thickness is controlled to be 10 mu m;
3) depositing a continuous diamond film 1 on the surface of the carbide forming element transition layer by using a microwave plasma chemical vapor deposition method to form the diamond film 1 with the groove 3 structure on both sides, wherein the thickness of the diamond film 1 is 1 mm;
4) preparing a carbide forming element transition layer on the surface of the groove 3 structure on the top surface of the diamond film 1 by using a molten salt method, wherein the material is Zr and the thickness is controlled to be 1 mu m;
5) filling interference metal in a groove 3 structure on the top surface of the diamond film 1 by using a powder metallurgy method, wherein the material is AgCuAl alloy;
6) removing the matrix 4, inverting the diamond film 1, and preparing a carbide-forming element transition layer on the surface of the groove 3 structure on the bottom surface of the diamond film 1 by using a magnetron sputtering method, wherein the material is Hf, and the thickness is controlled to be 2 mu m; then, filling interference metal in each groove 3 on the bottom surface of the diamond film 1 by using a powder metallurgy method, wherein the material is AgCuAl alloy;
7) and removing the interference part of the metal AgCuAl alloy and the interference part of the carbide forming element transition layer Hf and Zr outside the groove 3 on the two surfaces of the diamond film 1 to form a filling metal 2 and the carbide forming element transition layer which meet the requirements, and finally obtaining the diamond/metal composite radiating fin.
Claims (10)
1. A diamond/metal composite radiating fin comprises a diamond film, and is characterized in that: the top surface and the bottom surface of the diamond film are respectively and evenly distributed with a plurality of grooves arranged at intervals, the grooves on the top surface and the grooves on the bottom surface are alternately distributed in a staggered way, and all the grooves are filled with filling metal.
2. A diamond/metal composite heat sink as recited in claim 1, wherein: the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.4-4 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, and the thickness d2 of the diamond film is 0.05-1 mm.
3. A diamond/metal composite radiating fin comprises a diamond film, and is characterized in that: the top surface and the bottom surface of the diamond film are respectively and uniformly distributed with a plurality of grooves arranged at intervals, the grooves on the top surface and the grooves on the bottom surface are alternately distributed in a staggered way, all the grooves are filled with filling metal, and a strong carbide forming element transition layer is arranged between the filling metal and the grooves.
4. A diamond/metal composite heat sink as recited in claim 3 wherein: the height h1 from the top surface to the bottom surface of the diamond film is 0.3-3mm, the width d1 of each groove is 0.5-3 mm, the depth h2 of each groove is 20-90% of the height h1 from the top surface to the bottom surface of the diamond film, and the thickness d2 of the diamond film is 0.05-1 mm.
5. A diamond/metal composite heat sink according to claim 1 or 3, wherein: the filling metal is made of any one or alloy of Ag, Cu and Al.
6. A diamond/metal composite heat sink as recited in claim 3 wherein: the transition layer of the strong carbide forming element is made of any one or more of Ti, Mo, Ta, Cr, W, Hf, Zr and Nb, and has a thickness of 100 nm-5 μm.
7. A method of making a diamond/metal composite heat sink as recited in claim 2, comprising the steps of:
1) processing a patterned groove structure on the surface of a substrate according to the design requirements of the diamond/metal composite radiating fin, wherein the width d3= d1+ 2+ d2, the depth h3= h2 and the distance d4=2 (d1+ d2) of adjacent grooves of a single groove;
2) depositing a continuous diamond film on the surface of the patterned groove body structure by using a chemical vapor deposition method to form the diamond film with the groove structure on both sides, wherein the thickness is d 2;
3) filling metal in each groove on the top surface of the diamond film;
4) removing the matrix, inverting the diamond film, and filling metal in each groove on the bottom surface of the diamond film;
5) and removing the metal interference parts of the two surfaces of the diamond film outside the grooves to form filling metal which is finally flush with the two end surfaces of the diamond film, thereby obtaining the diamond/metal composite radiating fin.
8. The method for manufacturing a diamond/metal composite heat sink according to claim 7, wherein: in the step 1), monocrystalline silicon or molybdenum is adopted as a base body, and laser etching or mechanical processing is adopted as a method for processing a graphical groove body structure on the base body; in the steps 3) and 4), the method for filling metal adopts electroplating, composite electrodeposition or powder metallurgy, and the material of the metal adopts any one metal or alloy consisting of a plurality of metals of Ag, Cu and Al.
9. The method of manufacturing a diamond/metal composite heat sink as recited in claim 4, comprising the steps of:
1) processing a patterned groove body structure on the surface of a substrate according to the design requirements of the diamond/metal composite radiating fin, wherein the width d3= d1+2d2, the depth h3= h2 and the spacing d4=2 (d1+ d2) of the adjacent groove bodies;
2) preparing a carbide forming element transition layer on the surface of the patterned groove structure;
3) depositing a continuous diamond film on the surface of the carbide forming element transition layer by using a chemical vapor deposition method to form the diamond film with the groove structure on both sides, wherein the thickness is d 2;
4) preparing a carbide forming element transition layer on the surface of the groove structure on the top surface of the diamond film;
5) filling metal in the groove structure on the top surface of the diamond film;
6) removing the matrix, inverting the diamond film, preparing a carbide forming element transition layer on the surface of the groove structure on the bottom surface of the diamond film, and then filling metal in each groove;
7) and removing the metal interference part and the carbide forming element transition layer interference part outside the groove on the two surfaces of the diamond film to form a filling metal and carbide forming element transition layer which is flush with the two end surfaces of the diamond film finally, thereby obtaining the diamond/metal composite radiating fin.
10. The method for manufacturing a diamond/metal composite heat sink according to claim 9, wherein: in the step 1), the substrate is made of graphite, monocrystalline silicon or molybdenum, and the method for processing the graphical groove body structure on the substrate is laser etching or machining; in the step 2) and the step 4), the method for preparing the carbide forming element transition layer adopts electroplating, magnetron sputtering, vacuum evaporation method or molten salt method, the material of the strong carbide forming element transition layer adopts any one metal or alloy consisting of a plurality of metals of Ti, Mo, Ta, Cr, W, Hf, Zr and Nb, and the thickness of the alloy is 100 nm-5 mu m; in the steps 5) and 6), the method for filling metal adopts electroplating, composite electrodeposition or powder metallurgy, and the metal adopts any one metal or alloy consisting of a plurality of metals of Ag, Cu and Al.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210578458.XA CN114921766B (en) | 2022-05-26 | 2022-05-26 | Diamond/metal composite cooling fin and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210578458.XA CN114921766B (en) | 2022-05-26 | 2022-05-26 | Diamond/metal composite cooling fin and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114921766A true CN114921766A (en) | 2022-08-19 |
| CN114921766B CN114921766B (en) | 2023-10-13 |
Family
ID=82811451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210578458.XA Active CN114921766B (en) | 2022-05-26 | 2022-05-26 | Diamond/metal composite cooling fin and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114921766B (en) |
Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01123423A (en) * | 1987-11-07 | 1989-05-16 | Sumitomo Electric Ind Ltd | Method of patterning diamond film |
| EP0660400A1 (en) * | 1993-12-20 | 1995-06-28 | AEROSPATIALE Société Nationale Industrielle | Thermoconductive element, utilized in electronics as a printed circuit support or as a component and its method of fabrication |
| JPH08267644A (en) * | 1995-03-31 | 1996-10-15 | Kyocera Corp | Diamond composite member and its manufacture |
| US5587013A (en) * | 1994-01-27 | 1996-12-24 | Sumitomo Electric Industries, Ltd. | Methods of synthesizing and polishing a flat diamond film and free-standing diamond film |
| KR19980031954A (en) * | 1996-10-31 | 1998-07-25 | 김광호 | Diamond Surface Acoustic Wave Filter Manufacturing Method Using Diamond Thick Film |
| US5785754A (en) * | 1994-11-30 | 1998-07-28 | Sumitomo Electric Industries, Ltd. | Substrate, semiconductor device, element-mounted device and preparation of substrate |
| CN103594306A (en) * | 2013-11-13 | 2014-02-19 | 太原理工大学 | Diamond / metal composite material clamping rod and manufacturing method thereof |
| US20160032450A1 (en) * | 2013-03-28 | 2016-02-04 | Neocoat Sa | Method for a diamond vapor deposition |
| CN105803241A (en) * | 2016-03-21 | 2016-07-27 | 中南大学 | Spiral-body-enhanced metal-based or polymer-based composite and preparation method |
| US20170045314A1 (en) * | 2014-04-25 | 2017-02-16 | Denka Company Limited | Aluminum-diamond composite, and heat dissipating component using same |
| CN106739277A (en) * | 2016-11-16 | 2017-05-31 | 苏州大学 | The preparation method of the shape with Magnetron Sputtered Diamond-like Thin Carbon Films and application |
| CN206477031U (en) * | 2017-01-19 | 2017-09-08 | 上海征世科技有限公司 | The cvd diamond diaphragm of mutual embedding structure |
| CN206477024U (en) * | 2017-01-19 | 2017-09-08 | 上海征世科技有限公司 | Diamond film with groove structure |
| CN108611638A (en) * | 2018-06-07 | 2018-10-02 | 太原理工大学 | High wear resistance ratio, high fracture strength micron diamond thick film and preparation method thereof |
| CN108715997A (en) * | 2018-06-07 | 2018-10-30 | 太原理工大学 | The preparation method of diamond film-copper heat sink compound |
| CN109280882A (en) * | 2018-11-06 | 2019-01-29 | 太原理工大学 | A kind of preparation method of diamond single crystal cooling fin |
| CN110482482A (en) * | 2019-07-24 | 2019-11-22 | 北京科技大学 | A kind of preparation method of insulation patterns high heat-conductive diamond radiating element |
| CN113151898A (en) * | 2021-02-18 | 2021-07-23 | 北京科技大学 | Preparation method of embedded diamond-based silicon carbide composite substrate |
| CN113337806A (en) * | 2020-03-03 | 2021-09-03 | 核工业理化工程研究院 | Diamond micro-channel heat sink, preparation method and application thereof, and semiconductor laser |
| CN113548909A (en) * | 2021-08-12 | 2021-10-26 | 有研工程技术研究院有限公司 | Diamond-metal interface structure, composite material and preparation method |
| US20210363016A1 (en) * | 2015-02-09 | 2021-11-25 | Saeed Alhassan Alkhazraji | Process for Manufacturing a Pure Porous 3D Diamond |
-
2022
- 2022-05-26 CN CN202210578458.XA patent/CN114921766B/en active Active
Patent Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01123423A (en) * | 1987-11-07 | 1989-05-16 | Sumitomo Electric Ind Ltd | Method of patterning diamond film |
| EP0660400A1 (en) * | 1993-12-20 | 1995-06-28 | AEROSPATIALE Société Nationale Industrielle | Thermoconductive element, utilized in electronics as a printed circuit support or as a component and its method of fabrication |
| US5587013A (en) * | 1994-01-27 | 1996-12-24 | Sumitomo Electric Industries, Ltd. | Methods of synthesizing and polishing a flat diamond film and free-standing diamond film |
| US5785754A (en) * | 1994-11-30 | 1998-07-28 | Sumitomo Electric Industries, Ltd. | Substrate, semiconductor device, element-mounted device and preparation of substrate |
| JPH08267644A (en) * | 1995-03-31 | 1996-10-15 | Kyocera Corp | Diamond composite member and its manufacture |
| KR19980031954A (en) * | 1996-10-31 | 1998-07-25 | 김광호 | Diamond Surface Acoustic Wave Filter Manufacturing Method Using Diamond Thick Film |
| US20160032450A1 (en) * | 2013-03-28 | 2016-02-04 | Neocoat Sa | Method for a diamond vapor deposition |
| CN103594306A (en) * | 2013-11-13 | 2014-02-19 | 太原理工大学 | Diamond / metal composite material clamping rod and manufacturing method thereof |
| US20170045314A1 (en) * | 2014-04-25 | 2017-02-16 | Denka Company Limited | Aluminum-diamond composite, and heat dissipating component using same |
| US20210363016A1 (en) * | 2015-02-09 | 2021-11-25 | Saeed Alhassan Alkhazraji | Process for Manufacturing a Pure Porous 3D Diamond |
| CN105803241A (en) * | 2016-03-21 | 2016-07-27 | 中南大学 | Spiral-body-enhanced metal-based or polymer-based composite and preparation method |
| CN106739277A (en) * | 2016-11-16 | 2017-05-31 | 苏州大学 | The preparation method of the shape with Magnetron Sputtered Diamond-like Thin Carbon Films and application |
| CN206477024U (en) * | 2017-01-19 | 2017-09-08 | 上海征世科技有限公司 | Diamond film with groove structure |
| CN206477031U (en) * | 2017-01-19 | 2017-09-08 | 上海征世科技有限公司 | The cvd diamond diaphragm of mutual embedding structure |
| CN108611638A (en) * | 2018-06-07 | 2018-10-02 | 太原理工大学 | High wear resistance ratio, high fracture strength micron diamond thick film and preparation method thereof |
| CN108715997A (en) * | 2018-06-07 | 2018-10-30 | 太原理工大学 | The preparation method of diamond film-copper heat sink compound |
| CN109280882A (en) * | 2018-11-06 | 2019-01-29 | 太原理工大学 | A kind of preparation method of diamond single crystal cooling fin |
| CN110482482A (en) * | 2019-07-24 | 2019-11-22 | 北京科技大学 | A kind of preparation method of insulation patterns high heat-conductive diamond radiating element |
| CN113337806A (en) * | 2020-03-03 | 2021-09-03 | 核工业理化工程研究院 | Diamond micro-channel heat sink, preparation method and application thereof, and semiconductor laser |
| CN113151898A (en) * | 2021-02-18 | 2021-07-23 | 北京科技大学 | Preparation method of embedded diamond-based silicon carbide composite substrate |
| CN113548909A (en) * | 2021-08-12 | 2021-10-26 | 有研工程技术研究院有限公司 | Diamond-metal interface structure, composite material and preparation method |
Non-Patent Citations (1)
| Title |
|---|
| 曾从远: "电子封装用铝基金刚石复合材料的制备及性能研究", 《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》, no. 01, pages 97 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114921766B (en) | 2023-10-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3007531B1 (en) | Heat conductive composite material sheet and fabrication method thereof | |
| CN105112754B (en) | Three-dimensional network diamond framework strengthens metal-base composites and preparation method | |
| EP1477467B1 (en) | Composite material having high thermal conductivity and low thermal expansion coefficient, and heat-dissipating substrate | |
| US8531026B2 (en) | Diamond particle mololayer heat spreaders and associated methods | |
| EP1055650A1 (en) | Carbon-based metal composite material, method for preparation thereof and use thereof | |
| US20060263584A1 (en) | Composite material, electrical circuit or electric module | |
| AU2005302402A1 (en) | Refractory metal substrate with improved thermal conductivity | |
| CN105220049A (en) | A kind of sheet diamond reinforced metal-base composite material and preparation method | |
| CN105803241A (en) | Spiral-body-enhanced metal-based or polymer-based composite and preparation method | |
| JPH1084059A (en) | Silicon nitride circuit board | |
| US20070243407A1 (en) | Machinable Metallic Composites | |
| CN111069611B (en) | Preparation method of graphite-graphene-metal composite material | |
| CN112760082A (en) | High-thermal-conductivity graphene film and preparation method thereof | |
| CN110358508A (en) | Diamantiferous composite heat dissipation material and preparation method thereof | |
| CN114921766B (en) | Diamond/metal composite cooling fin and preparation method thereof | |
| US20160053365A1 (en) | Encapsulated composite backing plate | |
| CN103325645A (en) | Diamond-electrocoppering composite clamping rod for travelling-wave tube and manufacturing method thereof | |
| CN111682002B (en) | Heat radiation plate | |
| JP7440944B2 (en) | Composite materials and heat dissipation components | |
| EP1566456B1 (en) | Composite material, method for producing same and member using same | |
| JP6429108B2 (en) | Semiconductor element mounting substrate and semiconductor element device using the same | |
| CN112108654A (en) | Preparation method of high-thermal-conductivity composite material and graphite-aluminum metal composite material | |
| CN114909942A (en) | Diamond/copper composite radiating fin and preparation method thereof | |
| CN112420638A (en) | Diamond film copper-clad heat sink and preparation method thereof | |
| CN117512594B (en) | Preparation method of diamond/metal matrix composite material with parallel structure interface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |