CN114838650B - Displacement sensor calibration device and method based on turntable - Google Patents

Displacement sensor calibration device and method based on turntable Download PDF

Info

Publication number
CN114838650B
CN114838650B CN202210314332.1A CN202210314332A CN114838650B CN 114838650 B CN114838650 B CN 114838650B CN 202210314332 A CN202210314332 A CN 202210314332A CN 114838650 B CN114838650 B CN 114838650B
Authority
CN
China
Prior art keywords
displacement sensor
turntable
displacement
signal
detection block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210314332.1A
Other languages
Chinese (zh)
Other versions
CN114838650A (en
Inventor
陈野
赵郭有为
杨明
王胜利
胡吉昌
邓慰敬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijign Institute of Aerospace Control Devices
Original Assignee
Beijign Institute of Aerospace Control Devices
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijign Institute of Aerospace Control Devices filed Critical Beijign Institute of Aerospace Control Devices
Priority to CN202210314332.1A priority Critical patent/CN114838650B/en
Publication of CN114838650A publication Critical patent/CN114838650A/en
Application granted granted Critical
Publication of CN114838650B publication Critical patent/CN114838650B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a displacement sensor calibration device and a method based on a turntable, wherein the calibration device comprises the turntable; a spherical detection block; the displacement sensor probe detects the distance between the probe and the surface of the spherical detection block to obtain a displacement signal; the displacement sensor conditioning circuit converts the displacement signal into a voltage signal and transmits the voltage signal to the data acquisition card; the angle encoder is used for measuring the angle of the turntable and outputting a pulse signal, and transmitting the pulse signal to the data acquisition card; the data acquisition card is used for transmitting the voltage signal and the pulse signal to the industrial personal computer; the industrial personal computer converts the pulse signals into angle signals and fits the voltage signals and the angle signals. The calibration method comprises adjusting the relative position of the displacement sensor probe and the spherical detection block to an initial position, and sequentially moving from the initial position to n angular positions to obtain n voltage signals u i And an angle signal delta theta i Further calculate displacement data Δd i Fitting the voltage signal u i And displacement data Δd i The sensitivity and zero offset are obtained. And the accurate calibration of the displacement sensor is realized by utilizing the angular movement function of the turntable.

Description

Displacement sensor calibration device and method based on turntable
Technical Field
The invention belongs to the technical field of sensor calibration and test, and particularly relates to a displacement sensor calibration device and method based on a turntable.
Background
The displacement sensor is mainly used for measuring various forms of displacement, vibration signals and the like, and capacitive displacement sensors, eddy current type displacement sensors and the like are commonly used in engineering. Before the displacement sensor is used, a standard metering instrument is used for calibrating the sensitivity coefficient of the displacement sensor, so that the corresponding relation between the input quantity and the output quantity is determined. However, in the use process of the displacement sensor, as the working environment changes and the electronic components used age, the sensitivity coefficient also changes, and if calibration is not performed in time, measurement errors can be generated, so that the final measurement accuracy is affected.
The existing calibration device of the displacement sensor mostly uses a linear motion mode to generate a known displacement as an input quantity, then the output quantity of the displacement sensor is collected, the output quantity of the displacement sensor is usually a voltage value, and the sensitivity coefficient and other performance index parameters of the displacement sensor are determined by utilizing the output quantity and the standard input quantity. In actual engineering, some working occasions do not have linear motion test devices, and the displacement sensor cannot be calibrated. However, some work sites have test equipment that performs angular movement, such as precision turrets. Therefore, a set of displacement sensor calibration device based on the turntable can be designed, and the accurate calibration of the displacement sensor can be realized by utilizing the high-precision angular position movement of the turntable.
Disclosure of Invention
The invention provides a new calibration device and method for a displacement sensor, which aims to solve the technical problems in the prior art, and realizes the accurate calibration of the displacement sensor by utilizing the high-precision and high-resolution angular position movement function of a turntable.
The invention adopts the technical proposal for solving the technical problems in the prior art that:
a displacement sensor calibration device based on a rotary table comprises the rotary table, wherein the rotary table has an angular position movement function;
the spherical detection block is arranged on the surface of the turntable;
the displacement sensor probe is detachably connected to the displacement sensor fixing support, and the distance between the displacement sensor probe and the surface of the spherical detection block is detected to obtain a displacement signal;
the displacement sensor conditioning circuit is connected with the displacement sensor probe, amplifies a displacement signal detected by the displacement sensor probe, converts the displacement signal into a voltage signal and transmits the voltage signal to the data acquisition card;
the angle encoder is arranged on the turntable, outputs pulse signals along with the rotation of the turntable, and transmits the pulse signals to the data acquisition card;
the data acquisition card receives the voltage signal and the pulse signal and sends the voltage signal and the pulse signal to the industrial personal computer;
the industrial personal computer is connected with the data acquisition card, converts the pulse signal into an angle signal and fits the voltage signal and the angle signal.
The turntable is a precise turntable with an angular position movement function, and can realize angular movement with higher resolution.
The projection of the outer edge of the table top of the turntable along the axis direction of the turntable passes through the sphere center of the spherical detection block.
The material of the spherical detection block, usually a metal material, is selected according to the characteristics of the calibrated displacement sensor.
The displacement sensor probe is connected to a displacement sensor conditioning circuit through a cable. The displacement sensor conditioning circuit is connected to the data acquisition card through a cable. The angle encoder is connected to the data acquisition card through a cable. The data acquisition card is connected to the industrial personal computer through the PCI slot.
The turntable is provided with a driving piece for driving the turntable to rotate. The driving member may be a motor or the like. The driving piece is connected with the industrial personal computer, and the turntable can be controlled to rotate through the industrial personal computer.
And running test software in the industrial personal computer, wherein the test software is developed based on a LabVIEW virtual instrument platform.
The foundation of the turntable is provided with a displacement sensor fixing support, and the displacement sensor fixing support is used for detachably fixing a displacement sensor probe on the foundation of the turntable.
The whole L-shaped rod-shaped structure of displacement sensor fixing support, the terminal design of horizon bar has the clamp structure, and the displacement sensor probe can pass from the displacement sensor fixing support hole to press from both sides the displacement sensor probe tightly through the bolt, the horizon bar of displacement sensor fixing support passes through the bolt to be connected with vertical pole, and can reciprocate for vertical pole, and then adjusts the height of displacement sensor probe, but the whole horizontal migration of displacement sensor fixing support.
Through the technical scheme, one side of the spherical detection block, which faces the displacement sensor probe, is a spherical surface, and the arrangement of the spherical detection block greatly reduces errors caused by radial movement of the spherical detection block along the table surface of the turntable. The rotation of the table top of the turntable can be conveniently converted into the displacement of the spherical detection block in the linear direction sensed by the displacement sensor probe, and the distance from the surface of the spherical detection block to the center of the spherical detection block is constant;
setting an initial position: the axis of the displacement sensor probe is aligned with the sphere center of the spherical detection block, and the axis of the displacement sensor probe is tangential to the outer edge of the turntable; the rotating angle of the table top of the turntable is theta, and the distance between the center of sphere of the spherical detection block and the axis of the table top of the turntable is R o Then, the displacement Δd in the linear direction sensed by the displacement sensor probe is R o sinθ。
A displacement sensor calibration device and method based on a turntable comprises the following steps:
(1) And adjusting the relative positions of the displacement sensor probe and the spherical detection block to ensure that the axis of the displacement sensor probe is aligned with the spherical center of the spherical detection block, and the axis of the displacement sensor probe is tangential to the outer edge of the turntable. And observing the output voltage of the displacement sensor conditioning circuit in the interface of the test software, and adjusting the gap between the displacement sensor probe and the spherical detection block according to the value of the output voltage to enable the value of the output voltage to be the minimum value (usually 0V) of the voltage output range of the displacement sensor probe, wherein the minimum value is the initial position.
(2) According to the range of the calibrated displacement sensor, selecting n test points, and according to the table radius R of the turntable 0 Calculating the angular position of the turntable, operating the turntable to sequentially move from an initial position to n angular positions, and simultaneously automatically collecting the output voltage signal u of the displacement sensor conditioning circuit by the test software i And the pulse signal of the angle encoder, and then the pulse signal is converted into an angle signal delta theta i Further calculate displacement data Δd i
(3) The test software collects the voltage signal u for n times i And displacement data Δd i Performing linear fittingThe calculated sensitivities k and zero offset b are:
wherein u is i Is a voltage; r is R 0 Is the radius of the turntable (1); Δd is the displacement in the linear direction sensed by the displacement sensor probe.
The Δd=r 0 sin(Δθ i ) Wherein Δθ i Is the rotation angle of the turntable (1) from the initial position to the detection position.
In summary, the present application at least includes the following beneficial technical effects:
1. based on the angular movement function of the precise turntable, a device and a method for calibrating a displacement sensor are provided, and precise angular position information is fed back by utilizing a high-precision pulse signal of an angle encoder, so that the precision calibration of the displacement sensor is realized.
2. By using the device and the method provided by the invention, the calibration process adopts electric drive, data are automatically acquired, the sensitivity coefficient and zero offset are calculated, the introduced error is small, the operation is convenient, and the calibration efficiency is higher.
Drawings
FIG. 1 is a schematic diagram of a displacement sensor calibration device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the testing principle of the testing device of the present invention;
FIG. 3 is a schematic diagram of a test apparatus according to the present invention;
fig. 4 is a graph of measured data and a fit of the present invention, wherein the abscissa is the voltage value output by the displacement sensor conditioning circuit, the ordinate represents the displacement calculated by the output pulse of the angle encoder and the radius of the turntable, "x" represents the raw data point, "-represents the fitted primary function curve.
Reference numerals illustrate: 1. a turntable; 2. a spherical detection block; 3. a displacement sensor probe; 4. a displacement sensor fixing support; 5. a displacement sensor conditioning circuit; 6. an angle encoder; 7. a data acquisition card; 8. an industrial personal computer;
Detailed Description
The present application is described in further detail below with reference to the attached drawing figures and specific examples:
the embodiment of the application discloses a displacement sensor calibration device and method based on a turntable.
Referring to fig. 1 to 3, a displacement sensor calibration device based on a turntable comprises a turntable 1, a spherical detection block 2, a displacement sensor probe 3, a displacement sensor fixing support 4, a displacement sensor conditioning circuit 5, an angle encoder 6, a data acquisition card 7 and an industrial personal computer 8.
The turntable 1 is a precise turntable with an angular position movement function, and can realize angular movement with higher resolution. The spherical detection block 2 is fixedly connected with the table top of the turntable 1, so that the outer edge of the table top passes through the spherical center of the spherical detection block 2, namely the distance from the center of the table top to the spherical center of the spherical detection block 2 is the radius R 0 . The material of the spherical detection block 2, typically a metallic material, is selected according to the characteristics of the calibrated displacement sensor.
The spherical detection block 2 is connected with a connecting piece, the connecting piece is L-shaped and comprises a horizontal part and a vertical part which are integrally connected, the horizontal part of the connecting piece is connected to the table top of the turntable 1 through a bolt, the vertical part of the connecting piece is perpendicular to the table top, the top of the connecting piece is connected with the spherical detection block 2, the vertical part of the connecting piece is provided with a positioning surface, and the positioning surface is opposite to and close to the outer edge of the table top of the turntable, and meanwhile the center of the spherical detection block 2 passes through the edge of the turntable 1.
The displacement sensor probe 3 is detachably connected to the displacement sensor fixing support 4. The displacement sensor fixing support 4 comprises a vertical rod 42 and a horizontal rod 41 connected to the vertical rod 42, the horizontal rod 41 is fixedly connected with the vertical rod 42 through a screw rod, and the horizontal rod 41 can be adjusted up and down relative to the vertical rod 42 so as to adjust the height of the displacement sensor probe 3. Specifically, a plurality of connecting holes can be formed in the vertical rod 42, a threaded hole is formed in the end portion of the horizontal rod 41, and a screw rod penetrates through different connecting holes to be in threaded connection with the horizontal rod at the threaded hole, so that adjustment of the horizontal rod 41 in the vertical direction is achieved. Or, the horizontal rod 41 is vertically and slidably connected with the vertical rod 42, the vertical rod 42 is vertically and rotatably connected with a screw rod, the screw rod passes through the horizontal rod 41 and is in threaded connection with the horizontal rod 41, and the screw rod drives the horizontal rod 41 to vertically move up and down by rotating the screw rod, so that the adjustment of the horizontal rod 41 in the vertical direction is realized.
The displacement sensor fixing support 4 is integrally placed on the foundation of the turntable 1 and can horizontally move in parallel to the radial direction of the turntable 1. Specifically, a placement seat which can be stably placed on the foundation of the turntable 1 is connected to the bottom of the vertical rod 42.
The end of the horizontal rod is provided with a clamping structure for fixing the displacement sensor probe 3. The clamping structure comprises a hole formed in the horizontal rod 41 and a bolt in threaded connection with the horizontal rod 41, the end portion of the bolt can be inserted into the hole in the horizontal rod 41, the displacement sensor probe 3 can penetrate through the hole in the horizontal rod 41, the bolt is rotated until the bolt abuts against the displacement sensor probe 3, and the displacement sensor probe 3 is clamped through the bolt.
Once the sphere shaped test block 2 is fixed, no readjustment is required. When the relative positions of the displacement sensor probe 3 and the spherical detection block 2 are adjusted, the relation between the horizontal rod 41 and the vertical rod 42 of the displacement sensor fixed support 4 can be adjusted to adjust the height of the displacement sensor probe. The whole displacement sensor fixing support 4 can horizontally move, so that the axis of the displacement sensor probe 3 can be adjusted to be aligned with the sphere center of the spherical detection block 2. The bolt at the tail end of the horizontal rod 41 of the displacement sensor fixing support 4 is unscrewed, the gap between the displacement sensor probe 3 and the spherical detection block can be manually adjusted, and the bolt is screwed after the gap adjustment is completed.
The displacement sensor probe 3 is connected to the displacement sensor conditioning circuit 5 through a cable, the displacement sensor conditioning circuit 5 is connected to the data acquisition card 7 through a cable, and the displacement sensor conditioning circuit 5 amplifies a displacement signal detected by the displacement sensor probe 3 and converts the displacement signal into a voltage signal to be transmitted to the data acquisition card 7. The angle encoder 6 is an angle measuring device of the turntable 1, and in the rotating process of the turntable 1, the angle encoder 6 outputs pulse signals and transmits the pulse signals to the data acquisition card 7.
The data acquisition card 7 is connected to the industrial personal computer 8 through a PCI slot, and sends the received voltage signal and pulse signal to the industrial personal computer 8. The industrial personal computer 8 runs test software, the test software is developed based on a LabVIEW virtual instrument platform, the test software of the industrial personal computer 8 converts pulse signals into angle signals, displacement data are calculated, and voltage signals and the displacement data are fitted.
The embodiment also discloses a displacement sensor calibration method based on the turntable, which comprises the following steps:
(1) The relative positions of the displacement sensor probe 3 and the spherical detection block 2 are adjusted, so that the axis of the displacement sensor probe 3 is aligned with the spherical center of the spherical detection block 2, and the axis of the displacement sensor probe 3 is tangential to the outer edge of the turntable 1. The output voltage of the displacement sensor conditioning circuit 5 is observed in the interface of the test software, and the gap between the displacement sensor probe 3 and the spherical detection block 2 is adjusted according to the value of the output voltage, so that the output voltage value is the minimum value (usually 0V) of the voltage output range of the displacement sensor probe 3, which is the initial position.
(2) According to the range of the calibrated displacement sensor, n test points are selected and tested, and according to the table radius R of the turntable 1 0 Calculating the angular position of the turntable 1, operating the turntable 1 to sequentially move from an initial position to n angular positions, and simultaneously automatically collecting the output voltage signal u of the displacement sensor conditioning circuit 5 by test software i And the pulse signal of the angle encoder 6, and then converts the pulse signal into an angle signal delta theta i Further calculate displacement data Δd i
(3) The test software collects the voltage signal u for n times i And displacement data Δd i Performing linear fitting, and calculating to obtain sensitivity k and zero offset b as follows:
wherein u is i Is a voltage; r is R 0 Is the radius of the turntable; Δd is the displacement in the linear direction sensed by the displacement sensor probe.
The number of lines of the angle encoder used in the embodiment of the invention is 32768, the angle encoder is subdivided 512 times, and the number of pulses of the whole circle is 16777216.
Radius R of turntable 0 650mm.
10 position points are selected, and the rotation angle (delta theta i Units: degree) array is [0.0023,0.0174,0.0346,0.0516,0.0691,0.0879,0.1030,0.1204,0.1372,0.1720 ]]The collected voltage value (unit: V) [0.1277,0.9865,1.9609,2.9267,3.9181,4.98123,5.84124,6.8277,7.7717,9.7520 ]]。
Calculate displacement as Δd=r 0 sin(Δθ i ) (units: mm) and the displacement and voltage values are subjected to linear fitting once, the result is shown in fig. 4, and finally, the displacement and voltage values are obtained through linear fitting once:
the expression of the straight line is y=0.2001x+1.848×10 -4
k=0.2001
b=1.848×10 -4
Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present invention and the scope of the appended claims, which are within the scope of the present invention.

Claims (10)

1. The utility model provides a displacement sensor calibration device based on revolving stage (1), its characterized in that: comprises a turntable (1) with an angular position movement function;
the spherical detection block (2) is arranged on the surface of the rotary table (1);
the displacement sensor fixing support (4) is connected to the foundation of the turntable (1);
the displacement sensor probe (3) is detachably connected to the displacement sensor fixed support (4), and a displacement signal is obtained by detecting the distance between the displacement sensor probe (3) and the surface of the spherical detection block (2);
the displacement sensor conditioning circuit (5) is connected with the displacement sensor probe (3) and converts a displacement signal detected by the displacement sensor probe (3) into a voltage signal to be transmitted to the data acquisition card (7);
the angle encoder (6) is arranged on the turntable (1), and the angle encoder (6) outputs pulse signals along with the rotation of the turntable (1) and transmits the pulse signals to the data acquisition card (7);
the data acquisition card (7) receives the voltage signal and the pulse signal and sends the voltage signal and the pulse signal to the industrial personal computer (8);
and the industrial personal computer (8) is connected with the data acquisition card (7) and converts the pulse signal into an angle signal, so as to calculate displacement data and fit the voltage signal and the displacement data.
2. A displacement sensor calibration device based on a turntable (1) according to claim 1, characterized in that: the projection of the outer edge of the table top of the turntable (1) along the axial direction of the turntable (1) passes through the sphere center of the spherical detection block (2).
3. A turntable-based displacement sensor calibration device as claimed in claim 1, wherein: the spherical detection block (2) is provided with a positioning surface, the positioning surface is abutted against the outer edge of the table top of the turntable, and the whole spherical detection block (2) is connected to the table top of the turntable (1) through bolts.
4. A turntable-based displacement sensor calibration device as claimed in claim 1, wherein: the displacement sensor fixing support (4) is used for detachably fixing and clamping the displacement sensor probe (3).
5. A turntable-based displacement sensor calibration device as claimed in claim 1, wherein: the whole displacement sensor fixing support (4) can horizontally move parallel to the radial direction of the turntable (1).
6. A turntable-based displacement sensor calibration device as claimed in claim 1, wherein: the displacement sensor fixing support (4) comprises a vertical rod and a horizontal rod connected to the vertical rod, and the horizontal rod can be adjusted up and down relative to the vertical rod.
7. The turntable-based displacement sensor calibration device according to claim 6, wherein: the tail end of the horizontal rod is provided with a clamping structure for fixing the displacement sensor probe (3).
8. A turntable-based displacement sensor calibration method using a turntable-based displacement sensor calibration apparatus according to any one of claims 1 to 7, characterized in that: comprises the steps of,
the method comprises the steps of (1) adjusting the relative positions of a displacement sensor probe (3) and a spherical detection block (2) to enable the axis of the displacement sensor probe (3) to be aligned with the spherical center of the spherical detection block (2), enabling the axis of the displacement sensor probe (3) to be tangential to the outer edge of a turntable (1), enabling an output voltage value to be the minimum value of the voltage output range of the displacement sensor probe (3), and enabling the output voltage value to be the initial position;
(2) According to the range of the calibrated displacement sensor, selecting n test points according to the table radius R of the turntable (1) 0 Calculating the angular position of the turntable (1), operating the turntable (1) to sequentially move from the initial position to n angular positions, and simultaneously automatically collecting the output voltage signal u of the displacement sensor conditioning circuit (5) by the industrial personal computer (8) i And the pulse signal of the angle encoder (6), and then the pulse signal is converted into an angle signal delta theta i Further calculate displacement data Δd i
(3) The industrial personal computer collects voltage signals u for n times i And displacement data Δd i And (5) performing linear fitting, and calculating to obtain the sensitivity k and the zero offset b.
9. The turntable-based displacement sensor calibration method according to claim 8, wherein: the sensitivity k and zero offset b are:
wherein u is i Is a voltage; Δd i Is the displacement in the linear direction sensed by the displacement sensor probe.
10. The turntable-based displacement sensor calibration method according to claim 9, wherein: the Δd is i =R 0 sin(Δθ i ) Wherein R is 0 Is the radius of the turntable (1); Δθ i Is the rotation angle of the turntable (1) from the initial position to the detection position.
CN202210314332.1A 2022-03-28 2022-03-28 Displacement sensor calibration device and method based on turntable Active CN114838650B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210314332.1A CN114838650B (en) 2022-03-28 2022-03-28 Displacement sensor calibration device and method based on turntable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210314332.1A CN114838650B (en) 2022-03-28 2022-03-28 Displacement sensor calibration device and method based on turntable

Publications (2)

Publication Number Publication Date
CN114838650A CN114838650A (en) 2022-08-02
CN114838650B true CN114838650B (en) 2024-04-09

Family

ID=82563974

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210314332.1A Active CN114838650B (en) 2022-03-28 2022-03-28 Displacement sensor calibration device and method based on turntable

Country Status (1)

Country Link
CN (1) CN114838650B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116772699B (en) * 2023-08-17 2023-12-26 苏州苏磁智能科技有限公司 Magnetic suspension motor characteristic calibration method and device

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031170A (en) * 2007-07-30 2009-02-12 Okamoto Machine Tool Works Ltd Surface shape calibrating device and method
CN104567787A (en) * 2013-10-12 2015-04-29 北京航天计量测试技术研究所 Method for calibrating measurement accuracy of dynamic angle measuring system
CN205642270U (en) * 2016-04-20 2016-10-12 上海工程技术大学 Experimental device for displacement sensor
CN106482685A (en) * 2015-08-31 2017-03-08 福建宁德核电有限公司 Vibration displacement transducer dwell calibration system and its calibration steps
CN107144211A (en) * 2017-05-24 2017-09-08 大连理工大学 A kind of eddy current displacement sensor quick calibrating method
CN108827149A (en) * 2018-06-12 2018-11-16 北京华睿盛德科技有限公司 A kind of turntable scaling method based on line laser displacement sensor and diffusing reflection gauge block
CN110470209A (en) * 2019-08-19 2019-11-19 华南理工大学 A kind of ultraprecise roundness measurement method and device based on two-step method
CN111043944A (en) * 2019-12-27 2020-04-21 中水北方勘测设计研究有限责任公司 In-situ calibration device for eddy current displacement sensor
CN113251909A (en) * 2021-06-25 2021-08-13 清华大学 Calibration device and method of eddy current sensor for measuring displacement of rotating shaft

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031170A (en) * 2007-07-30 2009-02-12 Okamoto Machine Tool Works Ltd Surface shape calibrating device and method
CN104567787A (en) * 2013-10-12 2015-04-29 北京航天计量测试技术研究所 Method for calibrating measurement accuracy of dynamic angle measuring system
CN106482685A (en) * 2015-08-31 2017-03-08 福建宁德核电有限公司 Vibration displacement transducer dwell calibration system and its calibration steps
CN205642270U (en) * 2016-04-20 2016-10-12 上海工程技术大学 Experimental device for displacement sensor
CN107144211A (en) * 2017-05-24 2017-09-08 大连理工大学 A kind of eddy current displacement sensor quick calibrating method
CN108827149A (en) * 2018-06-12 2018-11-16 北京华睿盛德科技有限公司 A kind of turntable scaling method based on line laser displacement sensor and diffusing reflection gauge block
CN110470209A (en) * 2019-08-19 2019-11-19 华南理工大学 A kind of ultraprecise roundness measurement method and device based on two-step method
CN111043944A (en) * 2019-12-27 2020-04-21 中水北方勘测设计研究有限责任公司 In-situ calibration device for eddy current displacement sensor
CN113251909A (en) * 2021-06-25 2021-08-13 清华大学 Calibration device and method of eddy current sensor for measuring displacement of rotating shaft

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
光电编码器模拟测速机在转台控制***中的应用;李瑾等;《导航控制》;第15卷(第1期);第110-112页,第16页 *

Also Published As

Publication number Publication date
CN114838650A (en) 2022-08-02

Similar Documents

Publication Publication Date Title
CN107063158A (en) Elongated bore diameter and cylindricity measuring method based on dual sensor error separate
CN110906861B (en) Real-time measuring device and method for rolling angle error of guide rail movement
CN102538652B (en) Calibrating device for eddy sensor
CN110763110B (en) Three-jaw internal diameter ruler automatic calibration device
CN102192721A (en) On -line detection equipment for automobile engine cylinder body
CN203672359U (en) Attack angle and pressing force testing and adjusting device used for windscreen wiper
CN108020409A (en) A kind of 4 points of dynamic measurements of spindle rotation error and separation method
CN106705823A (en) Field calibration method for linear displacement sensor
CN101769714B (en) Differential pressure type flowmeter orifice detector and detecting method thereof
CN114838650B (en) Displacement sensor calibration device and method based on turntable
CN109737884A (en) A kind of quiet dynamic deformation amount on-Line Monitor Device of axial workpiece and method
CN116294966A (en) Calibration compensation testing method for eddy current position sensor test bench
CN113251909B (en) Calibration device and method of eddy current sensor for measuring displacement of rotating shaft
CN112798015B (en) Dynamic angle calibration device
CN2932303Y (en) Inside diameter measuring device
CN100458361C (en) Inclinometer zero point and sensitivity temperature compensation device and compensation method thereof
JPS608701A (en) Portable inspecting and measuring device inspecting tooth form and tooth race of gear and inspecting and measuring method
CN113418449A (en) Engine blade body and edge plate measuring device and measuring method
CN106052956B (en) A kind of power hammer sensitivity self-checking device and its calibration method
CN204731259U (en) A kind of High-precision vehicle closing speed measuring system for car load long duration test
CN208276615U (en) A kind of main shaft checking of dynamic accuracy device based on band-like laser sensor
CN214200176U (en) Precision calibration device for eddy current displacement sensor in sealed environment
CN113700589B (en) System and method for acquiring shafting state characteristic parameters of hydroelectric generating set
CN215177605U (en) Calibration device for measuring instrument
CN205593872U (en) Full -automatic calibrating installation of shore durometer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant