CN111043944A - In-situ calibration device for eddy current displacement sensor - Google Patents
In-situ calibration device for eddy current displacement sensor Download PDFInfo
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- CN111043944A CN111043944A CN201911374476.0A CN201911374476A CN111043944A CN 111043944 A CN111043944 A CN 111043944A CN 201911374476 A CN201911374476 A CN 201911374476A CN 111043944 A CN111043944 A CN 111043944A
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- eddy current
- current displacement
- displacement sensor
- sliding table
- sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses an in-situ calibration device for an eddy current displacement sensor, which comprises a V-shaped magnetic gauge stand, an X-Y bidirectional precise sliding table with an X-Y direction digital display micrometer, the eddy current displacement sensor, an iron connecting flat plate and a sensor bracket, wherein the X-Y bidirectional precise sliding table is provided with an X-Y direction digital display micrometer; the X-Y bidirectional precise sliding table is adsorbed to the V-shaped magnetic gauge stand through the iron connecting flat plate, and the in-situ transverse and longitudinal calibration of the eddy current displacement sensor is carried out through the left-right movement of the X-Y bidirectional precise sliding table. The invention has high calibration precision, and realizes the in-situ high-precision calibration of the eddy current displacement sensor; simple structure is light, the installation is dismantled very conveniently, saves maintenance time and cost of labor, increases substantially work efficiency.
Description
Technical Field
The invention relates to a hydraulic machinery field test technology, in particular to an in-situ calibration device for an eddy current displacement sensor, which reduces the measurement error of the eddy current displacement sensor.
Background
With the development of the domestic hydraulic testing technology, more and more large and medium-sized hydraulic units are provided with online monitoring and diagnosis systems, and the running states of the units and equipment are evaluated by measuring mechanical, electromagnetic and hydraulic signals and the like. The eddy current sensor is characterized in that: the sensor has the advantages of simple structure, high sensitivity, good linearity, wide frequency band range and strong anti-interference performance, is a relative displacement sensor which is widely used at present, and is largely applied to monitoring axial and radial vibration of a shafting on a rotating machine. The shaft throw is used as a key signal for monitoring the running state of the unit, and the calibration precision diameter of the sensor influences the accuracy of a test signal.
The calibration device of the eddy current displacement sensor is generally a displacement static calibration platform, and the following two differences exist between the calibration device and the engineering practical application measurement: firstly, the material of a calibration disc of a displacement static calibration platform is often different from the material of a shaft of a tested unit; therefore, the sensitivity coefficient of the sensor calibrated by the static standard platform has certain error influence when being directly used for engineering actual monitoring due to different materials and needs to be corrected. And secondly, a plane testing method is adopted by the displacement static standard platform, the actual surface of the shaft of the unit is a cambered surface, the larger the shaft is, the smaller the radian is, the smaller the shaft is, the larger the radian is, and a certain error can also be generated when the plane calibration coefficient is applied to the cambered surface. Ignoring the difference between the two points will affect the accuracy of determining the actual operating state of the unit.
Disclosure of Invention
The invention aims to solve the technical problem of providing an in-situ calibration device for an eddy current displacement sensor, and aims to reduce errors of a calibration sensitivity coefficient of the eddy current displacement sensor caused by inconsistency of the material and the cambered surface of a measured shaft, so that the calibration of the eddy current displacement sensor for measurement is more convenient, quicker, more accurate and more reliable.
In order to solve the technical problems, the invention adopts the technical scheme that: an in-situ calibration device for an eddy current displacement sensor comprises a V-shaped magnetic gauge stand, an X-Y bidirectional precise sliding table with an X-Y direction digital display micrometer, the eddy current displacement sensor, an iron connecting flat plate and a sensor bracket; the X-Y bidirectional precise sliding table is adsorbed to the V-shaped magnetic gauge stand through the iron connecting flat plate, and the in-situ transverse and longitudinal calibration of the eddy current displacement sensor is carried out through the left-right movement of the X-Y bidirectional precise sliding table.
The sensor support is an L-shaped flat sheet, a vertical slender adjusting hole is formed in the vertical edge, and the eddy current displacement sensor penetrates through the vertical slender adjusting hole and is fixed through a pair of nuts; and a slender positioning hole is formed on the horizontal edge and used for adjusting the fixed position of the sensor bracket on the upper surface of the X-Y bidirectional precision sliding table.
The number of the sensor supports and the number of the eddy current displacement sensors are 2.
The invention has the beneficial effects that: the in-situ calibration of the eddy current sensor of the measured shaft is realized, and the calibration sensitivity coefficient error caused by the material and the cambered surface of the measured shaft is reduced. The lateral effect of the sensor can be calibrated. The device has simple structure, is very convenient to mount and dismount, saves the maintenance time and labor cost, and greatly improves the working efficiency.
Drawings
FIG. 1 is a schematic structural diagram of an in-situ calibration apparatus for an eddy current displacement sensor according to the present invention;
FIG. 2 is a schematic structural view of an X-Y bidirectional precision sliding table with an X-Y direction digital display micrometer according to the present invention;
FIG. 3 is a schematic view of a V-shaped magnetic watch base according to the present invention;
fig. 4 is a schematic structural view of a sensor holder of the present invention.
Detailed Description
The invention is described in further detail below with reference to the following figures and detailed description:
as shown in fig. 1-4, the in-situ calibration device for the eddy current displacement sensor comprises a V-shaped magnetic gauge stand 6, an X-Y bidirectional precision sliding table 4 with an X-Y direction digital display micrometer 8, an eddy current displacement sensor 2, an iron connecting flat plate 5 and a sensor support 1; the iron connecting flat plate 5 is fixed on the lower surface of the X-Y bidirectional precise sliding table 4, the sensor support 1 is fixed on the upper surface of the X-Y bidirectional precise sliding table 4, the eddy current displacement sensor 2 which is horizontally arranged is fixed on the sensor support 1, the V-shaped magnetic gauge stand 6 is fixed with the measured shaft 7 through external magnetic attraction, the X-Y bidirectional precise sliding table 4 is adsorbed on the V-shaped magnetic gauge stand 6 through the iron connecting flat plate 5, and the in-situ transverse and longitudinal calibration of the eddy current displacement sensor 2 is carried out through the left-right movement of the X-Y bidirectional precise sliding table 4.
The sensor support 1 is an L-shaped flat sheet, a vertical slender adjusting hole 9 is formed in the vertical edge, and the eddy current displacement sensor 2 penetrates through the vertical slender adjusting hole 9 and is fixed through the pair of nuts 3; and a slender positioning hole 10 is formed on the horizontal edge and used for adjusting the fixing position of the sensor bracket 1 on the upper surface of the X-Y bidirectional precision sliding table 4.
The number of the sensor supports 4 and the number of the eddy current displacement sensors 6 are 2.
Specifically, the side surface of a V-shaped magnetic gauge stand 1 is adsorbed on a measured shaft, an iron connecting flat plate 2 is adsorbed on the side surface, an aluminum alloy X-Y bidirectional precise sliding table 3 is fixed on the iron connecting flat plate 3, each L-shaped sensor support is provided with a mounting hole, the aluminum alloy X-Y bidirectional precise sliding table and the L-shaped sensor support 5 form a tightly combined whole with screws in the mounting holes through screwing holes, the vertical slender adjusting holes 9 of the 2L-shaped sensor supports are respectively 12mm and 8mm wide, and the eddy current displacement sensor penetrates through the through holes of the L-shaped sensor support 5 and then screws two side locking nuts 6 tightly.
The invention relates to an in-situ calibration device of an eddy current displacement sensor, which is connected with a measured shaft in an externally hung magnetic attraction way, and the specific implementation method comprises the following steps:
1. an eddy current displacement sensor of an appropriate size is selected according to the diameter of the shaft to be measured and mounted to the L-shaped sensor holder 5, and the lock nut 6 is tightened.
2. And opening a switch of the V-shaped magnetic meter seat 1, and closing the switch after the V-shaped surface is adsorbed on the surface of the shaft and fastened.
And 3, magnetically adsorbing iron on the upper surface of the V-shaped magnetic gauge stand 1 to connect the flat plate 2, adjusting the displacement of the simulation shaft of the digital display micrometer in the X direction by adjusting the X direction of the X-Y bidirectional precise sliding table 3, directly reading the displacement number on the micrometer, and calibrating the voltage value corresponding to the eddy current sensor.
4. And after the previous step is finished, the displacement of the simulation shaft of the digital display micrometer in the Y direction is adjusted in the Y direction, the displacement number is directly read out from the micrometer, and the calibration is carried out corresponding to the voltage value of the eddy current sensor.
5. And after the calibration is finished, opening the V-shaped magnetic gauge stand 1, removing the calibration device, and finishing the calibration.
The following explanation is made in conjunction with specific engineering examples:
the diameter of a measured shaft of a certain project is 300 mm:
1. an eddy current displacement sensor with the diameter of 11mm is selected to be installed on a through hole with the diameter of 12mm of an L-shaped sensor support, and two side locking nuts are screwed.
2. And adsorbing the V-shaped magnetic gauge stand to the surface of the measured shaft and adsorbing the iron connecting flat plate to the upper surface of the V-shaped magnetic gauge stand.
3. Adjusting an X-direction adjusting digital display micrometer of the X-Y bidirectional precision sliding table to increase or decrease the distance between the sliding table and the measured shaft along the X direction until the distance exceeds the measuring range of the eddy current displacement sensor, and recording the adjusting distance and the acquired voltage value each time; and repeating the movement measurement of the eddy current displacement sensor along the Y direction of the sliding table.
4. And after the calibration is finished, removing the calibration device, and analyzing the calibration data to obtain the sensitivity coefficient of the eddy current displacement sensor.
Aiming at the same eddy current displacement sensor, the sensitivity coefficient of the sensor calibrated by adopting the traditional displacement static calibration platform is 1.068, and the sensitivity coefficient of the sensor calibrated on site by adopting the in-situ calibration device is 1.113.
The actual measurement data show that: the sensor calibration sensitivity obtained by the calibration of the device and the traditional calibration is relatively low, the calibration value of the method is more accurate and reliable, the error is lower, and the method has engineering practicability. The sensitivity coefficient of the eddy current displacement sensor calibrated by the calibration device is used for monitoring the shaft throw vibration of the engineering unit and can reflect the actual unit running state better.
The method has high calibration precision, and reduces the error of the sensitivity coefficient of the eddy current displacement sensor caused by different materials and cambered surfaces of the measured shaft by adopting in-situ calibration; the device is environment-friendly in material selection, simple in structure and convenient to install, the surface of the measured shaft is magnetically adsorbed by adopting the lossless external hanging magnet, the shaft cannot be damaged, the device is convenient to disassemble after calibration, the maintenance time and the labor cost are greatly reduced, and the working efficiency is greatly improved.
The above-mentioned embodiments are only for illustrating the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to carry out the same, and the present invention shall not be limited to the embodiments, i.e. the equivalent changes or modifications made within the spirit of the present invention shall fall within the scope of the present invention.
Claims (3)
1. An in-situ calibration device for an eddy current displacement sensor is characterized by comprising a V-shaped magnetic gauge stand (6), an X-Y bidirectional precise sliding table (4) with an X-Y direction digital display micrometer (8), the eddy current displacement sensor (2), an iron connecting flat plate (5) and a sensor support (1); the iron connecting flat plate (5) is fixed on the lower surface of the X-Y bidirectional precise sliding table (4), the sensor support (1) is fixed on the upper surface of the X-Y bidirectional precise sliding table (4), the eddy current displacement sensor (2) horizontally arranged is fixed on the sensor support (1), the V-shaped magnetic gauge stand (6) is fixed with the measured shaft (7) through an external magnetic attraction, the X-Y bidirectional precise sliding table (4) is adsorbed to the V-shaped magnetic gauge stand (6) through the iron connecting flat plate (5), and the in-situ transverse and longitudinal calibration of the eddy current displacement sensor (2) is carried out through left-right movement of the X-Y bidirectional precise sliding table (4).
2. The in-situ calibration device for the eddy current displacement sensor according to claim 1, wherein the sensor bracket (1) is an L-shaped flat sheet, vertical elongated adjusting holes (9) are formed in the vertical edge, and the eddy current displacement sensor (2) passes through the vertical elongated adjusting holes (9) and is fixed through a pair of nuts (3); and a slender positioning hole (10) is formed on the horizontal edge and is used for adjusting the fixed position of the sensor bracket (1) on the upper surface of the X-Y bidirectional precision sliding table (4).
3. The in-situ calibration device for the eddy current displacement sensor according to claim 1, wherein the number of the sensor support (4) and the number of the eddy current displacement sensor (6) are 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911374476.0A CN111043944A (en) | 2019-12-27 | 2019-12-27 | In-situ calibration device for eddy current displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911374476.0A CN111043944A (en) | 2019-12-27 | 2019-12-27 | In-situ calibration device for eddy current displacement sensor |
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| CN111043944A true CN111043944A (en) | 2020-04-21 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113251909A (en) * | 2021-06-25 | 2021-08-13 | 清华大学 | Calibration device and method of eddy current sensor for measuring displacement of rotating shaft |
| CN114485759A (en) * | 2022-01-25 | 2022-05-13 | 北京航空航天大学宁波创新研究院 | Sensor calibration device and calibration method thereof |
| CN114838650A (en) * | 2022-03-28 | 2022-08-02 | 北京航天控制仪器研究所 | Displacement sensor calibration device and method based on rotary table |
| CN117664208A (en) * | 2024-01-31 | 2024-03-08 | 西安热工研究院有限公司 | Testing device and testing method |
-
2019
- 2019-12-27 CN CN201911374476.0A patent/CN111043944A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113251909A (en) * | 2021-06-25 | 2021-08-13 | 清华大学 | Calibration device and method of eddy current sensor for measuring displacement of rotating shaft |
| CN114485759A (en) * | 2022-01-25 | 2022-05-13 | 北京航空航天大学宁波创新研究院 | Sensor calibration device and calibration method thereof |
| CN114485759B (en) * | 2022-01-25 | 2024-03-01 | 北京航空航天大学宁波创新研究院 | Sensor calibration device and calibration method thereof |
| CN114838650A (en) * | 2022-03-28 | 2022-08-02 | 北京航天控制仪器研究所 | Displacement sensor calibration device and method based on rotary table |
| CN114838650B (en) * | 2022-03-28 | 2024-04-09 | 北京航天控制仪器研究所 | Displacement sensor calibration device and method based on turntable |
| CN117664208A (en) * | 2024-01-31 | 2024-03-08 | 西安热工研究院有限公司 | Testing device and testing method |
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