CN114835114A - Graphite component purification furnace - Google Patents
Graphite component purification furnace Download PDFInfo
- Publication number
- CN114835114A CN114835114A CN202210358269.1A CN202210358269A CN114835114A CN 114835114 A CN114835114 A CN 114835114A CN 202210358269 A CN202210358269 A CN 202210358269A CN 114835114 A CN114835114 A CN 114835114A
- Authority
- CN
- China
- Prior art keywords
- furnace body
- furnace
- graphite
- purifying
- retainer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 52
- 239000010439 graphite Substances 0.000 title claims abstract description 52
- 238000000746 purification Methods 0.000 title claims description 18
- 239000007789 gas Substances 0.000 claims abstract description 25
- 238000009413 insulation Methods 0.000 claims abstract description 15
- 239000012495 reaction gas Substances 0.000 claims abstract description 13
- 238000005260 corrosion Methods 0.000 claims abstract description 7
- 230000007797 corrosion Effects 0.000 claims abstract description 7
- 230000000903 blocking effect Effects 0.000 claims abstract description 4
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000004321 preservation Methods 0.000 description 6
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000003837 high-temperature calcination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/21—After-treatment
- C01B32/215—Purification; Recovery or purification of graphite formed in iron making, e.g. kish graphite
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention provides a graphite component purifying furnace structure, which is used for purifying graphite components, and comprises: the furnace body, the retainer and the heat insulation sleeve; a cavity for accommodating the graphite component is arranged in the furnace body, and an air inlet pipeline for reaction gas to enter, an exhaust pipeline for gas to exhaust and an electrode for providing reaction conditions are arranged in the furnace body in a penetrating manner; the holder is fixedly arranged in the furnace body, and an air inlet pipeline, an air exhaust pipeline and an electrode are respectively fixed on the peripheral surface of the holder; the heat insulation sleeve is fixedly arranged between the furnace body and the retainer, and the furnace body, the heat insulation sleeve and the retainer are coaxial; wherein, after the furnace body is sealed, a closed space for blocking the reaction gas from leaking is formed in the heat-insulating sleeve, thereby enhancing the corrosion resistance in the furnace body. The invention isolates the contact of reaction gas and the inner wall of the furnace body through the heat insulation sleeve, thereby improving the corrosion resistance of the graphite component purifying furnace.
Description
Technical Field
The invention relates to the technical field of graphite component purification, in particular to a graphite component purification furnace.
Background
During the production process of the graphite parts, various metal elements such as boron, phosphorus, arsenic and the like are inevitably mixed on the surfaces and the inside of the graphite parts, and the impurity elements can influence the use of the graphite parts in production. At present, the graphite component is often purified by a high-temperature calcination method. However, the conventional apparatus is easily corroded during the purification of the graphite parts by the high-temperature calcination method.
Disclosure of Invention
In order to solve the problem that the prior equipment in the background art is easy to corrode in the process of purifying the graphite component by adopting a high-temperature calcination method, the invention adopts the following technical scheme:
a graphite component purifying furnace for purifying a graphite component, comprising: the furnace comprises a furnace body, a retainer and a heat-insulating sleeve;
a cavity for accommodating the graphite component is arranged in the furnace body, and an air inlet pipeline for reaction gas to enter, an exhaust pipeline for gas to exhaust and an electrode for providing reaction conditions are arranged in the furnace body in a penetrating manner;
the holder is fixedly arranged in the furnace body, and the gas inlet pipeline, the gas exhaust pipeline and the electrode are respectively fixed on the peripheral surface of the holder;
the heat insulation sleeve is fixedly arranged between the furnace body and the retainer, and the furnace body, the heat insulation sleeve and the retainer are coaxial;
when the furnace body is closed, a closed space for blocking the leakage of reaction gas is formed in the heat-insulating sleeve, so that the corrosion resistance in the furnace body is enhanced.
The furnace body is internally provided with two opposite sections of rails, one surface of each section of rail is horizontal and bears the heat insulation sleeve, and the other surface of each section of rail is fixedly connected with the inner wall of the furnace body.
Furthermore, a plurality of mounting columns which extend along the axial direction of the furnace body and are uniformly distributed are arranged between the two sections of rails.
Further, the heat preservation sleeve is a cylindrical body made of graphite carbon felt.
Further, the retainer is a steel frame made of carbon-carbon composite materials and nickel-based alloys.
Further, still be equipped with in the furnace body and put the thing platform, put the one side of thing platform and be used for bearing the graphite part, the another side installation of putting the thing platform is fixed to be located on the erection column.
Further, put the thing platform and include the multilayer tray, adjacent two-layer connect through many spinal branchs post between the tray.
Further, each air inlet pipeline and each air outlet pipeline are graphite sleeves.
Has the advantages that: the invention isolates the contact of reaction gas and the inner wall of the furnace body through the heat insulation sleeve, thereby improving the corrosion resistance of the graphite component purifying furnace.
Drawings
Fig. 1 is a schematic structural view of a graphite parts purifying furnace according to an embodiment of the present invention, in which the shutter is omitted.
Fig. 2 is a schematic structural view of a furnace body according to an embodiment of the present invention, wherein a retainer, a heat insulating sleeve and a gate are omitted.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the patent and to simplify the description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be constructed in a particular manner of operation, and are not to be considered limiting of the patent.
Fig. 1 is a schematic structural view of a graphite parts purifying furnace according to an embodiment of the present invention, in which the shutter is omitted.
Referring to fig. 1, the entire graphite component purifying furnace is provided in a production plant of the graphite component 1, and the graphite component purifying furnace includes: furnace body 2, holder 3, insulation cover 4. Wherein, whole furnace body 2 is wholly cylindricly, is equipped with the cavity in the furnace body 2, and the one end of furnace body 2 is sealed, and the other end of furnace body 2 is equipped with the gate that can open and shut. The interior of the furnace body 2 is communicated with a plurality of air inlet pipelines 21 and exhaust pipelines 22, and an electrode 23 is arranged in the furnace body 2. The holder 3 is provided in the furnace body 2, and a plurality of intake ducts 21, exhaust ducts 22, and electrodes 23 are fixed to the shaft body of the holder 3. The thermal insulation sleeve 4 is flexible, and a plurality of air inlet pipelines 21, exhaust pipelines 22 and electrodes 23 penetrate through the whole body. The heat preservation cover 4 is arranged in the furnace body 2, the heat preservation cover 4 is arranged between the furnace body 2 and the heat preservation cover 4, one end of the heat preservation cover 4 is abutted to the closed end of the furnace body 2, and the other end of the heat preservation cover 4 is abutted to the gate. The retainer 3 is arranged in the furnace body 2, and the retainer 3, the heat insulation sleeve 4 and the furnace body 2 are coaxial. The furnace body 2 is internally provided with two opposite end rails 6, one surface of each section of rail 6 is horizontal and is connected with the heat insulation sleeve 4, and the other surface of each section of rail 6 is connected with the inside of the furnace body 2.
In the purification process of the graphite component 1, the gas inlet pipeline 21, the gas outlet pipeline 22 and the electrode 23 are always positioned in the heat insulation sleeve 4, and after the gate is closed, the furnace body 2 is closed, so that a closed space for blocking the leakage of the reaction gas is formed in the heat insulation sleeve 4.
Fig. 2 is a schematic structural view of a furnace body according to an embodiment of the present invention, in which a holder, a jacket, and a gate are omitted.
Specifically, referring to fig. 1 and 2 together, in the present embodiment, there are two gas inlet pipes 21, one end of the first gas inlet pipe 211 is communicated with the reaction gas storage device, and the other end of the first gas inlet pipe 211 is fixed to the shaft body of the holder 3; one end of the second air inlet pipe 212 is communicated with the protective gas storage device, and the other end of the second air inlet pipe 212 is fixed on the shaft body at one side of the retainer 3. The electrodes 23 are arranged on the inner wall of the furnace body 2 in pairs, one end of each electrode 23 is communicated with an external power supply, and the other end of each electrode 23 is fixed on the shaft body of the retainer 3. One end of the exhaust pipe 22 is connected to a vacuum device, and the other end of the exhaust pipe 22 extends into the inner wall of the furnace body 2 of the graphite component purification furnace. Among them, a first intake duct 211, a second intake duct 212, an electrode 23, and an exhaust duct 22.
Before the graphite member 1 is purified, the second gas inlet pipe 212 is opened, the gate is closed, the exhaust pipe 22 is opened, and the protective gas storage device continues to supply the protective gas into the graphite member purifying furnace and discharge the impurity gas inside the graphite member purifying furnace.
Specifically, the graphite component 1 further includes a stage 5 for carrying the graphite component 1. And mounting columns 24 which are uniformly distributed along the extension direction of the furnace body 2 are arranged between the two sections of rails 6 in the furnace body 2, and the object placing table 5 is fixedly arranged on the mounting columns 24. A plurality of layers of trays 51 are arranged in the object placing table 5, and the adjacent two layers of trays 51 are connected through a plurality of supporting columns 52.
Specifically, in this embodiment, the object placing table 5 includes two layers of trays 51, and each mounting post 24 is provided with a through hole. The tray 51 close to the rail 6 is a lower tray 511, and the tray 51 far from the rail 6 is an upper tray 512. The opposite two surfaces of the lower tray 511 are provided with a plurality of mounting openings 53, one surface of the lower tray 511 bears the graphite component 1, and the mounting openings 53 on the other surface of the lower tray 511 are connected with the through holes of the mounting columns 24 through the supporting columns 52. One surface of the upper tray 512 carries the graphite member 1, and the other surface of the upper tray 512 is provided with a plurality of mounting openings 53. The lower tray 511 and the upper tray 512 are connected by the supporting columns 53 to the respective mounting holes 53 on the opposite surfaces thereof, so that the upper tray 512 is fixed to the lower tray 511. In other embodiments, the number of the trays 51 in the object placing table 5 may be three, four or more, specifically, the number of the trays is matched with the size of the graphite component purifying furnace.
Preferably, the inner wall of the furnace body 2 is subjected to corrosion resistance treatment, the inner wall of the furnace body 2 is coated with a nickel alloy protective layer, the heat-insulating sleeve 4 is a cylindrical body made of graphite carbon felt, and the retainer 3 is a steel frame made of a carbon-carbon composite material and a nickel-based alloy. The first air inlet pipe 211, the second air inlet pipe 212 and the exhaust pipe 22 are all graphite sleeves, and the electrode 23 selected in the graphite component purification furnace is a graphite electrode.
In this embodiment, the reaction gas is chlorine and the shielding gas is nitrogen. Before the purification of the graphite parts 1 is performed, the second gas inlet pipe 212 fills a large amount of nitrogen gas into the graphite parts purification furnace, and after a while, the exhaust pipe 22 is opened, and the vacuum machine extracts the gas in the graphite parts purification furnace from the exhaust pipe 22. When the gas detector arranged outside the exhaust pipeline 22 detects that the discharged gas is nitrogen, the second gas inlet pipeline 212 is firstly closed, after the air pressure in the graphite component purification furnace is stabilized to a set threshold value, the exhaust pipeline 22 is closed, and then the electrode 23 is started to heat the interior of the graphite component purification furnace.
After the temperature in the graphite component purification furnace is raised to 600 ℃, the temperature in the graphite component purification furnace is stabilized, the first gas inlet pipeline 211 is opened, and the reaction gas storage device fills chlorine gas into the graphite component purification furnace. The metal impurities such as P (phosphorus) and B (boron) in the graphite member 1 are oxidized with chlorine gas in the graphite member cleaning furnace to form chlorides. After chlorine gas is introduced for a certain time, the power supply is firstly turned off, the electrode 23 is powered off, the first air inlet pipeline 211 is then closed, the exhaust pipeline 22 and the second air inlet pipeline 212 are finally opened, nitrogen gas is filled into the graphite component purifying furnace, and residual chlorine gas after the graphite component 1 in the graphite component purifying furnace is purified and impurity gas generated in the purifying process are discharged through nitrogen gas replacement. After a gas detector arranged outside the exhaust pipeline 22 detects that the exhaust gas does not contain chlorine, the exhaust pipeline 22 is closed, and thus the purification of the graphite component 1 is completed.
In conclusion, the contact between the reaction gas and the inner wall of the furnace body is isolated through the heat-insulating sleeve, so that the corrosion resistance of the graphite component purifying furnace is improved. Furthermore, the design of the multilayer placing table enables the space in the furnace to be further utilized, and a plurality of graphite parts can be purified at one time.
The foregoing description has described certain embodiments of this invention. Other embodiments are within the scope of the following claims.
The terms "exemplary," "example," and the like, as used throughout this specification mean "serving as an example, instance, or illustration," and do not mean "preferred" or "advantageous" over other embodiments. The detailed description includes specific details for the purpose of providing an understanding of the described technology. However, the techniques may be practiced without these specific details. In some instances, well-known structures and devices are shown in block diagram form in order to avoid obscuring the concepts of the described embodiments.
Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, the embodiments of the present invention are not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solutions of the embodiments of the present invention within the technical idea of the embodiments of the present invention, and these simple modifications all belong to the protection scope of the embodiments of the present invention.
The previous description of the specification is provided to enable any person skilled in the art to make or use the specification. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the scope of the disclosure. Thus, the description is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. A graphite member purifying furnace for purifying a graphite member (1), characterized by comprising: the furnace body (2), the retainer (3) and the heat-insulating sleeve (4);
a cavity for accommodating the graphite component (1) is arranged in the furnace body (2), and an air inlet pipeline (21) for reaction gas to enter, an exhaust pipeline (22) for gas to exhaust and an electrode (23) for providing reaction conditions are arranged in the furnace body (2) in a penetrating manner;
the holder (3) is fixedly arranged in the furnace body (2), and the circumferential surface of the holder (3) is respectively fixed with the air inlet pipeline (21), the air outlet pipeline (22) and the electrode (23);
The heat-insulating sleeve (4) is fixedly arranged between the furnace body (2) and the retainer (3), and the furnace body (2), the heat-insulating sleeve (4) and the retainer (3) are coaxial;
when the furnace body (2) is closed, a closed space for blocking the leakage of reaction gas is formed in the heat-insulating sleeve (4), so that the corrosion resistance in the furnace body (2) is enhanced.
2. The graphite parts purifying furnace as described in claim 1, wherein two opposite sections of rails (6) are provided in the furnace body (2), one side of each section of the rails (6) is horizontal and receives the thermal insulation sleeve (4), and the other side of each section of the rails (6) is fixedly connected with the inner wall of the furnace body (2).
3. The graphite parts cleaning furnace as defined in claim 2, wherein a plurality of mounting posts (24) are provided between two sections of said rails and extend axially along said furnace body (2) and are arranged uniformly.
4. The graphite parts purifying furnace as described in claim 3, wherein said insulating jacket (4) is a cylindrical body made of graphite carbon felt.
5. The graphite parts cleaning furnace as defined in claim 3, wherein said holder (3) is a steel frame made of carbon-carbon composite and nickel-based alloy.
6. The graphite component purification furnace as recited in claim 3, wherein a placement table (5) is further disposed in the furnace body (2), one surface of the placement table (5) is used for bearing the graphite component (1), and the other surface of the placement table (5) is fixedly mounted on the mounting post (24).
7. The graphite parts purifying furnace as described in claim 6, wherein said rack (5) comprises a plurality of layers of trays (51), and two adjacent layers of said trays (51) are connected by a plurality of support columns (52).
8. The graphite parts purifying furnace as recited in any one of claims 1 to 7, wherein each of said air intake duct (21) and each of said air exhaust duct (22) is a graphite sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210358269.1A CN114835114A (en) | 2022-04-06 | 2022-04-06 | Graphite component purification furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210358269.1A CN114835114A (en) | 2022-04-06 | 2022-04-06 | Graphite component purification furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114835114A true CN114835114A (en) | 2022-08-02 |
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ID=82564823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210358269.1A Pending CN114835114A (en) | 2022-04-06 | 2022-04-06 | Graphite component purification furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114835114A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115709997A (en) * | 2022-10-25 | 2023-02-24 | 青海黄河上游水电开发有限责任公司新能源分公司 | Purification method of graphite component for producing electronic-grade polycrystalline silicon |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1049428A (en) * | 1989-08-11 | 1991-02-20 | 马渊马达株式会社 | The metal-filled graphite brush of miniature motor and manufacture method thereof |
| CN101125642A (en) * | 2007-08-31 | 2008-02-20 | 侯仁义 | Synthesis device for high-pure hydrogen sulfide and preparation method thereof |
| CN104030289A (en) * | 2013-03-04 | 2014-09-10 | 青海黄河上游水电开发有限责任公司新能源分公司 | Graphite part purifying device |
| CN112254534A (en) * | 2020-10-19 | 2021-01-22 | 昇力恒(宁夏)真空科技股份公司 | Graphite box for high-temperature vacuum sintering furnace |
-
2022
- 2022-04-06 CN CN202210358269.1A patent/CN114835114A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1049428A (en) * | 1989-08-11 | 1991-02-20 | 马渊马达株式会社 | The metal-filled graphite brush of miniature motor and manufacture method thereof |
| CN101125642A (en) * | 2007-08-31 | 2008-02-20 | 侯仁义 | Synthesis device for high-pure hydrogen sulfide and preparation method thereof |
| CN104030289A (en) * | 2013-03-04 | 2014-09-10 | 青海黄河上游水电开发有限责任公司新能源分公司 | Graphite part purifying device |
| CN112254534A (en) * | 2020-10-19 | 2021-01-22 | 昇力恒(宁夏)真空科技股份公司 | Graphite box for high-temperature vacuum sintering furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115709997A (en) * | 2022-10-25 | 2023-02-24 | 青海黄河上游水电开发有限责任公司新能源分公司 | Purification method of graphite component for producing electronic-grade polycrystalline silicon |
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