CN114830017A - 一种可调光学滤波器件 - Google Patents

一种可调光学滤波器件 Download PDF

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Publication number
CN114830017A
CN114830017A CN201980102489.4A CN201980102489A CN114830017A CN 114830017 A CN114830017 A CN 114830017A CN 201980102489 A CN201980102489 A CN 201980102489A CN 114830017 A CN114830017 A CN 114830017A
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CN
China
Prior art keywords
filter device
optical filter
thin film
substrate
tunable optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980102489.4A
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English (en)
Inventor
郭斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Haippi Nanooptical Technology Co ltd
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Shenzhen Haippi Nanooptical Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shenzhen Haippi Nanooptical Technology Co ltd filed Critical Shenzhen Haippi Nanooptical Technology Co ltd
Publication of CN114830017A publication Critical patent/CN114830017A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/218—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference using semi-conducting materials
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/34—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector
    • G02F2201/346—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector distributed (Bragg) reflector
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/05—Function characteristic wavelength dependent
    • G02F2203/055—Function characteristic wavelength dependent wavelength filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/52—Optical limiters

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

一种可调光学滤波器件，器件包括设置有第一反射结构(106)的第一衬底(101)和设置有第二反射结构(107)的薄膜(103)，第一衬底(101)和薄膜(103)具有反射结构的表面的***通过键合物(102)相互键合以在反射结构之间形成腔体，薄膜(103)在腔体一侧的表面设置有压电薄膜结构(108)。可调光学滤波器件，可避免由电容驱动导致的吸合效应，从而提高薄膜(103)的可动范围，使法伯腔的光谱可调范围相应扩大，并可将其应用于尺寸受限的器件上，如微型光谱仪、小型甚至迷你高光谱相机或手机上。

Description

PCT国内申请，说明书已公开。

Claims (16)

  1. PCT国内申请，权利要求书已公开。
CN201980102489.4A 2019-09-25 2019-09-25 一种可调光学滤波器件 Pending CN114830017A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2019/107890 WO2021056273A1 (zh) 2019-09-25 2019-09-25 一种可调光学滤波器件

Publications (1)

Publication Number Publication Date
CN114830017A true CN114830017A (zh) 2022-07-29

Family

ID=75165008

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980102489.4A Pending CN114830017A (zh) 2019-09-25 2019-09-25 一种可调光学滤波器件

Country Status (4)

Country Link
US (1) US20230341743A1 (zh)
EP (1) EP4071546A4 (zh)
CN (1) CN114830017A (zh)
WO (1) WO2021056273A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116088080B (zh) * 2023-04-07 2023-06-09 欧梯恩智能科技(苏州)有限公司 光强调制芯片及其制造方法、光学传感器与定位***

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1279386C (zh) * 2003-05-26 2006-10-11 中国科学院上海微***与信息技术研究所 压电驱动法布里－珀罗腔可调光学滤波器件及制作方法
US7911623B2 (en) * 2007-08-07 2011-03-22 Xerox Corporation Fabry-Perot piezoelectric tunable filter
IL201742A0 (en) * 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter
CN101806961A (zh) * 2010-02-08 2010-08-18 浙江大学 一种制备中空透射型法布里-珀罗腔滤波器的方法
CN101895269B (zh) * 2010-07-30 2012-09-05 中国科学院声学研究所 一种压电薄膜体声波谐振器的制备方法
US9331666B2 (en) * 2012-10-22 2016-05-03 Qualcomm Mems Technologies, Inc. Composite dilation mode resonators
CN103413795B (zh) * 2013-08-28 2016-12-28 天津大学 半导体器件的封装结构和半导体器件的封装工艺流程
CN109786270B (zh) * 2018-12-10 2020-05-12 贵州中科汉天下微电子有限公司 一种封装器件及其制造方法

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Publication number Publication date
WO2021056273A1 (zh) 2021-04-01
EP4071546A1 (en) 2022-10-12
US20230341743A1 (en) 2023-10-26
EP4071546A4 (en) 2023-08-30

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Address after: Room 1903, 1904, Building 1, COFCO Chuangxin R&D Center, District 69, Xingdong Community, Xin'an Street, Bao'an District, Shenzhen, Guangdong 518100

Applicant after: SHENZHEN HAIPPI NANOOPTICAL TECHNOLOGY Co.,Ltd.

Address before: 518000 Nanshan District, Shenzhen City, Guangdong Province, Guangdong Province, Yuehai Street High-tech Zone Community, No. 6 Sandao, Yuexing, Nanda Industry, Education and Research Building 3A

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