CN114830017A - 一种可调光学滤波器件 - Google Patents
一种可调光学滤波器件 Download PDFInfo
- Publication number
- CN114830017A CN114830017A CN201980102489.4A CN201980102489A CN114830017A CN 114830017 A CN114830017 A CN 114830017A CN 201980102489 A CN201980102489 A CN 201980102489A CN 114830017 A CN114830017 A CN 114830017A
- Authority
- CN
- China
- Prior art keywords
- filter device
- optical filter
- thin film
- substrate
- tunable optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/218—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference using semi-conducting materials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/34—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector
- G02F2201/346—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector distributed (Bragg) reflector
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/05—Function characteristic wavelength dependent
- G02F2203/055—Function characteristic wavelength dependent wavelength filtering
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/52—Optical limiters
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
一种可调光学滤波器件,器件包括设置有第一反射结构(106)的第一衬底(101)和设置有第二反射结构(107)的薄膜(103),第一衬底(101)和薄膜(103)具有反射结构的表面的***通过键合物(102)相互键合以在反射结构之间形成腔体,薄膜(103)在腔体一侧的表面设置有压电薄膜结构(108)。可调光学滤波器件,可避免由电容驱动导致的吸合效应,从而提高薄膜(103)的可动范围,使法伯腔的光谱可调范围相应扩大,并可将其应用于尺寸受限的器件上,如微型光谱仪、小型甚至迷你高光谱相机或手机上。
Description
PCT国内申请,说明书已公开。
Claims (16)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2019/107890 WO2021056273A1 (zh) | 2019-09-25 | 2019-09-25 | 一种可调光学滤波器件 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114830017A true CN114830017A (zh) | 2022-07-29 |
Family
ID=75165008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201980102489.4A Pending CN114830017A (zh) | 2019-09-25 | 2019-09-25 | 一种可调光学滤波器件 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20230341743A1 (zh) |
EP (1) | EP4071546A4 (zh) |
CN (1) | CN114830017A (zh) |
WO (1) | WO2021056273A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116088080B (zh) * | 2023-04-07 | 2023-06-09 | 欧梯恩智能科技(苏州)有限公司 | 光强调制芯片及其制造方法、光学传感器与定位*** |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1279386C (zh) * | 2003-05-26 | 2006-10-11 | 中国科学院上海微***与信息技术研究所 | 压电驱动法布里-珀罗腔可调光学滤波器件及制作方法 |
US7911623B2 (en) * | 2007-08-07 | 2011-03-22 | Xerox Corporation | Fabry-Perot piezoelectric tunable filter |
IL201742A0 (en) * | 2009-10-25 | 2010-06-16 | Elbit Sys Electro Optics Elop | Tunable spectral filter |
CN101806961A (zh) * | 2010-02-08 | 2010-08-18 | 浙江大学 | 一种制备中空透射型法布里-珀罗腔滤波器的方法 |
CN101895269B (zh) * | 2010-07-30 | 2012-09-05 | 中国科学院声学研究所 | 一种压电薄膜体声波谐振器的制备方法 |
US9331666B2 (en) * | 2012-10-22 | 2016-05-03 | Qualcomm Mems Technologies, Inc. | Composite dilation mode resonators |
CN103413795B (zh) * | 2013-08-28 | 2016-12-28 | 天津大学 | 半导体器件的封装结构和半导体器件的封装工艺流程 |
CN109786270B (zh) * | 2018-12-10 | 2020-05-12 | 贵州中科汉天下微电子有限公司 | 一种封装器件及其制造方法 |
-
2019
- 2019-09-25 US US17/779,669 patent/US20230341743A1/en active Pending
- 2019-09-25 WO PCT/CN2019/107890 patent/WO2021056273A1/zh unknown
- 2019-09-25 EP EP19946256.5A patent/EP4071546A4/en active Pending
- 2019-09-25 CN CN201980102489.4A patent/CN114830017A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2021056273A1 (zh) | 2021-04-01 |
EP4071546A1 (en) | 2022-10-12 |
US20230341743A1 (en) | 2023-10-26 |
EP4071546A4 (en) | 2023-08-30 |
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PB01 | Publication | ||
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CB02 | Change of applicant information |
Address after: Room 1903, 1904, Building 1, COFCO Chuangxin R&D Center, District 69, Xingdong Community, Xin'an Street, Bao'an District, Shenzhen, Guangdong 518100 Applicant after: SHENZHEN HAIPPI NANOOPTICAL TECHNOLOGY Co.,Ltd. Address before: 518000 Nanshan District, Shenzhen City, Guangdong Province, Guangdong Province, Yuehai Street High-tech Zone Community, No. 6 Sandao, Yuexing, Nanda Industry, Education and Research Building 3A Applicant before: SHENZHEN HAIPPI NANOOPTICAL TECHNOLOGY Co.,Ltd. |
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