CN113260897A - 一种可调光学滤波器件 - Google Patents

一种可调光学滤波器件 Download PDF

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Publication number
CN113260897A
CN113260897A CN201980087770.5A CN201980087770A CN113260897A CN 113260897 A CN113260897 A CN 113260897A CN 201980087770 A CN201980087770 A CN 201980087770A CN 113260897 A CN113260897 A CN 113260897A
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China
Prior art keywords
piezoelectric actuator
transparent
optical filter
mirror surface
filter device
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CN201980087770.5A
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English (en)
Inventor
郭斌
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Shenzhen Haippi Nanooptical Technology Co ltd
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Shenzhen Haippi Nanooptical Technology Co ltd
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Publication of CN113260897A publication Critical patent/CN113260897A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

本申请的实施例公开了一种可调光学滤波器件，包括设置有第一镜面的透明固定衬底和设置有第二镜面的透明薄膜衬底，在透明固定衬底上位于第一镜面的外部周围设置有间隔层，在间隔层的远离透明固定衬底的一面设置有压电执行器，透明薄膜衬底架设在压电执行器上以在第一镜面与第二镜面之间形成腔体，从而使得压电执行器能够驱动第二镜面相对于第一镜面进行移动。通过压电执行器可以使透明薄膜衬底产生相对于透明固定衬底的位移，可以完全避免由电容驱动导致的本征效应和吸合效应，从而提高透明薄膜衬底的可动范围，扩大法布里‑珀罗腔的光谱可调范围。另外通过微加工工艺生产制造的可调滤光器件结构简单，工艺成熟，可实现批量化、微型化并降低成本。

Description

PCT国内申请，说明书已公开。

Claims (11)

  1. PCT国内申请，权利要求书已公开。
CN201980087770.5A 2019-10-25 2019-10-25 一种可调光学滤波器件 Pending CN113260897A (zh)

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PCT/CN2019/113254 WO2021077396A1 (zh) 2019-10-25 2019-10-25 一种可调光学滤波器件

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CN113260897A true CN113260897A (zh) 2021-08-13

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WO (1) WO2021077396A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4375628A1 (en) * 2022-11-25 2024-05-29 Murata Manufacturing Co., Ltd. Piezoelectric interferometer

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CN106932095A (zh) * 2016-12-23 2017-07-07 中国电子科技集团公司信息科学研究院 一种可调谐moems滤光片
WO2017171882A1 (en) * 2016-04-01 2017-10-05 Intel Corporation Piezoelectrically actuated mirrors for optical communications
US20190033500A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Package-integrated piezoelectric optical grating switch array
CN209131869U (zh) * 2018-09-10 2019-07-19 沈阳工业大学 一种联动膜电容式压力敏感芯片

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US6985235B2 (en) * 2001-08-30 2006-01-10 Micron Optics, Inc. Cascaded fiber fabry-perot filters
CN1279386C (zh) * 2003-05-26 2006-10-11 中国科学院上海微***与信息技术研究所 压电驱动法布里－珀罗腔可调光学滤波器件及制作方法
NO336140B1 (no) * 2009-09-18 2015-05-26 Sintef Aktuator for mikro optisk enhet
US10168214B2 (en) * 2015-05-15 2019-01-01 Trutag Technologies, Inc. Method of assembly and manufacturing of piezo actuated Fabry-Perot interferometer
CN107247331A (zh) * 2017-08-14 2017-10-13 太仓宏微电子科技有限公司 一种基于mems技术的法布里‑珀罗腔可调光滤波器

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1487333A (zh) * 2003-05-26 2004-04-07 华东师范大学 Mems电可调光衰减器芯片的制备方法
US7136215B1 (en) * 2005-05-18 2006-11-14 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Piezoelectrically-activated cantilevered spatial light modulator
US20090040616A1 (en) * 2007-08-07 2009-02-12 Xerox Corporation Fabry-perot piezoelectric tunable filter
CN103293660A (zh) * 2013-05-31 2013-09-11 华中科技大学 一种微型f-p腔可调谐滤波器及其制备方法
WO2017171882A1 (en) * 2016-04-01 2017-10-05 Intel Corporation Piezoelectrically actuated mirrors for optical communications
US20190033500A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Package-integrated piezoelectric optical grating switch array
CN106932095A (zh) * 2016-12-23 2017-07-07 中国电子科技集团公司信息科学研究院 一种可调谐moems滤光片
CN209131869U (zh) * 2018-09-10 2019-07-19 沈阳工业大学 一种联动膜电容式压力敏感芯片

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