CN114779504A

CN114779504A - Alignment platform device

Info

Publication number: CN114779504A
Application number: CN202210288512.7A
Authority: CN
Inventors: 鉏晨涛; 苏超民; 冯鑫杰; 杨宇超; 范振海; 蒋华江
Original assignee: Tdg Machinery Technology Co ltd
Current assignee: Tdg Machinery Technology Co ltd
Priority date: 2022-03-23
Filing date: 2022-03-23
Publication date: 2022-07-22

Abstract

The invention discloses an alignment platform device which comprises an X-axis driving mechanism, a Y-axis driving mechanism, a T-axis driving mechanism and a Z-axis driving mechanism. The sliding table of the X-axis driving mechanism is fixedly connected with the Y-axis driving mechanism and can drive the Y-axis driving mechanism to move along the X axis; and a Y-axis sliding seat of the Y-axis driving mechanism is connected with the T-axis driving mechanism and drives the T-axis driving mechanism to move along the Y axis. The T-axis driving mechanism comprises a Y-axis connecting plate, a Z-axis connecting plate, a power assembly, an adjusting assembly and a supporting assembly, wherein the power assembly, the adjusting assembly and the supporting assembly are arranged between the Y-axis connecting plate and the Z-axis connecting plate. The upper end of the adjusting component is rotatably connected with the Z-axis connecting plate, the lower end of the adjusting component is fixedly connected with the Y-axis connecting plate, the middle of the adjusting component is provided with an intermediate transition piece which can generate relative motion with the Y-axis connecting plate and the Z-axis connecting plate, and the moving end of the power component is connected with the intermediate transition piece and pushes the intermediate transition piece, so that the Z-axis connecting plate rotates around the supporting component. And connecting the Z-axis connecting plate with the sucker mounting plate and pushing the sucker mounting plate to lift.

Description

Alignment platform device

Technical Field

The invention relates to the technical field of semiconductor manufacturing equipment, in particular to an alignment platform device.

Background

Liquid crystal display module nation decides equipment is used for fixing a position and nation with chip and glass. In the positioning process, the liquid crystal display module bonding equipment needs to drive the glass to move in the X-axis direction, the Y-axis direction and the Z-axis direction and rotate around the T-axis.

The existing display screen module bonding equipment mostly adopts a servo motor to drive a hollow rotating platform and a harmonic speed reducer or a direct drive motor to directly drive to realize alignment of T-axis rotating angle of an alignment platform. But the hollow rotary platform or the harmonic speed reducer has the defects of complex structure, difficult maintenance, low repeated positioning precision and the like; the positioning accuracy of the direct drive motor depends on the resolution of the encoder, the control mode is complex, the price is high, the shelf life is long, the direct drive motor can rapidly reciprocate for a long time, the bearing is easy to damage, and the later maintenance cost of the device is high. And the existing T-axis driving mode is mostly applied to small and medium-sized alignment platforms, and aiming at large-sized alignment platforms, the expandable range of the T-axis is small, and the defects of poor mechanism stability, low rigidity, high cost, high maintenance cost and the like exist.

Therefore, how to provide a technical solution capable of solving the above problems is a technical problem urgently needed to be solved by those skilled in the art.

Disclosure of Invention

The invention aims to provide an alignment platform device, wherein a power assembly horizontally pushes an intermediate transition piece to move, so that the intermediate transition piece drives a Z shaft connecting plate to rotate around a supporting assembly, the structure of the alignment platform device is simplified, and the stability and the rigidity of the alignment platform device are improved.

In order to achieve the above object, the present invention provides an aligning platform device, including:

the X-axis driving mechanism comprises a base plate and a sliding table, the sliding table is connected with the rotor, and a stator used for driving the rotor to move along an X axis is arranged in the base plate;

the Y-axis driving mechanism comprises a connecting seat fixedly connected with the sliding table and a Y-axis sliding seat connected with the connecting seat, and the connecting seat can drive the Y-axis sliding seat to move along a Y axis;

the T-axis driving mechanism comprises a Y-axis connecting plate and a Z-axis connecting plate, the Y-axis connecting plate is connected with the Y-axis sliding table, a power assembly, an adjusting assembly and a supporting assembly are arranged between the Y-axis connecting plate and the Z-axis connecting plate, the upper end of the adjusting assembly is rotatably connected with the Z-axis connecting plate, the lower end of the adjusting assembly is fixedly connected with the Y-axis connecting plate, a middle transition piece capable of producing relative motion with the Y-axis connecting plate and the Z-axis connecting plate is arranged in the middle of the adjusting assembly, and the moving end of the power assembly is connected with the middle transition piece to push the Z-axis connecting plate to rotate around the supporting assembly;

z axle actuating mechanism, including the Z axle base that links to each other with Z axle connecting plate and the platform mounting panel that links to each other with the sucking disc mounting panel, the Z axle base with be equipped with between the platform mounting panel and be used for promoting the lifting unit that the sucking disc mounting panel goes up and down.

Preferably, the adjusting part include with Y axle connecting plate fixed connection's X axle guide rail, install cross roller bearing in the Z axle connecting plate and with the Y axle guide rail that cross roller bearing links to each other, middle transition piece is two-way fixed block, two-way fixed block upside is equipped with Y axle slider, Y axle slider be equipped with Y axle guide rail complex Y axle spout, two-way fixed block downside is equipped with X axle slider be equipped with X axle guide rail complex X axle spout.

Preferably, the support assembly comprises a support column fixedly connected with the Y-axis connecting plate and a support bearing installed in the Z-axis connecting plate.

Preferably, the power assembly comprises a T-axis servo motor fixedly connected with the Y-axis connecting plate, a T-axis lead screw in transmission connection with the T-axis servo motor, and a T-axis nut connecting block fixedly connected with the Y-axis sliding block, a crankshaft of the T-axis servo motor and the T-axis lead screw are parallel to an X axis, and a T-axis nut in threaded fit with the T-axis lead screw is arranged in the T-axis nut connecting block.

Preferably, the power assembly further comprises 2T-shaft bearing supports fixedly connected with the Y-shaft connecting plate, and bearings matched with the T-shaft screw rods are arranged in the T-shaft bearing supports.

Preferably, platform mounting panel downside fixedly connected with wedge, the last side fixedly connected with Z axle motor cabinet of Z axle base, lifting unit include with Z axle motor cabinet fixed connection's Z axle servo motor, with the Z axle lead screw that Z axle servo motor transmission is connected and with wedge complex Z axle nut fixed block, Z axle nut fixed block be connected with Z axle lead screw complex Z axle nut, Z axle nut fixed block horizontal migration can promote the wedge goes up and down.

Preferably, the upper side surface of the Z-axis base is also provided with a horizontal guide rail, and the Z-axis nut fixing block is provided with a horizontal sliding block matched with the horizontal guide rail.

Preferably, the side of going up of Z axle base is equipped with the slider fixing base, be equipped with vertical slider in the slider fixing base, the platform mounting panel downside is equipped with the guide rail fixed plate, the guide rail fixed plate orientation one side of slider fixing base be equipped with vertical slider complex vertical guide.

Preferably, one side of Z axle nut fixed block is equipped with the dress guide rail to one side, the downside of wedge is equipped with the dress slider to one side, have the dress spout to one side in the dress slider to one side, the dress guide rail is installed to one side in the dress spout to one side.

Preferably, the guide rail fixed plate with the slider fixing base is 4, and all is the rectangle distribution, horizontal guide rail sets up in 4 the rectangle central authorities that the slider fixing base formed, the wedge is located 4 rectangle central authorities that the guide rail fixed plate formed.

The alignment platform device provided by the invention comprises an X-axis driving mechanism, a Y-axis driving mechanism, a T-axis driving mechanism and a Z-axis driving mechanism. The sliding table of the X-axis driving mechanism is fixedly connected with the Y-axis driving mechanism and can drive the Y-axis driving mechanism to move along the X axis; and a Y-axis sliding seat of the Y-axis driving mechanism is connected with the T-axis driving mechanism and drives the T-axis driving mechanism to move along the Y axis. The T-axis driving mechanism comprises a Y-axis connecting plate, a Z-axis connecting plate, a power assembly, an adjusting assembly and a supporting assembly, wherein the power assembly, the adjusting assembly and the supporting assembly are arranged between the Y-axis connecting plate and the Z-axis connecting plate. The upper end of the adjusting component is rotatably connected with the Z-axis connecting plate, the lower end of the adjusting component is fixedly connected with the Y-axis connecting plate, the middle of the adjusting component is provided with an intermediate transition piece which can generate relative motion with the Y-axis connecting plate and the Z-axis connecting plate, and the moving end of the power component is connected with the intermediate transition piece and pushes the intermediate transition piece, so that the Z-axis connecting plate rotates around the supporting component. And connecting the Z-axis connecting plate with the sucker mounting plate and pushing the sucker mounting plate to lift.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic structural diagram of an alignment stage apparatus according to the present invention;

FIG. 2 is a schematic view of the Z-axis drive mechanism of FIG. 1;

FIG. 3 is a schematic structural diagram of the T-axis driving mechanism in FIG. 1;

FIG. 4 is a schematic structural view of the Y-axis driving mechanism in FIG. 1;

FIG. 5 is a schematic view of the structure of the X-axis driving mechanism in FIG. 1;

FIG. 6 is a schematic structural view of the power assembly of FIG. 5;

FIG. 7 is a schematic structural view of the adjustment assembly of FIG. 5;

fig. 8 is a schematic structural view of the support assembly in fig. 5.

Wherein the reference numerals in fig. 1 to 8 are:

the X-axis driving mechanism 1, the Y-axis driving mechanism 2, the T-axis driving mechanism 3, the Z-axis driving mechanism 4, the sucker mounting plate 5, the bottom plate 11, the sliding table 12, the stator 13, the mover 14, the connecting seat 21, the Y-axis sliding seat 22, the Y-axis connecting plate 31, the Z-axis connecting plate 32, the power assembly 33, the T-axis servo motor 331, the T-axis motor seat 332, the T-axis coupler 333, the T-axis screw 334, the T-axis nut connecting block 335, the T-axis nut 336, the T-axis bearing support 337, the adjusting assembly 34, the X-axis guide rail 341, the X-axis slider 342, the bidirectional fixing block 343, the Y-axis slider 344, the Y-axis guide rail 345, the locking plate 346, the adjusting fixing plate 347, the crossed roller bearing 348, the bearing gland 349, the supporting assembly 35, the supporting column 351, the supporting fixing plate 352, the supporting bearing 353, the locking cover 354, the Z-axis base 401, the platform mounting plate 402, the Z-axis servo motor 403, the Z-axis motor seat 404, the sucking disc 5, the T-axis servo motor seat, Z-axis lead screw 405, Z-axis coupler 406, Z-axis nut 407, Z-axis nut fixing block 408, horizontal guide rail 409, horizontal slider 410, oblique guide rail 411, wedge block 412, oblique slider 413, Z-axis mounting base 414, vertical guide rail 415, vertical slider 416, slider fixing base 417 and guide rail fixing plate 418.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1 to 8, fig. 1 is a schematic structural diagram of an alignment stage apparatus according to the present invention; FIG. 2 is a schematic structural view of the Z-axis driving mechanism in FIG. 1; FIG. 3 is a schematic structural diagram of the T-axis driving mechanism in FIG. 1; FIG. 4 is a schematic view of the Y-axis driving mechanism in FIG. 1;

FIG. 5 is a schematic view of the X-axis driving mechanism of FIG. 1; FIG. 6 is a schematic structural view of the power assembly of FIG. 5; FIG. 7 is a schematic view of the adjustment assembly of FIG. 5; fig. 8 is a schematic structural view of the support assembly in fig. 5.

The structure of the aligning platform device provided by the invention is shown in figure 1, and comprises an X-axis driving mechanism 1, a Y-axis driving mechanism 2, a T-axis driving mechanism 3 and a Z-axis driving mechanism 4. Wherein, X axle actuating mechanism 1 includes bottom plate 11 and slip table 12, as shown in fig. 3, the frame fixed connection of bottom plate 11 and liquid crystal display module bonding equipment, slip table 12 is used for connecting Y axle actuating mechanism 2. The sliding table 12 is connected with the mover 14, a stator 13 for driving the mover 14 to move along the X-axis is disposed in the base plate 11, and a linear motor may be referred to as a matching mode between the stator 13 and the mover 14, which is not described herein again.

As shown in fig. 4, the connecting seat 21 is fixedly connected to the sliding table 12, the connecting seat 21 can drive the Y-axis sliding seat 22 to move along the Y-axis, and the structure of the Y-axis driving mechanism 2 can refer to a servo driving linear module, which is not described herein again. The X-axis driving mechanism 1 and the Y-axis driving mechanism 2 can be set to be in the size according to needs, and the X-axis driving mechanism and the Y-axis driving mechanism have the advantages of simple structure, low cost, high rigidity and high stability.

The T-axis drive mechanism 3 includes a Y-axis connecting plate 31 and a Z-axis connecting plate 32, and as shown in fig. 5, the Y-axis connecting plate 31 is connected to the Y-axis slide table 12, and the Z-axis connecting plate 32 is connected to the Z-axis drive mechanism 4. A power assembly 33, an adjusting assembly 34 and a supporting assembly 35 are arranged between the Y-axis connecting plate 31 and the Z-axis connecting plate 32. Wherein, the upper end of the supporting component 35 is rotatably connected with the Z-axis connecting plate 32, and the lower end is fixedly connected with the Y-axis connecting plate 31. The upper end of the adjusting component 34 is rotatably connected with the Z-axis connecting plate 32, the lower end is fixedly connected with the Y-axis connecting plate 31, the middle part of the adjusting component 34 is provided with a middle transition piece, the lower side of the middle transition piece is movably connected with the Y-axis connecting plate 31, and the Z-axis connecting plate 32 on the upper side of the middle transition piece is movably connected. The moving direction of the intermediate transition piece relative to the Y-axis connecting plate 31 is not parallel to the moving direction of the intermediate transition piece relative to the Z-axis connecting plate 32, and the moving end of the power assembly 33 is connected with the intermediate transition piece and applies thrust to the intermediate transition piece. The thrust direction is not parallel to the line connecting the support member 35 and the adjustment member 34, so that the Z-axis connecting plate 32 can rotate around the support member 35 under the thrust action.

The Z-axis drive mechanism 4 includes a Z-axis base 401, a platform mounting plate 402, and a lift assembly. As shown in fig. 2, the Z-axis base 401 is fixedly connected to the Z-axis connecting plate 32, and the platform mounting plate 402 is fixedly connected to the suction cup mounting plate 5. Be equipped with the sucking disc on the sucking disc mounting panel 5 and the gas circuit that links to each other with the sucking disc, through adjusting the gas circuit break-make on the sucking disc mounting panel 5, steerable absorption not unidimensional panel. The lifting assembly is positioned between the Z-axis base 401 and the platform mounting plate 402, and the lifting mechanism can push the sucker mounting plate 5 to lift.

In this embodiment, the alignment stage device moves along the X axis through the X axis driving mechanism 1, moves along the Y axis through the Y axis driving mechanism 2, moves along the Z axis through the Z axis driving mechanism 4, and rotates around the T axis through the T axis driving mechanism 3, thereby aligning the liquid crystal display screen. The X-axis driving mechanism 1 and the Y-axis driving mechanism 2 have the advantages of simple structure, low cost, high rigidity and high stability, the T-axis driving mechanism 3 is provided with the supporting component 35 and the adjusting component 34, the supporting component 35 and the adjusting component 34 are matched with the power component 33 to realize rotation, and the T-axis driving mechanism has the advantages of small size, strong deformation resistance, flexible structural design, low cost, convenience in maintenance and the like.

Optionally, the adjusting assembly 34 further includes an X-axis guide 341, a Y-axis guide 345 and a cross roller bearing 348, as shown in fig. 7, the X-axis guide 341 is fixedly connected to the Y-axis connecting plate 31 and extends along the X-axis direction, and the Y-axis guide 345 is rotatably connected to the Z-axis connecting plate 32. The middle transition piece is a bidirectional fixed block 343, an X-axis sliding block 342 is arranged between the bidirectional fixed block 343 and the X-axis guide rail 341, the X-axis sliding block 342 is provided with an X-axis sliding groove matched with the X-axis guide rail 341, a Y-axis sliding block 344 is arranged on the upper side of the bidirectional fixed block 343, the Y-axis sliding block 344 is provided with a Y-axis sliding groove matched with the Y-axis guide rail 345, and the bidirectional fixed block 343 is connected with the power assembly 33 through the Y-axis sliding block 344.

The upper side of the Y-axis guide rail 345 is connected with a locking plate 346, the upper side of the locking plate 346 is provided with a connecting column, and the axis of the connecting column is crossed with and vertical to the central line of the Y-axis track. The inner race of the cross roller bearing 348 is connected to the connecting column and the outer race of the cross roller bearing 348 is connected to the Z-axis connecting plate 32, so that the Y-axis guide 345 is rotatable relative to the Z-axis connecting plate 32. An adjusting fixing plate 347 is arranged between the locking plate 346 and the crossed roller bearing 348, the adjusting fixing plate 347 is used for being fixedly connected with the Z shaft connecting plate 32, and the connecting column is in clearance fit with the adjusting fixing plate 347. The upper end of the connecting column is provided with a bearing gland 349, and the bearing gland 349 is matched with the inner ring of the crossed roller bearing 348.

Alternatively, as shown in fig. 8, the support assembly 35 includes a support post 351, a support bearing, a support fixing plate 352, and a locking cap 354. The lower end of the support column 351 is provided with a flange which is fixedly connected with the Y-axis connecting plate 31. The support bearing 353 is located at an upper portion of the support column 351, an inner race of the support bearing is connected to the support column 351, and an outer race of the support bearing is connected to the Z shaft connection plate 32, so that the support column 351 is rotatable with respect to the Z shaft connection plate 32. The supporting and fixing plate 352 is located below the supporting bearing 353 and is used for being fixedly connected with the Z-axis connecting plate 32, and the supporting column 351 is in clearance fit with the supporting and fixing plate 352. The locking cap 354 is positioned over the support bearing and abuts the inner race of the support bearing 353.

Alternatively, as shown in fig. 5 and 6, the power assembly 33 includes a T-axis servomotor 331, a T-axis screw 334, and a T-axis nut connection block 335. The Y-axis connecting plate 31 is provided with a T-axis motor base 332 and 2T-axis bearing supports 337. The T-axis servo motor 331 is fixedly connected with the T-axis motor base 332, and a machine axis of the T-axis servo motor 331 is parallel to an X axis and is connected with a T-axis screw 334 through a T-axis coupler 333. The T-axis lead screw 334 is inserted into 2T-axis bearing holders 337 and is coupled to the T-axis bearing holders 337 through bearings. The part of the T-axis screw 334 between the 2T-axis bearing supports 337 is provided with external threads, the T-axis nut connecting block 335 is positioned between the 2T-axis bearing supports 337, and a T-axis nut 336 in threaded fit with the T-axis screw 334 is arranged in the T-axis nut connecting block 335.

In the working process, the T-axis servo motor 331 drives the T-axis lead screw 334 to rotate, so as to push the T-axis nut connecting block 335 to move along the direction parallel to the X axis, and the T-axis nut connecting block 335 is connected with the bidirectional fixed block 343 through the Y-axis sliding block 344, and drives the X-axis sliding block 342, the Y-axis sliding block 344 and the bidirectional fixed block 343 to move along the X-axis guide rail 341. Meanwhile, the adjusting assembly 34 exerts a thrust action on the Z-axis connecting plate 32, and the Z-axis connecting plate 32 rotates around the supporting assembly 35 under the thrust action because the connecting line of the adjusting assembly 34 and the supporting assembly 35 is not parallel to the X axis.

Optionally, at least one adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 is further provided between the Z-axis connecting plate 32 and the Y-axis connecting plate 31. As shown in fig. 5, two adjusting assemblies 34 for assisting the rotation of the Z-axis connecting plate 32 are provided between the Z-axis connecting plate 32 and the Y-axis connecting plate 31, and are not connected to the T-axis nut connecting block 335. And the connecting line between the adjusting assembly 34 and the supporting assembly 35 for assisting the rotation of the Z-axis connecting plate 32 vertically drives the connecting line between the adjusting assembly 34 and the supporting assembly 35 for the rotation of the Z-axis connecting plate 32. The adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 can realize multi-point support of the Z-axis connecting plate 32, and improve the rigidity of the equipment. Of course, the user can also set the number of the adjusting assemblies 34 for assisting the rotation of the Z-axis connecting plate 32 by himself or herself, and the X-axis guide 341 and the Y-axis guide 345 of the adjusting assemblies 34 for assisting the rotation of the Z-axis connecting plate 32 need to adjust the positions according to the rotation direction of the Z-axis connecting plate 32.

In this embodiment, the power assembly 33, the adjusting assembly 34 and the supporting assembly 35 cooperate to push the Z-axis connecting plate 32 to rotate, and the power assembly 33, the adjusting assembly 34 and the supporting assembly 35 have simple structures and low maintenance costs. In addition, the adjusting assembly 34 and the supporting assembly 35 can support the Z-axis connecting plate 32 at multiple points, and the rigidity and the stability of the device are improved. Meanwhile, the adjusting assembly 34 and the supporting assembly 35 can be arranged according to the size of the equipment, the extensible range is large, and the device is suitable for bonding large-size panels.

Among the prior art, correspond the liquid crystal display module nation fixed equipment of jumbo size platform, motor shaft and synchronous pulley centre-to-centre spacing are great, the tensioning effect is poor, the transmission precision is low, cost of maintenance is high. And servo motor places perpendicularly, and space utilization is low, and the space span of equipment is big, and rigidity is low, poor stability.

Optionally, as shown in fig. 2, a wedge block 412 is fixedly connected to the center of the lower side of the platform mounting plate 402, a Z-axis motor base 404 and a Z-axis mounting base 414 are fixedly connected to the upper side of the Z-axis base 401, and the lifting assembly includes a Z-axis servo motor 403, a Z-axis screw 405, and a Z-axis nut fixing block 408. The Z-axis nut fixing block 408 is located below the wedge block 412, one end of the Z-axis lead screw 405 is connected to a rotating shaft of the Z-axis servo motor 403 through the Z-axis coupler 406, and the other end of the Z-axis lead screw is connected to the Z-axis nut fixing block 408. The Z-axis screw 405 and the rotating shaft of the Z-axis servo motor 403 are parallel to the Z-axis base 401, the Z-axis servo motor 403 is fixedly connected with the Z-axis motor base 404, and the Z-axis screw 405 and the Z-axis mounting base 414 are rotatably connected. One side of the Z-axis nut fixing block 408 close to the Z-axis servo motor 403 is provided with a Z-axis nut 407 which is in thread fit with the Z-axis lead screw 405, and a yielding groove for yielding the Z-axis lead screw 405 is formed in the Z-axis nut fixing block 408. The lower side of the wedge block 412 is obliquely arranged, the distance between the wedge block and the platform mounting plate 402 is gradually reduced along the direction close to the Z-axis motor base 404, and one side of the Z-axis nut fixing block 408, which is far away from the Z-axis motor base 404, is matched with the wedge block 412 and is parallel to the lower side of the wedge block 412. Z axle servo motor 403 drives Z axle lead screw 405 to rotate, and then promotes Z axle nut fixed block 408 to remove, and Z axle nut fixed block 408 removes the in-process and can exert the thrust of slope to wedge 412, and platform mounting panel 402 can be promoted to go up and down in the separation of thrust in perpendicular platform mounting panel 402 direction.

Optionally, a slider fixing seat 417 is arranged on the upper side surface of the Z-axis base 401, and a vertical slider 416 perpendicular to the Z-axis base 401 is arranged in the slider fixing seat 417. The lower side of the platform mounting plate 402 is provided with a guide fixing plate 418, and one side of the guide fixing plate 418 facing the slider fixing seat 417 is provided with a vertical guide 415 of the platform mounting plate 402. The vertical guide rail 415 is matched with the vertical sliding block 416, in the lifting process of the platform mounting plate 402, the sliding block fixing seat 417 and the guide rail fixing plate 418 can limit the horizontal displacement of the platform mounting plate 402, and meanwhile, the vertical guide rail 415 and the vertical sliding block 416 are matched to reduce the resistance in the lifting process. Of course, the user may also use other structures of the limiting assembly to horizontally limit the platform mounting plate 402, such as the limiting guide posts and the limiting guide tubes.

Optionally, an inclined guide rail 411 is arranged on one side of the Z-axis nut fixing block 408, which is far away from the Z-axis motor base 404, an inclined slider 413 is arranged on the lower side of the wedge block 412, an inclined sliding groove is formed in the inclined slider 413, and the inclined guide rail 411 is installed in the inclined sliding groove. In the process of horizontal movement of the Z-axis nut fixing block 408, the oblique-mounting slider 413 slides along the oblique-mounting chute, thereby pushing the platform mounting plate 402 to lift.

Optionally, the upper side of the Z-axis base 401 is further provided with a horizontal guide rail 409 parallel to the Z-axis lead screw 405, the horizontal guide rail 409 is located below the wedge block 412, and the lower side of the Z-axis nut fixing block 408 is provided with a horizontal slider 410 matched with the horizontal guide rail 409. The horizontal guide rail 409 is matched with the horizontal sliding block 410, so that the resistance of the Z-axis nut fixing block 408 in the moving process can be reduced, and the energy loss is reduced.

Optionally, as shown in fig. 2, the number of the rail fixing plates 418 and the number of the slider fixing seats 417 are 4, the 4 rail fixing plates 418 are distributed in a rectangular shape on the lower side of the platform mounting plate 402, and the wedge block 412 is located in the center of the rectangle formed by the 4 rail fixing plates 418. The 4 slider holders 417 are disposed on the upper side of the Z-axis base 401 in a rectangular shape, and correspond to the 4 positions, and the horizontal guide rail 409 is disposed at the center of the rectangular shape formed by the 4 slider holders 417.

In this embodiment, a Z-axis lead screw 405 and a Z-axis servo motor 403 in the Z-axis driving mechanism 4 are both arranged parallel to the Z-axis base 401, and the platform mounting plate 402 is lifted by pushing a wedge block 412 through a Z-axis nut fixing block 408. The arrangement mode of the Z-axis screw 405 and the Z-axis servo motor 403 can fully utilize the space between the Z-axis base 401 and the platform mounting plate 402, and the space utilization rate of the alignment platform device is improved. Meanwhile, a guide rail fixing plate 418 and a sliding block fixing seat 417 are arranged between the Z-axis base 401 and the platform mounting plate 402, so that the rigidity of the alignment platform device is improved.

It is noted that, in this specification, relational terms such as first and second, and the like are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities.

The alignment platform device provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, it is possible to make various improvements and modifications to the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims

1. An alignment stage assembly, comprising:

the X-axis driving mechanism (1) comprises a bottom plate (11) and a sliding table (12), the sliding table (12) is connected with a rotor (14), and a stator (13) used for driving the rotor (14) to move along an X axis is arranged in the bottom plate (11);

the Y-axis driving mechanism (2) comprises a connecting seat (21) fixedly connected with the sliding table (12) and a Y-axis sliding seat (22) connected with the connecting seat (21), and the connecting seat (21) can drive the Y-axis sliding seat (22) to move along a Y axis;

a T-axis driving mechanism (3) which comprises a Y-axis connecting plate (31) and a Z-axis connecting plate (32), the Y-axis connecting plate (31) is connected with the Y-axis sliding table (12), a power assembly (33), an adjusting assembly (34) and a supporting assembly (35) are arranged between the Y-axis connecting plate (31) and the Z-axis connecting plate (32), the upper end of the adjusting component (34) is rotatably connected with the Z-axis connecting plate (32), the lower end of the adjusting component (34) is fixedly connected with the Y-axis connecting plate (31), the middle part of the adjusting component (34) is provided with an intermediate transition piece which can generate relative movement with the Y-axis connecting plate (31) and the Z-axis connecting plate (32), the moving end of the power assembly (33) is connected with the intermediate transition piece so as to push the Z-axis connecting plate (32) to rotate around the supporting assembly (35);

z axle actuating mechanism (4), including Z axle base (401) that link to each other with Z axle connecting plate (32) and platform mounting panel (402) that link to each other with sucking disc mounting panel (5), Z axle base (401) with be equipped with between platform mounting panel (402) and be used for promoting the lifting unit that sucking disc mounting panel (5) go up and down.

2. The alignment platform device according to claim 1, wherein the adjusting assembly (34) comprises an X-axis guide rail (341) fixedly connected to the Y-axis connecting plate (31), a crossed roller bearing (348) installed in the Z-axis connecting plate (32), and a Y-axis guide rail (345) connected to the crossed roller bearing (348), the intermediate transition piece is a bidirectional fixed block (343), a Y-axis sliding block (344) is disposed on the upper side of the bidirectional fixed block (343), the Y-axis sliding block (344) is provided with a Y-axis sliding slot engaged with the Y-axis guide rail (345), an X-axis sliding block (342) is disposed on the lower side of the bidirectional fixed block (343), and the X-axis sliding block (342) is provided with an X-axis sliding slot engaged with the X-axis guide rail (341).

3. The alignment platform assembly according to claim 2, wherein the support assembly (35) comprises a support column (351) fixedly connected to the Y-axis connection plate (31) and a support bearing (353) mounted in the Z-axis connection plate (32).

4. The alignment platform device according to claim 2, wherein the power assembly (33) comprises a T-axis servo motor (331) fixedly connected to the Y-axis connecting plate (31), a T-axis lead screw (334) drivingly connected to the T-axis servo motor (331), and a T-axis nut connecting block (335) fixedly connected to the Y-axis slider (344), wherein both the axis of the T-axis servo motor (331) and the T-axis lead screw (334) are parallel to the X-axis, and a T-axis nut (336) threadedly engaged with the T-axis lead screw (334) is disposed in the T-axis nut connecting block (335).

5. The alignment platform device according to claim 4, wherein the power assembly (33) further comprises 2T-axis bearing supports (337) fixedly connected to the Y-axis connecting plate (31), and each of the T-axis bearing supports (337) is provided with a bearing engaged with the T-axis lead screw (334).

6. The alignment platform device according to any one of claims 1 to 5, wherein a wedge block (412) is fixedly connected to a lower side of the platform mounting plate (402), a Z-axis motor base (404) is fixedly connected to an upper side of the Z-axis base (401), the lifting assembly comprises a Z-axis servo motor (403) fixedly connected to the Z-axis motor base (404), a Z-axis lead screw (405) in transmission connection with the Z-axis servo motor (403), and a Z-axis nut fixing block (408) engaged with the wedge block (412), the Z-axis nut fixing block (408) is connected to a Z-axis nut (407) engaged with the Z-axis lead screw (405), and the wedge block (412) can be lifted by the horizontal movement of the Z-axis nut fixing block (408).

7. The alignment platform device according to claim 6, wherein a horizontal guide rail (409) is further arranged on the upper side of the Z-axis base (401), and the Z-axis nut fixing block (408) is provided with a horizontal sliding block (410) matched with the horizontal guide rail (409).

8. The alignment platform device according to claim 7, wherein a slider fixing seat (417) is provided on the upper side of the Z-axis base (401), a vertical slider (416) is provided in the slider fixing seat (417), a guide rail fixing plate (418) is provided on the lower side of the platform mounting plate (402), and a vertical guide rail (415) matched with the vertical slider (416) is provided on one side of the guide rail fixing plate (418) facing the slider fixing seat (417).

9. The alignment platform device according to claim 6, wherein a slanted guide rail (411) is provided at one side of the Z-axis nut fixing block (408), a slanted slide block (413) is provided at a lower side of the wedge block (412), a slanted sliding slot is provided in the slanted slide block (413), and the slanted guide rail (411) is installed in the slanted sliding slot.

10. The alignment platform device according to claim 8, wherein the guide rail fixing plates (418) and the slider fixing seats (417) are 4 and are distributed in a rectangular shape, the horizontal guide rail (409) is arranged in the center of the rectangular shape formed by the 4 slider fixing seats (417), and the wedge block (412) is located in the center of the rectangular shape formed by the 4 guide rail fixing plates (418).