CN114779428A - Suspension type precision adjustment device for pose of multilayer nested reflector - Google Patents
Suspension type precision adjustment device for pose of multilayer nested reflector Download PDFInfo
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- CN114779428A CN114779428A CN202210413902.2A CN202210413902A CN114779428A CN 114779428 A CN114779428 A CN 114779428A CN 202210413902 A CN202210413902 A CN 202210413902A CN 114779428 A CN114779428 A CN 114779428A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/192—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention discloses a suspension type precision adjusting device for the pose of a multilayer nested reflector. The pose adjusting assembly consists of an adjusting module, a piezoelectric ceramic actuator, a pose adjusting rod and a flexible adsorption head; the counterweight adjusting component consists of an adjusting module, a fixed pulley, a counterweight block, a counterweight adjusting rope and a flexible adsorption head; the pose measuring assembly consists of a measuring bracket and a non-contact sensor; the two-dimensional platform assembly consists of a corresponding motion module and various support plates; the supporting plate is supported by the front spoke plate supporting assembly and is fixed by the front spoke plate fixing assembly; the position and pose of the reflecting mirror are measured by the position and pose measuring assembly, and after the reflecting mirror is balanced by the counterweight adjusting assembly, the position and pose of the reflecting mirror is adjusted by the position and pose adjusting assembly and the two-dimensional platform assembly. The device convenient operation can realize the flexible absorption to the speculum, offset the speculum dead weight, realize the integral removal centering of speculum to reduce before the radials exert and unload the irreversible deformation of front and back itself before, finally improve the dress and debug the precision of multilayer nested speculum.
Description
Technical Field
The invention belongs to the field of precision adjustment of optical devices, and particularly relates to a suspension type precision adjusting device for the pose of a multilayer nested reflector.
Background
The Wolter-I multilayer nested reflector is a main component of an X-ray grazing incidence optical lens, and due to the high focusing efficiency, the small space background noise and the large optical gain, the Wolter-I multilayer nested reflector provides possibility for completing the observation of high efficiency and high signal to noise ratio of a space target in tasks such as astronomical observation technology, pulsar navigation, deep space exploration and the like, so the Wolter-I multilayer nested reflector becomes an object for vigorous research and development abroad in recent decades. The research on the multilayer nested reflector in China is still in a starting state, the whole-process manufacturing process of the multilayer nested reflector relates to a series of related high-standard processes such as processing, assembly and debugging, detection and the like, and particularly for the assembly and debugging process of the integrated electroformed nickel multilayer nested reflector, the problems that the assembly and debugging error is difficult to control, the assembly and debugging precision is unsatisfactory and the like exist in the related traditional assembly and debugging method in China in the past, and because the thickness of the reflector is only dozens of microns to hundreds of microns, the reflector is very thin, and the single-layer deformation amount of the reflector is difficult to control; and for the number of the nested layers, from several layers to hundreds of layers, the precision of the nested layers on the problem of central centering of the multiple layers is difficult to guarantee, and the factors cause the results of optical aberration, low angular resolution and the like of the finally adjusted multilayer nested reflector.
Disclosure of Invention
In view of this, the invention provides a suspended type precision adjusting device for the pose of a multilayer nested reflector, which can realize the functions of flexible adsorption, integral precision movement centering, precision adjustment of the spatial pose, stable support of a front spoke plate and the like of the reflector, and finally complete the precision assembly and adjustment of the multilayer nested reflector, and the device is convenient to operate and high in adjustment precision.
The technical scheme of the invention is as follows: a suspended precision adjusting device for the pose of a multilayer nested reflector comprises: the device comprises a reflector, a front spoke plate, a bottom frame, a bottom cover plate, a supporting plate, an upright post, a two-dimensional platform assembly, a front spoke plate fixing assembly, a front spoke plate supporting assembly, a pose measuring assembly, a pose adjusting assembly and a counterweight adjusting assembly.
The overall position relationship is as follows: the position adjusting assembly and the counterweight adjusting assembly are arranged on the two-dimensional platform assembly; the two-dimensional platform assembly is arranged on the upright post; the pose measuring assembly, the front spoke plate supporting assembly and the front spoke plate fixing assembly are arranged on the bottom cover plate; the supporting plate is supported by the front spoke plate supporting component and fixed by the front spoke plate fixing component; the front spoke plate is placed in the supporting plate; the bottom cover plate and the upright posts are both arranged on the bottom frame.
The front spoke plate fixing component consists of a fixing support, a fixing bottom plate, a fixing bolt, a fixing nut, a fixing arm and a fixing pin; the assembly is provided with three sets, and the three sets are circumferentially and uniformly distributed and installed on the bottom cover plate and used for realizing the stable fixation of the supporting plate.
The front spoke plate supporting assembly consists of a supporting bottom plate, a supporting cantilever, a locking nut, a locking stud, a high-precision force sensor, a fine adjustment device and a fine adjustment support; the assembly is provided with three sets, and the three sets are circumferentially and uniformly distributed and installed on the bottom cover plate and used for realizing stable support of the supporting plate.
The pose measuring assembly consists of a measuring bracket and a non-contact sensor; the assembly is provided with two sets, is arranged on the bottom cover plate at an angle of 90 degrees and is used for measuring the spatial pose dip angle of the reflector.
The two-dimensional platform assembly consists of an L-shaped bottom plate, an X-direction movement module, a middle support plate, an upper support plate and a Y-direction movement module; and the device is arranged on the upright column and used for realizing integral moving centering adjustment of the reflector.
The pose adjusting assembly consists of an adjusting module, a piezoelectric ceramic actuator, a pose adjusting rod and a flexible adsorption head; the assembly is provided with three sets, is circumferentially and uniformly distributed and installed on the two-dimensional platform assembly and is used for realizing the inclination adjustment of the spatial pose of the reflector.
The counterweight adjusting component consists of an adjusting module, a fixed pulley, a counterweight block, a counterweight adjusting rope and a flexible adsorption head; the assembly is provided with three sets, and the three sets are circumferentially and uniformly distributed on the two-dimensional platform assembly and used for realizing balance weight adjustment of the self weight of the reflector and reducing the bottom support deformation of the reflector caused by gravity.
The supporting plate is supported by the front spoke plate supporting component and fixed by the front spoke plate fixing component; the front wheel plate is placed in the supporting plate and used for ensuring the stability of the front wheel plate and reducing deformation caused by the direct acting force on the front wheel plate.
The reflector is fixed in the groove of the front spoke plate by means of adhesive bonding after being assembled and adjusted.
Based on the basic technical scheme, the invention also makes the following optimization limitations:
the flexible adsorption head adopts active air pressure adsorption deformation, and can make corresponding appropriate deformation according to different curvature radiuses of the reflector;
the pose adjusting rod is a rigid component so as to reduce the self-shaking of the reflecting lens caused by air flow in the adjusting process;
the curing adhesive is epoxy resin adhesive after the reflector is adjusted, and the curing adhesive has the advantages of low viscosity, normal-temperature curing and aerospace applicability.
The invention has the following beneficial effects:
1. the invention reduces the deformation of the reflector by flexible adsorption.
2. The invention reduces the deformation of the reflector caused by the self gravity through the counterweight adjustment.
3. The invention improves the alignment precision of the reflectors when nested in multiple layers through integral moving centering.
4. The invention reduces the irreversible deformation of the front spoke plate before and after the acting force is applied and unloaded by fixedly supporting the supporting plate, thereby reducing the deformation of the reflector after the adjustment.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged upper view of the present invention;
FIG. 3 is a view of the upper hidden portion of the present invention;
FIG. 4 is an enlarged lower view of the present invention;
FIG. 5 is a schematic view of the front web fixing assembly of FIG. 1 in accordance with the present invention;
FIG. 6 is a schematic illustration of the front web support assembly of FIG. 1 in accordance with the present invention;
wherein, 1-an underframe, 2-a bottom cover plate, 3-a measuring bracket, 4-a non-contact sensor, 5-a reflector, 6-an L-shaped bottom plate, 7-an X-direction movement module, 8-a middle support plate, 9-an upper support plate, 10-an upright post, 11-a piezoelectric ceramic actuator, 12-an adjusting module, 13-a fixed pulley, 14-a Y-direction movement module, 15-a balancing weight, 16-a balancing weight adjusting rope, 17-a pose adjusting rod, 18-a flexible adsorption head, 19-a front web, 20-a support plate, 21-a front web fixing component, 22-a front web support component, 211-a fixed bracket, 212-a fixed bottom plate, 213-a fixed bolt, 214-a fixed nut, 215-a fixed arm, 216-a fixed pin, 221-support base plate, 222-support cantilever, 223-lock nut, 224-lock stud, 225-high precision force sensor, 226-fine adjustment device, 227-fine adjustment support.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
The invention provides a suspension type precision adjusting device for the pose of a multilayer nested reflector, which realizes the following technical scheme:
as shown in fig. 1, 2, 5 and 6, a suspended precision adjusting device for the pose of a multilayer nested reflector comprises: the device comprises an underframe 1, a bottom cover plate 2, a reflector 5, an upright post 10, a front spoke plate 19, a supporting plate 20, a front spoke plate fixing component 21, a front spoke plate supporting component 22, a two-dimensional platform component, a pose measuring component, a counterweight adjusting component and a pose adjusting component.
The front wheel plate fixing assembly 21 is composed of a fixing bracket 211, a fixing bottom plate 212, a fixing bolt 213, a fixing nut 214, a fixing arm 215 and a fixing pin 216; when the fixing device is used, the clamping force of the fixing arms 215 acting on the supporting plate 20 is adjusted by adjusting the fixing nuts 214, the three sets of front spoke plate fixing assemblies 21 are uniformly fixed on the bottom cover plate 2 in the circumferential direction, and the height of the fixing support 211 and the height and the diameter of the fixing bolts 213 can be adjusted according to actual needs.
The front spoke plate supporting component 22 is composed of a supporting bottom plate 221, a supporting cantilever 222, a locking nut 223, a locking stud 224, a high-precision force sensor 225, a fine-tuning device 226 and a fine-tuning support 227; the three sets of front web support assemblies 22 are circumferentially and uniformly fixed on the bottom cover plate 2, and when the three sets of front web support assemblies are used, the radial position of the support plate 20 is adjusted by adjusting the fine adjustment device 226, and when the readings on the three high-precision force sensors 225 are the same, the adjustment of the support plate 20 is finished. The high-precision force sensor 225 is connected with the locking stud 224 through a thread, the locking nut 223 is used for ensuring the stability of the high-precision force sensor 225, the supporting cantilever 222 is a cantilever beam structure and is fixed on the supporting bottom plate 221 below, an adjustable annular hole is designed on the supporting bottom plate 221, and the adjustable annular hole can be adjusted to adapt to the installation and adjustment of the reflectors 5 with different caliber specifications.
The two-dimensional platform assembly consists of an L-shaped bottom plate 6, an X-direction movement module 7, a middle support plate 8, an upper support plate 9 and a Y-direction movement module 14; the L-shaped bottom plate 6 is used as a bottom fixing support and is arranged on the upright post 10, when the two-dimensional platform assembly is used, the two-dimensional platform assembly moves in two directions in a horizontal range through the respective movement of the X-direction movement module 7 and the Y-direction movement module 14, and then the upper pose adjusting assembly and the counterweight adjusting assembly are driven to move so as to realize the integral movement of the lower reflector 10, and when the central shafts of the reflectors 10 are not overlapped in the multilayer nesting process, the integral movement centering can improve the overlapping alignment precision of the central shafts to a micron level; the X-direction motion module 7 and the Y-direction motion module 14 are of a closed-loop structure with high-precision grating feedback.
The pose measurement assembly consists of a measurement bracket 3 and a non-contact sensor 4; the assembly comprises two sets, the two sets are arranged on a bottom cover plate 2 at an angle of 90 degrees, each set consists of an upper group of non-contact sensors 4 and a lower group of non-contact sensors 4 and is used for respectively measuring the distances from the upper outer side surface and the lower outer side surface of a reflector 5 to the non-contact sensors 4, and the inclination angles of the central axes of the reflectors 5 on two 90-degree corresponding vertical surfaces can be estimated through the measured distance values so as to be used for adjusting the inclination angles of the reflectors 5 by using the pose adjusting assembly; the measuring support can be adjusted radially on the bottom cover plate 2 to adapt to the adjustment of the reflectors 5 with different calibers.
The counterweight adjusting component consists of an adjusting module 12, a fixed pulley 13, a counterweight block 15, a counterweight adjusting rope 16 and a flexible adsorption head 18; the three sets of the components are uniformly distributed and installed on the two-dimensional platform component in the circumferential direction; during the use at first need be according to 1/6 of the weight of speculum 5 of difference for the weight of corresponding balancing weight 15, the balancing weight is adjusted rope 16 and is hung to balancing weight 15 through fixed pulley 13 one side, one side hangs for adsorbing flexible absorption head 18 on speculum 5, fixed pulley 13 is fixed on adjustment module 12, adjustment module 12 can adapt to the speculum 5 of different bores for cantilever structure, balancing weight is adjusted rope 16 and is required smoothness and elasticity less, so that reduce with fixed pulley 13 between the frictional force increase balancing weight 15 sensitivity of adjusting, flexible absorption head 18 produces different curvature radius's change through atmospheric pressure size and accomplishes the flexible absorption to different bore speculums 5.
The pose adjusting assembly consists of an adjusting module 12, a piezoelectric ceramic actuator 11, a pose adjusting rod 17 and a flexible adsorption head 18; the three sets of the components are uniformly distributed and installed on the two-dimensional platform component in the circumferential direction; when the flexible adsorption device is used, the flexible adsorption head 18 is used for adsorbing the reflectors 5 with different calibers and curvatures, the three piezoelectric ceramic actuators 11 are adjusted to complete the integral axial lifting of the reflectors 5 or the inclination adjustment of the reflectors 5, and the piezoelectric ceramic actuators 11 are high-precision moving parts and can realize continuous high-precision adjustment within the range allowed by the axial load; the pose adjusting rod 17 is a rigid member and is used for reducing the shaking caused by air flow in the adjusting process of the reflector 5, and a flexible structure is adopted at the interface of the pose adjusting rod and the bottom flexible adsorption head 18 so as to reduce the radial deformation of the reflector 5 caused by the rigid member; the adjusting module 12 is a cantilever structure and can adapt to the reflectors 5 with different calibers.
A suspended precise adjusting device for the pose of a multilayer nested reflector comprises the following steps:
the first step is as follows: mounting the front spoke plate supporting component 22 and the front spoke plate fixing component 21 on the bottom cover plate 2 and integrally mounting on the underframe 1;
the second step: placing the front spoke plate 19 on the supporting plate 20, placing the supporting plate 20 on the front spoke plate supporting component 22, adjusting the three fine-adjustment devices 226 to enable the readings of the three high-precision force sensors 225 to be the same, testing the levelness of the front spoke plate 19, and stopping when the requirements are met; the fixing nut 214 is locked, and the support plate 20 is pressed by the fixing arm 215.
The third step: the innermost mirror 5 is placed in the groove of the front web 19;
the fourth step: mounting the measuring bracket 3 on the bottom cover plate 2, and adjusting the distance between the non-contact sensor 4 and the outer side surface of the reflector 5 to be proper;
the fifth step: the weight of the balancing weight 15 is adjusted, the adjusting module 12 is adapted to the sizes of the reflectors 5 with different calibers, and the flexible adsorption of the reflectors 5 is completed through the flexible adsorption head 18;
and a sixth step: controlling the three piezoceramic actuators 11 to integrally and axially lift the reflector 5, and stopping after the reflector 5 is lifted to a certain height (about hundreds of microns), wherein the bottom end of the reflector 5 does not exceed the upper edge of the groove of the front spoke 19;
the seventh step: according to the inclination angle change measured by the non-contact sensor 4 and a corresponding adjusting control instruction, firstly, the X-direction movement module 7 and the Y-direction movement module 14 are adjusted to realize integral moving centering adjustment of the reflector 5; then adjusting two piezoelectric ceramic actuators 11 to realize the inclination angle adjustment of the reflector 5;
eighth step: the reflector 5 is fixed by gluing, the selected glue is epoxy resin glue, the glue is injected into the gap between the reflector 5 and the groove of the front spoke plate 19, and the curing is carried out thoroughly;
the ninth step: and repeating the second step to the eighth step, and sequentially installing the reflectors 5 from the innermost side to the outermost side until all reflector layers are adjusted.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. The utility model provides a suspension type precision adjustment device of nested speculum position appearance of multilayer which characterized in that: the device comprises a bottom frame (1), a bottom cover plate (2), a reflector (5), an upright post (10), a front spoke plate (19), a supporting plate (20), a front spoke plate fixing component (21), a front spoke plate supporting component (22), a two-dimensional platform component, a pose measuring component, a counterweight adjusting component and a pose adjusting component; the pose measuring assembly is composed of a measuring bracket (3) and a non-contact sensor (4) and is used for measuring a pose dip angle of the reflecting mirror (5) in the adjusting process; the counterweight adjusting component consists of an adjusting module (12), a fixed pulley (13), a counterweight block (15), a counterweight adjusting rope (16) and a flexible adsorption head (18) and is used for offsetting the deformation caused by the self weight of the reflector (5) according to different counterweights; the pose adjusting assembly consists of an adjusting module (12), a piezoelectric ceramic actuator (11), a pose adjusting rod (17) and a flexible adsorption head (18) and is used for reducing deformation caused by adjustment of the reflector (5) through flexible vacuum adsorption formed by the flexible adsorption head (18); the two-dimensional platform assembly consists of an L-shaped bottom plate (6), an X-direction movement module (7), a middle support plate (8), an upper support plate (9) and a Y-direction movement module (14) and is used for realizing integral movable centering adjustment of the reflector (5) in a two-dimensional plane range; the front wheel disc fixing component (21) is used for fixing the supporting plate (20) so as to reduce the irreversible deformation of the front wheel disc (19) before and after the application and unloading of the acting force, and further reduce the deformation of the reflector (5) after the installation and adjustment.
2. A front web support assembly (22) as set forth in claim 1, wherein: the front spoke plate supporting component (22) consists of a supporting bottom plate (221), a supporting cantilever (222), a locking nut (223), a locking stud (224), a high-precision force sensor (225), a fine adjustment device (226) and a fine adjustment support (227), is used for realizing high-precision measurement of the weight of a supporting splint (20) and a bearing object of the supporting splint, and completes the precision adjustment of the position of the supporting splint (20) in a horizontal plane through the fine adjustment effect of the fine adjustment device (226).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210413902.2A CN114779428B (en) | 2022-04-14 | 2022-04-14 | Suspension type precise adjustment device for pose of multilayer nested reflecting mirror |
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| CN202210413902.2A CN114779428B (en) | 2022-04-14 | 2022-04-14 | Suspension type precise adjustment device for pose of multilayer nested reflecting mirror |
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| CN114779428B CN114779428B (en) | 2023-08-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117055189A (en) * | 2023-10-11 | 2023-11-14 | 长春通视光电技术股份有限公司 | Coaxial reflector bonding positioning device and positioning method |
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