CN114774875A

CN114774875A - Film coating device

Info

Publication number: CN114774875A
Application number: CN202210427594.9A
Authority: CN
Inventors: 赵显伟
Original assignee: Wuhan United Imaging Healthcare Co Ltd
Current assignee: Wuhan United Imaging Healthcare Co Ltd
Priority date: 2022-04-22
Filing date: 2022-04-22
Publication date: 2022-07-22
Anticipated expiration: 2042-04-22
Also published as: CN114774875B

Abstract

The invention relates to a coating device. A coating device is used for coating a member to be coated, and comprises: a vacuum chamber; the device comprises at least one rotary table, a vacuum chamber and a base, wherein the at least one rotary table is positioned in the vacuum chamber, a disc cavity for accommodating a part to be coated is formed in the rotary table, a disturbance rod is arranged in the disc cavity, and a gap is formed between the disturbance rod and the bottom wall of the disc cavity; and the transmission mechanism is positioned in the vacuum chamber and is used for driving the rotating disc to rotate around the central axis of the rotating disc relative to the disturbance rod, so that the disturbance rod changes the rolling direction of the part to be coated in the disc cavity. When the turntable rotates relative to the disturbance rod, friction cannot be generated between the disturbance rod and the bottom wall of the disk cavity due to the existence of the gap, so that scratch objects generated by friction between the disturbance rod and the bottom wall of the disk cavity can be prevented from being adhered to the surface of the piece to be coated, and the film uniformity on the surface of the piece to be coated can be further ensured as much as possible.

Description

Film coating device

Technical Field

The invention relates to the technical field of coating devices, in particular to a coating device.

Background

The bearing is widely applied in various industries, and the performance and the quality of the bearing directly influence the performance and the service life of corresponding complete machine products, so the requirement on the bearing is developed towards the direction of high performance and long service life, thereby higher requirements on the lubricating property and the wear resistance of balls and channels in the bearing are provided. Under such a development demand, highly precise ball and channel plating has been carried out.

In the field of medical device application, a core component CT bulb of a CT machine is mainly used for generating X-rays so as to irradiate various parts of a human body/animal to check pathological conditions of the various parts. When the CT machine is in a working state, the CT bulb tube is in a high-temperature high-vacuum high-rotation-speed running state. The bearing is used as a high-rotation-speed functional component of the CT bulb tube, and not only needs good lubricity and wear resistance, but also needs to play a role in conducting electricity at a high rotation speed, and the performance of the bearing determines the performance and the service life of the CT bulb tube. In order to make the bearing have good lubricity, wear resistance and conductivity, coating a film on the ball of the bearing has become an essential requirement when the bearing is prepared.

However, when the existing coating device is used for coating the ball, the uniformity of the coating on the surface of the ball is poor, and the requirement of high-end equipment on the performance of the bearing is not met.

Disclosure of Invention

Therefore, it is necessary to provide a coating device capable of improving the uniformity of the coating on the surface of the ball, aiming at the technical problem that the coating uniformity of the coating on the surface of the ball is poor when the conventional coating device is used for coating the ball.

A coating device is used for coating a member to be coated, and comprises:

a vacuum chamber;

the at least one rotating disc is positioned in the vacuum chamber, a disc cavity for accommodating the part to be coated is formed in the rotating disc, a disturbance rod is arranged in the disc cavity, and a gap is formed between the disturbance rod and the bottom wall of the disc cavity; and

and the transmission mechanism is positioned in the vacuum chamber and used for driving the turntable to rotate around the central axis of the turntable relative to the disturbance rod, so that the disturbance rod changes the rolling direction of the part to be coated in the cavity of the turntable.

In one embodiment, the transmission mechanism comprises a turntable and a transmission member, the at least one turntable is arranged on the turntable, and the turntable is driven by the transmission member to rotate around a central axis of the turntable;

the film coating device further comprises a connecting rod corresponding to the disturbing rod, the connecting rod is fixed on the vacuum chamber or the rotary table, so that the rotary table rotates relative to the disturbing rod when rotating around the central axis of the rotary table, and at least one end of the disturbing rod is fixed on the corresponding connecting rod.

In one embodiment, one of the turntables is a central turntable, the central turntable and the turntable rotate coaxially, and a connecting rod corresponding to a disturbance rod in the central turntable is fixed on the vacuum chamber.

In one embodiment, at least one of the turntables is a planetary turntable, the central axis of the planetary turntable and the central axis of the turntable are arranged at intervals, a transmission unit corresponding to the planetary turntable is arranged on the turntable, and the transmission unit drives the corresponding planetary turntable to rotate around the central axis of the transmission unit; and a connecting rod corresponding to the disturbance rod in the planetary turntable is fixed on the turntable.

In one embodiment, the disturbance rod has a first end and a second end along the length direction, and the first end is close to the central axis of the turntable relative to the second end;

at least one disturbing rod is a first-type disturbing rod, the first end of the first-type disturbing rod is fixed on the corresponding connecting rod, and one end of the connecting rod connected with the first end is positioned at the center of the rotary disc.

In one embodiment, at least one of the disturbance rods is a first-type disturbance rod, and the sum of the diameter of the first-type disturbance rod and the height of the gap is 1/6-1/3 of the diameter of the ball to be coated.

In one embodiment, the first type of perturbing rods are straight or curved rods.

In one embodiment, the disturbance rod is provided with a first end and a second end along the length direction, and the first end is close to the central axis of the turntable relative to the second end;

at least one disturbance rod is a second type disturbance rod, and the first end of the second type disturbance rod is arranged at intervals with the central axis of the corresponding turntable; along the direction of rotation of carousel, the rear side surface of second type disturbance stick is the convex cambered surface, the first end of second type disturbance stick is located the place ahead of second end.

In one embodiment, the sum of the diameter of the second type disturbance rod and the height of the gap is 1/6-1/2 of the diameter of the ball to be coated.

In one embodiment, the distance between the first end of the disturbance rod of the second type and the central axis of the corresponding turntable is 1/4-1/2 of the radius of the turntable.

In one embodiment, the bottom wall of the disc chamber comprises at least an inclined portion connected to the side wall of the disc chamber along a radially outward end of the turntable; the inclined portion is gradually inclined downward from the outside to the inside in the radial direction of the rotating disk.

In one embodiment, the bottom wall of the tray cavity further comprises a flat bottom portion connected to the inclined portion, and the inclined portion surrounds the periphery of the flat bottom portion.

In one embodiment, the disturbance rod is provided with a first end and a second end along the length direction, and the first end is close to the central axis of the turntable relative to the second end; the second end is located at an outer edge of the disc chamber in a radial direction of the turntable.

In one embodiment, a plurality of the disturbance rods are sequentially arranged in the disc cavity along the circumferential direction of the rotating disc.

In one embodiment, the transmission mechanism comprises a rotary table and a transmission piece, and the rotary table rotates around a central axis of the rotary table under the transmission of the transmission piece; one of the turntables is a central turntable, and the central turntable and the turntable rotate coaxially; at least one of the turntables is a planetary turntable, the planetary turntable is positioned on the outer side of the central turntable, a transmission unit corresponding to the planetary turntable is arranged on the turntable, and the transmission unit transmits the corresponding planetary turntable to rotate around the central axis of the transmission unit;

the coating device also comprises a plurality of target sources connected with the vacuum chamber;

the target source is provided with a first angle and a second angle which can be switched mutually, and the target surface of the target source faces to the central turntable at the first angle; when the target surface of the target source faces the moving area of the planetary turntable at the second angle, and when the planetary turntable moves to be opposite to the target surface of the target source, the projection of an emission area formed when the target source emits target material particles on the planetary turntable covers the planetary turntable.

In the film coating device, the disturbance rod is arranged in the disc cavity of the rotary disc. When the transmission mechanism drives the rotating disc to rotate around the central axis of the rotating disc relative to the disturbance rod, the rotating disc can drive the part to be coated in the disc cavity to rotate relative to the disturbance rod along the circumferential direction of the rotating disc together. The rotation of carousel drives and treats the in-process that the barrier of coating film spare overcoming disturbance stick made the coating film spare of treating move from one side of disturbance stick to the opposite side of disturbance stick, and the motion state of treating the coating film spare then receives the interference of disturbance stick to the disturbance stick makes the rolling direction change of treating the coating film spare at the dish intracavity of carousel, and then is favorable to improving the rete homogeneity on coating film spare surface. When the turntable rotates relative to the disturbance rod, friction cannot be generated between the disturbance rod and the bottom wall of the disc cavity due to the existence of the gap, so that the situation that scratch objects generated by friction between the disturbance rod and the bottom wall of the disc cavity are adhered to the surface of the piece to be coated can be avoided, and the film layer uniformity of the surface of the piece to be coated can be ensured as much as possible.

Drawings

FIG. 1 is a schematic structural view of a coating apparatus according to some embodiments;

FIG. 2 is a schematic diagram of the connection of the turntable, the first type of disturbance rods and the connection rods according to some embodiments;

FIG. 3 is a schematic view of the connection of the turntable, the first type of disturbance rod and the connection rod according to other embodiments;

FIG. 4 is a schematic diagram of the connection of a turntable, a second type of disturbance rod and a connection rod according to some embodiments;

FIG. 5 is a cross-sectional view of the connection of the turntable and the disturbance rod of some embodiments;

FIG. 6 is a cross-sectional view of a connection of a turntable and a disturbance rod of further embodiments.

The reference numbers illustrate:

a coating device 100;

a vacuum chamber 110;

a target source 120; a connecting member 121;

a turntable 130; a central turntable 131; a planetary turntable 132; a disc chamber 101; a bottom wall 1011; a flat bottom portion 1011 a; the inclined portion 1011 b; a sidewall 1012;

a disturbance rod 140; a first type of disturbance rod 141; a second type of disturbance bar 142;

a turntable 150;

a connecting rod 160; the first connecting rod 161; a second connecting rod 162;

a first fixing bar 171; a second fixed bar 172;

the rod 180 is fixed.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will recognize without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the present invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the second feature or the first and second features may be indirectly contacting each other through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1, an embodiment of the present application provides a coating apparatus 100. The plating device 100 includes: a vacuum chamber 110, at least one turntable 130, and a drive mechanism (not shown).

The coating device 100 is used for coating a member to be coated (not shown). The part to be coated can be a ball of a bearing in a CT bulb tube. The part to be coated can also be a ball in parts of other mechanical equipment. The part to be coated can also be other parts to be coated besides the ball.

A target source 120 is disposed within the vacuum chamber 110. In the field of vacuum coating technology, the functions of the vacuum chamber 110 and the target source 120 are common knowledge and will not be described in detail herein.

As shown in fig. 1, in the present embodiment, the target sources 120 are respectively disposed on two opposite sidewalls of the vacuum chamber 110. Two target sources 120 are disposed on the top wall of the vacuum chamber 110. It is understood that the number and distribution of the target sources 120 is not limited thereto.

Both the turntable 130 and the transmission mechanism are located within the vacuum chamber 110. The turntable 130 has a disk cavity 101 therein, and the disk cavity 101 is used for accommodating a member to be coated. The transmission mechanism drives the turntable 130 to rotate around the central axis (i.e. along the circumferential direction of the turntable 130), and the turntable 130 can carry the to-be-coated members in the disk cavity 101 to rotate along the circumferential direction of the turntable 130 together, so that the to-be-coated members rotate relative to the target source 120, and the to-be-coated members in the disk cavity 101 are coated with a film uniformly. In the process that the turntable 130 carries the to-be-coated members in the disc cavity 101 to rotate along the circumferential direction of the turntable 130, the to-be-coated members can roll relative to the turntable 130 in the disc cavity 101, and the uniformity of coating can be improved due to the rolling of the to-be-coated members.

As shown in fig. 1 to 4, a disturbance rod 140 is disposed in the disk chamber 101 of the turntable 130. When the transmission mechanism drives the turntable 130 to rotate around the central axis of the turntable 130, the turntable 130 rotates relative to the disturbance rod 140, so that the turntable 130 carries the member to be coated to rotate relative to the disturbance rod 140 along the circumferential direction of the turntable 130.

When the member to be coated rotates with the turntable 130 along the circumferential direction of the turntable 130 to the position of the disturbance rod 140, the disturbance rod 140 can block the movement of the member to be coated in the circumferential direction of the turntable 130. Until the rotation of the turntable 130 drives the member to be coated to overcome the obstruction of the disturbance rod 140, the member to be coated moves from one side of the disturbance rod 140 to the other side of the disturbance rod 140, and at this time, the member to be coated can continue to rotate along the circumferential direction of the turntable 130 along with the turntable 130, thereby continuing coating. The rotation of the turntable 130 drives the member to be coated to overcome the obstruction of the disturbance rod 140, so that the movement state of the member to be coated is disturbed by the disturbance rod 140 in the process of moving the member to be coated from one side of the disturbance rod 140 to the other side of the disturbance rod 140, and the disturbance rod 140 changes the rolling direction of the member to be coated in the disc cavity 101 of the turntable 130, thereby being beneficial to improving the uniformity of the film layer on the surface of the member to be coated.

Referring to fig. 5 and 6, a gap 102 is formed between the disturbance rod 140 and the bottom wall 1011 of the disc cavity 101, and when the turntable 130 rotates relative to the disturbance rod 140, friction is not generated between the disturbance rod 140 and the bottom wall 1011 of the disc cavity 101 due to the existence of the gap 102, so that a scratch generated by friction between the disturbance rod 140 and the bottom wall 1011 of the disc cavity 101 can be prevented from being adhered to the surface of the workpiece to be coated, and the film layer uniformity of the surface of the workpiece to be coated can be ensured as much as possible.

In the coating device 100, the disturbance rod 140 is disposed in the disk cavity 101 of the turntable 130. When the transmission mechanism drives the turntable 130 to rotate around the central axis of the turntable 130 relative to the disturbance rod 140, the turntable 130 can drive the to-be-coated members in the disk cavity 101 to rotate relative to the disturbance rod 140 along the circumferential direction of the turntable 130. The rotation of the turntable 130 drives the to-be-coated member to overcome the obstruction of the disturbance rod 140, so that in the process that the to-be-coated member moves from one side of the disturbance rod 140 to the other side of the disturbance rod 140, the movement state of the to-be-coated member is disturbed by the disturbance rod 140, and therefore the disturbance rod 140 changes the rolling direction of the to-be-coated member in the disc cavity 101 of the turntable 130, and the improvement of the film uniformity of the surface of the to-be-coated member is facilitated. When the turntable 130 rotates relative to the disturbance rod 140, friction cannot be generated between the disturbance rod 140 and the bottom wall 1011 of the disc cavity 101 due to the existence of the gap 102, so that a scratch generated by friction between the disturbance rod 140 and the bottom wall 1011 of the disc cavity 101 can be prevented from being adhered to the surface of the workpiece to be coated, and the film layer uniformity of the surface of the workpiece to be coated can be ensured as much as possible.

In one embodiment, the coating device 100 further comprises a driving mechanism (not shown) disposed outside the vacuum chamber 110. The driving structure is, for example, a motor or the like. The driving mechanism is used for driving the transmission mechanism to move, so that the transmission mechanism drives the turntable 130 to rotate around the central axis thereof relative to the disturbance rod 140.

Referring to fig. 2-4, in one embodiment, the disturbance rod 140 has a first end 140a and a second end 140b along the length direction. The first end 140a is proximate the central axis of the turntable 130 relative to the second end 140 b. Because the first end 140a and the second end 140b have different distances from the central axis of the turntable 130, that is, the first end 140a and the second end 140b have different positions along the radial direction of the turntable 130, the disturbance rod 140 has a certain size along the radial direction of the turntable 130, and further, the disturbance rod 140 can obstruct and disturb the movement of the member to be coated in the circumferential direction of the turntable 130, so that the rolling direction of the member to be coated in the disc cavity 101 of the turntable 130 is changed.

Referring to fig. 1, in one embodiment, the drive mechanism includes a turntable 150 and a drive member (not shown). The transmission member is, for example, a gear or the like. The at least one turntable 130 is disposed on the turntable 150. The turntable 150 rotates around the central axis thereof under the transmission of the transmission member, so that the turntable 130 can rotate together with the turntable 150, which is beneficial to uniformly coating the film on the to-be-coated member in the disc cavity 101.

Referring to fig. 1 to 4, the coating apparatus 100 further includes a connection rod 160 corresponding to the disturbance rod 140, and the connection rod 160 is fixed to the vacuum chamber 110 or the turntable 150 such that the turntable 130 rotates about its central axis with respect to the disturbance rod 140. At least one end of the disturbance rod 140 is fixed to the corresponding connection rod 160.

Specifically, since the connection rod 160 is fixed to the vacuum chamber 110 or the turntable 150, and at least one end of the disturbance rod 140 is fixed to the corresponding connection rod 160, it is convenient to realize the rotation of the turntable 130 relative to the disturbance rod 140 when rotating around its central axis.

The connecting rod 160 may be affixed to the turntable 150 or vacuum chamber 110 for the connecting rod 160 to which the perturbation rod 140 is attached for different turrets 130, as described in more detail below in various embodiments.

Referring to fig. 1, in some embodiments, one of the turntables 130 is a central turntable 131, and a central axis of the central turntable 131 coincides with a central axis of the turntable 150, so that the central turntable 131 can rotate coaxially with the turntable 150. The center turntable 131 may be fixed to the turntable 150. When the central turntable 131 and the turntable 150 rotate coaxially, the members to be coated in the disk cavity 101 of the central turntable 131 can be driven to rotate around the central axis of the central turntable 131 and the central axis of the turntable 150, so that the members to be coated in the disk cavity 101 of the central turntable 131 rotate relative to the target source 120, and the members to be coated in the disk cavity 101 of the central turntable 131 can be coated uniformly.

In one embodiment, the coating device 100 further comprises a driving member (not shown) disposed outside the vacuum chamber 110. The driving member is, for example, a motor or the like. The driving member is used to drive the transmission member to rotate, so that the transmission member drives the turntable 150 to rotate, thereby rotating the central turntable 131 and the turntable 150 synchronously.

Referring to fig. 1, in some embodiments, the connecting rod 160 corresponding to the disturbing rod 140 in the central turntable 131 is a first connecting rod 161. The first connection rod 161 is fixed to the vacuum chamber 110. In this embodiment, the first ends 140a of the disturbance rods 140 in the central turntable 131 are fixed to the corresponding first connection rods 161. Because the first connecting rod 161 is fixed to the vacuum chamber 110, the disturbing rod 140 in the central turntable 131 is relatively fixed to the vacuum chamber 110, and the central turntable 131 can rotate relative to the disturbing rod 140 when rotating around its central axis, so as to change the rolling direction of the member to be coated in the central turntable 131.

In other embodiments, the second ends of the disturbance rods in the disk cavity of the central turntable may also be fixed to the corresponding first connection rods. Or the second end and the first end of the disturbance rod in the disk cavity of the central turntable are respectively fixed on the corresponding first connecting rods.

As shown in fig. 1, in some embodiments, the plating device 100 further includes a first fixing bar 171 corresponding to the first connection bar 161. The first connection rod 161 extends in the axial direction of the central turntable 131, one end of the first connection rod 161 is connected to the disturbance rod 140 in the central turntable 131, and the other end of the first connection rod 161 is connected to the first fixing rod 171. The first fixing bar 171 extends in a radial direction of the central turntable 131, and one end of the first fixing bar 171, which is away from the first connection bar 161, is fixed to the vacuum chamber 110, so that the first connection bar 161 and the disturbance bar 140 in the central turntable 131 are fixed relative to the vacuum chamber 110.

In addition, by making the extending direction of the first connecting rod 161 along the axial direction of the central turntable 131 and the extending direction of the first fixing rod 171 along the radial direction of the central turntable 131, the shielding of the target particles emitted from the target source by the first connecting rod 161 and the first fixing rod 171 during the coating process can be avoided as much as possible, and the influence on the uniformity of the film layer can be avoided as much as possible.

In other embodiments, the extending direction of the first connecting rod may be inclined to the axial direction of the central rotating disk, and the extending direction of the first fixing rod may be inclined to the radial direction of the central rotating disk. Instead of the first fixing rod, an end of the first connecting rod remote from the disturbance rod may be directly fixed to the top wall of the vacuum chamber.

Referring to fig. 1, in some embodiments, at least one of the turntables 130 is a planetary turntable 132. In the present embodiment, the plurality of planetary turntables 132 are arranged in order in the circumferential direction of the turntable 150. The turntable 150 is provided with a transmission unit corresponding to the planetary turntable 132, so that when the turntable 150 rotates around its central axis under the transmission of the transmission member, the planetary turntable 132 and the transmission unit corresponding to the planetary turntable 132 can be driven to rotate around the central axis of the turntable 150 together. The transmission unit is, for example, a gear or the like.

Since the central axis of the planetary turntable 132 is spaced from the central axis of the turntable 150, the turntable 150 rotates around its central axis under the driving of the driving member, and simultaneously carries the planetary turntable 132 to revolve around the central axis of the turntable 150. Meanwhile, the transmission unit transmits the corresponding planetary turntable 132 to rotate around the central axis thereof. Therefore, the planetary turntable 132 can revolve around the central axis of the turntable 150 and rotate around the central axis thereof, so that the uniform coating of the to-be-coated member in the disc cavity 101 of the planetary turntable 132 is facilitated.

In other embodiments, the number of planetary discs may be one.

In one embodiment, the plating device 100 further includes a driving unit (not shown) located outside the vacuum chamber 110 and connected to the turntable 150. The drive unit is, for example, a motor or the like. The driving unit is used for driving the transmission unit to act, so that the transmission unit drives the planetary turntable 132 to rotate around the central axis of the transmission unit, and the planetary turntable 132 rotates relative to the disturbance rod 140 in the planetary turntable 132.

Referring to fig. 1, in some embodiments, the connecting rod 160 corresponding to the disturbance rod 140 in the planetary turntable 132 is a second connecting rod 162. In this embodiment, the first ends 140a of the disturbance rods 140 in the planetary turntable 132 are fixed to the corresponding second connecting rods 162, and the second connecting rods 162 are fixed to the turntable 150, so that the disturbance rods 140 in the planetary turntable 132 are fixed relative to the turntable 150. And because the transmission unit corresponding to the planetary turntable 132 is arranged on the turntable 150, when the transmission unit drives the planetary turntable 132 to rotate around the central axis thereof, the planetary turntable 132 and the disturbance rod 140 in the planetary turntable 132 rotate relatively, so that the disturbance rod 140 in the planetary turntable 132 can block the film-coating-waiting member in the disk cavity 101 of the planetary turntable 132 along the circumferential direction of the planetary turntable 132 when the planetary turntable 132 rotates, so as to change the rolling direction of the film-coating-waiting member.

In other embodiments, the second ends of the disturbance rods in the disk cavities of the planetary turntables can be fixed to the corresponding second connecting rods. Or the second end and the first end of the disturbance rod in the disk cavity of the planetary turntable are respectively fixed on the corresponding second connecting rod.

As shown in fig. 1, in some embodiments, the plating device 100 further includes a second fixing bar 172 corresponding to the second connection bar 162. The second connecting rod 162 extends in the axial direction of the planetary rotor 132, one end of the second connecting rod 162 is connected to the disturbance rod 142, and the other end of the second connecting rod 162 is connected to the second fixed rod 172. The second fixed rod 172 extends in a radial direction of the planetary turntable 132, and an end of the second fixed rod 172, which is away from the second connecting rod 162, is fixed to the turntable 150, so that the second connecting rod 162 and the disturbance rod 140 in the planetary turntable 132 are fixed relative to the turntable 150.

In addition, the extending direction of the second connecting rod 162 is along the axial direction of the planetary turntable 132, and the extending direction of the second fixing rod 172 is along the radial direction of the planetary turntable 132, so that the shielding of the target particles emitted by the target source by the second connecting rod 162 and the second fixing rod 172 in the film coating process can be avoided as much as possible, and the influence on the uniformity of the film layer can be avoided as much as possible.

As shown in fig. 1, a connecting rod 180 may be disposed on the turntable 150, and an end of the second fixing rod 172, which is far away from the second connecting rod 162, may be fixed to the connecting rod 180, so as to facilitate fixing of the second fixing rod 172 to the turntable 150. Preferably, the extending direction of the connecting rod 180 is along the axial direction of the planetary turntable 132, so as to avoid shielding of target particles emitted by a target source during a coating process as much as possible, thereby avoiding influence on uniformity of a film layer as much as possible.

In other embodiments, the extending direction of the second connecting rod may be inclined to the axial direction of the planetary rotating disk, and the extending direction of the second fixing rod may be inclined to the radial direction of the planetary rotating disk.

As shown in fig. 1, in some embodiments, one of the at least one rotating disk 130 is a central rotating disk 131, and at least one rotating disk 130 is a planetary rotating disk 132. The planetary turntable 132 is located outside the central turntable 131, and therefore, the planetary turntable 132 revolves around the central turntable 131 while revolving around the central axis of the turntable 150.

Referring to fig. 2 and 3, in some embodiments, at least one perturbation rod 140 is a first type perturbation rod 141. When the turntable 130 carries the member to be coated to rotate, the first-type disturbance rod 141 can be crossed by the member to be coated. Specifically, when the member to be coated rotates to the position of the first type of disturbance rod 141 along the circumferential direction of the turntable 130 along with the turntable 130, the turntable 130 continues to rotate to drive the member to be coated to overcome the obstruction of the first type of disturbance rod 141, so that the member to be coated is overturned from one side of the first type of disturbance rod 141 to the other side of the first type of disturbance rod 141, and further, the motion state of the member to be coated can be disturbed when the member to be coated is overturned beyond the first type of disturbance rod 141, so as to change the rolling direction of the member to be coated in the disk cavity 101, which is beneficial to improving the film uniformity on the surface of the member to be coated.

Specifically, the sum of the diameter of the first-type disturbance rod 141 and the height of the gap 102 can be smaller than the height of the member to be coated, so as to facilitate the member to be coated to cross over the disturbance rod 140.

In some specific embodiments, the member to be coated is a ball to be coated. The sum of the diameter of the first disturbance rod 141 and the height of the gap 102 is 1/6-1/3 of the diameter of the ball to be coated. The sum of the diameter of the first type disturbance rod 141 and the height of the gap 102 is less than or equal to 1/3 of the diameter of the ball to be coated, so that the ball to be coated can conveniently climb over the first type disturbance rod 141. Since the sum of the diameter of the first-type disturbance rod 141 and the height of the gap 102 is greater than or equal to 1/6 of the diameter of the ball to be coated, the first-type disturbance rod 141 can play a sufficient blocking role for the ball to be coated, so that the ball to be coated changes the rolling direction after crossing over the first-type disturbance rod 141.

As shown in fig. 2, in some embodiments, the first-type disturbance bars 141 may be straight bars.

In other embodiments, the first type agitating bars 141 may also be curved bars, as shown in fig. 3.

As shown in fig. 2 and 3, in some embodiments, the first ends 140a of the first type of disturbance bars 141 are fixed to the corresponding connecting bars 160. It will be appreciated that the first type of disturbance rod 141 is disposed within the central turntable 131 and the corresponding connecting rod 160 is the first connecting rod 161. The corresponding connecting rod 160 is the second connecting rod 162 when the first type of disturbance rod 141 is arranged in the planetary turntable 132.

One end of the connection rod 160 connected to the first end 140a (i.e., the lower end of the connection rod 160 in fig. 2 and 3) is located at the center of the turntable 130. That is to say, the first end 140a of the first type of disturbance rod 141 extends to the center of the turntable 130 approximately, so that the member to be coated can be prevented from bypassing the first type of disturbance rod 141 from the side of the first end 140a of the first type of disturbance rod 141 close to the center of the turntable 130, and the member to be coated can be effectively ensured to climb over from one side of the first type of disturbance rod 141 to the other side of the disturbance rod 140 when rotating along with the turntable 130, that is, the effect of the first type of disturbance rod 141 on the member to be coated is ensured.

In addition, the first end 140a of the first-type disturbance rod 141 extends to the center of the turntable 130 approximately, so that the first-type disturbance rod 141 can disturb the member to be coated near the center of the turntable 130, and more members to be coated can be placed in the turntable 130 at the same time, thereby improving the efficiency of single coating.

Referring to FIG. 4, in some embodiments, at least one of the disturbance bars 140 is a second type of disturbance bar 142. When the turntable 130 carries the member to be coated to rotate, the second disturbance rod 142 cannot be crossed by the member to be coated.

As shown in fig. 4, in the present embodiment, the first end 140a of the second type disturbance rod 142 is spaced from the central axis of the corresponding turntable 130, so that the first end 140a of the second type disturbance rod 142 is at a certain distance from the central axis of the corresponding turntable 130.

The second type of disturbance bar 142 is an arc-shaped bar. In the rotating direction W of the turntable 130, the rear side surface 140c of the second type disturbance rod 142 is a convex arc surface, and the front side surface 140d of the second type disturbance rod 142 is a concave arc surface. The first end 140a of the second type of disturbance bar 142 is located forward of the second end 140 b.

When the member to be coated rotates to the rear side surface 140c of the disturbance rod 140 along with the turntable 130, since the member to be coated cannot climb over the second type disturbance rod 142, the member to be coated continuously rolls forward along with the rotation of the turntable 130, i.e. rolls from the second end 140b to the first end 140a along the rear side surface 140c of the second type disturbance rod 142. The member to be coated can bypass the disturbance rod 142 from between the first end 140a of the disturbance rod 142 of the second type and the center of the turntable 130 until the member to be coated rolls to the first end 140a, and thus can move to the front side of the disturbance rod 142 of the second type. After that, the member to be coated continues to rotate along with the turntable 130 along the circumferential direction of the turntable 130, so as to continue coating. Therefore, in the process that the member to be coated rolls from the second end 140b to the first end 140a along the rear side surface 140c of the disturbance rod 140 due to the obstruction of the second disturbance rod 142, the motion state of the member to be coated is disturbed, and the disturbance of the member to be coated is realized, so that the rolling direction of the member to be coated can be changed, and the film uniformity on the surface of the member to be coated is improved.

In some embodiments, the member to be coated is a ball to be coated. The sum of the diameter of the second disturbance rod 142 and the height of the gap 102 is 1/6-1/2 of the diameter of the ball to be coated, and within the range, the second disturbance rod 142 can partially or completely block the ball to be coated from turning over. The sum of the diameter of the second type of disturbance bar 142 and the height of the gap 102 is, for example, 1/6, 1/4, 1/3, 1/2 of the diameter of the ball to be coated.

In some specific embodiments, the distance between the first end 140a of the second type of disturbance rod 142 and the central axis of the corresponding turntable 130 is 1/4-1/2 of the radius of the turntable 130, so as to facilitate the film to be coated to bypass the second type of disturbance rod 142 from the first end 140a of the second type of disturbance rod 142 to the center of the turntable 130. Such as 1/4, 1/3, 1/2 of the radius of the turntable 130.

As shown in fig. 1-4, in some embodiments, the second end 140b of the disturbance bar 140 is located at an outer edge of the disk chamber 101 in a radial direction of the turntable 130. As will be understood from fig. 5 and fig. 6, the disk chamber 101 is a cavity, the bottom wall of the disk chamber 101 is used for supporting the member to be coated, and the side wall 1012 of the disk chamber 101 forms a barrier for the member to be coated. Because the second end 140b of the disturbance rod 140 is located at the radial outer edge of the disk cavity 101 along the turntable 130, that is, the second end 140b of the disturbance rod 140 extends to the side wall 1012 of the disk cavity 101, the member to be coated can be prevented from moving to the other side of the disturbance rod 140 by bypassing the second end 140b of the disturbance rod 140, and then the disturbance rod 140 can be effectively ensured to have a disturbance effect on the member to be coated, so that the rolling direction of the member to be coated can be effectively changed.

In some embodiments, the disk cavity 101 is provided with a plurality of disturbance rods 140 sequentially arranged along the circumferential direction of the rotating disk 130, so that the disturbance effect on the member to be coated can be enhanced, and the uniformity of the film layer can be further effectively improved. Two, three, four, or more disturbance bars 140 may be disposed within the disk cavity 101 of a single turntable 130.

Preferably, the plurality of disturbance rods 140 provided in the disk chamber 101 are uniformly arranged, so that the uniformity of the film layer can be more effectively improved.

It should be noted that, the number of the disturbance rods 140 disposed in the disk cavity 101 of any one of the rotating disks 130 may be one, and the structure of the disturbance rod 140 in any one of the embodiments described above may be adopted, for example, the first type disturbance rod 141 or the second type disturbance rod 142 in any one of the embodiments.

A plurality of disturbance rods 140 may be disposed in the disk cavity 101 of any one of the rotating disks 130, the structures of the plurality of disturbance rods 140 may be identical, and the structure of the disturbance rod 140 in any one of the above embodiments, for example, the first-type disturbance rod 141 or the second-type disturbance rod 142 in any one of the above embodiments, may be adopted.

A plurality of disturbance rods 140 may be disposed in the disk cavity 101 of any one of the turntables 130, and the plurality of disturbance rods 140 may have different structures, and may include a combination of the disturbance rods 140 in any number of different embodiments, such as a combination of the first type disturbance rods 141 and the second type disturbance rods 142.

A plurality of disturbance rods 140 may be disposed in the disk chamber 101 of any one of the rotating disks 130, and among the plurality of disturbance rods 140, some of the disturbance rods 140 have different structures and some of the disturbance rods 140 have the same structure. Of the plurality of disturbance rods 140, disturbance rods 140 having different structures may include a combination of disturbance rods 140 in any number of different embodiments, such as a combination of disturbance rods 141 of the first type and disturbance rods 142 of the second type. The disturbance rods 140 with the same structure can adopt the structure of the disturbance rods 140 in any of the above embodiments, such as the disturbance rods 141 of the first type or the disturbance rods 142 of the second type in any of the embodiments.

The configuration of the disturbance rods 140 may be the same or different in different dials 130.

It can be understood that, during the rotation of the members to be coated along the circumferential direction of the rotating disc 130 along with the rotating disc 130, the members to be coated tend to move to the radial outer side of the rotating disc 130 under the action of centrifugal force, and this movement tendency is easy to cause a plurality of members to be coated to be stacked on the radial outer edge of the disc cavity 101 or to move to the other side of the disturbance rod 140 from the radial outer edge of the disc cavity 101 around the disturbance rod 140, so that the plurality of members to be coated are not effectively disturbed by the disturbance rod 140. Referring to fig. 5 and 6, in order to reduce or avoid the tendency of the member to be coated to move radially outward of the turntable 130, in some embodiments, the bottom wall 1011 of the disk chamber 101 includes at least an inclined portion 1011b, and the inclined portion 1011b is connected to the side wall 1012 of the disk chamber 101 along the radially outward end of the turntable 130; the inclined portion 1011b is gradually inclined downward from the outside to the inside in the radial direction of the turntable 130.

During the movement of the member to be coated with film along with the rotating disc 130, the member to be coated located on the inclined portion 1011b tends to move to the radial inner side of the rotating disc 130 under the action of gravity. The tendency of the to-be-coated member moving to the radial inner side of the turntable 130 under the action of gravity can offset or reduce the tendency of the to-be-coated member moving to the radial outer side of the turntable 130 under the action of centrifugal force, even the to-be-coated member moving to the radial inner side of the turntable 130, so that the to-be-coated member can be prevented from being stacked on the radial outer edge of the disk cavity 101 or moving to the other side of the disturbance rod 140 from the radial outer edge of the disk cavity 101 around the disturbance rod 140 as far as possible, and the to-be-coated member is guaranteed to be effectively disturbed by the disturbance rod 140 as far as possible.

Referring to fig. 5, in some embodiments, the bottom wall 1011 of the disk cavity 101 further includes a flat bottom portion 1011a connected to a sloped portion 1011b, the sloped portion 1011b surrounding the periphery of the flat bottom portion 1011 a. Due to the flat bottom part 1011a, the film to be coated positioned on the flat bottom part 1011a in the disc cavity 101 cannot be stacked towards the center of the turntable 130 under the action of gravity, so that a large amount of film to be coated is prevented from being stacked at the center of the turntable 130, and the uniformity of the film layer of the film to be coated is facilitated.

In one embodiment, the first type of disturbance rods 141 and the second type of disturbance rods 142 are disposed in the disk chamber 101, and the first type of disturbance rods 141 and the second type of disturbance rods 142 are arranged along the circumferential direction of the turntable 130. The film to be coated can sequentially pass through the first disturbance rod 141 and the second disturbance rod 142 or sequentially pass through the second disturbance rod 142 and the first disturbance rod 141 in the process of moving along with the turntable 130, so that the film to be coated is disturbed by both the first disturbance rod 141 and the second disturbance rod 142, the disturbance effect on the film to be coated is improved, and the uniformity of the film is improved.

In particular, in some embodiments, the second ends 140b of the first type of disturbance rods 141 are spaced from the side walls 1012 of the disk cavity 101 (e.g., the first type of disturbance rods 141 are disposed at the flat bottom portion 1011a), while the second ends 140b of the second type of disturbance rods 142 extend to the side walls 1012 of the disk cavity 101. The part to be coated passes through the first type disturbance rod 141 and the second type disturbance rod 142 in sequence in the process of moving along with the turntable 130. If the member to be coated bypasses the first type disturbance rod 141 from the second end 140b of the first type disturbance rod 141 and the side wall 1012 of the disk cavity 101, the member to be coated is not disturbed by the first type disturbance rod 141. Since the second ends 140b of the disturbance rods 142 of the second type extend to the side wall 1012 of the disk cavity 101, as the member to be coated continues to rotate with the turntable 130, the member to be coated which is not disturbed by the disturbance rods 141 of the first type is inevitably obstructed by the disturbance rods 142 of the second type, and is further disturbed by the disturbance rods 142 of the second type. Therefore, the first disturbance rod 141 and the second disturbance rod 142 play a dual role in effectively disturbing the member to be coated.

In other embodiments, the end of the connecting rod 160 connected to the first end 140a of the first type of disturbance rod 141 is located at the center of the turntable 130. That is, the first end 140a of the disturbance rod 141 of the first type extends substantially to the center of the turntable 130.

The part to be coated passes through the second disturbance rod 142 and the first disturbance rod 141 in sequence in the process of moving along with the turntable 130. If the member to be coated directly passes between the first end 140a of the disturbance rod 142 of the second type and the center of the turntable 130, the member to be coated is not disturbed by the disturbance rod 142 of the second type. Since the first end 140a of the first type disturbance rod 141 extends to approximately the center of the turntable 130, as the member to be coated continues to rotate along with the turntable 130, the member to be coated which is not disturbed by the second type disturbance rod 142 is inevitably hindered by the first type disturbance rod 141, and is further disturbed by the first type disturbance rod 141. Therefore, the first disturbance rod 141 and the second disturbance rod 142 play a dual role in effectively disturbing the member to be coated.

Referring to fig. 6, in still other embodiments, the bottom wall 1011 of the disk chamber 101 is gradually sloped downward from the outer edge of the bottom wall 1011 of the disk chamber 101 to the center of the bottom wall 1011 of the disk chamber 101, i.e., the bottom wall 1011 of the disk chamber 101 is sloped as a whole. That is, the bottom wall 1011 of the disk chamber 101 is integrally the inclined portion 1011 b.

Referring to fig. 1, in an embodiment, the transmission mechanism includes a turntable 150 and a transmission member (not shown), and the turntable 150 rotates around its central axis under the transmission of the transmission member. One of the turntables 130 is a center turntable 131, and the center turntable 131 rotates coaxially with the turntable 150. At least one of the turntables 130 is a planetary turntable 132, the planetary turntable 132 is located outside the central turntable 131, a transmission unit corresponding to the planetary turntable 132 is arranged on the turntable 150, and the transmission unit transmits the corresponding planetary turntable 132 to rotate around the central axis thereof, that is, the planetary turntable 132 can simultaneously revolve around the central axis of the turntable 150 and rotate around the central axis thereof.

The coating apparatus further includes a plurality of target sources 120 disposed in the vacuum chamber 110.

The target source 120 has a first angle and a second angle that can be switched with each other. At the first angle, the target surface of the target 120 faces the central turntable 131, and at this time, the member to be coated may be placed in the central turntable 131, so that the member to be coated in the central turntable 131 may be coated with the target 120 while the central turntable 131 and the turntable 150 rotate coaxially. Because the target sources 120 are sequentially arranged around the central axis of the central turntable 131, more uniform coating of the to-be-coated member in the central turntable 131 is facilitated.

A member to be coated is placed in the planetary turntable 132, and when the member to be coated in the planetary turntable 132 is coated, the target source 120 needs to be switched to a second angle. It will be appreciated that the turntable 150 rotates to carry the planetary turntable 132 around the central axis of the turntable 150, and thus the moving area of the planetary turntable 132 is an annular area around the central axis of the turntable 150. When a member to be coated in the planetary turntable 132 is coated, the planetary turntable 132 moves around the annular region and simultaneously rotates.

When the member to be coated in the planetary turntable 132 is coated, the target source 120 is switched to the second angle, and at this time, the target surface of the target source 120 faces the moving region (i.e. the annular region) of the planetary turntable 132, so that when the planetary turntable 132 moves to be opposite to the target surface of the target source 120, the target particles emitted by the target source 120 can be emitted onto the member to be coated in the planetary turntable 132 to coat the member to be coated.

When the planetary turntable 132 moves to be opposite to the target surface of the target source 120, the projection of the emission area formed when the target source 120 emits target particles on the planetary turntable 132 covers the planetary turntable 132, so that all the parts to be coated in the planetary turntable 132 can be ensured to be in the emission area, and further the parts to be coated in the planetary turntable 132 can be ensured to be coated.

Referring to FIG. 1, in one embodiment, a target source 120 is mounted to the vacuum chamber 110 by a connection 121. The target source 120 is angularly adjustably connected to the connecting member 121 so as to be switchable between a first angle and a second angle.

In one embodiment, the target source 120 is rotatably coupled to the coupling member 121. The target source 120 is rotated relative to the coupler 121 such that the angle of the target source 120 can be adjusted to switch between the first angle and the second angle.

In one embodiment, the first and second connecting structures are disposed on the connecting member 121. The target source 120 is at a first angle when attached to the first attachment structure and the target source 120 is at a second angle when attached to the second attachment structure. The first connecting structure is, for example, a screw hole or a clamping structure. The second connecting structure is, for example, a screw hole or a snap structure.

In other embodiments, the target source 120 and the connecting member 121 may be connected in other ways, such as by screwing, so that the target source 120 can be switched between the first angle and the second angle when rotated relative to the connecting member.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent should be subject to the appended claims.

Claims

1. A coating device is used for coating a member to be coated, and is characterized by comprising:

a vacuum chamber (110);

at least one rotating disc (130), wherein the at least one rotating disc (130) is positioned in the vacuum chamber (110), a disc cavity (101) for accommodating the piece to be coated is arranged in the rotating disc (130), a disturbance rod (140) is arranged in the disc cavity (101), and a gap (102) is formed between the disturbance rod (140) and the bottom wall (1011) of the disc cavity (101); and

the transmission mechanism is positioned in the vacuum chamber (110) and is used for driving the turntable (130) to rotate around the central axis of the turntable relative to the disturbance rod (140), so that the disturbance rod (140) changes the rolling direction of the part to be coated in the disc cavity (101).

2. The plating device according to claim 1,

the transmission mechanism comprises a rotary table (150) and a transmission piece, the at least one rotary table (130) is arranged on the rotary table (150), and the rotary table (150) is driven by the transmission piece to rotate around the central axis of the rotary table;

the film coating device further comprises a connecting rod (160) corresponding to the disturbance rod (140), the connecting rod (160) is fixed to the vacuum chamber (110) or the rotary table (150), so that the rotary table (130) rotates around the central axis of the rotary table relative to the disturbance rod (140), and at least one end of the disturbance rod (140) is fixed to the corresponding connecting rod (160).

3. The coating device according to claim 2, wherein one of the turntables (130) is a central turntable (131), the central turntable (131) rotates coaxially with the turntable (150), and a connecting rod (160) corresponding to the disturbance rod (140) in the central turntable (131) is fixed to the vacuum chamber (110).

4. The coating device according to claim 2, wherein at least one of the rotating discs (130) is a planetary rotating disc (132), the central axis of the planetary rotating disc (132) is spaced from the central axis of the rotating disc (150), the rotating disc (150) is provided with a transmission unit corresponding to the planetary rotating disc (132), and the transmission unit drives the corresponding planetary rotating disc (132) to rotate around the central axis thereof; and a connecting rod (160) corresponding to the disturbance rod (140) in the planetary turntable (132) is fixed on the turntable (150).

5. The plating device according to claim 2,

the disturbance rod (140) has a first end (140a) and a second end (140b) along the length direction, and the first end (140a) is close to the central axis of the rotating disc (130) relative to the second end (140 b);

at least one of the disturbance rods (140) is a first-type disturbance rod (141), the first end (140a) of the first-type disturbance rod (141) is fixed to the corresponding connecting rod (160), and one end of the connecting rod (160) connected to the first end (140a) is located at the center of the turntable (130).

6. The coating device according to claim 1, characterized in that at least one of the disturbance rods (140) is a first type disturbance rod (141), and the sum of the diameter of the first type disturbance rod (141) and the height of the gap (102) is 1/6-1/3 of the diameter of the ball to be coated.

7. The plating device according to claim 1,

at least one disturbance rod (140) is a second type disturbance rod (142), and the first end (140a) of the second type disturbance rod (142) is arranged at a distance from the central axis of the corresponding turntable (130); along the rotation direction of the turntable (130), the rear side surface (140c) of the second type disturbance rod (142) is a convex arc surface, and the first end (140a) of the second type disturbance rod (142) is positioned in front of the second end (140 b).

8. The plating device according to claim 7,

the sum of the diameter of the second type disturbance rod (142) and the height of the gap (102) is 1/6-1/2 of the diameter of the ball to be coated; and/or the presence of a gas in the gas,

the distance between the first end (140a) of the second type disturbance rod (142) and the central axis of the corresponding turntable (130) is 1/4-1/2 of the radius of the turntable (130).

9. The plating device according to claim 1, wherein the bottom wall (1011) of the disk chamber (101) includes at least an inclined portion (1011b), the inclined portion (1011b) being connected to a side wall (1012) of the disk chamber (101) along a radially outward end of the turntable (130); the inclined portion (1011b) is gradually inclined downward from the outside inward in the radial direction of the turntable (130).

10. The plating device according to claim 9, wherein the bottom wall (1011) of the disk chamber (101) further comprises a flat bottom portion (1011a) connected to the inclined portion (1011b), and the inclined portion (1011b) surrounds the periphery of the flat bottom portion (1011 a).