CN114733436A - Adjustable mixing equipment and adjustable mixing method - Google Patents
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- CN114733436A CN114733436A CN202110018475.3A CN202110018475A CN114733436A CN 114733436 A CN114733436 A CN 114733436A CN 202110018475 A CN202110018475 A CN 202110018475A CN 114733436 A CN114733436 A CN 114733436A
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000011259 mixed solution Substances 0.000 claims abstract description 118
- 239000003085 diluting agent Substances 0.000 claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 48
- 238000007865 diluting Methods 0.000 claims abstract description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 29
- 239000000243 solution Substances 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 7
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 7
- 239000004094 surface-active agent Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 abstract description 17
- 239000004065 semiconductor Substances 0.000 abstract description 11
- 238000004140 cleaning Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 238000011897 real-time detection Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses adjustable mixing equipment and an adjustable mixing method, and relates to the technical field of semiconductors, wherein chemicals with different concentrations can be obtained in one adjustable mixing equipment. The adjustable mixing apparatus comprises: the liquid mixing main path is communicated with the first branch path and the second branch path respectively; the first branch circuit is used for providing a mixed solution to the main mixed solution circuit, and the concentration of the mixed solution is an initial concentration; the second branch circuit is used for providing diluent to the main liquid mixing circuit; the main mixed solution path is used for diluting the concentration of the mixed solution to a target concentration by using a diluent. The adjustable mixing method applies the adjustable mixing equipment. The adjustable mixing method provided by the invention is used for obtaining chemicals with different concentrations.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to adjustable mixing equipment and an adjustable mixing method.
Background
In a semiconductor manufacturing process, semiconductor devices are often cleaned with chemicals of different concentrations and different temperatures.
However, as semiconductor devices are miniaturized and highly integrated, the concentration of chemicals has an increasingly significant influence on the cleaning process. In the cleaning process, the number of chemical supply channels with different concentrations is increased, and the cost is increased.
Disclosure of Invention
The object of the present invention is to provide an adjustable mixing device and an adjustable mixing method by which chemicals of different concentrations are obtained in one adjustable mixing device.
To achieve the above object, the present invention provides an adjustable mixing device. The adjustable mixing apparatus comprises: the liquid mixing main path is communicated with the first branch path and the second branch path respectively;
the first branch circuit is used for providing a mixed solution to the main mixed solution circuit, and the concentration of the mixed solution is an initial concentration;
the second branch circuit is used for providing diluent to the main liquid mixing circuit;
the main mixed solution path is used for diluting the concentration of the mixed solution to a target concentration by using a diluent.
Compared with the prior art, in the adjustable mixing equipment provided by the invention, the first branch circuit is used for providing the mixed solution to the main mixed liquid path, and the second branch circuit is used for providing the diluent to the main mixed liquid path. In this case, the mixed solution in the initial concentration and the diluent for adjusting the concentration of the mixed solution exist in the main mixed solution path, and the mixed solution in the initial concentration is adjusted to the target concentration under the action of the diluent so as to obtain the mixed solution required by actual operation. And, only utilize above-mentioned adjustable mixing apparatus to obtain the mixed solution of different concentration of the same kind of substance, compared with prior art, saved the quantity of supply channel, nozzle and other components, reduced manufacturing cost.
The invention also provides an adjustable mixing method. The adjustable mixing method adopts the adjustable mixing equipment in the technical scheme. The adjustable mixing method comprises the following steps:
acquiring the concentration of a mixed solution provided by the first branch to the mixed solution main path; the concentration of the mixed solution is the initial concentration;
and controlling the diluent provided by the second branch circuit to the mixed liquid main circuit according to the initial concentration and the target concentration, so that the mixed liquid main circuit dilutes the concentration of the mixed solution to the target concentration by using the diluent.
Compared with the prior art, the beneficial effects of the adjustable mixing method provided by the invention are the same as those of the adjustable mixing equipment in the technical scheme, and the detailed description is omitted here.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a block diagram of a cleaning system according to an embodiment of the present invention;
FIG. 2 shows a schematic diagram of a prior art washing system;
FIG. 3 is a schematic structural diagram of an adjustable mixing device according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of another adjustable mixing device provided by an embodiment of the present invention;
FIG. 5 is a schematic diagram of a further adjustable mixing apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating the location of a heater of an adjustable mixing device according to an embodiment of the present invention;
fig. 7 is a schematic diagram illustrating the location of the heater of another adjustable mixing device provided by an embodiment of the present invention.
Reference numerals:
11-cleaning equipment, 12-adjustable mixing equipment and 13-terminal equipment; 21-storage container, 22-supply channel; 31-first branch, 32-first liquid mixing device, 320-first mixing container, 321-supply pipeline, 33-second branch, 330-solvent supply device, 331-flow regulating device, 34-main liquid mixing path and 35-heater.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is illustrative only and is not intended to limit the scope of the present disclosure. Moreover, in the following description, descriptions of well-known elements and techniques are omitted so as to not unnecessarily obscure the concepts of the present disclosure.
Various unit schematics according to embodiments of the present disclosure are shown in the figures. The figures are not drawn to scale, wherein certain details are exaggerated and some details may be omitted for clarity of presentation. The shapes of various regions, layers, and relative sizes and positional relationships therebetween shown in the drawings are merely exemplary, and deviations may occur in practice due to manufacturing tolerances or technical limitations, and a person skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions, as actually required.
In the context of the present disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present. In addition, if a layer/element is "on" another layer/element in one orientation, then that layer/element may be "under" the other layer/element when the orientation is reversed. In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The adjustable mixing equipment provided by the embodiment of the invention is applied to a cleaning system. Fig. 1 is a block diagram illustrating a cleaning system according to an embodiment of the present invention. As shown in fig. 1, the cleaning system includes a cleaning device 11, an adjustable mixing device 12, and a terminal device 13. The adjustable mixing device 12 provides chemicals to the cleaning device 11, and the adjustable mixing device 12 and the terminal device 13 are connected in communication.
The above-described cleaning apparatus 11 may be an apparatus for cleaning semiconductor devices. For example: cleaning tanks, cleaning machines, etc.
The adjustable mixing apparatus 12 may be an apparatus for adjusting and controlling the concentration and temperature of chemicals used to clean semiconductor devices.
The terminal device 13 may be a device for controlling the temperature and time for cleaning the semiconductor device. For example: mobile phone, computer, controller CPU, etc.
In recent years, with miniaturization and high integration of semiconductor devices, the influence of the concentration of chemicals on the cleaning process has become more prominent. Fig. 2 shows a schematic diagram of a washing system in the prior art. As shown in fig. 2, when manufacturing a semiconductor device, different concentrations of hydrofluoric acid or LAL solutions are required to clean the semiconductor device, the different concentrations of hydrofluoric acid are placed in different storage containers 21, and the storage containers 21 for different chemicals are different from each other, so that more storage containers 21 and supply channels 22 are required. In the cleaning process, since different concentrations of chemicals correspond to different storage containers 21 and supply paths 22, the number of the storage containers 21 and the supply paths 22 is increased, and the cost is increased.
In order to solve the above problems, embodiments of the present invention provide an adjustable mixing apparatus and an adjustable mixing method. In the adjustable mixing device, a first branch is used for providing the mixed solution to the mixed liquid main path, and a second branch is used for providing the diluent to the mixed liquid main path. At this time, the mixed solution of the initial concentration is adjusted to the target concentration by the diluent for obtaining the mixed solution required for the actual work. And, only utilize above-mentioned adjustable mixing apparatus can obtain the mixed solution of different concentration of the same kind of substance, compared with prior art, saved the quantity of supply channel, nozzle and other components, reduced manufacturing cost.
For convenience of description, only the differences between the adjustable mixing device provided by the embodiment of the present invention and the adjustable mixing device in the prior art are described below, and other structures not described may refer to the description in the prior art. Of course, those skilled in the art can also modify the existing other adjustable mixing devices based on the following description of the embodiments of the present invention.
Fig. 3 shows a schematic structural diagram of an adjustable mixing device according to an embodiment of the present invention. As shown in fig. 3, the adjustable mixing apparatus comprises: a first branch 31, a second branch 33, and a main liquid mixing path 34 communicating the first branch 31 and the second branch 33, respectively.
As shown in fig. 3, the first branch 31 may comprise a first liquid mixing device 32. The first branch 31 is used for providing the mixed solution to the main mixed solution path 34, and the concentration of the mixed solution is the initial concentration. For example, the first liquid mixing device 32 may include a first mixing container 320 for containing the first liquid, and a supply pipe 321 provided on the first mixing container 320. The supply pipe 321 is used to supply the second liquid into the first mixing container 320.
The types of the first liquid and the second liquid are various, and three types of chemicals are described as examples below. It is to be understood that the following description is intended to be illustrative, and not restrictive.
The first type: as shown in fig. 3, when the supply pipe 321 supplies hydrofluoric acid into the first mixing container 320, the first mixing container 320 contains dilute hydrofluoric acid with an initial concentration of 30:1, and 30:1 of the initial concentration is a volume ratio. By way of example, a 30:1 dilute hydrofluoric acid is understood to be a 1 liter stock solution of HF (which may be a 49% HF chemical solution of the prior art) to which 30 liters of water are added.
The second type: fig. 4 is a schematic structural diagram of another adjustable mixing device provided in the embodiment of the present invention. As shown in fig. 4, when the supply pipe 321 supplies the aqueous solution of ammonium fluoride and hydrogen fluoride into the first mixing container 320, the first mixing container 320 contains a Buffered Oxide etching solution (BOE) with an initial concentration of 30:1, wherein 30:1 is a volume ratio. For example, a 30:1 buffered oxide etch solution may be understood as a 1 liter buffered oxide etch solution with 30 liters of water added.
In the third category: fig. 5 is a schematic structural diagram of another adjustable mixing device according to an embodiment of the present invention. As shown in fig. 5, when the supply line 321 supplies the first mixing container 320 with an aqueous solution of ammonium fluoride and hydrogen fluoride, the first mixing container 320 contains an LAL solution with an initial LAL1000 concentration. The LAL solution is a mixed solution of ammonium fluoride and hydrogen fluoride, wherein the ratio of ammonium fluoride to hydrogen fluoride is 5: 1-30: 1. When the ratio of ammonium fluoride to hydrogen fluoride in the LAL solution is different, the amount of etching of the oxide is also different. When the etching amount is 1000A/min, the wafer is called LAL 1000. When the etching amount is 200A/min, it is called LAL 200.
As shown in fig. 3-5, the second branch 33 may be used to provide diluent to the main mixing fluid path 34. For example, the diluent may contain one or both of water and a surfactant. It is to be understood that the substance contained in the diluent may be set according to the actual situation, and is not limited thereto.
In one example, as shown in fig. 3, the second branch 33 includes a solvent supply device 330 and a flow rate adjusting device 331. The flow rate adjusting device 331 is provided at an outlet of the solvent supply device 330, and the solvent supply device 330 is used for containing a diluent. For example, the flow regulator 331 may be a control valve.
As shown in fig. 3, the main mixed solution path 34 is used to dilute the concentration of the mixed solution to a target concentration with a diluent. For example: when the supply pipe 321 supplies hydrofluoric acid into the first mixing container 320, dilute hydrofluoric acid having an initial concentration of 30:1 is contained in the first mixing container 320. At this time, the mixed solution supplied from the first branch path 31 to the main mixed solution path 34 is diluted hydrofluoric acid having an initial concentration of 30: 1. The diluent supplied by the second branch 33 to the main mixing liquid path 34 is water and a surfactant. At this time, the flow rate adjusting device 331 in the second branch 33 may be controlled according to the concentration of the mixed solution required for actual work, so that the flow rate adjusting device 331 may control the flow rate of the diluent in combination with the supply time of the diluent, thereby automatically achieving the adjustment of the mixed solution.
For example, the following steps are carried out: mixing a certain amount of water and a surfactant with dilute hydrofluoric acid with an initial concentration of 30:1 in the main mixed solution path 34, wherein the concentration of the new mixed solution obtained in the main mixed solution path 34 is the target concentration, namely the concentration required by the cleaning process. According to different contents of the diluent, mixed solutions with different concentrations of 30: 1-1000: 1 can be obtained, for example: 30:1, 100:1, 200:1, 1000:1, etc.
As shown in fig. 5, when the LAL solution is supplied into the first mixing container 320 through the supply line 321, the LAL solution having an initial concentration of LAL1000 is contained in the first mixing container 320. Mixing a certain amount of water and surfactant with an LAL solution with an initial concentration of LAL1000 in the main mixed solution path 34, wherein the concentration of the new mixed solution obtained in the main mixed solution path 34 is the target concentration, namely the concentration required by the cleaning process. Mixed solutions with different concentrations, such as LAL1000 to LAL200, can be obtained according to the content of the diluent, for example: LAL1000, LAL700, LAL500, LAL300, LAL200, etc. It should be understood that the concentration of the new mixed solution obtained in the main mixed solution path 34 and the kind of the solution can be set according to actual needs.
In order to achieve the target temperature required for the actual operation of the obtained mixed solution of the target concentration, the above-mentioned adjustable mixing device further includes a heater 35. The heater 35 may heat one of the first branch passage 31, the second branch passage 33, and the main liquid mixing passage 34, may heat the first branch passage 31 and the main liquid mixing passage 34 or the second branch passage 33 and the main liquid mixing passage 34, or may heat the first branch passage 31, the second branch passage 33, and the main liquid mixing passage 34 at the same time. The heater 35 in the embodiment of the present invention may be a heating coil, a heating pipe, etc., and is not particularly limited herein. This is described below by way of example with reference to the accompanying drawings. It is to be understood that the following description is intended to be illustrative, and not restrictive.
The first method comprises the following steps: fig. 6 is a schematic diagram illustrating the position of a heater of an adjustable mixing device according to an embodiment of the present invention. As shown in fig. 6, the heater 35 is provided on the first branch 31 of the adjustable mixing device. The heater 35 may be used to heat the mixed solution in the first branch 31 according to a target temperature of the mixed solution.
In practical applications, when the mixed solution and the diluent are mixed in the main mixed solution path 34, the terminal device is in communication connection with the heater 35, and the temperature of the heater 35 is controlled to rise under monitoring and adjustment of the terminal device, at this time, the heater 35 can heat the mixed solution in the first branch path 31, so that the temperature of the mixed solution entering the main mixed solution path 34 is higher than that of the diluent. At this time, the temperature of the mixed solution is conducted to the diluent, and the new mixed solution temperature in the main mixed solution path 34 gradually reaches the target temperature under the monitoring of the terminal device and the real-time detection of the temperature sensor. The adjustable mixing equipment provided by the embodiment of the invention can be used for obtaining various mixed solutions with different temperatures, so that the manufacturing time of the mixed solutions with different temperatures is saved, and meanwhile, the manufacturing equipment is also saved.
And the second method comprises the following steps: fig. 7 is a schematic diagram illustrating the location of the heater of another adjustable mixing device provided by an embodiment of the present invention. As shown in fig. 7, the heater 35 is arranged in the second branch 33 of the adjustable mixing device. The heater 35 may be used to heat the mixed solution in the second branch 33 according to a target temperature of the mixed solution.
In practical application, when the diluent and the mixed solution are mixed in the main mixed solution path 34, the terminal device is in communication connection with the heater 35, and the temperature of the heater 35 is controlled to rise under monitoring and adjustment of the terminal device, at this time, the heater 35 can heat the diluent in the second branch path 33, so that the temperature of the diluent entering the main mixed solution path 34 is higher than that of the mixed solution. At this time, the temperature of the diluent is conducted to the mixed solution, and the new mixed solution temperature in the main mixed solution path 34 gradually reaches the target temperature under the monitoring of the terminal device and the real-time detection of the temperature sensor.
And the third is that: as shown in fig. 3, the heater 35 is provided in the main mixing liquid path 34 of the adjustable mixing device. The heater 35 may be used to heat the mixed solution in the main mixed solution path 34 according to a target temperature of the mixed solution.
In practical application, when the mixed solution and the diluent are mixed in the main mixed solution path 34, due to the communication connection between the terminal device and the heater 35, the temperature of the heater 35 is controlled to rise under the monitoring and adjusting of the terminal device and the real-time detection of the temperature sensor, and at this time, the heater 35 can heat the mixed solution and the diluent in the main mixed solution path 34, so that the obtained new mixed solution is heated more uniformly. The temperature of the new mixed solution obtained in the main mixed solution path 34 can reach the target temperature more easily, so that the heat loss in the heat transfer process is reduced, and the use of the later-stage cleaning process is facilitated.
The embodiment of the invention also provides an adjustable mixing method and the adjustable mixing equipment. The tunable mixing method may be performed by a terminal device (e.g., the controller CPU described above) or may be performed by a chip applied to the terminal device. As shown in fig. 3, the tunable mixing method includes:
step 101: the terminal device acquires the concentration of the mixed solution supplied from the first branch path 31 to the mixed solution main path 34. The concentration of the mixed solution was the initial concentration.
Step 102: the terminal device controls the diluent supplied from the second branch path 33 to the main mixing liquid path 34 according to the initial concentration and the target concentration, so that the main mixing liquid path 34 dilutes the concentration of the mixed solution to the target concentration with the diluent.
For example, when the diluent is one or both of water and a surfactant, the concentration of the mixed solution may be diluted to a target concentration by adding, for example, the content of water or the surfactant to the mixed solution having an initial concentration. When the above-mentioned diluent is the same solution as the mixed solution supplied from the first branch path 31 to the mixed solution main path 34, and the concentration of the diluent is less than the concentration of the mixed solution, the content of the diluent added to the mixed solution may be controlled to dilute the concentration of the mixed solution to the target concentration.
Therefore, the adjustable mixing method provided by the embodiment of the invention can obtain mixed solutions with different concentrations of the same substance by using one device, can also obtain mixed solutions with different temperatures, saves the manufacturing time of the mixed solutions with different temperatures, saves the number of supply channels, nozzles and other components, and reduces the production cost.
When the tunable mixing device further includes the heater 35 disposed in the main mixing liquid path 34, after controlling the diluent provided by the second branch path 33 to the main mixing liquid path 34 according to the initial concentration and the target concentration, the tunable mixing method further includes:
step 103: when the temperature of the mixed solution in the mixed solution main path 34 is less than the target temperature, the terminal device controls the heater 35 to heat the mixed solution in the mixed solution main path 34 according to the target temperature of the mixed solution.
When the second branch 33 of the adjustable mixing device includes the solvent supply device 330 and the flow rate adjusting device 331, the terminal device controls the diluent supplied from the second branch 33 to the mixing liquid main path 34 according to the initial concentration and the target concentration, including:
when the initial concentration is greater than the target concentration, the terminal device determines the addition amount of the diluent according to the initial concentration and the target concentration. The terminal device controls the opening time period of the solvent supplying means 330 according to the amount of diluent added and the flow rate adjusting means 331 adjusts the diluent flow rate. The flow rate of the diluent may be set according to actual conditions, and is not particularly limited herein.
When the initial concentration is less than or equal to the target concentration, the solvent supply device 330 is turned off. For example, the flow rate adjusting device 331 may be controlled to turn off the solvent supply device 330, and other manners may be used to turn off the solvent supply device 330.
Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
Similarly, it should be appreciated that in the description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. However, the method of the present invention should not be construed to reflect the intent: rather, the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
The embodiments of the present disclosure have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the disclosure is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the present disclosure, and such alternatives and modifications are intended to be within the scope of the present disclosure.
Claims (11)
1. An adjustable mixing apparatus, comprising: the main liquid mixing path comprises a first branch, a second branch and a main liquid mixing path which is communicated with the first branch and the second branch respectively;
the first branch circuit is used for providing a mixed solution to the main mixed solution circuit, and the concentration of the mixed solution is an initial concentration;
the second branch circuit is used for providing diluent to the main liquid mixing circuit;
the main mixed solution path is used for diluting the concentration of the mixed solution to a target concentration by using the diluent.
2. The tunable mixing device according to claim 1, further comprising a heater for heating at least one of the first branch circuit, the second branch circuit, and the main liquid mixing circuit according to a target temperature of the mixed solution, so that the mixed solution in the main liquid mixing circuit reaches the target temperature.
3. The tunable mixing apparatus of claim 1, further comprising a heater disposed in the first branch for heating the mixed solution in the first branch according to a target temperature of the mixed solution; or the like, or, alternatively,
the adjustable mixing equipment also comprises a heater arranged in the second branch, and the heater is used for heating the mixed solution in the second branch according to the target temperature of the mixed solution; or the like, or, alternatively,
the adjustable mixing equipment further comprises a heater arranged in the liquid mixing main path and used for heating the mixed solution in the liquid mixing main path according to the target temperature of the mixed solution.
4. An adjustable mixing apparatus according to any one of claims 1 to 3, wherein the first branch comprises a first liquid mixing device.
5. The adjustable mixing apparatus according to claim 4, wherein the first liquid mixing device comprises a first mixing vessel and a supply conduit provided on the first mixing vessel;
the first mixing vessel for containing a first liquid;
the supply conduit is for supplying a second liquid into the first mixing vessel.
6. The tunable mixing apparatus of claim 5, wherein the first liquid is dilute hydrofluoric acid and the second liquid is hydrofluoric acid; or the like, or, alternatively,
the first liquid is buffer oxide etching liquid, and the second liquid is an aqueous solution of ammonium fluoride and hydrogen fluoride; or the like, or, alternatively,
the first liquid is an LAL solution, and the second liquid is an aqueous solution formed by ammonium fluoride and hydrogen fluoride.
7. The tunable mixing apparatus according to any one of claims 1 to 3, wherein the second branch comprises a solvent supply device and a flow rate adjusting device, the flow rate adjusting device being provided at an outlet of the solvent supply device, the solvent supply device being configured to receive the diluent.
8. The adjustable mixing apparatus of claim 7, wherein the diluent comprises one or both of water, a surfactant.
9. A tunable mixing method using the tunable mixing apparatus of any one of claims 1 to 8, the tunable mixing method comprising:
acquiring the concentration of the mixed solution provided by the first branch to the mixed solution main path; the concentration of the mixed solution is initial concentration;
and controlling the diluent provided by the second branch circuit to the main mixing circuit according to the initial concentration and the target concentration, so that the main mixing circuit dilutes the concentration of the mixed solution to the target concentration by using the diluent.
10. The adjustable mixing method of claim 9, wherein when the adjustable mixing apparatus is the adjustable mixing apparatus of claim 2; after controlling the diluent provided by the second branch to the main mixing path according to the initial concentration and the target concentration, the adjustable mixing method further comprises the following steps:
and when the temperature of the mixed solution in the main mixed solution path is lower than the target temperature, controlling a heater to heat the mixed solution in the main mixed solution path according to the target temperature of the mixed solution.
11. The tunable mixing method of claim 9, wherein when the tunable mixing device is the tunable mixing device of claim 7, controlling the diluent provided by the second branch path to the main mixing path according to the initial concentration and the target concentration comprises:
when the initial concentration is greater than the target concentration, determining the addition amount of the diluent according to the initial concentration and the target concentration; controlling the opening time of a solvent supply device according to the addition amount of the diluent and adjusting the flow of the diluent by a flow adjusting device;
and when the initial concentration is less than or equal to the target concentration, closing the solvent supply device.
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| CN209476220U (en) * | 2018-12-19 | 2019-10-11 | 伟明环保设备有限公司 | A kind of on-line automatic accurate matching system of solution |
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| CN109847815A (en) * | 2018-12-05 | 2019-06-07 | 中国科学院微电子研究所 | A kind of expansible doubling dilution micro-fluidic chip, preparation method and dilution process |
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