CN114727467A - Combined direct-heating lanthanum hexaboride plasma source - Google Patents
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- CN114727467A CN114727467A CN202210385801.9A CN202210385801A CN114727467A CN 114727467 A CN114727467 A CN 114727467A CN 202210385801 A CN202210385801 A CN 202210385801A CN 114727467 A CN114727467 A CN 114727467A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a combined direct-heating lanthanum hexaboride plasma source, which comprises a lanthanum hexaboride emitter formed in a modularized way, wherein conductive electrodes are connected end to end; a heat reflection and heat insulation back plate consisting of a plurality of layers of composite structures is arranged below the emitter, and the periphery of the heat reflection and heat insulation back plate is surrounded by heat reflection and heat insulation side plates; flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; and a heat insulation support frame is arranged below the back plate and used for integrally mounting the plasma source. The invention has the advantages of simple structure, easy processing, high heating efficiency, long service life and capability of generating a large-range plasma environment.
Description
Technical Field
The invention relates to the technical field of hot cathodes, in particular to a combined direct-heating lanthanum hexaboride plasma source.
Background
The hot cathode plasma source can relatively stably emit electrons to generate uniform plasma, and is widely used in various fields.
At the end of the nineteenth century, edison discovered that the metal could emit electrons when heated to a sufficient temperature, which was the earliest hot cathode. Early hot cathodes used metals such as tungsten and thorium, and it was later discovered that some alkaline earth oxides also emitted electrons and had higher electron emissivity. An oxide cathode source was then developed, most typically a barium oxide cathode source. Such oxide plasma sources are susceptible to poisoning and have a short electron emission lifetime. In the fifties of the last century, Lafferty, an american scholarian, found that compounds of some metals also have the ability to emit electrons, such as lanthanum hexaboride. The metal compound has a stable crystal structure, is not easy to have a poisoning reaction with air, and has extremely high electron emissivity. Which makes it an ideal choice for high current densities. This material is often used as a hollow cathode for the study of plasma surface interactions.
The large-area plasma source can create a large-scale plasma environment, and is a necessary condition for many plasma experiments. However, the size of the common lanthanum hexaboride plasma source is smaller, generally smaller than 1cm, and a large-area lanthanum hexaboride cathode source is not realized at home. Relatively large lanthanum hexaboride plasma sources have been developed by very few foreign institutions, such as the university of california at the los angeles division of the united states, and can reach 10cm in size. However, the lanthanum hexaboride cathode source is indirectly heated, and the thermal power required to reach the working temperature of lanthanum hexaboride is high.
In order to achieve relatively high heating efficiency, a combined direct-heating lanthanum hexaboride plasma source was designed. The plasma generator is simple in structure and easy to realize, and can be used for generating large-range high-ionization plasmas.
Disclosure of Invention
In order to overcome the defects of small size, serious heat loss and low heating efficiency of the conventional lanthanum hexaboride cathode source and realize a long-life large-size plasma environment with a simpler modular structure and low cost, the invention provides a large-area separation heating type lanthanum hexaboride plasma source.
In order to solve the problems and achieve the design goal, the invention adopts the following scheme:
a combined direct-heating lanthanum hexaboride plasma source includes a lanthanum hexaboride emitter; the lanthanum hexaboride emitter comprises a plurality of lanthanum hexaboride modules, wherein the lanthanum hexaboride modules are connected end to end by conductive electrodes; a heat reflection and heat insulation back plate consisting of a multilayer composite structure is arranged below the emitter, and the periphery of the emitter is surrounded by a heat reflection side plate and a heat insulation side plate; flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; and a heat insulation support column is arranged below the back plate.
Preferably, the heat insulation support column is used for integral installation of the plasma source.
In one embodiment of the invention, a combined direct-heating lanthanum hexaboride plasma source comprises five parts, namely a lanthanum hexaboride emitter, a conductive electrode, a side plate, a back plate and a support frame. The lanthanum hexaboride emitter is formed by placing a plurality of cylindrical lanthanum hexaboride modules with the diameter of 5mm-10mm in parallel in the same plane; the conductive electrode consists of an electrode pressing block, an electrode pressing block terminal and an electrode insulating base, wherein the base and the pressing block are both provided with semicircular grooves with the diameter larger than that of the lanthanum hexaboride module, and are pressed up and down to clamp and fix the lanthanum hexaboride module; the side plates and the back plate comprise heat reflecting layers and heat insulating layers, so that heat loss is reduced, heating efficiency is improved, and the working temperature of the lanthanum hexaboride emitter is reached with smaller heating power; the support frame is formed by connecting an additional insulating cushion block between the heat insulation support column and the back plate through bolts.
A modular direct-heating lanthanum hexaboride plasma source, cylinder type lanthanum hexaboride module parallel placement is in electrode insulation base, both ends are electrode briquetting or electrode briquetting terminal link to each other respectively, two lanthanum hexaboride modules are connected to every electrode briquetting, electrode briquetting terminal connection one lanthanum hexaboride module, lanthanum hexaboride module end to end, form "S" type structure, both ends are drawn forth by electrode briquetting terminal.
The electrode insulation base and the connecting bolt between the electrode insulation base and the back plate are made of alumina ceramics.
The electrode pressing block and the electrode pressing block terminal are made of high-purity graphite and are provided with through holes for being connected and fixed with the electrode insulation base.
The combined direct-heating lanthanum hexaboride plasma is characterized in that in order to ensure good electric connection between a lanthanum hexaboride emitter and a conductive electrode and reduce contact resistance, graphite paper is filled between the lanthanum hexaboride emitter and the conductive electrode; the graphite paper has good conductivity which is the same as that of the electrode material, and can avoid the phenomenon that metal fillers such as tantalum and the like react with lanthanum hexaboride at high temperature to pollute an emitter.
The side plate is of an L-shaped structure, the heat insulation side plate is made of graphite, the heat conduction coefficient is low at high temperature, a good heat insulation effect is achieved, the lower opening is fixed with the back plate, the heat reflection side plate is of a rectangular sheet structure and made of molybdenum, high heat reflectivity is achieved at high temperature, and the four corners are opened and fixed on the outer side of the heat reflection side plate.
The back plate comprises five layers, wherein the first layer is an emitter supporting back plate made of graphite and used for insulating heat and fixing the lanthanum hexaboride emitter, the conductive electrode and the side plate; the second layer is a reflective back plate made of molybdenum; the third and fourth layers are heat insulation back plates made of graphite; the fifth layer is a connecting back plate made of 304 stainless steel and used for heat reflection and connecting with the supporting frame.
The back plate is of a square sheet structure with five layers, through holes are formed in four corners of the back plate and are fixedly penetrated through by bolts, and aluminum oxide ceramic flat gaskets are additionally arranged between the layers to reduce heat loss caused by heat conduction.
The emitter supports the backplate, and the middle part is seted up two and is used for the through-hole of fixed electrode insulation base, and one is the round hole, and one is waist type hole. When the high-temperature working is carried out, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, and the lanthanum hexaboride emitter is prevented from being damaged by high-temperature thermal expansion due to rigid connection of two ends.
The heat insulation support column is made of 304 stainless steel materials and is provided with a large number of small holes so as to reduce heat loss caused by heat conduction.
The insulating cushion block is made of alumina ceramics, and electric insulation between the heat insulation supporting column and the back plate is guaranteed.
In order to realize modular design, each lanthanum hexaboride module and the conductive electrode have the same structure, the size and the number of the emitters can be adjusted according to the requirement of the cathode source, and the combined direct-heating lanthanum hexaboride plasma source is expanded to a larger area.
The innovation points and advantages of the invention are as follows:
(1) the invention uses direct heating as the heating mode of the large-size lanthanum hexaboride plasma source, and greatly improves the heating efficiency by matching with a heat reflection heating and heat insulation means.
(2) The lanthanum hexaboride emitter used in the invention is in a modular combinable design, and the size of the cathode source can be adjusted according to the use requirement.
(3) The invention can generate initial electrons with large area and high current density, and realize large-size and high-ionization plasma environment.
Drawings
FIG. 1 is a top view of the apparatus of the present invention.
Fig. 2 is a side view of the device of the present invention.
Figure 3 is a cross-sectional view of the device of the present invention.
FIG. 4 is a plot of lanthanum hexaboride emitter temperature versus heating power.
In the figure, a 111 lanthanum hexaboride module, an electrode compact 121, an electrode compact 122 terminal 123, an electrode insulating base, a long thermal insulation side plate 131, a long thermal reflection side plate 132, a short thermal insulation side plate 133, a short thermal reflection side plate 134, an emitter support back plate 141, a reflective back plate 142, a thermal insulation back plate 143, a connection back plate 144, a thermal insulation support column 151, and an insulating spacer 152.
Detailed Description
For further clarity of the description of the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the accompanying drawings. The exemplary embodiments and descriptions of the present invention are provided only for explaining the present invention and not for limiting the present invention.
As shown in fig. 1-3, a combined direct-heating lanthanum hexaboride plasma source comprises five major parts, namely a lanthanum hexaboride emitter, a conductive electrode, a side plate, a back plate and a support frame. The lanthanum hexaboride emitter includes a lanthanum hexaboride module 111. The conductive electrode includes an electrode compact 121, an electrode compact terminal 122 and an electrode insulation base 123. The side panels include a long insulating side panel 131, a long heat reflecting side panel 132, a short insulating side panel 133 and a short heat reflecting side panel 134. The backplate includes an emitter support backplate 141, a reflective backplate 142, a thermally insulating backplate 143 and a connecting backplate 144. The support frame includes insulating support posts 151 and insulating spacers 152.
The lanthanum hexaboride emitter adopted by the invention is in a modular and combinable design and is formed by arranging 10 cylindrical lanthanum hexaboride modules 111 with the diameter of 0.5cm and the length of 10cm in parallel. The electrode pressing block 121, the electrode pressing block terminal 122 and the electrode insulation base 123 are all provided with semicircular grooves with the diameter of 0.55 cm. The electrode insulation base 123 made of ceramic is fixed on the emitter support back plate 141 by ceramic bolts, two rows of through holes for fixing the electrode insulation base are formed in the middle of the emitter support back plate 141, one row is a round hole, and the other row is a kidney-shaped hole. When the high-temperature working is carried out, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, and the lanthanum hexaboride emitter is prevented from being damaged by high-temperature thermal expansion due to rigid connection of two ends. The lanthanum hexaboride module 111 is placed in a groove of the electrode insulation base 123, the electrode pressing block 121 and the electrode pressing block terminal 122 are additionally covered above the lanthanum hexaboride module 111, a gap in the groove is filled with graphite paper, the electrode pressing block 121 and the electrode pressing block terminal 122 are fixedly pressed with the electrode insulation base 123 through bolts, and the lanthanum hexaboride module is ensured to be well electrically connected with the electrode pressing block 121 and the electrode pressing block terminal 122 made of graphite. Each electrode pressing block is connected with two lanthanum hexaboride modules, the lanthanum hexaboride modules are connected end to form an S-shaped structure, and two ends of each electrode pressing block are led out by electrode pressing block terminals 122. The lanthanum hexaboride module 111 is connected end to end through the conductive electrodes to form an S-shaped conductive path, and the two ends of the S-shaped conductive path are connected through the two electrode block terminals 122 for connection of a dc power supply to directly heat the lanthanum hexaboride emitter with a large current.
The invention adopts a reflection and heat insulation mode to reduce the heat loss of the part except the lanthanum hexaboride emitter and reduce the required heating power. The long heat insulation side plate 131 and the short heat insulation side plate 133 are made of graphite, are L-shaped, and are fixed around the lanthanum hexaboride emitter by bolts, the short heat insulation side plate 133 is fixed on one side of the electrode pressing block terminal 122, and the long heat insulation side plate 131 is arranged on the other three sides. The heat reflection side plate is made of molybdenum, the long heat reflection side plate 132 is mounted on the periphery of the long heat insulation side plate 131 through four corners fixed by bolts, and the short heat reflection side plate 134 is mounted on the short heat insulation side plate 133 through four corners fixed by bolts. The back of the emitter has larger radiation area and occupies higher proportion of heat loss, and the device is provided with five layers of back plates which have more efficient heat reflection and heat insulation functions. Five layers of back plates are arranged below the emitter. In the downward direction from the rear surface of the lanthanum hexaboride emitter, a first-layer emitter support back plate 141, a second-layer reflective back plate 142, third-and fourth-layer thermal insulation back plates 143, and a fifth-layer connection back plate 144 are provided in this order. The five-layer back plate includes a first layer of emitter support back plate 141 made of graphite, which plays a role of thermal insulation; a second layer of reflective backplane 142 made of molybdenum metal having a high thermal reflectivity at high temperatures; third and fourth layers of thermally insulating backing 143 made of graphite; the connecting back plate 144 of the fifth layer is a stainless steel plate, mainly plays a role in supporting and fixing and has a certain heat reflection effect; the five-layer plate is provided with through holes at the same positions of four corners and is fixed by bolts in a penetrating way, and an alumina ceramic gasket with the thickness of 1mm is arranged between layers, so that the distance between the layers is ensured, and the heat loss caused by heat conduction is reduced. The heat insulation support column 151 is made of 304 stainless steel, passes through the insulating cushion block 152 made of alumina ceramic through bolts, is connected with the connecting back plate 144, and is provided with 10 rows and 23 columns of 230 small holes with the diameter of 2mm, so that the heat conduction is reduced.
In this embodiment, the total size of the array formed by the lanthanum hexaboride emitters is about 10cm × 10cm, the lanthanum hexaboride modules 111 are arranged in parallel and equidistantly on the same plane to ensure the uniformity of plasma generated by emitting electrons, and meanwhile, to ensure the heating efficiency, the distance between the lanthanum hexaboride modules 111 is the same as the diameter of the modules. According to hexaborideThe lanthanum plasma source is installed in a vacuum chamber through a heat insulation support column 151 by bolts, and the background vacuum is pumped to 1 x 10-4Pa, respectively connecting the positive electrode and the negative electrode of a direct current power supply to two electrode press block terminals 122 through a vacuum electrode by using copper weaving, fixing the positive electrode and the negative electrode by using bolts, and heating a lanthanum hexaboride emitter to over 1600K by introducing large current to emit thermal electrons; working gas with proper pressure, helium, argon and the like is introduced, and 5X 10 is adopted in the embodiment-2Pa argon gas; the external additional magnetic field coil generates a background magnetic field perpendicular to the surface of the lanthanum hexaboride emitter, which is 30Gauss in this embodiment; an anode parallel to the lanthanum hexaboride emitter is arranged in the vacuum chamber and is a metal grid mesh, the embodiment adopts a stainless steel mesh, the stainless steel mesh is connected with the wall of the vacuum chamber and is grounded inside, the negative electrode of a discharge power supply is connected with one electrode press block terminal 122 through a copper braided wire by a vacuum electrode, the positive electrode is connected with the wall of the vacuum chamber and is grounded outside, an electric field is generated between the lanthanum hexaboride emitter and the anode, electrons are pulled out, gas is ionized, and plasma is generated.
As shown in fig. 4, the relationship between temperature and heating power is that the present invention uses a direct heating type as the heating method of the large-sized lanthanum hexaboride plasma source, and the heating efficiency is greatly improved by combining the heat reflection and heat insulation means, when the power is 3000W, the temperature of lanthanum hexaboride reaches 1600K, that is, the temperature required by lanthanum hexaboride to emit electrons is reached, and the heating power per unit area is only 60W/cm 2; at the moment, the discharge power supply can be turned on, and 50V bias voltage is added to electrically activate the lanthanum hexaboride emitter; and the heating power is continuously increased, the temperature is rapidly increased under the auxiliary heating action of the discharge current, the power reaches 1800K when 4000W, the discharge current reaches 100A, the electron emission capacity per unit area is 2A/cm2, initial electrons with large area and high current density can be generated, and the large-size and high-ionization plasma environment is realized.
In addition, the lanthanum hexaboride emitter is a modular and combinable design, and the size of the cathode source can be adjusted according to the use requirement by imitating the embodiment. For example, 10 lanthanum hexaboride modules with a diameter of 1cm and a length of 20cm are built up to form a lanthanum hexaboride plasma source with a size of 20cm by 20 cm.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only examples of the present invention, and are not intended to limit the scope of the present invention, and all equivalent structures or equivalent processes, which are directly or indirectly applied to other related technical fields, which are not limited by the description of the present invention and the attached drawings, are included in the scope of the present invention.
Claims (9)
1. A combined direct-heating lanthanum hexaboride plasma source is characterized in that: including lanthanum hexaboride emitters; the lanthanum hexaboride emitter comprises a plurality of lanthanum hexaboride modules, wherein the lanthanum hexaboride modules are connected end to end by conductive electrodes; a heat reflection and heat insulation back plate consisting of a multilayer composite structure is arranged below the emitter, and the periphery of the emitter is surrounded by a heat reflection side plate and a heat insulation side plate; flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; and a heat insulation support column is arranged below the back plate.
2. The plasma source of claim 1, wherein: the lanthanum hexaboride emitter is formed by placing a plurality of lanthanum hexaboride modules in parallel in the same plane.
3. The plasma source of claim 1, wherein: the conductive electrode is composed of an electrode pressing block, an electrode pressing block terminal and an electrode insulation base, wherein the electrode insulation base and the electrode pressing block are both provided with semicircular grooves with diameters larger than those of the lanthanum hexaboride modules, and the lanthanum hexaboride modules are pressed up and down and clamped and fixed.
4. The plasma source of claim 2 or 3, wherein: each electrode pressing block is connected with two lanthanum hexaboride modules, the lanthanum hexaboride modules are connected end to form an S-shaped structure, and two ends of each electrode pressing block are led out from the terminals of the electrode pressing blocks.
5. The plasma source of claim 1, wherein: the heat reflection side plate is made of metal molybdenum; the heat insulation side plate is made of graphite.
6. The plasma source of claim 1, wherein: the back plate comprises five layers, wherein the first layer is an emitter supporting back plate made of graphite and used for insulating heat and fixing the lanthanum hexaboride emitter, the conductive electrode and the side plate; the second layer is a reflective back plate made of molybdenum; the third layer and the fourth layer are both heat-insulating back plates and are made of graphite; the fifth layer is a connecting back plate made of 304 stainless steel and used for heat reflection and connecting with the supporting frame.
7. The plasma source of claim 6, wherein: five layers of the back plate are of a square sheet structure, through holes are formed in four corners of the back plate and are fixedly penetrated through by bolts, and aluminum oxide ceramic flat gaskets are additionally arranged between the layers to reduce heat loss caused by heat conduction.
8. The plasma source of claim 6, wherein: the middle part of the emitter supporting back plate is provided with two lines of through holes for fixing the electrode insulating base, one line is a round hole, and the other line is a waist-shaped hole; when the device works, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, and damage to the lanthanum hexaboride module caused by thermal expansion due to rigid connection of two ends is avoided.
9. The plasma source of claim 1, wherein: the heat insulation support column is made of 304 stainless steel materials and provided with a plurality of holes so as to reduce heat loss caused by heat conduction, and the interval between the heat insulation support column and the back plate is in insulation connection with an alumina ceramic cushion block.
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