CN114717523B - Columnar target water-cooling rotary unit - Google Patents
Columnar target water-cooling rotary unit Download PDFInfo
- Publication number
- CN114717523B CN114717523B CN202210214204.XA CN202210214204A CN114717523B CN 114717523 B CN114717523 B CN 114717523B CN 202210214204 A CN202210214204 A CN 202210214204A CN 114717523 B CN114717523 B CN 114717523B
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- water
- cooling
- unit
- target
- driving
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- 238000001816 cooling Methods 0.000 title claims abstract description 172
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 151
- 238000007789 sealing Methods 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 229910052799 carbon Inorganic materials 0.000 claims description 20
- 239000000110 cooling liquid Substances 0.000 claims description 9
- 239000002826 coolant Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 239000013077 target material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
- F25D1/02—Devices using naturally cold air or cold water using naturally cold water, e.g. household tap water
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Motor Or Generator Cooling System (AREA)
Abstract
The invention discloses a columnar target water-cooling rotary unit, which relates to the technical field of target cooling equipment, and can provide rotary driving and power supply for columnar targets and ensure a cooling effect. A columnar target water-cooling rotary unit comprises a shell, a water-cooling unit, a rotary driving unit and an electrifying unit. The water cooling unit is rotatably arranged in the shell. The target is arranged at the end part of the water cooling unit. The rotary driving unit is arranged on the water cooling unit. The rotary driving unit is used for driving the water cooling unit to rotate so as to drive the target to rotate. The power-on unit is arranged on the shell and is electrically connected with the water-cooling unit. The water cooling unit can drive the target to rotate and cool the target under the drive of the rotary driving unit. The energizing unit can energize the target after switching on the water cooling unit. Meanwhile, through the full contact between the cooling unit and the target, the heat dissipation area of the target is increased, and the heat dissipation effect is enhanced.
Description
Technical Field
The invention relates to the technical field of target cooling equipment, in particular to a columnar target water-cooling rotary unit.
Background
When the target is used, the heating value is extremely high, so that the target is required to be cooled while being electrified, and meanwhile, the target is required to rotate while working, so that the cooling difficulty is further increased.
The existing cooling mode cannot uniformly cool the target due to the rotation requirement of the cooling mode, so that the local temperature of the target is different.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art and provide a water-cooling rotary unit for a columnar target, which can provide rotary driving and power supply for the columnar target and can also ensure the cooling effect.
According to a first aspect of the present invention, there is provided a water-cooled rotary unit for a columnar target, comprising a housing; the water cooling unit is rotatably arranged in the shell, and the target material is arranged at the end part of the water cooling unit; the rotary driving unit is arranged on the water cooling unit and is used for driving the water cooling unit to rotate so as to drive the target to rotate; and an energizing unit disposed on the housing and electrically connected with the water cooling unit.
The beneficial effects are that: a columnar target water-cooling rotary unit comprises a shell, a water-cooling unit, a rotary driving unit and an electrifying unit. The water cooling unit is rotatably arranged in the shell. The target material is arranged at the end part of the water cooling unit, and the water cooling unit can drive the target material to rotate and cool the target material at the same time under the driving of the rotary driving unit. The energizing unit can energize the target after switching on the water cooling unit. Meanwhile, through the full contact between the cooling unit and the target, the heat dissipation area of the target is increased, and the heat dissipation effect is enhanced.
According to the invention, the columnar target water-cooling rotary unit comprises: a cold water input pipe arranged on the shell; the water cooling shaft is rotatably arranged in the shell, a water cooling cavity is arranged in the water cooling shaft, and one end of the water cooling cavity is communicated with the cold water input pipe; the cooling sleeve is rotatably arranged in the shell, the cooling sleeve is sleeved on the water cooling shaft, a water return cavity is formed in front of the inner wall of the cooling sleeve and the outer wall of the water cooling shaft, and the water return cavity is communicated with the water cooling cavity; the target clamping cover is arranged at one end of the cooling sleeve, a fixing hole is formed in the target clamping cover, a cathode of the target is inserted into one end of the fixing hole, a circulating groove is formed in one end, close to the target clamping cover, of the water cooling shaft, the circulating groove is communicated with the backwater cavity and the water cooling cavity, and the other end of the fixing hole is communicated with the circulating groove; the hot water return pipe is arranged on the shell and is communicated with the cooling sleeve; and a sealing assembly for preventing the coolant from flowing out.
According to the columnar target water-cooling rotary unit disclosed by the invention, the water-cooling shaft is provided with the water inlets, the water inlets are circumferentially distributed along the water-cooling shaft and are positioned at the water outlet of the cold water input pipe, the water-cooling shaft is also sleeved with the support ring, the support ring is propped against the inner wall of the cooling sleeve, and the support ring is provided with the plurality of diversion holes.
According to the invention, the columnar target water-cooling rotary unit comprises: the support component is connected with the shell and the water cooling unit; and the driving assembly is arranged on the water cooling unit and is used for driving the water cooling unit to rotate.
According to the columnar target water-cooling rotary unit disclosed by the invention, the sealing assembly comprises a plurality of first sealing rings, a plurality of second sealing rings and a plurality of third sealing rings, the plurality of first sealing rings are sleeved on the water-cooling shaft and positioned on one side of the cold water input pipe, the first sealing rings are used for preventing cooling liquid in the cold water input pipe from leaking outside the shell, the plurality of second sealing rings are sleeved on the cooling sleeve and positioned on one side of the hot water return pipe, the second sealing rings are used for preventing water in the hot water return pipe and the water return cavity from leaking inside the shell, the plurality of third sealing rings are sleeved on the water-cooling shaft and positioned between the cold water input pipe and the hot water return pipe, and the third sealing rings are used for contacting and mixing cooling liquid in the cold water input pipe and the hot water return pipe.
According to the columnar target water-cooling rotary unit, the supporting assembly comprises a plurality of first supporting bearings and a plurality of second supporting bearings, the inner rings of the first supporting bearings are sleeved on the water-cooling shaft, the outer rings of the first supporting bearings are propped against the inner wall of the shell, the inner rings of the second supporting bearings are sleeved on the cooling sleeve, and the outer rings of the second supporting bearings are propped against the inner wall of the shell.
According to the columnar target water-cooling rotary unit, a layer of insulating pad is arranged between the bearing outer ring of the second support bearing and the inner wall of the shell, and the insulating pad is used for preventing the shell from being electrified.
According to the columnar target water-cooling rotary unit, the driving assembly is the first driving ring, the first driving ring is sleeved on the cooling sleeve, and the first driving ring is used for meshing with the power output equipment to drive the cooling sleeve to rotate.
According to the columnar target water-cooling rotary unit, the driving assembly further comprises a second driving ring, the second driving ring is sleeved on the water-cooling shaft and is used for meshing with the power output equipment to drive the water-cooling shaft to rotate.
According to the invention, the columnar target water-cooling rotary unit comprises: the carbon brush mounting rack is arranged on the shell; the brush frame is adjustably arranged on the carbon brush mounting frame; the carbon brush is movably arranged in the brush frame, and one end of the carbon brush is propped against the water cooling unit; and the elastic piece is propped against one end of the carbon brush, which is far away from the water cooling unit, and the elastic piece is used for propping against the carbon brush to move towards the water cooling unit.
Drawings
The invention is further described below with reference to the drawings and examples;
FIG. 1 is a schematic diagram of a preferred embodiment of the present invention;
FIG. 2 is a front view of a preferred embodiment of the present invention;
FIG. 3 is a cross-sectional view taken along section A-A of FIG. 2;
FIG. 4 is a schematic view of a water-cooled shaft according to a preferred embodiment of the present invention;
FIG. 5 is a schematic diagram of the power-on unit according to the preferred embodiment of the present invention;
FIG. 6 is a front view of the energizing unit of the preferred embodiment of the present invention;
fig. 7 is a cross-sectional view of section B-B of fig. 6.
Detailed Description
Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present invention, but not to limit the scope of the present invention.
In the description of the present invention, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
Referring to fig. 1 to 3, a water-cooled rotary unit for a cylindrical target includes a housing 10, a water-cooling unit 20, a rotary driving unit 30, and an energizing unit 40. The water cooling unit 20 is rotatably provided in the housing 10. The target 1 is disposed at the end of the water cooling unit 20. The rotation driving unit 30 is provided on the water cooling unit 20. The rotary driving unit 30 is used for driving the water cooling unit 20 to rotate so as to drive the target 1 to rotate. The energizing unit 40 is provided on the housing 10 and electrically connected to the water cooling unit 20.
Further, referring to fig. 3 and 4, the water cooling unit 20 includes: a cold water input pipe 21, a water cooling shaft 22, a cooling sleeve 23, a target clamping cover 24, a hot water return pipe 25 and a sealing assembly 26. A cold water input pipe 21 is provided on the housing 10. A water cooled shaft 22 is rotatably disposed in the housing 10. The water cooling shaft 22 is provided with a water cooling chamber 221. One end of the water cooling chamber 221 communicates with the cold water input pipe 21. The cooling jacket 23 is rotatably arranged in the housing 10. The cooling jacket 23 is sleeved on the water-cooled shaft 22. The cooling jacket 23 has a water return chamber 231 in front of the inner wall and the outer wall of the water-cooled shaft 22. The water return chamber 231 communicates with the water cooling chamber 221. A target holding cap 24 is provided at one end of the cooling jacket 23. The target holding cover 24 is provided with a fixing hole 241. The cathode of the target 1 is inserted into one end of the fixing hole 241. The water-cooled shaft 22 has a flow channel 222 at one end thereof adjacent to the target holder cover 24. The circulation tank 222 communicates the water return chamber 231 with the water cooling chamber 221. The other end of the fixing hole 241 communicates with the flow groove 222. A hot water return pipe 25 is provided on the housing 10 and communicates with the cooling jacket 23. The seal assembly 26 serves to prevent the coolant from flowing out.
It will be appreciated that the cooling unit 20 operates as follows: the cooling liquid is output from the cold water input pipe 21 to the cold water cavity 221, then passes through the circulation groove 222 and the fixing hole 241 to cool the target 1, and then enters the water return cavity 231 through the circulation groove 222 to flow out from the hot water return pipe 25.
It should be noted that the target holding cover 24 can remove heat from the target 1 and carry the heat away by contacting the cooling liquid.
Referring to fig. 3 and 4, the water cooling shaft 22 is provided with a plurality of water inlet holes 223. The water inlet holes 223 are arranged along the periphery Xiang Huanxing of the water cooling shaft 22 and are positioned at the water outlet of the cold water input pipe 21. The water-cooled shaft 22 is also sleeved with a supporting ring 27. The support ring 27 abuts against the inner wall of the cooling jacket 23. The support ring 27 is provided with a plurality of deflector holes 271.
It will be appreciated that the plurality of water inlet holes 223 are arranged along the periphery Xiang Huanxing of the water cooling shaft 22 and are positioned at the water outlet of the cold water input pipe 21, and when the water cooling shaft 22 rotates, the cooling liquid can still enter the water cooling shaft 22 from the different water inlet holes 223, so that the continuity of the cooling liquid delivery is not affected.
Referring to fig. 1 and 3, the rotation driving unit 30 includes: the support assembly 31 and the drive assembly 32. The supporting assembly 31 connects the housing 10 and the water cooling unit 20. The driving assembly 32 is disposed on the water cooling unit 20. The driving assembly 32 is used for driving the water cooling unit 20 to rotate.
Referring to fig. 3, the seal assembly 26 includes a number of first seal rings 261, a number of second seal rings 262, and a number of third seal rings 263. A plurality of first sealing rings 261 are sleeved on the water cooling shaft 22 and are positioned at one side of the cold water input pipe 21. The first seal ring 261 serves to prevent the coolant in the cold water input pipe 21 from leaking outside the casing 10. A plurality of second sealing rings 262 are sleeved on the cooling sleeve 23 and are positioned at one side of the hot water return pipe 25. The second seal ring 262 serves to prevent water in the hot water return pipe 25 and the return water chamber 231 from leaking into the housing 10. A plurality of third sealing rings 263 are sleeved on the water cooling shaft 22 and are positioned between the cold water input pipe 21 and the hot water return pipe 25. The third seal ring 263 is used for contact mixing of the cooling liquid in the cold water input pipe 21 and the hot water return pipe 25.
It should be noted that in some embodiments of the present invention, the first seal ring 261 is two groups, the second seal ring 262 is three groups, and the third seal ring 263 is a single group. In some other embodiments of the present invention, the number of the first, second and third seal rings 261, 262 and 263 may be specifically set by those skilled in the art according to the pressure of the cooling liquid.
Referring to fig. 3, the support assembly 31 includes a plurality of first support bearings 311 and a plurality of second support bearings 312. The inner rings of the first support bearings 311 are sleeved on the water-cooling shaft 22. The outer rings of the first support bearings 311 are abutted against the inner wall of the housing 10. An inner race of a plurality of second support bearings 312 is sleeved on the cooling jacket 23. The outer rings of the second support bearings 312 are abutted against the inner wall of the housing 10.
It will be appreciated that the support assembly 31 is capable of providing effective support for the rotation of the water cooled shaft 22. Meanwhile, the first support bearing 311 supports the water cooling shaft 22, and the second support bearing 312 supports the cooling sleeve 23, so that the rotation of the water cooling unit 20 is more stable, and the running stability of equipment is improved.
Referring to fig. 3, an insulating pad 313 is provided between the bearing outer race of the second support bearing 312 and the inner wall of the housing 10. The insulating pad 313 serves to prevent the housing 10 from being charged.
It should be noted that, in the conventional target cooling scheme, the housing 10 is basically powered, which greatly increases the safety risk of the staff, and the housing 10 can be insulated by the insulation points 313, so as to reduce the production safety risk.
Referring to fig. 1 and 3, the drive assembly 32 is a first drive ring 321. The first driving ring 321 is sleeved on the cooling jacket 23. The first drive ring 321 is used to engage the power take-off to rotate the cooling jacket 23.
It can be understood that, under the driving of the power transmission device, the first driving ring 321 can drive the cooling sleeve 23 to rotate, and further drive the water cooling shaft 22 and the target 1 to rotate, so as to realize the rotation of the target 1.
Referring to fig. 1 and 3, the driving assembly 32 further includes a second driving ring 322, the second driving ring 322 is sleeved on the water cooling shaft 22, and the second driving ring 322 is used for engaging with a power output device to drive the water cooling shaft 22 to rotate.
Of course, it should be noted that the synchronous driving of the water cooling shaft 22 and the cooling jacket 23 by the second driving ring 322 can increase the stability of the rotation of the water cooling unit 20
Referring to fig. 5 to 7, the energizing unit 40 includes: carbon brush mounting bracket 41, brush holder 42, carbon brush 43, and elastic member 44. A carbon brush mounting bracket 41 is provided on the housing 10. The brush holder 42 is adjustably provided to the carbon brush mounting bracket 41. The carbon brush 43 is movably disposed in the brush holder 42. One end of the carbon brush 43 abuts against the water cooling unit 20. The elastic member 44 abuts against one end of the carbon brush 43 away from the water cooling unit 20. The elastic member 44 is used for pushing the carbon brush 43 to move towards the water cooling unit 20.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present invention.
Claims (9)
1. The utility model provides a column target water-cooling rotary unit which characterized in that includes:
A housing (10);
The water cooling unit (20) is rotatably arranged in the shell (10), and the target (1) is arranged at the end part of the water cooling unit (20);
The rotary driving unit (30) is arranged on the water cooling unit (20), and the rotary driving unit (30) is used for driving the water cooling unit (20) to rotate so as to drive the target (1) to rotate; and
An energizing unit (40) provided on the housing (10) and electrically connected to the water cooling unit (20);
the water cooling unit (20) includes:
a cold water input pipe (21) provided in the housing (10);
a water cooling shaft (22) rotatably arranged in the shell (10), wherein a water cooling cavity (221) is arranged in the water cooling shaft (22), and one end of the water cooling cavity (221) is communicated with the cold water input pipe (21);
The cooling sleeve (23) is rotatably arranged in the shell (10), the cooling sleeve (23) is sleeved on the water cooling shaft (22), a water return cavity (231) is formed in front of the inner wall of the cooling sleeve (23) and the outer wall of the water cooling shaft (22), and the water return cavity (231) is communicated with the water cooling cavity (221);
The target clamping cover (24) is arranged at one end of the cooling sleeve (23), a fixing hole (241) is formed in the target clamping cover (24), the cathode of the target (1) is inserted into one end of the fixing hole (241), a circulation groove (222) is formed in one end, close to the target clamping cover (24), of the water cooling shaft (22), the circulation groove (222) is communicated with the backwater cavity (231) and the water cooling cavity (221), and the other end of the fixing hole (241) is communicated with the circulation groove (222);
A hot water return pipe (25) provided on the housing (10) and communicating with the cooling jacket (23); and
And a seal assembly (26) for preventing the coolant from flowing out.
2. The cylindrical target water-cooling rotary unit according to claim 1, wherein the water-cooling shaft (22) is provided with a plurality of water inlet holes (223), the water inlet holes (223) are circumferentially distributed along the water-cooling shaft (22) and are positioned at the water outlet of the cold water input pipe (21), the water-cooling shaft (22) is further sleeved with a support ring (27), the support ring (27) is abutted against the inner wall of the cooling sleeve (23), and the support ring (27) is provided with a plurality of diversion holes (271).
3. A cylindrical target water-cooled rotary unit according to claim 1, characterized in that the rotary drive unit (30) comprises:
A support assembly (31) connecting the housing (10) and the water cooling unit (20); and
The driving assembly (32) is arranged on the water cooling unit (20), and the driving assembly (32) is used for driving the water cooling unit (20) to rotate.
4. A cylindrical target water-cooling rotary unit according to claim 3, wherein the sealing assembly (26) comprises a plurality of first sealing rings (261), a plurality of second sealing rings (262) and a plurality of third sealing rings (263), the plurality of first sealing rings (261) are sleeved on the water-cooling shaft (22) and are positioned on one side of the cold water input pipe (21), the first sealing rings (261) are used for preventing the cooling liquid in the cold water input pipe (21) from leaking out of the shell (10), the plurality of second sealing rings (262) are sleeved on the cooling sleeve (23) and are positioned on one side of the hot water return pipe (25), the second sealing rings (262) are used for preventing the hot water return pipe (25) and the water in the return cavity (231) from leaking into the shell (10), the plurality of third sealing rings (263) are sleeved on the water-cooling shaft (22) and are positioned between the cold water input pipe (21) and the hot water return pipe (25), and the third sealing rings (263) are used for contacting the cold water return pipe (25).
5. A columnar target water-cooling rotary unit according to claim 3, wherein the supporting component (31) comprises a plurality of first supporting bearings (311) and a plurality of second supporting bearings (312), the inner rings of the first supporting bearings (311) are sleeved on the water-cooling shaft (22), the outer rings of the first supporting bearings (311) are propped against the inner wall of the shell (10), the inner rings of the second supporting bearings (312) are sleeved on the cooling sleeve (23), and the outer rings of the second supporting bearings (312) are propped against the inner wall of the shell (10).
6. The cylindrical target water-cooling rotary unit according to claim 5, wherein a layer of insulation pad (313) is arranged between the bearing outer ring of the second support bearing (312) and the inner wall of the housing (10), and the insulation pad (313) is used for preventing the housing (10) from being electrified.
7. A cylindrical target water-cooling rotary unit according to claim 3, wherein the driving component (32) is a first driving ring (321), the first driving ring (321) is sleeved on the cooling sleeve (23), and the first driving ring (321) is used for engaging with a power output device to drive the cooling sleeve (23) to rotate.
8. The cylindrical target water-cooling rotary unit according to claim 7, wherein the driving assembly (32) further comprises a second driving ring (322), the second driving ring (322) is sleeved on the water-cooling shaft (22), and the second driving ring (322) is used for engaging with a power output device to drive the water-cooling shaft (22) to rotate.
9. A cylindrical target water-cooled rotary unit according to claim 1, wherein the energizing unit (40) comprises:
a carbon brush mounting bracket (41) provided on the housing (10);
a brush holder (42) adjustably provided to the carbon brush mounting frame (41);
A carbon brush (43) which is movably arranged in the brush holder (42), wherein one end of the carbon brush (43) is propped against the water cooling unit (20); and
And the elastic piece (44) is propped against one end of the carbon brush (43) far away from the water cooling unit (20), and the elastic piece (44) is used for propping against the carbon brush (43) to move towards the water cooling unit (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210214204.XA CN114717523B (en) | 2022-03-03 | 2022-03-03 | Columnar target water-cooling rotary unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210214204.XA CN114717523B (en) | 2022-03-03 | 2022-03-03 | Columnar target water-cooling rotary unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114717523A CN114717523A (en) | 2022-07-08 |
| CN114717523B true CN114717523B (en) | 2024-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210214204.XA Active CN114717523B (en) | 2022-03-03 | 2022-03-03 | Columnar target water-cooling rotary unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115433913A (en) * | 2022-09-30 | 2022-12-06 | 江苏乐萌精密科技有限公司 | Rotary cathode water cooling system |
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| JP2009235581A (en) * | 2009-07-23 | 2009-10-15 | Canon Anelva Corp | High-frequency sputtering apparatus |
| WO2015167687A1 (en) * | 2014-04-28 | 2015-11-05 | Sputtering Components, Inc. | Sputtering apparatus |
| CN104532200A (en) * | 2014-12-24 | 2015-04-22 | 四川亚力超膜科技有限公司 | Columnar rotation magnetic control sputtering target |
| CN209338651U (en) * | 2018-12-15 | 2019-09-03 | 湖南玉丰真空科学技术有限公司 | A kind of target cooling device |
| CN109825811A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of semiconductor chilling plate target cooling device |
| CN212610873U (en) * | 2020-05-12 | 2021-02-26 | 肇庆市科润真空设备有限公司 | Long-life multi-arc target suitable for continuous coating production |
| CN111850499A (en) * | 2020-09-02 | 2020-10-30 | 光驰科技(上海)有限公司 | Built-in structure compact type rotary cathode device |
| CN113755803A (en) * | 2021-08-13 | 2021-12-07 | 中山凯旋真空科技股份有限公司 | Rotary driving mechanism and planar cathode device |
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| CN114717523A (en) | 2022-07-08 |
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