CN115433913A - Rotary cathode water cooling system - Google Patents
Rotary cathode water cooling system Download PDFInfo
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- CN115433913A CN115433913A CN202211213148.4A CN202211213148A CN115433913A CN 115433913 A CN115433913 A CN 115433913A CN 202211213148 A CN202211213148 A CN 202211213148A CN 115433913 A CN115433913 A CN 115433913A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
- F25D1/02—Devices using naturally cold air or cold water using naturally cold water, e.g. household tap water
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
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- Chemical & Material Sciences (AREA)
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- Mechanical Engineering (AREA)
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- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the field of magnetron sputtering equipment, and particularly relates to a rotary cathode water cooling system; the rotary cathode water cooling system comprises a flange plate, wherein a water cooling assembly is arranged on the upper surface of the flange plate, the water cooling assembly is connected with the rotary cathode assembly and provides cooling water circulation for the rotary cathode assembly, the water cooling assembly comprises a water inlet pipe, at least one water inflow control assembly is arranged on the water inlet pipe, the water inflow control assembly is connected with a water inlet of the rotary cathode assembly, the rotary cathode water cooling system also comprises a water return pipe, at least one backwater water flow detection assembly is arranged on the water return pipe, an inlet of the backwater water flow detection assembly is connected with a water outlet of the rotary cathode assembly, and a water inlet water temperature detection assembly and a backwater water temperature detection assembly are respectively arranged on the water inlet pipe and the water return pipe; according to the invention, through the adjustment of the water inlet flow control assembly, the rotary cathode assembly can be in a temperature range suitable for sputtering under different powers, so that better sputtering quality and sputtering efficiency are obtained.
Description
Technical Field
The invention belongs to the field of magnetron sputtering equipment, and particularly relates to a rotary cathode water cooling system.
Background
The vacuum magnetron sputtering coating is a coating deposition process with the best coating quality and the widest application range in the field of large-area film deposition at present, has high quality requirements on magnetron sputtering coating equipment in the magnetron sputtering coating process, and is particularly important for a magnetron sputtering cathode in the magnetron sputtering coating equipment.
The water supply system among the prior art is responsible for including supplying water, the water supply is responsible for and is equipped with a plurality of delivery ports, and the water inlet and the delivery port one-to-one of the cooling pipeline of rotatory negative pole, the return water mouth and the return water of cooling pipeline are responsible for and are connected, thereby can form stable circulating water cooling system, realize the cooling function of whole equipment, however, in actual working process, rotatory negative pole has different operating power in the course of the work, different power causes the calorific capacity of rotatory negative pole to be different, the water supply of prior art is responsible for and the return water is responsible for and can not adjust the discharge that gets into rotatory negative pole, make rotatory negative pole under different power, the problem of target surface exists differently, when rotatory negative pole is in low-power state, the lower condition of target surface temperature probably exists, can influence the quality and the efficiency of sputtering, when rotatory negative pole is in high power state, the higher condition of target surface temperature probably exists, also can influence the quality of sputtering.
Disclosure of Invention
Aiming at the defects of the prior art, the invention designs a water cooling system of a rotary cathode.
The specific scheme of the invention is as follows:
rotatory negative pole water cooling system, it includes the flange board, and the lower surface of flange board is equipped with rotatory negative pole subassembly, its characterized in that: the upper surface of flange board be equipped with a water-cooling subassembly, water-cooling subassembly and rotatory cathode assembly are connected and provide the circulation of cooling water for rotatory cathode assembly, water-cooling subassembly includes the inlet tube, is equipped with one inflow flow control subassembly at least on the inlet tube, and inflow flow control subassembly is connected with the water inlet of rotatory cathode assembly, still includes the wet return, is equipped with one return rivers determine module at least on the wet return, return rivers determine module's import and rotatory cathode assembly's delivery port are connected, inlet tube and wet return on be equipped with into water temperature determine module and return water temperature determine module respectively.
Furthermore, the water inlet pipe and the water return pipe are both provided with a water pressure detection part.
Furthermore, the water inlet flow control assembly comprises a valve body connected to the water inlet pipe and a valve control assembly for controlling the opening degree of the valve body, the valve control assembly comprises a valve control mounting plate connected to the valve body, a servo motor is arranged on the valve control mounting plate, and a gear assembly for connecting the output end of the servo motor and the valve rod of the valve body is arranged on the valve control mounting plate.
Furthermore, the rotary cathode component comprises a water inlet end connecting component and a support end connecting component which are connected with the flange plate, and a cathode component connected between the water inlet end connecting component and the support end connecting component, wherein the cathode component comprises a water inlet end plate, a water inlet shaft rod is arranged on the side surface of the water inlet end plate, the water inlet shaft rod is supported and connected on the water inlet end connecting component through a bearing, a cooling shaft rod is arranged inside the water inlet shaft rod, a cavity is formed between the cooling shaft rod and the water inlet shaft rod, the cavity is divided into a water inlet cavity and a water return cavity by the bearing used for supporting the cooling shaft rod in the water inlet shaft rod, water inlet holes communicated with the water inlet cavity are arranged on the water inlet shaft rod and the cooling shaft rod, a water return hole communicated with the water return cavity is also arranged on the water inlet shaft rod, a mounting groove is arranged on the other side surface of the water inlet end plate, a plurality of communicating grooves communicated with the water return cavity are uniformly distributed and arranged on the water inlet end plate along the circumference of the mounting groove, and a water inlet end supporting plate fixed in the mounting groove is also included,
the water-returning device also comprises a water-returning end plate connected to the support end connecting component, wherein an inwards concave water-returning concave cavity is arranged on one side surface of the water-returning end plate, an installation groove is also arranged on the surface of the water-returning end plate, a plurality of communicating grooves communicated with the water-returning concave cavity are uniformly distributed on the water-returning end plate along the circumference of the installation groove, and a water-returning end supporting plate fixed in the installation groove,
still include the negative pole harrow pipe, the both ends of negative pole harrow pipe are connected with intake end plate and return water end plate respectively to and a cooling tube, the both ends of cooling tube are connected respectively on intake end backup pad and return water end backup pad through the bearing, and the one end and the cooling shaft pole of cooling tube are connected, form return water passageway between cooling tube and the negative pole harrow pipe, and return water passageway communicates through intercommunication groove and return water cavity and return water chamber respectively.
Furthermore, a first sealing ring is arranged at the joint of the cooling shaft rod and the water inlet shaft rod.
Further, the water inlet end supporting plate and the water return end supporting plate are provided with a plurality of arc-shaped grooves, and the arc-shaped grooves correspond to the communicating grooves.
Furthermore, a second sealing ring is arranged between the water inlet end plate, the water return end plate and the cathode rake pipe.
Furthermore, the surface of the water inlet shaft rod is provided with grooves at the positions of the water inlet hole and the water return hole, and the water inlet hole and the water return hole are positioned at the bottoms of the grooves.
Further, intake end coupling assembling include first connection casing and second connection casing, the upper end edge shaping of first connection casing has the connection limit, first connection casing passes the flange board, and connect the upper surface connection of limit and flange board, the second is connected the casing and is connected the lower extreme at first connection casing, be equipped with the axial installation chamber in the second connection casing, install interior back shaft in the axial installation chamber, be equipped with the axial mounting hole on the axial of interior back shaft, be equipped with the bearing installation chamber on the interior back shaft at the both ends of axial mounting hole respectively, intake shaft pole cooperation is installed in the axial installation hole, and intake shaft pole's bearing setting is in the bearing installation chamber, the upper end of interior back shaft be formed with a mounting plane, be equipped with on the mounting plane with the inlet through-hole of inlet opening intercommunication and with the return water through-hole intercommunication's return water through-hole, the second connect and still be equipped with the sealed apron that seals axial installation chamber on the casing.
The extension part is arranged in the first connecting shell and the second connecting shell and fixed on the second connecting shell, and a water inlet pipeline and a water return pipeline are arranged in the extension part and are respectively communicated with the water inlet through hole and the water return through hole on the inner support shaft.
Furthermore, a third sealing ring is arranged between the inner supporting shaft and the water inlet shaft rod, a fourth sealing ring is arranged between the lower end of the extension part and the mounting plane of the inner supporting shaft, a fifth sealing ring is arranged between the inner supporting shaft and the second connecting shell, a sixth sealing ring is arranged between the first connecting shell and the second connecting shell, a seventh sealing ring is arranged between the connecting edge of the first connecting shell and the flange plate, and an eighth sealing ring is arranged between the sealing cover plate and the second connecting shell.
In conclusion, the invention has the following beneficial effects:
the invention designs a water-cooling component of a rotary cathode, the water-cooling component provides cooling water for the rotary cathode component through a water inlet pipe, a water return pipe is used for the backflow of the cooling water, the water-cooling detection component and the return water temperature detection component which are arranged on the water inlet pipe and the water return pipe are combined, the flow of the cooling water entering the rotary cathode component is controlled by controlling the opening degree of the water inlet flow control component, so that the water temperature can be detected through the water inlet temperature detection component and the return water temperature detection component when the power of the rotary cathode component is different, and the opening degree of the water inlet flow control component is adjusted according to the fed-back water temperature, so that the rotary cathode component can be in a temperature range suitable for sputtering under different working powers, and better sputtering quality and sputtering efficiency are obtained.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a schematic top view of the present invention;
FIG. 3 is a perspective view of the inlet flow control assembly;
FIG. 4 is a schematic semi-sectional perspective view of the present invention;
FIG. 5 is an enlarged schematic view at A in FIG. 4;
FIG. 6 is an enlarged schematic view at C of FIG. 5;
FIG. 7 is an enlarged schematic view at B of FIG. 4;
FIG. 8 is a perspective view of the inlet end plate and the inlet end connection assembly;
FIG. 9 is a schematic perspective view in half section of FIG. 8;
FIG. 10 is a perspective view of a return water end plate and support end connection assembly;
in the figure 1 there is shown a flange plate,
2 is a rotating cathode assembly which is provided with a cathode,
3 is a water cooling component, 30 is a water inlet pipe, 31 is a water inlet flow control component, 32 is a water return pipe, 33 is a water return flow detection component, 300 is a water inlet water temperature detection component, 320 is a water return water temperature detection component, 34 is a water pressure detection component, 310 is a valve body, 311 is a valve control component, 3111 is a valve control mounting plate, 3112 is a servo motor, 3113 is a gear component,
4 is a water inlet end connecting assembly, 40 is a first connecting shell, 41 is a second connecting shell, 401 is a connecting edge, 410 is an axial mounting cavity, 42 is an inner supporting shaft, 420 is an axial mounting hole, 421 is a mounting plane, 422 is a water inlet through hole, 423 is a water return through hole, 411 is a sealing cover plate,
5 is a support end connecting component, 50 is a support plate, 51 is a bearing mounting cavity,
6 is a cathode component, 60 is a water inlet end plate, 61 is a water inlet shaft rod, 610 is a groove, 62 is a cooling shaft rod, 63 is a cavity, 630 is a water inlet cavity, 631 is a water return cavity, 64 is a water inlet hole, 65 is a water return hole, 66 and 72 are installation grooves, 67 and 73 are communication grooves, 68 is a water inlet end support plate, 680 is an arc-shaped groove,
70 is a backwater end plate, 71 is a backwater concave cavity, 74 is a backwater end supporting plate,
8 is a cathode rake pipe, and the cathode rake pipe,
9 is a cooling pipe, 90 is a water return channel,
100 is a first seal ring, 101 is a second seal ring, 102 is a third seal ring, 103 is a fourth seal ring, 104 is a fifth seal ring, 105 is a sixth seal ring, 106 is a seventh seal ring, 107 is an eighth seal ring,
11 is an extension part, 110 is a water inlet pipeline, and 111 is a water return pipeline.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
It will be understood that when an element is referred to as being "disposed on," "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "secured" or "fixedly coupled" to another element, it can be releasably secured or non-releasably secured to the other element. When an element is referred to as being "connected," "rotationally connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The use of the terms "vertical," "horizontal," "left," "right," "up," "down," and the like are for illustrative purposes only and do not denote a single embodiment.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The terms "first," "second," "third," and the like in the description herein do not denote any particular quantity or order, but rather are used to distinguish one element from another.
Example 1
Rotatory negative pole water cooling system, it includes flange board 1, and the lower surface of flange board 1 is equipped with rotatory negative pole subassembly 2, its characterized in that: the upper surface of flange board 1 be equipped with a water-cooling component 3, water-cooling component 3 is connected and provides the circulation of cooling water for rotatory cathode assembly with rotatory cathode assembly 2, water-cooling component 3 includes inlet tube 30, is equipped with one at least on the inlet tube 30 and intakes flow control component 31, be equipped with two intake flow control components on the inlet tube in this embodiment, a normal use, one is as reserve, when equipment breaks down, can be quick switch over, guarantee the normal clear of production, intake flow control component 31 is connected with the water inlet of rotatory cathode assembly 2, still include wet return 32, be equipped with a return rivers determine module 33 on the wet return 32 at least, this embodiment also is equipped with two return rivers determine module, return rivers determine module 33's import and the delivery port of rotatory cathode assembly 2 are connected, inlet tube 30 and wet return 32 on be equipped with into water temperature determine module 300 and return water temperature determine module 320 respectively, intake water temperature determine module and return water temperature determine module be the temperature sensor of setting on inlet tube and wet return.
The invention detects the water inlet temperature and the water return temperature, and then adjusts the water inlet flow control component according to the temperatures of the water inlet temperature and the water return temperature, thereby achieving the adjustment of the temperature of the rotary cathode component, ensuring that the rotary cathode component can be in a temperature range suitable for sputtering no matter the rotary cathode component works under any power, being more beneficial to the generation of magnetron sputtering, and ensuring the quality and the stability of the magnetron sputtering.
Further, inlet tube 30 and wet return 32 on all be equipped with water pressure detection part 34, water pressure detection part be pressure sensor, be arranged in detecting the water pressure in the inlet tube and the water pressure in the wet return respectively, the cooperation is intake temperature and is detected subassembly and return water temperature and detect the control that the subassembly can be more accurate.
Further, the inflow flow control assembly 31 including connect the valve body 310 on the inlet tube, still include the valve accuse subassembly 311 of control valve body aperture, valve accuse subassembly 311 is including connecting the valve accuse mounting panel 3111 on the valve body, is equipped with servo motor 3112 on the valve accuse mounting panel 3111 to and connect the gear assembly 3113 of the valve rod of servo motor 3112 output and valve body, the gear assembly include a gear wheel and a pinion, the gear wheel is connected on the valve rod of valve body, the pinion is connected at servo motor's output, the rotation through servo motor drives the gear assembly, thereby reach the purpose of control valve body switch size, thereby reach the final purpose of control inflow.
Further, the rotary cathode assembly 2 comprises a water inlet end connecting assembly 4 and a supporting end connecting assembly 5 connected with the flange plate 1, and a cathode assembly 6 connected between the water inlet end connecting assembly 4 and the supporting end connecting assembly 5, the cathode assembly 6 comprises a water inlet end plate 60, a water inlet shaft rod 61 is arranged on the side surface of the water inlet end plate 60, the water inlet shaft rod 61 is supported and connected with the water inlet end connecting assembly 4 through a bearing, a cooling shaft rod 62 is arranged inside the water inlet shaft rod 61, a cavity 63 is formed between the cooling shaft rod 62 and the water inlet shaft rod 61, the cavity 63 is divided into a water inlet cavity 630 and a water return cavity by a bearing used for supporting the cooling shaft rod 62 in the water inlet shaft rod 61, a water inlet hole 64 communicated with the water inlet cavity is arranged on the water inlet shaft rod 61 and the cooling shaft rod 62, a water return hole 65 communicated with the water return cavity is also arranged on the water inlet shaft rod 61, a mounting groove 66 is arranged on the other side surface of the water inlet end plate 60, a plurality of communicating grooves 67 communicated with the water return cavity are uniformly distributed on the circumference of the water inlet end connecting assembly 60, and a supporting plate 68 fixed in the mounting groove,
the water-returning device also comprises a water-returning end plate 70 connected on the supporting end connecting component, a concave water-returning concave cavity 71 is arranged on one side surface of the water-returning end plate 70, a mounting groove 72 is also arranged on the surface of the water-returning end plate 71, a plurality of communicating grooves 73 communicated with the water-returning concave cavity are uniformly distributed on the water-returning end plate 70 along the circumference of the mounting groove, and a water-returning end supporting plate 74 fixed in the mounting groove,
still include negative pole harrow pipe 8, the both ends of negative pole harrow pipe 8 are connected with the end plate of intaking and return water end plate respectively, and a cooling tube 9, the both ends of cooling tube 9 are passed through the bearing and are connected respectively on intaking end backup pad 68 and return water end backup pad 74, the one end and the cooling axostylus axostyle 62 of cooling tube 9 are connected, specifically speaking, through the integral key shaft cooperation between cooling tube and the cooling axostylus axostyle, form return water passageway 90 between cooling tube 9 and the negative pole harrow pipe 8, return water passageway 90 communicates with return water cavity 71 and return water chamber 631 through intercommunication groove (67, 73) respectively.
The structure of the cathode assembly is limited, the structure limits the flow direction of cooling water in the cathode assembly, the cooling water enters the water inlet cavity from the water inlet hole of the water inlet shaft rod, then enters the cooling shaft rod from the water inlet hole of the cooling shaft rod, then flows into the cooling pipe from the cooling shaft rod, flows into the water return channel from the communication groove through the water return cavity of the water return end plate, cools the cathode assembly, then flows back into the water return cavity from the connection groove of the water inlet end plate, and finally flows out of the water return pipe from the water return hole of the water inlet shaft rod.
Furthermore, a first sealing ring 100 is disposed at the connection position of the cooling shaft 62 and the water inlet shaft 61.
Furthermore, a plurality of arc-shaped grooves 680 are formed in the water inlet end support plate 68 and the water return end support plate 74, the arc-shaped grooves 680 correspond to the communicating grooves, sectional areas of the communicating grooves, the water return channel and the water return cavity are increased through the arc-shaped grooves, and flow resistance of cooling water is reduced.
Furthermore, a second sealing ring 101 is arranged between the water inlet end plate 60, the water return end plate 70 and the cathode rake pipe 8.
Further, the surface of inlet shaft pole 61 be equipped with recess 610 in inlet opening and return water hole department, inlet opening 64 and return water hole 65 are located the bottom of recess, the recess that sets up forms the region of a intercommunication, can cross in getting into the recess from the hydroenergy that the end coupling assembling that intakes was come, then flow into the water cavity from a plurality of inlet openings, improve the speed of inflow and intaking, the recess that the return water hole corresponds the department can promote the flow of apopore play water when the backward flow, guarantee that return water rivers can steady quick outflow, avoid the problem of the equipment internal pressure increase that the backward flow caused too slowly.
Further, the water inlet end connecting assembly 4 includes a first connecting housing 40 and a second connecting housing 41, a connecting edge 401 is formed at an upper end edge of the first connecting housing 40, the first connecting housing 40 penetrates through the flange plate 1, and the connecting edge 401 is connected with an upper surface of the flange plate 1, specifically, a connecting hole is formed on the connecting edge, a threaded hole corresponding to the connecting hole is formed on the flange plate, a fastener penetrates through the connecting hole and is connected in the threaded hole to realize fastening of the two, the second connecting housing 41 is connected to a lower end of the first connecting housing 40, an axial mounting cavity 410 is formed in the second connecting housing 41, an inner support shaft 42 is mounted in the axial mounting cavity 410, an axial mounting hole 420 is formed in the axial direction of the inner support shaft 42, bearing mounting cavities are respectively formed on the inner support shafts at two ends of the axial mounting hole 420, and the water inlet shaft 61 is mounted in the axial mounting hole in a matching manner, the bearing of the water inlet shaft rod is arranged in the bearing installation cavity, the upper end of the inner support shaft 42 is provided with an installation plane 421, the installation plane 421 is provided with a water inlet through hole 422 communicated with the water inlet hole and a water return through hole 423 communicated with the water return hole, the second connecting shell 41 is also provided with a sealing cover plate 411 for sealing the axial installation cavity, the structure of the water inlet end connecting component is limited, the split structural design of the first connecting shell and the second connecting shell is adopted, the processing and the assembly of components are convenient, the manufacturing cost is reduced, the assembly efficiency is improved, furthermore, the arranged axial installation cavity is an installation cavity with an opening at one end, the axial installation cavity is sealed through the sealing cover plate, the inner support shaft enters from the opening of the axial installation cavity and is fixed in the second connecting shell, so that the inner support shaft can be independently processed into a part, the maintenance of later stage of being convenient for has reduced the maintenance cost of equipment.
The support end connecting assembly 5 comprises a support plate 50 connected with the flange plate, a bearing installation cavity 51 is formed in the support plate, and the backwater end plate is connected in the bearing installation cavity through a bearing, so that the connection between the backwater end plate and the support plate is realized.
Further, the extension part 11 is further included, the extension part 11 is arranged in the first connecting shell 40 and the second connecting shell 41 and fixed on the second connecting shell 41, a water inlet pipeline 110 and a water return pipeline 111 are arranged in the extension part 11 and are respectively communicated with the water inlet through hole and the water return through hole on the inner supporting shaft, and the extension part is an integrated part and is used for extending the water inlet through hole and the water return through hole on the inner supporting shaft, so that the connection part is positioned at the upper end of the first connecting shell, and the connection of workers is facilitated.
Further, a third seal ring 102 is arranged between the inner support shaft 42 and the water inlet shaft rod 61, a fourth seal ring 103 is arranged between the lower end of the extension part 11 and the installation plane of the inner support shaft 42, a fifth seal ring 104 is arranged between the inner support shaft 42 and the second connection shell 41, a sixth seal ring 105 is arranged between the first connection shell 40 and the second connection shell 41, a seventh seal ring 106 is arranged between the connection edge of the first connection shell 10 and the flange plate 1, and an eighth seal ring 107 is arranged between the sealing cover plate 411 and the second connection shell 41.
In conclusion, the invention has the following beneficial effects:
1. the invention designs a water-cooling component of a rotary cathode, the water-cooling component provides cooling water for the rotary cathode component through a water inlet pipe, a water return pipe is used for the backflow of the cooling water, the water-cooling detection component and the return water temperature detection component which are arranged on the water inlet pipe and the water return pipe are combined, the flow of the cooling water entering the rotary cathode component is controlled by controlling the opening degree of the water inlet flow control component, so that the water temperature can be detected through the water inlet temperature detection component and the return water temperature detection component when the power of the rotary cathode component is different, and the opening degree of the water inlet flow control component is adjusted according to the fed-back water temperature, so that the rotary cathode component can be in a temperature range suitable for sputtering under different working powers, and better sputtering quality and sputtering efficiency are obtained.
2. The structure of the water-cooling component of the rotary cathode is further limited, the flow direction of cooling water in the cathode component is limited by the structure, the cooling water enters the water inlet cavity from the water inlet hole of the water inlet shaft rod, then enters the cooling shaft rod from the water inlet hole of the cooling shaft rod, then flows into the cooling pipe from the cooling shaft rod, flows into the water return channel from the communicating groove through the water return concave cavity of the water return end plate, cools the cathode component, then flows back into the water return cavity from the connecting groove of the water inlet end plate, and finally flows out of the water return hole of the water inlet shaft rod into the water return pipe.
All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
Claims (11)
1. Rotatory negative pole water cooling system, it includes the flange board, and the lower surface of flange board is equipped with rotatory negative pole subassembly, its characterized in that: the upper surface of flange board be equipped with a water-cooling subassembly, water-cooling subassembly and rotatory cathode assembly are connected and provide the circulation of cooling water for rotatory cathode assembly, water-cooling subassembly includes the inlet tube, is equipped with one inflow flow control subassembly at least on the inlet tube, and inflow flow control subassembly is connected with the water inlet of rotatory cathode assembly, still includes the wet return, is equipped with one return rivers determine module at least on the wet return, return rivers determine module's import and rotatory cathode assembly's delivery port are connected, inlet tube and wet return on be equipped with into water temperature determine module and return water temperature determine module respectively.
2. The rotating cathode water cooling system according to claim 1, wherein: the water inlet pipe and the water return pipe are both provided with a water pressure detection part.
3. The rotating cathode water cooling system according to any one of claims 1 or 2, wherein: the water inlet flow control assembly comprises a valve body connected to the water inlet pipe and a valve control assembly for controlling the opening degree of the valve body, the valve control assembly comprises a valve control mounting plate connected to the valve body, a servo motor is arranged on the valve control mounting plate, and a gear assembly for connecting the output end of the servo motor and the valve rod of the valve body is arranged.
4. The rotating cathode water cooling system according to claim 3, wherein: the rotary cathode component comprises a water inlet end connecting component and a support end connecting component which are connected with a flange plate, and a cathode component connected between the water inlet end connecting component and the support end connecting component, wherein the cathode component comprises a water inlet end plate, a water inlet shaft lever is arranged on the side surface of the water inlet end plate and is supported and connected on the water inlet end connecting component through a bearing, a cooling shaft lever is arranged in the water inlet shaft lever, a cavity is formed between the cooling shaft lever and the water inlet shaft lever, the cavity is divided into a water inlet cavity and a water return cavity by the bearing used for supporting the cooling shaft lever in the water inlet shaft lever, water inlet holes communicated with the water inlet cavity are arranged on the water inlet shaft lever and the cooling shaft lever, a water return hole communicated with the water return cavity is also arranged on the water inlet shaft lever, an installation groove is arranged on the side surface of the water inlet end plate, a plurality of communicating grooves communicated with the water return cavity are uniformly distributed on the water inlet end plate along the circumference of the installation groove, and a water inlet end supporting plate fixed in the installation groove,
the water-returning device also comprises a water-returning end plate connected with the support end connecting component, wherein a concave water-returning concave cavity is arranged on one side surface of the water-returning end plate, a mounting groove is also arranged on the surface of the water-returning end plate, a plurality of communicating grooves communicated with the water-returning concave cavity are uniformly distributed on the water-returning end plate along the circumference of the mounting groove, and a water-returning end supporting plate fixed in the mounting groove,
still include the negative pole harrow pipe, the both ends of negative pole harrow pipe are connected with intake end plate and return water end plate respectively to and a cooling tube, the both ends of cooling tube are connected respectively on intake end backup pad and return water end backup pad through the bearing, and the one end and the cooling shaft pole of cooling tube are connected, form return water passageway between cooling tube and the negative pole harrow pipe, and return water passageway communicates through intercommunication groove and return water cavity and return water chamber respectively.
5. The rotating cathode water cooling system according to claim 4, wherein: and a first sealing ring is arranged at the joint of the cooling shaft lever and the water inlet shaft lever.
6. The rotating cathode water cooling system according to claim 4, wherein: the water inlet end supporting plate and the water return end supporting plate are provided with a plurality of arc-shaped grooves, and the arc-shaped grooves correspond to the communicating grooves.
7. The rotating cathode water cooling system according to claim 4, wherein: and a second sealing ring is arranged between the water inlet end plate, the water return end plate and the cathode rake pipe.
8. The rotating cathode water cooling system according to claim 4, wherein: the surface of the water inlet shaft rod is provided with grooves at the positions of the water inlet hole and the water return hole, and the water inlet hole and the water return hole are positioned at the bottoms of the grooves.
9. The rotating cathode water cooling system according to claims 4-8, wherein: the water inlet end connecting assembly comprises a first connecting shell and a second connecting shell, a connecting edge is formed at the edge of the upper end of the first connecting shell, the first connecting shell penetrates through the flange plate and is connected with the upper surface of the flange plate, the second connecting shell is connected to the lower end of the first connecting shell, an axial mounting cavity is formed in the second connecting shell, an inner supporting shaft is mounted in the axial mounting cavity, axial mounting holes are formed in the axial direction of the inner supporting shaft, bearing mounting cavities are respectively formed in the inner supporting shafts at the two ends of the axial mounting hole, the water inlet shaft is mounted in the axial mounting holes in a matched mode, a bearing of the water inlet shaft is arranged in the bearing mounting cavity, a mounting plane is formed at the upper end of the inner supporting shaft, a water inlet through hole communicated with the water inlet hole and a water return through hole communicated with the water return through hole are formed in the mounting plane, and a sealing cover plate for sealing the axial mounting cavity is further arranged on the second connecting shell.
10. The rotary cathode water cooling system as recited in claim 9, wherein: the water inlet pipeline and the water return pipeline are arranged in the extension part and are communicated with the water inlet through hole and the water return through hole in the inner support shaft respectively.
11. The rotating cathode water cooling system as recited in claim 10, wherein: the water inlet device is characterized in that a third sealing ring is arranged between the inner supporting shaft and the water inlet shaft rod, a fourth sealing ring is arranged between the lower end of the extension part and the mounting plane of the inner supporting shaft, a fifth sealing ring is arranged between the inner supporting shaft and the second connecting shell, a sixth sealing ring is arranged between the first connecting shell and the second connecting shell, a seventh sealing ring is arranged between the connecting edge of the first connecting shell and the flange plate, and an eighth sealing ring is arranged between the sealing cover plate and the second connecting shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211213148.4A CN115433913A (en) | 2022-09-30 | 2022-09-30 | Rotary cathode water cooling system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211213148.4A CN115433913A (en) | 2022-09-30 | 2022-09-30 | Rotary cathode water cooling system |
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| CN115433913A true CN115433913A (en) | 2022-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211213148.4A Pending CN115433913A (en) | 2022-09-30 | 2022-09-30 | Rotary cathode water cooling system |
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| CN213086094U (en) * | 2020-09-03 | 2021-04-30 | 成都齐荣科技有限公司 | Magnetron sputtering rotating cathode |
| CN114717523A (en) * | 2022-03-03 | 2022-07-08 | 四川艾庞机械科技有限公司 | Columnar target water-cooling rotary unit |
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| JPH05190128A (en) * | 1992-01-13 | 1993-07-30 | Rigaku Corp | Rotary anticathode x ray generator |
| CN1910967A (en) * | 2004-01-13 | 2007-02-07 | 皇家飞利浦电子股份有限公司 | Liquid flow sensor for x-ray tubes |
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