CN114618747A

CN114618747A - Fluid ejection device

Info

Publication number: CN114618747A
Application number: CN202111392523.1A
Authority: CN
Inventors: 朴庸硕; 朴康淳
Original assignee: DMS Co Ltd
Current assignee: DMS Co Ltd
Priority date: 2020-12-10
Filing date: 2021-11-23
Publication date: 2022-06-14

Abstract

The invention provides a fluid ejecting apparatus which can prevent the blocking phenomenon of an ejection opening caused by foreign matters and eject liquid with uniform capacity through the ejection opening. To this end, the present invention discloses the following features, namely, comprising: a first plate; a second plate coupled to the first plate; and a fluid flow path formed between the first plate and the second plate and connecting the fluid supply port and the fluid ejection port, the fluid flow path including: a first buffer filled with the fluid flowing in from the fluid supply port; a first flow path connected to the first buffer; a second buffer section connected to the first flow path and filled with the fluid having passed through the first flow path; and a second flow path connecting the second buffer portion and the fluid ejection port, the first flow path having a width smaller than that of the second flow path.

Description

Fluid ejection device

Technical Field

The present invention relates to a fluid ejecting apparatus, and more particularly, to a fluid ejecting apparatus capable of preventing a clogging phenomenon of an ejection port due to foreign substances contained in a fluid at the time of ejecting the fluid and uniformly ejecting the fluid.

Background

Substrates such as semiconductor wafers and displays are manufactured through various manufacturing steps in which a fluid ejecting apparatus for ejecting and supplying a liquid subjected to a special process to the substrate side is provided for the surface treatment of the substrate.

A fluid ejection device for substrate surface treatment, which has long Slit (Slit) -shaped ejection openings corresponding to the width of a substrate to supply a uniform volume of liquid to the substrate side, is also called an Aqua Knife (Aqua Knife).

In order to solve the problem that the ejection port may be clogged due to foreign substances existing in the liquid in such a fluid ejection device, a filter is disposed at the rear end of a pump for pumping the liquid, and the foreign substances flowing into the fluid ejection device are trapped by the filter.

However, various by-products generated by the scaling of the piping or the chemical reaction flow into the inside of the fluid injection device, and a large amount of these by-products are accumulated in the inside of the fluid injection device, and thus a phenomenon occurs in which the injection port is clogged or the oil film of the liquid injected from the injection port is broken.

In addition, if foreign matter is clogged in a partial region of the slit-shaped ejection opening, uniform ejection cannot be ensured at the entire slit-shaped ejection opening, thereby causing process defects.

As a prior art document, there is Korean laid-open patent publication No. 2007-0069479 (published 2007, 7/3).

Disclosure of Invention

Technical problem to be solved by the invention

The technical problem to be solved by the present invention is to provide a fluid ejection device that can prevent a clogging phenomenon of an ejection port caused by foreign substances and can eject a uniform volume of liquid through the ejection port.

The problems to be solved by the present invention are not limited to the above technical problems, and other technical problems not mentioned may be clearly understood by those skilled in the art to which the present invention pertains through the following descriptions.

Means for solving the problems

In order to solve the above problem, a fluid ejection device according to an embodiment of the present invention may be characterized by including: a first plate; a second plate coupled to the first plate; and a fluid flow path formed between the first plate and the second plate and connecting the fluid supply port and the fluid ejection port, in this case, the fluid flow path includes: a first buffer filled with the fluid flowing in from the fluid supply port; a first flow path connected to the first buffer section; a second buffer section connected to the first flow path and filled with the fluid having passed through the first flow path; and a second flow path connecting the second buffer portion and the fluid ejection port, the first flow path having a width smaller than that of the second flow path.

In the fluid ejection device according to the embodiment of the invention, the first buffer portion may be formed such that a bottom surface connected to an upper end portion of the first flow path is inclined downward so that foreign matter caught at the upper end portion of the first flow path is distant from the first flow path.

In the fluid ejection device according to the embodiment of the invention, a ratio of the width of the first flow path to the width of the second flow path may be 0.5 to 0.8: 1.

In the fluid ejection device according to the embodiment of the invention, the fluid flow path may further include a discharge flow path communicating with a lower end portion of the first buffer portion connected to the first flow path for discharging the foreign matters trapped at an upper end portion of the first flow path to the outside.

In the fluid ejection device according to the embodiment of the invention, a valve may be provided at the discharge flow path for opening the discharge flow path at each set cycle to discharge the foreign matter trapped at the upper end portion of the first flow path to the outside.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, the first flow path having a width smaller than the width of the second flow path communicating with the ejection port realizes a filter function of preventing foreign matters contained in the fluid from reaching the second flow path, thereby preventing the fluid ejection port from being clogged with foreign matters or preventing the oil film of the ejected fluid from being broken, and ejecting and supplying a uniform volume of liquid over the entire ejection area.

According to the present invention, foreign matter is prevented from moving to the second flow path side through the first flow path and the trapped foreign matter is discharged to the outside, whereby the maintenance cost of the apparatus can be reduced.

Drawings

FIG. 1 is a cross-sectional illustration of a fluid ejection device according to an embodiment of the invention.

Fig. 2 is a partially enlarged view of fig. 1.

Description of the reference numerals

110: first plate 120: second plate

101: fluid supply port 102: fluid ejection port

130: fluid flow path 131: a first buffer part

132: first flow path 133: a second buffer part

134: second flow path 135: discharge flow path

Detailed Description

Hereinafter, a description will be given with reference to the drawings of preferred embodiments of the present invention which can embody the problems to be solved. In describing the present embodiment, the same names and the same reference numerals are used for the same structures, and additional description thereof is omitted.

Referring to fig. 1, a fluid ejection device according to the present invention may include a first plate 110, a second plate 120, and a fluid flow path 130.

The first illustrated fluid ejection device is an illustration showing a cross section with respect to the longitudinal direction, and may be provided in a plate shape formed long in a horizontal direction a2 intersecting with the height direction a 1.

The first plate 110 may form one side of the fluid ejection device and may have a first coupling surface coupled with the second plate 120.

The second plate 120 may form the other side of the fluid ejection device and may have a second bonding surface bonded to the first plate 110.

The first plate 110 and the second plate 120 may be combined using a not-shown combining tool such that the first combining surface and the second combining surface are brought into close contact.

A sealing member insertion groove 105 into which a sealing member, not shown, is inserted may be provided at the first bonding surface or the second bonding surface.

The fluid flow path 130 may be formed between the first plate 110 and the second plate 120, and may be formed between the first bonding surface and the second bonding surface.

The fluid flow path 130 may be formed by being recessed from a portion of the first combining surface or the second combining surface.

In addition, a fluid supply port 101 communicating with the fluid flow path 130 may be provided at the first plate 110 or the second plate 120, and the fluid supply port 101 may guide fluid pressure-fed from an external fluid supply portion to the fluid flow path 130 side. The fluid flow path 130 according to the embodiment is penetratingly formed at an upper portion of the first plate 110.

Further, fluid ejection ports 102 to eject fluid may be provided at lower end portions of the first and

second plates

110 and 120.

Accordingly, the fluid flow path 130 disposed between the first plate 110 and the second plate 120 may be provided to connect the fluid supply port 101 and the fluid ejection port 102.

The present invention improves the flow path structure of such a fluid flow path 130, suppresses an uneven ejection phenomenon such as clogging of the fluid ejection port 102 due to foreign substances present in the fluid or oil film break at the time of fluid ejection, and can eject a uniform volume of liquid over the entire fluid ejection port 102.

To this end, the fluid flow path 130 may include a first buffer portion 131, a first flow path 132, a second buffer portion 133, and a second flow path 134.

The first buffer portion 131 may be connected to the fluid supply port 101, and may be provided with a first buffer space filled with the fluid flowing in from the fluid supply port 101.

The first buffer 131 can reduce the pressure of the fluid flowing into the first buffer space of the first buffer 131 once, and the fluid filled in the first buffer space of the first buffer 131 can then move uniformly in the longitudinal direction a2 of the first flow path 132 as a whole.

The first flow path 132 may be connected to a lower end portion of the first buffer portion 131, and may be formed to have a first width W1.

The first width W1 may be formed to have an appropriate size according to the use of the fluid, and the size may be adjusted and set according to the type of foreign matter present in the fluid.

The second buffer portion 133 may be connected to a lower end portion of the first flow path 132, and may be provided with a second buffer space filled with the fluid passing through the first flow path 132.

The second buffer 133 may drop the pressure of the fluid flowing into the inside through the first flow path 132 again, the fluid filled into the second buffer space of the second buffer 133 may then move uniformly with respect to the lengthwise direction a2 of the second flow path 134 as a whole, and may be ejected uniformly through the fluid ejection port 102 provided at the lower end portion of the second flow path 134.

The second flow path 134 may connect the lower end portion of the second buffer portion 133 and the fluid ejection port 102, and may be formed to have a second width W2.

Here, the second width W2 may be formed to be greater than the first width W1, and it is preferable that the ratio of the first width W1 to the second width W2 may have a range of 0.5 to 0.8: 1.

The fluid ejection port 102 provided at the lower end portion of the second flow path 134 may be formed integrally with the second flow path 134, and may be formed to have the same width as the second width W2.

Alternatively, the fluid ejection port 102 communicating with the second flow path 134 may be formed by separately coupling a nozzle formed with a fluid ejection port to the lower end portions of the first plate 110 and the second plate 120.

As described above, in the process of moving the fluid filled into the first buffer portion 131 through the fluid supply port 101 toward the first flow path 132 side, foreign substances present in the fluid may not enter the first flow path 132 side, but may be trapped in the upper portion of the first flow path 132 and be trapped. In particular, since the first width W1 is formed smaller than the second width W2, if a foreign material having a size larger than that of the second flow path 134 flows, it is possible to prevent the second flow path 134 from being clogged with the foreign material.

As a result, the fluid ejected from the fluid ejection port 102 through the second buffer portion 133 and the second flow path 134 is a fluid filtered of foreign substances, the fluid ejection port 102 can be prevented from being clogged with foreign substances, oil film breakage of the ejected fluid, or the like, and a uniform volume of liquid can be ejected and supplied over the entire ejection area.

Fig. 2 is a partially enlarged view of fig. 1.

Referring again to fig. 2, the first buffer portion 131 may be formed such that the bottom surface 131a connected to the upper end portion of the first flow path 132 is inclined in a lower direction as it is farther from the first flow path 132.

Thereby, the foreign matter P trapped at the upper end portion of the first flow path 132 may be guided to the inclined bottom surface 131a of the first buffer 131 and accumulated at the peripheral area of the bottom surface 131a of the first buffer 131 while being distant from the first flow path 132. This allows the fluid from which the foreign matter P has been removed to flow more smoothly from the first buffer 131 to the second flow path 132.

Additionally, the fluid flow path 130 may also include a drain flow path 135.

The discharge flow path 135 may be connected to the bottom surface 131a of the first buffer 131 connected to the first flow path 132, and may discharge the foreign substances P caught at the upper end of the first flow path 132, i.e., the bottom surface 131a of the first buffer 131, to the outside.

As shown in the drawing, in the case where the bottom surface 131a of the first buffer 131 is obliquely arranged, the discharge flow path 135 may be connected to maintain the same height as the inclined bottom surface 131a of the first buffer 131. Thereby, when a pressure difference occurs between the first buffer portion 131 and the discharge flow passage 135, the foreign matter P can naturally move to the discharge flow passage 135 side.

Of course, the present invention is not limited thereto, and the discharge flow path 135 may be formed to be inclined while maintaining the same inclination angle as the inclined bottom surface 131 a.

Further, the discharge flow path 135 may be provided as a plurality of holes arranged at intervals in the longitudinal direction a2 of the second plate 120. As another example, the discharge flow path 135 may be provided as a slit formed along the longitudinal direction a2 of the second plate 120.

Such a discharge flow path 135 may be provided with outlets which are extended toward both sides of the second plate 120 in the longitudinal direction a2, and a valve may be provided at the outlets.

That is, the valve maintains a closed state when the fluid is injected through the fluid injection port 102, and opens the valve when the fluid injection is stopped, so that the foreign matter P can be discharged to the outside through the discharge flow path 135 together with the fluid remaining at the first buffer portion 131.

In addition, the foreign matter to be washed may be forcibly discharged to the outside through the discharge flow path 135 by pressurizing and supplying the separate washing water to the fluid flow path 130 in a state where the valve is opened.

The present invention is not limited to the above-described embodiment, and the first buffer portion 131, the second buffer portion 133, and the discharge flow path 135 may be formed along the longitudinal direction a2 of the first plate 110.

As a result, the foreign matter P is discharged to the outside while the valve is opened every predetermined period in use of the fluid ejection device, whereby the maintenance period can be increased, and stable and uniform fluid ejection can be maintained for a long time.

As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings, but those skilled in the art can make various modifications or changes to the present invention without departing from the spirit and scope of the invention as set forth in the claims.

Claims

1. A fluid ejection device, comprising:

a first plate;

a second plate coupled to the first plate; and

a fluid flow path formed between the first plate and the second plate and connecting a fluid supply port and a fluid ejection port,

the fluid flow path includes:

a first buffer filled with the fluid flowing in from the fluid supply port;

a first flow path connected to the first buffer;

a second buffer section connected to the first flow path and filled with the fluid having passed through the first flow path; and

a second flow path connecting the second buffer portion and the fluid ejection port,

the width of the first flow path is smaller than the width of the second flow path.

2. The fluid ejection device according to claim 1, wherein the first buffer portion is formed such that a bottom surface thereof connected to an upper end portion of the first flow path is inclined downward so that foreign matter caught at the upper end portion of the first flow path is distanced from the first flow path.

3. The fluid ejection device of claim 1, wherein a ratio of a width of the first flow path to a width of the second flow path is 0.5 to 0.8: 1.

4. The fluid ejection device according to claim 1, wherein the fluid flow path further includes a discharge flow path that communicates with a lower end portion of the first buffer portion connected to the first flow path for discharging foreign matter trapped at an upper end portion of the first flow path to the outside.

5. The fluid ejection device according to claim 4, wherein a valve for opening the discharge flow path at each set cycle to discharge the foreign matter trapped at the upper end portion of the first flow path to the outside is provided at the discharge flow path.