CN114607599B - Multistage Roots vacuum pump - Google Patents

Multistage Roots vacuum pump Download PDF

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Publication number
CN114607599B
CN114607599B CN202011447652.1A CN202011447652A CN114607599B CN 114607599 B CN114607599 B CN 114607599B CN 202011447652 A CN202011447652 A CN 202011447652A CN 114607599 B CN114607599 B CN 114607599B
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China
Prior art keywords
roots
pump cavity
rotor
vertical plate
cavity
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CN202011447652.1A
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Chinese (zh)
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CN114607599A (en
Inventor
刘坤
倪久双
王光玉
孔祥玲
巴要帅
钟瑞
王桂鹏
迟小宇
巴德纯
刘云鹏
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Sky Development Co ltd Chinese Academy Of Sciences
Northeastern University China
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Sky Development Co ltd Chinese Academy Of Sciences
Northeastern University China
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Priority to CN202011447652.1A priority Critical patent/CN114607599B/en
Publication of CN114607599A publication Critical patent/CN114607599A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention relates to the technical field of vacuum, in particular to a multistage Roots vacuum pump which comprises Roots pump cavities, partition plates, roots rotors, a first sealing cover, a second sealing cover and a rotor shaft, wherein the Roots pump cavities and the partition plates are arranged in a staggered mode, the Roots rotors are arranged in each Roots pump cavity, each Roots pump cavity comprises a detachable upper pump cavity part and a detachable lower pump cavity part, an air inlet groove is formed in the upper side of the Roots pump cavity, an air outlet groove is formed in the lower side of the Roots pump cavity, the partition plates comprise a detachable upper partition plate part and a detachable lower partition plate part, a gas channel is arranged in the partition plates, one end of the gas channel is provided with a partition plate exhaust port which is communicated with the air inlet groove on the adjacent Roots pump cavity, the other end of the gas channel is provided with a partition plate air inlet which is communicated with the air outlet groove on the adjacent Roots pump cavity, the first sealing cover is provided with the air inlet cavity which is communicated with the air inlet groove on the adjacent Roots pump cavity, the second sealing cover is provided with the air outlet groove which is communicated with the detachable semi-rotors. The invention is convenient and flexible to assemble, disassemble and adjust, and increases the area of the air inlet and the air outlet.

Description

Multistage Roots vacuum pump
Technical Field
The invention relates to the technical field of vacuum, in particular to a multistage Roots vacuum pump.
Background
Roots vacuum pumps have evolved from Roots blowers, including high vacuum multistage Roots pumps, medium vacuum Roots booster pumps, and direct atmosphere dry Roots pumps, which are widely used in the chemical, paper, metallurgical, film preparation, food, etc. industries, where high vacuum multistage Roots pumps are also a common type of vacuum pump in the IC equipment industry.
The multistage Roots vacuum pump needs to adopt different vacuum pumps or the combination of a plurality of different Roots rotors to obtain the required vacuum according to different use demands, but the single-stage Roots pump cannot be operated independently, the multistage Roots pump is inconvenient to disassemble, and the multistage Roots pump often needs to be disassembled integrally, so that the corresponding rotor cannot be disassembled and replaced for a certain stage.
Disclosure of Invention
The invention aims to provide a multistage Roots vacuum pump which is convenient for flexible disassembly and adjustment of each stage and increases the area of an air inlet and an air outlet.
The aim of the invention is realized by the following technical scheme:
the multistage Roots vacuum pump comprises Roots pump cavities, a partition plate, roots rotors, a first sealing cover, a second sealing cover and a rotor shaft, wherein the Roots pump cavities and the partition plate are arranged between the first sealing cover and the second sealing cover in a staggered manner, the Roots rotors are arranged in each Roots pump cavity, the rotor shaft is inserted from one side of the second sealing cover, and each Roots rotor is sleeved on the rotor shaft; the roots pump chamber comprises a detachable pump chamber upper portion and a pump chamber lower portion, an air inlet groove is formed in the upper side of the roots pump chamber, an air outlet groove is formed in the lower side of the roots pump chamber, the partition plate comprises a detachable partition plate upper portion and a partition plate lower portion, a gas channel is arranged in the partition plate, a partition plate air outlet is formed in one end of the gas channel and is correspondingly communicated with the air inlet groove on the adjacent roots pump chamber, a partition plate air inlet is formed in the other end of the gas channel and is correspondingly communicated with the air outlet groove on the adjacent roots pump chamber, a first sealing cover is provided with the air inlet chamber and is correspondingly communicated with the air inlet groove on the adjacent roots pump chamber, a second sealing cover is provided with the air outlet chamber and is correspondingly communicated with the air outlet groove on the adjacent roots pump chamber, and the roots rotor comprises a plurality of detachable semi-rotors.
The pump chamber upper portion upside intermediate position is equipped with the air inlet tank, pump chamber lower part downside intermediate position is equipped with the exhaust groove, just air inlet tank and exhaust groove divide to locate roots pump chamber left and right sides.
The air conditioner is characterized in that a first upper vertical plate and a second upper vertical plate are arranged on the upper portion of the partition plate, the lower portion of the partition plate (provided with a first lower vertical plate and a second lower vertical plate, the first upper vertical plate and the first lower vertical plate are in butt joint to form a first vertical plate, the second upper vertical plate and the second lower vertical plate are in butt joint to form a second vertical plate, a gas channel is formed between the first vertical plate and the second vertical plate, a partition plate exhaust port is arranged on the upper side of the first upper vertical plate and is communicated with the gas channel, and a partition plate air inlet is arranged on the lower side of the second lower vertical plate and is communicated with the gas channel.
The first vertical plate and the second vertical plate are arranged at the middle position of the partition plate.
The pump chamber upper portion is equipped with protruding gomphosis location between the pump chamber lower part, also be equipped with protruding gomphosis location between baffle upper portion and the baffle lower part.
The pump chamber wall both sides all are equipped with pump chamber first terminal surface and pump chamber second terminal surface, just on pump chamber second terminal surface that corresponds the side is located to air inlet tank and exhaust groove, baffle chamber wall both sides all are equipped with baffle first terminal surface and baffle second terminal surface, and when the Roots pump chamber is inlayed with adjacent baffle, pump chamber first terminal surface is hugged closely with adjacent baffle first terminal surface, pump chamber second terminal surface is hugged closely with adjacent baffle second terminal surface be equipped with the seal groove of holding sealing washer on the baffle chamber wall between baffle first terminal surface and the baffle second terminal surface.
The Roots rotor comprises a plurality of half rotors, the structures of the half rotors are the same, the upper side of the half rotor is a rotor cambered surface, the middle part of the lower side of the half rotor is provided with a notch which is connected to form a rotor shaft hole, the two sides of the notch are provided with connecting parts, one connecting part is provided with a jogging bulge, the other connecting part is provided with a jogging groove, and the upper end of each connecting part is provided with a pin hole.
And a shaft sleeve is arranged between the Roots rotor and the rotor shaft, an internal thread is arranged in the shaft sleeve and is in threaded connection with the rotor shaft, and an external thread is arranged outside the shaft sleeve and is in threaded connection with the Roots rotor.
The upper parts of the partition plates and the upper parts of the pump cavities are made of transparent materials.
The invention has the advantages and positive effects that:
1. the Roots pump cavity, the partition plates and the Roots rotors are all of split type structures, the vertical independent assembly can be realized, the trouble of corresponding integral disassembly and assembly or outer-to-inner disassembly and assembly is omitted, in addition, the Roots pump cavity, the partition plates on two sides and the Roots rotors on corresponding stages can also form a module, and the module can be disassembled and replaced as a whole, so that the disassembly process of the rotor pump cavity and the partition plates is simplified, the disassembly and assembly are more flexible, and the corresponding adjustment of the rotor gaps on corresponding stages is convenient.
2. The Roots pump cavity is provided with an air inlet groove and an air outlet groove, the partition plate is provided with a partition plate air inlet, a partition plate air outlet and an air channel formed between the first vertical plate and the second vertical plate, the partition plate air outlet is correspondingly communicated with the air inlet groove on the adjacent Roots pump cavity, the partition plate air inlet is correspondingly communicated with the air outlet groove on the adjacent Roots pump cavity, and the air inlet groove, the air outlet groove and the first vertical plate and the second vertical plate are respectively arranged at the middle position between the rotor shaft holes, so that the partition plate air inlet and the partition plate air outlet occupy part of the area of the Roots cavity but do not overlap with the sweeping area of the Roots rotor, and the rotation of the Roots rotor is not influenced while the area of the air inlet and the air outlet is increased.
3. The Roots pump cavity wall is provided with a first end face and a second end face, the partition wall is provided with a first end face and a second end face, the first end face 9 of the pump cavity is clung to the first end face of the adjacent partition, the second end face of the pump cavity is clung to the second end face of the adjacent partition, therefore, the Roots pump cavity is embedded with the adjacent partition, and in addition, a sealing groove for accommodating a sealing ring is arranged on the partition wall between the first end face and the second end face of the partition to ensure the sealing in the cavity.
4. The Roots rotor comprises a plurality of half rotors with the same structure, and the half rotors have interchangeability, so that the processing difficulty of parts of the half rotors is reduced.
5. The invention has the advantages that the convex jogging is arranged between the upper part of the pump cavity and the lower part of the pump cavity and between the upper part of the baffle plate and the lower part of the baffle plate to realize self-positioning, thereby omitting an unnecessary positioning mechanism and simplifying the structure of equipment.
6. In order to ensure that the gap between the Roots rotor and the partition plate is adjustable, a shaft sleeve with internal threads and external threads can be arranged between the Roots rotor and the rotor shaft.
7. In order to display the working process of the roots rotor of the multistage roots pump, the upper part of the partition plate and the upper part of the pump cavity can be replaced by transparent materials according to actual needs, and the running state of the roots rotor can be displayed in the working process of the multistage roots pump.
Drawings
Figure 1 is a schematic view of the structure of the present invention,
figure 2 is a schematic view of the Roots pump chamber of figure 1,
figure 3 is a side view of the Roots pump chamber of figure 2,
figure 4 is a schematic view of the spacer plate of figure 1,
figure 5 is a side view of the spacer plate of figure 4,
figure 6 is a schematic view of the roots rotor of figure 1,
figure 7 is a cross-sectional view A-A of figure 6,
figure 8 is a schematic view of the half-rotor of figure 7,
fig. 9 is a side schematic view of the half rotor of fig. 8.
Wherein, 1: a first cover; 2: an air inlet cavity; 3: roots pump chamber; 4: a partition plate; 5: a Roots rotor; 6: a rotor shaft; 7: an exhaust chamber; 8: the upper part of the pump cavity; 9: a first end face of the pump chamber; 10: a second end face of the pump chamber; 11: an air inlet groove; 12: the lower part of the pump cavity; 13: an exhaust groove; 14: the upper part of the partition board; 15: the lower part of the baffle plate; 16: a first vertical plate; 17: a first end face of the partition; 18: sealing grooves; 19: a second end face of the partition; 20: a partition exhaust port; 21: a gas channel; 22: a second vertical plate; 23: a partition plate air inlet; 24: a half rotor; 25: a pin hole; 26: a rotor shaft hole; 27: and a second cover.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings.
As shown in fig. 1 to 9, the invention comprises a roots pump cavity 3, a baffle plate 4, roots rotors 5, a first sealing cover 1, a second sealing cover 27 and a rotor shaft 6, wherein as shown in fig. 1, the roots pump cavity 3 and the baffle plate 4 are arranged between the first sealing cover 1 and the second sealing cover 27 in an axial staggered manner, each roots pump cavity 3 is provided with a roots rotor 5, the rotor shaft 6 is inserted from one side of the second sealing cover 27, and each roots rotor 5 is sleeved on the rotor shaft 6.
As shown in fig. 2 to 3, the Roots pump chamber 3 is of a split type design, and comprises a pump chamber upper portion 8 and a pump chamber lower portion 12, wherein an air inlet groove 11 is formed in a flat section on the upper side of the pump chamber upper portion 8, an air outlet groove 13 is formed in a flat section on the lower side of the pump chamber lower portion 12, and the air inlet groove 11 and the air outlet groove 13 are respectively formed in the left side and the right side of the Roots pump chamber 3.
As shown in fig. 4 to 5, the partition board 4 is also of a split design, and includes a partition board upper portion 14 and a partition board lower portion 15, where the partition board upper portion 14 is provided with a first upper vertical board and a second upper vertical board, the partition board lower portion 15 is provided with a first lower vertical board and a second lower vertical board, after the partition board upper portion 14 and the partition board lower portion 15 are combined up and down, the first upper vertical board and the first lower vertical board are butted to form a first vertical board 16, the second upper vertical board and the second lower vertical board are butted to form a second vertical board 22, a gas channel 21 is formed between the first vertical board 16 and the second vertical board 22, in addition, a partition board gas outlet 20 is provided on the upper side of the first upper vertical board and is communicated with the gas channel 21, a partition board gas inlet 23 is provided on the lower side of the second lower vertical board and is correspondingly communicated with the gas inlet groove 11 on the adjacent roots pump cavity 3, and the partition board gas inlet 23 is correspondingly communicated with the gas outlet groove 13 on the adjacent roots pump cavity 3. As shown in fig. 3 and 5, in this embodiment, the air inlet groove 11, the air outlet groove 13, the first vertical plate 16 and the second vertical plate 22 are all disposed at the middle position between the two rotor shaft holes, so that they occupy part of the area of the Roots cavity 3 but do not overlap with the swept area of the Roots rotor 5, and the Roots rotor 5 rotating at high speed does not interfere with the air inlet and outlet of the Roots pump cavities at different stages while increasing the area of the air inlet and outlet.
As shown in fig. 1, the upper side of the first sealing cover 1 is provided with an air inlet cavity 2 which is correspondingly communicated with an air inlet groove 11 on the adjacent roots pump cavity 3, and the lower side of the second sealing cover 27 is provided with an air outlet cavity 7 which is correspondingly communicated with an air outlet groove 13 on the adjacent roots pump cavity 3.
As shown in fig. 2 and 4, the pump chamber upper portion 8 and the pump chamber lower portion 12 are provided with protruding jogging to realize self-positioning, and the partition plate upper portion 14 and the partition plate lower portion 15 are also provided with protruding jogging to realize self-positioning, so that an unnecessary positioning mechanism is omitted, and the structure of the device is simplified.
As shown in fig. 1, the Roots pump chamber 3 is fixedly embedded with the adjacent partition plate 4, wherein as shown in fig. 2, the chamber wall section of the Roots pump chamber 3 comprises two isosceles trapezoids with the taper towards the outer side, wherein two isosceles trapezoids with the narrower outer side form a first pump chamber end surface 9, two isosceles trapezoids with the wider inner side form a second pump chamber end surface 10, the air inlet groove 11 and the air outlet groove 13 are arranged on the second pump chamber end surface 10 on the corresponding side, as shown in fig. 4, the chamber wall section of the partition plate 4 comprises two isosceles trapezoids with the taper towards the inner side, wherein two isosceles trapezoids with the wider outer side form a first partition plate end surface 17, two isosceles trapezoids with the narrower inner side form a second partition plate end surface 19, as shown in fig. 1, the first pump chamber end surface 9 is tightly attached to the adjacent partition plate first end surface 17, and the second pump chamber end surface 10 is tightly attached to the adjacent partition plate second end surface 19, so that the embedded with the Roots pump chamber 3 and the adjacent partition plate 4 is realized, as shown in fig. 4, and the sealing ring seal groove 18 is arranged between the first partition plate end surface 17 and the partition plate second end surface 19 when the adjacent seal ring 4 is embedded in the seal groove 4. The invention can ensure perfect jogging of the Roots pump cavity 3 and the adjacent baffle plate 4 and ensure the sealing in the cavity through the structure.
The Roots rotor 5 is also of a split structure, and the Roots rotor 5 may be of a two-lobe to multi-lobe type, and the present embodiment will be described by taking a two-lobe Roots rotor as an example.
As shown in fig. 6 to 9, the Roots rotor 5 includes two half rotors 24 that are connected in an up-down jogging manner, the two half rotors 24 have the same structure and are interchangeable, so that the processing difficulty of the parts of the half rotors 24 can be reduced, the upper side of the half rotors 24 is a rotor cambered surface, the middle of the lower side is provided with a notch that is connected to form a rotor shaft hole 26, two sides of the notch of the half rotors 24 form a connecting portion, two sides of the middle of the connecting portion on one side are reserved to form a jogging protrusion, the connecting portion on the other side is reserved to form a jogging groove before and after the middle of the connecting portion is hollowed, and the half rotors 24 shown in fig. 7 can be rotated 180 ° along the central axis of the rotors to find that the two rotors can be overlapped, so that the interchangeability of the two rotors is realized. Similarly, the three-blade Roots rotor can be divided into three identical half rotors, and each half rotor can rotate 120 degrees and 240 degrees to coincide with the other two half rotors; the four-lobe Roots rotor can be divided into four identical half rotors, and each half rotor rotates by 90 degrees, 180 degrees and 270 degrees and can be respectively overlapped with the other three half rotors; the five-lobe rotor can be divided into five parts of the same half rotor, and each half rotor rotates 72 degrees, 144 degrees, 216 degrees and 288 degrees and can be respectively overlapped with the other four half rotors.
As shown in fig. 7, the upper end of each side of the connecting portion of the half-rotor 24 is provided with a pin hole 25 for connection, so as to fix the radial position thereof, the axial position thereof is defined by the fitting protrusions and the fitting grooves on the different half-rotors 24, the axial fixation is not required, and the roots rotors with other blade numbers can be fixedly connected in the same manner.
In order to ensure that the gap between the Roots rotor 5 and the partition plate 4 is adjustable, a shaft sleeve can be arranged between the Roots rotor 5 and the rotor shaft 6, internal threads are arranged inside the shaft sleeve and are in threaded connection with the rotor shaft 6, external threads are arranged outside the shaft sleeve and are in threaded connection with the Roots rotor 5, the gap between the rotor shaft 6 and the Roots rotor 5 can be controlled by adjusting the angular position of the rotor through the internal threads, and the gap between the Roots rotor 5 and the partition plate 4 can be controlled through the external threads.
The Roots pump cavity 3, the partition plates 4 on two sides and the Roots rotor 5 on the corresponding level can also form a module which is taken as a whole for disassembly and replacement, so that the disassembly process of the rotor pump cavity and the partition plates is simplified, and the corresponding adjustment of the rotor clearance on the corresponding level is convenient.
In order to show the working process of the roots rotor of the multistage roots pump, the upper part 14 of the partition plate and the upper part 8 of the pump cavity can be replaced by transparent materials according to actual needs, and the running state of the roots rotor 5 of the multistage roots pump can be shown in the working process of the multistage roots pump.
The working principle of the invention is as follows:
the Roots pump cavity 3, the partition plates 4 and the Roots rotor 5 are all of split type structures, the vertical independent assembly can be realized, the trouble of corresponding integral disassembly and assembly or the trouble of disassembly and assembly from outside to inside is eliminated, in addition, the Roots pump cavity 3, the partition plates 4 on two sides and the Roots rotor 5 on corresponding stages can also form a module, and the module can be disassembled and replaced as a whole, so that the disassembly process of the rotor pump cavity and the partition plates is simplified, the disassembly and the assembly are more flexible, and the corresponding adjustment of the rotor gap on corresponding stages is convenient.
As shown in fig. 1, when the invention works, after the gas enters from the gas inlet cavity 2 on the upper side of the first sealing cover 1, the gas enters from the gas inlet groove 11 and is discharged from the gas outlet groove 13 when passing through the Roots pump cavity 3, and when passing through the partition plate 4, the gas enters from the partition plate gas inlet 23 into the gas channel 21 in the partition plate 4 and is discharged from the partition plate gas outlet 23, the partition plate gas outlet 20 is correspondingly communicated with the gas inlet groove 11 on the adjacent Roots pump cavity 3, the partition plate gas inlet 23 is correspondingly communicated with the gas outlet groove 13 on the adjacent Roots pump cavity 3, and finally the gas is discharged from the gas outlet cavity 7 on the lower side of the second sealing cover 27, and the gas inlet groove 11, the gas outlet groove 13 and the first vertical plate 16 and the second vertical plate 22 are arranged at the middle position between rotor shaft holes, so that the gas inlet and outlet grooves occupy part of the area of the Roots cavity 3 but do not overlap with the swept area of the Roots rotor 5, and the Roots rotor 5 rotating at high speed can not interfere with the gas inlet and outlet of the Roots pump cavity at all levels.

Claims (4)

1. A multistage roots vacuum pump, characterized in that: the novel centrifugal pump comprises a Roots pump cavity (3), a partition board (4), roots rotors (5), a first sealing cover (1), a second sealing cover (27) and a rotor shaft (6), wherein the Roots pump cavity (3) and the partition board (4) are arranged between the first sealing cover (1) and the second sealing cover (27) in a staggered mode, the Roots rotors (5) are arranged in each Roots pump cavity (3), the rotor shaft (6) is inserted from one side of the second sealing cover (27), and each Roots rotor (5) is sleeved on the rotor shaft (6); the Roots pump cavity (3) comprises a detachable pump cavity upper part (8) and a pump cavity lower part (12), the upper side of the Roots pump cavity (3) is provided with an air inlet groove (11) and the lower side of the Roots pump cavity is provided with an air outlet groove (13), the partition board (4) comprises a detachable partition board upper part (14) and a partition board lower part (15), a gas channel (21) is arranged in the partition board (4), one end of the gas channel (21) is provided with a partition board air outlet opening (20) which is correspondingly communicated with the air inlet groove (11) on the adjacent Roots pump cavity (3), the other end of the gas channel (21) is provided with a partition board air inlet opening (23) which is correspondingly communicated with the air outlet groove (13) on the adjacent Roots pump cavity (3), the first sealing cover (1) is provided with the air inlet cavity (2) which is correspondingly communicated with the air inlet groove (11) on the adjacent Roots pump cavity (3), the second sealing cover (27) is provided with the air outlet cavity (7) which is correspondingly communicated with the air outlet groove (13) on the adjacent Roots pump cavity (3), and the Roots rotor (5) comprises a plurality of detachable semi-rotors (24);
an air inlet groove (11) is formed in the middle position of the upper side of the pump cavity upper part (8), an air outlet groove (13) is formed in the middle position of the lower side of the pump cavity lower part (12), and the air inlet groove (11) and the air outlet groove (13) are respectively arranged on the left side and the right side of the Roots pump cavity (3);
the upper part (14) of the partition plate is provided with a first upper vertical plate and a second upper vertical plate, the lower part (15) of the partition plate is provided with a first lower vertical plate and a second lower vertical plate, the first upper vertical plate and the first lower vertical plate are in butt joint to form a first vertical plate (16), the second upper vertical plate and the second lower vertical plate are in butt joint to form a second vertical plate (22), a gas channel (21) is formed between the first vertical plate (16) and the second vertical plate (22), the upper side of the first upper vertical plate is provided with a partition plate exhaust port (20) which is communicated with the gas channel (21), and the lower side of the second lower vertical plate is provided with a partition plate air inlet (23) which is communicated with the gas channel (21); the first vertical plate (16) and the second vertical plate (22) are arranged at the middle position of the partition plate (4);
the two sides of the upper part (8) of the pump cavity and the two sides of the lower part (12) of the pump cavity are respectively provided with a first end face (9) of the pump cavity and a second end face (10) of the pump cavity, the air inlet groove (11) and the air outlet groove (13) are arranged on the second end face (10) of the pump cavity at the corresponding sides, the two sides of the cavity wall of the partition board (4) are respectively provided with a first end face (17) and a second end face (19) of the partition board, when the Roots pump cavity (3) is embedded with the adjacent partition board (4), the first end face (9) of the pump cavity is tightly attached to the first end face (17) of the adjacent partition board, the second end face (10) of the pump cavity is tightly attached to the second end face (19) of the adjacent partition board, and a sealing groove (18) for accommodating a sealing ring is arranged on the cavity wall of the partition board (4) between the first end face (17) of the partition board and the second end face (19).
A shaft sleeve is arranged between the Roots rotor (5) and the rotor shaft (6), internal threads are arranged inside the shaft sleeve and are in threaded connection with the rotor shaft (6), and external threads are arranged outside the shaft sleeve and are in threaded connection with the Roots rotor (5).
2. The multi-stage roots vacuum pump of claim 1, wherein: the pump chamber upper part (8) and the pump chamber lower part (12) are provided with protruding jogged positioning, and the baffle upper part (14) and the baffle lower part (15) are also provided with protruding jogged positioning.
3. The multi-stage roots vacuum pump of claim 1, wherein: the Roots rotor (5) comprises a plurality of half rotors (24), each half rotor (24) has the same structure, the upper side of each half rotor (24) is a rotor cambered surface, the middle part of the lower side is provided with a notch which is connected to form a rotor shaft hole (26), the two sides of the notch are provided with connecting parts, one connecting part on one side is provided with a jogged bulge, the connecting part on the other side is provided with a jogged groove, and the upper end of each connecting part on the other side is provided with a pin hole (25).
4. The multi-stage roots vacuum pump of claim 1, wherein: the upper part (14) of the partition board and the upper part (8) of the pump cavity are made of transparent materials.
CN202011447652.1A 2020-12-09 2020-12-09 Multistage Roots vacuum pump Active CN114607599B (en)

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Application Number Priority Date Filing Date Title
CN202011447652.1A CN114607599B (en) 2020-12-09 2020-12-09 Multistage Roots vacuum pump

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Application Number Priority Date Filing Date Title
CN202011447652.1A CN114607599B (en) 2020-12-09 2020-12-09 Multistage Roots vacuum pump

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE696509C (en) * 1937-08-12 1940-09-23 Daimler Benz Akt Ges Rotary piston for Roots blower
TWI237093B (en) * 2003-10-23 2005-08-01 Ind Tech Res Inst Multi-staged vacuum pump
JP2010159740A (en) * 2008-12-11 2010-07-22 Toyota Industries Corp Rotating vacuum pump
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump
CN101985939B (en) * 2010-11-30 2012-06-27 东北大学 Dry vacuum pump with shaft end dynamic seal structure
CN108953146B (en) * 2018-07-09 2021-09-28 上海伊莱茨真空技术有限公司 Roots pump with circulating oil cooling
CN211692826U (en) * 2020-02-24 2020-10-16 山东精工泵业有限公司 Two-stage liquid ring pump impeller flow passage sealing structure

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