CN114545587A - High-precision surface shape constraint device and method for large-caliber swing mirror - Google Patents

High-precision surface shape constraint device and method for large-caliber swing mirror Download PDF

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Publication number
CN114545587A
CN114545587A CN202210285729.2A CN202210285729A CN114545587A CN 114545587 A CN114545587 A CN 114545587A CN 202210285729 A CN202210285729 A CN 202210285729A CN 114545587 A CN114545587 A CN 114545587A
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mirror
surface shape
reflector
flexible
caliber
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CN114545587B (en
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李含
敬子建
彭起
谭毅
亓波
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support

Abstract

The invention discloses a high-precision surface shape restraint device and method of a large-caliber swing mirror, which comprises the following steps: a lens base (1); a circumferential constraining structure (2) coaxially disposed with the lens base; the lens base is of a claw-shaped structure with a symmetrical central shaft, and a lightening hole is formed in the center; the mirror base (1) comprises side supporting plates (1-1), flexible hinges A (1-2), mounting holes (1-3) and a reflector mounting surface (1-4); the circumferential constraint structure (2) is an annular structure and comprises a small boss (2-1), a flexible hinge B (2-2), a fixed support leg (2-3) and a flexible hinge C (2-4); eight side supporting plates (1-1) and eight flexible hinges A (1-2) are arranged at the tail end of the claw-shaped structure of the microscope base (1); the mounting holes (1-3) are four groups in total, are distributed in a central symmetry manner, and each group has three threaded holes; the reflector mounting surfaces (1-4) are three convex facets; the number of the small bosses (2-1) is four, and the small bosses are symmetrically and uniformly distributed; the flexible hinges B (2-2) are distributed on two sides of the small boss, and four groups are provided, wherein each group comprises two flexible hinges; the number of the fixed supporting legs (2-3) is four, and a flexible hinge C (2-4) is arranged above each fixed supporting leg.

Description

High-precision surface shape constraint device and method for large-caliber swing mirror
Technical Field
The invention relates to the field of aerospace and communication, in particular to a high-precision surface shape constraint device and method of a large-caliber swing mirror.
Background
The space optical load meets the long-time continuous and stable observation requirement through the integrated image stabilizing system, the image stabilizing function of the image stabilizing system is mainly completed through the internal swing mirror assembly of the image stabilizing system, and the swing mirror achieves the purpose of eliminating target image shake caused by external shake through quick and accurate swing, so that the design of the high-precision swing mirror assembly is the key of the space image stabilizing system, and the mechanical property and the surface shape of the swing mirror directly influence the tracking quality of the image stabilizing system.
The surface shape precision of the swing mirror is mainly restricted by a supporting structure, and the connection mode of the swing mirror and the supporting structure at present mainly comprises two types: firstly, connecting mechanical parts such as bolts, pressing plates and the like; and secondly, the connection is carried out through adhesives such as colloid. Because the pendulum mirror in the space optical load is in a working environment influenced by external vibration for a long time, structural deformation of the supporting structure caused by vibration is easily conducted to the mirror body, the surface shape of the mirror surface is influenced, and the optical performance is reduced. Therefore, in order to ensure higher surface shape precision of the swing mirror, mechanical connection such as bolts and the like is avoided as much as possible, and flexible connection is mostly adopted.
In addition, the diameter-thickness ratio is one of the factors influencing the deformation of the mirror surface except that the external vibration environment influences the surface shape precision, and the empirical formula of the solid mirror diameter-thickness ratio of the flat plate given by Roberts et al is as follows:
Figure BDA0003559843510000011
where δ represents the maximum deformation amount of the mirror surface due to gravity, and Δ represents the aspect ratio, and it can be seen from the formula that the larger the deformation amount of the mirror surface is, the larger the aspect ratio is. However, most of the existing swing mirrors have small calibers, and the mirror body is generally connected with a supporting structure by adopting a direct gluing method, although the method has some structural flexibility to a certain extent and restrains the surface shape of the mirror body through axial positioning, the radial restraint of the mirror body is slightly deficient, and the mirror body is difficult to restrain due to the influence of gravity in the deflection process, so that the swing mirror is only suitable for small-calibre swing mirrors. In recent years, with the improvement of the requirement of space observation task, the aperture of the swing mirror is increased, and the simple adhesive type supporting structure is not suitable for the surface shape constraint requirement of the large-aperture swing mirror, because with the increase of the aperture of the swing mirror, the supporting constraint is required to be carried out in the radial direction of the swing mirror so as to ensure the surface shape of the mirror surface. Therefore, based on the current space load development process, the pendulum mirror needs to be further researched, and a supporting structure aiming at the large-caliber pendulum mirror is designed to restrain the mirror surface shape of the pendulum mirror, so that the large-caliber pendulum mirror can ensure higher surface shape precision in a complex space working environment, and a space observation task is smoothly completed.
Disclosure of Invention
The invention mainly aims to provide a high-precision surface shape constraint method of a large-aperture oscillating mirror, which can ensure high surface shape precision of the oscillating mirror in space load while ensuring high-frequency work in a vibration environment by positioning and constraining a reflecting mirror from two directions of a radial direction and an axial direction.
In order to achieve the above object, the present invention provides a high-precision surface shape constraint device for a large-aperture swing mirror, comprising: a lens base; a circumferential constraint structure coaxially arranged with the lens base; the lens base is of a claw-shaped structure with a symmetrical central shaft, and a lightening hole is formed in the center; the mirror base comprises a side supporting plate, a flexible hinge A, a mounting hole and a reflector mounting surface; the circumferential constraint structure is an annular structure and comprises a small boss, a flexible hinge B, a fixed support leg and a flexible hinge C; the number of the side supporting plates is eight, and the side supporting plates are uniformly and symmetrically distributed at the tail end of the claw-shaped structure; the number of the flexible hinges A is eight, and the flexible hinges A are respectively connected with the side supporting plates and the tail ends of the claw-shaped structures; the mounting holes are four groups and are distributed in a central symmetry manner, and each group of three threaded holes can fixedly connect the mirror base with the actuating mechanism through the mounting holes; the reflector mounting surfaces are three convex facets; the number of the small bosses is four, and the small bosses are symmetrically and uniformly distributed; the flexible hinges B are distributed on two sides of the small bosses, and four groups of the flexible hinges B are provided, and each group comprises two flexible hinges; the number of the fixed supporting legs is four, the fixed supporting legs and the small bosses are staggered by 45 degrees and are uniformly and symmetrically distributed, and a flexible hinge C is arranged above each fixed supporting leg.
Further, the lens base and the circumferential constraint structure are coaxially arranged and are connected through screws at the small boss; the lens base is connected with the actuating mechanism through the mounting hole in a screw connection mode; the side supporting plates are connected with the side surfaces of the reflectors through gluing; the reflector mounting surface is connected with the reflector bottom surface through gluing; the fixed support legs are fixedly connected with other structures of the swing mirror through screws.
Furthermore, a three-point surface fixing method is adopted on the axial support of the reflector, namely the reflector is axially supported by three reflector mounting surfaces with small areas so as to restrain the surface shape of the mirror surface.
Furthermore, the flexible hinge A, the flexible hinge B and the flexible hinge C are short straight beam type flexible hinges, the flexible hinges are simple in structure and easy to process, the deflection angle is small, but the rigidity is good, and the flexible hinges can meet the requirement of the deflection angle of the swing mirror and provide good structural rigidity.
A high-precision surface shape constraint method of a large-caliber swing mirror realizes the high-precision surface shape constraint of the large-caliber swing mirror by utilizing the high-precision surface shape constraint device of the large-caliber swing mirror.
The invention has the beneficial effects that:
(1) the invention discloses a high-precision surface shape constraint method of a large-diameter swing mirror, which adopts a three-point surface fixing method on the axial support of a reflector, namely, the reflector is axially supported by three small-area mounting surfaces so as to constrain the surface shape of the mirror surface. Compared with other axial supporting methods with larger contact surfaces, the method has the advantages that the flatness is better ensured, and the surface shape precision of the mirror surface is higher.
(2) The invention discloses a high-precision surface shape constraint method of a large-caliber swinging mirror, which adopts eight side support plates on the radial support of a reflector to complete the radial constraint of the reflector. The side supporting plates are symmetrically and uniformly distributed, and the radial supporting resultant force applied to the reflector passes through the gravity center of the reflector, so that additional torque cannot be generated on the reflector.
(3) The high-precision surface shape constraint method of the large-aperture swing mirror adopts the circumferential constraint mechanism, the upper end of the mechanism is connected with the mirror base, the lower end of the mechanism is connected with the fixed base, and the deflection motion of the mirror base is constrained, so that when the mirror base drives the reflector to move under the action of the actuating mechanism, only the deflection freedom degrees around the X axis and the Y axis required by the swing mirror are generated, the motion on other freedom degrees is not generated, and the motion precision is provided.
(3) According to the high-precision surface shape constraint method of the large-aperture swing mirror, the mirror base and the circumferential constraint structure are connected by adopting a large number of flexible hinges, so that the mirror base and the circumferential constraint structure have certain support rigidity and certain flexibility, and the purpose of damping vibration is achieved. And the flexible hinge A absorbs a part of support structure deformation caused by vibration, so that the reflector only generates translation and inclination when deformed under stress, and surface shape distortion can not be generated, and the surface shape precision of the mirror surface is ensured.
(4) In the high-precision surface shape constraint method of the large-aperture swing mirror, the connection mode of the reflecting mirror and the mirror base is a glue connection mode. The glue connection bonds the mirror directly to the support surface, reduces installation complexity, is more compact, provides sufficient connection strength while being flexible, and can withstand shock, vibration, and temperature changes in most aerospace environments.
Drawings
FIG. 1 is a schematic diagram of a high-precision surface shape constraint method of a large-aperture swing mirror according to the present invention;
FIG. 2 is a schematic view of a mirror base structure of a high-precision surface shape constraint method of a large-aperture swing mirror according to the present invention;
FIG. 3 is a schematic diagram of a circumferential constraint structure of a high-precision surface shape constraint method of a large-aperture swing mirror according to the present invention;
FIG. 4 is a schematic view of the high-precision surface shape constraint method of the large-aperture oscillating mirror and the installation of the reflecting mirror according to the present invention;
in the figure, 1 is a microscope base; 2 is a circumferential constraint structure; 1-1 is a side supporting plate; 1-2 is a flexible hinge A; 1-3 are mounting holes; 1-4 is a reflector mounting surface; 2-1 is a small boss; 2-2 is a flexible hinge B; 2-3 are fixed support legs; 2-4 are flexible hinges C.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 3, the high-precision surface shape constraint method for a large-aperture oscillating mirror according to the present invention is a high-precision surface shape constraint device using a large-aperture oscillating mirror, comprising: a lens base 1; a circumferential constraint structure 2 coaxially disposed with the lens base; the lens base 1 is of a claw-shaped structure with a symmetrical central shaft, and the structural form ensures the supporting strength and reduces the structural weight; the mirror base 1 comprises side supporting plates 1-1, a flexible hinge A1-2, mounting holes 1-3 and a reflector mounting surface 1-4; the circumferential constraint structure 2 is an annular structure and comprises a small boss 2-1, a flexible hinge B2-2, a fixed supporting leg 2-3 and a flexible hinge C2-4; the number of the side supporting plates 1-1 is eight, and the side supporting plates are uniformly and symmetrically distributed at the tail end of the claw-shaped structure; eight flexible hinges A1-2 are respectively connected with the side supporting plates and the tail ends of the claw-shaped structures; the inner side surfaces and the outer side surfaces of the side supporting plates 1-1 are cambered surfaces, the inner side surfaces and the outer side surfaces of the eight side supporting plates are respectively positioned on the same cylindrical surface, and the central axis of the cylindrical surface is the central axis of the whole constraint structure; the mounting holes 1-3 are four groups in total and are distributed in a central symmetry way, and each group of three threaded holes can fixedly connect the lens base 1 with the actuating mechanism through the mounting holes; the reflector mounting surfaces 1-4 are three convex small planes, the central points of the three convex small planes are positioned on the same circle, and the circle center passes through the central axis of the structure, so that the symmetry of reflector mounting is ensured; the number of the small bosses 2-1 is four, and the small bosses are symmetrically and uniformly distributed; the flexible hinges B2-2 are distributed on two sides of the small boss, and four groups are provided, wherein each group comprises two hinges; the number of the fixed supporting legs 2-3 is four, the fixed supporting legs and the small bosses are staggered by 45 degrees and are uniformly and symmetrically distributed, and a flexible hinge C2-4 is arranged above each fixed supporting leg. Further preferably, the structure center is provided with a weight-reducing through hole.
The lens base 1 and the circumferential constraint structure 2 are coaxially arranged and are connected through a screw at the small boss 2-1; the lens base 1 is connected with the actuating mechanism through the mounting holes 1-3 in a screw connection mode; the supporting side plate 1-1 is connected with the side surface of the reflector through gluing; the reflector mounting surfaces 1-4 are connected with the bottom surface of the reflector through gluing; the fixed support legs 2-3 are fixedly connected with other structures of the swing mirror through screws.
In a further preferred embodiment, as shown in fig. 4, when the mirror base is assembled with the reflector, in order to ensure that the assembling stress of the reflector is not transmitted to the optical mirror surface during the assembling process, so that the surface shape distortion affects the surface shape precision, the assembly between the mirror base and the reflector should be clearance fit.
As shown in fig. 2-3, it is further preferable that the flexible hinge a, the flexible hinge B, and the flexible hinge C are short straight beam-type flexible hinges, and the flexible hinges are simple and easy to process, have a small deflection angle but have good rigidity, and can provide good structural rigidity while meeting the requirement of the deflection angle of the oscillating mirror.
In a specific embodiment, the mirror base 1 and the circumferential constraint structure 2 are fixedly connected, then the mirror base 1 and the circumferential constraint structure 2 are respectively connected with the actuating mechanism and the fixed base of the swing mirror, and finally the reflecting mirror is bonded on the mirror base. Four groups of mounting holes 2-3 of the lens base are respectively corresponding to the four actuating mechanisms, and the four actuating mechanisms are pairwise combined and act cooperatively, so that the deflection motion of the swing mirror around the X axis and around the Y axis with two degrees of freedom can be realized, and the image stabilization tracking observation function of the swing mirror is completed.
According to the high-precision surface shape constraint method of the aperture swing mirror, the mirror base 1 and the circumferential constraint structure 2 are integrally machined, the material is TC4, the material of the reflector is monocrystalline silicon, and through modeling simulation analysis, when the diameter of the reflector is 165mm, the surface shape precision RMS of the reflector under the action of gravity is superior to 1/47 lambda (lambda is 632.8 nm).

Claims (5)

1. The utility model provides a high accuracy shape of face restraint device of heavy-calibre pendulum mirror which characterized in that includes: a lens base (1); a circumferential constraint structure (2) coaxially arranged with the lens base (1); the lens base (1) is of a claw-shaped structure with a symmetrical central shaft, and a lightening hole is formed in the center; the mirror base (1) comprises side supporting plates (1-1), flexible hinges A (1-2), mounting holes (1-3) and a reflector mounting surface (1-4); the circumferential constraint structure (2) is an annular structure and comprises a small boss (2-1), a flexible hinge B (2-2), a fixed support leg (2-3) and a flexible hinge C (2-4);
the number of the side supporting plates (1-1) is eight, and the side supporting plates are uniformly and symmetrically distributed at the tail end of the claw-shaped structure; the number of the flexible hinges A (1-2) is eight, and the flexible hinges A are respectively connected with the side supporting plates (1-1) and the tail ends of the claw-shaped structures; the mounting holes (1-3) are four groups in total and are distributed in a central symmetry manner, and each group of three threaded holes can fixedly connect the mirror base with the actuating mechanism through the mounting holes; the reflector mounting surfaces (1-4) are three convex facets; the number of the small bosses (2-1) is four, and the small bosses are symmetrically and uniformly distributed; the flexible hinges B (2-2) are distributed on two sides of the small boss, and four groups are provided, wherein each group comprises two flexible hinges; the number of the fixed supporting legs (2-3) is four, the fixed supporting legs and the small bosses are staggered by 45 degrees and are uniformly and symmetrically distributed, and a flexible hinge C (2-4) is arranged above each fixed supporting leg.
2. The high-precision surface-shaped constraint device of the large-caliber swing mirror according to claim 1, characterized in that the mirror base (1) and the circumferential constraint structure (2) are coaxially arranged and connected through a screw at the small boss (2-1); the lens base (1) is connected with the actuating mechanism through the mounting holes (1-3) in a screw connection mode; the side supporting plates (1-1) are connected with the side surfaces of the reflectors through gluing; the reflector mounting surface (1-4) is connected with the bottom surface of the reflector through gluing; the fixed support legs (2-3) are fixedly connected with other structures of the swing mirror through screws.
3. The high-precision surface shape constraint device of the large-caliber oscillating mirror according to claim 1, characterized in that a three-point surface fixing method is adopted on the axial support of the reflector, namely, three small-area reflector mounting surfaces (1-4) are used for axially supporting the reflector so as to constrain the surface shape of the mirror surface.
4. The high-precision surface-shaped constraint device of the large-caliber oscillating mirror according to claim 1, wherein the flexible hinge A (1-2), the flexible hinge B (2-2) and the flexible hinge C (2-4) are all short straight beam type flexible hinges, the flexible hinges are simple in structure and easy to process, have small deflection angle but good rigidity, and can provide good structural rigidity while meeting the requirement of the deflection angle of the oscillating mirror.
5. A high-precision surface shape constraint method of a large-caliber oscillating mirror is characterized in that the high-precision surface shape constraint device of the large-caliber oscillating mirror disclosed by claim 1 is utilized to realize the high-precision surface shape constraint of the large-caliber oscillating mirror.
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CN110196476A (en) * 2019-05-09 2019-09-03 中国科学院西安光学精密机械研究所 In one kind/long wave heavy caliber Infrared Lens flexible support structure

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Publication number Priority date Publication date Assignee Title
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US7009752B1 (en) * 2003-01-21 2006-03-07 Lockheed Martin Corporation Actively-supported multi-degree of freedom steerable mirror apparatus and method
CN102508348A (en) * 2011-11-09 2012-06-20 中国科学院长春光学精密机械与物理研究所 Spatial flexible filter supporting mechanism and method for mounting filter
CN104360455A (en) * 2014-10-16 2015-02-18 中国科学院上海技术物理研究所 Flexible Hooke joint support mechanism for reflecting mirror of space remote sensing camera
CN110196476A (en) * 2019-05-09 2019-09-03 中国科学院西安光学精密机械研究所 In one kind/long wave heavy caliber Infrared Lens flexible support structure

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