CN114513729B

CN114513729B - Electronic device and acoustic transducer

Info

Publication number: CN114513729B
Application number: CN202210018073.8A
Authority: CN
Inventors: 潘春娇; 王磊; 赵文畅; 何云乾; 秦仁轩
Original assignee: Huawei Technologies Co Ltd
Current assignee: Huawei Technologies Co Ltd
Priority date: 2022-01-07
Filing date: 2022-01-07
Publication date: 2023-07-07
Anticipated expiration: 2042-01-07
Also published as: WO2023130914A1; CN114513729A

Abstract

The embodiment of the application provides electronic equipment and an acoustic transducer, wherein the acoustic transducer comprises a vibrating element and an elastic sealing piece, one side of the vibrating element is provided with a rear cavity, one end of the vibrating element is provided with a gap communicated with the rear cavity, the gap is provided with the elastic sealing piece, the elastic sealing piece is connected with the vibrating element to seal the gap at one end of the vibrating element, so that the sealing performance of the rear cavity is improved, the sealing and isolation effect between the rear cavity and the front cavity of other cavities such as the acoustic transducer is improved, the problem of sound short circuit between the front cavity and the rear cavity is solved, and the frequency response of the acoustic transducer is improved.

Description

Electronic device and acoustic transducer

Technical Field

The embodiment of the application relates to the technical field of acoustic transducers, in particular to electronic equipment and an acoustic transducer.

Background

The manufacturing process (also called MEMS process) of the micro-electromechanical system (Micro Electro Mechanical System, MEMS for short) shows excellent potential and effect in the miniaturization process of devices, can effectively reduce the volume of the devices, and has remarkable advantages in micro-speaker scenes, such as portable products of earphones, bluetooth glasses, wrist-watch and the like.

The MEMS acoustic transducer is a micro-speaker which is prepared by MEMS technology and utilizes a piezoelectric cantilever to vibrate and sound under the action of an electric field. In the related art, the acoustic transducer may include a housing, a piezoelectric cantilever, and a support member having an annular structure, where the piezoelectric cantilever and the support member are both located in the housing, and one end of the support member is fixed on an inner wall of the housing, and the piezoelectric cantilever is located at the other end of the support member, so that a rear cavity of the acoustic transducer is formed between the piezoelectric cantilever, the inner wall of the support member, and a part of the inner wall of the housing, and the piezoelectric cantilever, the outer wall of the support member, and other inner walls of the housing form a front cavity of the acoustic transducer. One end of the piezoelectric cantilever is fixedly connected with the supporting piece, and a micro-gap is formed between the other end of the piezoelectric cantilever and the supporting piece or between the other end of the piezoelectric cantilever and the adjacent piezoelectric cantilever so as to ensure the vibration amplitude of the piezoelectric cantilever.

However, the problem of an acoustic short circuit between the front and rear chambers of the above structure is very likely to occur, thereby reducing the frequency response of the acoustic transducer.

Disclosure of Invention

The embodiment of the application provides electronic equipment and an acoustic transducer, which can solve the problem of sound short circuit between a front cavity and a rear cavity and improve the frequency response of the acoustic transducer.

In one aspect, embodiments of the present application provide an acoustic transducer including a vibrating element having a rear cavity on one side of the vibrating element and a slit at one end of the vibrating element, and an elastic seal located at the slit and connected to the vibrating element, the elastic seal at least partially blocking the slit at one end of the vibrating element.

According to the embodiment of the application, the elastic sealing piece is connected to one end of the vibrating element, and the gap at one end of the vibrating element is plugged through the elastic sealing piece. On the other hand, the gap at one end of the vibrating element is sealed through the elastic sealing piece, so that the elastic sealing piece can generate elastic deformation in the vibrating process of the vibrating element to release the stress of the vibrating element, the vibrating element can be prevented from being restrained by other parts, the degree of freedom of the vibrating element can be prevented from being influenced, the vibrating amplitude of the vibrating element is ensured, and the frequency response of the acoustic transducer can be improved.

In a possible implementation, the acoustic transducer further comprises a support, the vibrating element being located at one end of the support, the vibrating element and an inner wall of the support being a top wall and a side wall of the rear cavity, respectively. Wherein the first end of the vibrating element is connected with one end of the support member, the second end of the vibrating element is connected with the elastic sealing member, and the elastic sealing member is at least partially blocked at the second end of the vibrating element and at a gap communicated with the rear cavity.

Through setting up the support in acoustic transducer, on the one hand, improved the structural stability of vibrating element, on the other hand, this support can be used for forming the back chamber with vibrating element jointly, in order to simplify the structure of speaker, improve the assembly efficiency of speaker, in addition, through setting up the elastic seal piece in the gap department of vibrating element's second end, in order to shutoff the gap of back chamber intercommunication, thereby improve the leakproofness in back chamber, make the leakproofness between back chamber and other cavitys such as acoustic transducer's front chamber improved, the sound short circuit problem between front chamber and the back chamber has been improved, acoustic transducer's sensitivity has been improved.

In one possible implementation, the vibrating element comprises at least one piezoelectric cantilever, a first end of which is connected to one end of the support, and a second end of which is connected to the elastic seal.

Through setting up vibrating element to including at least one piezoelectric cantilever, this piezoelectric cantilever can take place warp deformation under the electric field effect, can regard as the vibrating element who promotes the air, and piezoelectric cantilever simple structure, convenient operation has improved vibrating element's preparation efficiency, has simplified acoustic transducer's structure. In addition, the second end of the piezoelectric cantilever is connected with the elastic sealing piece to seal the gap of the second end of the piezoelectric cantilever, so that the sealing and isolating effect between the rear cavity and other cavities such as the front cavity can be improved, and the vibration amplitude of the piezoelectric cantilever is ensured.

In one possible implementation, the vibration element comprises two piezoelectric cantilevers, a first end of each piezoelectric cantilever is connected to one end of the support member, a gap is provided between second ends of the two piezoelectric cantilevers, and the elastic sealing member is located at the gap and is connected to the second ends of the two piezoelectric cantilevers in a sealing manner.

Through setting up vibrating element to including two piezoelectric cantilevers, through applying voltage to every piezoelectric cantilever for two piezoelectric cantilevers warp the deformation under the effect of electric field, realize effectively promoting the air of piezoelectric cantilever both sides, thereby the sound has been sent out, simplified the structure of acoustic transducer, in addition, connect the gap between two piezoelectric cantilever second ends through elastic sealing spare, guaranteed the vibration amplitude of two piezoelectric cantilevers on the one hand, on the other hand also improved the connection leakproofness between two piezoelectric cantilever second ends, thereby improved the leakproofness in back chamber, make acoustic transducer's low frequency loudness promoted.

In one possible implementation, the vibration element includes a plurality of piezoelectric cantilevers, first ends of the plurality of piezoelectric cantilevers are connected to the support, and first ends of the plurality of piezoelectric cantilevers are disposed at intervals along a circumferential direction of the support;

A gap is formed between two adjacent piezoelectric cantilevers, and an elastic sealing piece is located at the gap and is connected with the two adjacent piezoelectric cantilevers in a sealing mode, so that sealing effect between the two adjacent piezoelectric cantilevers is improved, and sealing effect of the whole vibrating element on the rear cavity is improved.

In one possible implementation, the vibration element further includes: at least one diaphragm, each diaphragm is connected with the piezoelectric cantilever.

Through connect the vibrating diaphragm on the piezoelectric cantilever for this piezoelectric cantilever can be as the driving piece, drives the vibrating diaphragm vibration when warp deformation, makes this vibrating diaphragm and piezoelectric cantilever promote the air in acoustic transducer's the front chamber and the back intracavity jointly, thereby make sound, in addition, the setting of vibrating diaphragm has improved the flexibility and the elasticity of whole vibrating element, on the one hand, has improved vibrating element's vibration amplitude, on the other hand has improved vibrating element's structural stability at the vibration in-process, avoids this vibrating element rigidity too big and takes place circumstances such as fracture, thereby prolonged vibrating element's life.

In a possible implementation manner, the number of the vibrating diaphragms is one, at least one end of the vibrating diaphragms is close to the second end of at least one piezoelectric cantilever, and the vibrating diaphragms are close to the second end of the piezoelectric cantilever and are provided with gaps, and the elastic sealing piece is located at the gaps and is respectively connected with the second end of the piezoelectric cantilever and the vibrating diaphragms in a sealing manner so as to improve the connection tightness between the vibrating diaphragms and the piezoelectric cantilever, thereby improving the tightness of the rear cavity.

In one possible implementation, the diaphragm is located on the side of the piezoelectric cantilever facing away from the rear cavity, or the diaphragm is located on the side of the piezoelectric cantilever facing toward the rear cavity;

and the second ends of vibrating diaphragm and all piezoelectric cantilevers have the gap in vertical, and elastic sealing element is arranged in vertical gap to carry out shutoff to the at least part of vertical gap, on the one hand, improved the connection leakproofness between the second ends of vibrating diaphragm and piezoelectric cantilevers, on the other hand, support the vibrating diaphragm in one side of piezoelectric cantilevers through elastic sealing element for at least part of this vibrating diaphragm is unsettled on piezoelectric cantilevers, makes vibrating diaphragm and piezoelectric cantilevers homoenergetic freely vibrate, has improved the vibration amplitude of vibrating diaphragm and piezoelectric cantilevers.

In one possible implementation, the diaphragm is located between the second ends of all the piezoelectric cantilevers, and the diaphragm and the second ends of all the piezoelectric cantilevers have a slit in the horizontal direction, and the elastic sealing member is located in the slit in the horizontal direction to seal the slit, so that the tightness between one end of the diaphragm and the second ends of the piezoelectric cantilevers is improved, and the sealing and isolation effect between the rear cavity and the front cavity is improved. In addition, the vibrating diaphragm is arranged between the second ends of all the piezoelectric cantilevers, so that each piezoelectric cantilever can drive the vibrating diaphragm to improve the vibration reliability of the vibrating diaphragm. In addition, the vibrating diaphragm and the piezoelectric cantilever can directly push air in the front cavity and the rear cavity, and the sensitivity of the vibrating element is improved, so that the acoustic performance of the acoustic transducer is improved.

In one possible implementation, the number of the diaphragms is multiple, each diaphragm is connected with one piezoelectric cantilever, a gap is formed between two adjacent diaphragms, and the elastic sealing piece is located at the gap and is respectively connected with the two adjacent diaphragms in a sealing manner.

Through setting up a plurality of diaphragms, and every vibrating diaphragm links to each other with a piezoelectric cantilever to drive every vibrating diaphragm through piezoelectric cantilever, make every vibrating diaphragm vibrate, and have the gap between two adjacent vibrating diaphragms, in order to improve the vibration range of every vibrating diaphragm, and this gap is shutoff through elastic sealing spare, in order to improve the sealed effect between two adjacent vibrating diaphragms, thereby improve the sealed effect in back chamber, make the sealed isolation effect between back chamber and other cavitys such as acoustic transducer's the front chamber improve.

In one possible implementation, the resilient seal is a resilient block.

By arranging the elastic sealing element as an elastic block, for example, two ends of the elastic block are respectively connected with the second ends of the vibrating diaphragm and the piezoelectric cantilever, thus, the vibration element such as the piezoelectric cantilever or the vibrating diaphragm can compress or stretch the elastic block in the vibration process, the elastic block is elastically deformed, the end stress of the piezoelectric cantilever or the vibrating diaphragm is released, and the vibration amplitude of the piezoelectric cantilever or the vibrating diaphragm is ensured not to be influenced. In addition, the elasticity of the elastic block can be improved by increasing the height or the aspect ratio of the elastic block, thereby more facilitating the lifting of the vibration amplitude of the vibration element such as the piezoelectric cantilever or the diaphragm. In addition, the gap of vibrating element one end can be plugged to this setting of elastic block to improve the leakproofness between front chamber and the back chamber, thereby improve the frequency response of the acoustic transducer of this application embodiment.

In one possible implementation, the height of the elastomeric block is 10um-50um, and/or the ratio of the width to the height of the elastomeric block is 0.1-100.

Through setting up the height and the aspect ratio of elastic block in above-mentioned within range to guarantee the elasticity of elastic block, avoided the height of elastic block too little and lead to the elasticity of elastic block too little, the condition that can't release vibrating element's stress takes place, thereby guarantee that vibrating element can freely vibrate, ensure vibrating element's vibration range, also avoided the elastic block too high and occupy the altitude space in the casing, in addition, the elastic block is too high, also can influence the structural stability of elastic block, thereby guarantee that the elastic block can not collapse at deformation in-process.

In one possible implementation, the elastic sealing element includes an elastic element having a gap and a sealing medium layer for sealing the gap.

By arranging the elastic sealing member to comprise an elastic member and a sealing medium layer, a gap at one end of the vibrating element can be connected with the elastic member, for example, the elastic member can be connected between the second ends of two adjacent piezoelectric cantilevers, so that the elastic member is elastically deformed during the vibrating process of the vibrating element, for example, the two adjacent piezoelectric cantilevers, and thus the stress of the end parts of the vibrating element, for example, the piezoelectric cantilevers, is released, and the vibrating process of the vibrating element, for example, the two adjacent piezoelectric cantilevers, is not restrained by each other, so that the vibration amplitude of the vibrating element is improved. In addition, the sealing medium layer seals the gap on the elastic piece to improve the tightness of the rear cavity, avoid the occurrence of sound short circuit between the front cavity and the rear cavity, and further improve the frequency response of the acoustic transducer.

In one possible implementation, the sealing medium layer is an elastic film, at least part of which covers at least one side of the elastic element in a direction perpendicular to the elastic direction.

The sealing medium layer is arranged to be an elastic film, so that on one hand, the sealing effect on the elastic piece can be guaranteed, and on the other hand, the sealing medium layer is also convenient to manufacture on the elastic piece, and the manufacturing procedure of the elastic sealing piece is simpler.

In a possible implementation manner, a part of the elastic film covers the surface of the vibrating element, and the other part of the elastic film covers the surface of the elastic piece, so that on one hand, the elastic film can play a role in sealing the elastic piece, and on the other hand, a part of the elastic film covers the surface of the vibrating element, so that the flexibility and the elasticity of the vibrating element can be improved, the vibration amplitude of the vibrating element can be improved, the structural stability of the vibrating element in the vibration process is improved, the situation that the vibrating element is excessively high in rigidity and breaks and the like is avoided, and the service life of the vibrating element is prolonged.

In one possible implementation, the thickness of the elastic membrane is 1um-100um, so as to ensure the elasticity and tightness of the elastic membrane, avoid the elastic membrane from being too thick to reduce the elasticity of the elastic membrane, and in addition, too thick elastic membrane occupies too much space in a rear cavity or other cavities, such as a front cavity, so as to influence the frequency response of the acoustic transducer.

In one possible implementation manner, the elastic sealing member comprises a connecting part and two elastic blocks which are oppositely arranged, one ends of the two elastic blocks are respectively connected with two adjacent piezoelectric cantilevers in the vibration element, or one ends of the two elastic blocks are respectively connected with two adjacent vibrating diaphragms in the vibration element, or one end of one of the two elastic blocks is connected with the piezoelectric cantilevers, one end of the other of the two elastic blocks is connected with the vibrating diaphragms, and the connecting part is connected between the other ends of the two elastic blocks along the height direction of the two elastic blocks, so that a gap between the two adjacent piezoelectric cantilevers or a gap between the piezoelectric cantilevers and the vibrating diaphragms can be sealed.

By arranging the elastic sealing member to include an elastic block having a certain height in the vibration direction, in this way, the vibration element such as the piezoelectric cantilever can compress or stretch the elastic block during vibration, so that the elastic block is elastically deformed, thereby releasing the stress of the piezoelectric cantilever and ensuring that the vibration amplitude of the piezoelectric cantilever is not affected. In addition, the elasticity of the elastic block can be improved by increasing the height or the aspect ratio of the elastic block, thereby more facilitating the improvement of the vibration amplitude of the vibration element. In addition, the gap of vibrating element one end can be plugged to this setting of elastic block to improve the leakproofness in back chamber, thereby improve the leakproofness between back chamber and the front chamber, thereby improve the frequency response of the acoustic transducer of this application embodiment, for example low frequency loudness.

In one possible implementation, the acoustic transducer further comprises a housing;

the vibrating element, the elastic sealing piece and the supporting piece are all positioned in the shell, the first end of the supporting piece is arranged on the inner wall of the shell, and the first end of the vibrating element is connected with the second end of the supporting piece;

the vibrating element, the outer wall of the supporting piece and one part of the shell wall of the shell form a front cavity, and the vibrating element, the inner wall of the supporting piece and the other part of the shell wall of the shell form a rear cavity, so that the acoustic transducer is used as a complete module, and is convenient to assemble in electronic equipment. In addition, the arrangement of the shell also plays a role in protecting the internal structure of the acoustic transducer, and impurities such as external water vapor and the like are prevented from entering the acoustic transducer, so that the vibration element and other structures are damaged.

In one possible implementation, an acoustic transducer includes a housing, a vibrating element disposed within the housing, an elastomeric seal, a support, and a seal ring;

the outer edge of the vibrating element is connected with the inner side wall of the shell in a sealing way through a sealing folding ring, one side of the vibrating element, one part of the shell wall of the shell and one side of the sealing folding ring form a front cavity, and the other side of the vibrating element, the other side of the sealing folding ring and the other part of the shell wall of the shell form a rear cavity;

The support piece is positioned in the rear cavity, and two ends of the support piece are respectively connected with the vibrating element and the inner bottom wall of the shell;

the vibrating element is far away from the first gap of sealing ring department, and first gap department has elastic sealing spare, and elastic sealing spare shutoff is in first gap department.

On the one hand, compared with the acoustic transducer in the related art, the sealing performance of the gap at one end of the vibration element is improved, the sealing performance between the front cavity and the rear cavity at two sides of the vibration element along the vibration direction is improved, the problem of sound short circuit between the front cavity and the rear cavity is solved, and the sensitivity of the acoustic transducer is improved, so that the frequency response, particularly the low-frequency loudness, of the acoustic transducer is improved. On the other hand, the gap at one end of the vibration element, such as the first gap, is sealed by the elastic sealing piece, so that the elastic sealing piece can generate elastic deformation in the vibration process of the vibration element to release the stress of the vibration element, the degree of freedom of the vibration element can be ensured not to be influenced, the vibration amplitude of the vibration element is ensured, and the frequency response of the acoustic transducer is improved.

In one possible implementation manner, the vibration element comprises at least one piezoelectric cantilever and at least two vibration films, wherein the first end of each vibration film is connected with the sealing folding ring, a first gap is arranged between the second ends of the adjacent two vibration films, an elastic sealing piece is arranged at the first gap, and the elastic sealing piece is respectively connected with the second ends of the adjacent two vibration films in a sealing way;

The piezoelectric cantilever is connected with the first ends of at least two vibrating diaphragms, and the top end of the supporting piece is connected with the piezoelectric cantilever.

Through setting up vibrating element to including the piezoelectricity cantilever and connect the vibrating diaphragm on the piezoelectricity cantilever for this piezoelectricity cantilever can be as the driving piece, drives the vibrating diaphragm vibration when warp deformation, makes this vibrating diaphragm and piezoelectricity cantilever promote the air in front chamber and the back intracavity jointly, thereby make sound, in addition, the setting up of vibrating diaphragm has improved the flexibility and the elasticity of whole vibrating element, on the one hand, has improved vibrating element's vibration amplitude, on the other hand has improved vibrating element's structural stability in the vibration process, avoid this vibrating element rigidity too big and take place circumstances such as fracture, thereby prolonged vibrating element's life. In addition, the first gap between the second ends of two adjacent vibrating diaphragms is plugged through the elastic sealing piece, so that on one hand, the vibration amplitude of the two vibrating diaphragms is guaranteed, and on the other hand, the connection tightness between the second ends of the two vibrating diaphragms is improved, and therefore the sealing and isolation effects of the front cavity and the rear cavity are improved, and the low-frequency loudness of the acoustic transducer is improved.

In one possible implementation, the number of piezoelectric cantilevers is multiple, the first end of each cantilever is connected to the first end of one diaphragm, and the second end of each cantilever is connected to the support.

Through setting up the piezoelectric cantilever into two, and the one end of every piezoelectric cantilever is all fixed on support piece, has improved the structural stability of every piezoelectric cantilever on the one hand, and on the other hand, every piezoelectric cantilever can vibrate independently under the effect of electric field, and can drive the vibrating diaphragm vibration that corresponds respectively for the vibration amplitude of every vibrating diaphragm can promote.

In one possible implementation manner, a second gap is vertically formed between the first end of each vibrating diaphragm and the piezoelectric cantilever, an elastic sealing element is arranged at the second gap, and the elastic sealing element is respectively connected with the vibrating diaphragm and the corresponding piezoelectric cantilever to seal the gap between the first end of the vibrating diaphragm and the piezoelectric cantilever in the vertical direction, so that, on one hand, the elastic sealing element can suspend at least part of the vibrating diaphragm at one side of the piezoelectric cantilever to improve the vibration amplitude of the vibrating diaphragm and the piezoelectric cantilever, and on the other hand, the gap between the first end of the vibration and the piezoelectric cantilever is sealed by the elastic sealing element to further improve the sealing effect of the vibrating element on the front cavity and the rear cavity, for example, the elastic sealing element between the second ends of two adjacent vibrating diaphragms can be used as a primary sealing element, and the elastic sealing element between the first end of the vibrating diaphragm and the piezoelectric cantilever can be used as a secondary sealing element, so that all gaps of the vibrating element are effectively sealed.

In one possible implementation, the elastic seal at the second slit is an elastic block.

Through setting up the sealing member into the elastic block, the both ends of this elastic block are connected with the first end and the piezoelectricity cantilever of vibrating diaphragm respectively, like this, piezoelectricity cantilever or vibrating diaphragm compressible or tensile this elastic block in vibration process for this elastic block takes place elastic deformation, thereby releases the tip stress of piezoelectricity cantilever and vibrating diaphragm, guarantees that the vibration amplitude of piezoelectricity cantilever or vibrating diaphragm all can not receive the influence. In addition, the elasticity of the elastic block can be improved by increasing the height or the aspect ratio of the elastic block, thereby more facilitating the lifting of the vibration amplitude of the vibration element such as the piezoelectric cantilever and the diaphragm. In addition, the second gap can be plugged through the elastic block, so that the sealing performance between the front cavity and the rear cavity is improved, and the frequency response of the acoustic transducer is improved.

In some embodiments, a narrow slit may be provided in the elastic seal, which may enhance deformation of the elastic seal, and typically, the width of the narrow slit is less than 5 mm, which may avoid leakage of gas.

In one possible implementation manner, the elastic sealing piece at the first gap comprises a connecting part and two oppositely arranged elastic blocks, and one ends of the two elastic blocks are respectively connected with the two adjacent vibrating diaphragms;

the connecting portion is connected between the other ends of the two elastic blocks so that the slit is sealed by the two elastic blocks and the connecting portion.

By arranging the elastic sealing member to comprise an elastic block having a certain height in the vibration direction, in this way, the vibration element, for example, two adjacent diaphragms, can compress or stretch the elastic block during the vibration process, so that the elastic block is elastically deformed, thereby releasing the stress of the diaphragms and ensuring that the vibration amplitude of the diaphragms is not affected by the mutual drag. In addition, the elasticity of the elastic block can be improved by increasing the height or the aspect ratio of the elastic block, so that the vibration amplitude of the vibrating diaphragm can be more conveniently improved. In addition, the gap of vibrating element one end can be plugged to this setting of elastic block to improve the leakproofness between front chamber and the back chamber, thereby improve the frequency response of the acoustic transducer of this application embodiment, for example low frequency loudness.

In one possible implementation, the elastic sealing element at the first gap includes an elastic element and a sealing medium layer, the elastic element has a gap, and the sealing medium layer is used for sealing the gap.

By arranging the elastic sealing member to comprise an elastic member and a sealing medium layer, a gap at one end of the vibrating element can be connected with the elastic member, for example, the elastic member can be connected between the second ends of two adjacent vibrating films, so that the elastic member is elastically deformed during the vibrating process of the vibrating element, for example, the two adjacent vibrating films, and the end stress of the vibrating element, for example, the vibrating films, is released, so that the vibrating process of the vibrating element, for example, the two adjacent vibrating films, is not restrained by each other, and the vibrating amplitude of the vibrating element is improved. In addition, the gap on the elastic piece is plugged by the sealing medium layer, so that the tightness of a gap at one end of the vibration element is improved, the tightness of the front cavity and the rear cavity is improved, the occurrence of sound short circuit between the front cavity and the rear cavity is avoided, and the frequency response of the acoustic transducer is improved.

In one possible implementation, the thickness of the elastic membrane is 1um-100um, so as to ensure the elasticity and the tightness of the elastic membrane, avoid the elastic membrane from being too thick to reduce the elasticity of the elastic membrane, and in addition, too thick elastic membrane occupies too large space of the front cavity or the rear cavity to influence the frequency response of the acoustic transducer.

In yet another aspect, embodiments of the present application provide an electronic device comprising an acoustic transducer as above.

According to the electronic equipment provided by the embodiment of the application, by adopting the acoustic transducer, the sealing and isolation effects of the front cavity and the rear cavity in the acoustic transducer are improved, the problem of sound short circuit in the acoustic transducer is improved or avoided, and the frequency response of the acoustic transducer is improved, so that the acoustic performance of the electronic equipment is improved.

Drawings

FIG. 1 is a schematic diagram of an acoustic transducer according to an embodiment of the present application;

FIG. 2 is a cross-sectional view of FIG. 1;

FIG. 3 is an internal schematic view of one of the structures of an acoustic transducer in the related art;

FIG. 4 is a schematic view of the internal structure of another structure of an acoustic transducer in the related art;

FIG. 5 is a schematic diagram of the internal structure of one of the acoustic transducers provided in an embodiment of the present application;

FIG. 5a is an exploded view of FIG. 5;

FIG. 6 is a longitudinal cross-sectional view of the acoustic transducer corresponding to FIG. 5;

FIG. 7 is an enlarged view of a portion of FIG. 6 at A;

FIG. 7a is a partial schematic view of another acoustic transducer provided in an embodiment of the present application;

FIG. 7b is a partial schematic view of another acoustic transducer provided in an embodiment of the present application;

FIG. 8 is a schematic diagram of the internal structure of another acoustic transducer provided in an embodiment of the present application;

FIG. 9 is a longitudinal cross-sectional view of the acoustic transducer corresponding to FIG. 8;

FIG. 10 is a partial enlarged view at B in FIG. 9;

FIG. 11 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 12 is an enlarged view of a portion of FIG. 11 at C;

FIG. 13 is a schematic view of a portion of a structure of yet another acoustic transducer provided in an embodiment of the present application;

fig. 14 is a partial enlarged view at D in fig. 13;

FIG. 15 is a longitudinal schematic view of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 16 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 17 is a longitudinal cross-sectional view of the acoustic transducer corresponding to FIG. 16;

FIG. 18 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 19 is a cross-sectional view taken along line A-A of FIG. 18;

FIG. 20 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

fig. 21 is a partial enlarged view of F in fig. 20;

FIG. 22 is a longitudinal cross-sectional view of yet another acoustic transducer provided in an embodiment of the present application;

Fig. 23 is a partial enlarged view at G in fig. 22;

FIG. 24 is a graph of vibration displacement of the elastomeric block at different heights in the corresponding acoustic transducer of FIG. 22;

FIG. 25 is a simulation of the displacement of the vibrating element of FIG. 22 at a frequency of 20 Hz;

FIG. 25a is an enlarged view of a portion of FIG. 25 at H;

FIG. 25b is a schematic vibration diagram of the vibration element corresponding to FIG. 25;

FIG. 25c is a schematic view of the structure at I in FIG. 25 b;

FIG. 26 is a graph showing a simulation of the displacement of a piezoelectric cantilever and diaphragm on a monolithic diaphragm in the related art;

FIG. 26a is an enlarged view of a portion of J in FIG. 26;

FIG. 27 is a plot of the frequency response of the acoustic transducer corresponding to FIG. 22;

FIG. 28 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 29 is a longitudinal cross-sectional view of the acoustic transducer corresponding to FIG. 28;

FIG. 30 is a simulated graph of the displacement of the vibrating element of FIG. 28 at a frequency of 20 Hz;

FIG. 31 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 32 is a schematic diagram of the internal structure of yet another acoustic transducer provided in an embodiment of the present application;

FIG. 33 is a schematic diagram of a substrate and a diaphragm layer in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 34 is a schematic diagram of a structure of an etched diaphragm layer in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 35 is a schematic view of a structure of a support and a piezoelectric cantilever in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 36 is a schematic view of a structure of a piezoelectric cantilever with a first elastic membrane layer formed thereon according to one embodiment of the present invention;

FIG. 37 is a schematic view of a structure of an acoustic transducer according to an embodiment of the present disclosure after forming a first elastic block;

FIG. 38 is a schematic view of a structure of an acoustic transducer according to an embodiment of the present disclosure after forming a first elastic seal;

FIG. 39 is a schematic diagram of a method for fabricating an acoustic transducer according to an embodiment of the present disclosure, in which a third elastic membrane layer is formed on two opposite piezoelectric cantilevers;

FIG. 40 is a schematic structural view of a third elastic block formed on two opposite piezoelectric cantilevers in another method for fabricating an acoustic transducer according to an embodiment of the present invention;

FIG. 41 is a schematic diagram of a structure of a fourth elastic membrane layer formed on the surfaces of a third elastic block and a piezoelectric cantilever in another method for manufacturing an acoustic transducer according to an embodiment of the present disclosure;

FIG. 42 is a schematic diagram illustrating a structure of a diaphragm formed between two adjacent third elastic blocks in another method for manufacturing an acoustic transducer according to an embodiment of the present disclosure;

FIG. 43 is a schematic view of a structure of a vibration element formed on a substrate in another method of fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 44 is a schematic view of a structure of an elastic member formed on a substrate in another method for manufacturing an acoustic transducer according to an embodiment of the present disclosure;

FIG. 45 is a schematic view of a structure of a support formed on a substrate in another method of fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 46 is a schematic diagram of a method for fabricating an acoustic transducer according to an embodiment of the present disclosure, in which a sealing medium layer is formed on the surfaces of a vibrating element and an elastic member;

FIG. 47 is a schematic view of a method of fabricating an acoustic transducer according to an embodiment of the present disclosure in which an elastic seal is formed between two adjacent piezoelectric cantilevers;

FIG. 48 is a schematic structural view of a fourth elastic membrane layer formed on the surface of each piezoelectric cantilever and the substrate in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 49 is a schematic view of a structure of a diaphragm formed between two adjacent piezoelectric cantilevers in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 50 is a schematic diagram of a structure of an elastic member formed on a substrate in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 51 is a schematic view of a structure of a support formed on a substrate in a method of fabricating yet another acoustic transducer according to an embodiment of the present disclosure;

FIG. 52 is a schematic diagram of a method for fabricating an acoustic transducer according to an embodiment of the present disclosure, in which a sealing medium layer is formed on the surfaces of a vibrating element and an elastic member;

FIG. 53 is a schematic view of a structure of an elastic sealing member formed between a piezoelectric cantilever and a diaphragm in a method for fabricating an acoustic transducer according to an embodiment of the present disclosure;

FIG. 54 is a schematic diagram of a structure of yet another acoustic transducer provided in an embodiment of the present application;

fig. 55 is a schematic structural diagram of yet another acoustic transducer provided in an embodiment of the present application.

Reference numerals illustrate:

10. 100-a housing; 20. 200-supporting pieces; 30. 300-a vibrating element; 400-elastic seal; 500-sealing the folded ring;

101-an anterior chamber; 102-a rear cavity; 110-a housing; 120-substrate; 111-a sound outlet; 200 a-a substrate; 300 a-a diaphragm layer; 31-gap; 301-a slit; 302-micro-joint; 310-a piezoelectric cantilever; 320-vibrating diaphragm; 410-a first resilient seal; 420-a second resilient seal; 430-a third resilient seal;

210-underlying silicon; 220-a silicon oxide layer; 230-top layer silicon; 301 a-a first gap; 301 b-a second slit; 311-bottom electrode layer; 312-a piezoelectric layer; 313-a top electrode layer; 411-a first elastic block; 412-a connection; 421-elastic member; 421 a-void; 422-a sealing medium layer;

411 a-a first elastic film layer; 430 a-a third elastic film layer; 320 a-fourth elastic film layer.

Detailed Description

The terminology used in the description section of the present application is for the purpose of describing particular embodiments of the present application only and is not intended to be limiting of the present application.

An embodiment of the application provides an electronic device including an acoustic transducer. Wherein, the acoustic transducer refers to a device for interconversion of electric energy and acoustic energy. Among these, converting electrical energy into acoustic energy is called a transmitting transducer, and converting acoustic energy into electrical energy is a receiving transducer. The transmitting transducer and the receiving transducer may be used separately or may share an acoustic transducer. The embodiments of the present application are specifically described with reference to a transmitting transducer, such as a speaker.

It should be noted that, the electronic device according to the embodiments of the present application may include, but is not limited to, a mobile phone, a tablet computer, a notebook computer, an ultra mobile personal computer (ultra-mobile personal computer, UMPC), a handheld computer, a touch-sensitive television, an intercom, a netbook, a POS (Point of sales) machine, a personal digital assistant (personal digital assistant, PDA), a wearable device such as an earphone, a bluetooth glasses, etc., a mobile or fixed terminal with an acoustic transducer such as a speaker, a virtual reality device, etc. Of course, the electronic device may also include, but is not limited to, ultrasonic transducers such as ultrasonic emulsification homogenizers, atomizers, ultrasonic engraving machines, and devices with acoustic transducers such as echo sounders and doppler log.

Fig. 1 is a schematic structural diagram of an acoustic transducer according to an embodiment of the present application, and fig. 2 is a cross-sectional view of fig. 1. Referring to fig. 1 and 2, an embodiment of the present application provides an acoustic transducer including a vibration element 300, one side of the vibration element 300 having a rear cavity 102, and the other side of the vibration element 300 having a front cavity 101.

In practice, the vibration element 300 may vibrate in its thickness direction (refer to the direction z shown in fig. 2) to push the air in the front and

rear chambers

101 and 102 to vibrate, thereby making the acoustic transducer emit sound.

Fig. 3 is an internal schematic view of one structure of an acoustic transducer in the related art, and fig. 4 is an internal schematic view of another structure of an acoustic transducer in the related art. Referring to fig. 3 and 4, in the related art, the vibration element 300 in the acoustic transducer may be a piezoelectric cantilever.

Referring to fig. 3 and 4, in the related art, the acoustic transducer may further include a housing 10 and a support 20, the support 20 and the piezoelectric cantilever being both positioned in the housing 10, wherein a first end of the support 20 is fixed on an inner wall of the housing 10, and one end of the vibration element 30, for example, the piezoelectric cantilever is connected to a second end of the support 200 to ensure stability of the vibration element 30 on the support 20. For convenience of description, the vibration element 30 is used to connect one end of the support 200 as the first end of the vibration element 30.

In some examples, the support 20 may have a cylindrical structure with a hollow interior, and the vibrating element 30, the inner wall of the support 20, and a portion of the housing wall of the housing 10 form a rear cavity, and the vibrating element 30, the outer wall of the support 20, and another portion of the housing wall of the housing 10 form a front cavity.

In practical applications, the piezoelectric film in the vibration element 30 may warp and deform under the action of the electric field, and may be used as a vibration element for pushing the airflow in the front cavity and the rear cavity, so that the acoustic transducer may make a sound. It is understood that the vibration direction of the vibration element 30 is the thickness direction thereof. Referring to fig. 4, the thickness direction of the vibration element 30 is parallel to the height direction of the support 200 (which may be referred to as the z direction in fig. 2).

It will be appreciated that the number of vibration elements 30 may be one or more. Referring to fig. 3, when the vibration element 30 is one, the first end of the vibration element 30 is fixedly connected with the support 20, and a gap 31 is formed between the second end of the vibration element 30 and the support 20, so that the vibration element 30 can vibrate freely, and in addition, the gap 31 structure ensures that the sealing effect between the front cavity and the rear cavity at both sides of the vibration element 30 is ensured as much as possible by using the thermal viscosity of air between the vibration element 30 and the inner wall of the support 20, so that the problem of sound short-circuiting between the front cavity and the rear cavity is avoided, and the frequency response of the acoustic transducer is ensured. Wherein the second end of the vibration element 30 is an end of the vibration element 30 facing away from the first end. It will be appreciated that the gap 31 between the second end of the vibrating element 30 and the support 20 communicates with the front and rear chambers, in other words, the gap 31 communicates with the front and rear chambers.

It should be noted that, the sound short circuit refers to that, during the vibration process, the vibration element 30 has sound waves radiated to the front cavity and sound waves radiated to the rear cavity, and the sound waves in the two directions have opposite phases, that is, the phase difference is 180 °, and the opposite sound waves cause the sound waves to cancel each other, so that the sensitivity of the acoustic transducer is reduced, and thus the acoustic sound is reduced.

It will be appreciated that when the piezoelectric cantilever is one, the other end portions of the piezoelectric cantilever except the first end and the second end may form a gap 31 with the support member 20, so as to ensure the vibration amplitude of the piezoelectric cantilever, and also ensure the tightness of the front cavity and the rear cavity at both sides of the piezoelectric cantilever as much as possible.

Referring to fig. 4, when the plurality of vibration elements 30 are provided, a first end of each vibration element 30 is fixedly connected to the support 20, such that the plurality of vibration elements 30 may be disposed at a second end of the support 20 at intervals about an axis (refer to l in fig. 4) of the support 20, in other words, the plurality of vibration elements 30 are disposed at intervals along a circumferential direction of the support 20, and the plurality of vibration elements 30 are deformed to warp by an electric field, thereby vibrating to push air flows of the front and rear chambers, so that the acoustic transducer is converted from electric energy into acoustic energy.

Referring to fig. 4, taking two vibration elements 30 as an example, the two vibration elements 30 are disposed at intervals along the circumferential direction of the support 20, a first end of each vibration element 30 is fixedly connected to a second end of the support 20, and the second end of each vibration element 30 is disposed opposite to the second end of the support 20, for example, toward the axis l of the support 20. In the related art, a gap 31 is provided between the second ends of two vibration elements 30 to avoid mutual restriction between adjacent two vibration elements 30 during vibration, so that each vibration element 30 is free to vibrate, and the vibration displacement of each vibration element 30 in the z-direction is increased, thereby increasing the vibration amplitude of the vibration element.

However, in the above example, the gap 31 does not allow an effective seal between the front and rear chambers, for example, the gap 31 existing between the second end of the vibration element 30 and the support 20, so that a good sealing connection between the second end of the vibration element 30 and the support 20 is not possible. For another example, the gap 31 existing at the second ends of the two vibration elements 30 also makes the second ends of the two vibration elements 30 not be well connected in a sealing manner, so that sound waves in the front cavity and the rear cavity at two sides of the vibration elements 30 leak from the gap 31, thereby causing a problem of sound short circuit between the front cavity and the rear cavity, affecting the sensitivity of the acoustic transducer, reducing the frequency response of the acoustic transducer, for example, the loudness in a low frequency band, such as a frequency band lower than 2kHz, is within 100dB, and affecting the acoustic performance of the acoustic transducer.

According to the acoustic transducer, the elastic sealing piece is arranged at the gap at one end of the vibrating element to seal the gap, such as the micro gap, of the rear cavity, on one hand, the sealing performance between the front cavity and the rear cavity of the vibrating element along the two sides of the vibrating direction is improved, the short circuit of sound between the front cavity and the rear cavity is avoided, the sensitivity of the acoustic transducer is improved, the frequency response of the acoustic transducer is improved, particularly the low-frequency loudness is improved, on the other hand, the vibrating element can be ensured not to be limited by other structures such as the supporting piece or other vibrating elements, the freedom degree of the vibrating element can not be influenced, the vibrating amplitude of the vibrating element is ensured, and the frequency response of the acoustic transducer is improved.

The structure of the acoustic transducer according to the embodiments of the present application is described in detail below with reference to the accompanying drawings.

FIG. 5 is a schematic view of a portion of an acoustic transducer according to an embodiment of the present application, and FIG. 5a is an exploded view of FIG. 5; fig. 6 is a longitudinal cross-sectional view of the acoustic transducer corresponding to fig. 5. Referring to fig. 1 and 5 to 6, in the acoustic transducer provided in the embodiment of the present application, a slit 301 is formed at one end of the vibration element 300, and an elastic sealing member 400 is located at the slit 301 and connected to the vibration element 300, for example, the elastic sealing member 400 is connected to one end of the vibration element 300 to seal a portion of the slit 301 at one end of the vibration element 300, so as to improve the sealing performance of the rear cavity 102.

Referring to fig. 5 and 5a, in practical applications, one end of the vibration element 300 may be supported on a fixing member (for example, a support member 200 mentioned below), and the other end of the vibration element 300 may be suspended on the fixing member to ensure the vibration amplitude of the vibration element 300.

For convenience of description, an end of the vibration element 300 connected to the fixing member may be referred to as a first end of the vibration element 300 (refer to fig. 5 a), an end of the vibration element 300 opposite to the first end a may be referred to as a second end of the vibration element 300, and an end of the vibration element 300 located between the first end a and the second end b may be referred to as a side end of the vibration element 300 (refer to fig. 5 c).

Referring to fig. 5a, it can be appreciated that in the embodiment of the present application, one end of the vibration element 300 has a slit 301, and the elastic sealing member 400 is located at the slit 301 to block the slit 301, and the air flow can be blocked by the elastic sealing member 400 at the slit 301, so as to improve the sealing performance at the slit 301. The other end portion of the vibration element 300 may have micro slits 302 (refer to fig. 5 and 5 a), so that the air flow can be blocked by the air heat adhesiveness in the micro slits 302 having a very small width to improve the sealing property at the micro slits 302, and in addition, the vibration amplitude of the entire vibration element 300 is ensured.

It should be noted that, for illustration, in fig. 5a, the widths of the slit 301 and the micro slit 302 are substantially the same, but in practice, the slit 302 is a micro slit, and the width thereof may reach the micrometer scale and be far greater than the width of the slit 301.

Referring to fig. 5a, the slit 301 may be exemplarily located at the second end b of the vibration element 300, and the side end c of the vibration element 300 has micro slits 302. It will be appreciated that the second end b of the vibration element 300 has a larger vibration amplitude than the other end, e.g. the side end c, i.e. the resilient seal 400 may be arranged at the slit 301 at the end of the vibration element 300 where the vibration amplitude is larger.

For example, the vibration element 300 may be a piezoelectric cantilever 310, and after a voltage is applied to the vibration element 300, for example, the piezoelectric cantilever 310, the second end b of the piezoelectric cantilever 310 may be buckling deformed by an electric field, for example, the second end of the piezoelectric cantilever 310 may be buckling deformed up and down in the z direction, so that the entire piezoelectric cantilever 310 vibrates up and down in the z direction, and the second end b of the vibration element 300, for example, the piezoelectric cantilever 310, has a larger vibration amplitude than the side end c, so that the slit 301 at the second end b of the vibration element 300 may become larger during the vibration of the vibration element 300, so that the sound is very likely to leak at the slit 301 at the second end b of the vibration element 300, compared to the slits 301 at the other side ends c.

By providing the elastic sealing member 400 at the slit 301 at the second end b of the vibration element 300 to seal the slit 301 thereat, on the one hand, compared with the acoustic transducer in the related art, the sealing property at the slit 301 at one end of the vibration element 300 is improved, the sealing property of the rear cavity 102 is improved, thereby improving the sealing isolation effect between the rear cavity 102 and the front cavity 101 of other cavities such as the acoustic transducer, reducing the leakage degree of sound at the slit 301, improving or avoiding the problem of sound short circuit between the front cavity 101 and the rear cavity 102, improving the sensitivity of the acoustic transducer, and improving the frequency response of the acoustic transducer, particularly the low frequency loudness.

On the other hand, the gap 301 at one end of the vibration element 300 is plugged by the elastic sealing piece 400, so that the elastic sealing piece 400 can generate elastic deformation in the vibration process of the vibration element 300 to release the stress of the vibration element 300, the vibration element 300 can be ensured not to be restrained by other components, the degree of freedom of the vibration element 300 can not be influenced, the vibration amplitude of the vibration element 300 is ensured, and the frequency response of the acoustic transducer is improved.

It will be appreciated that, since the gap 301 is sealed by the elastic seal 400, the gap 301 at one end of the vibration element 300 may be as wide as the gap 31 (shown in fig. 4) in the related art, or may be wider than the gap 31, and the width of the gap 301 with the elastic seal 400 is not limited in the embodiment of the present application.

With continued reference to fig. 5 and 5a, in this example, the side end c of the vibration element 300 has a micro slit 302, where the elastic seal 400 is not provided, and the micro slit 302 where the elastic seal 400 is not provided can block the air flow by using the air thermal viscosity to improve or avoid the problem of the acoustic short circuit between the front cavity 101 and the rear cavity 102, the sensitivity of the acoustic transducer is improved, and in addition, the elastic seal 400 is not provided at a part of the slit 301 (for example, the slit 301 at the side end c of the vibration element 300), also it is ensured that the vibration amplitude of the vibration element 300 is not limited.

In this embodiment, the elastic sealing member 400 may completely seal the slit 301, and of course, may not completely seal the slit 301, so long as the leakage of the sound generated in the rear cavity 102 can be prevented. Similarly, the micro-joint 302 is not completely sealed, for example, between the side end c of the vibration element 300 and a fixture (e.g., the support 200), so long as it is capable of blocking the leakage of sound generated in the rear chamber 102.

Referring to fig. 5 and 6, the sound transducer of the embodiment of the present application may further include a support 200 having opposite first and second ends in an axial direction (refer to an extending direction of l in fig. 2), in other words, the first and second ends of the support 200 are both ends of the support 200 in a height direction, wherein the vibration element 300 may be located at one end of the support 200, for example, the second end. Illustratively, one end, e.g., a first end, of the vibration element 300 may be coupled to a second end of the support 200, and the other end, e.g., the second end, of the vibration element 300 has a gap 301.

The vibration element 300 of the embodiment of the present application may perform a vibration motion in the height direction (refer to the z direction shown in fig. 5) of the support 200 to push the air flow in the front and

rear chambers

101 and 102, so that the inner cavity of the housing 100 generates sound and is transmitted out from the sound outlet 111.

It will be appreciated that the first end of the vibration element 300 may be directly fixed to the second end of the support 200, for example, the first end of the vibration element 300 may be fixed to the second end of the support 200 by bonding or high temperature pressing, or the like, and of course, in some examples, the first end of the vibration element 300 may also be fixed to the second end of the support 200 by other structural members, and the connection manner between the first end of the vibration element 300 and the support 200 is not limited in particular in the embodiments of the present application.

The support 200 of the present embodiment provides support for the structure of the vibration element 300, etc., and the constituent materials of the support 200 may include, but are not limited to, silicon, germanium, silicon carbide, aluminum oxide, etc.

Referring to fig. 2, in some examples, the support 200 may have a ring-shaped structure having a hollow structure inside, for example, the support 200 may have a support column having a hollow structure, and both ends in an axial direction thereof may have an opening structure. The cross-sectional shape of the support 200 in the radial direction may include, but is not limited to, any one of polygonal, circular, elliptical shapes. For example, the radial cross-sectional shape of the support 200 may be circular or rectangular, in other words, the support 200 may be a square annular frame or a circular frame. Of course, the support 200 may be an annular frame other than a square annular frame or a circular frame, and the shape of the support 200 is not limited in particular in the embodiments of the present application.

In the present embodiment, the vibration element 300 is located at the second end of the support 200, so that the vibration element 300 and the outer wall of the support 200 may be used to form the front cavity 101 of the acoustic transducer, for example, one side surface of the vibration element 300 and the outer wall of the support 200 may serve as part of the cavity wall of the front cavity 101. The inner walls of the vibration element 300 and the support 200 may be used to form the rear cavity 102, for example, the other side of the vibration element 300 and the inner wall of the support 200 may serve as part of the cavity wall of the rear cavity 102, wherein the other side of the vibration element 300 may serve as the top wall of the rear cavity 102 and the inner wall of the support 200 may serve as the side wall of the rear cavity 102.

Referring to fig. 5, a first end of the vibration element 300 of the embodiment of the present application is fixedly coupled with a second end of the support 200 to ensure structural stability of the vibration element 300. The second end of the vibration element 300 is provided with a slit 301, the slit 301 is communicated with the rear cavity 102, the slit 301 is provided with an elastic sealing piece 400, and the elastic sealing piece 400 is connected with the second end of the vibration element 300 to seal the slit 301, so that the tightness of the rear cavity 102 is improved, and the sealing and isolating effect between the rear cavity 102 and other cavities such as the front cavity 101 is improved.

The second end of the vibration element 300 refers to an end opposite to the first end of the vibration element 300. Wherein the first end of the vibration element 300 is a fixed end, the second end of the vibration element 300 may be understood as a free end.

Referring to fig. 5, a vibration element 300 is illustrated as including at least one piezoelectric cantilever 310. The piezoelectric cantilever 310 may be deformed by buckling under the action of an electric field, and by varying the strength of the electric field, the piezoelectric cantilever 310 vibrates in the height direction of the support 200 to push the air flow in the front and

rear chambers

101 and 102 at a certain frequency, so that the acoustic transducer generates sound. The vibration direction of the vibration element 300, for example, the piezoelectric cantilever 310 is the thickness direction of the vibration element 300.

The piezoelectric cantilever 310 includes a piezoelectric layer (referred to as a piezoelectric layer 312 in fig. 35) that deforms under the action of an electric field, for example, the piezoelectric layer may warp at different frequencies toward the front cavity 101 and toward the rear cavity 102 under different electric field intensities, so that the piezoelectric cantilever 310 vibrates in the thickness direction to convert sound. It is understood that the vibration amplitude, i.e., the degree of warpage, of the piezoelectric cantilever 310 is related to the vibration frequency and the electric field strength.

In practical applications, the piezoelectric cantilever 310 may further include a bottom electrode layer and a top electrode layer (shown with reference to the bottom electrode layer 311 and the top electrode layer 313 in fig. 35), where the bottom electrode layer and the top electrode layer are respectively located on two sides of the piezoelectric layer, in other words, the piezoelectric cantilever 310 may include a bottom electrode layer, a piezoelectric layer, and a top electrode layer that are sequentially disposed along a thickness direction of the piezoelectric cantilever 310.

It should be noted that, the electric field strength is determined according to the voltage generated by the driving signal, for example, the acoustic transducer converts the received driving signal into the driving voltage, and applies the driving voltage to the bottom electrode layer and the top electrode layer of the piezoelectric cantilever 310, so as to generate corresponding electric field strength, so that the piezoelectric layer generates corresponding buckling deformation, and pushes air in the front cavity 101 and the rear cavity 102, thereby generating sound.

The bottom electrode layer and the top electrode layer may include, but are not limited to, single-element metal films such as copper films or aluminum films, or composite films such as chrome-gold films or titanium-palladium-gold films, and the constituent materials of the piezoelectric layers may include, but are not limited to, inorganic piezoelectric materials such as piezoelectric crystals or piezoelectric ceramic films of barium titanate and the like, and organic piezoelectric materials such as polymer films of polyvinylidene fluoride (Poly vinylidene fluoride, abbreviated as PVDF) and the like. The piezoelectric ceramic film may be lead zirconate-titanate-titanate piezoelectric ceramics (PZT) film.

In some examples, piezoelectric cantilever 310 may further include a substrate layer (shown with reference to top layer silicon 230 in fig. 35) on which the piezoelectric stack is disposed, e.g., a bottom electrode layer, a piezoelectric layer, and a top electrode layer are sequentially stacked in the z-direction in fig. 35 on a substrate layer, e.g., top layer silicon 230. The substrate layer serves to support the piezoelectric layer or the piezoelectric layer and the electrode layer, so that the structure of the entire piezoelectric cantilever 310 is more stable.

It is understood that the substrate layer may be a silicon substrate, for example, the substrate layer may be a top-level silicon 230 (shown with reference to fig. 35) in silicon-on-insulator (Silicon On Insulator, SOI for short). In other examples, the substrate layer may also be heavily doped silicon such as p-type heavily doped silicon or n-type heavily doped silicon, for example, the substrate layer may be silicon nitride, and the material of the substrate layer is not limited in the embodiments of the present application, and may be specifically selected according to actual needs.

In some examples, piezoelectric cantilever 310 may further include an elastic layer that may be disposed on any one of the layers of piezoelectric cantilever 310, e.g., the elastic layer may be disposed on any side of the piezoelectric layer, or the elastic layer may be disposed on a side of the top electrode layer facing away from the piezoelectric layer, to improve the elasticity of piezoelectric cantilever 310 and avoid the piezoelectric cantilever 310 from being too stiff and breaking during vibration. The composition materials of the elastic layer may include, but are not limited to, silica gel, rubber, liquid crystal polymer (Liquid Crystal Polyester, abbreviated as LCP) and Polyimide (PI), and may be specifically selected according to practical needs.

The relative positions of the layers and the number of structural layers in the piezoelectric cantilever 310 are not limited, and for example, the piezoelectric layer in the piezoelectric cantilever 310 may be one layer or may be multiple layers.

In addition, the thickness of the piezoelectric cantilever 310 may be 2um to 100um to ensure the vibration amplitude and structural stability of the piezoelectric cantilever 310. For example, the thickness of the piezoelectric cantilever 310 may be 2um, 10um, 50um, 70um, or 100um, which may be selected according to practical needs.

Wherein a conductive member, such as a wire, for supplying power to the piezoelectric cantilever 310 may be routed from within the support member 200 and electrically connected to the bottom and top electrode layers of the piezoelectric cantilever 310 to provide a voltage to the piezoelectric cantilever 310. Of course, the conductive elements such as wires may also be routed from the front cavity 101 or the rear cavity 102 and finally electrically connected to the bottom electrode layer and the top electrode layer of the piezoelectric cantilever 310, and the routing paths of the conductive elements electrically connected to the piezoelectric cantilever 310 are not specifically limited in the embodiments of the present application.

According to the embodiment of the application, the vibration element 300 is arranged to comprise the piezoelectric cantilever 310, and the piezoelectric cantilever 310 is subjected to voltage application, so that the piezoelectric material in the piezoelectric cantilever 310 is subjected to buckling deformation under the action of an electric field, the air pushing effect can be achieved, on one hand, the purpose of converting electric energy into acoustic energy can be achieved, and on the other hand, the structure of the acoustic transducer is simplified.

Fig. 7 is a partial enlarged view at a in fig. 6. Referring to fig. 5-7, for example, the vibration element 300 may include a piezoelectric cantilever 310, a first end of the piezoelectric cantilever 310 being fixedly coupled to a second end of the support member 200, the second end of the piezoelectric cantilever 310 being coupled to a resilient seal 400, the resilient seal 400 sealing at least a gap 301 at the second end of the vibration element 300, such as the piezoelectric cantilever 310. It will be appreciated that the slit 301 at the second end of the vibration element 300, e.g., the piezoelectric cantilever 310, communicates with the front and rear chambers 101 and 102 (see fig. 6), and thus the elastic sealing member 400 seals the slit 301 at the second end of the vibration element 300, e.g., the piezoelectric cantilever 310, so that the sealing between the front and

rear chambers

101 and 102 is improved.

Referring to fig. 5, the structure of the acoustic transducer will be described using the vibration element 300 as one piezoelectric cantilever 310.

Referring to fig. 5 and 6, in the embodiment of the present application, a first end (shown with reference to a in fig. 5) of the piezoelectric cantilever 310 is fixedly connected to a second end of the support 200, so as to ensure that the piezoelectric cantilever 310 can be stably fixed to the second end of the support 200 during vibration.

In order to ensure normal deformation and vibration of the piezoelectric cantilever 310, the second end (shown by b in fig. 5) and the side end (shown by c in fig. 5) of the piezoelectric cantilever 310 need to be suspended at the second end of the supporting member 200, for example, the second end b and the side end c of the piezoelectric cantilever 310 and the side wall of the supporting member 200 have slits 301 in the direction perpendicular to the height direction of the supporting member 200.

Note that, the side end c of the piezoelectric cantilever 310 is an end of the piezoelectric cantilever 310 other than the first end a and the second end b, for example, a gap 301 is formed between the second end b of the piezoelectric cantilever 310 and the side wall of the support 200 in the x direction, and a gap 301 is formed between the side end c of the piezoelectric cantilever 310 and the side wall of the support 200 in the y direction.

Referring to fig. 5, taking the cross-sectional shape of the piezoelectric cantilever 310 along the xy plane as a rectangle as an example, the first end a and the second end b of the piezoelectric cantilever 310 may be two ends of the piezoelectric cantilever 310 along the length direction, respectively, and then the side ends of the piezoelectric cantilever 310 are two ends of the piezoelectric cantilever 310 along the width direction.

Referring to fig. 5 and 7, the second end of the vibration element 300, for example, the piezoelectric cantilever 310 is connected to the second end of the support 200 through the elastic sealing member 400, in other words, one end of the elastic sealing member 400 is connected to the piezoelectric cantilever 310 and the other end of the elastic sealing member 400 is connected to the second end of the support 200 such that the gap 301 between the second end of the piezoelectric cantilever 310 and the support 200 is elastically blocked by the elastic sealing member 400.

The elastic sealing member 400 may be elastically deformed during the vibration of the vibration element 300, for example, the piezoelectric cantilever 310, thereby releasing the stress of the piezoelectric cantilever 310, ensuring that the piezoelectric cantilever 310 is not constrained by the support member 200, so that the degree of freedom of the piezoelectric cantilever 310 is not affected, and improving the vibration displacement of the piezoelectric cantilever 310 in the z direction, thereby improving the vibration amplitude of the piezoelectric cantilever 310, and improving the frequency response of the acoustic transducer.

Compared to the related art, in which the gap 31 exists between the second end of the piezoelectric cantilever of the acoustic transducer and the support 20, the embodiment of the present application, by connecting the elastic sealing member 400 to the second end of the vibration element 300, such as the piezoelectric cantilever 310, to seal the gap 301 at the second end of the vibration element 300, such as to realize the sealing connection between the second end of the vibration element 300, such as the piezoelectric cantilever 310, and the support 200, the sealing between the vibration element 300 and the support 200 is improved, so that the sealing between the front cavity 101 and the rear cavity 102 on both sides of the vibration element 300 along the vibration direction (refer to the z direction in fig. 6) is improved, the problem of sound short circuit between the front cavity 101 and the rear cavity 102 is improved, the sensitivity of the acoustic transducer is improved, and the frequency response, particularly the low frequency loudness, of the acoustic transducer is improved.

It will be appreciated that the inner walls of the electronic device, e.g. the earphone, may act as part of the cavity walls of the front cavity 101 and the rear cavity 102 of the acoustic transducer. For example, the support 200 and the vibration element 300 of the acoustic transducer may be assembled within the earphone and the first end of the support 200 may be fixed to the inner wall of the earphone, such that the vibration element 300, the outer wall of the support 200 and a portion of the housing wall of the earphone may form the front cavity 101, and the vibration element 300, the inner wall of the support 200 and another portion of the housing wall of the earphone form the rear cavity 102, that is, the front cavity 101 and the rear cavity 102 are part of the inner cavity of the earphone, respectively.

Referring to fig. 5, in some examples, the acoustic transducer may further include a housing 100, the housing 100 having an interior cavity, the vibration element 300 and the support 200 being located in the interior cavity of the housing 100.

Illustratively, the housing 100 may include a base 120 and a casing 110 coupled to an outer periphery of the base 120, one side of the casing 110, such as a bottom, is an open structure, and the base 120 is disposed on the opening, such that the base 120 and the casing 110 together enclose a cavity of the acoustic transducer. The substrate 120 provides support for the main structures of the support 200 and the vibration element 300, and thus, the substrate 120 may be made of a high-strength hard material, for example, the material of the substrate 120 may include, but is not limited to, a hard material such as a metal, a hard resin, a ceramic, and a semiconductor, so as to ensure the structural strength of the substrate 120, thereby stably supporting the support 200 and the vibration element. The housing 110 may be made of plastic, rubber, or the like, and may be made of a material identical to the composition of the base 120.

In specific manufacturing, the base 120 and the housing 110 of the housing 100 may be integrally formed, so as to improve structural stability of the housing 100, and avoid a connection procedure between the base 120 and the housing 110, so that manufacturing of the housing 100 is simplified. For example, when the materials of the base 120 and the case 110 are the same, the case 100 may be integrally cast. When the materials of the substrate 120 and the housing 110 are different, the substrate 120 and the housing 110 may be formed by two-shot molding. Of course, the housing 100 may be a separate piece, for example, the substrate 120 may be fixed to the casing 110 by bonding, screwing, or high-temperature pressing. The embodiment of the present application does not limit the molding manner of the housing 100.

Referring to fig. 5 and 6, in this example, a first end of the supporter 200 may be fixed to an inner wall of the case 100 such that the vibration element 300 may be suspended in the cavity of the case 100 by the supporter 200. Illustratively, the first end of the support 200 may be secured to the harder base 120 of the housing 100, thereby ensuring structural stability of the support 200 and the vibrating elements on the support 200, such as the first vibrating element 300.

Wherein the vibrating element 300, the outer wall of the support 200 and a portion of the housing wall of the housing 100 may form the front cavity 101, and the vibrating element 300, the inner wall of the support 200 and another portion of the housing wall of the housing 100 form the rear cavity 102, in other words, the inner wall of the support 200 faces the rear cavity 102 and the outer wall of the support 200 faces the front cavity 101.

The housing wall forming the rear cavity 102 in the housing 100 refers to an inner wall located inside the first end of the support member 200, and the housing wall forming the front cavity 101 in the housing 100 refers to an inner wall located outside the support member 200. For example, when the first end of the supporter 200 is fixed on the base 120, the vibrating element 300, the inner wall of the supporter 200, and a portion of the base 120 located inside the supporter 200 form the rear cavity 102, and the vibrating element 300, the outer wall of the supporter 200, the outer case 110 in the case 100, and a portion of the base 120 located outside the supporter 200 form the front cavity 101.

Referring to fig. 2, in practical application, a sound outlet 111 is formed on a wall of the housing 100 located in the front cavity 101 to transmit sound of the front cavity 101, for example, the front cavity. For example, one or more spaced apart sound outlets 111 may be formed in the housing wall of the housing 110 opposite the vibration element 300.

In some examples, a damping mesh (not shown) may be disposed on the sound outlet 111 to improve air compliance within the housing 100, thereby improving the acoustic performance of the acoustic transducer of embodiments of the present application.

It is understood that the end shape (e.g., first end, second end, or side end) of the vibration element 300, such as the piezoelectric cantilever 310, may match the radial cross-sectional shape of the support 200. Referring to fig. 5, for example, when the radial cross-sectional shape of the support 200 is rectangular, the cross-sectional shape of the vibration element 300, for example, the piezoelectric cantilever 310, in the direction perpendicular to the thickness direction is rectangular, wherein the first end, the side end, and the second end of the vibration element 300, for example, the piezoelectric cantilever 310, are each planar structures that match the sides of the support 200.

Fig. 8 is a schematic view of an internal structure of another acoustic transducer according to an embodiment of the present application, fig. 9 is a longitudinal sectional view of the acoustic transducer corresponding to fig. 8, and fig. 10 is a partial enlarged view at B in fig. 9. Referring to fig. 8-10, in some examples, the vibration element 300 may include two piezoelectric cantilevers 310, wherein first ends of the two piezoelectric cantilevers 310 are fixedly connected to a first side of a second end of the support 200, and second ends of the two piezoelectric cantilevers 310 are opposite to each other and spaced apart, in other words, a gap 301 is provided between the second ends of the two piezoelectric cantilevers 310 (refer to fig. 8 and 10).

For example, the radial cross-sectional shape of the support 200 is rectangular, the horizontal cross-sectional shape of the two piezoelectric cantilevers 310 may be rectangular, the first ends of the two piezoelectric cantilevers 310 are fixedly connected to two long sides of the second end of the support 200, the second ends of the two piezoelectric cantilevers 310 face towards the symmetry line of the long side of the rectangle, and a gap 301 is provided between the second ends of the two piezoelectric cantilevers 310.

In this example, the elastic sealing member 400 is located at the slit 301 of the second ends of the two piezoelectric cantilevers 310, and the elastic sealing member 400 is hermetically connected to the second ends of the two piezoelectric cantilevers 310, respectively, in other words, the second ends of the two piezoelectric cantilevers 310 are connected by the elastic sealing member 400.

Referring to fig. 8 and 9, for example, an elastic sealing member 400 is provided between the second ends of the two piezoelectric cantilevers 310, one end of the elastic sealing member 400 is connected to the second end of one of the piezoelectric cantilevers 310, and the other end of the elastic sealing member 400 is connected to the second end of the other piezoelectric cantilever 310 (refer to fig. 10), so that the gap 301 between the second ends of the two piezoelectric cantilevers 310 is sealed by the elastic sealing member 400, thereby improving the sealing and isolating effect between the front cavity 101 and the rear cavity 102 at both sides of the vibration element 300, avoiding the situation that the sound waves between the front cavity 101 and the rear cavity 102 cancel each other, and ensuring the frequency response of the acoustic transducer according to the embodiment of the present application.

In addition, the elastic sealing member 400 is elastically deformed during the vibration of the two piezoelectric cantilevers 310, thereby releasing the stress of each piezoelectric cantilever 310 and preventing the two piezoelectric cantilevers 310 from being caught by each other to affect the vibration amplitude.

Fig. 11 is a schematic view of an internal structure of yet another acoustic transducer provided in an embodiment of the present application, and fig. 12 is a partial enlarged view at C in fig. 11. Referring to fig. 11, the vibration element 300 of the embodiment of the present application may include a plurality of piezoelectric cantilevers 310, and the plurality of piezoelectric cantilevers 310 may be disposed at a second end of the support 200 at intervals around an axis of the support 200, in other words, the plurality of piezoelectric cantilevers 310 may be disposed at intervals along a circumference of the support 200.

Wherein the first end of each of the piezoelectric cantilevers 310 is fixedly coupled to the second end of the support member 200, i.e., the first ends of the plurality of piezoelectric cantilevers 310 are spaced apart along the circumference of the support member 200, and further, the second end of each of the piezoelectric cantilevers 310 is oriented toward the axis of the support member 200, in other words, the second end of each of the piezoelectric cantilevers 310 may be oriented toward the center of the second end of the support member 200.

Referring to fig. 11, for example, four piezoelectric cantilevers 310 are illustrated, and four piezoelectric cantilevers 310 are disposed at a second end of the support member 200 at intervals around an axis of the support member 200, for example, first ends of the four piezoelectric cantilevers 310 are disposed at intervals along a circumferential direction of the support member 200, and the second ends of the four piezoelectric cantilevers 310 may be oriented toward a center position of the second end of the support member 200. Wherein a gap 301 is provided between two adjacent piezoelectric cantilevers 310.

It should be noted that, since the plurality of piezoelectric cantilevers 310, for example, four piezoelectric cantilevers 310, are disposed along the circumferential direction of the support member 200, the second ends of the four piezoelectric cantilevers 310 may be oriented toward the center of the second end of the support member 200, and any two of the four piezoelectric cantilevers 310 may be adjacent two piezoelectric cantilevers 310. For example, the adjacent two piezoelectric cantilevers 310 may refer to two piezoelectric cantilevers 310 adjacent in the circumferential direction of the support 200, or may refer to two piezoelectric cantilevers 310 adjacent in the radial direction of the support 200.

It will be appreciated that in this example, the gap 301 is located at the side ends of the piezoelectric cantilevers 310, for example, the gap 301 between two adjacent piezoelectric cantilevers 310 in the circumferential direction of the support 200 is located between the side ends of the adjacent two piezoelectric cantilevers 310. A gap 301 between two adjacent piezoelectric cantilevers 310 in the radial direction of the support 200 is located between the second ends of the adjacent two piezoelectric cantilevers 310.

Referring to fig. 11, for example, when the radial cross-sectional shape of the support member 200 is circular, each of the piezoelectric cantilevers 310 may be in a fan shape, and the arc-shaped end of the piezoelectric cantilever 310 in a fan-shaped structure may serve as a first end of the piezoelectric cantilever 310 and be fixedly connected to the support member 200, and the center end of the piezoelectric cantilever 310 in a fan-shaped structure may serve as a second end of the piezoelectric cantilever 310 and may be disposed toward the center of the support member 200. Here, a gap 301 may be formed between center ends of two adjacent piezoelectric cantilevers 310 in a fan-shaped structure in a radial direction, e.g., an x-direction, of the support 200, and a gap 301 may be formed between radius ends of two adjacent piezoelectric cantilevers 310 in a circumferential direction of the support 200.

An elastic sealing member 400 (refer to fig. 12) is provided at a gap between two adjacent piezoelectric cantilevers 310, and the elastic sealing member 400 is connected to the two adjacent piezoelectric cantilevers, so as to seal the gap 301 between the two adjacent piezoelectric cantilevers 310, thereby improving the sealing effect of the front cavity 101 and the rear cavity 102.

For example, referring to fig. 11 and 12, an elastic sealing member 400 is provided at a gap 301 between two adjacent piezoelectric cantilevers 310 in the circumferential direction of the support member 200, one end of the elastic sealing member 400 is connected to one of the piezoelectric cantilevers 310, and the other end of the elastic sealing member 400 is connected to the other piezoelectric cantilever 310, so that the gap 301 between two adjacent piezoelectric cantilevers 310 in the circumferential direction of the support member 200 can be blocked by the elastic sealing member 301, thereby improving the sealing and isolating effect between the front cavity 101 and the rear cavity 102 on both sides of the four piezoelectric cantilevers 310.

In some examples, the second ends of the adjacent two piezoelectric cantilevers 310 are also connected by an elastic seal 400, for example, the connection between the second ends of the adjacent two piezoelectric cantilevers 310 may be achieved by the elastic seal 400 and a diaphragm 320 (shown with reference to fig. 16) to improve the sealing isolation between the front cavity 101 and the rear cavity 102.

In the embodiment of the application, two adjacent piezoelectric cantilevers 310 are connected through the elastic sealing piece 400 to seal the gap 301 between the two adjacent piezoelectric cantilevers 310, so that the sealing and isolating effect between the front cavity 101 and the rear cavity 102 can be improved, the situation that sound waves between the front cavity 101 and the rear cavity 102 are mutually offset is improved or avoided, and the frequency response of the acoustic transducer in the embodiment of the application is ensured.

In addition, the elastic sealing member 400 is elastically deformed during the vibration of the adjacent two piezoelectric cantilevers 310, thereby releasing the stress of each piezoelectric cantilever 310 and avoiding the influence of the vibration amplitude of the adjacent two piezoelectric cantilevers 310 due to the restraint of each other.

The elastic sealing member 400 of the present embodiment has various structural arrangements, and for convenience of description, a first structure of the elastic sealing member 400 may be used as the first elastic sealing member 410, a second structure of the elastic sealing member 400 may be used as the second elastic sealing member 420, and so on.

Referring to fig. 10 and 12, as one of possible structures of the elastic sealing member 400, the elastic sealing member 400 (e.g., the first elastic sealing member 410) may include a connection portion 412 and two oppositely disposed elastic blocks (e.g., the first elastic block 411 to distinguish from the elastic blocks of other elastic sealing members 400 hereinafter).

For example, referring to fig. 10, one end of two elastic blocks such as first elastic blocks 411 are respectively connected to the adjacent two piezoelectric cantilevers 310, in other words, one of the first elastic blocks 411 is connected to one of the piezoelectric cantilevers 310, the other first elastic block 411 is connected to the other piezoelectric cantilever 310, and a connection portion 412 is connected between the other ends of the two first elastic blocks 411 such that a gap 301 between the second ends of the adjacent two piezoelectric cantilevers 310 is blocked by the two elastic blocks and the connection portion 412.

It should be noted that, two ends of the elastic block, for example, the first elastic block 411, refer to two ends of the elastic block along a height direction (for example, z direction shown in fig. 10), for example, one ends of the two first elastic blocks 411 along the height direction are respectively connected to the two piezoelectric cantilevers 310, and the other ends of the two first elastic blocks 411 along the height direction are connected to the connecting portion 412, so that the two adjacent piezoelectric cantilevers 310 are connected in a sealing manner through the two first elastic blocks 411 and the connecting portion 412.

As shown in fig. 10, the first elastic blocks 411 on two adjacent piezoelectric cantilevers 310 are disposed on the same side of two adjacent piezoelectric cantilevers 310, for example, one of the first elastic blocks 411 is disposed on one side of one of the piezoelectric cantilevers 310 facing the front cavity 101, and the other first elastic block 411 is disposed on the other side of the other piezoelectric cantilever 310 facing the front cavity 101. Alternatively, in some examples, one of the first elastic blocks 411 may be disposed on a side of one of the piezoelectric cantilevers 310 facing the rear cavity 102, and the other of the first elastic blocks 411 may be disposed on a side of the other piezoelectric cantilever 310 facing the rear cavity 102.

Referring to fig. 10, the connection part 412 is disposed at one end of the two first elastic blocks 411 facing away from the piezoelectric cantilever 310, in other words, one end of the connection part 412 is connected to one end of one of the first elastic blocks 411 facing away from the piezoelectric cantilever 310, and the other end of the connection part 412 is connected to one end of the other first elastic block 411 facing away from the piezoelectric cantilever 310, so that the gap 301 between the two first elastic blocks 411 can be blocked by the connection part 412, and the sealing performance of the gap 301 between the two adjacent piezoelectric cantilevers 310 is improved, thereby improving the sealing isolation effect between the front cavity 101 and the rear cavity 102.

In addition, by providing an elastic block, for example, a first elastic block 411 on each piezoelectric cantilever 310, the first elastic block 411 may be elastically deformed during the vibration of the corresponding piezoelectric cantilever 310, so that each piezoelectric cantilever 310 may release stress through the elastic deformation of the elastic block, and the adjacent two piezoelectric cantilevers 310 may be prevented from being mutually held, so that the vibration displacement of each piezoelectric cantilever 310 in the z direction may be affected, and thus the vibration amplitude of each piezoelectric cantilever 310 may not be affected.

It will be appreciated that when the vibration element 300 includes one piezoelectric cantilever 310, one end of the two first elastic blocks 411 may be connected to the piezoelectric cantilever 310 and the supporting member 200 (not shown), in other words, one end of one of the first elastic blocks 411 is connected to the piezoelectric cantilever 310, one end of the other first elastic block 411 is connected to the supporting member 200, and the connecting portion 412 is disposed at one end of the two first elastic blocks 411 opposite to the piezoelectric cantilever 310, in other words, one end of the connecting portion 412 is connected to one end of one of the first elastic blocks 411 opposite to the piezoelectric cantilever 310, and the other end of the connecting portion 412 is connected to the other end of the other first elastic block 411 opposite to the supporting member 200, so that the gap 301 between the second end of the piezoelectric cantilever 310 and the supporting member 200 can be blocked by the connecting portion 412, thereby improving the sealing isolation effect between the front cavity 101 and the rear cavity 102.

In practical applications, because the height of the supporting member 200 is too large and affects the structural stability of the supporting member 200, the supporting member 200 is not too high, and in some examples, the rear cavity 102 is surrounded by the inner wall of the supporting member 200, so that the space size of the rear cavity 102 is limited by the height of the supporting member 200 and is not too large.

In particular, the elastic blocks such as the first elastic block 411 and the connection portion 412 may include at least one of elastic polymers including, but not limited to, silicone rubber, polyethylene isobutyl ether, polyimide, and polyethylene imine, so as to ensure the sealability and elasticity of the elastic blocks and the connection portion 412. For example, the elastic modulus of the elastic block is ensured to be 100 MPa-3 Gpa by setting the composition materials of the elastic block to the above materials, so that the elastic block can effectively perform elastic deformation in the vibration process of the first vibration element 300, thereby releasing the stress of the first vibration element 300 and improving the vibration amplitude of the vibration element. For example, the elastic modulus of the elastic block may be a suitable value such as 100MPa, 500MPa, 1Gpa or 3Gpa, and the like, and specifically, the constituent materials of the elastic block may be selected according to actual needs to adjust the elastic modulus of the elastic block.

Wherein the height of the elastic block can be 10um-50um. For example, the height of the elastic block may be a suitable value such as 10um, 20um, 30um, 40um or 50um, and may be specifically adjusted according to actual needs, for example, the rigidity of the first vibration element 300 is adjusted, for example, the higher the rigidity of the first vibration element 300 is, the higher the elastic block needs to be selected, for example, the height of the elastic block may be set to be 50um, so as to improve the elasticity of the elastic block and ensure the vibration amplitude of the first vibration element 300.

Through setting the height of elastic block in the above-mentioned scope to guarantee the elasticity of elastic block, avoided the height of elastic block too little and lead to the elasticity of elastic block too little, the condition that can't release the stress of the junction of two adjacent first vibrating element 300 takes place, thereby guarantee that every first vibrating element 300 can freely vibrate, ensure the vibration amplitude of first vibrating element 300, also avoided the elastic block height too big and occupy the altitude space in the casing 100, in addition, the elastic block is too high, also can influence the structural stability of elastic block, thereby guarantee that the elastic block can not collapse in the deformation process.

In addition, the ratio of the width to the height of the elastic block may be set to 0.1-100 to improve the elasticity of the elastic block, and in addition, to secure the structural stability of the elastic block during the vibration of the first vibration element 300. Illustratively, the ratio of the width to the height of the elastic block may be a suitable ratio of 0.1, 0.2, 0.5, 1, 10, 20, 50 or 100, for example, when the height of the elastic block is 10um, the width of the elastic block may be 1um-1mm, for example, the width of the elastic block may be a suitable value of 1um, 2um, 5um, 10um, 100um, 200um, 500um or 1mm, which may be specifically adjusted according to practical needs.

As shown in fig. 8 and 12, in some examples, each elastic sealing member 400, for example, the first elastic sealing member 410, may have a strip-shaped structure, for example, as shown in fig. 8, between the second ends of the two piezoelectric cantilevers 310, the extending direction of the first elastic sealing member 410 coincides with the extending direction of the slit 301 between the two piezoelectric cantilevers 310 (as shown in the y-direction of fig. 8), and both ends of the first elastic sealing member 410 in the extending direction extend to both ends of the slit 301, for example, both ends of the first elastic block 411 of the first elastic sealing member 410 in the extending direction extend to both ends of the slit 301, respectively, and both ends of the connecting portion 412 of the first elastic sealing member 410 in the extending direction extend to both ends of the slit 301, respectively, so that the slit 301 may be sealed by one elastic sealing member 410.

Of course, in some examples, the gap 301 between two adjacent piezoelectric cantilevers 310 may be blocked by a plurality of first elastic seals 410. With continued reference to fig. 8, a plurality of first elastic sealing members 410 may be disposed along the extending direction of the slit 301, and the plurality of first elastic sealing members 410 may be disposed at intervals or in contact along the extending direction of the slit 301, which in the embodiment of the present application does not limit the number of first elastic sealing members 410 on each slit 301.

Fig. 13 is a schematic view of a portion of a structure of yet another acoustic transducer according to an embodiment of the present application, and fig. 14 is a partially enlarged view at D in fig. 13. As another possible arrangement of the elastic sealing member 400, as shown in fig. 7 and 14, the elastic sealing member 400 (e.g., the second elastic sealing member 420) in the embodiment of the present application may include an elastic member 421 and a sealing medium layer 422, where the elastic member 421 has a gap, and the sealing medium layer 422 is used to seal the gap.

The elastic member 421 may be a spring structure etched or patterned on a silicon wafer, polyimide, or the like, that is, the inside of the elastic member 421 has a void pattern, so that the elastic member 421 has elasticity in one direction, for example, an extending direction (refer to an x direction in fig. 7) of itself.

Referring to fig. 7 and 14, one end of the elastic member 421 is connected to the piezoelectric cantilever 310, and the other end of the elastic member 421 is connected to the support member 200 or the adjacent piezoelectric cantilever 310. For example, referring to fig. 7, when the vibration element 300 includes a piezoelectric cantilever 310, a second end of the piezoelectric cantilever 310 is connected to the support member 200 through an elastic member 421, that is, one end of the elastic member 421 is connected to the second end of the piezoelectric cantilever 310, and the other end of the elastic member 421 is connected to the support member 200, so that the elastic member 421 is elastically deformed during the vibration of the piezoelectric cantilever 310, thereby releasing the stress of the piezoelectric cantilever 310, so that the vibration of the piezoelectric cantilever 310 is not restrained by the support member 200, and thus the vibration amplitude of the piezoelectric cantilever 310 is ensured.

Accordingly, as shown in fig. 14, two adjacent piezoelectric cantilevers 310 may be connected to each other through the elastic member 421, for example, two adjacent piezoelectric cantilevers 310 in the circumferential direction of the support member 200 may be connected to each other through the elastic member 421, wherein one end of the elastic member 421 is connected to one of the two adjacent piezoelectric cantilevers 310 and the other end of the elastic member 421 is connected to the other of the two adjacent piezoelectric cantilevers 310, so that the two adjacent piezoelectric cantilevers 310 are not caught by each other during vibration, thereby increasing the vibration amplitude of the vibration element 300.

It should be noted that, two ends of the elastic member 421 may be connected to two adjacent side ends of the two adjacent piezoelectric cantilevers 310 facing each other, i.e., the elastic member 421 is located between the two adjacent piezoelectric cantilevers 310. Of course, in other examples, two ends of the elastic member 421 may be connected to one side of the adjacent two piezoelectric cantilevers 310 facing the front cavity 101 or one side facing the rear cavity 102, respectively, and the connection position of the elastic member 421 and the first vibration element 300 is not limited in the embodiments of the present application.

The sealing medium layer 422 seals the gap on the elastic member 421 to improve the connection tightness between two adjacent piezoelectric cantilevers 310 or between the piezoelectric cantilevers 310 and the supporting member 200, improve the tightness of the front cavity 101 and the rear cavity 102, and improve or avoid the problem of sound short circuit between the front cavity 101 and the rear cavity 102, thereby improving the frequency response of the acoustic transducer.

In a specific arrangement, the sealing medium layer 422 may be an elastic film, at least part of the elastic film may be covered on at least one side of the elastic member 421 along the direction perpendicular to the elastic direction, for example, as shown in fig. 7 and 14, the elastic film is covered on one side of the elastic member 421 facing the front cavity 101, or the elastic film is covered on one side of the elastic member 421 facing the rear cavity 102, so as to seal the elastic member 421, or the elastic film is covered on two sides of the elastic member 421 along the elastic direction, so that the connection tightness between the piezoelectric cantilever 310 and the support member 200, or between two adjacent piezoelectric cantilevers 310 is improved, thereby improving the sealing effect between the front cavity 101 and the rear cavity 102.

It is understood that the elastic film may cover a part of the surface of the elastic member 421 or may cover the whole surface of the elastic member 421 to improve the sealing effect of the elastic film on the elastic member 421.

As shown with reference to fig. 7 and 14, in some examples, a surface of the sealing medium layer 422, such as an elastic membrane, may protrude from a surface of the vibration element 300, such as the piezoelectric cantilever 310, for example, as shown with reference to fig. 7, the sealing medium layer 422 covers a surface of the elastic member 421 facing the front cavity 101, wherein the surface of the elastic member 421 facing the front cavity 101 is flush with a surface of the piezoelectric cantilever 310, and the sealing medium layer 422 covers the surface of the elastic member 421, and then the sealing medium layer 422 is higher than the surface of the piezoelectric cantilever 310 facing the front cavity 101, and illustratively, a portion of the sealing medium layer 422 may extend to the surface of the piezoelectric cantilever 310.

Fig. 7a is a partial schematic view of another acoustic transducer provided in an embodiment of the present application. In some other examples, as shown in fig. 7a, the sealing medium layer 422 may be flush with the surface of the vibration element 300, such as the piezoelectric cantilever 310, for example, as shown in fig. 7a, the sealing medium layer 422 is covered on the surface of the elastic member 421 facing the front cavity 101, wherein the thickness of the elastic member 421 is smaller than the thickness of the piezoelectric cantilever 310, for example, the surface of the elastic member 421 facing the front cavity 101 is lower than the surface of the piezoelectric cantilever 310 facing the front cavity 101, the sealing medium layer 422, such as an elastic film, is covered on the surface of the elastic member 421 facing the front cavity 101, and the surface of the sealing medium layer 422 facing the front cavity 101 is flush with the surface of the piezoelectric cantilever 310 facing the front cavity 101, so that the occupation size of the elastic sealing member 400 on the front cavity 101 may be reduced.

Fig. 7b is a partial schematic view of another acoustic transducer provided in an embodiment of the present application. Referring to fig. 7b, in some examples, a portion of the sealing medium layer 422, such as an elastic membrane, may also cover the surface of the vibration element 300, for example, a portion of the elastic membrane covers the surface of the vibration element 300, such as the piezoelectric cantilever 310, and another portion of the elastic membrane covers the surface of the elastic member 421.

Referring to fig. 7b, for example, a part of the sealing medium layer 422 such as an elastic membrane covers the surface of the piezoelectric cantilever 310 facing the front cavity 101, and another part of the sealing medium layer 422 such as an elastic membrane covers the surface of the elastic member 421 facing the front cavity 101.

It will be appreciated that the elastic membrane may cover a portion of the surface of the piezoelectric cantilever 310 facing the front cavity 101, or may cover the entire surface of the piezoelectric cantilever 310 facing the front cavity 101 (see fig. 7 b).

According to the embodiment of the application, the elastic membrane is partially covered on the surface of the elastic piece 421, and the other part is covered on the surface of the vibration element 300 such as the piezoelectric cantilever 310, so that on one hand, the elastic membrane can play a role of sealing the elastic piece, and on the other hand, the flexibility and elasticity of the vibration element 300 can be improved, so that the vibration amplitude of the vibration element 300 can be improved, and in addition, the structural stability of the vibration element 300 in the vibration process is improved, and the situation that the vibration element 300 is excessively rigid and is broken is avoided, so that the service life of the vibration element 300 is prolonged.

Wherein, the elastic modulus of the elastic film is 5Mpa-200Mpa so as to ensure the elasticity of the elastic film. The elastic modulus of the elastic film may be, for example, any of 5Mpa, 20Mpa, 100Mpa, 150Mpa, or 200 Mpa.

It is understood that the elastic modulus of the elastic film is related to the material of the elastic film, and thus, in order to ensure that the elastic modulus of the elastic film is within the above range, the elastic film may include, but is not limited to, at least one polymer film such as Polydimethylsiloxane (PDMS) film, silicone film, rubber film, polyethylene isopoly Ding Mimo, polyimide film, and polyethyleneimine film. For example, the elastic film may be a polydimethylsiloxane film or a silicone film, and the like, and may be specifically selected according to actual needs. It is understood that the material of the elastic membrane may be consistent with the material of the diaphragm.

By setting the sealing medium layer 422 as an elastic film, on one hand, the sealing effect on the elastic member 421 can be ensured, and on the other hand, the sealing medium layer 422 is also convenient to be manufactured on the elastic member 421, so that the manufacturing process of the elastic sealing member 400 is simpler.

When setting up, the thickness of this elastic membrane can be 1um-100um, for example, the thickness of elastic membrane can be set to suitable numerical values such as 1um, 20um, 40um, 60um, 80um or 100um to guarantee elasticity and the leakproofness of elastic membrane, avoided the elastic membrane too thick and reduced the elasticity of elastic membrane, in addition, the elastic membrane too thick also can occupy front chamber 101 or back chamber 102 too big space, and cause the influence to acoustic transducer's frequency response. The elastic membrane is too thin, on the one hand, the tightness of the elastic membrane cannot be guaranteed, so that the sealing effect on the elastic piece 421 cannot be guaranteed, on the other hand, the elastic membrane is not easy to manufacture, the manufacturing difficulty of the elastic membrane is improved, and in addition, the elastic membrane is too thin, and the structural stability of the elastic membrane cannot be guaranteed.

Fig. 15 is a longitudinal schematic view of yet another acoustic transducer provided in an embodiment of the present application. Referring to fig. 15, the vibration element of the acoustic transducer according to the embodiment of the present application may further include at least one diaphragm 320, each diaphragm 320 being connected to the piezoelectric cantilever 310.

Referring to fig. 15, the number of the diaphragms 320 may be one. For example, the vibration element 300 includes one piezoelectric cantilever 310 and one diaphragm 320, the diaphragm 320 being located at either side of the piezoelectric cantilever 310 in the vibration direction, for example, the diaphragm 320 may be located at a side of the piezoelectric cantilever 310 toward the front cavity 101 (refer to fig. 15), and one end of the diaphragm 320 being located near the second end of the piezoelectric cantilever 310, for example, one end of the diaphragm 320 being flush with the second end of the piezoelectric cantilever 310 in the z-direction.

In this example, the piezoelectric cantilever 310 may be used as a driving element to drive the diaphragm 320 to vibrate, for example, the piezoelectric cantilever 310 may drive the diaphragm 320 to vibrate in the process of buckling deformation, so that the piezoelectric cantilever 310 and the diaphragm 320 may push the air of the front cavity 101 and the rear cavity 102 to move at the same time, so that the pushing reliability of the vibrating element 300 to the air is improved, and the acoustic performance of the acoustic transducer in the embodiment of the present application is improved.

In addition, the arrangement of the diaphragm 320 improves the elasticity of the vibration element 300, so that the structure of the vibration element 300 in the vibration process is more flexible, and the phenomenon that the vibration element 300 is excessively high in rigidity and is failed or even broken in the vibration process is avoided, so that the service life of the vibration element 300 is prolonged.

In a specific arrangement, the thickness of the diaphragm 320 may be 10um-30um, for example, the thickness of the diaphragm 320 may be 10um, 20um, 30um, or other suitable values. Too thick or too thin of the diaphragm 320 affects the structural elasticity, and in addition, too thin of the diaphragm 320 has weak pushing effect on air, and too thick of the diaphragm 320 not only reduces the elasticity of the diaphragm 320, but also occupies too much space in the housing 100 to affect the frequency response of the acoustic transducer.

In addition, the constituent materials of the diaphragm 320 may be identical to the elastic layer of the piezoelectric cantilever 310, which is not described herein.

Referring to fig. 15, in this example, an elastic sealing member 400 is located at the slit 301 of the second end of the piezoelectric cantilever 1, and the elastic sealing member 400 may be connected to the diaphragm 320 and the support 200, respectively, to seal the slit 301 between the second end of the piezoelectric cantilever 1 and the support 200. For example, the second end of the piezoelectric cantilever 1 is connected to the second elastic sealing member 420, wherein one end of the elastic member 421 of the second elastic sealing member 420 is connected to the diaphragm 320, and the other end of the elastic member 421 of the second elastic sealing member 420 is connected to the second end of the supporting member 200, and the sealing medium layer 422 covers one side of the elastic member 421, for example, the side facing the front cavity 101. Wherein, a portion of the sealing medium layer 422 may cover a surface of the diaphragm 320 facing the front cavity 101, so as to improve connection tightness between the sealing medium layer 422 and the diaphragm 320, thereby improving a sealing effect of the elastic sealing member 400 on the slit 301.

Fig. 16 is a schematic view of an internal structure of still another acoustic transducer according to an embodiment of the present application, and fig. 17 is a longitudinal sectional view of the acoustic transducer corresponding to fig. 16. As shown with reference to fig. 16 and 17, for another example, the vibration element 300 may include two piezoelectric cantilevers 310 and one diaphragm 320. Wherein the two piezoelectric cantilevers 310 are disposed at the second end of the support member 200 opposite to each other, and the first end of each piezoelectric cantilever 310 is fixedly connected to the support member 200, and the second end of each piezoelectric cantilever 310 faces the axis of the support member 200 (refer to l in fig. 17), and at least part of the diaphragm 320 is located between the second ends of the two piezoelectric cantilevers 310. It will be appreciated that in this example, the two piezoelectric cantilevers 310 and the diaphragm 320 together divide the interior of the housing 100 into the front chamber 101 and the rear chamber 102.

Referring to fig. 16 and 17, one end of the diaphragm 320 is adjacent to the second end of one of the piezoelectric cantilevers 310, for example, the left side, and the other end of the diaphragm 320 is adjacent to the second end of the other piezoelectric cantilever 310, for example, the right side, and a portion between the two ends of the diaphragm 320 is located between the second ends of the two piezoelectric cantilevers 310.

With continued reference to fig. 16, where the diaphragm 320 has a slit 301 near the second end of the left piezoelectric cantilever 310, and where the slit 301 has an elastic seal 400, the elastic seal 400 is connected to the diaphragm 320 and the left piezoelectric cantilever 310, respectively, so that the connection tightness between the other end of the diaphragm 320 and the second end of the left piezoelectric cantilever 310 is improved. The diaphragm 320 has a slit 301 near the second end of the right piezoelectric cantilever 310, and an elastic sealing member 400 is provided at the slit 301, and the elastic sealing member 400 is respectively connected to the diaphragm 320 and the right piezoelectric cantilever 310, so that the connection sealability between the other end of the diaphragm 320 and the second end of the right piezoelectric cantilever 310 is improved.

In this way, the two piezoelectric cantilevers 310 can drive the vibrating diaphragm 320 to vibrate in the process of buckling deformation, so that effective pushing of air in the front cavity 101 and the rear cavity 102 is realized.

In addition, two ends of the diaphragm 320 are respectively connected with the second ends of the two piezoelectric cantilevers 310 through the elastic sealing member 400, on one hand, the tightness between the two ends of the diaphragm 320 and the second ends of the piezoelectric cantilevers 310 is improved, so that the sealing effect between the front cavity 101 and the rear cavity 102 at two sides of the vibration element 300 is improved, and the frequency response of the acoustic transducer in the embodiment of the application is improved.

On the other hand, the elastic sealing member 400 may be elastically deformed during the vibration of the piezoelectric cantilever 310 or the diaphragm 320 to release the end stress of the piezoelectric cantilever 310, so that the degree of freedom of the second end of the piezoelectric cantilever 310 is not affected, and the vibration amplitude of the piezoelectric cantilever 310 is improved and correspondingly the vibration amplitude of the diaphragm 320 is also improved compared to the case where the piezoelectric cantilever 310 is rigidly connected to the diaphragm 320.

Fig. 18 is a schematic view showing an internal structure of still another acoustic transducer according to an embodiment of the present application, and fig. 19 is a sectional view taken along line A-A in fig. 18. Referring to fig. 18 and 19, in some examples, when the vibration element 300 includes a plurality of piezoelectric cantilevers 310, and the plurality of piezoelectric cantilevers 310 are disposed at the second end of the support 200 at intervals in the circumferential direction of the support 200, the outer ends of the diaphragms 320 are each close to the second end of the corresponding piezoelectric cantilever 310, in other words, at least a portion of the diaphragms 320 are located between the second ends of all the piezoelectric cantilevers 310 in the projection in the vibration direction of the diaphragms 320, for example, the second end of each piezoelectric cantilever 310 is disposed close to the outer end of the diaphragms 320, and a gap 301 is provided between the second end of each piezoelectric cantilever 310 and the outer end of the diaphragms 320, and an elastic seal 400 is provided at the gap 301, one end of the elastic seal 400 is connected to the piezoelectric cantilevers 310, and the other end of the elastic seal 400 is connected to the diaphragms 320, thereby achieving sealing of the gap 301, improving the sealing effect between the front cavity 101 and the rear cavity 102, and thus improving the acoustic short-circuit problem of the acoustic transducer.

In addition, each of the piezoelectric cantilevers 310 is coupled to the diaphragm 320 to increase the vibration amplitude of the diaphragm 320.

Referring to fig. 17, as a first arrangement of the diaphragm 320, the diaphragm 320 is located on a side of the piezoelectric cantilever 310 facing the front cavity 101, or the diaphragm 320 is located on a side of the piezoelectric cantilever 310 facing the rear cavity 102, for example, the piezoelectric cantilever 310 and the diaphragm 320 may have an overlapping region (shown by a dotted line frame in fig. 17) in a vibration direction (shown by a z direction in fig. 17), and then the diaphragm 320 and a second end of each piezoelectric cantilever 310 have a slit 301 in a vertical direction (shown by a z direction in fig. 17 and 19), and the elastic seal 400 is located in the slit 301 in the vertical direction.

In this example, the elastic sealing member 400 may be of a third structural design, for example, the elastic sealing member 400, for example, the third elastic sealing member 430, may be an elastic block (also referred to as a second elastic block), and two ends of the elastic block along the height direction of the elastic block are respectively connected in the vertical gaps 301 between the piezoelectric cantilever 310 and the diaphragm 320.

Referring to fig. 17, taking an example in which the vibration element 300 includes two piezoelectric cantilevers 310, two piezoelectric cantilevers 310 disposed opposite to each other are positioned on a first plane perpendicular to the vibration direction, and the diaphragm 320 is positioned on a second plane perpendicular to the vibration direction, it will be understood that the first plane and the second plane are disposed in parallel and spaced apart relation.

Referring to fig. 17, one of the piezoelectric cantilevers 310, for example, the left piezoelectric cantilever 310, has a slit 301 in the z-direction with the diaphragm 320, one end of one elastic block, for example, a second elastic block, in the height direction is connected to the left piezoelectric cantilever 310, the other end of the second elastic block in the height direction is connected to the diaphragm 320 located at one side of the piezoelectric cantilever 310, in other words, the left piezoelectric cantilever 310 is connected to the diaphragm 320 through the second elastic block, the other piezoelectric cantilever 310, for example, the right piezoelectric cantilever 310, has a slit 301 in the z-direction with the diaphragm 320, the other end of the other second elastic block in the height direction is connected to the right piezoelectric cantilever 310, and the other end of the other second elastic block in the height direction is connected to the diaphragm 320 located at one side of the piezoelectric cantilever 310, in other words, the right piezoelectric cantilever 310 is connected to the diaphragm 320 through the elastic block.

In this way, each piezoelectric cantilever 310 may compress or stretch the second elastic block at one end thereof during the vibration process, so that the second elastic block is elastically deformed, thereby releasing the end stress of each piezoelectric cantilever 310, and ensuring that the vibration amplitude of both the piezoelectric cantilever 310 and the diaphragm 320 is not affected.

In addition, the elasticity of the second elastic block can be improved by increasing the height or the aspect ratio of the second elastic block, thereby more facilitating the increase of the vibration amplitude of the piezoelectric cantilever 310. The second elastic block may be consistent with the material, height and aspect ratio of the first elastic block 411, and reference may be made to the above description of the first elastic block 411.

In addition, the diaphragm 320 is supported at one side of the piezoelectric cantilever 310 by the elastic sealing member 400, for example, a third elastic block, so that at least part of the diaphragm 320 is suspended on the piezoelectric cantilever 310, so that the diaphragm 320 and the piezoelectric cantilever 310 can vibrate freely, and the vibration amplitude of the diaphragm 320 and the piezoelectric cantilever 310 is improved.

Referring to fig. 16, when the vibration element 300 includes two piezoelectric cantilevers 310, the third elastic sealing member 430, for example, the second elastic block may have a bar-shaped structure, and the length direction of the second elastic block of the bar-shaped structure may coincide with the extension direction of the second end of the piezoelectric cantilevers 310 (refer to y-direction in fig. 16). The cross-sectional shape of the second elastic block along the direction perpendicular to the length direction may be any suitable shape such as quadrangle, circle, triangle, etc., which is not limited in this embodiment of the present application.

When the vibration element 300 includes three or more piezoelectric cantilevers 310, the elastic sealing member 400 may have an integrally formed ring structure, and the elastic sealing member 400 having a ring structure may be disposed near the outer end of the diaphragm 320 and connected to the diaphragm 320 and the second ends of all the piezoelectric cantilevers 310, respectively, so as to seal the gap 301 between the second ends of all the piezoelectric cantilevers 310 and the outer end of the diaphragm 320.

Of course, in some examples, the elastic sealing member 400 may also be a plurality of strip-shaped sealing members disposed along the outer end of the diaphragm 320, where each strip-shaped sealing member is connected to the second end of the corresponding piezoelectric cantilever 310 and connected to the outer end of the diaphragm 320, so as to seal the gap 301 between the second end of each piezoelectric cantilever 310 and the diaphragm 320.

Fig. 20 is a schematic view of an internal structure of still another acoustic transducer provided in an embodiment of the present application, fig. 21 is a partially enlarged view at F in fig. 20, fig. 22 is a longitudinal sectional view of still another acoustic transducer provided in an embodiment of the present application, and fig. 23 is a partially enlarged view at G in fig. 22. Referring to fig. 18 to 23, as a second arrangement of the diaphragm 320, the diaphragm 320 is located between the second ends of all the piezoelectric cantilevers 310, and the diaphragm 320 and the second ends of all the piezoelectric cantilevers 310 have a slit 301 (refer to fig. 21 and 23) in a horizontal direction (i.e., perpendicular to the vibration direction of the diaphragm 320), for example, all the piezoelectric cantilevers 310 and the diaphragm 320 are located on one of planes perpendicular to the vibration direction of the diaphragm 320, in which a slit 301 is located between the second end of each of the piezoelectric cantilevers 310 and the diaphragm 320.

Illustratively, referring to fig. 20, two piezoelectric cantilevers 310 and one diaphragm 320 are each located on one of the xy planes, and the two piezoelectric cantilevers 310 and the diaphragm 320 are spaced apart in the x direction. For example, a diaphragm 320 is disposed between the second ends of the two piezoelectric cantilevers 310, and a gap 301 is formed between the two ends of the diaphragm 320 in the x-direction and the second ends of the two piezoelectric cantilevers 310, respectively.

Referring to fig. 19 and 21, in this example, the elastic sealing member 400 may further employ a second elastic sealing member 420, that is, a second end of each of the piezoelectric cantilevers 310 is connected to the diaphragm 320 through the second elastic sealing member 420, for example, one end of an elastic member 421 of the second elastic sealing member 420 in an elastic direction is connected to the piezoelectric cantilevers 310, and the other end of the elastic member 421 in the elastic direction is connected to the diaphragm 320.

Referring to fig. 20 and 21, for example, the second end of the left piezoelectric cantilever 310 is connected to one end of the diaphragm 320 through an elastic member 421, and a sealing medium layer 422 is sealed in a gap of the elastic member 421, for example, the sealing medium layer 422 covers a side of the elastic member 421 facing the rear cavity 102 to improve the connection tightness between the left piezoelectric cantilever 310 and the diaphragm 320, and in addition, the elastic member 421 can deform to generate elasticity during the vibration process of the left piezoelectric cantilever 310 and the diaphragm 320 to release the stress of the piezoelectric cantilever 310, thereby improving the vibration amplitude of the piezoelectric cantilever 310 and further improving the vibration amplitude of the diaphragm 320.

Accordingly, the second end of the right piezoelectric cantilever 310 is connected to one end of the diaphragm 320 through an elastic member 421, and the sealing medium layer 422 is sealed on a gap of the elastic member 421, for example, the sealing medium layer 422 covers a side of the elastic member 421 facing the rear cavity 102, so as to improve the connection tightness between the right piezoelectric cantilever 310 and the diaphragm 320, and in addition, the elastic member 421 deforms to generate elasticity during the vibration process of the right piezoelectric cantilever 310 and the diaphragm 320, so as to release the stress of the piezoelectric cantilever 310, improve the vibration amplitude of the piezoelectric cantilever 310, and further improve the vibration amplitude of the diaphragm 320.

In addition, the diaphragm 320 and the piezoelectric cantilever 310 are disposed at intervals along the horizontal direction, so that the diaphragm 320 and the piezoelectric cantilever 310 can directly push the air in the front cavity 101 and the rear cavity 102, thereby improving the sensitivity of the vibration element 300 and the acoustic performance of the acoustic transducer.

Referring to fig. 22 and 23, in the second arrangement of the diaphragm 320, that is, when the outer ends of the diaphragm 320 and the second ends of all the piezoelectric cantilevers 310 have slits 301 in the horizontal direction, the elastic sealing member 400 may also use the first elastic sealing member 410.

Referring to fig. 23, in the first elastic sealing member 410, one ends of two first elastic blocks 411 are respectively connected to the piezoelectric cantilever 310 and the diaphragm 320, for example, one end of one first elastic block 411 is connected to the second end of the piezoelectric cantilever 310 on the left side, one end of the other first elastic block 411 is connected to the diaphragm 320 in the middle, and two ends of the connecting portion 412 are respectively connected to the ends of the two first elastic blocks 411 opposite to the piezoelectric cantilever 310, so as to seal the gap between the two first elastic blocks 411, thereby sealing the gap 301 between the second end of the piezoelectric cantilever 310 and the diaphragm 320 by the two first elastic blocks 411 and the connecting portion 412, improving the sealing performance of the vibrating element 300 formed by the piezoelectric cantilever 310 and the diaphragm 320, thereby improving the sealing isolation effect between the front cavity 101 and the rear cavity 102, improving or avoiding the leakage of sound at the gap 301, improving or avoiding the problem of acoustic short circuit between the front cavity 101 and the rear cavity 102, and improving the frequency response of the acoustic transducer, such as low frequency loudness.

In addition, the piezoelectric cantilever 310 and the diaphragm 320 may release stress by elastic deformation of the first elastic piece 411, so that the vibration amplitudes of the piezoelectric cantilever 310 and the diaphragm 320 are not affected.

Fig. 24 is a graph of vibration displacement of the elastomeric block at different heights in the acoustic transducer corresponding to fig. 22. Referring to fig. 24, a curve c1 is a vibration displacement curve of the elastic block such as the first elastic block 411 in the z direction (see fig. 22), a curve c2 is a vibration displacement curve of the elastic block such as the first elastic block 411 in the z direction (see fig. 22), a curve c3 is a vibration displacement curve of the elastic block such as the first elastic block 411 in the z direction (see fig. 22), a curve c4 is a vibration displacement curve of the elastic block such as the first elastic block 411 in the z direction (see fig. 22), a curve c5 > a curve c4 > a curve c2 > a curve 411 in a low frequency (2) range, that is, a curve c5 is a vibration displacement curve of the diaphragm 320 in the z direction (see fig. 22) in a curve c5, a curve c5 is a curve c5, a curve 411 is a curve is a, and a curve 411 is a curve c5, and a vibration displacement of the diaphragm 320 increases at least a curve 411 increases with increasing amplitude of the first elastic block 411 in the z direction (see fig. 22) when the first elastic block increases at least 10um, and the first elastic block increases with increasing vibration amplitude of the first elastic block 411.

Fig. 25 is a displacement simulation diagram of the vibration element of fig. 22 at a frequency of 20Hz, and fig. 25a is a partial enlarged view at H of fig. 25. As shown in fig. 25 and 25a, the average vibration displacement of the diaphragm 320 may be 0.02mm or more or-0.02 mm or less, wherein the vibration displacement of opposite ends of the diaphragm 320 in the x-direction may be 0.03mm or more or-0.03 mm or less, and further, as shown in fig. 25a, the vibration displacement of opposite ends of the diaphragm 320 and the elastic seal 400 (e.g., the first elastic seal 410) in the y-direction is relatively middle, respectively.

Fig. 25b is a schematic vibration diagram of the vibration element corresponding to fig. 25, and fig. 25c is a schematic structural diagram at I in fig. 25 b. Referring to fig. 25b and 25c, the second ends of the two piezoelectric cantilevers 310 deform after being energized, driving the elastic sealing member 400 to deform, so as to drive the middle diaphragm 320 to vibrate. As shown in fig. 25c, the vibration amplitude of the two ends of the diaphragm 320 connected to the elastic sealing member 400 is greater than that of the middle region of the diaphragm 320.

Fig. 26 is a diagram showing a displacement simulation of the piezoelectric cantilever and the diaphragm in the related art when the piezoelectric cantilever and the diaphragm are positioned on the whole piece of diaphragm, and fig. 26a is a partial enlarged view of J in fig. 26. Referring to fig. 26 and 26a, in some examples, the piezoelectric cantilever and the diaphragm are arranged on the whole film at intervals to form a vibration element, and when the frequency is 20Hz, the average vibration displacement of the diaphragm is about 0.01mm, and compared with the example that the diaphragm and the piezoelectric cantilever are arranged on the whole film at intervals, in the embodiment of the application, when two ends of the diaphragm 320 are connected with the piezoelectric cantilever 310 through the elastic sealing piece 400, the vibration amplitude of the diaphragm 320 is obviously improved, and the vibration displacement is improved by about 2 times.

Fig. 27 is a plot of the frequency response of the acoustic transducer corresponding to fig. 22. Referring to fig. 27, a curve a is a frequency response curve of an acoustic transducer when a piezoelectric cantilever 310 and a diaphragm 320 are disposed on a whole film in the related art, a curve b is a frequency response curve of an acoustic transducer when a micro-slit is formed between a second end of the piezoelectric cantilever 310 and the diaphragm 320, and a curve c is a frequency response curve of an acoustic transducer when the second end of the piezoelectric cantilever 310 is connected to the diaphragm 320 through an elastic sealing member 400. As can be seen from fig. 27, before the frequency is 2kHz and 2kHz, the frequency response of the curve c is greater than that of the curve b and greater than that of the curve a, and it can be seen that, compared to the vibration element which is in an open structure, i.e. a micro-gap is formed between the piezoelectric cantilever 310 and the diaphragm 320, the vibration element in the embodiment of the present application is in a sealed structure, i.e. the low-frequency loudness of the acoustic transducer is significantly improved after the second end of the piezoelectric cantilever 310 is connected to the diaphragm 320 by the elastic sealing member 400, and a loudness value of 117dB is obtained at low frequency (before 2 kHz).

Fig. 28 is a schematic view of an internal structure of still another acoustic transducer according to an embodiment of the present application, and fig. 29 is a longitudinal sectional view of the acoustic transducer corresponding to fig. 28. Referring to fig. 28 and 29, in some examples, the number of diaphragms 320 may be plural.

Referring to fig. 28 and 29, as one example, a diaphragm 320 may be disposed at one side surface of the piezoelectric cantilever 310 in the vibration direction (e.g., the thickness direction of the piezoelectric cantilever 310).

Referring to fig. 29, the vibration element 300 illustratively includes two piezoelectric cantilevers 310 and two diaphragms 320 which are disposed opposite and spaced apart. One of the diaphragms 320 may be attached to one side, for example, the left side, of the piezoelectric cantilever 310 facing the front cavity 101, and the other diaphragm 320 may be attached to the other side, for example, the right side, of the piezoelectric cantilever 310 facing the front cavity 101, wherein a gap 301 is formed between the second ends of the two piezoelectric cantilevers 310, a gap 301 is formed between the opposite ends of the two diaphragms 320, an elastic sealing member 400 is disposed at the gap 301, and the elastic sealing member 400 is respectively connected to the two diaphragms 320, for example, the elastic sealing member 400 is respectively connected to the surfaces of the two diaphragms 320 facing the front cavity 101, so as to seal the gap 301 between the two diaphragms 320, thereby improving the sealing performance of the front cavity 101 and the rear cavity 102.

It should be noted that, each diaphragm 320 may cover the entire surface of one side of the corresponding piezoelectric cantilever 310, and of course, may also cover a portion of the surface of one side of the corresponding piezoelectric cantilever 310, which is not limited in the embodiment of the present application.

Referring to fig. 29, in this example, the elastic sealing member 400 connecting the two diaphragms 320 may be a first elastic sealing member 410, for example, two elastic blocks of the first elastic sealing member 410 are respectively connected to the two diaphragms 320, and the connection portion 412 is connected between one ends of the two elastic blocks facing away from the diaphragms 320, so as to seal the gap 301 between the two diaphragms 320.

Of course, in this example, the elastic sealing member 400 connecting the two diaphragms 320 may also be the second elastic sealing member 420, and the embodiment of the present application does not limit the structure of the elastic sealing member 400 connecting the two diaphragms 320.

In this example, the piezoelectric cantilever 310 may be used as a driving element to drive the diaphragm 320 to vibrate, for example, the piezoelectric cantilever 310 may drive the diaphragm 320 to vibrate in the process of buckling deformation, so that the piezoelectric cantilever 310 and the diaphragm 320 may push the air of the front cavity 101 and the rear cavity 102 to move at the same time, so that the pushing reliability of the vibrating element 300 to the air is improved, and the acoustic performance of the acoustic transducer in the embodiment of the present application is improved. In addition, the arrangement of the diaphragm 320 improves the elasticity of the vibration element 300, so that the structure of the vibration element 300 in the vibration process is more flexible, and failure or even fracture caused by excessive rigidity in the vibration process is avoided.

Fig. 30 is a graph of simulated displacement of the vibrating element of fig. 28 at a frequency of 20 Hz. Referring to fig. 30, it can be seen that when the vibration element 300 of the acoustic transducer receives a certain operating frequency, the amplitude of the second end of each piezoelectric cantilever 310 attached with the diaphragm 320 is large compared to the first end, and in addition, the amplitude of vibration at both ends of the elastic sealing member 400 in the y direction is large compared to the middle, in other words, both ends of the second end of each piezoelectric cantilever 310 attached with the diaphragm 320 in the y direction are large compared to the middle.

For example, when the vibration element 300 receives a frequency of 20Hz, the vibration displacement of the vibration element 300 with the elastic seal 400 at both ends in the y-direction can reach 10 ³ A stage.

Fig. 31 is a schematic view of an internal structure of another acoustic transducer according to an embodiment of the present application, and fig. 32 is a schematic view of an internal structure of another acoustic transducer according to an embodiment of the present application. As another example, as shown in fig. 31 and 32, at least a portion of all the diaphragms 320 are projected in the vibration direction of the diaphragms 320 between the second ends of all the piezoelectric cantilevers 310, and one end of each diaphragm 320 is connected to at least one piezoelectric cantilever 310 through an elastic seal 400, and the projection of the other end of each diaphragm 320 in the vibration direction is positioned between the second ends of all the piezoelectric cantilevers 310, and a gap 301 is formed between the ends of the adjacent two diaphragms 320 away from the piezoelectric cantilevers 310, and an elastic seal 400 is formed at the gap 301, and the elastic seal 400 is respectively connected to the adjacent two diaphragms 320, so that the sealability between the adjacent two diaphragms 320 is improved.

Referring to fig. 31 and 32, taking an example in which the vibration element 300 includes two piezoelectric cantilevers 310 disposed opposite to and spaced apart from each other in the x-direction, two diaphragms 320 may be disposed spaced apart from each other in the x-direction, wherein one end of the left diaphragm 320 may be elastically connected to the second end of the left piezoelectric cantilever 310 by an elastic seal 400, one end of the right diaphragm 320 may be elastically connected to the second end of the right piezoelectric cantilever 310 by an elastic seal 400, so that the two diaphragms 320 may be driven by the corresponding piezoelectric cantilevers 310, respectively, to achieve vibration in the z-direction, and one end of the two diaphragms 320 away from the piezoelectric cantilever 310 has a gap 301 (see fig. 31) therebetween, and the gap 301 has an elastic seal 400, which is hermetically connected to the two diaphragms 320, respectively, to seal the gap 301 between the two diaphragms 320, thereby improving the sealing and isolation between the front cavity 101 and the rear cavity 102 on both sides of the vibration element 300.

In addition, the two diaphragms 320 are connected through the elastic sealing member 400, and the elastic sealing member 400 can generate elastic deformation in the vibration process of each diaphragm 320, so that the end stress of each diaphragm 320 can ensure that the vibration displacement of the two diaphragms 320 is not inhibited by each other, and the vibration amplitude of each diaphragm 320 is ensured.

It should be understood that, consistent with the two arrangements of the diaphragms 320, in this example, the diaphragms 320 are vertically spaced from the piezoelectric cantilevers 310 (shown in the z direction in fig. 32), for example, referring to fig. 32, all the diaphragms 320 are located on one side of all the piezoelectric cantilevers 310 facing the front cavity 101, where each diaphragm 320 has a gap 301 along the z direction with respect to the second end of the piezoelectric cantilever 310, and the elastic sealing element 400 connecting the diaphragms 320 with the second end of the piezoelectric cantilever 310 may be a third elastic sealing element 430 (i.e. a second elastic block), and the specific connection manner may be directly referred to the connection manner of the diaphragms 320 with the second end of the piezoelectric cantilever 310 in the vertical direction, which is not described herein.

In addition, referring to fig. 31, in this example, all the diaphragms 320 may be located between the second ends of all the piezoelectric cantilevers 310, for example, if one end of each diaphragm 320 and the second end of the corresponding piezoelectric cantilever 310 have a slit 301 in the horizontal direction (for example, the x direction in fig. 31), then the elastic sealing element 400 connecting the diaphragm 320 and the second end of the piezoelectric cantilever 310 may be the second elastic sealing element 420 (refer to fig. 31), and of course, may also be the first elastic sealing element 410, and the specific connection manner may be directly referred to the connection manner of the diaphragm 320 and the second end of the piezoelectric cantilever 310 in the horizontal direction, which is not described herein.

Referring to fig. 31, the ends of the adjacent two diaphragms 320 opposite to each other may be connected by a first elastic sealing member 410 or a second elastic sealing member 420. For example, referring to fig. 31, opposite ends of two adjacent diaphragms 320 may be connected by a first elastic sealing member 410, where one end of one first elastic block 411 is connected to the left diaphragm 320, and one end of the other first elastic block 411 is connected to the right diaphragm 320, and two ends of the connecting portion 412 are respectively connected to one ends of the two first elastic blocks 411 opposite to the diaphragm 320, so as to seal the gap 301 between the two diaphragms 320, and improve the tightness between the two diaphragms 320.

Referring to fig. 32, in some examples, one side of the two diaphragms 320 in the vibration direction may further have a piezoelectric cantilever 310, and one end of the two diaphragms 320 facing each other may be further connected to the piezoelectric cantilever 310 through an elastic seal 400. For example, the vibration element 300 includes three piezoelectric cantilevers 310 disposed at intervals in a horizontal direction (for example, x-direction in fig. 32), and two diaphragms 320 may be located at sides of the three piezoelectric cantilevers 310 facing the front cavity 101, wherein opposite ends of the two diaphragms 320 are respectively connected to second ends of the piezoelectric cantilevers 310 at both sides through elastic seals 400, and opposite ends of the two diaphragms 320 may be respectively connected to the piezoelectric cantilevers 310 at the middle through the elastic seals 400.

Referring to fig. 32, for example, an end of the left diaphragm 320 facing away from the left piezoelectric cantilever 310 may be connected to the middle piezoelectric cantilever 310 through a third elastic sealing member 430, such as a second elastic block, and an end of the right diaphragm 320 facing away from the right piezoelectric cantilever 310 may be connected to the middle piezoelectric cantilever 310 through the second elastic block.

In this way, on the one hand, the structural stability of each diaphragm 320 on the piezoelectric cantilever 310 side is improved. On the other hand, one ends of the two diaphragms 320 are respectively connected with the middle piezoelectric cantilever 310 through the third elastic sealing member 430, so that the middle piezoelectric cantilever 310 and the two third elastic sealing members 430, such as the second elastic blocks, on the middle piezoelectric cantilever 310 can seal the gap 301 between the two diaphragms 320, thereby improving the sealing and isolating effect between the front cavity 101 and the rear cavity 102.

It is understood that the above-described three piezoelectric cantilevers 310 may be understood as three of a plurality of piezoelectric cantilevers 310 (shown with reference to fig. 18) disposed at intervals in the circumferential direction of the support 200, and for example, the three piezoelectric cantilevers 310 may be three piezoelectric cantilevers 310 on the left, lower, and right sides in fig. 18.

In some examples, the vibration element 300 may be just a diaphragm (not shown in the drawings), and the driving member of the other non-piezoelectric cantilever 310 drives the diaphragm, so that the diaphragm vibrates with a certain frequency to push air in the front cavity 101 and the rear cavity 102, thereby generating a sound with a certain frequency.

For example, the driving element may be an electromagnetic actuating element such as a planar coil (planar coil), wherein the electromagnetic actuating element can actuate the diaphragm according to the received driving current and magnetic field, i.e. the diaphragm can be actuated by electromagnetic force. For example, in another embodiment, the driving element includes an electrostatic actuating element (such as a conductive plate) or a nano-electrostatic actuating element, wherein the electrostatic actuating element or the nano-electrostatic actuating element can actuate the diaphragm according to the received driving voltage and electric field, i.e. the diaphragm can be actuated by the electrostatic force.

Fig. 33 is a schematic structural view of a substrate and a vibrating membrane layer in a method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 34 is a schematic structural view of a vibrating membrane layer etched in a method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 35 is a schematic structural view of a support member and a piezoelectric cantilever in a method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 36 is a schematic structural view of a first elastic membrane layer formed on a piezoelectric cantilever in a method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 37 is a schematic structural view of a first elastic block formed in a method for manufacturing an acoustic transducer according to an embodiment of the present application, and fig. 38 is a schematic structural view of a first elastic sealing member formed in a method for manufacturing an acoustic transducer according to an embodiment of the present application.

Referring to fig. 33-38, an embodiment of the present application further provides a method for manufacturing an acoustic transducer. The acoustic transducer of the embodiment of the application is a Micro-Electro-Mechanical System (MEMS) system, namely the acoustic transducer is an MEMS acoustic transducer, which is prepared by utilizing an MEMS process, and the miniaturization and the precision of the acoustic transducer can be realized. Among them, MEMS processes originate from semiconductor and microelectronic processes, and are micromachining techniques that use photolithography, epitaxy, thin film deposition, evaporation, etching, packaging, etc. as basic process steps to fabricate devices.

Specifically, the manufacturing method of the acoustic transducer in the embodiment of the application includes:

s101, a support 200 and a vibration element 300 formed at one end of the support 200 are provided.

Referring to fig. 35, the vibration element 300 is located at one end of the support 200, and one end, for example, a first end, of the vibration element 300 is fixedly connected to the support 200.

The following description of the manufacturing method is made taking the example in which the vibration element 300 includes at least one piezoelectric cantilever 310.

Referring to fig. 33 to 35, S101 may specifically include:

s1011, providing a substrate 200a.

Referring to fig. 33, the substrate 200a may be a silicon-on-insulator (Silicon On Insulator, simply SOI) wafer. Of course, in some examples, the substrate 200a may also be a silicon wafer, for example, the substrate 200a may be heavily doped silicon such as p-type heavily doped silicon or n-type heavily doped silicon.

The substrate 200a includes a bottom silicon layer 210, a silicon oxide layer 220, and a top silicon layer 230, which are stacked in this order. In practice, the bottom silicon 210 is thicker than the top silicon 230 to provide mechanical support for the two layers thereon. Etching, etc., is typically performed on the top silicon 230 to form the circuitry, and thus the top silicon 230 may also be referred to as a silicon device layer.

S1012, the diaphragm layer 300a is formed on the substrate 200 a.

Referring to fig. 33, a diaphragm layer 300a is grown on the surface of the top silicon 230 of the substrate 200a, and for example, the diaphragm layer 300a is a bottom electrode layer 311, a piezoelectric layer 312, and a top electrode layer 313 sequentially grown on the substrate 200a in the z direction. It is understood that the bottom electrode layer 311, the piezoelectric layer 312, and the top electrode layer 313 are one material layer of a vibrating element, such as the first vibrating element 300.

Wherein, the bottom electrode layer 311, the piezoelectric layer 312 and the top electrode layer 313 are all thin films. For example, the bottom electrode layer 311 and the top electrode layer 313 may include, but are not limited to, a single element metal film such as a copper film or an aluminum film, or may be a composite film such as a chrome-gold film or a titanium-palladium-gold film, and the constituent materials of the piezoelectric layer 312 may include, but are not limited to, an inorganic piezoelectric material such as a piezoelectric crystal or a piezoelectric ceramic film, an organic piezoelectric material such as a polymer film of polyvinylidene fluoride (Poly vinylidene fluoride, abbreviated as PVDF), or the like. The piezoelectric ceramic film may be lead zirconate-titanate-titanate piezoelectric ceramics (PZT) film.

At least the diaphragm layer 300a is etched to form the vibration element 300, e.g., the piezoelectric cantilever 310, S1013.

The vibration element 300 may be one piezoelectric cantilever 310 or may be a plurality of piezoelectric cantilevers 310 disposed at intervals, for example, the vibration element 300 may include a plurality of piezoelectric cantilevers 310 disposed at intervals along the axis of the substrate 200 a.

Referring to fig. 34, after forming the vibration film layer 300a on the substrate 200a, the top electrode layer 313, the piezoelectric layer 312, the bottom electrode layer 311, and the top silicon 230 are sequentially etched in the opposite direction of z by an etching process until the silicon oxide layer 220 is exposed, so that one piezoelectric cantilever 310, or a plurality of piezoelectric cantilevers 310 arranged at intervals are formed on the substrate 200a, and the plurality of piezoelectric cantilevers 310 are arranged at intervals around the axis (shown in fig. 34 l) of the substrate 200a, for example, referring to fig. 34, two piezoelectric cantilevers 310 arranged at intervals in the x direction are formed on the substrate 200a with a gap 301 between the two piezoelectric cantilevers 310.

It will be appreciated that referring to fig. 34, in this example, piezoelectric cantilever 310 further comprises top layer silicon 230 at the bottom of bottom electrode layer 311. The top silicon 230 may serve as a three-layer thin film layer supporting the piezoelectric cantilever 310, and in addition, a trace may be formed in the top silicon 230 and may be electrically connected to the bottom electrode layer 311 and the top electrode layer 313 of the piezoelectric cantilever 310, so that an external circuit applies a voltage to the bottom electrode layer 311 and the top electrode layer 313 in the piezoelectric cantilever 310 through the trace, so that an electric field is formed in the piezoelectric cantilever 310, thereby performing buckling deformation of the piezoelectric layer 312 and realizing vibration.

Of course, in some examples, only the structural layer of the piezoelectric cantilever 310 may be etched, for example, the top electrode layer 313, the piezoelectric layer 312, and the bottom electrode layer 311 may be sequentially etched in the z direction by using an etching process until the top silicon 230 is exposed, so that a plurality of piezoelectric cantilevers 310 disposed at intervals are formed on the substrate 200 a. It will be appreciated that in this example, the piezoelectric cantilever 310 has a bottom electrode layer 311, a piezoelectric layer 312, and a top electrode layer 313.

S1014, etching a side of the substrate 200a facing away from the diaphragm layer 300a, so that at least part of the vibration element 300 is cantilever-arranged, and forming the rear cavity 102 at one side of the vibration element 300.

For example, a side of the substrate 200a facing away from the diaphragm layer 300a is etched inward such that at least a portion of the substrate 200a forms a hollow structure of the support 200 and such that at least a portion of the vibration element 300, such as the piezoelectric cantilever 310, is suspended above the support 200.

Referring to fig. 35, after S1013, i.e., after the vibration element 300, such as the plurality of piezoelectric cantilevers 310, is formed, the bottom silicon 210 and the silicon oxide layer 220 of the substrate 200a may be sequentially etched in the z direction by an etching process until the top silicon 230 is exposed, so that the substrate 200a may be fabricated as the support 200 having a ring structure, and in addition, the piezoelectric cantilevers 310 may be released such that the piezoelectric cantilevers 310 are suspended on the support 200.

It will be appreciated that the support 200 is formed from the underlying silicon 210 and silicon oxide layer 220 of the substrate 200a, and that the interior cavity of the support 200 may serve as the back cavity 102 of the acoustic transducer. The piezoelectric cantilever 310 is suspended on the silicon oxide layer 220 of the support 200. Wherein a first end of the vibration element 300, for example, the piezoelectric cantilever 310, is fixedly connected with the silicon oxide layer 220 of the support 200, a second end of the vibration element 300, for example, the piezoelectric cantilever 310, is suspended at a second end of the support 200, and the second end of the vibration element 300, for example, the piezoelectric cantilever 310, has a gap 301 communicating with the inner cavity of the support 200, and the gap 301 may be a gap 301 between two adjacent piezoelectric cantilevers 310.

After the process steps S1011 to S1014 are completed, the support 200 and the vibration element 300, such as a plurality of piezoelectric cantilevers 310, disposed on the support 200 are fabricated.

S102, an elastic sealing member 400 is formed at a slit 301 at one end of the vibration element 300 and communicating with the inner cavity of the support 200 to close the slit 301.

For example, an elastic sealing member 400 is formed at one end of the piezoelectric cantilevers 310, for example, at the gap 301 between the adjacent two piezoelectric cantilevers 310, to close the gap 301 between the adjacent two piezoelectric cantilevers 310.

Referring to fig. 36-38, after S101, an elastic sealing member 400 may be formed on the surface of the vibration element 300, for example, the plurality of piezoelectric cantilevers 310, by using a film pasting or film pressing, etching or patterning process, etc., so as to seal the gap 301 between two adjacent piezoelectric cantilevers 310.

The specific steps of S102 may include:

s1021, a first elastic film layer 411a is formed on the surface of the top electrode layer 313 of the vibration element 300, for example, the piezoelectric cantilever 310.

Referring to fig. 36, after S1014, that is, after the support 200 and the plurality of piezoelectric cantilevers 310 are fabricated, the first elastic film layer 411a is formed on the surface of the top electrode layer 313 of the piezoelectric cantilevers 310, for example, the first elastic film layer 411a may be formed on the surface of the top electrode layer 313 by a process such as film lamination or film pressing. The first elastic film layer 411a covers the entire surface of all the top electrode layers 313.

The first elastic film layer 411a may include, but is not limited to, any one or more of a silicone film, a rubber film, a polyethylene isobutyl ether film, and the like.

S1022, patterning the first elastic film layer 411a to form an elastic block such as the first elastic block 411 on the surface of each piezoelectric cantilever 310.

Referring to fig. 37, after the first elastic film layer 411a is formed, the first elastic film layer 411a may be patterned using a dry or wet process to form an elastic block such as the first elastic block 411 on the surface of each piezoelectric cantilever 310.

S1023, forming a second elastic film layer 412a on the surfaces of the first elastic blocks 411 and the top electrode layer 313, and patterning the second elastic film layer 412a to form connection portions 412 at one ends of two adjacent first elastic blocks 411.

The second elastic film layer 412a and the first elastic film layer 411a may be made of the same material.

Referring to fig. 38, after S1022, that is, after the first elastic blocks 411 are formed, a second elastic film layer 412a may be covered on the surfaces of the top electrode layer 313 and the first elastic blocks 411 by using a film pasting or film pressing process, then the second elastic film layer 412a may be patterned by using a dry process or a wet process, the second elastic film layer 412a on the surface of the top electrode layer 313 is removed, and the second elastic film layers 412a on the surfaces of the adjacent two first elastic blocks 411 are ensured, so that a connection portion 412 is formed at one end of the adjacent two first elastic blocks 411, and the connection portion 412 and the two first elastic blocks 411 together form the elastic sealing member 400.

It should be noted that the processes of etching, patterning, growing, film pressing or film pasting in the above process steps may adopt related process means in the MEMS process, which will not be described herein.

It is understood that the elastic sealing member 400 formed by the above process is a first elastic sealing member 400.

The steps S101 to S102 described above make the main structures in the housing 100, i.e., the support 200, the first vibration element 300, and the elastic seal 400, in the acoustic transducer according to the embodiment of the present application.

The manufacturing method of the acoustic transducer further comprises the following steps:

s103, providing a substrate 120.

After S102, a substrate 120 is provided, and the material of the substrate 120 may include, but is not limited to, hard materials such as metal, hard resin, ceramic, and semiconductor, so as to perform a good supporting and fixing function on the supporting member 200.

S104, fixing the support 200 on the substrate 120.

Specifically, after S103, the support 200 having the vibration element at one end may be fixed on the substrate 120, wherein one end of the underlying silicon 210 of the support 200 is fixed on the substrate 120.

It will be appreciated that, in some examples, S103 may also be performed before S101, for example, the substrate 120 may be provided first, then the substrate 200a, the structural layer of the piezoelectric cantilever 310, and the like are sequentially formed on the surface of the substrate 120, and finally the structures of the support 200 and the piezoelectric cantilever 310 are formed on the substrate 120, which does not limit the sequence of the process steps in the manufacturing process in the embodiment of the present application.

S105, the housing 110 is covered on the side of the substrate 120 having the support 200, and finally the acoustic transducer is formed.

According to the method for manufacturing the acoustic transducer, on one hand, one end of the vibration element 300 such as the piezoelectric cantilever 310 can be prevented from being limited by the supporting piece 200 or the adjacent piezoelectric cantilever 310, so that the degree of freedom of the vibration element 300 can not be influenced, the vibration amplitude of the vibration element 300 is ensured, the frequency response of the acoustic transducer is improved, on the other hand, the tightness between the front cavity 101 and the rear cavity 302 of the vibration element 300 along the two sides of the vibration direction is improved, the occurrence of sound short circuit between the front cavity 101 and the rear cavity 302 is improved or avoided, the sensitivity of the acoustic transducer is improved, and the frequency response, particularly the low-frequency loudness of the acoustic transducer is improved.

In addition, the elastic sealing member 400 is disposed at the gap 301 at one end of the vibration element 300, such as the piezoelectric cantilever 310, by using the above-mentioned manufacturing method, such as the MEMS process, and the patterning process of the first elastic film layer 411a and the second elastic film layer 412a is simple on the basis of improving the sealing property and the vibration amplitude at one end of the piezoelectric cantilever 310, and miniaturization and precision of the acoustic transducer are realized.

It will be appreciated that fig. 38 may be understood as a cross-sectional view of a portion of the structure of fig. 8, in other words, the fabrication method described above may ultimately produce an acoustic transducer corresponding to fig. 8.

Fig. 39 is a schematic structural view of forming a third elastic film layer on two opposite piezoelectric cantilevers in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 40 is a schematic structural view of forming a third elastic block on two opposite piezoelectric cantilevers in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 41 is a schematic structural view of forming a fourth elastic film layer on the surfaces of the third elastic block and the piezoelectric cantilevers in the method for manufacturing an acoustic transducer according to an embodiment of the present application, and fig. 42 is a schematic structural view of forming a diaphragm between two adjacent third elastic blocks in the method for manufacturing an acoustic transducer according to an embodiment of the present application.

Unlike the fabrication method described above, another fabrication method of the acoustic transducer of the embodiments of the present application may include:

s201, a support 200 and a plurality of piezoelectric cantilevers 310 formed at one end of the support 200 are provided. Wherein a plurality of piezoelectric cantilevers 310 are spaced apart in the circumferential direction of the support 200. For example, referring to fig. 35, two piezoelectric cantilevers 310 are provided at intervals in the x-direction, with a gap 301 between the two piezoelectric cantilevers 310.

The specific manufacturing process (e.g., S1011-S1014) of S201 and S101 is identical, and reference may be made directly to the manufacturing process of S101, and details thereof are not repeated here.

S202, an elastic sealing member 400 is formed on each piezoelectric cantilever 310.

Referring to fig. 39 and 40, S202 may specifically include the following steps:

s2021, a third elastic film layer 430a is formed on the surfaces of all piezoelectric cantilevers 310.

Referring to fig. 39, after S201, a third elastic film layer 430a may be coated on the surface of the top electrode layer 313 of the piezoelectric cantilever 310 by using a film pasting or film pressing process. The third elastic film layer 430a may be made of the same material as the first elastic film layer 411 a. It is understood that the third elastic film layer 430a covers all the piezoelectric cantilevers 310 and the gap 301 between the adjacent two piezoelectric cantilevers 310.

S2022, patterning the third elastic film layer 430a to form the elastic seals 400 on the adjacent two piezoelectric cantilevers 310, respectively.

Referring to fig. 40, after S2021, the third elastic film 430a may be patterned by a dry or wet process, the third elastic film 430a on the slit 301 at one end of each of the piezoelectric cantilevers 310 may be removed, and the third elastic film 430a on a portion of the surface of each of the piezoelectric cantilevers 310 may be removed, and the third elastic film 430a on the surface of each of the piezoelectric cantilevers 310 may be left adjacent to the slit 301 at one end thereof, so that the elastic sealing member 400, for example, the third elastic sealing member 430, may be formed on the adjacent two piezoelectric cantilevers 310. Wherein the third elastic sealing member 430 is an elastic block.

S203, a diaphragm 320 is formed between two adjacent elastic sealing members 400, and the diaphragm 320 and the piezoelectric cantilever 310 together form the vibration element 300.

Referring to fig. 41, first, after the third elastic sealing member 430 is manufactured, a fourth elastic film layer 320a may be coated on the top electrode layer 313 of all the piezoelectric cantilevers 310 and the surface of the third elastic sealing member 430 by using a film pasting or film pressing process.

It will be appreciated that the fourth elastic membrane layer 320a covers the gap 301 between two adjacent piezoelectric cantilevers 310 in addition to the surfaces of the top electrode layer 313 and the third elastic seal 430.

The fourth elastic film layer 320a may include, but is not limited to, silica gel, rubber, liquid crystal polymer (Liquid Crystal Polyester, abbreviated as LCP) and Polyimide (PI), and may be specifically selected according to practical needs.

Referring to fig. 42 and 44, next, the fourth elastic film layer 320a may be patterned using a dry or wet process, the fourth elastic film layer 320a on the surface of the top electrode layer 313 may be removed, and the fourth elastic film layer 320a on the surfaces of the adjacent two third elastic blocks may be left, thereby forming the diaphragm 320 between one ends of the adjacent two third elastic blocks. It will be appreciated that the diaphragm 320 and the plurality of piezoelectric cantilevers 310 together form the vibration element 300 of the acoustic transducer.

It will be appreciated that the acoustic transducers corresponding to fig. 16 and 18 may be fabricated by the fabrication method of the acoustic transducer.

Fig. 43 is a schematic structural view of forming a vibrating element on a substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 44 is a schematic structural view of forming an elastic member on a substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 45 is a schematic structural view of forming a supporting member on a substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 46 is a schematic structural view of forming a sealing medium layer on surfaces of a vibrating element and an elastic member in the method for manufacturing an acoustic transducer according to an embodiment of the present application, and fig. 47 is a schematic structural view of forming an elastic sealing member between two adjacent piezoelectric cantilevers in the method for manufacturing an acoustic transducer according to an embodiment of the present application.

As yet another example, another method for manufacturing an acoustic transducer according to an embodiment of the present application includes:

s301, providing a substrate 200a and a vibration element 300 formed on the surface of the substrate 200 a. Wherein the vibration element 300 includes a plurality of piezoelectric cantilevers 310 disposed at intervals in a horizontal direction (for example, x-direction in fig. 43).

Referring to fig. 33 and 43, S301 specifically includes:

s3011, providing a substrate 200a. The substrate 200a may be a silicon-on-insulator (Silicon On Insulator, simply SOI) wafer.

S3012, a diaphragm layer 300a is formed over the substrate 200a.

The diaphragm layer 300a may be a structural layer of the piezoelectric cantilever 1. For example, referring to fig. 34, a bottom electrode layer 311, a piezoelectric layer 312, and a top electrode layer 313 are sequentially grown in the z direction on the surface of the top silicon 230 of the substrate 200a. The specific process of S3012 may refer directly to the content of S1012 described above, and will not be described herein.

S3013, etching the diaphragm layer 300a to form a plurality of piezoelectric cantilevers 310. Wherein, a plurality of piezoelectric cantilevers 310 may be arranged at intervals along the x-direction, i.e. a gap 301 is provided between two adjacent piezoelectric cantilevers 310.

Referring to fig. 43, after forming the diaphragm layer 300a (e.g., a structural layer of a piezoelectric cantilever) on the substrate 200a, the top electrode layer 313, the piezoelectric layer 312, and the bottom electrode layer 311 may be sequentially etched in the opposite direction of z by using an etching process until the top silicon layer 230 is exposed, it may be appreciated that the two places of the diaphragm layer 300a in the x direction may be etched in the opposite direction of z by using an etching process, so that a plurality of piezoelectric cantilevers 310 disposed at intervals in the x direction may be formed on the substrate 200a. Wherein a gap 301 is provided between two adjacent piezoelectric cantilevers 310.

S302, the support 200 is formed on the substrate 200a, and the elastic sealing member 400 is formed between the adjacent two piezoelectric cantilevers 310.

Referring to fig. 44 to 47, after S302, that is, after the fabrication of the plurality of piezoelectric cantilevers 310 is completed, specific steps may include:

s3021, forming an elastic member 421 on the top silicon 230 between two adjacent piezoelectric cantilevers 310.

Referring to fig. 44, after the fabrication of the plurality of piezoelectric cantilevers 310 is completed, the top silicon 230 between the adjacent two piezoelectric cantilevers 310 may be etched in the opposite direction of z by using an etching process to obtain the elastic member 421. It can be understood that the two ends of the elastic member 421 are respectively connected to one ends of the adjacent two piezoelectric cantilevers 310, and the elastic member 421 has a spring structure, i.e. a gap 421a is formed in the elastic member 421.

S3022, etching the substrate 200a to form the support 200.

Referring to fig. 45, after S3021, an etching process may be used to etch the underlying silicon 210 surface of the substrate 200a, and sequentially etch the underlying silicon 210 and the silicon oxide layer 220, so as to form the substrate 200a into the support 200, and in addition, a cavity is etched in the substrate 200a, that is, the inner cavity of the support 200 may be used as the rear cavity 102 of the acoustic transducer, and the vibration element 300 is released, that is, each piezoelectric cantilever 310 is suspended at one end of the support 200, so that vibration in the z direction may be implemented.

S3023, a sealing medium layer 422 is formed on the surface of the elastic member 421.

Referring to fig. 46 and 47, after S3022, a sealing medium layer 422 may be formed on the surface of the vibration element 300, for example, the plurality of piezoelectric cantilevers 310 and the elastic member 421. For example, an elastic film may be formed on the surfaces of all the piezoelectric cantilevers 310 and the elastic member 421 by a process such as a film sticking or film pressing, as the sealing medium layer 422 (see fig. 46).

Next, the sealing medium layer 422 may be patterned by using a patterning process to remove a portion of the sealing medium layer 422 on the surface of the vibration element 300, and the sealing medium layer 422 on the surface of the elastic member 421 is remained, so that the sealing medium layer 422 seals the gap 421a of the elastic member 421, thereby sealing the gap 301 between two adjacent piezoelectric cantilevers 310 (refer to fig. 47).

It will be appreciated that in this example, the resilient seal 400 used to connect adjacent two piezoelectric cantilevers 310 is a second resilient seal 420.

S303, providing the substrate 120.

S304, fixing the support 200 on the substrate 120.

It will be appreciated that S303 and S304 may refer directly to the content of S103 and S104, which are not described herein.

Fig. 48 is a schematic structural view of forming a fourth elastic film layer on the surface of each piezoelectric cantilever and the substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 49 is a schematic structural view of forming a diaphragm between two adjacent piezoelectric cantilevers in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 50 is a schematic structural view of forming an elastic member on the substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 51 is a schematic structural view of forming a supporting member on the substrate in the method for manufacturing an acoustic transducer according to an embodiment of the present application, fig. 52 is a schematic structural view of forming a sealing medium layer on the surfaces of a vibrating element and the elastic member in the method for manufacturing an acoustic transducer according to an embodiment of the present application, and fig. 53 is a schematic structural view of forming an elastic sealing member between the piezoelectric cantilevers and the diaphragm in the method for manufacturing an acoustic transducer according to an embodiment of the present application.

Referring to fig. 48-53, in some examples, the piezoelectric cantilever 310 in the middle of fig. 43-47 may be replaced by a diaphragm 320, that is, a diaphragm 320 is disposed between two adjacent piezoelectric cantilevers 310, for example, the diaphragm 320 is formed by disposing two piezoelectric cantilevers 310 at intervals along the x direction, that is, the manufacturing method of the acoustic transducer corresponding to fig. 20 includes:

s401, providing a substrate 200a and a plurality of piezoelectric cantilevers 310 formed on the surface of the substrate 200 a. Wherein a plurality of piezoelectric cantilevers 310 are disposed at intervals on the surface of the substrate 200a, for example, as shown with reference to fig. 34, the surface of the substrate 200a is provided with two piezoelectric cantilevers 310 at intervals in the x-direction.

The specific steps of S401 may refer directly to the content of S301, which is not described herein.

S402, a diaphragm 320 is formed between two adjacent piezoelectric cantilevers 310, and the diaphragm 320 and the piezoelectric cantilevers 310 together form the vibration element 300.

Referring to fig. 48 and 49, S402 specifically includes the steps of:

referring to fig. 48, first, a fourth elastic film layer 320a may be coated on the surfaces of the piezoelectric cantilever 310 and the substrate 200a using a film sticking or film pressing process or the like.

Referring to fig. 48 and 49, next, the fourth elastic film layer 320a may be patterned using a dry or wet process, the fourth elastic film layer 320a on the surface of the top electrode layer 313 and a portion of the surface of the substrate 200a may be removed, and a portion of the fourth elastic film layer 320a on the substrate 200a may be left to form the diaphragm 320 between the adjacent two piezoelectric cantilevers 310. It will be appreciated that there is a gap 301 between the diaphragm 320 and each piezoelectric cantilever 310, the diaphragm 320 and the plurality of piezoelectric cantilevers 310 together forming the vibration element 300 of the acoustic transducer.

S403, an elastic seal 400 is formed between each piezoelectric cantilever 310 and the diaphragm 320.

Referring to fig. 50 to 53, after S402, that is, after the vibration element 300 is manufactured, the method may specifically include:

s4031, an elastic member 421 is formed on the top silicon 230 between the piezoelectric cantilever 310 and the diaphragm 320.

Referring to fig. 50, after the vibration element 300 is manufactured, an etching process may be used to etch the top silicon 230 between the piezoelectric cantilever 310 and the diaphragm 320 in the opposite direction of z to obtain the elastic member 421. It can be understood that the two ends of the elastic member 421 are respectively connected to the adjacent ends of the piezoelectric cantilever 310 and the diaphragm 320, and the elastic member 421 has a spring structure, i.e. a gap 421a is formed in the elastic member 421.

S4032, etching a side of the substrate 200a facing away from the diaphragm layer 300a, so that at least a portion of each piezoelectric cantilever 310 is suspended, and forming a rear cavity 102 on one side of the piezoelectric cantilever 310. For example, a side of the substrate 200a facing away from the diaphragm layer 300a is etched inward such that at least a portion of the substrate 200a forms the support 200, and the plurality of piezoelectric cantilevers 310 are suspended on the support 200.

Referring to fig. 51, after S4031, an etching process may be used to etch the underlying silicon 210 surface of the substrate 200a, and sequentially etch the underlying silicon 210 and the silicon oxide layer 220, so as to form the substrate 200a into the support 200, and in addition, a cavity is etched in the substrate 200a, that is, the inner cavity of the support 200 may be used as the rear cavity 102 of the acoustic transducer, and the vibration element 300 is released, that is, each of the piezoelectric cantilever 310 and the diaphragm 320 is suspended at one end of the support 200, so that vibration in the z direction may be achieved.

S4033, a sealing medium layer 422 is formed on the surface of the elastic member 421.

Referring to fig. 52 and 53, after S4032, a sealing medium layer 422 may be formed on the surfaces of the vibration element 300, for example, the piezoelectric cantilever 310, the diaphragm 320, and the elastic member 421. For example, an elastic film may be formed on the surfaces of all the piezoelectric cantilever 310, the diaphragm 320, and the elastic member 421 by using a process such as a film sticking or film pressing, etc., to serve as the sealing medium layer 422 (see fig. 52).

Then, the sealing medium layer 422 may be patterned by using a patterning process to remove the sealing medium layer 422 on a part of the surface of the vibration element 300, and the sealing medium layer 422 on the surface of the elastic member 421 is remained, so that the sealing medium layer 422 seals the gap 421a of the elastic member 421, thereby sealing the gap 301 between the piezoelectric cantilever 310 and the diaphragm 320.

It will be appreciated that in this example, the elastic seal 400 used to connect the piezoelectric cantilever 310 and the diaphragm 320 is a second elastic seal 420.

Fig. 54 is a schematic structural diagram of another acoustic transducer according to an embodiment of the present application. Referring to fig. 54, in other examples, the second end of the support 200 of the acoustic transducer is connected to the region between the outer edges of the vibration element 300 such that the vibration element 300 is suspended within the interior cavity of the housing 100.

In this example, the support 200 may be a support block having a first end disposed on the base 120 of the housing 100 and a second end fixedly coupled to an area between outer edges of the vibration element 300.

Referring to fig. 54, in this example, the acoustic transducer further includes a sealing bead 500 located within the housing 100. The outer edge of the vibration element 300 is hermetically connected to the inner sidewall of the case 100 through the sealing ring 500. It will be appreciated that the seal ring 500 has an annular structure, and the inner edge of the seal ring 500 is connected to the outer edge of the vibration element 300, and the outer edge of the seal ring 500 is connected to the inner side wall of the housing 100 (e.g., the inner side wall of the casing 110), so that a sealed connection between the outer edge of the vibration element 300 and the inner side wall of the housing 100 can be achieved.

In addition, the sealing ring 500 has elasticity in the horizontal direction, that is, the sealing ring 500 is elastically deformed during the vibration of the vibration element 300, thereby releasing the edge stress of the vibration element 300, so that the vibration element 300 is free to vibrate in the z direction without being caught by the case 100. The structure of the seal ring 500 can be directly referred to in the related art, and will not be described herein.

With continued reference to fig. 54, in this example, one side of the vibration element 300, a portion of the housing wall of the housing 100, and one side of the seal ring 500 form a front cavity 101, and the other side of the vibration element 300, the other side of the seal ring 500, and another portion of the housing wall of the housing 100 form a rear cavity 102.

The one side and the other side of the vibration element 300 refer to two sides of the vibration element 300 disposed opposite to each other in the vibration direction. Wherein the vibration direction may be shown with reference to the z-direction in fig. 54. In addition, one side and the other side of the seal ring 500 refer to the opposite sides of the seal ring 500 in the thickness direction. Wherein the support 200, e.g., a support block, is located within the rear cavity 102.

In this example, the end of the vibration element 300 remote from the sealing bellows 500 has a slit with an elastic seal 400, the elastic seal 400 being used to close the slit. In order to distinguish from other slits hereinafter, a slit at an end of the vibration element 300 remote from the seal ring 500 is taken as a first slit 301a.

Referring to fig. 54, for example, the vibration element 300 includes at least one piezoelectric cantilever 310 and at least two diaphragms 320. Wherein the second end of the support 200 is connected to the piezoelectric cantilever 310, and all the diaphragms 320 are located on the side of the piezoelectric cantilever 310 facing the front cavity 101.

The piezoelectric cantilever 310 is connected to the first ends of at least two diaphragms 320, so that the piezoelectric cantilever 310 drives each diaphragm 320 to vibrate in the buckling deformation process, and the piezoelectric cantilever 310 and the diaphragms 320 vibrate together, so that the air in the front cavity 101 and the rear cavity 102 is effectively pushed, and sound is generated.

In addition, the first end of each diaphragm 320 is connected to the seal ring 500, a first gap 301a is formed between the second ends of two adjacent diaphragms 320, and an elastic sealing member 400 is disposed at the first gap 301a, where the elastic sealing member 400 is respectively connected to the second ends of two adjacent diaphragms 320 in a sealing manner, so as to seal the first gap 301a between two adjacent diaphragms 320, thereby improving the sealing and isolation effect between the front cavity 101 and the rear cavity 102.

Referring to fig. 54, for example, one piezoelectric cantilever 310 and two diaphragms 320 are taken, wherein the piezoelectric cantilever 310 is fixed at the second end of the support member 200, and the outer edge of the piezoelectric cantilever 310 faces the inner sidewall of the housing 100 and has a certain distance from the inner sidewall of the housing 100, so as to ensure that the outer edge of the piezoelectric cantilever 310 is warped.

The two diaphragms 320 are located at one side of the piezoelectric cantilever 310 facing the front cavity 101, the first ends of the two diaphragms 320 are opposite to each other and can be respectively connected with two edges of the piezoelectric cantilever 310 opposite to each other along the x direction, the second ends of the two diaphragms 320 are opposite to each other, a first gap 301a is formed between the second ends of the two diaphragms 320, an elastic sealing member 400 is provided at the first gap 301a, one end of the elastic sealing member 400 is connected with the second end of one of the diaphragms 320, and the other end of the elastic sealing member 400 is connected with the second end of the other diaphragm 320, so that the tightness between two adjacent diaphragms 320 is improved, the sealing and isolating effects of the front cavity 101 and the rear cavity 102 at two sides of the diaphragm 320 are improved, the problem of acoustic short circuit between the front cavity 101 and the rear cavity 102 is improved or avoided, and the sensitivity of the acoustic transducer is improved.

In addition, the elastic sealing member 400 at the first slit 301a may be elastically deformed during the vibration of each diaphragm 320, thereby preventing the adjacent two diaphragms 320 from being caught by each other during the vibration to affect the vibration amplitude.

Of course, in some examples, the diaphragm 320 may be three or more. Three or more diaphragms 320 may be disposed at a side of the piezoelectric cantilever 310 facing the front cavity 101 at intervals in a ring structure, and a first end of each diaphragm 320 may be connected to an outer edge of the piezoelectric cantilever 310, and a first end of each diaphragm 320 may be further connected to an inner edge of the sealing ring 500, so as to improve tightness between a second end of each diaphragm 320 and an inner sidewall of the housing 100. In addition, the first gaps 301 a) between the second ends of the adjacent two diaphragms 320 may be blocked by the elastic sealing member 400.

It should be noted that, when three or more diaphragms 320 are disposed on one side of the piezoelectric cantilever 310 in an annular structure, two adjacent diaphragms 320 may be understood as two diaphragms 320 adjacent in the circumferential direction of the annular structure, and may be understood as two diaphragms 320 adjacent in any radial direction of the annular structure. For example, the second ends of any two adjacent diaphragms 320 in the circumferential direction of the annular structure may be sealingly connected by the elastic sealing member 400.

Fig. 55 is a schematic structural diagram of yet another acoustic transducer provided in an embodiment of the present application. Referring to fig. 55, in some examples, the piezoelectric cantilevers 310 may be plural, and the plural piezoelectric cantilevers 310 may be spaced around the support 200, wherein a first end of each piezoelectric cantilever 310 is connected to a first end of one diaphragm 320, and a second end of each piezoelectric cantilever 310 is connected to the support 200.

Referring to fig. 55, piezoelectric cantilevers 310 may be disposed in one-to-one correspondence with diaphragms 320. For example, two piezoelectric cantilevers 310 are sequentially disposed along the x-direction, one side of each piezoelectric cantilever 310 facing the front cavity 101 is provided with a diaphragm 320, a first end of each piezoelectric cantilever 310 is connected to a first end of a corresponding diaphragm 320, and a second end of each piezoelectric cantilever 310 is fixed to a second end of the support 200, so that each piezoelectric cantilever 310 can drive the corresponding diaphragm 320 to vibrate along the z-direction during buckling deformation, and thus each piezoelectric cantilever 310 and diaphragm 320 can jointly push air in the front cavity 101 and the rear cavity 102, thereby emitting sound.

In some examples, the diaphragm 320 may be attached to one side of the piezoelectric cantilever 310 to simplify the fabrication process of the vibration element 300.

In other examples, the diaphragms 320 may be spaced apart from the piezoelectric cantilevers 310 in a vertical direction (as shown in the z-direction of fig. 55), such that a gap 301 (e.g., a second gap 301 b) is provided between a first end of each diaphragm 320 and a first end of the piezoelectric cantilever 310, and an elastic sealing member 400 is provided at the second gap 301b, where the elastic sealing member 400 is connected to the diaphragm 320 and the piezoelectric cantilever 310, respectively, so as to seal the second gap 301 b. It will be appreciated that the elastic sealing member 400 for connecting the diaphragm 320 and the piezoelectric cantilever 310 is disposed near the first end of each diaphragm 320 to ensure that the vibration amplitude of each diaphragm 320 is not limited by the support of the elastic sealing member 400.

The arrangement of the elastic sealing member 400 at the second gap 301b enables the second gap 301b between the first end of the diaphragm 320 and the first end of the piezoelectric cantilever 310 to be blocked, so that the sealing and isolating effect of the vibration element 300 on the front cavity 101 and the rear cavity 102 is further improved, for example, the elastic sealing member 400 at the first gap 301a can be used as a primary sealing member, the elastic sealing member 400 at the second gap 301b can be used as a secondary sealing member, and the primary sealing member and the secondary sealing member are arranged, so that the gaps 301, which are communicated with the front cavity 101 and the rear cavity 102, in the vibration element 300 are blocked, the sealing and isolating effect of the vibration element 300 on the front cavity 101 and the rear cavity 102 is improved, or the problem of acoustic short-circuit of the acoustic transducer is avoided, and the frequency response, such as low-frequency loudness, of the acoustic transducer is improved.

The elastic sealing member 400 at the second gap 301b, that is, the elastic sealing member 400 for connecting the diaphragm 320 and the piezoelectric cantilever 310 may be the third elastic sealing member 430, for example, a second elastic block, where one end of the second elastic block is connected to the first end of the diaphragm 320, and the other end of the second elastic block is connected to the first end of the piezoelectric cantilever 310, so as to implement blocking of the vertical gap 301 between the diaphragm 320 and the piezoelectric cantilever 310. The structure and materials of the third elastic sealing member 430 may be directly referred to the above examples, and will not be described herein.

In addition, the elastic sealing member 400 at the first slit 301a, that is, the elastic sealing member 400 for connecting the slit 301 at the end of the vibration element 300 remote from the seal ring 300 may employ the first elastic sealing member 410 mentioned in the above example, for example, two elastic blocks (e.g., the first elastic block 411) of the first elastic sealing member 410 may be respectively connected to the adjacent two diaphragms 320, and the connection portion 412 is connected between the other ends of the two elastic blocks so that the first slit 301a is blocked by the first elastic sealing member 410. The structure, material, etc. of the first elastic sealing element 410 may be directly referred to the relevant matters in the foregoing examples, and will not be described herein.

Of course, in some examples, the resilient seal 400 at the first gap 301a may also be the second resilient seal 420. For example, in the second elastic sealing member 420, two ends of the elastic member 421 are respectively connected to the second ends of the adjacent two diaphragms 320, and the sealing medium layer 422 is used to seal a gap in the elastic member 421, for example, the sealing medium layer 422 may cover a side of the elastic member 421 facing the front cavity 101, so as to seal a gap between the adjacent two diaphragms 320, such as the first gap 301 a.

It should be noted that, the numerical values and the numerical ranges referred to in the embodiments of the present application are approximate values, and may have a certain range of errors under the influence of the manufacturing process, and those errors may be considered to be negligible by those skilled in the art.

Throughout the specification and claims, unless the context requires otherwise, the word "comprise" and its other forms such as the third person referring to the singular form "comprise" and the present word "comprising" are to be construed as open, inclusive meaning, i.e. as "comprising, but not limited to. In the description of the specification, the terms "one embodiment", "some embodiments", "example embodiment", "example", or "some examples" and the like are intended to indicate that a particular feature, structure, material, or characteristic associated with the embodiment or example is included in at least one embodiment or example of the present disclosure. The schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, in this application, directional terms "front", "rear", etc. are defined with respect to the orientation in which the components are schematically disposed in the drawings, and it should be understood that these directional terms are relative concepts, which are used for description and clarity with respect thereto, and which may be varied accordingly with respect to the orientation in which the components are disposed in the drawings.

It should be understood that "electrically connected" in this application is understood to mean that the components are in physical contact and electrically conductive; it is also understood that the various components in the wiring configuration are connected by physical wires such as printed circuit board (printed circuit board, PCB) copper foil or leads that carry electrical signals. "coupled" and "coupled" may refer to a mechanical or physical relationship, i.e., a and B are coupled or a and B are coupled, i.e., there is a fastening member (e.g., a screw, bolt, rivet, etc.) between a and B, or a and B are in contact with each other and a and B are difficult to separate.

In the description of the embodiments of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, indirectly connected through an intermediary, or may be in communication with each other between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the embodiments of the present application will be understood by those of ordinary skill in the art according to the specific circumstances.

The terms first, second, third, fourth and the like in the description and in the claims of embodiments of the application and in the above-described figures, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order.

Claims

1. An acoustic transducer comprising a vibrating element and an elastomeric seal;

one side of the vibrating element is provided with a rear cavity, one end of the vibrating element is provided with a gap, the elastic sealing piece is positioned at the gap and connected with the vibrating element, and the elastic sealing piece is at least partially blocked at the gap at one end of the vibrating element;

the vibration element comprises at least one piezoelectric cantilever and at least one vibrating diaphragm, and each vibrating diaphragm is connected with the piezoelectric cantilever;

if the number of the vibrating diaphragms is one, the vibrating diaphragms are positioned on one side of the piezoelectric cantilever, which faces the rear cavity; the second ends of the vibrating diaphragm and all the piezoelectric cantilevers are provided with gaps in the vertical direction, and the elastic sealing piece is positioned in the gaps in the vertical direction;

the elastic sealing piece comprises an elastic piece and a sealing medium layer, wherein a gap is formed in the elastic piece, and the sealing medium layer is used for sealing the gap;

A part of the sealing medium layer covers the surface of the vibrating element, and the other part of the sealing medium layer covers the surface of the elastic piece;

the acoustic transducer further comprises a support;

the vibrating element is positioned at one end of the supporting piece, the vibrating element and the inner wall of the supporting piece are respectively used as the top wall and the side wall of the rear cavity, the first end of the vibrating element is connected with one end of the supporting piece, the second end of the vibrating element is provided with the gap, and the elastic sealing piece is positioned at the gap and connected with the second end of the vibrating element;

the elastic sealing member is at least partially blocked at the gap at the second end of the vibrating element and communicated with the rear cavity;

the sealing medium layer is an elastic film, and at least part of the elastic film covers at least one side of the elastic piece along the direction perpendicular to the elastic direction;

the acoustic transducer further comprises a housing;

the vibrating element, the elastic sealing piece and the supporting piece of the acoustic transducer are all positioned in the shell, the first end of the supporting piece is arranged on the inner wall of the shell, and the first end of the vibrating element is connected with the second end of the supporting piece;

The vibrating element, the outer wall of the support and a portion of the housing wall of the housing form a front cavity, and the vibrating element, the inner wall of the support and another portion of the housing wall of the housing form the rear cavity.

2. The acoustic transducer of claim 1, wherein a first end of the piezoelectric cantilever is coupled to one end of the support member and a second end of the piezoelectric cantilever is coupled to the elastomeric seal.

3. The acoustic transducer of claim 2, wherein the vibrating element comprises two piezoelectric cantilevers, a first end of each piezoelectric cantilever being connected to one end of the support member, the gap being provided between second ends of the two piezoelectric cantilevers, and the elastic seal being located at the gap and being sealingly connected to the second ends of the two piezoelectric cantilevers.

4. The acoustic transducer of claim 2, wherein the vibration element comprises a plurality of piezoelectric cantilevers, first ends of the plurality of piezoelectric cantilevers being connected to the support member and the first ends of the plurality of piezoelectric cantilevers being spaced apart along a circumference of the support member;

the gap is arranged between two adjacent piezoelectric cantilevers, and the elastic sealing piece is positioned at the gap and is connected with the two adjacent piezoelectric cantilevers in a sealing way.

5. The acoustic transducer of any of claims 1-4, wherein at least one end of the diaphragm is proximate to the second end of the at least one piezoelectric cantilever and the diaphragm has the gap proximate to the second end of the piezoelectric cantilever, the elastomeric seal is positioned at the gap and sealingly coupled to the second end of the piezoelectric cantilever and the diaphragm, respectively, or the elastomeric seal is positioned at the gap and sealingly coupled to the diaphragm and the support, respectively.

6. The acoustic transducer of any of claims 1-4, wherein a portion of the elastic membrane covers a surface of the vibrating element and another portion of the elastic membrane covers a surface of the elastic member.

7. The acoustic transducer of any of claims 1-4, wherein the elastic membrane has a thickness of 1um to 100um.

8. An acoustic transducer comprising a vibrating element and an elastomeric seal;

if the number of the vibrating diaphragms is one, the vibrating diaphragms are positioned between the second ends of all the piezoelectric cantilevers, the vibrating diaphragms and the second ends of all the piezoelectric cantilevers are provided with the gaps in the horizontal direction, and the elastic sealing piece is positioned in the gaps in the horizontal direction;

the acoustic transducer further comprises a support;

the acoustic transducer further comprises a housing;

9. The acoustic transducer of claim 8, wherein a first end of the piezoelectric cantilever is coupled to one end of the support member and a second end of the piezoelectric cantilever is coupled to the elastomeric seal.

10. The acoustic transducer of claim 9, wherein the vibrating element comprises two piezoelectric cantilevers, a first end of each piezoelectric cantilever being connected to one end of the support member, the gap being between second ends of the two piezoelectric cantilevers, and the resilient seal being located at the gap and being sealingly connected to the second ends of the two piezoelectric cantilevers.

11. The acoustic transducer of claim 9, wherein the vibration element comprises a plurality of piezoelectric cantilevers, first ends of the plurality of piezoelectric cantilevers being coupled to the support member and the first ends of the plurality of piezoelectric cantilevers being spaced apart along a circumference of the support member;

12. The acoustic transducer of any of claims 8-11, wherein at least one end of the diaphragm is proximate to the second end of the at least one piezoelectric cantilever and the diaphragm has the gap proximate to the second end of the piezoelectric cantilever, the elastomeric seal is positioned at the gap and sealingly coupled to the second end of the piezoelectric cantilever and the diaphragm, respectively, or the elastomeric seal is positioned at the gap and sealingly coupled to the diaphragm and the support, respectively.

13. An acoustic transducer according to any of claims 8-11, wherein a part of the elastic membrane covers the surface of the vibrating element and another part of the elastic membrane covers the surface of the elastic member.

14. The acoustic transducer according to any of claims 8-11, wherein the elastic membrane has a thickness of 1um-100um.

15. An acoustic transducer comprising a vibrating element and an elastomeric seal;

the acoustic transducer comprises a housing, a support and a sealing ring disposed within the housing;

the outer edge of the vibrating element is connected with the inner side wall of the shell in a sealing way through the sealing folding ring, one side of the vibrating element, one part of the shell wall of the shell and one side of the sealing folding ring form a first cavity, and the other side of the vibrating element, the other side of the sealing folding ring and the other part of the shell wall of the shell form a second cavity;

the support piece is positioned in the second cavity, and two ends of the support piece are respectively connected with the vibrating element and the inner bottom wall of the shell;

a first gap is formed at one end of the vibrating element, which is far away from the sealing folded ring, the elastic sealing piece is arranged at the first gap, and the elastic sealing piece is blocked at the first gap;

The elastic sealing element at the first gap comprises an elastic element and a sealing medium layer, wherein a gap is formed on the elastic element, and the sealing medium layer is used for sealing the gap;

the sealing medium layer is an elastic film, and at least part of the elastic film covers at least one side of the elastic piece along the direction perpendicular to the elastic direction.

16. The acoustic transducer of claim 15, wherein the vibrating element comprises at least one piezoelectric cantilever and at least two diaphragms, a first end of each diaphragm is connected to the seal ring, the first gap is formed between the second ends of two adjacent diaphragms, the elastic sealing element is formed at the first gap, and the elastic sealing element is respectively connected with the second ends of two adjacent diaphragms in a sealing manner;

17. The acoustic transducer of claim 16, wherein the number of piezoelectric cantilevers is a plurality, a first end of each of the piezoelectric cantilevers being coupled to a first end of one of the diaphragms, and a second end of each of the piezoelectric cantilevers being coupled to the support.

18. The acoustic transducer of claim 16 or 17, wherein a second gap is vertically formed between the first end of each diaphragm and the piezoelectric cantilever, the second gap is provided with the elastic sealing element, and the elastic sealing element is respectively connected with the diaphragm and the corresponding piezoelectric cantilever.

19. The acoustic transducer of any of claims 15-17, wherein a portion of the elastic membrane covers a surface of the vibrating element and another portion of the elastic membrane covers a surface of the elastic member.

20. The acoustic transducer of any of claims 15-17, wherein the elastic membrane has a thickness of 1um to 100um.

21. An electronic device comprising an acoustic transducer as claimed in any of claims 1-20.