CN114486200A - Semiconductor laser polarization test method and test system - Google Patents
Semiconductor laser polarization test method and test system Download PDFInfo
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- CN114486200A CN114486200A CN202210107446.9A CN202210107446A CN114486200A CN 114486200 A CN114486200 A CN 114486200A CN 202210107446 A CN202210107446 A CN 202210107446A CN 114486200 A CN114486200 A CN 114486200A
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- 238000001514 detection method Methods 0.000 claims abstract description 17
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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Abstract
The invention provides a polarization testing method and a polarization testing system for a semiconductor laser, and mainly solves the problems that the existing polarization degree testing method is low in reliability and high in testing cost, and whether a collimation light path and a polarization beam splitter prism are in an effective included angle cannot be determined. The test system comprises a six-dimensional adjusting table, a collimating lens, a polarization beam splitter prism, a scale adjusting plate, a power detection device, a first slide rail and a second slide rail; the semiconductor laser is arranged on a six-dimensional adjusting table; the collimating lens, the polarization beam splitter prism, the power detection device and the scale adjusting plate are sequentially arranged on an emergent light path of the semiconductor laser; the collimating lens collimates the fast axis and the slow axis of the semiconductor laser; the polarization beam splitter prism is arranged on the first sliding rail; the power detection device is used for acquiring the optical power of the laser beam passing through the collimating lens and the polarization beam splitter prism; the scale regulating plate is arranged on the second sliding rail.
Description
Technical Field
The invention belongs to the field of semiconductor lasers, and particularly relates to a semiconductor laser polarization testing method and a semiconductor laser polarization testing system.
Background
With the development of laser technology, lasers are widely used in various fields. In particular, semiconductor lasers have been widely used in the fields of material processing, medical cosmetology, laser radar, aerospace, and the like because of their characteristics of small size, high efficiency, easy integration, and maintenance-free. In particular, fiber lasers widely used in the industrial field all use semiconductor lasers as pump sources to realize high-energy output by a polarization beam combination method.
In order to ensure that the polarization degree of the semiconductor laser meets the use requirement, the polarization degree of the laser needs to be accurately measured. The existing testing method for the polarization degree uses a more complex light path and testing devices, reduces the reliability of the system and increases the testing cost, and the existing testing method cannot determine whether the collimation light path and the polarization beam splitter prism are in an effective included angle.
Disclosure of Invention
The invention aims to solve the problems that the existing polarization degree testing method is low in reliability and high in testing cost, and whether a collimation light path and a polarization beam splitter prism are in an effective included angle cannot be determined, so that the semiconductor laser polarization testing method and the testing system are provided.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
the invention provides a polarization testing method of a semiconductor laser, which comprises the following steps:
the method comprises the following steps that firstly, a semiconductor laser is arranged on a six-dimensional adjusting table, a front cavity of the semiconductor laser is located at the rotating center of the six-dimensional adjusting table, and meanwhile, the centers of a collimating lens and a polarization beam splitter prism are arranged on the same axis;
secondly, laser beams emitted by the semiconductor laser pass through a collimating lens and a polarization beam splitting prism and then are incident on a scale adjusting plate, and a six-dimensional adjusting platform adjusts the relative position of the semiconductor laser and the collimating lens, so that the collimating lens effectively compresses the light spot slow axis and fast axis angles of the laser beams of the semiconductor laser;
step three, adjusting the position of the scale adjusting plate along the light path direction, judging whether the size of a light spot of a laser beam which passes through the collimating lens and is incident on the scale adjusting plate is changed or not, judging whether the central position of the light spot is changed or not, if the size of the light spot and the central position of the light spot are not changed, executing the step four, if the size of the light spot and the central position of the light spot are changed, returning to the step two until the size of the light spot and the central position of the light spot are not changed, at the moment, the included angle between the emergent laser beam and the polarization beam splitting prism is within an effective included angle, and the directivity of the laser beam meets the requirement;
and step four, obtaining the laser power P0 of the laser beam passing through the polarization beam splitter prism, moving the polarization beam splitter prism out of the laser emergent light path, and obtaining the laser power P1 of the laser beam passing through the collimating lens, so that the polarization degree POL is P0/P1.
Furthermore, in the third step, the included angle between the outgoing laser beam and the polarization beam splitter prism is controlled within 4 degrees.
The semiconductor laser polarization test system provided by the invention comprises a six-dimensional adjusting platform, a collimating lens, a polarization beam splitting prism, a scale adjusting plate, a power detection device, a first slide rail and a second slide rail; the semiconductor laser is arranged on a six-dimensional adjusting platform, and the six-dimensional adjusting platform realizes the relative position adjustment of the semiconductor laser and the collimating lens; the collimating lens, the polarization beam splitter prism, the power detection device and the scale adjusting plate are sequentially arranged on an emergent light path of the semiconductor laser, and the centers of the collimating lens and the polarization beam splitter prism are in the same axial direction; the collimating lens collimates the light beam of the fast axis and the slow axis of the semiconductor laser; the polarization beam splitter prism is arranged on a first sliding rail, and the first sliding rail is used for adjusting the position of the polarization beam splitter prism and measuring the polarization degree; the power detection device is used for acquiring the optical power of the laser beam passing through the collimating lens and the polarization beam splitter prism; the scale adjusting plate is arranged on a second sliding rail, and the second sliding rail is used for adjusting the displacement of the scale adjusting plate along the light path direction, so that the scale adjusting plate is used for judging the directivity of the laser beam.
Further, the front cavity of the semiconductor laser is positioned at the rotation center of the six-dimensional adjusting table to ensure that the displacement of the semiconductor laser is reduced to the minimum in the adjusting process.
Further, the power detection device is a power meter.
Compared with the prior art, the invention has the following beneficial effects:
1. the test system and the test method have the advantages of higher test reliability and lower test cost. The method and the system only need to carry out power test on one light path, and when the power P0 and the power P1 are tested, the power detection device does not need to move the position, thereby avoiding the test error caused by the position change of the power detection device. Meanwhile, after the semiconductor laser is installed on the six-dimensional adjusting table, the relative position of the semiconductor laser and the collimating lens can be adjusted in six dimensions, so that the compression quality of the light beam of the fast and slow axes of the semiconductor laser is ensured. In addition, the optical path of the invention is easy to adjust, the whole structure is simple, and the system construction cost is low. When the light path is adjusted, whether the light path is properly adjusted is confirmed through a scale adjusting plate arranged on the system, and the operation is simple.
2. The test system and the test method can determine that the collimation light path and the polarization beam splitter prism are in an effective included angle. When the system is tested, the semiconductor laser, the collimating lens and the polarization beam splitting prism are arranged on one axis, and the collimating light path and the polarization beam splitting prism can be ensured to be in an effective included angle only by ensuring that the central position of a light spot is unchanged when the emergent light spot of the collimating lens is incident on different positions of the scale adjusting plate.
3. The method has simple test flow, easy operation and short test time. After the light path is adjusted, the test can be completed only by moving the polarization beam splitter prism twice.
4. When the method is used for power test, the power detection device does not need to move, so that test errors caused by position changes of two times of power tests are avoided.
5. The method and the system of the invention use the power meter for testing, the obtained test value is an absolute value, and the power meter is calibrated by a national certification and measurement unit, thereby ensuring the test precision. In the existing method, a photoelectric detector is used for testing during power testing, and the measured value result is a relative value, so that the power coefficient of the photoelectric detector needs to be calibrated, and the testing precision is lower compared with a power meter.
Drawings
FIG. 1 is a schematic diagram of a polarization testing system for a semiconductor laser according to the present invention.
Reference numerals: the device comprises a 1-semiconductor laser, a 2-six-dimensional adjusting table, a 3-collimating lens, a 4-polarizing beam splitting prism, a 5-power detection device, a 6-scale adjusting plate, a 7-first sliding rail and a 8-second sliding rail.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention and are not intended to limit the scope of the present invention.
The invention provides a polarization testing method according to the optical property of a semiconductor laser, and the method obtains better collimation facula by designing a testing system with an adjustable relative position of the semiconductor laser and a collimating lens, so that the included angle of laser incident to a polarization beam splitter prism is smaller than 4 degrees, and the accurate polarization degree of the laser is obtained.
The polarization testing method of the semiconductor laser specifically comprises the following steps:
the method comprises the following steps that firstly, a semiconductor laser 1 is installed on a six-dimensional adjusting platform 2, a front cavity of the semiconductor laser 1 is located at the rotating center of the six-dimensional adjusting platform 2, so that the semiconductor laser 1 is enabled to be displaced to the minimum in the adjusting process, and meanwhile, centers of a collimating lens 3 and a polarization beam splitter prism 4 are arranged on the same axis;
secondly, laser beams emitted by the semiconductor laser 1 pass through a collimating lens 3 and a polarization beam splitter prism 4 and then are incident on a scale adjusting plate 6, and the relative positions of the semiconductor laser 1 and the collimating lens 3 are adjusted by a six-dimensional adjusting platform 2, so that the collimating lens 3 effectively compresses the light spot slow axis and fast axis angles of the laser beams of the semiconductor laser 1;
step three, adjusting the position of the scale adjusting plate 6 along the light path direction, judging whether the size of a light spot incident on the scale adjusting plate 6 by the laser beam passing through the collimating lens 3 is changed or not, and whether the central position of the light spot is changed or not, if the size of the light spot and the central position of the light spot are not changed, executing the step four, if the size of the light spot and the central position of the light spot are changed, returning to the step two until the size of the light spot and the central position of the light spot are not changed, at the moment, the laser beam passing through the collimating lens 3 is vertical to the light receiving surface of the polarization beam splitting prism 4, the included angle between the emergent laser beam and the polarization beam splitting prism 4 is within an effective included angle, and the directivity of the laser beam meets the requirement;
in the step, the included angle between the emergent laser beam and the polarization beam splitter prism 4 is controlled within 4 degrees;
and step four, obtaining laser power P0 of the laser beam passing through the polarization beam splitter prism 4, moving the polarization beam splitter prism 4 out of the laser emergent light path, and obtaining laser power P1 of the laser beam passing through the collimating lens 3, so as to obtain the polarization degree POL (P0/P1), wherein P0 is the laser power before the polarization beam splitter prism 4 moves, and P1 is the laser power after the polarization beam splitter prism 4 moves out.
As shown in fig. 1, the invention provides a semiconductor laser polarization testing system for implementing the method, and the testing system includes a six-dimensional adjusting stage 2, a collimating lens 3, a polarization beam splitting prism 4, a scale adjusting plate 6, a power detecting device 5, a first slide rail 7 and a second slide rail 8. Semiconductor laser 1 sets up and installs on six-dimensional adjusting station 2, and six-dimensional adjusting station 2 can realize the relative position adjustment of semiconductor laser 1 and collimating lens 3, and during concrete installation, the front cavity of semiconductor laser 1 is in the rotation center department of six-dimensional adjusting station 2 to guarantee to reduce semiconductor laser 1 displacement to minimum in accommodation process. The collimating lens 3, the polarization beam splitter prism 4, the power detection device 5 and the scale adjusting plate 6 are sequentially arranged on an emergent light path of the semiconductor laser 1, the centers of the collimating lens 3 and the polarization beam splitter prism 4 are in the same axial direction, and the collimating lens 3 can collimate light beams of a fast axis and a slow axis of the semiconductor laser 1; the polarization beam splitter prism 4 is arranged on a first slide rail 7, and the first slide rail 7 is used for adjusting the position of the polarization beam splitter prism 4 and measuring the polarization degree; the power detection device 5 is used for acquiring the optical power of the laser beam passing through the collimating lens 3 and the polarization beam splitter prism 4, and can specifically adopt a power meter; the scale adjustment plate 6 is disposed on the second slide rail 8, and the second slide rail 8 is used for adjusting the displacement of the scale adjustment plate 6 along the light path direction, so that the scale adjustment plate 6 is used for judging the directivity of the laser beam.
The adjusting precision of the six-dimensional adjusting table 2 is micron-sized, the displacement precision of the first slide rail 7 and the second slide rail 8 is micron-sized, and the collimating lens 3 and the polarization beam splitter prism 4 are standard general products. According to the invention, the scale adjusting plate 6 and the second slide rail 8 form a distance adjusting device, the distance adjusting device can judge the directivity of a collimated light beam, and the scale adjusting plate 6 is provided with scales to provide coordinates for determining the position of a light spot.
Claims (5)
1. A polarization testing method of a semiconductor laser is characterized by comprising the following steps:
the method comprises the following steps that firstly, a semiconductor laser (1) is installed on a six-dimensional adjusting table (2), a front cavity of the semiconductor laser (1) is located at the rotating center of the six-dimensional adjusting table (2), and meanwhile centers of a collimating lens (3) and a polarization beam splitting prism (4) are arranged on the same axis;
secondly, laser beams emitted by the semiconductor laser (1) pass through a collimating lens (3) and a polarization beam splitting prism (4) and then are incident on a scale adjusting plate (6), and a six-dimensional adjusting platform (2) adjusts the relative positions of the semiconductor laser (1) and the collimating lens (3), so that the collimating lens (3) effectively compresses the light spot slow axis and fast axis angles of the laser beams of the semiconductor laser (1);
step three, adjusting the position of the scale adjusting plate (6) along the light path direction, judging whether the size of a light spot of a laser beam which passes through the collimating lens (3) and is incident on the scale adjusting plate (6) is changed or not, judging whether the central position of the light spot is changed or not, if the size of the light spot and the central position of the light spot are not changed, executing the step four, if the size of the light spot and the central position of the light spot are changed, returning to the step two until the size of the light spot and the central position of the light spot are not changed, at the moment, the included angle between the emergent laser beam and the polarization beam splitting prism (4) is within an effective included angle, and the directivity of the laser beam meets the requirement;
and step four, obtaining the laser power P0 of the laser beam passing through the polarization beam splitter prism (4), moving the polarization beam splitter prism (4) out of the laser emergent light path, and obtaining the laser power P1 of the laser beam passing through the collimating lens (3), so that the polarization degree POL is P0/P1.
2. The semiconductor laser polarization testing method of claim 1, wherein: in the third step, the included angle between the emergent laser beam and the polarization beam splitter prism (4) is controlled within 4 degrees.
3. A semiconductor laser polarization test system is characterized in that: the device comprises a six-dimensional adjusting table (2), a collimating lens (3), a polarization beam splitter prism (4), a scale adjusting plate (6), a power detection device (5), a first slide rail (7) and a second slide rail (8);
the semiconductor laser (1) is arranged on the six-dimensional adjusting platform (2), and the six-dimensional adjusting platform (2) realizes the relative position adjustment of the semiconductor laser (1) and the collimating lens (3);
the collimating lens (3), the polarization beam splitter prism (4), the power detection device (5) and the scale adjusting plate (6) are sequentially arranged on an emergent light path of the semiconductor laser (1), and the centers of the collimating lens (3) and the polarization beam splitter prism (4) are in the same axial direction;
the collimating lens (3) collimates the light beam of the fast axis and the slow axis of the semiconductor laser (1);
the polarization beam splitter prism (4) is arranged on a first sliding rail (7), and the first sliding rail (7) is used for adjusting the position of the polarization beam splitter prism (4) and measuring the polarization degree;
the power detection device (5) is used for acquiring the light power of the laser beam passing through the collimating lens (3) and the polarization beam splitting prism (4);
the scale adjusting plate (6) is arranged on a second sliding rail (8), and the second sliding rail (8) is used for adjusting the displacement of the scale adjusting plate (6) along the light path direction, so that the scale adjusting plate (6) is used for judging the directivity of the laser beam.
4. A semiconductor laser polarization testing system according to claim 3, wherein: the front cavity of the semiconductor laser (1) is positioned at the rotating center of the six-dimensional adjusting table (2) so as to ensure that the displacement of the semiconductor laser (1) is reduced to the minimum in the adjusting process.
5. The semiconductor laser polarization testing system of claim 4, wherein: the power detection device (5) is a power meter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210107446.9A CN114486200B (en) | 2022-01-28 | 2022-01-28 | Polarization testing method and system for semiconductor laser |
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| CN202210107446.9A CN114486200B (en) | 2022-01-28 | 2022-01-28 | Polarization testing method and system for semiconductor laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117723269A (en) * | 2023-11-21 | 2024-03-19 | 同济大学 | A method for Nd: polarization measuring system and method of YAG laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102435422B (en) * | 2011-09-22 | 2014-06-04 | 西安炬光科技有限公司 | Polarization test method and polarization test system of semiconductor laser |
| CN102435421B (en) * | 2011-09-22 | 2013-11-20 | 西安炬光科技有限公司 | Test method and test system for polarization of semiconductor laser |
| CN103528799B (en) * | 2013-10-24 | 2017-01-11 | 西安炬光科技有限公司 | Space polarization testing method and device for semiconductor laser device provided with multiple light emitting units |
| CN108508617A (en) * | 2017-02-24 | 2018-09-07 | 中国科学院半导体研究所 | Laser collimator apparatus and alignment method |
| CN208569110U (en) * | 2018-07-10 | 2019-03-01 | 福建海创光电有限公司 | A kind of semiconductor laser fiber coupling device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117723269A (en) * | 2023-11-21 | 2024-03-19 | 同济大学 | A method for Nd: polarization measuring system and method of YAG laser |
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