CN114485166A - Vacuum electron beam cold bed smelting furnace system for reducing evaporation coating - Google Patents
Vacuum electron beam cold bed smelting furnace system for reducing evaporation coating Download PDFInfo
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- CN114485166A CN114485166A CN202111520689.7A CN202111520689A CN114485166A CN 114485166 A CN114485166 A CN 114485166A CN 202111520689 A CN202111520689 A CN 202111520689A CN 114485166 A CN114485166 A CN 114485166A
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- evaporation material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/06—Crucible or pot furnaces heated electrically, e.g. induction crucible furnaces with or without any other source of heat
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/16—Remelting metals
- C22B9/22—Remelting metals with heating by wave energy or particle radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/0806—Charging or discharging devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/0806—Charging or discharging devices
- F27B2014/0812—Continuously charging
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum electron beam cold bed smelting furnace system, which comprises a smelting unit, a vacuum pumping unit and a pumped evaporation material unit, wherein the vacuum pumping unit is used for pumping evaporation materials; the smelting unit comprises an EB furnace body, and a casting crucible and a horizontal crucible are arranged in the EB furnace body; the vacuum pumping unit comprises a diffusion pump, and the EB furnace body is communicated with the diffusion pump through a vacuum pumping pipeline; the evaporation material pumping unit comprises a powder deposition cavity and a diffusion pump, the EB furnace body is communicated with the diffusion pump through an evaporation material pumping pipeline, and an inlet of the evaporation material pumping pipeline is arranged above the horizontal crucible; the evaporation material pumping pipeline comprises a plurality of sections, the axes directions of the adjacent sections are different, and the bottom of the joint of the adjacent sections is provided with a powder settling cavity. According to the invention, through the arrangement of the evaporation material extraction unit, impurities and evaporation materials generated by evaporation of raw materials are collected, so that the contact between the EB furnace body and the evaporation materials is greatly reduced, and the formation rate of an evaporation coating is greatly slowed down.
Description
Technical Field
The invention relates to a vacuum electron beam cold bed smelting furnace, in particular to a vacuum electron beam cold bed smelting furnace system for reducing an evaporation coating.
Background
A vacuum electron beam cold bed smelting furnace, also called EB smelting furnace, is an electric furnace which uses electrons moving at high speed to bombard materials under vacuum state to exchange energy so as to heat and melt the materials for casting and forming, and is mostly used in the smelting process of low-oxygen materials. The evaporation coating, also called slag, is the boiling point of individual impurities and raw materials reached in the process of melting and casting raw materials, so that the individual impurities and the raw materials are evaporated, a metal coating is formed in the EB furnace working chamber, the metal coating is easy to fall off to influence the quality of cast products, and the cooling effect of the EB furnace working chamber is influenced to cause abnormal equipment temperature.
In order to solve the above problems, the prior art has the following processing modes: after the EB furnace is used for working once, the EB furnace needs to be stopped in time, and the work enters an EB furnace working chamber manually for special cleaning. The method has the defects of production delay, easy pollution introduction, long time of the whole production process and great obstruction to the improvement of production capacity. In the prior art, a perfect and effective method for completely treating the problems is not available for a while.
Therefore, it is an urgent need to solve the technical problem of providing a technical means that can reduce the melting time of the vacuum electron beam cold hearth melting furnace, reduce the possibility of external pollution and improve the yield to the maximum extent.
Disclosure of Invention
The invention designs a vacuum electron beam cold bed smelting furnace system, which is used for overcoming the defects that evaporation coating affects the casting forming quality of materials and blocks the mass production of materials.
A vacuum electron beam cold bed smelting furnace system for reducing evaporation coating comprises a smelting unit, a vacuum pumping unit and an evaporation material pumping unit; the smelting unit comprises an EB furnace body, and a casting crucible and a horizontal crucible are arranged in the EB furnace body;
the vacuum pumping unit comprises a diffusion pump, and the EB furnace body is communicated with the diffusion pump through a vacuum pumping pipeline;
the evaporation material pumping unit comprises a powder deposition cavity and a diffusion pump, the EB furnace body is communicated with the diffusion pump through an evaporation material pumping pipeline, and an inlet of the evaporation material pumping pipeline is arranged above the horizontal crucible; the evaporation material pumping pipeline comprises a plurality of sections, the axes directions of the adjacent sections are different, and the bottom of the joint of the adjacent sections is provided with the powder sedimentation cavity.
Preferably, the evaporation material extraction pipeline is arranged in two sections.
Furthermore, the evaporation material pumping pipeline comprises a first pipeline and a second pipeline, the axis directions of the first pipeline and the second pipeline are vertical, and the bottom of the connecting part of the first pipeline and the second pipeline is provided with the powder sedimentation cavity.
Preferably, the inlet of the evaporation material extraction pipeline is provided with a grid.
Preferably, the working pressure of the diffusion pump is 1-1 x 10-6pa。
Preferably, the powder deposition chamber is detachably arranged at the bottom of the joint of the adjacent sections.
Preferably, a vacuum pumping port is arranged on the outer surface of one end of the EB furnace body, which is far away from the casting crucible, and is communicated with the vacuum pumping pipeline.
Preferably, the EB furnace body is positioned above the horizontal crucible and is provided with an evaporation material pumping port communicated with the evaporation material pumping pipeline.
By adopting the technical scheme, compared with the prior art, the invention has the following technical effects:
(1) according to research, impurities and raw materials are mainly concentrated above a horizontal crucible in an EB furnace body to be evaporated, so that an evaporation material pumping pipeline is provided, an inlet of the evaporation material pumping pipeline is positioned above the horizontal crucible, evaporation materials generated by the evaporation of the impurities and the raw materials are collected, the contact between the EB furnace body and the evaporation materials is greatly reduced, and the formation rate of an evaporation coating is greatly reduced.
(2) In the invention, because the coating is less and is not easy to fall off, the influence on the casting process is less, and the quality pollution in the production process is reduced.
(3) The invention greatly reduces the production process time, the original process time is limited by the difficulty of cleaning the plating layer, the best production process cycle time is 48 hours, and the current process cycle time is 24 hours; meanwhile, the process period is shortened, so that the conventional capacity is greatly improved. The half-year yield using the present invention is increased by 87% compared to the annual yield using the prior art.
(4) Reduce the damage of the working chamber of the EB furnace.
(5) When collecting the evaporation material that impurity and raw materials evaporation produced, in order to reduce the influence of dust to the diffusion pump, increase the life of diffusion pump, the pipeline segmentation setting is taken out to the dust, and the certain rotation angle of formation of adjacent section for the dust is collected at the junction, and the deposit is in the heavy powder chamber in bottom.
(6) The entrance of the evaporation material pumping pipeline is provided with a grid to prevent splashing and large objects from flying into the evaporation material pumping pipeline to damage the pipeline and the diffusion pump.
Drawings
FIG. 1 is a top view of a vacuum electron beam cold hearth furnace system for reducing evaporation coating in accordance with the present invention;
FIG. 2 is a left side view of a vacuum electron beam cold hearth melting furnace system with reduced evaporation coating in accordance with the present invention;
FIG. 3 is a front view of a vacuum electron beam cold hearth melting furnace system for reducing evaporation coating in accordance with the present invention;
the symbols in the drawings indicate the description:
1-casting crucible, 2-horizontal crucible, 3-powder deposition chamber, 4-diffusion pump, 5-vacuum pumping pipeline, 6-EB furnace body and 7-evaporation material pumping pipeline.
Detailed Description
The invention will be described in detail and with particular reference to the drawings, so that the invention may be better understood,
the invention provides a vacuum electron beam cold bed smelting furnace system for reducing evaporation coating, which comprises a smelting unit, a vacuum pumping unit and an evaporation material pumping unit, as shown in figures 1-3.
Specifically, the smelting unit comprises a casting crucible 1, a horizontal crucible 2 and an EB furnace body 6. A casting crucible 1 and a horizontal crucible 2 are arranged in the EB furnace body; the outer surface of one end of the EB furnace body 6, which is far away from the casting crucible 1, is provided with a vacuum-pumping port; the EB furnace body 6 is positioned above the horizontal crucible 2, preferably, not directly above the horizontal crucible 2, that is, the wall surface of the EB furnace body 6 positioned above the horizontal crucible 2 is provided with an evaporation material extraction opening.
The vacuum pumping unit comprises a diffusion pump 4, and the EB furnace body 6 is communicated with the diffusion pump 4 through a vacuum pumping pipeline 5; one end of the vacuum pumping pipeline 5 is communicated with the vacuum pumping port, and the other end is communicated with the diffusion pump 4.
The evaporation material pumping unit comprises a powder deposition cavity 3 and a diffusion pump 4, an EB furnace body 6 is communicated with the diffusion pump 4 through an evaporation material pumping pipeline 7, one end (namely an inlet) of the evaporation material pumping pipeline 7 is communicated with an evaporation material pumping opening and is positioned above the horizontal crucible 2, and the other end of the evaporation material pumping pipeline 7 is communicated with the diffusion pump 4; the evaporation material pumping pipeline 7 comprises a plurality of sections, the axes directions of the adjacent sections are different, so that the adjacent sections form a certain rotation angle, the bottom of the joint of the adjacent sections is provided with the powder settling cavity 3, and dust is collected at the joint of the adjacent sections and deposited in the powder settling cavity 3 at the bottom.
According to the invention, through the arrangement of the evaporation material extraction unit, the inlet of the evaporation material is positioned above the horizontal crucible, and the evaporation material generated by evaporation of impurities and raw materials is collected, so that the contact between the EB furnace body and the evaporation material is greatly reduced, and the formation rate of an evaporation coating is greatly slowed down. Because the plating coat is less, be difficult for dropping, influence in the casting process is less, reduces the quality pollution in the production process. Meanwhile, the production process time is greatly reduced, the original process time is limited by the difficulty of cleaning the plating layer, the best production process cycle time is 48 hours, and the current process cycle time is 24 hours; due to the shortened process cycle, the prior capacity is greatly improved.
In a preferred embodiment, as shown in fig. 1-3, the evaporation material withdrawal line 7 is provided in two sections. The evaporation material pumping pipeline 7 comprises a first pipeline and a second pipeline, the axis directions of the first pipeline and the second pipeline are vertical, and the bottom of the connecting part of the first pipeline 71 and the second pipeline 72 is provided with a powder deposition cavity 3.
In another preferred embodiment, the sections of the evaporation material withdrawal line 7 are not at the same level. For example, the lower surface of the first pipe and the second pipe connection end and the upper surface of the second pipe communicate; alternatively, the first pipe and the second pipe are obliquely arranged.
In a preferred embodiment, the inlet of the evaporation material withdrawal conduit 7 is provided with a grid. Prevent splashing and flying of large objects to damage the pipeline and the diffusion pump 4.
In one specific embodiment, the working pressure of the diffusion pump 4 is 1-1 × 10-6pa。
In a preferred embodiment, the settling chamber 3 is removably arranged at the bottom of the junction of adjacent segments. The powder can be discharged detachably, the operation is convenient and fast, the influence of dust on the diffusion pump is reduced, and the service life of the diffusion pump is prolonged.
The present invention will be described in detail and specifically with reference to the following examples to facilitate better understanding of the present invention, but the following examples do not limit the scope of the present invention.
Example 1
As shown in fig. 1 to 3, the present embodiment provides a vacuum electron beam cold hearth melting furnace system for reducing evaporation coating, which includes a melting unit, a vacuum pumping unit and an evaporation material pumping unit.
Specifically, the smelting unit comprises a casting crucible 1, a horizontal crucible 2 and an EB furnace body 6. A casting crucible 1 and a horizontal crucible 2 are arranged in the EB furnace body; a vacuum pumping port is arranged on the outer surface of one end of the EB furnace body 6 far away from the casting crucible 1; an evaporation material pumping opening is arranged on the wall surface of one side of the EB furnace body 6, which is positioned above the horizontal crucible 2 and close to the diffusion pump 4.
The vacuum pumping unit comprises a diffusion pump 4, and the EB furnace body 6 is communicated with the diffusion pump 4 through a vacuum pumping pipeline 5; one end of the vacuum pumping pipeline 5 is communicated with the vacuum pumping port, and the other end is communicated with the diffusion pump 4.
The evaporation material pumping unit comprises a powder deposition cavity 3 and a diffusion pump 4, an EB furnace body 6 is communicated with the diffusion pump 4 through an evaporation material pumping pipeline 7, one end (namely an inlet) of the evaporation material pumping pipeline 7 is communicated with an evaporation material pumping opening and is positioned above the horizontal crucible 2, and the other end of the evaporation material pumping pipeline 7 is communicated with the diffusion pump 4.
In this embodiment, as shown in fig. 1 to 3, the evaporation material withdrawal pipe 7 is provided in two stages. The evaporation material pumping pipeline 7 comprises a first pipeline and a second pipeline, the axis directions of the first pipeline and the second pipeline are vertical, and the bottom of the connecting part of the first pipeline 71 and the second pipeline 72 is provided with a powder deposition cavity 3.
In this embodiment, the inlet of the evaporation material pumping pipeline 7 is provided with a grid. Prevent splashing and flying of large objects to damage the pipeline and the diffusion pump 4.
In this embodiment, the working pressure of the diffusion pump 4 is 1 to 1X 10-6 Pa.
In this embodiment, the powder sedimentation chamber 3 is detachably provided at the bottom of the junction of the adjacent sections. Can dismantle the row powder, convenient and fast reduces the influence of dust to the diffusion pump, increases the life of diffusion pump.
By adopting the vacuum electron beam cold bed smelting furnace system provided by the embodiment, the half-year yield is improved by 87% compared with the annual yield of the prior art.
The embodiments of the present invention have been described in detail, but the embodiments are merely examples, and the present invention is not limited to the embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, equivalent changes and modifications made without departing from the spirit and scope of the present invention should be covered by the present invention.
Claims (8)
1. A vacuum electron beam cold bed smelting furnace system for reducing an evaporation coating is characterized by comprising a smelting unit, a vacuum air extraction unit and an evaporation material extraction unit; the smelting unit comprises an EB furnace body (6), and a casting crucible (1) and a horizontal crucible (2) are arranged in the EB furnace body;
the vacuum pumping unit comprises a diffusion pump (4), and the EB furnace body (6) is communicated with the diffusion pump (4) through a vacuum pumping pipeline (5);
the evaporation material pumping unit comprises a powder deposition cavity (3) and a diffusion pump (4), the EB furnace body (6) is communicated with the diffusion pump (4) through an evaporation material pumping pipeline (7), and an inlet of the evaporation material pumping pipeline (7) is arranged above the horizontal crucible (2); the evaporation material pumping pipeline (7) comprises a plurality of sections, the axes directions of the adjacent sections are different, and the bottom of the joint of the adjacent sections is provided with the powder sedimentation cavity (3).
2. The vacuum electron beam cold bed smelting furnace system according to claim 1, characterized in that the evaporation material withdrawal conduit (7) is provided in two sections.
3. The vacuum electron beam cold hearth melting furnace system according to claim 2, wherein said evaporation material pumping duct (7) comprises a first duct and a second duct, the axial direction of said first duct and said second duct is vertical, and said powder deposition chamber (3) is provided at the bottom of the connection portion of said first duct and said second duct.
4. The vacuum electron beam cold bed smelting furnace system according to claim 1, characterized in that the inlet of the evaporation material withdrawal conduit (7) is provided with a grid.
5. The vacuum electron beam cold hearth melting furnace system according to claim 1, wherein said diffusion pump (4) has an operating pressure of 1 to 1 x 10-6pa。
6. The vacuum electron beam cold hearth melting furnace system according to claim 1, wherein said powder deposition chamber (3) is removably arranged at the bottom of the junction of adjacent sections.
7. The vacuum electron beam cold bed smelting furnace system according to claim 1, characterized in that on the outer surface of the end of the EB furnace body (6) remote from the casting crucible (1), there is a vacuum pumping port communicating with the vacuum pumping duct (5).
8. The vacuum electron beam cold bed smelting furnace system according to claim 1, wherein an evaporation material pumping port is provided above the horizontal crucible (2) in the EB furnace body (6) and communicated with the evaporation material pumping pipeline (7).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111520689.7A CN114485166A (en) | 2021-12-13 | 2021-12-13 | Vacuum electron beam cold bed smelting furnace system for reducing evaporation coating |
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| CN202111520689.7A CN114485166A (en) | 2021-12-13 | 2021-12-13 | Vacuum electron beam cold bed smelting furnace system for reducing evaporation coating |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2002029727A (en) * | 2000-07-21 | 2002-01-29 | High Frequency Heattreat Co Ltd | Process and device for producing silicon for solar cell |
| US20080105400A1 (en) * | 2005-01-25 | 2008-05-08 | Takeshi Shiraki | Apparatus For Melting Metal By Electron Beams And Process For Producing High-Melting Metal Ingot Using This Apparatus |
| CN102448881A (en) * | 2009-04-27 | 2012-05-09 | 优慕科技术股份有限公司 | Silicon refining method and refining device |
| CN102564123A (en) * | 2010-12-29 | 2012-07-11 | 北京有色金属研究总院 | Electron beam smelting furnace |
| CN203203393U (en) * | 2013-03-14 | 2013-09-18 | 青海聚能钛业有限公司 | Novel electronic beam vacuum melting furnace |
| CN108070724A (en) * | 2016-11-18 | 2018-05-25 | 宁波创润新材料有限公司 | The method of smelting of method for mixing and ingot casting |
| CN110057195A (en) * | 2019-05-21 | 2019-07-26 | 广西铟泰科技有限公司 | Vaccum sensitive stove |
| CN209412284U (en) * | 2018-12-28 | 2019-09-20 | 云南钛业股份有限公司 | A kind of vacuum electron beam melting titanium ingot device |
-
2021
- 2021-12-13 CN CN202111520689.7A patent/CN114485166A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002029727A (en) * | 2000-07-21 | 2002-01-29 | High Frequency Heattreat Co Ltd | Process and device for producing silicon for solar cell |
| US20080105400A1 (en) * | 2005-01-25 | 2008-05-08 | Takeshi Shiraki | Apparatus For Melting Metal By Electron Beams And Process For Producing High-Melting Metal Ingot Using This Apparatus |
| CN102448881A (en) * | 2009-04-27 | 2012-05-09 | 优慕科技术股份有限公司 | Silicon refining method and refining device |
| CN102564123A (en) * | 2010-12-29 | 2012-07-11 | 北京有色金属研究总院 | Electron beam smelting furnace |
| CN203203393U (en) * | 2013-03-14 | 2013-09-18 | 青海聚能钛业有限公司 | Novel electronic beam vacuum melting furnace |
| CN108070724A (en) * | 2016-11-18 | 2018-05-25 | 宁波创润新材料有限公司 | The method of smelting of method for mixing and ingot casting |
| CN209412284U (en) * | 2018-12-28 | 2019-09-20 | 云南钛业股份有限公司 | A kind of vacuum electron beam melting titanium ingot device |
| CN110057195A (en) * | 2019-05-21 | 2019-07-26 | 广西铟泰科技有限公司 | Vaccum sensitive stove |
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