CN114384526A - Ultrasonic sensing device and assembly - Google Patents
Ultrasonic sensing device and assembly Download PDFInfo
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- CN114384526A CN114384526A CN202011340518.1A CN202011340518A CN114384526A CN 114384526 A CN114384526 A CN 114384526A CN 202011340518 A CN202011340518 A CN 202011340518A CN 114384526 A CN114384526 A CN 114384526A
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- ultrasonic sensing
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- 230000026683 transduction Effects 0.000 claims abstract description 17
- 238000010361 transduction Methods 0.000 claims abstract description 17
- 239000003990 capacitor Substances 0.000 claims description 21
- 230000002463 transducing effect Effects 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
- G01S15/06—Systems determining the position data of a target
- G01S15/08—Systems for measuring distance only
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
An ultrasonic sensing device, comprising: a signal generating/receiving circuit, a piezoelectric transducer unit and an inductor. The signal generating/receiving circuit has a transmitting end, a receiving end and a sharing end. The piezoelectric transduction unit has a first end and a second end. The inductor is provided with a third end and a fourth end, wherein the third end is electrically connected with the transmitting end of the signal generating/receiving circuit, and the fourth end is electrically connected with the first end of the piezoelectric transduction unit. Furthermore, the receiving end of the signal generating/receiving circuit is electrically connected between the first end of the piezoelectric transduction unit and the inductor, and the sharing end of the signal generating/receiving circuit is electrically connected with the second end of the piezoelectric transduction unit.
Description
[ technical field ] A method for producing a semiconductor device
The present invention relates to an ultrasonic sensing device, and more particularly, to an ultrasonic sensing device and an ultrasonic sensing device using a passive component to perform impedance matching, so as to increase the amplitude of an echo voltage.
[ background of the invention ]
Generally, an ultrasonic sensing device is used for distance measurement, wherein the ultrasonic sensing device firstly transmits an ultrasonic wave through a piezoelectric transducer unit, and the ultrasonic wave forms a reflected wave after colliding with an obstacle. By measuring the time difference between the transmitted and received ultrasonic waves, the distance between the ultrasonic sensing device and the obstacle can be obtained. In the detection process, the piezoelectric transducer unit converts the reflected wave into an echo voltage, so as to determine the time point of receiving the reflected wave. In order to ensure that the amplitude of the echo voltage has a certain magnitude, so as to obtain a reliable distance measurement result, the echo voltage is generally amplified by a signal amplifying circuit, which, however, increases the size and power consumption of the ultrasonic sensing device.
[ summary of the invention ]
In view of the above, the present invention provides a novel ultrasonic sensing device and a structure of an ultrasonic sensing device unit, which can effectively reduce the size and power consumption and further reduce the manufacturing cost compared to the conventional ultrasonic sensing device. In the ultrasonic sensing device and the ultrasonic sensing device unit of the invention, the driving voltage input point and the echo voltage output point of the piezoelectric transduction unit are different, and an inductor is also arranged between the two end points, thereby providing a certain impedance matching effect and improving the amplitude of the echo voltage. In addition, in the embodiments of the present invention, a filter network composed of different passive components is also provided, so as to improve the signal-to-noise ratio of the echo voltage. The structure of the invention effectively increases the amplitude of the echo voltage, so that the use of a signal amplifying circuit can be omitted, thereby reducing the size of the ultrasonic sensing device, reducing the power consumption and further reducing the manufacturing cost. In addition, since the amplitude of the echo voltage is increased, the present invention indirectly increases the effective measurement distance of the ultrasonic sensing device and reduces the requirement for the amplitude of the driving voltage.
An embodiment of the present invention provides an ultrasonic sensing apparatus, including: a signal generating/receiving circuit, a piezoelectric transducer unit and an inductor. The signal generating/receiving circuit has a transmitting end, a receiving end and a sharing end. The piezoelectric transduction unit has a first end and a second end. The inductor is provided with a third end and a fourth end, wherein the third end is electrically connected with the transmitting end of the signal generating/receiving circuit, and the fourth end is electrically connected with the first end of the piezoelectric transduction unit. Furthermore, the receiving end of the signal generating/receiving circuit is electrically connected between the first end of the piezoelectric transduction unit and the inductor, and the sharing end of the signal generating/receiving circuit is electrically connected with the second end of the piezoelectric transduction unit.
An embodiment of the present invention provides an ultrasonic sensing unit, which is electrically connected to a signal generating/receiving circuit. The ultrasonic sensing assembly comprises: a piezoelectric transducing unit and an inductor. The piezoelectric transduction unit has a first end and a second end. The inductor has a third end and a fourth end, wherein the third end is electrically connected to a transmitting end of the signal generating/receiving circuit, and the fourth end is electrically connected to the first end of the piezoelectric transducer unit. Furthermore, a receiving terminal of the signal generating/receiving circuit is electrically connected between the first terminal of the piezoelectric transducing unit and the inductor, and a sharing terminal of the signal generating/receiving circuit is electrically connected to the second terminal of the piezoelectric transducing unit.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of an ultrasonic sensing device according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of an ultrasonic sensing device according to another embodiment of the invention.
Fig. 3 is a schematic structural diagram of an ultrasonic sensing device according to an embodiment of the invention.
Fig. 4 is a schematic structural diagram of an ultrasonic sensing device according to another embodiment of the invention.
[ detailed description ] embodiments
In the following description, numerous specific details are set forth in order to provide a thorough understanding of embodiments of the invention to the reader. However, those skilled in the art will understand how to implement the invention without one or more of the specific details, or with other methods or components or materials, etc. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of the invention.
Reference in the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the invention. Thus, appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics described above may be combined in any suitable manner in one or more embodiments.
Please refer to fig. 1, which is a schematic diagram of an ultrasonic sensing apparatus according to an embodiment of the present invention. As shown, the ultrasonic sensing device 100 includes: a signal generating/receiving circuit 110, a piezoelectric transducer unit 120 and an inductor 130. The piezoelectric transducer unit 120 is used for performing piezoelectric conversion to generate an ultrasonic wave based on a driving voltage or generate an echo voltage according to a reflected wave. The signal generating/receiving circuit 110 has a transmitting end TE, a receiving end RE and a common end CE, and is configured to provide the driving voltage through the transmitting end TE so that the piezoelectric transducer unit 120 generates the ultrasonic wave, or receive the echo voltage generated by the piezoelectric transducer unit 120 through the receiving end RE. The piezoelectric transducer unit 120 has a first end 121 and a second end 122, and the inductor 130 has a third end 131 and a fourth end 131.
The third terminal 131 of the inductor 130 is electrically connected to the transmitting terminal TE of the signal generating/receiving circuit 110 for receiving the driving voltage, and the fourth terminal 132 of the inductor 130 is electrically connected to the first terminal 121 of the piezoelectric transducer unit 120. Furthermore, the receiving end RE of the signal generating/receiving circuit 110 is electrically connected between the first end 121 of the piezoelectric transducer unit 120 and the inductor 130 for receiving the echo voltage. In addition, the common terminal CE of the signal generating/receiving circuit 110 is electrically connected to the second terminal of the piezoelectric transducing unit 120. Since the signal generating/receiving circuit 110 provides the driving voltage to the piezoelectric transducer unit 120, so that the ultrasonic wave is generated through the third terminal 131 of the inductor 130, and the echo voltage generated by the piezoelectric transducer unit 120 is received through the fourth terminal 132 of the inductor 130, and the inductor 130 before the two terminals provides a certain impedance matching effect, the signal generating/receiving circuit 110 can obtain a higher echo voltage.
In various embodiments of the present invention, the inductor 130 may be packagedIs disposed in the piezoelectric transducer unit 120 or integrated on the circuit board of the signal generating/receiving circuit 110, and the inductance L of the inductor 130 can be determined according to the resonant frequency fs of the piezoelectric transducer unit 120. Further, the piezoelectric transducing unit 120 has a resonant frequency of
Wherein L is the inductance of the inductor 130, and C is the capacitance of the piezoelectric transducing unit 120 itself, so that the inductance L of the inductor 130 can be selected by fixing the capacitance C and the resonant frequency fs.
In addition, in an embodiment, the ultrasonic sensing device 100 may further include a capacitor 140, and the capacitor 140 is connected in parallel with the piezoelectric transducer unit 120. The capacitance C of the capacitor 140 can be determined according to the equivalent capacitance of the piezoelectric transducer unit 120, the resonant frequency fs of the piezoelectric transducer unit 120, and the inductance L of the inductor 130. Since the inductor 130 and the capacitor 140 may form a filter network, the noise resistance of the system may be improved, and the signal-to-noise ratio of the echo voltage may be improved. Furthermore, in another embodiment of the present invention, the ultrasonic sensing apparatus 100 may further include a resistor 150, and the resistor 150 is connected in parallel with the piezoelectric transducer unit 120. The arrangement of the resistor 150 contributes to further increase of the amplitude of the echo voltage.
It should be noted that although the capacitor 140 and the resistor 150 are illustrated in fig. 1, in many embodiments of the present invention, the ultrasonic sensing device 100 may include only one of the capacitor 140 and the resistor 150. In other words, the passive components included in the ultrasonic sensing device 100 may have the following combinations:
1) inductor 130, capacitor 140, and resistor 150;
2) an inductor 130 and a capacitor 140;
3) an inductor 130 and a resistor 150;
4) an inductor 130.
In the ultrasonic sensing device of fig. 2 according to another embodiment of the present invention, the receiving terminal RE of the signal generating/receiving circuit 110 may be electrically connected to the third terminal 131 of the inductor 130, rather than electrically connected between the first terminal 121 of the piezoelectric transducer unit 120 and the inductor 130. Although the receiving terminal RE of the signal generating/receiving circuit 110 and the transmitting terminal TE are connected to the same terminal, i.e. the third terminal 131 of the inductor 130 in the present embodiment, the amplitude of the echo voltage can be increased by the impedance matching effect provided by the inductor 130.
The present invention also provides an ultrasonic sensing device assembly, please refer to the diagram of fig. 3. As shown, the ultrasonic sensing assembly 200 includes: a piezoelectric transducer element 220 and an inductor 230. The ultrasonic sensing device 200 is electrically connected to the signal generating/receiving circuit 110. The piezoelectric transducer unit 220 is used for performing piezoelectric conversion to generate an ultrasonic wave based on a driving voltage or generate an echo voltage according to a reflected wave. The signal generating/receiving circuit 110 has a transmitting end TE, a receiving end RE and a common end CE, and is configured to provide the driving voltage through the transmitting end TE so that the piezoelectric transducer unit 220 generates the ultrasonic wave, or receive the echo voltage generated by the piezoelectric transducer unit 220 through the receiving end RE. The piezoelectric transducing unit 220 has a first terminal 221 and a second terminal 222, and the inductor 230 has a third terminal 231 and a fourth terminal 231.
The third terminal 231 of the inductor 230 is electrically connected to the transmitting terminal TE of the signal generating/receiving circuit 110 for receiving the driving voltage, and the fourth terminal 232 of the inductor 230 is electrically connected to the first terminal 221 of the piezoelectric transducer unit 220. Furthermore, the receiving end RE of the signal generating/receiving circuit 110 is electrically connected between the first end 221 of the piezoelectric transducer unit 220 and the inductor 230 for receiving the echo voltage. In addition, the common terminal CE of the signal generating/receiving circuit 110 is electrically connected to the second terminal of the piezoelectric transducing unit 220. Since the signal generating/receiving circuit 110 provides the driving voltage to the piezoelectric transducer unit 220, so that the ultrasonic wave is generated through the third terminal 231 of the inductor 230, and the echo voltage generated by the piezoelectric transducer unit 220 is received through the fourth terminal 232 of the inductor 230, and the inductor 230 between the two terminals provides a certain impedance matching effect, the ultrasonic sensing device assembly 200 can enable the signal generating/receiving circuit 110 to measure a higher echo voltage.
In various embodiments of the present invention, the inductor 230 may be disposed in the piezoelectric transducer unit 220 through packaging techniques, or may be integrated on a circuit board of the signal generating/receiving circuit 110, and the inductance L of the inductor 230 may be determined according to the resonant frequency fs of the piezoelectric transducer unit 220. Further, the piezoelectric transducing unit 220 has a resonant frequency of
Where L is the inductance of the inductor 130 and C is the capacitance of the piezoelectric transducing unit 220 itself, so the inductance L of the inductor 230 can be selected by fixing the capacitance C and the resonant frequency fs.
In addition, in an embodiment, the ultrasonic sensing unit 200 may further include a capacitor 240, and the capacitor 240 is connected in parallel with the piezoelectric transducer unit 220. The capacitance C of the capacitor 240 may be determined according to the equivalent capacitance of the piezoelectric transducer unit 220, the resonant frequency fs of the piezoelectric transducer unit 220, and the inductance L of the inductor 230. Since the inductor 230 and the capacitor 240 may form a filter network, the noise immunity of the system may be improved, and the signal-to-noise ratio of the echo voltage may be improved. Furthermore, in another embodiment of the present invention, the ultrasonic sensing unit 200 may further include a resistor 250, and the resistor 250 is connected in parallel with the piezoelectric transducer unit 220. The arrangement of the resistor 250 contributes to further increase of the amplitude of the echo voltage.
It should be noted that although the capacitor 240 and the resistor 250 are illustrated in fig. 3, in many embodiments of the present invention, the ultrasonic sensing unit 200 may include only one of the capacitor 240 and the resistor 250. In other words, the passive components included in the ultrasonic sensing unit 200 may have the following combinations:
1) inductor 230, capacitor 240, and resistor 250;
2) an inductor 230 and a capacitor 240;
3) an inductor 230 and a resistor 250;
4) an inductor 230.
In the ultrasonic sensing device of fig. 4 according to another embodiment of the present invention, the receiving terminal RE of the signal generating/receiving circuit 110 may be electrically connected to the third terminal 231 of the inductor 230, rather than electrically connected between the first terminal 221 of the piezoelectric transducer unit 220 and the inductor 230. Although the receiving terminal RE of the signal generating/receiving circuit 110 and the transmitting terminal TE are connected to the same terminal, i.e. the third terminal 231 of the inductor 230 in the present embodiment, the amplitude of the echo voltage can be increased by the impedance matching effect provided by the inductor 230.
In summary, the ultrasonic sensing apparatus and the ultrasonic sensing unit structure provided by the present invention can allow the signal generating/receiving circuit to detect a higher echo voltage, so as to ensure that the echo voltage has a certain amplitude, thereby obtaining many advantages. First, under the condition that the magnitude of the driving voltage provided by the signal generating/receiving circuit is not changed, the echo voltage with higher amplitude can be detected, which is substantially equivalent to increasing the available detection distance of the ultrasonic sensing device and the ultrasonic sensing unit. On the other hand, if the usable detection distance of the ultrasonic sensing device and the ultrasonic sensing unit does not need to be increased, the driving voltage can be reduced, so that the power consumption of the ultrasonic sensing device and the ultrasonic sensing unit is reduced. In addition, because the size of the piezoelectric transduction unit is positively correlated with the size of the echo voltage, under the framework of the invention, even if the piezoelectric transduction unit with smaller size is used, the amplitude of the echo voltage can still be ensured to have a certain size. Finally, the structure of the invention ensures the amplitude of the echo voltage, so the arrangement of a signal amplifying circuit can be omitted as required. In summary, the architecture provided by the present invention is helpful for realizing the ultrasonic sensing device and the ultrasonic sensing unit with long detection distance, small size and low power consumption.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made within the scope of the claims of the present invention should be covered by the present invention.
[ notation ] to show
100 ultrasonic sensing device
110 signal generating/receiving circuit
120. 220 piezoelectric transduction unit
130. 230 inductor
140. 240 capacitor
150. 250 resistance
200 ultrasonic sensing assembly
121. 122, 221, 222, 131, 132, 231, 232, RE, TE, CE component endpoints
Claims (10)
1. An ultrasonic sensing device, comprising:
a signal generating/receiving circuit having a transmitting end, a receiving end and a sharing end;
a piezoelectric transduction unit having a first end and a second end; and
an inductor having a third end and a fourth end, the third end being electrically connected to the transmitting end of the signal generating/receiving circuit, and the fourth end being electrically connected to the first end of the piezoelectric transducer unit;
the receiving end of the signal generating/receiving circuit is electrically connected between the first end of the piezoelectric transduction unit and the inductor, and the sharing end of the signal generating/receiving circuit is electrically connected with the second end of the piezoelectric transduction unit.
2. The ultrasonic sensing device according to claim 1, wherein an inductance value of the inductor is determined according to a resonant frequency of the piezoelectric transducer unit.
3. The ultrasonic sensing device according to claim 1, wherein the ultrasonic sensing device further comprises a capacitor connected in parallel with the piezoelectric transducing unit.
4. The ultrasonic sensing device according to claim 3, wherein a capacitance of the capacitor is determined according to a resonant frequency of the piezoelectric transducing unit and an inductance of the inductor.
5. The ultrasonic sensing device according to claim 3, wherein the ultrasonic sensing device further comprises a resistor connected in parallel with the piezoelectric transducing element.
6. An ultrasonic sensing device assembly for electrically connecting to a signal generating/receiving circuit, the ultrasonic sensing assembly comprising:
a piezoelectric transduction unit having a first end and a second end; and
an inductor having a third end and a fourth end, wherein the third end is electrically connected to a transmitting end of the signal generating/receiving circuit, and the fourth end is electrically connected to the first end of the piezoelectric transducer unit;
wherein a receiving terminal of the signal generating/receiving circuit is electrically connected between the first terminal of the piezoelectric transducing unit and the inductor, and a common terminal of the signal generating/receiving circuit is electrically connected to the second terminal of the piezoelectric transducing unit.
7. The ultrasonic sensing device of claim 6, wherein an inductance of the inductor is determined according to a resonant frequency of the piezoelectric transducer unit.
8. The ultrasonic sensing device of claim 1, wherein the ultrasonic sensing apparatus further comprises a capacitor connected in parallel with the piezoelectric transducer element.
9. The ultrasonic sensing device of claim 8, wherein a capacitance of the capacitor is determined according to a resonant frequency of the piezoelectric transducer unit and an inductance of the inductor.
10. The ultrasonic sensing device of claim 9, wherein the ultrasonic sensing apparatus further comprises a resistor connected in parallel with the piezoelectric transducer unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW109136451A TWI741846B (en) | 2020-10-21 | 2020-10-21 | Ultrasonic sensing device and component |
| TW109136451 | 2020-10-21 |
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| Publication Number | Publication Date |
|---|---|
| CN114384526A true CN114384526A (en) | 2022-04-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011340518.1A Pending CN114384526A (en) | 2020-10-21 | 2020-11-23 | Ultrasonic sensing device and assembly |
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| CN (1) | CN114384526A (en) |
| TW (1) | TWI741846B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010006293A2 (en) * | 2008-07-10 | 2010-01-14 | Cornell University | Ultrasound wave generating apparatus |
| CN104272135B (en) * | 2012-05-07 | 2016-08-24 | 株式会社村田制作所 | ultrasonic sensor drive circuit |
| US11641168B2 (en) * | 2017-07-17 | 2023-05-02 | Georgia Tech Research Corporation | Parametric resonator for electrical transduction |
| EP3482835A1 (en) * | 2017-11-14 | 2019-05-15 | Koninklijke Philips N.V. | Capacitive micro-machined ultrasound transducer (cmut) devices and control methods |
| JP2021527361A (en) * | 2018-06-19 | 2021-10-11 | バタフライ ネットワーク，インコーポレイテッド | Equipment containing capacitive microfabrication ultrasonic transducers directly coupled to analog-to-digital converters |
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- 2020-10-21 TW TW109136451A patent/TWI741846B/en active
- 2020-11-23 CN CN202011340518.1A patent/CN114384526A/en active Pending
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| TW202217356A (en) | 2022-05-01 |
| TWI741846B (en) | 2021-10-01 |
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