CN100365840C - Plane-type compound structure supersonic transducer - Google Patents
Plane-type compound structure supersonic transducer Download PDFInfo
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- CN100365840C CN100365840C CNB2005101226487A CN200510122648A CN100365840C CN 100365840 C CN100365840 C CN 100365840C CN B2005101226487 A CNB2005101226487 A CN B2005101226487A CN 200510122648 A CN200510122648 A CN 200510122648A CN 100365840 C CN100365840 C CN 100365840C
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- pzt
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- matching layer
- pvdf
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Abstract
The present invention relates to an ultrasonic transducer with a planar composite structure. A PZT piezoelectric material is used for emitting supersonic waves. PVDF is adopted for receiving echoed signals. An ultrasonic transducer adopts a multilayer structure. Firstly, a second matching layer material is arranged on a back lining; a PZT piezoelectric transducer is arranged on the second matching layer material; secondly, a first matching layer material is arranged; a PVDF piezoelectric transducer is arranged on the first matching layer material, or a PVDF piezoelectric transducer is directly used as a first matching layer material; the back lining material is an epoxide material to which tungsten power is added. In the present invention, two piezoelectric materials are adopted, which fully exerts the advantages of both materials during emission and reception. An emission part and a reception part are separated, which can avoid the interference of emission and reception. A PZT matching layer can be substituted by a PVDF layer, which can simplifies design.
Description
One, technical field
The present invention relates to a kind of new structure of ultrasonic transducer, especially relate to and adopt two kinds of plane-type compound structure supersonic transducers that piezoelectric is made.
Two, background technology
Along with the development of ultrasound medicine, ultrasonic imaging is more and more causing people's interest.Compare with X ray, hyperacoustic great advantage just is the non-invasi to human body.One of key of ultrasonic imaging is exactly a ultrasonic transducer, is generally the single structure that is to use a kind of piezoelectric as the transducer of usefulness, not only as emission but also as receiving ultrasonic wave.Though the transducer of this structure is made simple, because the limitation of piezoelectric characteristic makes that the overall performance of transducer is very unoutstanding.Two kinds of materials of the general use of the transducer of making at present, first PZT (Lead-Zirconate-Titanate, lead zirconate titanate) material, PZT has high electromechanical coupling factor, the ultrasonic transducer of making of it has lower input power loss, is a kind of good emission type piezoelectric.But because the acoustic impedance of PZT material is generally bigger, with the coupling of coupling liquid (normally water) be not fine, the coda wave that echoes during reception is more, is unfavorable for extraction and analysis to signal.Other has a kind of PVDF of being to use (Polyvinylidene difluoride, polyvinylidene fluoride) material, PVDF are a kind of macromolecule piezoelectric polymer material, and this elastic properties of materials rigidity is little, mechanical damping is big, acoustic impedance obtains coupling preferably easily near the acoustic signature impedance of tissue, and its permittivity is low simultaneously, also be easy to and electric output loop coupling, coda wave is few during reception, thereby is a kind of good reception type piezoelectric, but that the weak point of PVDF material is a transmitting sensitivity is very low.
The basic concepts of relevant sign ultrasonic transducer performance:
Near operating frequency: the mechanical resonance frequency of finger transducer.
Electromechanical coupling factor: the ratio of the mechanical energy of storage and the gross energy of obtaining from power supply.
Receiving sensitivity: output voltage and the ratio of importing stress.
The input power loss: the input power loss of transducer is the power that obtains of water load and the ratio of the maximum power of the output of power supply.
Bandwidth: the frequency of maximum power drop by half poor.
The transducer that uses a kind of piezoelectric to make exists some shortcomings: PZT piezoelectric acoustic impedance and water (human body) differ greatly, and the hangover of echo-signal is long, and bandwidth is little.PVDF piezoelectric piezoelectric voltage constant height exceeds 20 times than PZT piezoelectricity reception type pottery; Light weight, its density has only 1/4th of PZT, and is soft good not crisp not broken, the mechanical strength height; Frequency response is wide, and vibration mode is simple; Acoustic impedance and water (human body) are approaching, and shortcoming is that piezoelectric strain constant is little.
At the design of ultrasonic transducer, some improvement projects are arranged also now:
In order to improve the performance of ultrasonic transducer, existing scheme mainly improves by improving modes such as matching Problems in Ultrasonic Transducer layer, backing, but because the limitation of material aspect makes that the overall performance of transducer is not very superior.Another approach is to adopt new material, and what adopted is the piezoelectric ceramic of homogeneous texture in the past, has occurred phenomenon troubling, slower development at present.Meanwhile, a kind of heterogeneous material with good piezoelectric property occurs, and basic principle is that piezoelectric ceramic is connected with organic polymer, obtains piezo-electricity composite material.Though piezo-electricity composite material can improve the performance of ultrasonic transducer, it still is in the starting stage, also has many problems also not to be well solved.Conventional Ultrasonic-B probe is not only launched but also echo is carried out signals collecting with PZT.
Three, summary of the invention
The present invention seeks to: propose a kind of ultrasonic transducer of novel composite construction, use two kinds of piezoelectric-piezoelectric ceramic PZT and piezoelectric membrane PVDF in same transducer, PZT is used for emission, and PVDF is used for receiving; Adopt two kinds of piezoelectrics to improve the performance of transducer, performance PZT material and PVDF material be the advantage aspect transmitting and receiving respectively, makes ultrasonic transducer not only have little input power loss, and has short relatively echo.
Technical scheme of the present invention: in the design of ultrasonic transducer, adopt sandwich construction (Fig. 1), adopt the PZT piezoelectric to launch ultrasonic wave, and adopting PVDF to receive echo-signal: concrete structure is: be provided with the second matching layer material on backing earlier, on the second matching layer material, be provided with the PZT PZT (piezoelectric transducer), and then be provided with the first matching layer material, on the first matching layer material, be provided with the PVDF PZT (piezoelectric transducer).
The selection of described back lining materials is that epoxy material adds tungsten powder: gauge scope: 1.00-4.00
The selection of the second matching layer material is an epoxy material: gauge scope: 0.50-1.00
The selection of the first matching layer material is glass or elastomeric material or directly adopts the PVDF PZT (piezoelectric transducer) as the first matching layer material: gauge scope: 0.20-0.40
The size range of PZT PZT (piezoelectric transducer) thickness is: 0.80-2.00
The size range of PVDF PZT (piezoelectric transducer) thickness is: 0.05-0.30, the unit of size are millimeter.
When emission, with PZT piezoelectric emission ultrasonic wave, the PVDF layer can improve the emission effciency of transducer as matching layer, adds one deck back lining materials in the PZT rear end simultaneously, improves the bandwidth of transducer.And when receiving, adopting the PVDF piezoelectric to receive, radiating portion and receiving unit are separately.
The advantage that the present invention compared with prior art has is: use two kinds of piezoelectrics, give full play to the advantage of two kinds of materials when transmitting and receiving.Transmit and receive part separately, the interference between can avoiding transmitting and receiving.Available PVDF layer replaces the matching layer of PZT, and it is fairly simple that design is gone up.Emission effciency is far above individual layer PVDF ultrasonic transducer on the performance, and the hangover of the echo-signal that receives is less than the ultrasonic transducer of individual layer PZT, so the bandwidth of transducer is greatly improved.
The characteristics of structure of the present invention are: use two kinds of piezoelectric-piezoelectric ceramic PZT and piezoelectric membrane PVDF in same transducer, PZT is used for emission, and PVDF is used for receiving.Promptly adopt two kinds of piezoelectrics to improve the performance of transducer, make ultrasonic transducer not only have little input power loss, and have short relatively echo.This invention can be used for designing ultrasonic Transducers in Medicine, can improve the performance of transducer greatly, improves the reliability of medical diagnosis, can obtain high economic benefit.And can receive high order harmonic component, and realize harmonic imaging, be the new approach of ultrasonic imaging developing.
Four, description of drawings
Fig. 1 is the structure of compound structure supersonic transducer of the present invention
Fig. 2 is the KLM mechanical-electric coupling equivalent electric circuit of the present invention's compound structure supersonic transducer when launching
Fig. 3 is the KLM mechanical-electric coupling equivalent electric circuit of the present invention's compound structure supersonic transducer when receiving
Fig. 4 is an experimental system block diagram of the present invention
Fig. 5 is the echo waveform of three kinds of transducers during the present invention tests
(a) PZT transducer (b) composite transducer (c) PVDF transducer
Five, embodiment
Adopt the KLM mechanical-electric coupling equivalent electric circuit of Fig. 2 that radiating portion is analyzed, obtain the parameter of transducer and the relation of transducer input response.
Adopt the KLM mechanical-electric coupling equivalent electric circuit of Fig. 3 that receiving unit is analyzed, obtain the parameter of transducer and the relation of transducer output response.
Adopt the present invention to design and the ultrasonic transducer of having made composite construction, the material parameter of use sees Table 1.Concrete scheme is as follows:
Adopt PZT to make transmitting transducer, adopt the method that adds coupling and backing to improve the emitting performance of ultrasonic transducer;
Adopt PVDF to make receiving unit, adopt suitable matching materials and PZT coupling, and note the insulation of radiating portion and receiving unit.
In order to contrast, we use the ultrasonic transducer of having made single structure with a kind of PZT or PVDF homogenous material respectively.
Adopt following method that transducer is tested, as Fig. 4, in the experiment, the ultrasonic transducer of making is excited by a single pulse signal generator (peak-to-peak value 300V, pulsewidth 15ns).The pulse of transmitting transducer emission is received transducer through reflecting plate and receives, passing through a wide-band amplifier (AU-4A-015-BNC, 60dB, bandwidth 1-500MHz) be admitted to digital waveform oscilloscope (Hp54502A) afterwards, collect in the computer by the IEEE488 bus interface card at last.
Test the results are shown in Figure 5, Fig. 5 is the echo waveform of three kinds of transducers, (a) be PZT transducer (b) for composite transducer (c) be the PVDF transducer, as seen compares with the PZT transducer from the result, the hangover of the transducer of composite construction is lacked, and amplitude than PVDF greatly.Therefore, the echo of the transducer of composite construction has the bigger amplitude and the bandwidth of broad.
When utilizing the present invention to prepare ultrasonic Ultrasonic-B probe, PZT PZT (piezoelectric transducer) and PVDF PZT (piezoelectric transducer) are adopted conventional processing method, as cut into many structures and make array energy transducer, in order to make Ultrasonic-B probe.The method of utilizing the present invention to prepare other transducer also roughly the same has the method for making of various transducers now.
Table 1 is used for the physical parameter of composite construction transducer material
| Z /[Kg.(m 2s) -1] | c/[m.s -1] | d/mm | ε r s | K T | |
| Matching layer 1 PVDF matching layer 2 PZT backings | 2.56×10 6 3.9×10 6 11.46×10 6 33.7×10 6 39.5×10 6 | 2130 2200 2880 4350 2189 | 0.245 0.10 0.56 1.00 2.00 | / 10.0 / 830 / | / 0.17 / 0.49 / |
The definition of above-mentioned unit is: Z represents acoustic impedance, unit: kilogram/(rice
2Second); C represents the velocity of sound, unit: meter per second; D represents thickness, unit: millimeter; ε
r sThe expression dielectric constant; K
TThe expression electromechanical coupling factor.The selection of back lining materials is that epoxy material adds tungsten powder: density is 1.8045 * 10
4Kg/m
3, gauge scope: 1.00-4.00mm generally selects 2.00-3.00mm for use.
Claims (1)
1. the ultrasonic transducer of plane-type compound structure, it is characterized in that adopting the PZT piezoelectric to launch ultrasonic wave, adopt PVDF to receive echo-signal, ultrasonic transducer adopts sandwich construction: be provided with the second matching layer material on backing earlier, on the second matching layer material, be provided with the PZT PZT (piezoelectric transducer), on the PZT PZT (piezoelectric transducer), be provided with the first matching layer material, on the first matching layer material, be provided with the PVDF PZT (piezoelectric transducer); The material of described backing is that epoxy material adds tungsten powder: gauge scope: 1.00-4.00; The selection of the second matching layer material is an epoxy material: gauge scope: 0.50-1.00, the selection of the first matching layer material is glass or elastomeric material: gauge scope: 0.20-0.40, the size range of PZT PZT (piezoelectric transducer) thickness is: 0.80-2.00, the size range of PVDF PZT (piezoelectric transducer) thickness is: 0.05-0.30, the unit of size are millimeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101226487A CN100365840C (en) | 2005-11-30 | 2005-11-30 | Plane-type compound structure supersonic transducer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101226487A CN100365840C (en) | 2005-11-30 | 2005-11-30 | Plane-type compound structure supersonic transducer |
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| CN1776928A CN1776928A (en) | 2006-05-24 |
| CN100365840C true CN100365840C (en) | 2008-01-30 |
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| CNB2005101226487A Expired - Fee Related CN100365840C (en) | 2005-11-30 | 2005-11-30 | Plane-type compound structure supersonic transducer |
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Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034156B (en) * | 2007-01-25 | 2010-05-19 | 西安交通大学 | Piezoelectric infrasonic wave sensor capable of canceling mechanical oscillation signal |
| US20100191119A1 (en) * | 2009-01-29 | 2010-07-29 | General Electric Company | Maternal and fetal monitor ultrasound transducer |
| CN102670242B (en) * | 2011-04-07 | 2014-05-28 | 南京大学 | Ultrasonic focusing transducer |
| CN102476478B (en) * | 2011-07-29 | 2013-07-03 | 深圳光启高等理工研究院 | Composite material and method and system for preparing same |
| CN102662166B (en) * | 2012-05-23 | 2014-11-26 | 北京信息科技大学 | Multimode broadband circular array transducer |
| CA2930648A1 (en) * | 2013-11-22 | 2015-05-28 | Sunnybrook Health Sciences Centre | Ultrasonic transducer with backing having spatially segmented surface |
| US9452447B2 (en) * | 2013-12-27 | 2016-09-27 | General Electric Company | Ultrasound transducer and ultrasound imaging system with a variable thickness dematching layer |
| WO2016138622A1 (en) * | 2015-03-02 | 2016-09-09 | 深圳市理邦精密仪器股份有限公司 | Ultrasonic transducer and manufacturing method thereof |
| JP2017163330A (en) * | 2016-03-09 | 2017-09-14 | セイコーエプソン株式会社 | Ultrasonic device, ultrasonic module, and ultrasonic measuring apparatus |
| CN106198724B (en) * | 2016-06-30 | 2018-11-02 | 重庆大学 | A kind of multistable ultrasound detection sensor |
| CN110477953A (en) * | 2018-07-16 | 2019-11-22 | 华中科技大学 | A kind of double-frequency ultrasound energy converter |
| CN110297231B (en) * | 2019-05-10 | 2021-06-22 | 中国船舶重工集团公司第七一五研究所 | Broadband transmitting-receiving split transducer array |
| CN110234056B (en) * | 2019-06-21 | 2021-01-12 | 京东方科技集团股份有限公司 | Transducer, preparation method thereof and transducer device |
| CN111687025A (en) * | 2020-06-17 | 2020-09-22 | 飞依诺科技(苏州)有限公司 | Double-backing ultrasonic transducer and preparation method thereof |
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|---|---|---|---|---|
| EP0014693A1 (en) * | 1979-02-13 | 1980-08-20 | Toray Industries, Inc. | An improved ultrasonic transducer |
| JP2004208918A (en) * | 2002-12-27 | 2004-07-29 | Hitachi Medical Corp | Ultrasonic diagnostic apparatus |
| WO2004114425A1 (en) * | 2003-06-24 | 2004-12-29 | Siemens Aktiengesellschaft | Piezoelectric component comprising a temperature regulation device and use thereof |
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2005
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0014693A1 (en) * | 1979-02-13 | 1980-08-20 | Toray Industries, Inc. | An improved ultrasonic transducer |
| JP2004208918A (en) * | 2002-12-27 | 2004-07-29 | Hitachi Medical Corp | Ultrasonic diagnostic apparatus |
| WO2004114425A1 (en) * | 2003-06-24 | 2004-12-29 | Siemens Aktiengesellschaft | Piezoelectric component comprising a temperature regulation device and use thereof |
Non-Patent Citations (3)
| Title |
|---|
| Study of Polymer Ultrasonic Transducer and ComplexUltrasonic Transducer with PZT/PVDF Multi-Layer Structure. Liu Xiaozhou, Ye Shigong, Gong Xiufen, Zhang Weiya,LuRongrong.Acustica,Vol.85 No.3. 1999 * |
| Study or complex u,trasonic transducer withPZT/PVDFmulti-layer structure. Lu，Rongrong，Liu，Xiaozhou，，Gong，Xiufen，，Ye，Shigong.南京大学学报（自然科学），第35卷第5期. 1999 * |
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