CN114373972A - Molten salt diffusion compounding device and method - Google Patents

Molten salt diffusion compounding device and method Download PDF

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Publication number
CN114373972A
CN114373972A CN202210041284.3A CN202210041284A CN114373972A CN 114373972 A CN114373972 A CN 114373972A CN 202210041284 A CN202210041284 A CN 202210041284A CN 114373972 A CN114373972 A CN 114373972A
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CN
China
Prior art keywords
molten salt
face
substrate
placing
salt diffusion
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Pending
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CN202210041284.3A
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Chinese (zh)
Inventor
温良成
陈和生
张宪三
李学农
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Dongguan Haizhuojie New Energy Technology Co.,Ltd.
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Dongguan Fuser Technology Co ltd
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Priority to CN202210041284.3A priority Critical patent/CN114373972A/en
Publication of CN114373972A publication Critical patent/CN114373972A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M2008/1293Fuel cells with solid oxide electrolytes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Abstract

The invention relates to a molten salt diffusion composite device and a system, wherein the device comprises: the device comprises a heat insulation chamber, a substrate placing rack, a heater, a connecting pipe and a vacuum air extractor; the substrate placing rack and the heater are arranged inside the heat insulation and preservation chamber, the substrate placing rack comprises a placing surface and a connecting surface located below the placing surface, the heater is arranged below the connecting surface, the middle of the connecting surface is connected with the vacuum air extractor through a connecting pipe, the placing surface is a plane, a plurality of through holes are formed in the placing surface, and the placing surface is used for placing the porous solid oxide electrolyte substrate and treating a melt. The invention reduces the diffusion and recombination time of the molten salt and improves the recombination compactness.

Description

Molten salt diffusion compounding device and method
Technical Field
The invention relates to the technical field of material compounding, in particular to a molten salt diffusion compounding device and a molten salt diffusion compounding method.
Background
The technology of SOFC (solid oxide fuel cell) has potential in the field of power generation. Because the components of the battery component are mainly composed of stable oxides, the operation temperature can be stably used at 650-1000 ℃, and expensive platinum materials are not needed to be used as catalysts for conversion, so that the manufacturing cost of cathode and anode materials for catalysis can be lower. Advantages of using SOFCs as power generation systems include: high power generation efficiency, so NO is generated in the using processx、SOxThe discharge amount of pollutants such as HC and the like is relatively small, so that CO is generated2Are easier to collect. In addition, there are many kinds of fuels that can be used as SOFC fuels, such as natural gas, CO, H2Methanol and coal gas, and even combustible waste gas and other fuels can be utilized. SOFC uses its own high temperature operating environment to reform internal fuel, which simplifies the system. At the output power of 0.3W/cm2Above, the generating efficiency can reach 50-60%, and the generating efficiency of a high-efficiency combined generating system constructed by the high-temperature tail gas discharged by the SOFC and the turbine can reach more than 90%. In addition, the lithium ion batteries in the market currently use a polymer electrolyte or an ionic liquid or a phosphorus-containing flame retardant electrolyte, and an isolating film is needed to separate the electrolyte from an electrode part, so the thermal stability of the isolating film also has an important influence on the safety of the battery, and Polyethylene (PE) is generally used at present, and has a heat-resistant temperature of about 120-130 ℃, and if the operating temperature exceeds 130 ℃, the PE isolating film can be melted through and shrunk, so that the positive electrode and the negative electrode are short-circuited. Therefore, if the electrolyte used by the current lithium ion battery is changed into an inorganic solid lithium ion conductor, part of the isolating membrane can be removed, the problems of possible leakage and corrosion of the electrolyte are solved, and the safety is improved. In addition, if the conductivity and concentration of lithium ions can be effectively improved, the key factors of replacing the traditional lithium ion battery electrolyte system by the inorganic solid lithium ion conductor are provided.
The SOFC is a composite electrolyte material in which an electrolyte oxide and a carbonate are combined, and has O2-、H+With CO3 2-The characteristics of the three ions moving in the electrolyte material, below 500 ℃, exhibit conductivity measurements corresponding to 8YSZ at 750-: 10-2S/cm。
The current commercial cell sheet for SOFC mainly uses NiO-8YSZ//8YSZ// GDC// LSC unit cell manufactured by Elcogen company, and the electrolyte thickness is only about 5 μm. The power density measurement results of the unit cells at 600-: 600 ℃ and about 400mW/cm2(0.6V); 650 ℃ and about 550mW/cm2(0.8V); 700 ℃ and about 600mW/cm2(0.85V). However, the solid carbonate-oxide composite fuel cell with the SDC-C electrolyte thickness of 200 μm, NiO-SDC// SDC-C// LiNiO-SDC, has the same test voltage of 0.85V and the power test data measured at 470 ℃ of 40mW/cm2. In this case, no matter what temperature is measured, the Elcogen cell sheet is about 15 times higher than the low-temperature type composite salt fuel cell in terms of power value only. However, in an alternative view, the solid carbonate-oxide composite fuel cell is of the ESC type (electrolyte supported type), so the current electrolyte thickness is 200 μm, whereas the electrolyte thickness of Elcogen cell sheets is only 5 μm. The relationship between the composite salt fuel cells with different electrolyte thicknesses and the maximum power value measured by the composite salt fuel cells can be observed, and the thickness of the electrolyte directly influences the operation power of the cells. If the electrolyte thickness of the composite salt fuel cell is reduced to 5 μm as compared with the Elcogen cell sheet, it is predicted that the system using the composite material cell will indeed exhibit the potential for developing low-temperature fuel cells.
However, the time required for the electrolyte to be made porous and then to be immersed in the molten carbonate to be combined is extremely long, generally 7 days or more is required, and it is difficult to fill all the pores of the electrolyte substrate.
Disclosure of Invention
The invention aims to provide a molten salt diffusion compounding device and a molten salt diffusion compounding method, which reduce the molten salt diffusion compounding time and improve the compounding compactness.
In order to achieve the purpose, the invention provides the following scheme:
a molten salt diffusion composite device comprising: the device comprises a heat insulation chamber, a substrate placing rack, a heater, a connecting pipe and a vacuum air extractor; the substrate rack with the heater sets up the heat-insulating and heat-preserving indoor portion, the substrate rack is including placing the face and being located place the connection face of face below, it sets up to connect the face below the heater, connect the face centre through the connecting pipe with the vacuum air extractor is connected, it is the plane to place the face, it sets up a plurality of perforation on the face to place, it is used for placing porous solid oxide electrolyte substrate and treats the fuse to place the face.
Optionally, the upper lid of the insulated holding chamber comprises a quartz window.
Optionally, the heat insulation and preservation device further comprises a temperature sensor, through holes are formed in the side face of the substrate placing frame and the side face of the heat insulation and preservation chamber, the temperature sensor extends into and is fixed in the through holes, and the temperature sensor is used for measuring the temperature between the placing face and the connecting face.
Optionally, the number of the temperature sensors is 4, and 4 temperature sensors are respectively arranged on 4 side surfaces of the substrate placing rack.
Optionally, the device further comprises a level gauge and 4 supporting legs, wherein the level gauge is used for measuring the horizontal angle of the porous solid oxide electrolyte substrate placed on the placing surface; 4 supporting legs all set up thermal-insulated heat preservation room below, each supporting leg all is used for adjusting the height of substrate rack and the horizontal angle of placing the face.
Optionally, the heater is a ring heater, and an upper surface of the ring heater is the same as the connecting surface in size.
Optionally, the material of the substrate holder is SUS316 stainless steel, and the thickness of the SUS316 stainless steel is 2.5 mm.
Optionally, the placing surface is 100mm long in the middle and 100mm wide, and a plurality of the through holes are arranged in the area, the aperture of each through hole is 1mm, and the pitch of the through holes is 4 mm.
Optionally, the air suction rate of the vacuum air suction machine ranges from 100mL/min to 10L/min.
The invention also discloses a molten salt diffusion compounding method, which applies the molten salt diffusion compounding device and comprises the following steps:
placing a porous solid oxide electrolyte substrate on a placing surface of a base material placing frame;
uniformly spreading a to-be-melted substance on the porous solid oxide electrolyte substrate;
melting the to-be-melted material into a liquid state by a heater to obtain a liquid melt;
sucking a liquid melt into pores of the porous solid oxide electrolyte substrate by a vacuum aspirator.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the invention, the heater is used for heating the to-be-molten material into liquid, and the vacuum air extractor is used for penetrating the liquid molten material into the porous solid oxide electrolyte substrate, so that the molten salt diffusion compounding time is reduced, and the compounding compactness is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a side view of a molten salt diffusion complex apparatus of the present invention;
FIG. 2 is a schematic view of the overall structure of a molten salt diffusion composite device according to the present invention;
FIG. 3 is a schematic view of the upper structure of the substrate holder according to the present invention;
FIG. 4 is a schematic view of the lower portion of the substrate holder and the heater according to the present invention;
FIG. 5 is a schematic structural view of a porous solid oxide electrolyte substrate;
fig. 6 is a schematic structural view of a carbonate-oxide composite electrolyte material;
FIG. 7 is a schematic flow chart of a molten salt diffusion compounding method of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a molten salt diffusion compounding device and a molten salt diffusion compounding method, which reduce the molten salt diffusion compounding time and improve the compounding compactness.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Fig. 1 is a side view of a molten salt diffusion composite device of the present invention, and fig. 2 is a schematic view of an overall structure of a molten salt diffusion composite device of the present invention, as shown in fig. 1 to 2, a molten salt diffusion composite device includes: a heat insulation chamber 10, a substrate placing frame 20, a heater 30, a connecting pipe 40 and a vacuum air pump 50; the substrate placing rack 20 and the heater 30 are arranged inside the heat insulation and preservation chamber 10, the substrate placing rack 20 comprises a placing surface and a connecting surface located below the placing surface, the heater 30 is arranged below the connecting surface, the middle of the connecting surface is connected with the vacuum air extractor 50 through the connecting pipe 40, the placing surface is a plane, a plurality of through holes are formed in the placing surface, and the placing surface is used for placing the porous solid oxide electrolyte substrate and treating a melt.
Fig. 3 is a top view of the inside of the substrate holder 20, fig. 4 is a bottom view of the inside of the substrate holder 20, a placing surface of the substrate holder 20 is shown in fig. 3, a connecting surface of the substrate holder 20 is shown in fig. 4, and the spiral structure in fig. 4 is the heater 30.
The upper lid of the insulated holding chamber 10 includes a quartz window 11. The quartz window 11 is provided with a lid opening handle 12, and the heat-insulating and heat-preserving chamber 10 can be opened by the lid opening handle 12.
The molten salt diffusion composite device further comprises a temperature sensor 60, through holes are formed in the side face of the substrate placing frame 20 and the side face of the heat insulation chamber 10 in corresponding positions, the temperature sensor 60 extends into and is fixed in the through holes, and the temperature sensor 60 is used for measuring the temperature between a placing face and a connecting face.
The number of the temperature sensors 60 is 4, and 4 temperature sensors 60 are respectively arranged on 4 side surfaces of the substrate placing rack 20.
The temperature sensor 60 includes a hollow heat-resistant ceramic tube 61 and a K-type temperature measuring rod 62. The K-type temperature measuring rod 62 extends into the hollow heat-resistant ceramic tube 61 and extends into the substrate holder 20 through the hollow heat-resistant ceramic tube 61.
The molten salt diffusion composite device further comprises a level meter and 4 supporting legs 70, wherein the level meter is used for measuring the horizontal angle of the porous solid oxide electrolyte substrate placed on the placing surface; 4 supporting legs 70 are all arranged below the heat insulation chamber 10, and each supporting leg is used for adjusting the height of the substrate placing frame and the horizontal angle of the placing surface. The level of the placing surface is adjusted by adjusting the height of 4 supporting legs 70, and further the horizontal angle of the porous solid oxide electrolyte substrate is adjusted, so that the porous solid oxide electrolyte substrate is kept horizontal in the molten salt diffusion compounding process.
The heater 30 is a ring heater 30, and the upper surface and the connecting surface of the ring heater 30 have the same size.
The material of the base material rack 20 is SUS316 stainless steel, and the thickness of the SUS316 stainless steel is 2.5 mm.
The middle of the placing surface is 100mm long, a plurality of through holes are arranged in an area with the width of 100mm, the aperture of each through hole is 1mm, and the hole distance is 4 mm.
The suction rate of the vacuum pump 50 ranges from 100mL/min to 10L/min.
A molten salt diffusion composite device is a vacuum traction device designed for a high-temperature molten salt diffusion composite process and applied to a novel composite component process of an SOFC system.
A molten salt diffusion composite device is described below with specific examples.
The length, width and height of the internal space of the insulated heat-preservation chamber 10 are respectively 200mm, 200mm and 400 mm. The length and width of the top face (placement face) dimension of the substrate holder 20 were 150mm and 150mm, respectively. Substrate rack 20 is hollow structure, highly is 30mm, and the face of placing is for leveling the surface, and the face of placing central authorities length wide dimension is 100mm respectively, and 100 mm's scope central authorities set up the perforation of array, and the aperture is 1mm, and the pitch-row is 4 mm. The center of the flat surface (connecting surface) at the lower part of the base material placing rack 20 is provided with a connecting pipe 40 communicated with a vacuum pump, and the pipe diameter is 20 mm. The material of the base material placing rack 20 is SUS316 stainless steel, and the thickness of the steel is 2.5 mm. The annular heater 30 is arranged around the lower surface of the substrate placing frame 20, the heating temperature range of the heater 30 is from room temperature to 700 ℃, the length and the width of the annular heater 30 are respectively 150mm and 150mm, and the length and the width are consistent with the length and the width of the substrate placing frame 20. The vacuum pump connecting pipe of the flat surface in substrate rack 20 lower part extends the outside 50mm of heat preservation chamber after, changes to the silicone tube and connects the vacuum pump, and connecting pipe 40 includes two parts promptly, and the first part is the vacuum pump connecting pipe, and the second part is the silicone tube, and the one end of vacuum pump connecting pipe is connected and is connected the face, and the one end of silicone tube is connected to the other end, and the vacuum pump is connected to the other end of silicone tube. The suction rate of the vacuum pump (vacuum pump 50) ranges from 100mL/min to 10L/min. The hole that aperture is 25mm is all seted up with thermal-insulated heat preservation room 10 corresponding position four sides central authorities to substrate rack 20, and 25 mm's hole is used for placing the heat-resisting ceramic tube of cavity, and the external diameter of ceramic tube is 23mm, and the internal diameter is 15mm, puts into the heat-resisting ceramic tube of cavity with K type temperature probe, and the pipe diameter of K type temperature probe is 10mm, and K type temperature probe gets into substrate rack 20 inner space. An upper cover of the heat insulation chamber (the top layer is a heat-resistant quartz window 11, and the length, width and thickness of the size are respectively 150mm, 150mm and 3 mm).
A flat porous solid oxide electrolyte substrate (100 mm,100mm,0.2mm in size, length, width, and thickness, respectively) was placed on the substrate holder 20 to cover all the arrays of through holes. And (3) placing a level gauge on the porous solid oxide electrolyte substrate, and adjusting four supporting legs with adjustable heights to keep the porous solid oxide electrolyte substrate horizontal. Mixing Li in a molar ratio of 1:12CO3And Na2CO3A proper amount of carbonate mixture is uniformly spread on the surface of the porous solid oxide electrolyte substrate, wherein Li2CO3And Na2CO3The heater 30 is started, the heating rate of the heater 30 is 5 degrees/min, and the substrate placing frame 20 is heated until the paving material is melted into a liquid state (550 ℃). Observing through a heat-resistant quartz visual window, after the carbonate mixture is completely melted into a liquid state, closing the heater 30, starting the vacuum pump, adjusting the air suction rate of the vacuum pump to be 500mL/min in advance, observing that the melted carbonate mixture completely permeates into the porous solid oxide electrolyte substrate through the heat-resistant quartz visual window after about 40 seconds, closing the vacuum pump, and waiting for the carbonate mixture to completely permeate into the porous solid oxide electrolyte substrateNaturally cooling for 6 hours to prepare the high-compactness carbonate-oxide composite electrolyte material. Fig. 5 is an SEM microstructure of the electrolyte substrate before the recombination, and fig. 6 is an SEM microstructure of the electrolyte substrate after the recombination.
According to the invention, the external force of molten carbonate permeating into the pores of the electrolyte substrate is applied by the vacuum pump, so that the time required by compounding is shortened to within 1 minute, the temperature reduction process is only required to be 6 hours, in addition, all the pores of the electrolyte substrate can be clearly seen from an electron microscope to be completely filled with the solidified carbonate, the high-compactness composite electrolyte material is successfully prepared, and the compactness of the composite electrolyte material is improved.
Fig. 7 is a schematic flow diagram of a molten salt diffusion recombination method of the present invention, and as shown in fig. 7, the present invention further discloses a molten salt diffusion recombination method, wherein the molten salt diffusion recombination method employs a molten salt diffusion recombination apparatus, and the molten salt diffusion recombination method includes:
step 101: and placing the porous solid oxide electrolyte substrate on the placing surface of the base material placing frame.
Step 102: the melt to be melted is uniformly spread on the porous solid oxide electrolyte substrate.
Step 103: and melting the material to be melted into a liquid state by a heater to obtain a liquid melt.
Step 104: the liquid melt was drawn into the pores of the porous solid oxide electrolyte substrate by a vacuum aspirator.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims (10)

1. A molten salt diffusion composite device, comprising: the device comprises a heat insulation chamber, a substrate placing rack, a heater, a connecting pipe and a vacuum air extractor; the substrate rack with the heater sets up the heat-insulating and heat-preserving indoor portion, the substrate rack is including placing the face and being located place the connection face of face below, it sets up to connect the face below the heater, connect the face centre through the connecting pipe with the vacuum air extractor is connected, it is the plane to place the face, it sets up a plurality of perforation on the face to place, it is used for placing porous solid oxide electrolyte substrate and treats the fuse to place the face.
2. The molten salt diffusion complex of claim 1, wherein the upper cover of the insulated holding chamber comprises a quartz window.
3. The molten salt diffusion composite device according to claim 1, further comprising a temperature sensor, wherein through holes are formed in the side face of the substrate placing frame and the side face of the heat insulation and preservation chamber, the temperature sensor extends into and is fixed in the through holes, and the temperature sensor is used for measuring the temperature between the placing face and the connecting face.
4. The molten salt diffusion composite device of claim 3, wherein the number of the temperature sensors is 4, and 4 temperature sensors are respectively arranged on 4 sides of the substrate placing frame.
5. The molten salt diffusion composite device of claim 1, further comprising a level meter for measuring a horizontal angle of the porous solid oxide electrolyte substrate placed on the placement face and 4 support legs; 4 supporting legs all set up thermal-insulated heat preservation room below, each supporting leg all is used for adjusting the height of substrate rack and the horizontal angle of placing the face.
6. The molten salt diffusion composite device of claim 1, wherein the heater is an annular heater having an upper surface of the same size as the joint face.
7. The molten salt diffusion composite device as claimed in claim 1, wherein the material of the substrate holder is SUS316 stainless steel, and the thickness of the SUS316 stainless steel is 2.5 mm.
8. The molten salt diffusion composite device according to claim 1, wherein a plurality of the perforations are provided in an area of the placement surface with a middle length of 100mm and a width of 100mm, and the perforations have a hole diameter of 1mm and a hole pitch of 4 mm.
9. The molten salt diffusion composite device of claim 1, wherein the vacuum air extractor has an extraction rate in a range of 100mL/min to 10L/min.
10. A molten salt diffusion compounding method, which is characterized in that the molten salt diffusion compounding method is implemented by using the molten salt diffusion compounding device of any one of claims 1 to 9, and comprises the following steps:
placing a porous solid oxide electrolyte substrate on a placing surface of a base material placing frame;
uniformly spreading a to-be-melted substance on the porous solid oxide electrolyte substrate;
melting the to-be-melted material into a liquid state by a heater to obtain a liquid melt;
sucking a liquid melt into pores of the porous solid oxide electrolyte substrate by a vacuum aspirator.
CN202210041284.3A 2022-01-14 2022-01-14 Molten salt diffusion compounding device and method Pending CN114373972A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106362649A (en) * 2016-10-09 2017-02-01 深圳市爱能森科技有限公司 Movable salt dissolving system
CN106702438A (en) * 2015-08-17 2017-05-24 北京有色金属研究总院 Method for treating molten salt electrolysis cathode deposits through pyrogenic process
CN107326155A (en) * 2016-04-29 2017-11-07 沈阳中北通磁科技股份有限公司 A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment
US20190136409A1 (en) * 2016-04-28 2019-05-09 Kwansei Gakuin Educational Foundation Vapour-phase epitaxial growth method, and method for producing substrate equipped with epitaxial layer
CN212870724U (en) * 2020-07-21 2021-04-02 深圳市中金岭南科技有限公司 Copper-silver alloy efficient smelting device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106702438A (en) * 2015-08-17 2017-05-24 北京有色金属研究总院 Method for treating molten salt electrolysis cathode deposits through pyrogenic process
US20190136409A1 (en) * 2016-04-28 2019-05-09 Kwansei Gakuin Educational Foundation Vapour-phase epitaxial growth method, and method for producing substrate equipped with epitaxial layer
CN107326155A (en) * 2016-04-29 2017-11-07 沈阳中北通磁科技股份有限公司 A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment
CN106362649A (en) * 2016-10-09 2017-02-01 深圳市爱能森科技有限公司 Movable salt dissolving system
CN212870724U (en) * 2020-07-21 2021-04-02 深圳市中金岭南科技有限公司 Copper-silver alloy efficient smelting device

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