CN114362490B - Quadrupole rod power supply driving circuit - Google Patents

Quadrupole rod power supply driving circuit Download PDF

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Publication number
CN114362490B
CN114362490B CN202111652698.1A CN202111652698A CN114362490B CN 114362490 B CN114362490 B CN 114362490B CN 202111652698 A CN202111652698 A CN 202111652698A CN 114362490 B CN114362490 B CN 114362490B
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resistor
pin
voltage
diode
capacitor
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CN114362490A (en
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于志伟
罗振中
王斌
沈辉萍
徐风宁
张涵
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Hangzhou Chunlai Technology Co Ltd
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Hangzhou Chunlai Technology Co Ltd
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Abstract

The invention relates to a quadrupole rod power supply driving circuit, which comprises an MCU; the digital-to-analog converter is connected with the MCU and used for setting the output analog voltage; the first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to frequency to the automatic frequency modulation circuit; the automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal; the high-voltage converter is used for heightening the voltage output by the power driving circuit; the feedback circuit is used for feeding back the heightened voltage to the feedback circuit second error comparator; the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage to generate an error signal with the error related to the voltage amplitude to the adjustable voltage module; and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages. The driving power supply has the advantages of quick response, good stability and simple driving.

Description

Quadrupole rod power supply driving circuit
Technical Field
The invention belongs to the technical field of power supply circuits, and particularly relates to a quadrupole rod power supply driving circuit.
Background
Conventional quadrupole power supplies typically use a crystal as the source of the radio frequency signal, which is fixed in frequency. The resonant frequency of the LC series resonant circuit formed by the air-core transformer and the quadrupole rods cannot be exactly at the frequency point of the crystal oscillator due to the manufacturing process, so that the output pole of the traditional quadrupole rod power supply needs an external large-volume adjustable capacitor. In addition, inductance and secondary coil resonant frequency are required to be adjusted through DDS and other modes, driving is complex, power supply response is delayed, and stability is general.
Disclosure of Invention
In view of the above-mentioned drawbacks and deficiencies of the prior art, it is an object of the present invention to at least solve one or more of the above-mentioned problems of the prior art, in other words, to provide a quadrupole power source driving circuit that satisfies one or more of the aforementioned needs.
In order to achieve the aim of the invention, the invention adopts the following technical scheme:
four pole power drive circuit includes:
MCU;
The digital-to-analog converter is connected with the MCU and used for setting the output analog voltage;
The first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to frequency to the automatic frequency modulation circuit;
The automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for heightening the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the feedback circuit second error comparator;
the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage to generate an error signal with the error related to the voltage amplitude to the adjustable voltage module;
And the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages.
As a preferred scheme, the first error comparator and the second error comparator are integrated in the operational amplifier U1, the digital-to-analog converter outputs analog voltage to the 10 pin and the 13 pin of the operational amplifier U1, the 9 pin of the operational amplifier U1 is connected with the 8 pin of the operational amplifier U1, the 8 pin of the operational amplifier U1 is connected with the 5 pin of the operational amplifier U1, the 7 pin of the operational amplifier U1 is connected with the resistor R6, and the other end of the resistor R6 is connected with the input of the automatic frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
As a preferable scheme, the automatic frequency modulation circuit comprises a resistor R5 and a voltage-controlled oscillator U4, one end of the resistor R5 is connected with the input of the automatic frequency modulation circuit and the 3 pin of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected with VCC;
The voltage-controlled oscillator U4 has pin 1 connected to VCC, pin 2 connected to ground, pin 4 connected to ground and pin 5 connected to the output of the automatic frequency modulation circuit.
As a preferred scheme, the power driving circuit comprises a resistor R4, a non-gate chip U2, an and gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a non-gate chip U5, a resistor R9 and a resistor R11, wherein the 2 pin and the 5 pin of the and gate chip U3 are connected with the input of the power driving circuit, the 1 pin of the and gate chip U3 is connected with the resistor R4, and the other end of the resistor R4 is connected with VCC; the pin 1 of the AND gate chip U3 is connected with VCC, and the pin 4 and pin 6 of the AND gate chip U3 are grounded; the 7 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U2, the 3 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U5, the 6 pin of the non-gate chip U2 is connected with a resistor R2, the other end of the resistor R2 is connected with the grid of a field effect transistor Q1, the source electrode of the field effect transistor Q1 is connected with a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and a resistor R11 which are connected in series and is connected with current feedback, the other end of the resistor R11 is grounded, the 6 pin of the non-gate chip U5 is connected with a resistor R7, the other end of the resistor R7 is connected with the grid of the field effect transistor Q2, the source electrode of the field effect transistor Q2 is connected with the other end of the resistor R9, the drains of the field effect transistor Q1 and the field effect transistor Q2 are respectively connected with the primary coil of the high voltage converter, the center tap of the primary coil of the high voltage converter is connected with the output of the controllable voltage module, and the secondary coil of the high voltage converter is connected with the input of the feedback circuit;
The 3 pin of the NOT chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT chip U2 is connected with the input of the power driving circuit.
As an optimal scheme, the current feedback of the power driving circuit is connected with the 12 pin of the operational amplifier U6, the 13 pin of the motion U6 is connected with the resistor R10 and the resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected with the 14 pin of the operational amplifier U6 and the 6 pin of the operational amplifier U1.
As a preferred scheme, the feedback circuit comprises a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, wherein the capacitor C1 is connected with the capacitor C4 in parallel and is connected with the input of the feedback circuit, and the diode D1 and the diode D2 which are connected in series are connected with the diode D3 and the diode D4 which are connected in parallel; the capacitor C1 is connected between the diode D1 and the diode D2, the capacitor C4 is connected between the diode D3 and the diode D4, the cathodes of the diode D1 and the diode D3 are connected to one end of the capacitor C3, the other end of the capacitor C3 is connected with the anodes of the diode D2 and the diode D4 respectively, the voltage detection resistor R1 is connected with the capacitor C3 in parallel, the capacitor C2 is connected with the voltage detection resistor R1 in parallel, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and the output of the feedback circuit is connected with the inductor L1 and the capacitor C2 respectively.
Preferably, the model of the not gate chip U2 is SN74HCT04D.
Preferably, the model number of the AND gate chip U3 is 74LVC2G86DCTR.
Preferably, the voltage-controlled oscillator U4 is of the type LTC1799.
Compared with the prior art, the invention has the beneficial effects that:
The quadrupole rod power supply driving circuit has the advantages of quick response, good stability and simple driving; the resonance frequency of the secondary coil is adjusted in modes of DDS and the like without external large-volume adjustable capacitor and troublesome adjustment inductance; in addition, the circuit is small in size and simple and convenient to use.
Drawings
Fig. 1 is a circuit schematic of a quadrupole power driving circuit according to embodiment 1 of the invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention, specific embodiments of the present invention will be described below with reference to the accompanying drawings. It is evident that the drawings in the following description are only examples of the invention, from which other drawings and other embodiments can be obtained by a person skilled in the art without inventive effort.
Example 1:
as shown in fig. 1, the quadrupole power source driving circuit of the present embodiment includes:
MCU;
The digital-to-analog converter DAC is connected with the MCU and used for setting the output analog voltage;
The first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to frequency to the automatic frequency modulation circuit;
The automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for heightening the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the feedback circuit second error comparator;
the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage to generate an error signal with the error related to the voltage amplitude to the adjustable voltage module;
And the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages.
The first error comparator and the second error comparator are integrated in the operational amplifier U1.
The digital-to-analog converter DAC outputs analog voltage to the 10 pin and the 13 pin of the operational amplifier U1, the 9 pin of the operational amplifier U1 is connected with the 8 pin of the operational amplifier U1, the 8 pin of the operational amplifier U1 is connected with the 5 pin of the operational amplifier U1, the 7 pin of the operational amplifier U1 is connected with the resistor R6, and the other end of the resistor R6 is connected with the input of the automatic frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
Specifically, the automatic frequency modulation circuit of the embodiment includes a resistor R5 and a voltage-controlled oscillator U4, one end of the resistor R5 is connected to the input of the automatic frequency modulation circuit and the 3 pin of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected to VCC;
The voltage-controlled oscillator U4 has pin 1 connected to VCC, pin 2 connected to ground, pin 4 connected to ground and pin 5 connected to the output of the automatic frequency modulation circuit.
The voltage-controlled oscillator U4 is of LTC1799, but not limited to this type, and other types commonly used in the prior art may be selected according to practical application.
The power driving circuit of the embodiment comprises a resistor R4, a NOT chip U2, an AND gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a NOT chip U5, a resistor R9 and a resistor R11, wherein the 2 pin and the 5 pin of the AND gate chip U3 are connected with the input of the power driving circuit, the 1 pin of the AND gate chip U3 is connected with the resistor R4, and the other end of the resistor R4 is connected with VCC; the pin 1 of the AND gate chip U3 is connected with VCC, and the pin 4 and pin 6 of the AND gate chip U3 are grounded; the 7 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U2, the 3 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U5, the 6 pin of the non-gate chip U2 is connected with a resistor R2, the other end of the resistor R2 is connected with the grid of a field effect transistor Q1, the source electrode of the field effect transistor Q1 is connected with a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and a resistor R11 which are connected in series and is connected with current feedback, the other end of the resistor R11 is grounded, the 6 pin of the non-gate chip U5 is connected with a resistor R7, the other end of the resistor R7 is connected with the grid of the field effect transistor Q2, the source electrode of the field effect transistor Q2 is connected with the other end of the resistor R9, the drains of the field effect transistor Q1 and the field effect transistor Q2 are respectively connected with the primary coil of the high voltage converter, the center tap of the primary coil of the high voltage converter is connected with the output of the controllable voltage module, and the secondary coil of the high voltage converter is connected with the input of the feedback circuit;
The 3 pin of the NOT chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT chip U2 is connected with the input of the power driving circuit.
The model of the not gate chip U2 in this embodiment is SN74HCT04D, and the model of the and gate chip U3 is 74LVC2G86DCTR, but not limited to this model, and other models commonly used in the prior art may be selected according to the actual application requirements. In addition, the controllable voltage module of the embodiment may adopt an existing commonly used voltage control module, which is not particularly limited.
In addition, the current feedback of the power driving circuit of this embodiment is connected to the 12 pin of the op-amp U6, the 13 pin of the motion U6 is connected to the resistor R10 and the resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected to the 14 pin of the op-amp U6 and the 6 pin of the op-amp U1.
The feedback circuit of the embodiment comprises a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, wherein the capacitor C1 is connected with the capacitor C4 in parallel and is connected with the input of the feedback circuit, and the diode D1 and the diode D2 which are connected in series are connected with the diode D3 and the diode D4 which are connected in parallel; the capacitor C1 is connected between the diode D1 and the diode D2, the capacitor C4 is connected between the diode D3 and the diode D4, the cathodes of the diode D1 and the diode D3 are connected to one end of the capacitor C3, the other end of the capacitor C3 is connected with the anodes of the diode D2 and the diode D4 respectively, the voltage detection resistor R1 is connected with the capacitor C3 in parallel, the capacitor C2 is connected with the voltage detection resistor R1 in parallel, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and the output of the feedback circuit is connected with the inductor L1 and the capacitor C2 respectively.
The control principle of the quadrupole rod power supply driving circuit of the embodiment is as follows:
the resistor R11 is a current detection resistor, V=I×R11, and the voltage is amplified (1+R8/R10) times by an operational amplifier and then compared with the analog voltage output by the DAC to output an error voltage, thereby controlling the output frequency
The resistor R1 is a voltage detection resistor, the radio frequency voltage is divided by C1, C4 and R1 and then is compared with the analog voltage output by the DAC to output error voltage, and then the controllable voltage module is controlled to output corresponding voltage to adjust the amplitude of the RF voltage.
The foregoing is only illustrative of the preferred embodiments and principles of the present invention, and changes in specific embodiments will occur to those skilled in the art upon consideration of the teachings provided herein, and such changes are intended to be included within the scope of the invention as defined by the claims.

Claims (6)

1. Quadrupole rod power supply driving circuit, its characterized in that includes:
MCU;
The digital-to-analog converter is connected with the MCU and used for setting the output analog voltage;
The first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to frequency to the automatic frequency modulation circuit;
The automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for heightening the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the second error comparator;
The second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage to generate a second error signal with the error related to the voltage amplitude to the adjustable voltage module;
and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to the difference of the second error signals.
2. The four-pole power supply driving circuit according to claim 1, wherein the first error comparator and the second error comparator are integrated in an operational amplifier U1, the digital-to-analog converter outputs analog voltages to 10 pins and 13 pins of the operational amplifier U1, 9 pins of the operational amplifier U1 are connected with 8 pins of the operational amplifier U1, 8 pins of the operational amplifier U1 are connected with 5 pins of the operational amplifier U1, 7 pins of the operational amplifier U1 are connected with one end of a resistor R6, and the other end of the resistor R6 is connected with the input of the automatic frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
3. The quadrupole power driving circuit of claim 2, wherein the auto-frequency modulation circuit comprises a resistor R5 and a voltage-controlled oscillator U4, and wherein the voltage-controlled oscillator U4 is of a type LTC1799; one end of a resistor R5 is connected with the input of the automatic frequency modulation circuit and the 3 pin of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected with a power supply VCC;
The voltage-controlled oscillator U4 has pin 1 connected to the power source VCC, pin 2 connected to ground, pin 4 connected to ground and pin 5 connected to the output of the automatic frequency modulation circuit.
4. The four-pole power driving circuit according to claim 3, wherein the power driving circuit comprises a resistor R4, a non-gate chip U2, an and gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a non-gate chip U5, a resistor R9 and a resistor R11, the non-gate chip U2 is of a type SN74HCT04D, the and gate chip U3 is of a type 74LVC2G86DCTR, the non-gate chip U5 is of a type SN74HCT04D, the pins 2 and 5 of the and gate chip U3 are connected to the input of the power driving circuit, the pin 2 of the and gate chip U3 is connected to one end of the resistor R4, and the other end of the resistor R4 is connected to a power VCC; the pin 1 of the AND gate chip U3 is connected with a power VCC, and the pin 4 and pin 6 of the AND gate chip U3 are grounded; the 7 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U2, the 3 pin of the AND gate chip U3 is connected with the 5 pin of the non-gate chip U5, the 6 pin of the non-gate chip U2 is connected with one end of a resistor R2, the other end of the resistor R2 is connected with the grid electrode of a field effect transistor Q1, the source electrode of the field effect transistor Q1 is connected with one end of a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and a resistor R11 which are connected in series and is connected with current feedback, one end of the resistor R11 is grounded, the 6 pin of the non-gate chip U5 is connected with one end of a resistor R7, the other end of the resistor R7 is connected with the grid electrode of the field effect transistor Q2, the source electrode of the field effect transistor Q2 is connected with one end of the resistor R9, the drain electrode of the field effect transistor Q1 and the drain electrode of the field effect transistor Q2 are respectively connected with the primary coil of the high voltage converter, the center tap of the primary coil of the high voltage converter is connected with the output of the adjustable voltage module, and the secondary coil of the high voltage converter is connected with the input of the feedback circuit;
The 3 pin of the NOT chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT chip U2 is connected with the input of the power driving circuit.
5. The four-pole power driving circuit according to claim 4, wherein the current feedback of the power driving circuit is connected to the 12 pin of the op-amp U6, the 13 pin of the motion U6 is connected to one end of the resistor R10 and one end of the resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected to the 14 pin of the op-amp U6 and the 6 pin of the op-amp U1.
6. The quadrupole power driving circuit of claim 5, wherein the feedback circuit comprises a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, the capacitor C1 being connected in parallel with the capacitor C4 and both being connected to an input of the feedback circuit, the diode D1, the diode D2 being connected in parallel with the diode D3, the diode D4 being connected in series; the capacitor C1 is connected between the diode D1 and the diode D2, the capacitor C4 is connected between the diode D3 and the diode D4, the negative electrode of the diode D1 and the negative electrode of the diode D3 are both connected to one end of the capacitor C3, the other end of the capacitor C3 is respectively connected with the positive electrode of the diode D2 and the positive electrode of the diode D4, the voltage detection resistor R1 is connected with the capacitor C3 in parallel, the capacitor C2 is connected with the voltage detection resistor R1 in parallel, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and the output of the feedback circuit is respectively connected with the inductor L1 and the capacitor C2.
CN202111652698.1A 2021-12-30 2021-12-30 Quadrupole rod power supply driving circuit Active CN114362490B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060113974A1 (en) * 2004-12-01 2006-06-01 Semiconductor Components Industries, L.L.C. Method of forming a power supply control and device therefor
US20110018507A1 (en) * 2009-07-22 2011-01-27 Mccloy-Stevens Mark Switched power regulator
CN105591528A (en) * 2016-01-04 2016-05-18 钢研纳克检测技术有限公司 Radio frequency power supply for quadrupole mass spectrometer
CN106130392A (en) * 2016-08-25 2016-11-16 东文高压电源(天津)股份有限公司 A kind of high frequency and high voltage power supply circuit of frequency, amplitude, power adjustable joint
CN106411141A (en) * 2016-06-28 2017-02-15 东文高压电源(天津)股份有限公司 High-voltage DC power supply circuit with fixed frequency, fixed pulse width and input amplitude modulation control
CN206992977U (en) * 2017-04-12 2018-02-09 江苏可力色质医疗器械有限公司 One kind is applied to the mass spectrometric radio-frequency power supply circuit of level Four bar
CN110858753A (en) * 2018-08-22 2020-03-03 英飞凌科技奥地利有限公司 Feedforward enhanced feedback control of isolated switch mode power converter with secondary side rectified voltage sensing

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060113974A1 (en) * 2004-12-01 2006-06-01 Semiconductor Components Industries, L.L.C. Method of forming a power supply control and device therefor
US20110018507A1 (en) * 2009-07-22 2011-01-27 Mccloy-Stevens Mark Switched power regulator
CN105591528A (en) * 2016-01-04 2016-05-18 钢研纳克检测技术有限公司 Radio frequency power supply for quadrupole mass spectrometer
CN106411141A (en) * 2016-06-28 2017-02-15 东文高压电源(天津)股份有限公司 High-voltage DC power supply circuit with fixed frequency, fixed pulse width and input amplitude modulation control
CN106130392A (en) * 2016-08-25 2016-11-16 东文高压电源(天津)股份有限公司 A kind of high frequency and high voltage power supply circuit of frequency, amplitude, power adjustable joint
CN206992977U (en) * 2017-04-12 2018-02-09 江苏可力色质医疗器械有限公司 One kind is applied to the mass spectrometric radio-frequency power supply circuit of level Four bar
CN110858753A (en) * 2018-08-22 2020-03-03 英飞凌科技奥地利有限公司 Feedforward enhanced feedback control of isolated switch mode power converter with secondary side rectified voltage sensing

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