CN114362490A - Quadrupole rod power supply driving circuit - Google Patents

Quadrupole rod power supply driving circuit Download PDF

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Publication number
CN114362490A
CN114362490A CN202111652698.1A CN202111652698A CN114362490A CN 114362490 A CN114362490 A CN 114362490A CN 202111652698 A CN202111652698 A CN 202111652698A CN 114362490 A CN114362490 A CN 114362490A
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resistor
pin
voltage
diode
circuit
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CN114362490B (en
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于志伟
罗振中
王斌
沈辉萍
徐风宁
张涵
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Hangzhou Chunlai Technology Co Ltd
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Hangzhou Chunlai Technology Co Ltd
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Abstract

The invention relates to a quadrupole rod power supply driving circuit, which comprises an MCU (microprogrammed control unit); the digital-to-analog converter is connected with the MCU and used for setting the output analog voltage; the first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to the frequency and send the first error signal to the automatic frequency modulation circuit; the automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal; the high-voltage converter is used for increasing the voltage output by the power driving circuit; the feedback circuit is used for feeding back the heightened voltage to the second error comparator of the feedback circuit; the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage and generating an error signal related to the voltage amplitude value to the adjustable voltage module; and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages. The driving power supply has the advantages of quick response, good stability and simple driving.

Description

Quadrupole rod power supply driving circuit
Technical Field
The invention belongs to the technical field of power circuits, and particularly relates to a quadrupole rod power supply driving circuit.
Background
The traditional quadrupole rod power supply usually adopts a crystal oscillator as a radio frequency signal source, and the frequency of the crystal oscillator is fixed and unchanged. The resonant frequency of the LC series resonant circuit formed by the air core transformer and the quadrupole rod cannot be exactly at the frequency point of the crystal oscillator, which is limited by the manufacturing process, so that the output pole of the conventional quadrupole rod power supply needs to be externally provided with a large-volume adjustable capacitor. In addition, inductance needs to be adjusted, the resonant frequency of the secondary coil needs to be adjusted through DDS and the like, driving is complex, power supply response is delayed, and stability is general.
Disclosure of Invention
Based on the above-mentioned shortcomings and drawbacks of the prior art, it is an object of the present invention to at least solve one or more of the above-mentioned problems of the prior art, in other words, to provide a four-pole power driving circuit that satisfies one or more of the above-mentioned requirements.
In order to achieve the purpose, the invention adopts the following technical scheme:
a quadrupole power driver circuit comprising:
MCU;
the digital-to-analog converter is connected with the MCU and used for setting the output analog voltage;
the first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to the frequency and send the first error signal to the automatic frequency modulation circuit;
the automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for increasing the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the second error comparator of the feedback circuit;
the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage and generating an error signal related to the voltage amplitude value to the adjustable voltage module;
and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages.
Preferably, the first error comparator and the second error comparator are integrated in an operational amplifier U1, the digital-to-analog converter outputs analog voltage to a pin 10 and a pin 13 of an operational amplifier U1, a pin 9 of the operational amplifier U1 is connected with a pin 8 of an operational amplifier U1, the pin 8 of the operational amplifier U1 is connected with a pin 5 of an operational amplifier U1, a pin 7 of the operational amplifier U1 is connected with a resistor R6, and the other end of the resistor R6 is connected with the input of the automatic frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
Preferably, the automatic frequency modulation circuit comprises a resistor R5 and a voltage-controlled oscillator U4, one end of the resistor R5 is connected with the input of the automatic frequency modulation circuit and the pin 3 of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected with VCC;
the pin 1 of the voltage-controlled oscillator U4 is connected with VCC, the pin 2 is connected with ground, the pin 4 is connected with ground, and the pin 5 is connected with the output of the automatic frequency modulation circuit.
Preferably, the power driving circuit comprises a resistor R4, a NOT gate chip U2, an AND gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a NOT gate chip U5, a resistor R9 and a resistor R11, wherein pins 2 and 5 of the AND gate chip U3 are connected with the input of the power driving circuit, pin 1 of the AND gate chip U3 is connected with the resistor R4, and the other end of the resistor R4 is connected with VCC; the 1 pin of the AND gate chip U3 is connected with VCC, and the 4 pin and the 6 pin of the AND gate chip U3 are grounded; a pin 7 of an AND gate chip U3 is connected with a pin 5 of a NOT gate chip U2, a pin 3 of an AND gate chip U3 is connected with a pin 5 of the NOT gate chip U5, a pin 6 of the NOT gate chip U2 is connected with a resistor R2, the other end of a resistor R2 is connected with a gate of a field effect tube Q1, a source of the field effect tube Q1 is connected with a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and the resistor R11 which are connected in series and connected to current feedback, the other end of the resistor R11 is grounded, a pin 6 of the NOT gate chip U5 is connected with a resistor R7, the other end of the resistor R7 is connected with a gate of the field effect tube Q2, a source of the field effect tube Q2 is connected with the other end of a resistor R9, drain electrodes of the field effect tube Q1 and the field effect tube Q2 are respectively connected with a primary coil of a high-voltage converter, a center tap of the primary coil of the high-voltage converter is connected with an output of a controllable voltage module, and a secondary coil of the high-voltage converter is connected with an input of a feedback circuit;
the 3 pin of the NOT gate chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT gate chip U2 is connected with the input of the power driving circuit.
Preferably, the current feedback of the power driving circuit is connected with 12 pins of an operational amplifier U6, 13 pins of a motion U6 are connected with a resistor R10 and a resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected with 14 pins of an operational amplifier U6 and 6 pins of an operational amplifier U1.
Preferably, the feedback circuit comprises a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, wherein the capacitor C1 is connected in parallel with the capacitor C4 and is connected with the input of the feedback circuit, and the series-connected diode D1 and diode D2 are connected in parallel with the series-connected diode D3 and diode D4; a capacitor C1 is connected between the diode D1 and the diode D2, a capacitor C4 is connected between the diode D3 and the diode D4, cathodes of the diode D1 and the diode D3 are both connected to one end of the capacitor C3, the other end of the capacitor C3 is connected to anodes of the diode D2 and the diode D4, a voltage detection resistor R1 is connected in parallel with the capacitor C3, a capacitor C2 is connected in parallel with the voltage detection resistor R1, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and outputs of the feedback circuit are connected to the inductor L1 and the capacitor C2.
Preferably, the model of the NOT gate chip U2 is SN74HCT 04D.
Preferably, the model number of the and gate chip U3 is 74LVC2G86 DCTR.
Preferably, the voltage-controlled oscillator U4 is of the LTC1799 type.
Compared with the prior art, the invention has the beneficial effects that:
the quadrupole rod power supply driving circuit has the advantages that the driving power supply is quick in response, good in stability and simple in driving; the external large-volume adjustable capacitor and the troublesome inductance adjustment are not needed, and the resonance frequency of the secondary coil is adjusted in a DDS (direct digital synthesizer) mode and the like; in addition, the circuit is small in size and simple and convenient to use.
Drawings
Fig. 1 is a circuit diagram of a quadrupole power driver circuit according to embodiment 1 of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention, the following description will explain the embodiments of the present invention with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
Example 1:
as shown in fig. 1, the quadrupole power driving circuit of the present embodiment includes:
MCU;
the digital-to-analog converter DAC is connected with the MCU and used for setting the output analog voltage;
the first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to the frequency and send the first error signal to the automatic frequency modulation circuit;
the automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for increasing the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the second error comparator of the feedback circuit;
the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage and generating an error signal related to the voltage amplitude value to the adjustable voltage module;
and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages.
The first error comparator and the second error comparator are integrated in the operational amplifier U1.
The DAC outputs analog voltage to a pin 10 and a pin 13 of the operational amplifier U1, a pin 9 of the operational amplifier U1 is connected with a pin 8 of the operational amplifier U1, a pin 8 of the operational amplifier U1 is connected with a pin 5 of the operational amplifier U1, a pin 7 of the operational amplifier U1 is connected with a resistor R6, and the other end of the resistor R6 is connected with the input of the automatic frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
Specifically, the auto-tuning circuit of the present embodiment includes a resistor R5 and a voltage-controlled oscillator U4, one end of the resistor R5 is connected to the input of the auto-tuning circuit and the 3 pin of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected to VCC;
the pin 1 of the voltage-controlled oscillator U4 is connected with VCC, the pin 2 is connected with ground, the pin 4 is connected with ground, and the pin 5 is connected with the output of the automatic frequency modulation circuit.
The model of the voltage-controlled oscillator U4 is LTC1799, but is not limited to this model, and other existing models that are commonly used may be selected according to the actual application requirements.
The power driving circuit of the embodiment comprises a resistor R4, a NOT gate chip U2, an AND gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a NOT gate chip U5, a resistor R9 and a resistor R11, wherein pins 2 and 5 of the AND gate chip U3 are connected with the input of the power driving circuit, a pin 1 of the AND gate chip U3 is connected with the resistor R4, and the other end of the resistor R4 is connected with VCC; the 1 pin of the AND gate chip U3 is connected with VCC, and the 4 pin and the 6 pin of the AND gate chip U3 are grounded; a pin 7 of an AND gate chip U3 is connected with a pin 5 of a NOT gate chip U2, a pin 3 of an AND gate chip U3 is connected with a pin 5 of the NOT gate chip U5, a pin 6 of the NOT gate chip U2 is connected with a resistor R2, the other end of a resistor R2 is connected with a gate of a field effect tube Q1, a source of the field effect tube Q1 is connected with a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and the resistor R11 which are connected in series and connected to current feedback, the other end of the resistor R11 is grounded, a pin 6 of the NOT gate chip U5 is connected with a resistor R7, the other end of the resistor R7 is connected with a gate of the field effect tube Q2, a source of the field effect tube Q2 is connected with the other end of a resistor R9, drain electrodes of the field effect tube Q1 and the field effect tube Q2 are respectively connected with a primary coil of a high-voltage converter, a center tap of the primary coil of the high-voltage converter is connected with an output of a controllable voltage module, and a secondary coil of the high-voltage converter is connected with an input of a feedback circuit;
the 3 pin of the NOT gate chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT gate chip U2 is connected with the input of the power driving circuit.
The model of the not gate chip U2 in this embodiment is SN74HCT04D, and the model of the and gate chip U3 is 74LVC2G86DCTR, but is not limited to this model, and other existing and commonly used models may be selected according to actual application requirements. In addition, the controllable voltage module of the present embodiment may adopt an existing commonly used voltage control module, and is not limited specifically.
In addition, the current feedback of the power driving circuit of this embodiment is connected to the 12 pins of the operational amplifier U6, the 13 pins of the motion U6 are connected to the resistor R10 and the resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected to the 14 pins of the operational amplifier U6 and the 6 pins of the operational amplifier U1.
The feedback circuit of the embodiment includes a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, wherein the capacitor C1 is connected in parallel with the capacitor C4 and is connected with the input of the feedback circuit, and the series-connected diode D1 and diode D2 are connected in parallel with the series-connected diode D3 and diode D4; a capacitor C1 is connected between the diode D1 and the diode D2, a capacitor C4 is connected between the diode D3 and the diode D4, cathodes of the diode D1 and the diode D3 are both connected to one end of the capacitor C3, the other end of the capacitor C3 is connected to anodes of the diode D2 and the diode D4, a voltage detection resistor R1 is connected in parallel with the capacitor C3, a capacitor C2 is connected in parallel with the voltage detection resistor R1, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and outputs of the feedback circuit are connected to the inductor L1 and the capacitor C2.
The control principle of the quadrupole power driving circuit of the embodiment is as follows:
the resistor R11 is a current detection resistor, V is I R11, is amplified by an operational amplifier (1+ R8/R10) and then is compared with the analog voltage output by the DAC to output an error voltage, and further the output frequency is controlled
The resistor R1 is a voltage detection resistor, the radio frequency voltage is divided by C1, C4 and R1 and then compared with the analog voltage output by the DAC to output an error voltage, and the controllable voltage module is further controlled to output a corresponding voltage to adjust the amplitude of the RF voltage.
The foregoing has outlined rather broadly the preferred embodiments and principles of the present invention and it will be appreciated that those skilled in the art may devise variations of the present invention that are within the spirit and scope of the appended claims.

Claims (9)

1. Quadrupole pole power drive circuit, its characterized in that includes:
MCU;
the digital-to-analog converter is connected with the MCU and used for setting the output analog voltage;
the first error comparator is used for collecting the current of the power driving circuit and comparing the current with the set analog voltage so as to generate a first error signal with the error related to the frequency and send the first error signal to the automatic frequency modulation circuit;
the automatic frequency modulation circuit is used for adjusting the output frequency according to the first error signal;
the high-voltage converter is used for increasing the voltage output by the power driving circuit;
the feedback circuit is used for feeding back the heightened voltage to the second error comparator of the feedback circuit;
the second error comparator is used for comparing the voltage value fed back by the feedback circuit with the set analog voltage and generating an error signal related to the voltage amplitude value to the adjustable voltage module;
and the adjustable voltage module is used for adjusting the driving voltage of the power driving circuit to realize amplitude modulation according to different error voltages.
2. The quadrupole power supply driving circuit of claim 1, wherein the first error comparator and the second error comparator are integrated in an operational amplifier U1, the digital-to-analog converter outputs analog voltages to pins 10 and 13 of an operational amplifier U1, pin 9 of the operational amplifier U1 is connected to pin 8 of an operational amplifier U1, pin 8 of the operational amplifier U1 is connected to pin 5 of an operational amplifier U1, pin 7 of the operational amplifier U1 is connected to a resistor R6, and the other end of the resistor R6 is connected to an input of an auto-frequency modulation circuit;
the 12 pin of the operational amplifier U1 is connected with the output of the feedback circuit, and the 14 pin of the operational amplifier U1 is connected with the input of the adjustable voltage module.
3. The quadrupole rod power supply driving circuit of claim 2, wherein the auto-tuning circuit comprises a resistor R5 and a voltage-controlled oscillator U4, one end of the resistor R5 is connected with the input of the auto-tuning circuit and the 3 pins of the voltage-controlled oscillator U4, and the other end of the resistor R5 is connected with VCC;
the pin 1 of the voltage-controlled oscillator U4 is connected with VCC, the pin 2 is connected with ground, the pin 4 is connected with ground, and the pin 5 is connected with the output of the automatic frequency modulation circuit.
4. The quadrupole rod power supply driving circuit according to claim 3, wherein the power driving circuit comprises a resistor R4, a NOT gate chip U2, an AND gate chip U3, a resistor R2, a field effect transistor Q1, a resistor R3, a field effect transistor Q2, a NOT gate chip U5, a resistor R9 and a resistor R11, the 2 pin and the 5 pin of the AND gate chip U3 are connected with the input of the power driving circuit, the 1 pin of the AND gate chip U3 is connected with the resistor R4, and the other end of the resistor R4 is connected with VCC; the 1 pin of the AND gate chip U3 is connected with VCC, and the 4 pin and the 6 pin of the AND gate chip U3 are grounded; a pin 7 of an AND gate chip U3 is connected with a pin 5 of a NOT gate chip U2, a pin 3 of an AND gate chip U3 is connected with a pin 5 of the NOT gate chip U5, a pin 6 of the NOT gate chip U2 is connected with a resistor R2, the other end of a resistor R2 is connected with a gate of a field effect tube Q1, a source of the field effect tube Q1 is connected with a resistor R3, the other end of the resistor R3 is connected between a resistor R9 and the resistor R11 which are connected in series and connected to current feedback, the other end of the resistor R11 is grounded, a pin 6 of the NOT gate chip U5 is connected with a resistor R7, the other end of the resistor R7 is connected with a gate of the field effect tube Q2, a source of the field effect tube Q2 is connected with the other end of a resistor R9, drain electrodes of the field effect tube Q1 and the field effect tube Q2 are respectively connected with a primary coil of a high-voltage converter, a center tap of the primary coil of the high-voltage converter is connected with an output of a controllable voltage module, and a secondary coil of the high-voltage converter is connected with an input of a feedback circuit;
the 3 pin of the NOT gate chip U2 is connected with the output of the automatic frequency modulation circuit, and the 4 pin of the NOT gate chip U2 is connected with the input of the power driving circuit.
5. The quadrupole power supply driving circuit of claim 4, wherein the current feedback of the power driving circuit is connected with the 12 pin of the operational amplifier U6, the 13 pin of the motion U6 is connected with the resistor R10 and the resistor R8, the other end of the resistor R10 is grounded, and the other end of the resistor R8 is connected with the 14 pin of the operational amplifier U6 and the 6 pin of the operational amplifier U1.
6. The quadrupole power supply driving circuit according to claim 5, wherein the feedback circuit comprises a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a diode D1, a diode D2, a diode D3, a diode D4, an inductor L1 and a voltage detection resistor R1, the capacitor C1 is connected with the capacitor C4 in parallel and is connected with an input of the feedback circuit, and the series-connected diode D1 and diode D2 are connected with the series-connected diode D3 and diode D4 in parallel; a capacitor C1 is connected between the diode D1 and the diode D2, a capacitor C4 is connected between the diode D3 and the diode D4, cathodes of the diode D1 and the diode D3 are both connected to one end of the capacitor C3, the other end of the capacitor C3 is connected to anodes of the diode D2 and the diode D4, a voltage detection resistor R1 is connected in parallel with the capacitor C3, a capacitor C2 is connected in parallel with the voltage detection resistor R1, an inductor L1 is connected between the capacitor C2 and the voltage detection resistor R1, and outputs of the feedback circuit are connected to the inductor L1 and the capacitor C2.
7. The quadrupole power supply driving circuit of claim 6, wherein the NOT chip U2 is model SN74HCT 04D.
8. The quadrupole power supply driving circuit according to claim 6, wherein the and gate chip U3 is 74LVC2G86 DCTR.
9. The quadrupole power driver circuit of claim 6, wherein the voltage controlled oscillator U4 is of type LTC 1799.
CN202111652698.1A 2021-12-30 2021-12-30 Quadrupole rod power supply driving circuit Active CN114362490B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060113974A1 (en) * 2004-12-01 2006-06-01 Semiconductor Components Industries, L.L.C. Method of forming a power supply control and device therefor
US20110018507A1 (en) * 2009-07-22 2011-01-27 Mccloy-Stevens Mark Switched power regulator
CN105591528A (en) * 2016-01-04 2016-05-18 钢研纳克检测技术有限公司 Radio frequency power supply for quadrupole mass spectrometer
CN106130392A (en) * 2016-08-25 2016-11-16 东文高压电源(天津)股份有限公司 A kind of high frequency and high voltage power supply circuit of frequency, amplitude, power adjustable joint
CN106411141A (en) * 2016-06-28 2017-02-15 东文高压电源(天津)股份有限公司 High-voltage DC power supply circuit with fixed frequency, fixed pulse width and input amplitude modulation control
CN206992977U (en) * 2017-04-12 2018-02-09 江苏可力色质医疗器械有限公司 One kind is applied to the mass spectrometric radio-frequency power supply circuit of level Four bar
CN110858753A (en) * 2018-08-22 2020-03-03 英飞凌科技奥地利有限公司 Feedforward enhanced feedback control of isolated switch mode power converter with secondary side rectified voltage sensing

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060113974A1 (en) * 2004-12-01 2006-06-01 Semiconductor Components Industries, L.L.C. Method of forming a power supply control and device therefor
US20110018507A1 (en) * 2009-07-22 2011-01-27 Mccloy-Stevens Mark Switched power regulator
CN105591528A (en) * 2016-01-04 2016-05-18 钢研纳克检测技术有限公司 Radio frequency power supply for quadrupole mass spectrometer
CN106411141A (en) * 2016-06-28 2017-02-15 东文高压电源(天津)股份有限公司 High-voltage DC power supply circuit with fixed frequency, fixed pulse width and input amplitude modulation control
CN106130392A (en) * 2016-08-25 2016-11-16 东文高压电源(天津)股份有限公司 A kind of high frequency and high voltage power supply circuit of frequency, amplitude, power adjustable joint
CN206992977U (en) * 2017-04-12 2018-02-09 江苏可力色质医疗器械有限公司 One kind is applied to the mass spectrometric radio-frequency power supply circuit of level Four bar
CN110858753A (en) * 2018-08-22 2020-03-03 英飞凌科技奥地利有限公司 Feedforward enhanced feedback control of isolated switch mode power converter with secondary side rectified voltage sensing

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