CN114354619A - Positioning assembly, panel detection device and method thereof - Google Patents

Positioning assembly, panel detection device and method thereof Download PDF

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Publication number
CN114354619A
CN114354619A CN202111547636.4A CN202111547636A CN114354619A CN 114354619 A CN114354619 A CN 114354619A CN 202111547636 A CN202111547636 A CN 202111547636A CN 114354619 A CN114354619 A CN 114354619A
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China
Prior art keywords
panel
image
detected
translation
detection
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CN202111547636.4A
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Inventor
匡梦良
朱小明
张鑫
殷亚男
许超
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Suzhou Mega Technology Co Ltd
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Suzhou Mega Technology Co Ltd
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Priority to CN202111547636.4A priority Critical patent/CN114354619A/en
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Abstract

The invention provides a positioning assembly, a panel detection device and a method thereof, an electronic device and a storage medium. The positioning assembly is used for positioning the position of the panel to be detected before the panel to be detected is conveyed to the detection platform, and comprises an image acquisition unit and a processing unit, wherein the image acquisition unit is used for acquiring a first image of a characteristic part on the panel to be detected, the processing unit is used for determining the deflection quantity R and the translation quantity S of the first image position of the characteristic part in the first image relative to a first calibration position, the deflection quantity R is the deflection angle of the first image position relative to the first calibration position, and the translation quantity S is the translation quantity of the first image position relative to the first calibration position. The positioning assembly can prevent the panel to be detected from being placed behind the detection platform to generate larger position deviation, and the influence of uncertain factors on subsequent detection is avoided.

Description

Positioning assembly, panel detection device and method thereof
Technical Field
The present invention relates to the field of display panel detection technologies, and in particular, to a positioning assembly, a panel detection apparatus, a panel detection method, an electronic device, and a storage medium.
Background
The panel detection device can detect the binding effect of the display panel and/or the appearance of an Integrated Circuit (IC) through a visual detection module thereon, and can also detect conductive particle indentations. In the detection process, the display panel is placed on the detection platform by the manipulator, and the detection platform conveys the display panel to the visual detection module for line scanning. The robot and the inspection platform are usually moved along a predetermined path in the above process, but after the robot picks up the display panel, different deviations may exist in the positions of different display panels relative to the robot. In the prior art, the display panels are usually placed on the detection platform directly after being picked by the manipulator, so that the position of each display panel on the detection platform has great uncertainty, and the uncertainty can generate a great deal of unpredictable influence on subsequent detection.
Disclosure of Invention
In order to at least partially solve the problems in the prior art, according to an aspect of the present invention, a positioning assembly for a panel detection apparatus is provided, the positioning assembly is used for positioning a position of a panel to be detected before the panel to be detected is conveyed onto a detection platform, the positioning assembly includes an image acquisition unit and a processing unit, the image acquisition unit is used for acquiring a first image of a feature part on the panel to be detected, the processing unit is used for determining a deflection amount R and a translation amount S of a first image position of the feature part in the first image relative to a first calibration position, wherein the deflection amount R is a deflection angle of the first image position relative to the first calibration position, and the translation amount S is a translation amount of the first image position relative to the first calibration position.
Illustratively, the feature includes a predetermined corner of the panel to be detected, the first calibration position has position information including calibration coordinates of a vertex of the predetermined corner, and the processing unit obtains the translation amount S by determining a translation amount of the coordinates of the vertex of the predetermined corner in the first image with respect to the calibration coordinates.
Illustratively, the feature includes a predetermined angle of the panel to be detected, the first nominal position has position information including a nominal angle of a first edge of the two edges of the feature, and the processing unit obtains the deflection amount R by determining a deflection amount of the angle of the first edge in the first image relative to the nominal angle.
Illustratively, the translation amount S comprises a lateral translation component in the lateral direction and a longitudinal translation component in the longitudinal direction, wherein the lateral translation component and the longitudinal translation component are determined by coordinates of the first image position relative to coordinates of the first nominal position; or the transverse translation component and the longitudinal translation component are determined by the distance from the first image position to the first calibration position and the angle between the line between the first image position and the first calibration position and the transverse direction or the longitudinal direction.
Illustratively, the feature comprises a positioning mark on the panel to be detected.
According to another aspect of the present invention, there is also provided a panel inspection apparatus including: a positioning assembly as above; the detection platform is movable along the longitudinal direction and can rotate in a horizontal plane; the carrying module is movable along the transverse direction and is used for sequentially carrying the panel to be detected to the image acquisition area of the positioning assembly and the detection platform; and the control module is used for controlling the deflection angle corresponding to the pre-rotation deflection R of the detection platform according to the deflection R determined by the positioning assembly, and controlling the space transverse translation component and the space longitudinal translation component corresponding to the pre-movement translation S of the carrying module and the detection platform along the transverse direction and the longitudinal direction respectively according to the translation S determined by the positioning assembly, so that the carrying module can place the panel to be detected on the preset position on the detection platform along the first preset line.
Illustratively, the panel detecting device further includes: the visual detection module is used for detecting the defects of the panel to be detected and can move along the transverse direction; and the additional positioning assembly comprises an additional image acquisition unit and an additional processing unit, the additional image acquisition unit is used for acquiring a second image of the panel to be detected positioned on the detection platform, the additional processing unit is used for determining the position deviation of the position of the second image of the panel to be detected in the second image relative to a second calibration position, and the control module is also used for controlling the detection platform and the visual detection module to compensate the position deviation so that the panel to be detected can be positioned in the visual field center of the visual detection module after the detection platform moves along a second preset line.
According to an aspect of the present invention, there is provided a panel inspection method including: the collection step comprises: collecting a first image of a characteristic part on a panel to be detected on a carrying module; and a determination step: and determining a deflection amount R and a translation amount S of a first image position of the characteristic part in the first image relative to the first calibration position, wherein the deflection amount R is a deflection angle of the first image position relative to the first calibration position, and the translation amount S is a translation amount of the first image position relative to the first calibration position.
Illustratively, the characteristic portion includes a predetermined angle of the panel to be detected, the first calibration position has position information, the position information includes calibration coordinates of a vertex of the predetermined angle, and determining the translation amount S includes: simulating a vertex of the predetermined angle according to the two edges of the predetermined angle; and determining the translation amount of the coordinates of the vertex in the first image relative to the calibration coordinates to obtain the translation amount S.
Illustratively, the characteristic comprises a predetermined angle of the panel to be detected, the first nominal position has position information comprising a nominal angle of a first of two edges of the predetermined angle, and determining the deflection R comprises: the deflection angle of the first side of the two sides of the predetermined angle in the first image relative to the calibration angle is determined to obtain the deflection amount R.
Illustratively, the panel detecting method further includes, after the determining step: a compensation step: controlling a deflection angle corresponding to the pre-rotation deflection R of the detection platform based on the deflection R, and controlling a transverse translation component and a longitudinal translation component corresponding to the pre-movement translation S of the carrying module and the detection platform along the transverse direction and the longitudinal direction respectively based on the translation S, wherein the longitudinal direction is vertical to the transverse direction in the horizontal plane; and a carrying step: and the carrying module places the panel to be detected on a preset position on the detection platform along the first preset line.
Illustratively, the panel inspection method further comprises, after the step of transporting: respectively returning the detection platform and the carrying module to respective initial positions; collecting a second image of the panel to be detected on the detection platform; determining the position deviation of a second image position of the panel to be detected in a second image relative to a second calibration position; and controlling the detection platform and the visual detection module to compensate the position deviation and controlling the detection platform to move along a second preset line so that the panel to be detected is positioned at the center of the visual field of the visual detection module.
According to an aspect of the present invention, there is provided an electronic device comprising a processor and a memory, wherein the memory has stored therein computer program instructions for executing the panel detection method as above when the computer program instructions are executed by the processor.
According to an aspect of the present invention, there is provided a storage medium having stored thereon program instructions for performing the panel detection method as above when executed.
Before the panel to be detected is placed on the detection platform, the panel to be detected can be positioned through the positioning assembly. The positioning assembly calculates the deflection R and the translation S of the panel to be detected by shooting the characteristic part of the panel to be detected, and the panel detection device can compensate the position of the panel to be detected on the detection platform in advance based on the deflection R and the translation S, so that the position accuracy of the panel to be detected on the detection platform can be improved. The positioning assembly can prevent a panel to be detected (particularly a large-size panel to be detected) from being placed behind the detection platform to generate large position deviation, and the influence of uncertain factors on subsequent detection is avoided. For example, in a subsequent additional positioning link (if any), on one hand, it is possible to prevent a positioning point on the panel to be detected from moving out of a shooting view of the additional positioning component, and on the other hand, it is also possible to prevent a movement amount and a movement dimension of the panel to be detected from exceeding a compensation range of the detection platform when the detection platform performs position compensation on the panel to be detected after the additional positioning. The positioning assembly can provide a better basic guarantee for a subsequent additional positioning link of the panel to be detected, so that the position compensation amount of the panel detection device can be reduced in the additional positioning link, the success rate and the accuracy of the additional positioning link are improved, and the visual detection module is further favorable for the visual detection of the panel to be detected. In addition, because the positioning component carries out positioning before the panel to be detected is placed on the detection platform, the placing position of each panel to be detected on the detection platform is stable, and the platform adsorption difference caused by position change is reduced.
A series of concepts in a simplified form are introduced in the summary of the invention, which is described in further detail in the detailed description section. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
The advantages and features of the present invention are described in detail below with reference to the accompanying drawings.
Drawings
The following drawings of the invention are included to provide a further understanding of the invention. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings, there is shown in the drawings,
FIG. 1 is a perspective view of a panel inspection device according to an exemplary embodiment of the present invention;
FIG. 2 is a schematic view of a positioning assembly according to an exemplary embodiment of the present invention;
FIG. 3 is a schematic view of a first image acquired by a positioning assembly according to an exemplary embodiment of the present invention;
FIG. 4 is a schematic view of an inspection platform and its surrounding components according to an exemplary embodiment of the present invention;
FIG. 5 is a flow chart of a panel inspection method according to an exemplary embodiment of the present invention;
FIG. 6 is a flow chart of a panel inspection method according to an exemplary embodiment of the present invention; and
fig. 7 is a flowchart of a panel inspection method according to an exemplary embodiment of the present invention.
Wherein the figures include the following reference numerals:
100. a positioning assembly; 110. an image acquisition unit; 120. a positioning assembly guide rail; 200. a carrying module; 210. a cross beam; 300. a detection platform; 310. detecting a platform guide rail; 320. a support device; 321. a turntable; 322. a base; 323. a rotating assembly; 400. a blanking module; 500. a visual detection module; 600. an additional positioning assembly; 800. a panel to be detected; 810. presetting an angle; 811. a first image position.
Detailed Description
In the following description, numerous details are provided to provide a thorough understanding of the present invention. One skilled in the art, however, will understand that the following description merely illustrates a preferred embodiment of the invention and that the invention may be practiced without one or more of these details. In other instances, well known features have not been described in detail so as not to obscure the invention.
In order to enable the carrying module to accurately place the display panel on a preset position of the detection platform and eliminate deviation existing when the carrying module grabs different display panels, the invention provides a positioning assembly. The positioning assembly can be applied to a panel detection device.
Fig. 1 shows a schematic view of a panel inspection apparatus according to an embodiment of the present invention. The panel inspection apparatus includes a positioning assembly 100. The positioning assembly 100 is used to position the panel to be inspected before the panel is transported to the inspection platform. As shown in fig. 1-2, the positioning assembly 100 may include an image acquisition unit 110 and a processing unit (not shown). The image acquisition unit 110 may be used to acquire a first image that includes features on a panel to be inspected. The processing unit may be configured to determine a deflection amount R and a translation amount S of a first image position of the feature in the first image relative to the first nominal position. The deflection amount R may be a deflection angle of the first image position relative to the first calibration position. The translation amount S may be the amount of translation of the first image position relative to the first nominal position.
Illustratively, the image acquisition unit 110 may include a camera. The processing unit can be built by adopting electronic elements such as a comparator, a register, a digital logic circuit and the like, or can be realized by adopting processor chips such as a singlechip, a microprocessor, a Programmable Logic Controller (PLC), a Digital Signal Processor (DSP), a Field Programmable Gate Array (FPGA), a Programmable Logic Array (PLA), an Application Specific Integrated Circuit (ASIC) and the like and peripheral circuits thereof. Of course, in some embodiments, the functions of the camera are continuously improved, and the camera can not only be used as an image acquisition unit, but also be used as a processing unit, so that the integration level of the positioning assembly can be improved.
Taking the example that the image capturing unit 11 includes a camera, in the image capturing process, the camera can shoot the panel to be detected. Due to the limited shooting view of the camera and the larger and larger area of the panel to be detected, the entire panel to be detected may not be included clearly within the field of view of the camera. In order to ensure that the imaging is sharp and in order that the processing unit can quickly calculate the first image position of the feature in the first image, the camera can aim the shooting field of view at the feature of the panel to be detected, shoot and generate the first image of the feature. Further, the processing unit may determine a first image position by a first image of the feature, with the first image position reflecting the position of the panel to be detected.
The handling module 200 may handle the panel to be inspected to the image capturing area of the image capturing unit 110 before placing the panel to be inspected on the inspection platform 300. The image capturing unit 110 captures a first image of the feature of the panel to be detected. When the image capturing unit 110 captures the first image, the panel to be detected may be always held on the carrying module 200. The characteristic part can be a predetermined angle or a positioning mark (mark) on the panel to be detected. The first image may include only the portion of the panel to be inspected where the feature is located if the field of view captured by the image capture unit 110 is small. Fig. 3 illustrates an embodiment where the feature is a predetermined angle. As shown in fig. 3, a solid line shows a predetermined angle 810 of the panel 800 to be detected, namely ≈ AOB, and a dotted line virtually shows a first calibration position corresponding to the predetermined angle, namely a position where ≈ a ' O ' B ' is located. The translation S may be the distance from point O to point O' in the graph. The deflection amount R may be a deflection angle of OA relative to O 'a' in the first image.
In general, there may be a deviation in the gripping of different panels to be inspected by the handling module 200, but the deviation is not particularly large. After each panel to be detected is conveyed towards the image acquisition unit 110 along the predetermined route a by the conveying module 200, a first image including the feature can be captured. The difference may be primarily in the location and orientation of the feature in the first image. The first image may include the entire panel to be inspected if the photographing field of view of the image capturing unit 110 is large.
The first nominal position of the feature may be obtained by:
first, the carrying module 200 carries a test panel located at a predetermined position on the inspection platform 300 to the image capturing area of the image capturing unit 110 along the first predetermined path B in a reverse direction. The position of the detection platform 300 is a reference position. The position where the carrier module 200 grips the test panel located at the predetermined position is the initial position of the carrier module 200. A positioning mark (mark) of the test panel located at a predetermined position on the inspection platform 300 may be located at the center of the field of view of an additional positioning assembly to be mentioned later. The handling module 200 may be movable along the cross beam 210. The beam 210 extends in the lateral direction (i.e., the X-axis direction). The carrying module 200 can carry the test panel on the predetermined position along the cross member 210 to the image capturing area of the image capturing unit 110 in the reverse direction. The position of the image capture unit 110 is adjusted so that the features of the test panel are within the field of view of the image capture unit 110. And shooting a test image comprising the characteristic part of the test panel, wherein the position of the characteristic part of the test panel in the test image is the first calibration position of the characteristic part. The characteristic portion of the test image corresponds to the characteristic portion of the panel to be detected, for example, both are predetermined corners (e.g., lower left corner or upper left corner) of the corresponding panel or both are positioning marks (marks) of the corresponding panel.
Further, in adjusting the position of the image pickup unit 110, the image pickup unit 110 may be made movable in the longitudinal direction (i.e., the Y-axis direction). As shown in fig. 1-2, the image acquisition unit 110 may be slidably coupled to the positioning assembly rail 120. The positioning assembly rail 120 may extend along a longitudinal direction. In cooperation with the handling module 200, which is movable in the transverse direction, it is possible to position the features of the test panel at a desired position within the image acquisition area of the image acquisition unit 110. And shooting a test image containing the characteristic part of the test panel, wherein the position of the characteristic part of the test panel in the test image is the first calibration position of the characteristic part. After the first nominal position of the feature is determined, it can be used in each subsequent position fix. Illustratively, the feature of the test panel may be centered in the field of view of the image acquisition unit 110 when the feature of the test panel is positioned at a desired location. Of course, the desired position may also be any other suitable position within the field of view of the image acquisition unit 110.
The position (e.g., Y-axis coordinate) of the image pickup unit 110 and the position (e.g., X-axis coordinate) of the carrier module 200 at this time are recorded as the reference position of the image pickup unit 110 and the reference position of the carrier module 200, respectively. Further, the reference position of the detection platform 300 is recorded. Generally, the testing platform 300 can move along the longitudinal direction (i.e., the Y-axis direction) and can rotate around the Z-axis (extending along the vertical direction). The reference position of the sensing platform 300 thus includes the longitudinal coordinate and the Z-axis angle of the sensing platform 300.
Subsequently, the image capturing unit 110 is located at its reference position when positioning each panel to be detected. However, during the time interval between positioning two panels to be inspected, the image capturing unit 110 may be moved, for example along the Y-axis, to avoid collision during the transportation of the panels to be inspected to the image capturing area of the image capturing unit 110 by the transportation module 200. In the normal production process, the carrying module 200 moves to the reference position of the carrying module 200 for positioning after grabbing a new panel to be detected from the upstream material taking position. After the positioning is completed, the handling module 200 moves along the first predetermined route B to a position above the inspection platform 300 at the reference position, and places the panel to be inspected on the inspection platform 300.
Before the panel to be detected is placed on the detection platform, the positioning assembly calculates the deflection R and the translation S of the panel to be detected by shooting the characteristic part of the panel to be detected, and the panel detection device can compensate the position of the panel to be detected on the detection platform in advance based on the deflection R and the translation S, so that the position accuracy of the panel to be detected placed on the detection platform can be improved. The positioning assembly can prevent a panel to be detected (particularly a large-size panel to be detected) from being placed behind the detection platform to generate large position deviation, and the influence of uncertain factors on subsequent detection is avoided. For example, in a subsequent additional positioning link (if any), on one hand, it is possible to prevent a positioning point for performing additional positioning on the panel to be detected from moving out of a shooting view for the additional positioning, and on the other hand, it is also possible to prevent a movement amount and a movement dimension of the panel to be detected, which are subjected to position compensation by the detection platform after the additional positioning, from exceeding a compensation range of the detection platform. The positioning assembly can provide a better basic guarantee for a subsequent additional positioning link of the panel to be detected, so that the position compensation amount of the panel detection device can be reduced in the additional positioning link, the success rate and the accuracy of the additional positioning link are improved, and the visual detection module is further favorable for the visual detection of the panel to be detected. In addition, because the positioning component carries out positioning before the panel to be detected is placed on the detection platform, the placing position of each panel to be detected on the detection platform is stable, and the platform adsorption difference caused by position change is reduced.
In an embodiment where the feature portion includes a predetermined corner of the panel to be detected, as shown in fig. 3, the processing unit may determine the boundary of the panel to be detected 800 according to the difference in pixel brightness between the panel to be detected 800 and the background in the first image, and further determine the two sides OA and OB constituting the predetermined corner. The first image position of the predetermined angle 810 in the first image can be calculated by the two edges OA and OB. The first image position may comprise a position and an orientation of a predetermined angle. The processing unit can also determine the deflection amount R and translation amount S of the < AOB relative to the < A ' O ' B '.
For example, the first calibration position may have position information. The position information may include nominal coordinates of the vertex of the predetermined angle. The processing unit may obtain the translation amount S by determining a translation amount of coordinates of a vertex of the predetermined angle in the first image with respect to the calibration coordinates.
In the embodiment shown in FIG. 3, the nominal coordinates of the apex of the predetermined angle 810 are the coordinates (x) of the apex O ' of ^ A ' O ' B0,y0) Coordinates (x) of the vertex O of the predetermined angle AOB1,y1). According to (x)0,y0) And (x)1,y1) The amount of translation S of the predetermined angle 810 can be calculated.
The translation S may be decomposed into a lateral translation component and a longitudinal translation component. The lateral translation component corresponds to the translation component in the X-axis direction in fig. 1, and the longitudinal translation component corresponds to the translation component in the Y-axis direction in fig. 1. The translation quantity S is decomposed into translation components in the two directions, so that corresponding parts can be conveniently and respectively controlled to compensate the translation components in the follow-up process. Illustratively, the lateral translational component may be compensated for by the handling module 200 and the longitudinal translational component may be compensated for by the inspection platform 300.
For example, the lateral translation component and the longitudinal translation component may be determined by the first image position relative to the first nominal position. For example, as shown in fig. 3, the X-axis direction of the coordinate system established in the first image may be parallel to the physical lateral direction (i.e., the X-axis direction in fig. 1), and the Y-axis direction in the coordinate system may be parallel to the physical lateral direction (i.e., the Y-axis direction in fig. 1). Based on this, the lateral translation component may be x1-x0The longitudinal translation component may be y1-y0. Of course, in other embodiments not shown, the x-axis of the coordinate system in the first image may also have an angle with the physical lateral direction.
For example, the lateral translation component and the longitudinal translation component may be determined by a distance of the first image position from the first nominal position and an angle of a line between the first image position and the first nominal position to the lateral direction or the longitudinal direction. For example, as shown in FIG. 3, the first image location may be OO' from the first nominal location. The angle θ between OO' and the y-axis may be the angle between the line between the first image position and the first nominal position and the longitudinal direction. Based on this, the lateral translation component may be OO '. sin θ, and the longitudinal translation component may be OO'. cos θ.
Exemplarily, in an example in which the feature includes a predetermined corner of the panel to be detected, the position information of the first calibration position may further include a calibration angle of a first side of two sides of the predetermined corner. The processing unit may obtain said amount of deflection R by determining an amount of deflection of the angle of the first edge in the first image relative to a nominal angle.
In the embodiment shown in FIG. 3, the side OA of the predetermined angle 810 is taken as the first side, and the nominal angle of the first side OA is the angle O 'A'. The angle of the first edge OA in the first image is deflected by an amount R relative to the nominal angle by an angle between OA and O 'A'.
According to another aspect of the invention, a panel detection device is also provided. The panel inspection apparatus includes any of the positioning assemblies 100, the carrier module 200, the inspection platform 300, and the control module (not shown) as described above.
The handling module 200 is movable in the lateral direction. The carrying module 200 is used for carrying the panels to be detected to the image acquisition area of the positioning assembly 100 and the detection platform 300 in sequence. Illustratively, the handling module 200 may grasp the panels to be inspected from an upstream supply. The carrier module 200 may be movably disposed on the positioning assembly rail 120. The positioning assembly rail 120 extends in a lateral direction (i.e., the X-axis direction).
The inspection stage 300 is movable in the longitudinal direction (i.e., Y-axis) and rotatable in the horizontal plane (i.e., XY plane). The inspection platform 300 moves mainly to transport the panel to be inspected thereon to the visual inspection area of the visual inspection module 500. In the present application, the movement of the detection platform 300 can also compensate for the deviation between the gripping of different panels to be detected by the handling module 200. Illustratively, as shown in FIG. 4, the inspection platform 300 may be disposed on a support 320, and the support 320 may be slidably coupled to an inspection platform rail 310 extending along the Y-axis. The supporting device 320 can slide along the inspection platform rail 310 under the driving of the driving device. The driving device can adopt common devices such as a caterpillar track, a linear motor and the like, and the detailed structure of the driving device is not repeated. The supporting device 320 may include a turntable 321 at the top, a base 322 at the bottom, and a rotating assembly 323 connected between the turntable 321 and the base 322. Turntable 321 is rotatably coupled to base 322 by a rotating assembly 323. A rotation driving device may be disposed in the base 322, and the rotation driving device may include various common mechanisms such as a rotating motor, and the like, for driving the rotating assembly 323 to drive the rotating table 321 to rotate around the vertical direction, so that the detection platform 300 may rotate in the horizontal plane. The inspection platform 300 may be secured to the turntable 321 by fasteners (not shown). Thus, the degrees of freedom of movement of the inspection stage 300 include a degree of freedom of movement in the longitudinal direction (i.e., Y-axis) and a degree of freedom of rotation in the horizontal plane (i.e., XY-plane).
The control module is used for controlling the deflection angle corresponding to the pre-rotation deflection amount R of the detection platform 300 according to the deflection amount R determined by the positioning assembly 100, and controlling the transverse translation component and the longitudinal translation component corresponding to the pre-movement translation amount S of the carrying module 200 and the detection platform 300 along the transverse direction and the longitudinal direction respectively according to the translation amount S determined by the positioning assembly 100, so that the carrying module 200 can place the panel to be detected on the predetermined position on the detection platform 300 along the first predetermined line.
Before the transporting module 200 places the panel to be detected on the detecting platform 300, the detecting platform 300 is controlled to deflect at an angle corresponding to the rotational deflection R, the transporting module 200 is controlled to pre-move a transverse translation component corresponding to the translation S in the transverse direction, and the detecting platform 300 is controlled to pre-move a longitudinal translation component corresponding to the translation S in the longitudinal direction. The above-mentioned upper steps are not in sequence, and can be completed before the panel to be detected is placed on the detection platform 300. For example, referring to fig. 3, assuming that the orientation of fig. 3 is consistent with the orientation of the top view of fig. 1, when the first image position of the feature in the first image is deflected by an offset R in the counterclockwise direction with respect to the first nominal position, the detection platform 300 may be controlled to rotate by R degrees in the counterclockwise direction in the horizontal plane. When the first image position of the feature in the first image is lower left relative to the first calibration position, the handling module 200 may be controlled to move the spatial transverse translation component along the reverse direction of the X-axis, and the detection platform 300 may be controlled to move the spatial longitudinal translation component along the forward direction of the Y-axis. The method of acquiring the translation amount S has been described in the foregoing, but the lateral translation component and the longitudinal translation component obtained as described above are translation components in the first image, respectively. In correspondence to the space, conversion is required according to a scale of the first image and the actual physical space. The scale is determined by the image capturing unit 110 of the positioning assembly 100, and for the image capturing unit 110, after the image capturing unit 110 is debugged for the first time, the parameters such as the focal length of the image capturing unit 110 will not be changed subsequently, so the scale will not be changed after the determination.
After the position and the angle are compensated, the panel to be detected is placed on the detection platform 300, and the panel to be detected can be located at a preset position on the detection platform 300. However, at this time, the inspection platform 300 has already deviated from its reference position, and it is preferable to return the inspection platform 300 to its reference position again for the convenience of subsequent operations.
It should be noted that the processing unit of the positioning component and the control module are implemented by the same processor.
Illustratively, as shown in fig. 1, the panel inspection apparatus may further include a visual inspection module 500 and an additional positioning assembly 600.
The visual inspection module 500 is used for performing visual inspection on a panel to be inspected. The visual inspection module 500 is used for performing visual inspection on a panel to be inspected. The vision inspection module 500 may include one or more of a particle inspection camera, a tour inspection camera, an appearance inspection camera, and the like. The particle detection camera includes, for example, a DIC detection camera for detecting particle distribution, particle shift, bubble detection, foreign matter detection, and the like. The edge inspecting camera is used for inspecting the appearance of the substrate, such as the presence or absence of cracks, scratches, edge chipping, and the like on the substrate. The appearance detection camera is used for detecting the appearance of the integrated circuit, particularly the conditions of edge breakage, corner breakage and the like. The vision inspection module 500 is movable in a lateral direction (i.e., an X-axis direction). In the actual detection process, the edge to be detected of the panel to be detected is placed along the transverse direction, the visual detection module 500 can move along the edge to be detected, and visual detection is performed on the edge in the moving process.
Referring to fig. 1 and 4, after one edge of the panel to be inspected is inspected, the supporting device 320 may be controlled to move along the inspection platform rail 310 in a direction away from the vision inspection module 500. When the inspection platform 300 is far enough away from the vision inspection module 500, the inspection platform 300 can be controlled to rotate in the horizontal plane so that the next edge to be inspected of the panel to be inspected faces the vision inspection module 500. In this way, the inspection platform 300 may be prevented from colliding with the vision inspection module 500 while rotating. The inspection platform 300 is then moved back along the inspection platform rail 310 toward the visual inspection module 500 so that the next edge of the panel to be inspected moves into the visual inspection area of the visual inspection module 500.
Additional positioning assemblies 600 may include additional image acquisition units and additional processing units. The additional image capturing unit is used for capturing a second image of the panel to be detected on the detection platform 300. The additional processing unit is used for determining the position deviation of the second image position of the panel to be detected in the second image relative to the second calibration position. The control module is further configured to control the detection platform and the vision detection module to compensate for the position deviation, so that the panel to be detected can be located at the center of the field of view of the vision detection module 500 after the detection platform 300 moves along the second predetermined line. Illustratively, the additional processing unit is implemented with the same processor as the control module described above.
The additional positioning assembly 600 positions the panel to be inspected on the inspection platform 300 after the panel to be inspected is carried onto the inspection platform 300. For example, the additional positioning assembly 600 may be disposed above the inspection platform 300, so that the additional image capturing unit may directly capture a second image of the panel to be inspected after the panel to be inspected is placed on the inspection platform 300. In general, the additional image capturing unit has higher shooting accuracy than the image capturing unit 110 so as to be able to more accurately position the panel to be detected. Alternatively, the additional positioning assembly 600 may be located in a fixed position above the detection platform 300. Optionally, additional positioning assemblies 600 may also be provided on the carrier module 200. After the transporting module places the panel to be detected on the detecting platform 300, the transporting module is just above the panel to be detected.
Illustratively, the additional positioning assembly 600 may take a second image containing additional features on the panel to be detected. The second image position of the panel to be detected in the second image is determined by the position of the additional feature. The additional features may be the same features on the panel to be detected as the features shot by the image capturing unit 110, for example, all the additional features may be positioning marks (marks) on the panel to be detected. Of course, the additional feature may be a different feature on the panel to be detected than the feature, for example, the feature is a specific corner of the panel to be detected, and the additional feature is a positioning mark (mark) on the panel to be detected. The additional positioning assembly 600 is generally used to capture two additional features on the panel to be detected, which may be disposed on the panel to be detected at intervals along the transverse direction (i.e., the X-axis direction), for example, at two corners of the panel to be detected. Since the additional positioning member 600 has high photographing accuracy, only one additional feature can be photographed at a time, and thus, after one additional feature is photographed, it is necessary to move to above another additional feature in the lateral direction for photographing. The additional positioning assembly 600 is disposed on the carrying module 200, and the carrying module 200 can be driven to move in the transverse direction, so that a set of driving assemblies can be reduced, and the cost of the panel detection device can be reduced.
For example, the control module may be configured to determine a positional deviation of the additional feature in the second image of the second image with respect to its nominal position. The nominal position of the additional feature may be obtained similarly to the nominal position of the feature. For example, the inspection platform 300 located at the center of the visual field of the vision inspection module 500 may be moved in the opposite direction along the second predetermined line C to the additional positioning assembly 600, and a test image of the additional feature at this time is acquired, and the position of the additional feature in the test image is the calibrated position thereof.
After the additional processing unit determines a positional deviation of the second image position of the panel to be detected in the second image with respect to the second nominal position, the control module may control the inspection platform 300 to rotate in the horizontal plane, control the inspection platform 300 to move in the longitudinal direction, and/or control the vision inspection module 500 to move in the X direction to compensate for the positional deviation. That is, the degrees of freedom of movement of the inspection platform 300 and the vision inspection module 500 can be fully utilized to compensate for a specific positional deviation. After compensation, the inspection platform 300 moves along the second predetermined line C to locate the panel to be inspected in the center of the field of view of the vision inspection module 500.
According to the invention, before the carrying module carries the panel to be detected onto the detection platform 300, the positioning assembly 100 can be used for carrying out primary positioning on the panel to be detected, and the control module can control the detection platform 300 and the carrying module 200 to move based on the primary positioning result so as to compensate the position of the panel to be detected on the detection platform 300 in advance, so that the position accuracy of the panel to be detected placed on the detection platform 300 can be improved. The additional positioning assembly 600 may perform repositioning on the panel to be detected after the panel to be detected is carried onto the detection platform 300, and the control module may control the detection platform 300 and the visual detection module 500 to move based on the repositioning result, so as to compensate the position of the detection platform 300 relative to the visual detection module 500, thereby improving the position accuracy of the panel to be detected in the visual detection area of the visual detection module 500. Based on the initial positioning and position compensation, the additional positioning assembly 600 may select a higher accuracy camera for further improving the accuracy of the re-positioning. And the accuracy of the positioning assembly 100 may be less than that of the additional positioning assembly 600 to improve positioning efficiency. Thus, after positioning twice, the panel to be detected can be ensured to meet the requirements of the visual detection module 500 basically, and the detection efficiency is further improved.
The visual inspection module 500 may be disposed behind and under the cross member 210. After inspection is complete, inspection platform 300 may be returned along inspection platform rail 310. In the illustrated embodiment, the panel inspection apparatus further includes a blanking module 400, and the blanking module 400 is used for transporting the inspected panel to be inspected from the inspection platform 300 to a blanking position. The panel is transported to a blanking station 920 by a blanking module 400. The blanking module 400 can also be moved along the cross beam 210. It is understood that the blanking module 400 may be additionally provided, that is, the carrying module 200 may perform the loading and unloading operation.
According to still another aspect of the present invention, there is also provided a panel inspection method. As shown in fig. 5, the panel inspection method includes the steps of:
a collection step S1: collecting a first image of a feature on a panel to be detected on the handling module 200;
determination step S2: and determining a deflection amount R and a translation amount S of a first image position of the characteristic part in the first image relative to the first calibration position, wherein the deflection amount R is a deflection angle of the first image position relative to the first calibration position, and the translation amount S is a translation amount of the first image position relative to the first calibration position.
Both the capturing step S1 and the determining step S2 are performed before the panel to be inspected is carried onto the inspection stage 300.
Illustratively, the characteristic part comprises a predetermined angle of the panel to be detected, and the first calibration position has position information comprising calibration coordinates of a vertex of the predetermined angle. Determining the translation amount S may include:
simulating a vertex of the predetermined angle according to the two edges of the predetermined angle; and
and determining the translation amount of the coordinate of the vertex in the first image relative to the calibration coordinate to obtain the translation amount S.
Illustratively, the characteristic part comprises a predetermined angle of the panel to be detected, the first calibration position has position information, and the position information comprises a calibration angle of a first edge of two edges of the predetermined angle. Based thereon, determining the deflection amount R may include:
the deflection angle of the first side of the two sides of the predetermined angle in the first image relative to the calibration angle is determined to obtain the deflection amount R.
Illustratively, as shown in fig. 6, the panel detecting method further includes, after the determining step S2:
compensation step S3: the detection platform 300 is controlled to pre-rotate the deflection angle corresponding to the deflection amount R based on the deflection amount R, and the carrying module 200 and the detection platform 300 are controlled to pre-move the transverse translation component and the longitudinal translation component corresponding to the translation amount S along the transverse direction and the longitudinal direction respectively based on the translation amount S, wherein the longitudinal direction is perpendicular to the transverse direction in the horizontal plane. In the compensation step S3, the movement of the carrying module 200 and the movement of the detecting platform 300 may be performed simultaneously or in different time intervals.
Conveyance step S4: the handling module 200 places the panel to be inspected on the inspection platform 300 at a predetermined position along the first predetermined route. The first predetermined line is the same for the same type of panel to be tested.
Illustratively, as shown in fig. 7, the panel detection method further includes, after the carrying step S4:
step S5: the sensing platform 300 and the carrier module 200 are respectively returned to their initial positions. In this way, in the compensation step S3, the influence of the subsequent steps after the difference between the motions of the carrying module 200 and the testing platform 300 for different panels to be tested can be avoided.
Step S6: a second image of the panel to be inspected positioned on inspection platform 300 is acquired.
Step S7: and determining the position deviation of the second image position of the panel to be detected in the second image relative to the second calibration position.
Step S8: and controlling the detection platform 300 and the vision detection module 500 to compensate for the position deviation and controlling the detection platform 300 to move along a second predetermined line, so that the panel to be detected is positioned at the center of the visual field of the vision detection module 500. It should be noted that after the panel to be detected is subjected to the additional positioning, the detecting platform 300 needs to convey the panel to be detected to the visual detecting module 500 along the second predetermined route for the visual detection. Thus, the position compensated motion performed by the inspection platform 300 and the vision inspection module 500 may be performed during the movement of the inspection platform 300 along the second predetermined line; or after the testing platform 300 moves along the second predetermined path; or may also be performed before the testing platform 300 is moved along the second predetermined path. The skilled person can select as desired.
According to another aspect of the invention, an electronic device is also provided. The electronic device may include a processor and a memory. Wherein the memory has stored therein computer program instructions for executing the panel detection method as described above when executed by the processor.
According to still another aspect of the present invention, there is also provided a storage medium. On the storage medium, program instructions are stored which, when executed, are adapted to perform the panel detection method as described above. The storage medium may include, for example, a storage component of a tablet computer, a hard disk of a personal computer, Read Only Memory (ROM), Erasable Programmable Read Only Memory (EPROM), portable compact disc read only memory (CD-ROM), USB memory, or any combination of the above storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.
In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front", "rear", "upper", "lower", "left", "right", "lateral", "vertical", "horizontal" and "top", "bottom", etc., are generally based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, and in the case of not making a reverse explanation, these directional terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the scope of the present invention; the terms "inner" and "outer" refer to the interior and exterior relative to the contours of the components themselves.
For ease of description, relative terms of regions such as "above … …", "above … …", "above … …", "above", and the like may be used herein to describe the regional positional relationship of one or more components or features with other components or features as illustrated in the figures. It is to be understood that the relative terms of the regions are intended to encompass not only the orientation of the element as depicted in the figures, but also different orientations in use or operation. For example, if an element in the drawings is turned over in its entirety, the articles "over" or "on" other elements or features will include the articles "under" or "beneath" the other elements or features. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". Further, these components or features may also be positioned at various other angles (e.g., rotated 90 degrees or other angles), all of which are intended to be encompassed herein.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, elements, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
The present invention has been illustrated by the above embodiments, but it should be understood that the above embodiments are for illustrative and descriptive purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, it will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that many variations and modifications may be made in accordance with the teachings of the present invention, which variations and modifications are within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (14)

1. A positioning assembly for a panel detection device is used for positioning a panel to be detected before the panel to be detected is carried to a detection platform, and comprises an image acquisition unit and a processing unit, wherein the image acquisition unit is used for acquiring a first image of a characteristic part on the panel to be detected, and the processing unit is used for determining a deflection amount R and a translation amount S of a first image position of the characteristic part in the first image relative to a first calibration position, the deflection amount R is a deflection angle of the first image position relative to the first calibration position, and the translation amount S is a translation amount of the first image position relative to the first calibration position.
2. The positioning assembly according to claim 1, wherein the feature includes a predetermined corner of the panel to be detected, the first calibration position has position information including calibration coordinates of a vertex of the predetermined corner, and the processing unit obtains the translation amount S by determining a translation amount of a coordinate of the vertex of the predetermined corner in the first image with respect to the calibration coordinates.
3. The positioning assembly of claim 1, wherein the feature comprises a predetermined angle of the panel to be inspected, the first nominal position has position information comprising a nominal angle of a first edge of the two edges of the feature, and the processing unit obtains the deflection amount R by determining a deflection amount of an angle of the first edge in the first image relative to the nominal angle.
4. The positioning assembly of claim 1, wherein the translation S comprises a lateral translation component in a lateral direction and a longitudinal translation component in a longitudinal direction, wherein
The transverse translation component and the longitudinal translation component are determined by the coordinates of the first image position relative to the coordinates of the first calibration position; or
The transverse translation component and the longitudinal translation component are determined by the distance from the first image position to the first calibration position and the angle between the line between the first image position and the first calibration position and the transverse direction or the longitudinal direction.
5. The locating assembly of claim 1, wherein the feature comprises a locating mark on the panel to be detected.
6. A panel testing apparatus, comprising:
the positioning assembly of any of claims 1-5;
an inspection platform movable along a longitudinal direction and rotatable within a horizontal plane;
the carrying module is movable along the transverse direction and is used for sequentially carrying the panel to be detected to the image acquisition area of the positioning assembly and the detection platform; and
the control module is used for controlling the detection platform to pre-rotate a deflection angle corresponding to the deflection R according to the deflection R determined by the positioning assembly, and controlling the carrying module and the detection platform to pre-move a spatial transverse translation component and a spatial longitudinal translation component corresponding to the translation S along the transverse direction and the longitudinal direction respectively according to the translation S determined by the positioning assembly, so that the carrying module can place the panel to be detected on a preset position on the detection platform along a first preset line.
7. The panel inspection device of claim 6, further comprising:
the visual detection module is used for detecting the defects of the panel to be detected and can move along the transverse direction; and
an additional positioning assembly comprising an additional image acquisition unit for acquiring a second image of the panel to be detected positioned on the inspection platform and an additional processing unit for determining a position deviation of the position of the second image of the panel to be detected in the second image with respect to a second nominal position,
the control module is further configured to control the detection platform and the visual detection module to compensate for the position deviation, so that the panel to be detected can be located in the center of the visual field of the visual detection module after the detection platform moves along a second predetermined line.
8. A panel inspection method, comprising:
the collection step comprises: collecting a first image of a characteristic part on a panel to be detected on a carrying module; and
a determination step: determining a deflection amount R and a translation amount S of a first image position of the feature in the first image relative to a first calibration position, wherein the deflection amount R is a deflection angle of the first image position relative to the first calibration position, and the translation amount S is a translation amount of the first image position relative to the first calibration position.
9. The panel inspection method according to claim 8, wherein the characteristic portion includes a predetermined angle of the panel to be inspected, the first calibration position has position information including calibration coordinates of a vertex of the predetermined angle,
determining the translation amount S comprises:
simulating a vertex of the predetermined angle according to two edges of the predetermined angle; and
and determining the translation amount of the coordinates of the vertex in the first image relative to the calibration coordinates to obtain the translation amount S.
10. The panel inspection method according to claim 8, wherein the feature portion includes a predetermined corner of the panel to be inspected, the first index position has position information including an index angle of a first side of two sides of the predetermined corner,
determining the deflection amount R comprises:
determining a deflection angle of a first edge of the two edges of the predetermined angle in the first image relative to the calibration angle to obtain the deflection amount R.
11. The panel inspection method of claim 8,
the panel detection method further includes, after the determining step:
a compensation step: controlling a detection platform to pre-rotate a deflection angle corresponding to the deflection amount R based on the deflection amount R, and controlling the carrying module and the detection platform to pre-move a transverse translation component and a longitudinal translation component corresponding to the translation amount S respectively along the transverse direction and the longitudinal direction based on the translation amount S, wherein the longitudinal direction is perpendicular to the transverse direction in a horizontal plane; and
a carrying step: and the carrying module is used for placing the panel to be detected on a preset position on the detection platform along a first preset line.
12. The panel inspection method of claim 11, further comprising, after the conveying step:
respectively returning the detection platform and the carrying module to respective initial positions;
collecting a second image of the panel to be detected on the detection platform;
determining the position deviation of the second image position of the panel to be detected in the second image relative to the second calibration position; and
and controlling the detection platform and the visual detection module to compensate the position deviation and controlling the detection platform to move along a second preset line so that the panel to be detected is positioned at the center of the visual field of the visual detection module.
13. An electronic device comprising a processor and a memory, wherein the memory has stored therein computer program instructions for execution by the processor to perform the panel detection method of any of claims 8 to 12.
14. A storage medium having stored thereon program instructions for performing, when executed, the panel detection method of any one of claims 8 to 12.
CN202111547636.4A 2021-12-16 2021-12-16 Positioning assembly, panel detection device and method thereof Pending CN114354619A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1865950A (en) * 2005-04-25 2006-11-22 王�琦 Automatic aligning method for printed circuit board
CN107957659A (en) * 2017-12-06 2018-04-24 江苏维普光电科技有限公司 Mask and wafer defect detection orthogonality compensation method
CN108614370A (en) * 2018-07-26 2018-10-02 宁波舜宇仪器有限公司 Liquid crystal panel detection device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1865950A (en) * 2005-04-25 2006-11-22 王�琦 Automatic aligning method for printed circuit board
CN107957659A (en) * 2017-12-06 2018-04-24 江苏维普光电科技有限公司 Mask and wafer defect detection orthogonality compensation method
CN108614370A (en) * 2018-07-26 2018-10-02 宁波舜宇仪器有限公司 Liquid crystal panel detection device

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