CN114264616A - Dual-motor automatic angle-changing system structure of full-Mueller matrix ellipsometer - Google Patents
Dual-motor automatic angle-changing system structure of full-Mueller matrix ellipsometer Download PDFInfo
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- 238000005259 measurement Methods 0.000 abstract description 6
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Abstract
The invention belongs to the technical field of ellipsometers, and particularly relates to a double-motor automatic angle changing system structure of a full-Mueller matrix ellipsometer. The invention adopts a horizontal structure mode, the rotating shafts of the two arms basically do not bear radial torque, only torque of angular rotation is provided, the precision control difficulty is lower, a complicated vacuum adsorption device is removed when a sample is borne, and a mode of clamping the sample by using a magnet is adopted, so the structure is simple and easy to realize. In addition, the invention respectively adopts the two stepping motors to drive the polarization detection arm and the sample platform to rotate, and the polarization arm is fixed, thereby reducing the system measurement error caused by shaking when the polarization arm rotates, and greatly improving the measurement precision of the Mueller matrix ellipsometer.
Description
Technical Field
The invention belongs to the technical field of ellipsometers, and particularly relates to a double-motor automatic angle changing system structure of a full-Mueller matrix ellipsometer.
Background
The muller matrix ellipsometer is an optical measuring device for detecting the thickness, optical constant and material microstructure characteristics of a thin film, and is an optical nondestructive testing method which is rapidly developed along with the development of modern technologies. Samples that can be tested include bulk materials, thin films, and multilayer structures grown or deposited on planar substrates. Because of the non-contact with the sample, there is no damage to the sample and no vacuum is required, making the ellipsometer an extremely attractive detection device. It has been widely used for the rapid testing and research of optical characteristics, structural characteristics, growth process and material quality of various materials such as dielectric, semiconductor, metal, organic matter and the like. The online monitoring of the film growth applied to the processes of Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD) and the like, and the measurement of the critical dimension (OCD) of the structure applied to the processes of Optical Lithography (Optical Lithography), Reactive Ion Etching (RIE) and the like are all representative applications based on ellipsometer measurement.
At present, the arrangement modes of sample stages of an ellipsometer are divided into horizontal and vertical, different arrangement modes are adopted, and an angle changing mechanism of the ellipsometer can be correspondingly changed. Therefore, when the overall scheme design of the angle changing mechanism is carried out, the arrangement mode of the sample table is considered firstly. The vertical and horizontal design of the sample stage corresponds to the vertical and horizontal design of the polarizing arm and the polarization detecting arm. From the angle analysis of the starting arm and the detecting arm, the torque generated by the vertical design on the rotating shafts of the two arms is large, if the rotating shafts are of an automatic angle changing type, the self-locking requirement and the output torque requirement on a motor for controlling the rotation of an input end are higher, and in addition, the difficulty of angle precision control is also improved; under the horizontal design, the rotating shafts of the two arms basically do not bear radial torque, only angular rotation torque is provided, and the precision control difficulty is low. The stress condition of the rotary arm of the mechanism and the control precision of the motor are compared, the advantage of the horizontal angle-changing mechanism is obvious, if the horizontal structure needs to bear a tested sample, a vacuum adsorption device is generally required to be additionally arranged on the sample table, and meanwhile, the shape of the sample has a large requirement, so that the conventional ellipsometer adopts a vertical structural mode, two arms are connected with the screw sliding table through the support rod, the motor of the screw sliding table drives the support rod to move, and the support rod drives the two arms of the angle-changing system to rotate. The method is feasible, but the structure of the method adopting the strut connection is complex, the load requirement on the motor is high, and meanwhile, the adopted strut structure is easy to cause larger system errors.
Disclosure of Invention
Aiming at the technical problems that the structure is complex in the mode of connecting the support rods, the requirement on the load of the motor is high, and larger system errors are easily caused due to the support rod structure in the prior art, the invention provides the dual-motor automatic angle changing system structure of the full-Mueller matrix ellipsometer, which is simple in structure, easy to realize and small in errors.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides a two motor automatic angle system architecture that becomes of full muller matrix ellipsometer, includes polarizing arm overall structure, examine polarizing arm overall structure, sample objective table structure, first step motor, bottom plate, polarizing arm overall structure sets up on the bottom plate, be provided with first step motor on the bottom plate, be provided with on the first step motor and examine polarizing arm overall structure, it is provided with sample objective table structure on the polarizing arm overall structure to examine.
The whole structure of the polarizing arm comprises a laser light source, a first collimating diaphragm and a polarizer, wherein the first collimating diaphragm and the polarizer are sequentially arranged on one side of the laser light source along the light path direction.
The whole structure of the polarizing arm further comprises a rotary servo motor with a first belt compensator, a first motor fixing plate and a polarizing arm supporting plate, the first motor fixing plate is fixed on the bottom plate, the first servo motor with the first belt compensator is fixed on one side of the first motor fixing plate, the polarizing arm supporting plate is arranged on the first servo motor with the first belt compensator, and the laser light source, the first collimating diaphragm and the polarizer are all fixed on the polarizing arm supporting plate.
A motor rib plate is arranged between the first motor fixing plate and the bottom plate, a first fusion diaphragm is fixedly installed in the sleeve on the other side of the first motor fixing plate, and the first fusion diaphragm is arranged in the light path direction of the laser light source.
The whole structure of the polarization detection arm comprises a servo motor, a polarization detector, a second collimation diaphragm and a polarization detection arm support plate, wherein the second drives the compensator to rotate, the polarization detector and the second collimation diaphragm are sequentially arranged in the light path direction of the laser light source, the second drives the servo motor, in which the compensator rotates, to be provided with the polarization detection arm support plate, and the polarization detector and the second collimation diaphragm are both fixed on the polarization detection arm support plate.
The first stepping motor is provided with a polarization detection bottom plate, a second motor fixing plate is fixedly connected to the polarization detection bottom plate, a second servo motor for driving the compensator to rotate is fixed on one side of the second motor fixing plate, a second fusion diaphragm is fixedly installed in a sleeve on the other side of the second motor fixing plate, and the second fusion diaphragm is arranged in the light path direction of the laser light source.
The servo motor with the compensator rotating and the servo motor with the compensator rotating driven by the second driving device both comprise the compensator and the servo motor, and the compensator is embedded in a hollow shaft of the servo motor through a switching ring.
The sample objective table structure comprises a sample fixed baffle, an X-Y-Z three-axis displacement table, a second stepping motor and a sample objective table bottom plate, wherein the second stepping motor is arranged on the polarization detection bottom plate, a sample objective table bottom is arranged on the second stepping motor, an X-Y-Z three-axis displacement table is arranged on the sample objective table bottom plate, the X-Y-Z three-axis displacement table is provided with the sample fixed baffle, and the fixed baffle is arranged in the light path direction of a laser light source.
The second stepping motor and the first stepping motor are driven by a motor with the following speed of 1: 2, and the first stepping motor and the second stepping motor are coaxially arranged.
The first rotary servo motor with the compensator and the second rotary servo motor driving the compensator to rotate are driven by a motor with the following rotation speed of 5: 3, the rotating speed synchronously rotates.
Compared with the prior art, the invention has the following beneficial effects:
the invention adopts a horizontal structure mode, the rotating shafts of the two arms basically do not bear radial torque, only torque of angular rotation is provided, the precision control difficulty is lower, a complicated vacuum adsorption device is removed when a sample is borne, and a mode of clamping the sample by using a magnet is adopted, so the structure is simple and easy to realize. In addition, the invention respectively adopts the two stepping motors to drive the polarization detection arm and the sample platform to rotate, and the polarization arm is fixed, thereby reducing the system measurement error caused by shaking when the polarization arm rotates, and greatly improving the measurement precision of the Mueller matrix ellipsometer.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a right side view of the present invention;
FIG. 4 is a top view of the present invention;
fig. 5 is an isometric view of the present invention.
Wherein: the device comprises a laser light source 1, a first collimation diaphragm 2, a polarizer 3, a first rotating servo motor with a compensator 4, a fixed baffle 5, an X-Y-Z three-axis displacement platform 6, a first stepping motor 71, a second stepping motor 72, a first fusion diaphragm 81, a second fusion diaphragm 82, a second servo motor driving the compensator to rotate 9, an analyzer 10, a second collimation diaphragm 11, a motor rib plate 12, a bottom plate 13, an analyzer bottom plate 14, a first motor fixing plate 15, a polarizing arm support plate 16, a polarizing arm support plate 17, a sample stage bottom plate 18 and a second motor fixing plate 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model provides a two motor automatic angle system architecture that becomes of full muller matrix ellipsometer, as shown in fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, including polarizing arm overall structure, examine polarizing arm overall structure, sample objective table structure, first step motor 71, bottom plate 13, polarizing arm overall structure sets up on bottom plate 13, is provided with first step motor 71 on bottom plate 13, is provided with on the first step motor 71 and examines polarizing arm overall structure, is provided with sample objective table structure on the analyzing arm overall structure.
Further, the whole structure of the polarizing arm comprises a laser light source 1, a first collimation diaphragm 2 and a polarizer 3, wherein the first collimation diaphragm 2 and the polarizer 3 are sequentially arranged on one side of the laser light source 1 along the light path direction.
Further, the whole structure of the polarizing arm further comprises a first rotary servo motor 4 with a compensator, a first motor fixing plate 15 and a polarizing arm supporting plate 16, the first motor fixing plate 15 is fixed on the bottom plate 13, the first servo motor 4 with the compensator rotating is fixed on one side of the first motor fixing plate 15, the polarizing arm supporting plate 16 is arranged on the first servo motor 4 with the compensator rotating, and the laser light source 1, the first collimation light stop 2 and the polarizer 3 are fixed on the polarizing arm supporting plate 16.
Further, a motor rib plate 12 is arranged between the first motor fixing plate 15 and the bottom plate 13, a first fusion diaphragm 81 is fixedly installed in the sleeve on the other side of the first motor fixing plate 15, and the first fusion diaphragm 81 is arranged in the light path direction of the laser light source 1 and used for aligning the light path and ensuring the measuring accuracy.
Further, the whole structure of the polarization detection arm comprises a servo motor 9, a polarization detector 10, a second collimating diaphragm 11 and a polarization detection arm support plate 17, wherein the second servo motor drives the compensator to rotate, the polarization detector 10 and the second collimating diaphragm 11 are sequentially arranged in the light path direction of the laser light source 1, the second servo motor 9, which drives the compensator to rotate, is provided with the polarization detection arm support plate 17, and the polarization detector 10 and the second collimating diaphragm 11 are both fixed on the polarization detection arm support plate 17.
Further, a polarization detection bottom plate 14 is arranged on the first stepping motor 71, a second motor fixing plate 19 is fixedly connected to the polarization detection bottom plate 14, and a second servo motor 9 for driving the compensator to rotate is fixed on one side of the second motor fixing plate 19.
Further, a second fusion diaphragm 82 is fixedly installed in the sleeve on the other side of the second motor fixing plate 19, and the second fusion diaphragm 82 is arranged in the light path direction of the laser light source 1 and used for aligning the light path, so that the measuring accuracy is ensured.
Furthermore, the servo motor 4 with the compensator rotating and the servo motor 9 with the compensator rotating driven by the second belt all comprise a compensator and a servo motor, and the compensator is embedded in a hollow shaft of the servo motor through an adapter ring.
Further, the sample objective table structure comprises a sample fixed baffle 5, an X-Y-Z three-axis displacement table 6, a second stepping motor 72 and a sample objective table bottom plate 18, wherein the second stepping motor 72 is arranged on the polarization detection bottom plate 14, the sample objective table bottom plate 18 is arranged on the second stepping motor 72, the X-Y-Z three-axis displacement table 6 is arranged on the sample objective table bottom plate 18, the X-Y-Z three-axis displacement table 6 is provided with the sample fixed baffle 5, and the fixed baffle 5 is arranged in the light path direction of the laser light source 1. The sample stage adopts an X-Y-Z three-axis displacement stage 6 to finely adjust the position of a sample, so that laser rays are ensured to be accurately incident to the central position of the sample and to be incident to the center of a detector after being reflected by the sample. Simultaneously, the bottom of the sample fixing baffle plate 5 is made of iron, and the sample is fixed to the bottom of the sample fixing baffle plate by means of magnet adsorption, so that the sample fixing baffle plate is simpler and more convenient, is easy to operate and has smaller limitation compared with the traditional vacuum adsorption type sample carrying platform.
Further, it is preferable that the second stepping motor 72 and the first stepping motor 71 are driven at a speed of 1: 2, ensuring that the actual rotating speed of the structure of the sample objective table and the integral structure of the polarization analyzing arm is positive 1: and 2, ensuring that the laser can still accurately irradiate the surface of the sample after the angle is changed and accurately irradiate the center of the detector after being reflected by the sample. The first stepping motor 71 and the second stepping motor 72 are coaxially arranged, and the two coaxial motors respectively drive the polarization detection arm and the sample objective table to rotate, so that the system error caused by the swinging of the polarizer and the compensator driven by the rotation of the polarization arm is avoided, and the precision of the measuring system is improved.
Further, preferably, the first compensator-equipped rotary servo motor 4 and the second compensator-equipped rotary servo motor 9 are driven to rotate in a ratio of 5: 3, the rotating speed synchronously rotates.
The working process of the invention is as follows: firstly, inputting a required angle position signal on a computer, controlling a polarization detection arm stepping motor to drive a polarization detection arm bottom plate to drive a polarization detection arm and a sample objective table to move to a corresponding angle after the computer responds, and simultaneously ensuring that the sample and the polarization detection arm are 1 by the reverse rotation of the rotating speed of an 1/2 polarization detection arm motor of the sample objective table: the rotating speed of the second collimating diaphragm 2 is in positive rotation, so that the collimation plane of the light path of the second collimating diaphragm is ensured, and incident light can always accurately enter the surface of a sample through the first collimating diaphragm 2, the polarizer 3, the compensator of the servo motor 4 with the compensator rotating and the first fusion diaphragm 81, and then accurately irradiate the sample into the detection area of the photoelectric detector through the second fusion diaphragm 82, the compensator of the servo motor 9 with the compensator rotating, the analyzer 10 and the second collimating diaphragm 11. Then the computer controls two servo motors to control the speed of the motor to be 5: and 3, synchronously rotating at a rotating speed, and simultaneously sending a trigger clock pulse to the detector every time when the detector rotates to a collection point to collect the light intensity information at the moment.
Although only the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art, and all changes are encompassed in the scope of the present invention.
Claims (10)
1. The utility model provides a two motor automatic variable angle system architecture of full muller matrix ellipsometer which characterized in that: including polarizing arm overall structure, examine inclined to one side arm overall structure, sample objective table structure, first step motor (71), bottom plate (13), polarizing arm overall structure sets up on bottom plate (13), be provided with first step motor (71) on bottom plate (13), be provided with on first step motor (71) and examine inclined to one side arm overall structure, it is provided with sample objective table structure on the arm overall structure to examine inclined to one side.
2. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 1, wherein: the whole structure of the polarizing arm comprises a laser light source (1), a first collimating diaphragm (2) and a polarizer (3), wherein the first collimating diaphragm (2) and the polarizer (3) are sequentially arranged on one side of the laser light source (1) along the light path direction.
3. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 2, wherein: the whole structure of the polarizing arm further comprises a first rotary servo motor (4) with a compensator, a first motor fixing plate (15) and a polarizing arm supporting plate (16), wherein the first motor fixing plate (15) is fixed on the bottom plate (13), the first servo motor (4) with the compensator rotating is fixed on one side of the first motor fixing plate (15), the polarizing arm supporting plate (16) is arranged on the first servo motor (4) with the compensator rotating, and the laser light source (1), the first collimating diaphragm (2) and the polarizer (3) are all fixed on the polarizing arm supporting plate (16).
4. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 3, wherein: be provided with motor floor (12) between first motor fixed plate (15) and bottom plate (13), fixed mounting has first fusion diaphragm (81) in the sleeve of first motor fixed plate (15) opposite side, first fusion diaphragm (81) set up on the light path direction of laser light source (1).
5. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 2, wherein: examine inclined to one side arm overall structure and include that the second drives rotatory servo motor (9) of compensator, analyzer (10), second collimation diaphragm (11), examine inclined to one side arm backup pad (17), analyzer (10), second collimation diaphragm (11) set gradually on the light path direction of laser source (1), the second drives and is provided with on the rotatory servo motor (9) of compensator and examines inclined to one side arm backup pad (17), analyzer (10), second collimation diaphragm (11) are all fixed on examining inclined to one side arm backup pad (17).
6. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 1, wherein: be provided with on first step motor (71) and examine inclined to one side bottom plate (14), fixedly connected with second motor fixed plate (19) on examining inclined to one side bottom plate (14), one side of second motor fixed plate (19) is fixed with second and drives rotatory servo motor (9) of compensator, fixed mounting has second fusion diaphragm (82) in the sleeve of second motor fixed plate (19) opposite side, second fusion diaphragm (82) set up on the light path direction of laser light source (1).
7. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 5, wherein: the servo motor (4) with the compensator rotating and the servo motor (9) with the compensator rotating are both composed of the compensator and the servo motor, and the compensator is embedded in a hollow shaft of the servo motor through an adapter ring.
8. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 1, wherein: the sample objective table structure comprises a sample fixed baffle (5), an X-Y-Z triaxial displacement table (6), a second stepping motor (72) and a sample objective table bottom plate (18), wherein the second stepping motor (72) is arranged on an offset detection bottom plate (14), the sample objective table bottom plate (18) is arranged on the second stepping motor (72), the X-Y-Z triaxial displacement table (6) is arranged on the sample objective table bottom plate (18), the sample fixed baffle (5) is arranged on the X-Y-Z triaxial displacement table (6), and the fixed baffle (5) is arranged in the light path direction of a laser light source (1).
9. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 8, wherein: the second stepping motor (72) and the first stepping motor (71) are driven in a ratio of 1: 2, and the first stepping motor (71) and the second stepping motor (72) are coaxially arranged.
10. The dual-motor automatic angle-changing system structure of the full-muller matrix ellipsometer according to claim 5, wherein: the first rotary servo motor (4) with the compensator and the second servo motor (9) driving the compensator to rotate are driven by a motor to rotate in a rotating mode, wherein the rotation speed of the first rotary servo motor (4) with the compensator is 5: 3, the rotating speed synchronously rotates.
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