CN114217425A - Multiplying power inner adjusting lens for photoetching machine - Google Patents
Multiplying power inner adjusting lens for photoetching machine Download PDFInfo
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- CN114217425A CN114217425A CN202111575713.7A CN202111575713A CN114217425A CN 114217425 A CN114217425 A CN 114217425A CN 202111575713 A CN202111575713 A CN 202111575713A CN 114217425 A CN114217425 A CN 114217425A
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- lens group
- focal length
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- lens
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- 238000001259 photo etching Methods 0.000 title claims abstract description 8
- 230000003287 optical effect Effects 0.000 abstract description 10
- 238000001459 lithography Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
- G02B15/144—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having four groups only
- G02B15/1441—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having four groups only the first group being positive
- G02B15/144111—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having four groups only the first group being positive arranged ++-+
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
The invention discloses a multiplying power inner adjusting lens for a photoetching machine, which is formed by combining four groups of lens groups, wherein a first positive lens group G1, a second positive lens group G2, a third negative lens group G3 and a fourth positive lens group G4 are sequentially arranged from left to right, and a second positive lens group G2 is an adjusting lens group; the parameters of the four groups of lens groups satisfy the relation 1< F1/F34< M, wherein F1 is the focal length of the lens group G1, F34 is the combined focal length of the lens group G3 and the lens group G4, and M is the lens magnification; the parameters of the four groups of lenses satisfy the relation 0< F12< L1, F1> L1, wherein L1 is the distance from the object plane to the main surface of the first positive lens group, F1 is the focal length of the lens group G1, and F12 is the combined focal length of the lens group G1 and the lens group G2; the parameters of the four groups of lens groups satisfy the relation F34> L5, F4< L5, wherein L5 is the distance from the image plane to the main surface of the fourth lens group G4, F4 is the focal length of the lens group G4, and F34 is the combined focal length of the lens group G3 and the lens group G4. The invention is convenient to adjust and can be realized by only moving one lens (the second positive lens group) back and forth along the optical axis.
Description
Technical Field
The invention relates to the technical field of photoetching lenses, in particular to a multiplying power inner adjusting lens for a photoetching machine.
Background
The lithography lens is a core component of the lithography machine, and needs a plurality of optical modules (lens + illumination) to be spliced, so as to form large-area exposure. Generally, at least 4 optical modules are required on the device, and more optical modules can reach 12 optical modules, and the multiplying power requirements of the optical modules are highly consistent. However, due to errors in processing and assembling, the difference in magnification of the actually assembled lens is large, and the use requirements cannot be met, so that the magnifications of the lenses in all the optical modules need to be adjusted to be consistent, and the error is generally required to be within one ten thousand.
The prior art generally adjusts the last lens of the lens to adjust the magnification of the lens, but this method has the problem that after the magnification is adjusted, the working distance is changed accordingly, which causes the working distance of each lens to be inconsistent, and the whole optical machine needs to be padded again to realize a uniform focal plane. Adjustment is also cumbersome due to the different heights of each lens pad. In addition, when the last lens is adjusted, the telecentricity of the lens is also changed to some extent. To a certain extent, the effect of the exposure.
Disclosure of Invention
In view of the above technical problems, the present invention provides a magnification internally-adjusting lens for a lithography machine, wherein the magnification adjustment of the lens can be realized by adjusting only one lens, and after the magnification adjustment, the working distance and the telecentricity of the lens are not changed.
A multiplying power inner adjusting lens for a photoetching machine is formed by combining four groups of lens groups, namely a first positive lens group, a second positive lens group, a third negative lens group and a fourth positive lens group from left to right in sequence, wherein the second positive lens group is an adjusting lens group;
the parameters of the four groups of lenses satisfy the relation 1< F1/F34< M, wherein F1 is the focal length of the first positive lens group, F34 is the combined focal length of the third negative lens group and the fourth positive lens group, and M is the lens magnification;
the parameters of the four groups of lenses satisfy the relation 0< F12< L1, F1> L1, wherein L1 is the distance from the object plane to the main surface of the first positive lens group, F1 is the focal length of the first positive lens group, and F12 is the combined focal length of the first positive lens group and the second positive lens group;
the parameters of the four groups of lenses satisfy the relation F34> L5, F4< L5, wherein L5 is the distance from the image plane to the main surface of the fourth positive lens group, F4 is the focal length of the fourth positive lens group, and F34 is the combined focal length of the third negative lens group and the fourth positive lens group.
Further, each lens group consists of a single lens or more than two lenses.
The invention has the beneficial effects that: 1. the adjustment is convenient, and the adjustment can be realized only by moving one lens (the second positive lens group) back and forth along the optical axis; 2. when the multiplying power is adjusted, the working distance is always kept unchanged, so that great inconvenience caused by subsequent use is avoided; 3. after the multiplying power is adjusted, the telecentricity is kept unchanged, and the exposure size error caused by the telecentricity subsequently is avoided.
Drawings
Fig. 1 is a schematic diagram of an optical path structure of a lithography lens.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Example 1
A multiplying power inner adjusting lens for a photoetching machine is composed of four groups of lens groups, as shown in figure 1, a first positive lens group G1, a second positive lens group G2, a third negative lens group G3 and a fourth positive lens group G4 are arranged from left to right in sequence, and a second positive lens group G2 is an adjusting lens group; each lens group consists of a single lens or more than two lenses.
The parameters of the four groups of lenses satisfy the relation 1< F1/F34< M, wherein F1 is the focal length of the first positive lens group G1, F34 is the combined focal length of the third negative lens group G3 and the fourth positive lens group G4, and M is the lens magnification;
the parameters of the four groups of lenses satisfy the relation 0< F12< L1, F1> L1, wherein L1 is the distance from the object plane to the main surface of the first positive lens group G1, F1 is the focal length of the first positive lens group G1, and F12 is the combined focal length of the first positive lens group G1 and the second positive lens group G2;
the parameters of the four groups of lenses satisfy the relation F34> L5, F4< L5, wherein L5 is the distance from the image plane to the main surface of the fourth positive lens group G4, F4 is the focal length of the fourth positive lens group G4, and F34 is the combined focal length of the third negative lens group G3 and the fourth positive lens group G4.
The working principle is as follows: by changing the axial position of lens group G2, the combined focal length F12 of lens group G1 and lens group G2 is changed, while the focal plane position S1 of the combined lens of lens group G1 and lens group G2 is not changed. The position of the diaphragm is set at the focal plane position of the combined lens of the lens group G1 and the lens group G2, and the diaphragm is just coincided with the front focal plane of the combined lens of the lens group G3 and the lens group G4, so that the telecentricity and the image plane position of the rear group are not changed. Meanwhile, since the combined focal length of the lens group G1 and the lens group G2 is changed, the magnification of the entire lens tends to be changed. Thus, when the lens group G2 is moved, the working distance and the telecentricity are unchanged, and the multiplying power is changed.
It is to be understood that the described embodiments are merely a few embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by one of ordinary skill in the art and related arts based on the embodiments of the present invention without any creative effort, shall fall within the protection scope of the present invention.
Claims (2)
1. A multiplying power inner adjusting lens for a photoetching machine is characterized by being formed by combining four groups of lens groups, namely a first positive lens group, a second positive lens group, a third negative lens group and a fourth positive lens group from left to right in sequence, wherein the second positive lens group is an adjusting lens group;
the parameters of the four groups of lenses satisfy the relation 1< F1/F34< M, wherein F1 is the focal length of the first positive lens group, F34 is the combined focal length of the third negative lens group and the fourth positive lens group, and M is the lens magnification;
the parameters of the four groups of lenses satisfy the relation 0< F12< L1, F1> L1, wherein L1 is the distance from the object plane to the main surface of the first positive lens group, F1 is the focal length of the first positive lens group, and F12 is the combined focal length of the first positive lens group and the second positive lens group;
the parameters of the four groups of lenses satisfy the relation F34> L5, F4< L5, wherein L5 is the distance from the image plane to the main surface of the fourth positive lens group, F4 is the focal length of the fourth positive lens group, and F34 is the combined focal length of the third negative lens group and the fourth positive lens group.
2. The power fly-in lens according to claim 1, wherein each lens group is composed of a single lens or two or more lenses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111575713.7A CN114217425B (en) | 2021-12-21 | 2021-12-21 | Multiplying power internal adjusting lens for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111575713.7A CN114217425B (en) | 2021-12-21 | 2021-12-21 | Multiplying power internal adjusting lens for photoetching machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114217425A true CN114217425A (en) | 2022-03-22 |
| CN114217425B CN114217425B (en) | 2024-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111575713.7A Active CN114217425B (en) | 2021-12-21 | 2021-12-21 | Multiplying power internal adjusting lens for photoetching machine |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09329746A (en) * | 1996-06-12 | 1997-12-22 | Nikon Corp | Zoom lens for finite distance |
| JPH11344672A (en) * | 1998-06-01 | 1999-12-14 | Nikon Corp | Zoom lens |
| JP2000089113A (en) * | 1998-09-07 | 2000-03-31 | Canon Inc | Photographic lens making good use of floating |
| CN200983034Y (en) * | 2006-12-15 | 2007-11-28 | 浙江舜宇光学有限公司 | Ultra-small zooming lens |
| US20080252996A1 (en) * | 2007-04-11 | 2008-10-16 | Hoya Corporation | Telephoto lens system |
| JP2010249957A (en) * | 2009-04-13 | 2010-11-04 | Tamron Co Ltd | Wide-angle zoom lens |
| CN102279459A (en) * | 2010-06-09 | 2011-12-14 | 上海微电子装备有限公司 | Projection object lens |
| CN103926683A (en) * | 2014-04-18 | 2014-07-16 | 中国科学院光电技术研究所 | Zoom optical system |
| CN204945619U (en) * | 2015-09-09 | 2016-01-06 | 合肥芯碁微电子装备有限公司 | A kind of photoetching telecentric objective with multiplying power fine adjustment function |
| CN108535864A (en) * | 2018-05-02 | 2018-09-14 | 中国科学院上海光学精密机械研究所 | A kind of four component zooming telecentric optical system design methods |
| CN112346229A (en) * | 2020-11-25 | 2021-02-09 | 深圳市雷影光电科技有限公司 | Full-frame optical imaging system and optical equipment thereof |
| CN213957739U (en) * | 2020-11-13 | 2021-08-13 | 辽宁中蓝光电科技有限公司 | Zoom lens |
-
2021
- 2021-12-21 CN CN202111575713.7A patent/CN114217425B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09329746A (en) * | 1996-06-12 | 1997-12-22 | Nikon Corp | Zoom lens for finite distance |
| JPH11344672A (en) * | 1998-06-01 | 1999-12-14 | Nikon Corp | Zoom lens |
| JP2000089113A (en) * | 1998-09-07 | 2000-03-31 | Canon Inc | Photographic lens making good use of floating |
| CN200983034Y (en) * | 2006-12-15 | 2007-11-28 | 浙江舜宇光学有限公司 | Ultra-small zooming lens |
| US20080252996A1 (en) * | 2007-04-11 | 2008-10-16 | Hoya Corporation | Telephoto lens system |
| JP2010249957A (en) * | 2009-04-13 | 2010-11-04 | Tamron Co Ltd | Wide-angle zoom lens |
| CN102279459A (en) * | 2010-06-09 | 2011-12-14 | 上海微电子装备有限公司 | Projection object lens |
| CN103926683A (en) * | 2014-04-18 | 2014-07-16 | 中国科学院光电技术研究所 | Zoom optical system |
| CN204945619U (en) * | 2015-09-09 | 2016-01-06 | 合肥芯碁微电子装备有限公司 | A kind of photoetching telecentric objective with multiplying power fine adjustment function |
| CN108535864A (en) * | 2018-05-02 | 2018-09-14 | 中国科学院上海光学精密机械研究所 | A kind of four component zooming telecentric optical system design methods |
| CN213957739U (en) * | 2020-11-13 | 2021-08-13 | 辽宁中蓝光电科技有限公司 | Zoom lens |
| CN112346229A (en) * | 2020-11-25 | 2021-02-09 | 深圳市雷影光电科技有限公司 | Full-frame optical imaging system and optical equipment thereof |
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| CN114217425B (en) | 2024-04-09 |
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Effective date of registration: 20220801 Address after: 230000 5th floor, building B4, xiezhihui Park, Zhongguancun, Baohe Economic Development Zone, Hefei, Anhui Province Applicant after: Anhui Guoxin Lithography Technology Co.,Ltd. Address before: 230051 1st floor, building D3, Zhongguancun collaborative innovation Zhihui Park, intersection of Chongqing Road and Lanzhou Road, Baohe Economic Development Zone, Hefei City, Anhui Province Applicant before: Anhui Guoxin Intelligent Equipment Co.,Ltd. |
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