CN114185208B - LCOS display and manufacturing method thereof - Google Patents
LCOS display and manufacturing method thereof Download PDFInfo
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- CN114185208B CN114185208B CN202111574826.5A CN202111574826A CN114185208B CN 114185208 B CN114185208 B CN 114185208B CN 202111574826 A CN202111574826 A CN 202111574826A CN 114185208 B CN114185208 B CN 114185208B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 111
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 75
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 75
- 239000010703 silicon Substances 0.000 claims abstract description 75
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 46
- 230000002093 peripheral effect Effects 0.000 claims description 44
- 239000002245 particle Substances 0.000 claims description 32
- 239000000853 adhesive Substances 0.000 claims description 17
- 230000001070 adhesive effect Effects 0.000 claims description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 238000009826 distribution Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 323
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 230000010287 polarization Effects 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000003475 lamination Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
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- 239000004020 conductor Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 238000001429 visible spectrum Methods 0.000 description 2
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- -1 for cost savings) Chemical compound 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
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- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides an LCOS display and a manufacturing method thereof. The invention provides a conductive layer for improving display intensity uniformity on a silicon substrate, wherein the impedance of the conductive layer is smaller than that of a part of a transparent electrode layer covering a pixel array. The voltage of external power supply is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, the public voltage is conducted from the part, right above the conducting layer, of the transparent electrode layer to the part, right above the pixel array, of the transparent electrode layer, and the conducting distance is reduced; at the same time, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; the voltage of the transparent electrode layer crossing the conductive layer is ensured to be rapidly spread, and the display intensity uniformity of different areas on the display is improved. The conductive layer is arranged on the silicon substrate, so that the relative position distribution of the conductive layer, the pixel array and the liquid crystal layer is easy to realize. The invention is easy to operate, reduces the difficulty of alignment and does not need to be configured with high-precision alignment bonding equipment.
Description
Technical Field
The present invention relates to a liquid crystal display, and more particularly, to an LCOS display and a method for manufacturing the same.
Background
LCOS (Liquid Crystal on Silicon ) displays are a type of reflective liquid crystal display device that employs semiconductor silicon technology to control the liquid crystal and thereby "throw" a color picture.
FIG. 1 is a cross-sectional view of an LCOS display. As shown in fig. 1, the LCOS display includes a silicon substrate 01, a liquid crystal layer 03, an ITO electrode 04, and a transparent substrate 05 sequentially disposed over the silicon substrate 01, and a pixel array 02 is formed in the silicon substrate 01. The ITO electrode 04 serves as a common electrode of the LCOS display, and the voltage controller 07 supplies a common voltage to the ITO electrode 04 through the pad 06 to realize the bias of the liquid crystal layer 03, the pad 06 being electrically connected to the ITO electrode 04. When the ITO electrode 04 is held at a certain voltage, the electric field on the liquid crystal layer 03 is controlled by the voltage applied to the pixel array 02. The intensity of the display of each pixel on the pixel array 02 depends on the polarization imparted by the liquid crystal layer 03.
FIG. 2 is a partial plan view of the device of FIG. 1Schematic view of the piece. As shown in fig. 1 and 2, the voltage controller 07 supplies a voltage to the ITO electrode 04 through the pad 06, theoretically it is expected that the voltage is the same throughout the region of the ITO electrode 04, but the ITO electrode 04 is, for example, of a rectangular sheet structure, and a display region (a dotted line frame) of the liquid crystal layer 03 is, for example, at a point P 1 The impedance of the ITO electrode 04 between the pad 06 (electrical contact) is greater than the point P 2 And the impedance of the ITO electrode 04 between the pads 06, the impedance of the ITO electrode 04 increases in proportion to the distance from the voltage source (i.e., the pads 06), which in turn means that the voltage response time of the ITO electrode 04 also increases with increasing distance from the pads 06. Thus, when the voltage controller 07 switches the voltage on the ITO electrode 04 at the pad 06, the voltage has not yet been converted to a new value across the pixel array 02, then different intensities will occur at different locations of the pixel array 02, e.g. the pixel at P1 will be significantly darker than the pixel at P2, and ideally the overall display area has a substantially uniform intensity. This intensity variation becomes very pronounced when the ITO electrode 04 of the display device is driven at a high voltage frequency. However, even when the ITO electrode 04 is driven at a low voltage frequency, some intensity variation can be observed. Therefore, the existing LCOS display has the problem of uneven display intensity across the display area and inconsistent (varying) intensity. Accordingly, there is a need for an LCOS display device that is capable of uniformly displaying intensity values across its display area.
Disclosure of Invention
The invention aims to provide an LCOS display and a manufacturing method thereof, which improve the uniformity (consistency) of the intensity of different areas on the display; and the LCOS display is easier to manufacture, the alignment difficulty is reduced, and a high-precision alignment bonding machine is not required to be additionally arranged.
The present invention provides an LCOS display comprising:
the liquid crystal display comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate includes a display region and a peripheral region surrounding the display region, the display region having a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
and a conductive layer is arranged in the peripheral area of the silicon substrate along the first direction and/or the second direction, the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array.
Further, the first direction is perpendicular to the second direction.
Further, the conductive layer comprises a first conductive layer and a second conductive layer which are arranged at intervals;
the first conductive layer comprises a first conductive part and extension parts, wherein the first conductive part is arranged along the first direction in a peripheral area positioned at one side of the second direction of the display area, and the extension parts respectively extend along the second direction from two ends of the first conductive part;
the second conductive layer includes a second conductive portion disposed along the first direction in a peripheral region located at the other side of the display region in the second direction, and extension portions extending from both ends of the second conductive portion along the second direction, respectively.
Further, an external power supply supplies power from both sides of the first conductive layer parallel to the first direction, respectively, and simultaneously supplies the same voltage to both sides of the second conductive layer parallel to the first direction, respectively.
Further, the display area is rectangular, the conductive layer is in a single shape, the conductive layer is arranged in the peripheral area of any side of the rectangle, and an external power supply supplies power from two ends of the conductive layer respectively.
Further, the conductive layer comprises a third conductive layer and a fourth conductive layer which are arranged in parallel; the third conductive layer and the fourth conductive layer are respectively located in peripheral side areas on two sides of the second direction of the display area and are all arranged along the first direction, or the third conductive layer and the fourth conductive layer are respectively located in peripheral side areas on two sides of the first direction of the display area and are all arranged along the second direction.
Further, the conductive layer comprises a third conductive part and a fourth conductive part which are mutually perpendicular and electrically connected; one of the third conductive portion and the fourth conductive portion is disposed along the first direction, and the other is disposed along the second direction.
Further, the conductive layer includes a conductive portion provided in the first direction and extension portions extending in the second direction from both ends of the conductive portion, respectively, or the conductive layer includes a conductive portion provided in the second direction and extension portions extending in the first direction from both ends of the conductive portion, respectively.
Further, the conductive layer is annular and disposed around the pixel array.
Further, a length of the conductive layer along the first direction is greater than a length of the pixel array along the first direction, and/or a length of the conductive layer along the second direction is greater than a length of the pixel array along the second direction.
Further, the ratio of the length of the first edge to the length of the second edge is at least 5:1.
Further, the transparent electrode layer is made of ITO, and the conductive layer is made of any one of aluminum, silver, chromium or titanium, wherein the resistivity of each of the conductive layers is smaller than that of the ITO.
Further, the projection of the transparent electrode layer on the silicon substrate completely covers the conductive layer, conductive adhesive is arranged between the conductive layer and the transparent electrode layer, and the conductive adhesive contains conductive particles.
Further, the conductive adhesive further comprises insulating gap particles.
Further, a bonding pad is arranged on the silicon substrate, and the conductive layer is electrically connected with the bonding pad through a lead.
The invention also provides a manufacturing method of the LCOS display, which comprises the following steps:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is arranged along the first direction and/or the second direction in a peripheral area of the silicon substrate, wherein the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array;
the transparent substrate is mounted on the silicon substrate such that the transparent electrode layer faces the pixel array and the conductive layer is electrically coupled with the transparent electrode layer.
Further, the mounting of the transparent substrate on the silicon substrate specifically includes:
and placing conductive adhesive in a peripheral area of the liquid crystal layer above the silicon substrate, and performing hot pressing on the transparent electrode layer facing the silicon substrate and the liquid crystal layer, wherein the transparent electrode layer and the conductive layer are electrically coupled through the conductive adhesive.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides an LCOS display and a manufacturing method thereof. The invention provides a conductive layer for improving display intensity uniformity on a silicon substrate, wherein the conductive layer is arranged along the first direction and/or the second direction in the peripheral area of the silicon substrate, namely, the conductive layer is arranged in the peripheral area of a liquid crystal layer. The impedance of the conductive layer is smaller than the impedance of the portion of the transparent electrode layer covering the pixel array.
On the one hand, the voltage supplied by the voltage controller is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, the common voltage is conducted from the part, right above the conducting layer, of the transparent electrode layer to the part, right above the pixel array, of the transparent electrode layer, and the conducting distance is reduced; at the same time, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; ensuring fast propagation of the voltage across the transparent electrode layer of the conductive layer improves the uniformity (consistency) of the intensity of the different areas on the display.
On the other hand, the conducting layer is arranged on the silicon substrate, so that the conducting layer is easy to accurately arrange in the peripheral area surrounding the display area, and the conducting layer is easy to realize relative position distribution with the pixel array and the liquid crystal layer. If the conductive layer is disposed on the transparent electrode layer, the transparent electrode layer is formed on the transparent substrate, and a high-precision alignment lamination machine is required to be matched to precisely align and laminate the transparent substrate with the conductive layer pattern with the silicon substrate (for example, LCOS wafer), and the high-precision alignment lamination machine has relatively high equipment investment. The invention is easy to operate and reduces the difficulty of alignment.
The LCOS display of the present invention can be driven at a high voltage frequency on its common electrode transparent electrode layer without sacrificing image quality, enabling the common voltage to be rapidly and uniformly determined on the transparent electrode layer.
Drawings
FIG. 1 is a schematic cross-sectional view of an LCOS display.
Fig. 2 is a schematic plan (top) view of the LCOS display of fig. 1.
Fig. 3 is a schematic plan (top) view of an LCOS display according to a first embodiment of the present invention.
FIG. 4 is a schematic cross-sectional view of a first example of the LCOS display of FIG. 3 along AA'.
Fig. 5 is a schematic cross-sectional view of a first example of the LCOS display of fig. 3, taken along BB'.
FIG. 6 is a schematic cross-sectional view of a second example of the LCOS display of FIG. 3 along AA'.
Fig. 7 is a schematic diagram of a voltage controller access of an LCOS display according to a first embodiment of the present invention.
Fig. 8 is a schematic plan (top) view of an LCOS display according to a second embodiment of the present invention.
Fig. 9 is a schematic plan (top) view of an LCOS display according to a third embodiment of the present invention.
Fig. 10 is a schematic plan (top) view of an LCOS display according to a fourth embodiment of the present invention.
Wherein, the reference numerals are as follows:
01-a silicon substrate; 02-an array of pixels; 03-a liquid crystal layer; 04-ITO electrode; 05-a transparent substrate; 06-bonding pads; 07-a voltage controller;
11-a silicon substrate; a 12-pixel array; 13-a liquid crystal layer; 14-a transparent electrode layer; 15-a transparent substrate; 16-bonding pads; 16 a-a first pad; 16 b-a second pad; 17-a voltage controller; 18-a conductive layer; 18 a-a first conductive layer; 18 b-a second conductive layer; 18 c-a third conductive layer; 18 d-a fourth conductive layer; 19 a-a first lead; 19 b-a second lead; 19 c-a third lead; 19 d-fourth lead; 18e, 18 f-conductive layers; 19e, 19 f-leads; 20-conducting resin; 21-conductive particles; 22-insulating spacer particles; 23-a metal layer; 31-incident light; 32-reflected light.
Detailed Description
The embodiment of the invention provides an LCOS display and a manufacturing method thereof. The invention is described in further detail below with reference to the drawings and the specific examples. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are not to scale precisely, but rather merely for the purpose of facilitating and clearly aiding in the description of the embodiments of the invention.
An embodiment of the present invention provides an LCOS display, including:
the liquid crystal display comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate includes a display region and a peripheral region surrounding the display region, the display region having a first side in a first direction and a second side in a second direction;
and arranging a conductive layer in the peripheral area of the silicon substrate along the first direction and/or the second direction, wherein the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array.
The impedance of the portion of the transparent electrode layer covering the pixel array, that is, the impedance of the portion of the transparent electrode layer directly above the pixel array.
An LCOS display according to an embodiment of the present invention is described in detail below with reference to fig. 3 to 10.
Fig. 3 is a schematic plan (top) view of an LCOS display according to a first embodiment of the present invention. FIG. 4 is a schematic cross-sectional view of a first example of the LCOS display of FIG. 3 along AA'. Fig. 5 is a schematic cross-sectional view of a first example of the LCOS display of fig. 3, taken along BB'.
As shown in fig. 3 to 5, the LCOS display of the present embodiment includes: a silicon substrate 11 and a transparent substrate 15 disposed opposite to each other, a pixel array 12 is formed on a side of the silicon substrate 11 facing the transparent substrate 15, and the pixel array 12 includes a plurality of pixels arranged in a plurality of columns and a plurality of rows. Specifically, a plurality of display units including a pixel array 12 are formed on a silicon substrate 11. Each display unit includes: a plurality of scan lines, a plurality of data lines, a plurality of active devices (e.g., thin film transistors), and the active devices are electrically connected to the pixel electrodes of the pixel array 12. The silicon substrate 11 includes a display region I having a first side m in a first direction (e.g., X-direction) and a second side n in a second direction (e.g., Y-direction) and a peripheral region II surrounding the display region I. The scan lines, the data lines, the active devices, and the pixel electrodes electrically connected to the active devices are mainly formed on the display region I.
The transparent substrate 15 is, for example, a glass substrate, the transparent substrate 15 is formed with a transparent electrode layer 14, and the transparent electrode layer 14 is disposed on a surface of the transparent substrate 15 facing the silicon substrate 11; the transparent electrode layer 14 is formed of a thin conductive material (e.g., ITO), and the boundaries of the transparent electrode layer 14 correspond to the boundaries of the transparent substrate 15. A liquid crystal layer 13 is arranged between the pixel array 12 and the transparent electrode layer 14. A pad 16 is formed on the surface of the silicon substrate 11 in a peripheral region of the liquid crystal layer 13, and the transparent conductive layer 14 exposes the pad 16, i.e., the pad 16 may be disposed on the peripheral region II for introducing or extracting an electrical signal.
A conductive layer 18 is provided in the peripheral region II of the silicon substrate 11 in the first direction and/or in the second direction for improving display intensity uniformity. A conductive paste 20 is disposed between the conductive layer 18 and the transparent electrode layer 14, and the conductive layer 18 and the transparent electrode layer 14 are electrically coupled by the conductive paste 20. The transparent electrode layer 14 covers the liquid crystal layer 13 and the conductive paste 20. The pixel array 12 defines the size of the display area I, and the liquid crystal layer 13 is located directly above the display area I. The conductive layer 18 is located on the peripheral side of the liquid crystal layer 13.
The impedance of the conductive layer 18 is less than the impedance of the portion of the transparent electrode layer 14 that covers the pixel array 12. In particular, the transparent electrode layer 14 may be formed of an Indium Tin Oxide (ITO) layer on the bottom surface of the transparent substrate 15 and serve as a common electrode of the LCOS display. Illustratively, the transparent electrode layer 14 comprises ITO, which is transparent to about 95% of the wavelengths in the visible spectrum. The thickness of the conductive material of the transparent electrode layer 14 ranges from 20nm to 60nm to achieve high optical performance. The conductive layer 18 is made of any one of aluminum, silver, chromium or titanium, each of which has a resistivity less than that of the ITO. The resistivity of the conductive layer 18 is less than the resistivity of the transparent electrode layer 14.
During operation of the LCOS display, incident light 31 is polarized to a first predetermined polarization state and enters through the top surface of transparent substrate 15, passes through layer transparent electrode layer 14, second alignment layer (not shown), liquid crystal layer 13, first alignment layer (not shown), reaches the pixel mirror of pixel array 12 and is reflected, and reflected light 32 passes through first alignment layer, liquid crystal layer 13, second alignment layer, transparent electrode layer 14, and transparent substrate 15 in sequence. The polarization of the light is changed by the liquid crystal layer 13 depending on the electric field applied to the liquid crystal. When the transparent electrode layer 14 is held at a certain voltage, the electric field on the liquid crystal layer 13 is controlled by a voltage applied to a pixel mirror (not shown) of the pixel array 12. The polarization of the incident light is spatially modulated according to the image on the pixel array 12 and output as a modulated beam. The modulated light beam is then analyzed by an analyzer having a predetermined polarization state to produce a displayable image. The intensity of each pixel display depends on the polarization imparted by the liquid crystal, and is closely related to the voltage applied across the transparent electrode layer 14.
In a particular example, the conductive layer 18 is formed of aluminum (e.g., for cost savings), has a line width in the range of 100 μm to 1000 μm, and a thickness in the range of 100nm to 500 nm. In addition to the material type, the impedance depends on other variables such as length, cross-sectional area, frequency, capacitance, etc. Conductive layer 18 may be formed using any suitable deposition process available in the art (e.g., photolithography, sputtering, chemical vapor deposition, etc.).
Illustratively, the projection of the transparent electrode layer 14 onto the silicon substrate 11 covers the conductive layer 18. A conductive paste 20 is disposed between the conductive layer 18 and the transparent electrode layer 14, and the conductive paste 20 contains conductive particles 21. The conductive layer 18 is electrically connected to the transparent electrode layer 14 through conductive paste. In other examples, as shown in fig. 6, the conductive paste further includes insulating spacer particles 22 therein. The conductive paste 20 is formed on the peripheral region II. The conductive particles 21 are, for example, metal conductive particles. The particle diameter of the conductive particles 21 is, for example, 5 μm to 25 μm. The larger particle size is beneficial to obtaining better conductive effect. The conductive particles 21 are at least one of single metal conductive particles and alloy conductive particles. Wherein the single metal conductive particles may be at least one of gold particles, silver particles, copper particles, and nickel particles, but are not limited thereto; the alloy conductive particles may be at least one of silver-plated copper particles, silver-plated gold particles, silver-plated nickel particles, gold-plated copper particles, and gold-plated nickel particles, but are not limited thereto. The alloy conductive particles have good oxidation resistance and conductivity, and the product is convenient to store and transport, and the physical properties of the product are not affected, so that the product is stable and has high reliability.
A metal layer 23 may be further formed in the silicon substrate 11; in this example, the conductive layer 18 is not electrically connected to the metal layer 23, and is independent of each other. The silicon substrate 11 includes a silicon substrate on which an interlayer dielectric layer may be formed, and a metal layer 23 is formed in the interlayer dielectric layer. The material of the metal layer 23 includes: at least one of titanium, titanium-tungsten, aluminum, chromium, silver, and copper. In the display region I, a first alignment layer may be formed between the silicon substrate 11 and the liquid crystal layer 13, and a second alignment layer may be formed between the liquid crystal layer 13 and the transparent electrode layer 14 for promoting alignment of liquid crystals in the liquid crystal layer 13 in a desired direction.
The display area I has a first side m in a first direction (e.g., X-direction) and a second side n in a second direction (e.g., Y-direction); the pixel array 12 defines a display area I, which is illustratively illustrated as a rectangle. The boundary shape of the display area I may be set according to actual requirements, without limitation. The first direction and the second direction are intended to define two reference directions and thus do not define the shape of the display area I. Taking the first direction (e.g. X direction) and the second direction (e.g. Y direction) perpendicular to each other as an example, the display area I is rectangular, and illustratively, the ratio of the length of the first edge to the length of the second edge is at least 5:1, so that a better effect or an effect is more obvious. The length of the conductive layer along the first direction is greater than the length of the pixel array along the first direction, and/or the length of the conductive layer along the second direction is greater than the length of the pixel array along the second direction.
As shown in fig. 7, the conductive layer 18 includes first and second spaced apart conductive layers 18a and 18b. The first conductive layer 18a includes first conductive portions provided along the first direction (for example, the X direction) in a peripheral region located on the second direction (for example, the Y direction) side of the display region I, and extension portions extending along the second direction (for example, the Y direction) from both ends of the first conductive portions, respectively; the second conductive layer 18b includes second conductive portions disposed along the first direction in a peripheral region located at the other side of the display region I in the second direction and extension portions extending from both ends of the second conductive portions along the second direction, respectively.
In other examples, the first conductive layer 18a may also include a first conductive portion disposed along a second direction (e.g., Y direction) in a peripheral region located at one side of the display region I in a first direction (e.g., X direction) and extension portions respectively extending from both ends of the first conductive portion along the first direction; the second conductive layer 18b may also include a first conductive portion disposed along a second direction (e.g., Y direction) in a peripheral region located at the other side of the display region I in the first direction (e.g., X direction) and extension portions respectively extending from both ends of the first conductive portion along the first direction.
Specifically, the voltage controller 17 conducts the same voltage V to the first conductive layer 18a and the second conductive layer 18b through the high-conductivity leads. For example, the voltage controller 17 may be divided into two paths, wherein the first path is connected from the first bonding pad 16a to supply power to two ends of the first conductive layer 18a along the X direction via the first leads 19a on the left and right sides respectively; the second path is connected from the second bonding pad 16b to both ends of the second conductive layer 18b in the X direction via the second leads 19b on the left and right sides, respectively. The leads (e.g., first and second leads 19a, 19 b) may be redistribution metal lines formed in the silicon substrate 11.
The first conductive layer 18a is conducted to a portion of the transparent electrode layer 14 located directly above the first conductive layer 18a through the conductive paste 20, and the second conductive layer 18b is conducted to a portion of the transparent electrode layer 14 located directly above the second conductive layer 18b through the conductive paste 20, so that a common voltage is conducted from the portion of the transparent electrode layer 14 located directly above the first conductive layer 18a and the portion of the transparent electrode layer 14 located directly above the second conductive layer 18b to the portion of the transparent electrode layer 14 located directly above the pixel array 12, respectively, by a distance of less than or equal to half the distance between the first conductive layer 18a and the second conductive layer 18b in the second direction (e.g., Y direction), and therefore, the impedance between any one of the first conductive layer 18a and the second conductive layer 18b and any point on the transparent electrode layer 14 located directly above the display area I (or the pixel array) is further reduced. Moreover, the common voltage is conducted simultaneously from both sides (or both upper and lower sides) in the second direction (e.g., Y direction) across the entire area of the pixel array 12, and the common voltage is conducted simultaneously from both sides (or both left and right sides) in the first direction (e.g., X direction) from the respective extensions of the first conductive layer 18a and the second conductive layer 18 b; thus, conducting to P in length direction as in FIG. 2 from single point pad 06 2 And P 1 In contrast, the conductive layer 18 of the present embodiment includes a first conductive layer 18a and a second conductive layer 18b arranged at intervals, and the transparent electrode layer 14 are positioned directly above the pixel array 12, the common voltage is readily obtained more quickly and more uniformly. The transparent electrode layer 14 of the present embodiment can be driven at a higher frequency without suffering from interference of intensity unevenness.
Fig. 8 is a schematic plan (top) view of an LCOS display according to a second embodiment of the present invention. As shown in fig. 8, the conductive layer 18 includes a third conductive layer 18c and a fourth conductive layer 18d disposed in parallel. The third conductive layer 18c and the fourth conductive layer 18d are respectively located in peripheral side regions on both sides of the second direction (e.g., Y direction) of the display region I and are each disposed along the first direction (e.g., X direction). In other examples, the third conductive layer 18c and the fourth conductive layer 18d may be located in the peripheral regions on both sides of the first direction of the display region I, respectively, and disposed along the second direction.
Specifically, the voltage controller 17 conducts the same voltage V to the third conductive layer 18c and the fourth conductive layer 18d through the high-conductivity leads. For example, the voltage controller 17 may be divided into two paths, wherein the first path is connected from the first bonding pad 16a to supply power to two ends of the third conductive layer 18c along the X direction via the third leads 19c on the left and right sides respectively; the second path is connected from the second pad 16b to both ends of the fourth conductive layer 18d in the X direction via the fourth leads 19d on the left and right sides, respectively. The leads (e.g., third and fourth leads 19c and 19 d) may be redistribution metal lines formed in the silicon substrate 11.
The third conductive layer 18c is conducted to the portion of the transparent electrode layer 14 located directly above the third conductive layer 18c through the conductive paste 20, the fourth conductive layer 18d is conducted to the portion of the transparent electrode layer 14 located directly above the fourth conductive layer 18d through the conductive paste 20, and then a common voltage is conducted from the portion of the transparent electrode layer 14 located directly above the third conductive layer 18c and the portion of the transparent electrode layer 14 located directly above the fourth conductive layer 18d to the portion of the transparent electrode layer 14 located directly above the pixel array in the second direction (e.g., Y direction) at a distance of half the distance between the third conductive layer 18c and the fourth conductive layer 18d in the second direction (e.g., Y direction) or less, and therefore, any one of the third conductive layer 18c and the fourth conductive layer 18d is conducted to any point on the transparent electrode layer 14 located directly above the display area IThe impedance therebetween is further reduced. Also, the common voltage is simultaneously conducted from both sides (or upper and lower sides) in the second direction (e.g., Y direction) across the entire region of the pixel array 12 in the first direction (e.g., X direction); thus, conducting to P in length direction as in FIG. 2 from single point pad 06 2 And P 1 In comparison with the case where the conductive layer 18 of the present embodiment includes the third conductive layer 18c and the fourth conductive layer 18d arranged in parallel, the portion of the transparent electrode layer 14 located directly above the pixel array 12 is easy to obtain the common voltage faster and more uniformly. The transparent electrode layer 14 of the present embodiment can be driven at a higher frequency without suffering from interference of intensity unevenness. It should be appreciated that the portion of transparent electrode layer 14 directly above pixel array 12 provides a common voltage for the polarization of pixel array 12, and thus, the voltage of the portion of transparent electrode layer 14 directly above pixel array 12 is of primary concern.
Fig. 9 is a schematic plan (top) view of an LCOS display according to a third embodiment of the present invention. As shown in fig. 9, the conductive layer 18e includes a third conductive portion and a fourth conductive portion that are perpendicular to each other and electrically connected; one of the third conductive portion and the fourth conductive portion is disposed along the first direction (e.g., X direction) and the other is disposed along the second direction (e.g., Y direction). The conductive layer 18e is "L-shaped" and is located near both sides of the pixel array 12. The voltage controller 17 conducts the voltage V to both ends of the conductive layer 18e through the high-conductivity lead 19 e. The impedance between the conductive layer 18e and any point on the transparent electrode layer 14 directly above the display area I is further reduced. The conductive layer 18e rapidly distributes (conducts) the common voltage supplied from the voltage controller 17 along the long side m and the short side n of the display area I. The portion of the transparent electrode layer 14 directly above the pixel array 12 is easily and more quickly and uniformly supplied with the common voltage, and display intensity uniformity is improved.
Fig. 10 is a schematic plan (top) view of an LCOS display according to a fourth embodiment of the present invention. As shown in fig. 10, the conductive layer 18f includes conductive portions disposed along the second direction (e.g., Y direction) and extension portions extending from both ends of the conductive portions along the first direction (e.g., X direction), respectively. In other examples, the conductive layer 18 further includes conductive portions disposed along the first direction and extension portions extending from both ends of the conductive portions along the second direction, respectively. The conductive layer 18f is in a right angle "U-shape" and is located near three sides of the display area I. The impedance between the conductive layer 18f and any point on the transparent electrode layer 14 directly above the display area I is further reduced. The conductive layer 18f distributes the voltage supplied by the voltage controller 17 along the two long sides m and one short side n of the display area I such that a change in voltage rapidly propagates across the portion of the transparent electrode layer 14 covering the pixel array 12 due to a decrease in impedance therebetween, the portion of the transparent electrode layer 14 directly above the pixel array 12 is easy to obtain a common voltage faster, more uniformly, and display intensity uniformity of the LCOS display is improved as compared with the related art (e.g., fig. 2).
In one embodiment, the display area is rectangular, the conductive layer 18 may be a single strip, the conductive layer 18 is disposed in a peripheral area of any side of the rectangle, and an external power source supplies power from two ends of the conductive layer 18. In another embodiment, the conductive layer 18 is annular and disposed around the pixel array 12, and the voltage provided by the voltage controller 17 is conducted along each edge of the transparent electrode layer 14, which enables the voltage to propagate very quickly through the portion of the transparent electrode layer 14 that covers the pixel array 12. This in turn enables the LCOS display to display intensity values uniformly across the pixel array 12, even for waveforms provided by the voltage controller 17 switching voltages at high frequencies.
Conductive layer 18 remains in substantially continuous electrical connection with transparent electrode layer 14, but in other embodiments conductive layer 18 may be spaced in one direction and conductive layer 18 and transparent electrode layer 14 may include a plurality of discrete electrical connections.
The embodiment also provides a manufacturing method of the LCOS display, which comprises the following steps:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is arranged along the first direction and/or the second direction in a peripheral area of the silicon substrate, wherein the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array;
the transparent substrate is mounted on the silicon substrate such that the transparent electrode layer faces the pixel array and the conductive layer is electrically coupled with the transparent electrode layer.
Specifically, the conductive layer 18 is formed on the silicon substrate 11, and may be formed by photolithography, vapor deposition, or sputtering. The transparent substrate 15 is mounted on the silicon substrate 11, for example, a conductive adhesive 20 is placed in a peripheral area of the liquid crystal layer 13 above the silicon substrate 11, the conductive adhesive 20 includes conductive particles 21, the conductive adhesive 20 is for example anisotropic conductive adhesive, the transparent electrode layer 14 is formed on the transparent substrate 15, the transparent electrode layer 14 faces the silicon substrate 11 and the liquid crystal layer 13 to perform a thermal compression, so that the transparent substrate 15, the transparent electrode layer 14 and the silicon substrate 11 are clamped, and after the conductive adhesive 20 is cooled and solidified, the following substrates and circuits are bonded to form a display module, and after the conductive adhesive 20 contains the conductive particles 21, the transparent electrode layer 14 and the conductive layer 18 are electrically connected through the conductive particles 21 in the conductive adhesive 20 after the lamination. Conductive layer 18 helps drive the transparent electrode layer with a high frequency voltage waveform while minimizing intensity variations in the display area of the LCOS display.
When high frequency voltage waveforms (e.g., voltage frequencies greater than or equal to 1.0 kHz) are applied to the transparent electrode layer (e.g., the transparent electrode layer has a long side to short side ratio greater than or equal to 5:1), because the voltage changes faster than they can propagate and stabilize across the transparent electrode layer. In order to achieve optimal imaging performance and intensity uniformity across the display area, it is desirable to minimize the impedance of the transparent electrode layer between the common voltage input and the points on the transparent electrode layer portion. For these same purposes, it is also desirable that the transparent electrode layer have a very high optical transparency throughout the visible spectrum.
The ITO electrode has a high resistivity and will have significant resistance variation, especially along its long dimension, without the conductive layer 18 of the present invention. To minimize this impedance variation, the LCOS display includes a conductive layer 18 formed directly on the silicon substrate 11. The conductive layer 18 is elongated compared to the bonding pad 06 in fig. 2 such that it extends along the long side of the transparent electrode layer 14 and is electrically coupled along the long side of the transparent electrode layer 14.
The present invention may more quickly deliver a uniform common voltage across the portion of transparent electrode layer 14 that covers pixel array 12, which in turn enables the individual intensity values to be displayed more uniformly across pixel array 12. A common voltage waveform is received from the voltage controller 17, and then applied to the transparent electrode layer 14. The conductive layer 18 provides the advantage that the transparent electrode layer 14 can be driven at a higher frequency without suffering from interference from intensity non-uniformities. In summary, the above-described embodiments reduce the voltage signal propagation delay across the transparent electrode layer 14 in the long and short directions of the LCOS display. Thus, variations in impedance between the conductive layer 18 and different locations of the transparent electrode layer 14 overlying the pixel array 12, as well as non-uniformity in display intensity values across different locations of the pixel array 12, are minimized. In the case where a high frequency (e.g., 1.0kHz for LCOS) or low frequency (e.g., <1.0kHz for LCOS) common voltage waveform is applied to transparent electrode layer 14, conductive layer 18 of the present invention reduces intensity variations in the long and short dimensions of pixel array 12, thereby improving the displayed image.
In summary, the present invention provides an LCOS display and a method for fabricating the same. The invention provides a conductive layer for improving display intensity uniformity on a silicon substrate, wherein the conductive layer is arranged along the first direction and/or the second direction in the peripheral area of the silicon substrate, namely, the conductive layer is arranged in the peripheral area of a liquid crystal layer. The impedance of the conductive layer is smaller than the impedance of the portion of the transparent electrode layer covering the pixel array. On the one hand, the voltage supplied by the voltage controller is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, the common voltage is conducted from the part, right above the conducting layer, of the transparent electrode layer to the part, right above the pixel array, of the transparent electrode layer, and the conducting distance is reduced; at the same time, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; ensuring fast propagation of the voltage across the transparent electrode layer of the conductive layer improves the uniformity (consistency) of the intensity of the different areas on the display. On the other hand, the conducting layer is arranged on the silicon substrate, so that the conducting layer is easy to accurately arrange in the peripheral area surrounding the display area, and the conducting layer is easy to realize relative position distribution with the pixel array and the liquid crystal layer. If the conductive layer is disposed on the transparent electrode layer, the transparent electrode layer is formed on the transparent substrate, and a high-precision alignment lamination machine is required to be matched to precisely align and laminate the transparent substrate with the conductive layer pattern with the silicon substrate (for example, LCOS wafer), and the high-precision alignment lamination machine has relatively high equipment investment. The invention is easy to operate and reduces the difficulty of alignment. The LCOS display of the present invention can be driven at a high voltage frequency on its common electrode transparent electrode layer without sacrificing image quality, enabling the common voltage to be rapidly and uniformly determined on the transparent electrode layer.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the method disclosed in the embodiment, the description is relatively simple since it corresponds to the device disclosed in the embodiment, and the relevant points refer to the description of the method section.
The foregoing description is only illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the claims, and any person skilled in the art may make any possible variations and modifications to the technical solution of the present invention using the method and technical content disclosed above without departing from the spirit and scope of the invention, so any simple modification, equivalent variation and modification made to the above embodiments according to the technical matter of the present invention fall within the scope of the technical solution of the present invention.
Claims (15)
1. An LCOS display, comprising:
the liquid crystal display comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate includes a display region and a peripheral region surrounding the display region, the display region having a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
a conductive layer is arranged in the peripheral area of the silicon substrate along the first direction and/or the second direction, the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array;
the projection of the transparent electrode layer on the silicon substrate completely covers the conductive layer, conductive adhesive is arranged between the conductive layer and the transparent electrode layer, and the conductive adhesive contains conductive particles.
2. The LCOS display of claim 1, wherein the first direction and the second direction are perpendicular.
3. The LCOS display of claim 2, wherein the conductive layer comprises first and second conductive layers disposed in spaced apart relation;
the first conductive layer comprises a first conductive part and extension parts, wherein the first conductive part is arranged along the first direction in a peripheral area positioned at one side of the second direction of the display area, and the extension parts respectively extend along the second direction from two ends of the first conductive part;
the second conductive layer includes a second conductive portion disposed along the first direction in a peripheral region located at the other side of the display region in the second direction, and extension portions extending from both ends of the second conductive portion along the second direction, respectively.
4. The LCOS display of claim 3, wherein an external power source supplies power from both sides of the first conductive layer parallel to the first direction, respectively, and simultaneously supplies the same voltage to both sides of the second conductive layer parallel to the first direction, respectively.
5. The LCOS display of claim 2, wherein said display region is rectangular and said conductive layer is in the form of a single strip, said conductive layer being disposed in a peripheral region on either side of said rectangle, and an external power source being provided separately from both ends of said conductive layer.
6. The LCOS display of claim 2, wherein the conductive layers comprise third and fourth conductive layers disposed in parallel; the third conductive layer and the fourth conductive layer are respectively located in peripheral side areas on two sides of the second direction of the display area and are all arranged along the first direction, or the third conductive layer and the fourth conductive layer are respectively located in peripheral side areas on two sides of the first direction of the display area and are all arranged along the second direction.
7. The LCOS display of claim 2, wherein the conductive layer comprises third and fourth conductive portions that are perpendicular to each other and electrically connected; one of the third conductive portion and the fourth conductive portion is disposed along the first direction, and the other is disposed along the second direction.
8. The LCOS display of claim 2, wherein the conductive layer comprises conductive portions disposed along the first direction and extension portions extending from both ends of the conductive portions along the second direction, respectively, or wherein the conductive layer comprises conductive portions disposed along the second direction and extension portions extending from both ends of the conductive portions along the first direction, respectively.
9. The LCOS display of claim 1, wherein the conductive layer is annular and disposed around the array of pixels.
10. The LCOS display of any one of claims 1-9, wherein a length of the conductive layer along the first direction is greater than a length of the pixel array along the first direction and/or a length of the conductive layer along the second direction is greater than a length of the pixel array along the second direction.
11. The LCOS display of any one of claims 1-9, wherein the ratio of the length of the first edge to the length of the second edge is at least 5:1.
12. The LCOS display of any one of claims 1 to 9, wherein the transparent electrode layer comprises ITO and the conductive layer comprises any one of aluminum, silver, chromium or titanium, each having a resistivity less than the resistivity of the ITO.
13. The LCOS display of claim 1, wherein said conductive paste further comprises insulating spacer particles.
14. The LCOS display of any one of claims 1 to 9, wherein a bonding pad is provided on the silicon substrate, and the conductive layer is electrically connected to the bonding pad through a wire.
15. A method of manufacturing an LCOS display, comprising:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is arranged along the first direction and/or the second direction in a peripheral area of the silicon substrate, wherein the impedance of the conductive layer is smaller than that of a part of the transparent electrode layer covering the pixel array;
mounting the transparent substrate on the silicon substrate such that the transparent electrode layer faces the pixel array and electrically couples the conductive layer with the transparent electrode layer;
wherein the projection of the transparent electrode layer on the silicon substrate completely covers the conductive layer;
the transparent substrate is mounted on the silicon substrate, and specifically comprises:
and placing conductive adhesive in the peripheral area of the liquid crystal layer above the silicon substrate, wherein the conductive adhesive contains conductive particles, the transparent electrode layer faces the silicon substrate and the liquid crystal layer and is thermally pressed, and the transparent electrode layer and the conductive layer are electrically coupled through the conductive adhesive.
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