CN114924443A - LCOS display and manufacturing method thereof - Google Patents
LCOS display and manufacturing method thereof Download PDFInfo
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- CN114924443A CN114924443A CN202210564758.2A CN202210564758A CN114924443A CN 114924443 A CN114924443 A CN 114924443A CN 202210564758 A CN202210564758 A CN 202210564758A CN 114924443 A CN114924443 A CN 114924443A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 138
- 239000002184 metal Substances 0.000 claims abstract description 87
- 239000011521 glass Substances 0.000 claims abstract description 85
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 53
- 239000010703 silicon Substances 0.000 claims abstract description 53
- 239000003292 glue Substances 0.000 claims description 13
- 239000000565 sealant Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 21
- 230000001070 adhesive effect Effects 0.000 description 21
- 238000010586 diagram Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
Abstract
The invention provides a LCOS display and a manufacturing method thereof, wherein the LCOS display comprises: the glass substrate unit is provided with a transparent electrode at one side close to the silicon substrate unit; the LCOS display comprises a display area and a non-display area, wherein grid-shaped metal wires which are connected with each other are formed in the non-display area on one side, close to the silicon substrate unit, of the glass substrate unit, and the metal wires surround the display area and are connected with the transparent electrodes. Due to the surrounding design of the metal wire, the voltage of the transparent electrode on the whole glass substrate unit can be kept uniform, and the stability of the voltage is improved, so that the performance of the device is improved.
Description
Technical Field
The invention relates to the technical field of integrated circuits, in particular to an LCOS display and a manufacturing method thereof.
Background
The LCOS (Liquid Crystal on Silicon) structure is a new reflective projection display device, which uses semiconductor Silicon technology to control the Liquid Crystal and "project" color pictures. Compared with a Liquid Crystal Display (LCD) and a Digital Light Projection (DLP) structure, the LCOS structure has the advantages of high Light utilization efficiency, small size, high aperture ratio, mature manufacturing technology, and the like, and can easily realize high resolution and sufficient color expression. The advantages enable the LCOS structure to have great advantages in the field of large screen display application in the future.
A vertical driving type (TN type) LCOS liquid crystal panel is constituted by a pixel electrode on a silicon substrate unit and a transparent electrode on an opposite side glass substrate unit. The transparent electrodes are connected with the back plate or the silicon substrate unit through the conductive adhesive. Fig. 1 and fig. 2 are schematic structural diagrams of an LCOS display in the prior art. As shown in fig. 1 and 2, the LCOS display includes: the silicon substrate unit 11 is arranged on the back plate, the glass substrate unit 12 is arranged opposite to the silicon substrate unit 11, the frame glue 13 is used for bonding the silicon substrate unit 11 and the glass substrate unit 12, and the conductive glue 14 is used for connecting the glass substrate unit 12 and the back plate 10.
When the panel area of the LCOS display is large, the transparent electrode is only on one side of the glass substrate unit 12, so that the voltage difference exists between the transparent electrode close to the transparent electrode and the transparent electrode far from the transparent electrode.
Disclosure of Invention
The invention aims to provide an LCOS display and a manufacturing method thereof, which can keep the voltage of a transparent electrode on a glass substrate unit uniform and improve the stability of the voltage, thereby improving the performance of the device.
To solve the above technical problem, the present invention provides an LCOS display, including: the glass substrate unit is provided with a transparent electrode at one side close to the silicon substrate unit; the LCOS display comprises a display area and a non-display area, wherein grid-shaped metal wires which are connected with each other are formed in the non-display area on one side, close to the silicon substrate unit, of the glass substrate unit, and the metal wires surround the display area and are connected with the transparent electrodes.
Optionally, the metal lines include a plurality of first metal lines and a plurality of second metal lines, the first metal lines annularly surround the display area, and the second metal lines are linearly connected to the plurality of first metal lines.
Optionally, some of the first metal lines in the same direction are parallel to each other, and some of the second metal lines in the same direction are parallel to each other.
Optionally, the metal wire is located between the glass substrate unit and the transparent electrode.
Optionally, the metal wire is located on a side of the transparent electrode away from the glass substrate unit.
Optionally, a common electrode is formed in the non-display region on the silicon substrate unit, and the transparent electrode is electrically connected to the common electrode through a conductive adhesive.
Optionally, the conductive adhesive is a conductive adhesive column, and the conductive adhesive column is located between the silicon substrate unit and the glass substrate unit and is located in the non-display region outside the frame adhesive.
Optionally, the conductive adhesive is a conductive ball, and the conductive ball is located in the sealant.
Optionally, the LCOS display further includes a back plate, a conductive adhesive pillar is formed in the non-display region on the glass substrate unit, and the conductive adhesive pillar is connected to the transparent electrode and the circuit board on the back plate.
Correspondingly, the invention also provides a manufacturing method of the LCOS display, which comprises the following steps:
providing a silicon substrate and a glass substrate, wherein the glass substrate comprises a plurality of display areas and a plurality of non-display areas;
forming a transparent electrode on the glass substrate, and forming grid-shaped metal wires which are connected with each other in a non-display area of the glass substrate, wherein the metal wires surround the display area and are connected with the transparent electrode;
bonding the silicon substrate with a glass substrate on which a transparent electrode and a metal wire are formed through frame glue; and
and carrying out a cutting process to obtain a plurality of silicon substrate units and glass substrate units which correspond to one another one by one.
In the LCOS display and the manufacturing method thereof provided by the present invention, the LCOS display comprises: the glass substrate unit is provided with a transparent electrode at one side close to the silicon substrate unit; the LCOS display comprises a display area and a non-display area, wherein grid-shaped metal wires which are connected with each other are formed in the non-display area on one side, close to the silicon substrate unit, of the glass substrate unit, and the metal wires surround the display area and are connected with the transparent electrodes. Due to the surrounding design of the metal wire, the voltage of the transparent electrode on the whole glass substrate unit can be kept uniform, and the stability of the voltage is improved, so that the performance of the device is improved.
Drawings
It will be appreciated by those skilled in the art that the drawings are provided for a better understanding of the invention and do not constitute any limitation to the scope of the invention.
Fig. 1 and 2 are schematic diagrams of a LCOS display in the prior art.
Fig. 3 is a schematic structural diagram of an LCOS display according to an embodiment of the present invention.
Fig. 4 is a flowchart of a method for fabricating an LCOS display according to an embodiment of the present invention.
Fig. 5 is a path diagram of ultraviolet light when the sealant is cured according to an embodiment of the present invention.
Fig. 6 is a schematic view of a metal line on a glass substrate unit according to an embodiment of the present invention.
Reference numerals are as follows:
in the figures 1-2 of the drawings,
10-a back plate; 11-a silicon substrate unit; 12-a glass substrate unit; 13-frame glue; 14-conductive glue.
In the case of the figures 3 to 6,
100-a back plate; 110-a silicon substrate unit; 110' -a silicon substrate; 120-a glass substrate unit; 120' -a glass substrate; 130-frame glue; 140-metal lines; 141-a first metal line; 142-a second metal line; 150-a first conductive glue column; 160-second conductive adhesive column; a-a display area; b-non-display area.
Detailed Description
To further clarify the objects, advantages and features of the present invention, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It is to be noted that the drawings are in greatly simplified form and are not to scale, but are merely intended to facilitate and clarify the explanation of the embodiments of the present invention. Further, the structures illustrated in the drawings are intended to be part of actual structures. In particular, the drawings are intended to show different emphasis, sometimes in different proportions.
As used in this application, the singular forms "a", "an" and "the" include plural referents, the term "or" is generally employed in a sense including "and/or," the terms "a" and "an" are generally employed in a sense including "at least one," the terms "at least two" are generally employed in a sense including "two or more," and the terms "first", "second" and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, features defined as "first," "second," and "third" may explicitly or implicitly include one or at least two of the features unless the content clearly dictates otherwise.
Fig. 3 is a schematic structural diagram of an LCOS display according to an embodiment of the present invention. As shown in fig. 3, the LCOS display includes: a silicon substrate unit 110 and a glass substrate unit 120 which are oppositely arranged and are attached to each other through a frame adhesive 130, wherein a transparent electrode (not shown) is formed on one side of the glass substrate unit 120 close to the silicon substrate unit 110; the LCOS display includes a display area a and a non-display area B, the non-display area B surrounds the display area a, metal lines 140 that are in a grid shape and connected to each other are formed in the non-display area B on a side of the glass substrate unit 120 close to the silicon substrate unit 110, and the metal lines 140 surround the display area a and are connected to the transparent electrodes.
In the LCOS display provided by the present invention, the surrounding design of the metal wire 140 enables the voltage of the transparent electrode on the whole glass substrate unit 120 to be kept uniform, and the stability of the voltage is improved, thereby improving the performance of the device.
In this embodiment, the metal lines 140 include a plurality of first metal lines 141 and a plurality of second metal lines 142, the first metal lines 141 annularly surround the display area a, and the second metal lines 142 linearly connect at least two of the first metal lines 141. Preferably, the first metal line 141 may have a rectangular or square shape, for example, each side of the first metal line 141 may be parallel to a cutting line before cutting to form the LCOS display. More preferably, the first metal lines 141 of the plurality of first metal lines 141 located in the same direction are parallel to each other, and the second metal lines 142 located in the same direction are parallel to each other.
The metal line 140 may be located between the glass substrate unit 120 and the transparent electrode, or may be located on a side of the transparent electrode away from the glass substrate unit 120. May be determined according to actual process conditions and requirements, and the present invention is not limited thereto.
As shown in fig. 3, a common electrode (not shown) is further formed in the non-display region B on the silicon substrate unit 110, and the transparent electrode is electrically connected to the common electrode through a conductive adhesive. In an embodiment of the present invention, the conductive adhesive may be a conductive adhesive pillar, for example, the first conductive adhesive pillar 150 in fig. 3, the first conductive adhesive pillar 150 is located between the silicon substrate unit 110 and the glass substrate unit 120 and is located in the non-display region B outside the sealant 130, and the first conductive adhesive pillar 150 connects the common electrode on the silicon substrate unit 110 and the transparent electrode on the glass substrate unit 120. In another embodiment of the present invention, the conductive paste is conductive balls (not shown), the conductive balls are located in the paste frame 130, and after the silicon substrate unit 110 is attached to the glass substrate unit 120, the conductive balls connect the common electrode and the transparent electrode. The common electrode on the silicon substrate unit 110 may be electrically connected to a circuit board through a conductive paste.
The LCOS display further comprises a back plate 100, a circuit board is arranged on the back plate 100, and the common electrode is electrically connected with the circuit board through conductive adhesive. In another embodiment of the present invention, a conductive adhesive pillar, such as the second conductive adhesive pillar 160 in fig. 3, is further formed in the non-display region B on the glass substrate unit 120, and the second conductive adhesive pillar 160 connects the transparent electrode on the glass substrate unit 120 and the circuit board on the back panel 100.
The transparent electrodes on the glass substrate unit 120 may be connected to a circuit board in different manners or combinations of different manners, a voltage is provided to the transparent electrodes through the circuit board, the metal wires 140 are in a grid shape and connected to each other, and the metal wires 140 surround the display area a and are connected to the transparent electrodes, so that a voltage difference between the transparent electrodes at positions close to the voltage input end and positions far away from the voltage input end is reduced, the voltage of the transparent electrodes on the glass substrate unit is kept uniform, the stability of the voltage is improved, and the device performance is improved.
Correspondingly, the invention also provides a manufacturing method of the LCOS display, which is used for forming the LCOS display.
Fig. 4 is a flowchart of a method for fabricating an LCOS display according to an embodiment of the present invention. As shown in fig. 4, the method for manufacturing the LCOS display includes the following steps:
s1: providing a silicon substrate and a glass substrate, wherein the glass substrate comprises a plurality of display areas and a plurality of non-display areas;
s2: forming a transparent electrode on the glass substrate, and forming grid-shaped metal wires which are connected with each other in a non-display area of the glass substrate, wherein the metal wires surround the display area and are connected with the transparent electrode;
s3: bonding the silicon substrate and the glass substrate formed with the transparent electrode and the metal wire through frame glue;
s4: and carrying out a cutting process to obtain a plurality of silicon substrate units and glass substrate units which correspond to one another one by one.
Specifically, in step S1, the silicon substrate and the glass substrate are both large substrates, and may be cut into a plurality of silicon substrate units and glass substrate units to form a plurality of LCOS displays, each of which includes a display area and a non-display area. And determining corresponding display areas and non-display areas on the silicon substrate and the glass substrate according to the display areas and the non-display areas of each LCOS display, namely that the plurality of display areas and the plurality of non-display areas contained in the glass substrate correspond to the display areas and the non-display areas of the plurality of subsequently formed LCOS displays.
In step S2, transparent electrodes are formed on the glass substrate, and metal lines connected to each other in a grid shape are formed in a non-display area of the glass substrate, the metal lines surrounding the display area and being connected to the transparent electrodes.
In an embodiment of the present invention, a transparent electrode is first formed on the glass substrate, and then a metal line is formed in a non-display region of the glass substrate, wherein the metal line is located above the transparent electrode and connected to the transparent electrode. In another embodiment of the present invention, first, metal lines are formed in the non-display region of the glass substrate, and then, transparent electrodes are formed on the glass substrate and the metal lines, the transparent electrodes being connected to the metal lines.
Of course, a pixel electrode and a common electrode are also formed on the silicon substrate, and the common electrode is located in the non-display area of the silicon substrate.
In step S3, the silicon substrate is bonded to the glass substrate with the transparent electrodes and the metal wires formed thereon by sealant. For example, a first alignment layer is formed on the silicon substrate, a sealant is formed on the first alignment layer, and then, a liquid crystal layer is formed on the first alignment layer, the sealant surrounding the liquid crystal layer. Meanwhile, a second alignment layer is formed on the glass substrate, then, one surface of the silicon substrate, on which the first alignment layer is formed, is attached to one surface of the glass substrate, on which the second alignment layer is formed, and the silicon substrate and the glass substrate are fixed through the frame glue.
In step S4, a dicing process is performed to obtain a plurality of one-to-one corresponding silicon substrate units and glass substrate units, so as to form a plurality of LCOS displays as described in fig. 3.
In the method for manufacturing the LCOS display, the metal wire 140 is formed on the glass substrate, and the surrounding design of the metal wire 140 keeps the voltage of the transparent electrode on the whole glass substrate unit 120 uniform, thereby improving the stability of the voltage and improving the performance of the device.
Fig. 5 is a path diagram of ultraviolet light when the sealant according to an embodiment of the present invention is cured. As shown in fig. 5, Ultraviolet (UV) light is irradiated from the glass substrate 120 ' side to cure the sealant 130, since the metal lines 140 are formed in a grid shape on the glass substrate 120 ' and the metal layer (e.g., a common electrode) is formed on the silicon substrate 110 ', the UV light cures the sealant 130 through diffraction of the grid and reflection of the metal layer on the surface of the silicon substrate 110 ' and the metal lines 140 on the surface of the glass substrate 120 ', i.e., the UV light can cure the sealant 130 under the metal lines 140, and thus the existence of the metal lines 140 does not affect the curing of the sealant 140.
Fig. 6 is a schematic view of a metal line on a glass substrate unit according to an embodiment of the present invention. As shown in FIG. 6, taking the length L of the glass substrate unit 120 as 19.66mm + -0.2 mm and the width W as 12.84mm + -0.2 mm as an example, the line width of the metal line 140 is 40 μm + -4 μm, the distance between the adjacent metal lines 140 is 40 μm + -4 μm, and the thickness of the metal line 140 is
The position of the metal line 140 ranges from a position 200 μm from the display area A to a street, and the width W1 of the entire metal line 140 is 0.97mm + -0.1 mm, W2 is 1.43mm + -0.1 mm, W3 is 2.03mm + -0.1 mm, and W4 is also 2.03mm + -0.1 mm. In the LCOS display formed after the metal line 140 is disposed, the resistance between the input points of the first conductive paste pillar 150 is from about 400 Ω to 40 Ω.
In summary, in the LCOS display and the method for manufacturing the same provided by the present invention, the LCOS display includes: the silicon substrate unit and the glass substrate unit are oppositely arranged and are attached through frame glue, and a transparent electrode is formed on one side of the glass substrate unit, which is close to the silicon substrate unit; the LCOS display comprises a display area and a non-display area, wherein grid-shaped metal wires which are connected with each other are formed in the non-display area on one side, close to the silicon substrate unit, of the glass substrate unit, and the metal wires surround the display area and are connected with the transparent electrodes. Due to the surrounding design of the metal wire, the voltage of the transparent electrode on the whole glass substrate unit can be kept uniform, and the stability of the voltage is improved, so that the performance of the device is improved.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (10)
1. An LCOS display, comprising: the glass substrate unit is provided with a transparent electrode at one side close to the silicon substrate unit; the LCOS display comprises a display area and a non-display area, wherein grid-shaped metal wires which are connected with each other are formed in the non-display area on one side, close to the silicon substrate unit, of the glass substrate unit, and the metal wires surround the display area and are connected with the transparent electrodes.
2. The LCOS display according to claim 1, wherein said metal line comprises a plurality of first metal lines and a plurality of second metal lines, said first metal lines annularly surrounding said display area, said second metal lines linearly connecting said plurality of first metal lines.
3. The LCOS display of claim 2, wherein the first metal lines of the plurality of first metal lines in a same direction are parallel to each other, and the second metal lines in a same direction are parallel to each other.
4. The LCOS display of claim 1, wherein said metal wire is located between said glass substrate cell and said transparent electrode.
5. The LCOS display of claim 1, wherein said metal lines are located on a side of said transparent electrode remote from said glass substrate unit.
6. The LCOS display of claim 1, wherein a common electrode is formed in the non-display region on the silicon substrate unit, and the transparent electrode is electrically connected to the common electrode through a conductive paste.
7. The LCOS display according to claim 6, wherein said conductive paste is a pillar of conductive paste, said pillar of conductive paste being located between said silicon substrate unit and said glass substrate unit and within said non-display region outside of said sealant.
8. The LCOS display of claim 6, wherein the conductive paste is a conductive ball, the conductive ball being located within the sealant.
9. The LCOS display of claim 1, further comprising a backplane, wherein the non-display area on the glass substrate unit has conductive glue pillars formed therein, the conductive glue pillars connecting the transparent electrodes to a circuit board on the backplane.
10. A method of fabricating an LCOS display, the method comprising:
providing a silicon substrate and a glass substrate, wherein the glass substrate comprises a plurality of display areas and a plurality of non-display areas;
forming a transparent electrode on the glass substrate, and forming grid-shaped metal wires which are connected with each other in a non-display area of the glass substrate, wherein the metal wires surround the display area and are connected with the transparent electrode;
bonding the silicon substrate with a glass substrate on which a transparent electrode and a metal wire are formed through frame glue; and
and carrying out a cutting process to obtain a plurality of silicon substrate units and glass substrate units which correspond to each other one by one.
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| CN202210564758.2A CN114924443A (en) | 2022-05-23 | 2022-05-23 | LCOS display and manufacturing method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116400536A (en) * | 2023-06-08 | 2023-07-07 | 广州华星光电半导体显示技术有限公司 | Display panel and display device |
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| CN116400536A (en) * | 2023-06-08 | 2023-07-07 | 广州华星光电半导体显示技术有限公司 | Display panel and display device |
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