CN114136535A - Automatic testing system and testing method for cathode of electron gun - Google Patents
Automatic testing system and testing method for cathode of electron gun Download PDFInfo
- Publication number
- CN114136535A CN114136535A CN202111341549.3A CN202111341549A CN114136535A CN 114136535 A CN114136535 A CN 114136535A CN 202111341549 A CN202111341549 A CN 202111341549A CN 114136535 A CN114136535 A CN 114136535A
- Authority
- CN
- China
- Prior art keywords
- power supply
- module
- cathode
- electron gun
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 102
- 238000012545 processing Methods 0.000 claims abstract description 45
- 238000010894 electron beam technology Methods 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000009826 distribution Methods 0.000 claims abstract description 12
- 230000008569 process Effects 0.000 claims abstract description 11
- 230000005611 electricity Effects 0.000 claims abstract description 3
- 238000012544 monitoring process Methods 0.000 claims description 43
- 238000005070 sampling Methods 0.000 claims description 26
- 238000005094 computer simulation Methods 0.000 claims description 15
- 238000011056 performance test Methods 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 8
- 238000004088 simulation Methods 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000003321 amplification Effects 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 238000010998 test method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013522 software testing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses an automatic testing system and a testing method for an electron gun cathode, and belongs to the technical field of electric vacuum. The system comprises a power supply system, an acquisition system and an upper computer; the power supply system generates high voltage and auxiliary electricity required by system calibration test and electron gun cathode test under the control of the upper computer, and reports the output voltage and current states of the power supply system to the upper computer; the acquisition system stores and records the voltage, current and temperature parameters of the calibration piece or the cathode emission electron beam under the control of the upper computer, and finally sends the acquired data to the upper computer for processing; the upper computer comprehensively processes various data sent by the acquisition system, automatically draws various characteristic curves, obtains deviation points, inflection points or characteristic working points in the characteristic curves, and simultaneously obtains the energy distribution of the cathode emission electron beams. The invention can improve the test efficiency, and the test system can calibrate the system, thereby improving the accuracy of the measured data.
Description
Technical Field
The invention belongs to the technical field of electric vacuum, and particularly relates to an automatic testing system and a testing method for an electron gun cathode.
Background
An electron gun is a device for generating and accelerating electron beams, and has been widely used in the fields of industrial detection, safety inspection, medical diagnosis and treatment. The cathode is used as a carrier for electron beam emission, which has fundamental influence on the performance and reliability of the electron gun, so that the performance of the cathode needs to be tested before the electron gun is installed and used or needs to be reused after being placed for a long time.
The current-voltage characteristic (Uk-Ik) and the underheat characteristic (Ik-T) are two main parameters characterizing the performance of the electron gun cathode. In a volt-ampere characteristic (Uk-Ik) test, because an electron gun works in a pulse mode, voltage Uk and current Ik of the electron gun are both in a pulse mode, a conventional test method adopts a fixed point to collect data of the voltage Uk and the current Ik, and the efficiency is very low due to complicated steps. Meanwhile, because the equipment used for testing is not calibrated in time, and the influence factors in actual measurement are more, the obtained data is not credible and even possibly invalid.
On the other hand, the requirement of the under-heat characteristic (Ik-T) test on a test instrument is high, and the surface temperature of the cathode of the electron gun is currently and widely monitored by an optical pyrometer in real time. The optical pyrometer has many advantages such as measurement accuracy is high, reaction rate is fast, measuring range is wide, the measured value more is close to true temperature, in-service use need through adjusting the eyepiece of optical pyrometer many times, aim at the electron gun negative pole of being surveyed, because of electron gun negative pole area is less relatively, if the electron gun negative pole can not accurate alignment of optical pyrometer, will greatly influence the accuracy of test data, reduce the efficiency of software testing of electron gun simultaneously by a wide margin.
In summary, the disadvantages of the conventional electron gun cathode testing method are mainly expressed as follows:
(1) when the volt-ampere characteristic is tested, the manual test method of fixed point acquisition is adopted for data such as voltage Uk, current Ik and the like under the pulse working condition, the efficiency is very low, the emission performance of the electron gun under the full range can not be truly reflected, and the requirements of mass production, emergency replacement and the like can not be met.
(2) Because the conventional test system does not comprise a calibration device, timely calibration cannot be realized, and the influence factors of actual data acquisition are more, so that the test data is unreliable or even invalid. After the electron gun is installed into the whole machine, the incredible test data will affect the normal operation of the system.
(3) In the testing of the thermal failure characteristic, an optical pyrometer is required to participate in monitoring in real time, and if the optical pyrometer cannot work normally due to faults, the testing of the thermal failure characteristic is forced to be interrupted. In actual use, compromise needs to be made between the accuracy of test data and the test efficiency, and the compromise cannot be considered.
Disclosure of Invention
In view of the above, the invention provides an automatic test system and a test method for an electron gun cathode, which can quickly acquire data such as emission voltage, emission current and the like, and obtain a corresponding curve through software fitting, thereby significantly improving the test efficiency; the test system can calibrate the system, so that the reliability of the system is ensured, and the accuracy of the measured data is greatly improved.
An automatic test system for electron gun cathodes comprises a power supply system, an acquisition system and an upper computer, wherein peripheral components are a calibration piece and the electron gun cathodes;
the power supply system generates high voltage and auxiliary electricity required by system calibration test and electron gun cathode test under the control instruction of the upper computer, and simultaneously reports the output voltage and current states of the power supply system to the upper computer;
the acquisition system stores and records voltage, current and temperature parameters of electron beams emitted by a calibration piece or a cathode of an electron gun under the control instruction of the upper computer, and finally transmits acquired data to the upper computer for processing;
the upper computer comprehensively processes various data sent by the acquisition system, automatically draws various characteristic curves of the calibration piece and the electron gun cathode, obtains deviation points, inflection points or characteristic working points in the characteristic curves, simultaneously obtains energy distribution of cathode emission electron beams through three-dimensional modeling, and calibrates the power supply system and the acquisition system by using the calibration piece before carrying out electron gun cathode test.
Further, the characteristics include an emission characteristic, an underheat characteristic, and an effective work function profile.
Further, the power supply system comprises a high-voltage power supply, an auxiliary power supply and a sampling circuit; the high-voltage power supply and the auxiliary power supply are used for generating various high-voltage power supplies and auxiliary power supplies required by electron gun cathode test and transmitting electric signals to the sampling circuit; and the sampling circuit is used for sampling voltage and current signals of the high-voltage power supply and the auxiliary power supply and transmitting results to the upper computer.
Furthermore, the acquisition system comprises a scanning module, a sensing module and a signal acquisition module; the scanning module is used for controlling the electron beam emitted by the cathode to scan in an effective area on the surface of the energy absorption device; the sensing module is used for receiving an electron beam signal emitted by the cathode and transmitting the electron beam signal to the signal acquisition module; and the signal acquisition module is used for amplifying and A/D converting the signals sent by the sensing module and then transmitting the signals to the upper computer.
Further, the upper computer comprises a data processing module, a simulation modeling module and a monitoring control module; the data processing module is used for comprehensively processing the data sent by the signal acquisition module, drawing various characteristic curves of the cathode of the electron gun, calculating a special working point for representing the performance of the cathode of the electron gun, and transmitting the processed data to the simulation modeling module and the monitoring control module; the simulation modeling module is used for carrying out three-dimensional simulation on the processed cathode emission electron beam parameters and reproducing the energy density distribution of the electron beam; and the monitoring control module is used for controlling the power supply system and the acquisition system in real time according to the calculation result of the data processing module and the feedback of the sampling circuit.
Furthermore, after the upper computer sends a test instruction, the monitoring control module firstly controls the starting of the power supply system and the acquisition system, the power supply system starts to be powered up, and the acquisition system starts to scan the beam current emitted by the cathode; in the testing process, the monitoring control module monitors the power supply voltage and current information of the power supply system in real time, judges whether the system works normally or not according to the information, and controls to turn off the power supply and the acquisition system if the system works abnormally; if the system works normally, after the data processing module records the electron beam current information of one working voltage or space section, the data processing module can send a test instruction of the next working voltage or space section to the monitoring control module, the monitoring module controls the power supply system to change the output voltage, or controls the scanning module to change the scanning section, so that the next voltage or space section is scanned, and the monitoring control module can control the power supply system and the acquisition system in real time.
An automatic testing method for electron gun cathode, the method comprises the following steps:
step 1: put into test system with the calibration piece, the host computer sends calibration test instruction respectively to electrical power generating system and collection system through monitoring control module:
step 2: the power supply system receives the calibration test instruction, the high-voltage power supply and the auxiliary power supply are started, and meanwhile, the sampling circuit is utilized to send corresponding information such as power supply voltage, current and the like to the upper computer, so that the real-time monitoring of the output state of the power supply system is realized;
and step 3: the acquisition system receives a calibration test instruction, controls the scanning module to scan the beam current emitted by the calibration piece, and simultaneously receives the electron beam current information and transmits the information to the signal acquisition module;
and 4, step 4: the signal acquisition module is used for amplifying and A/D converting acquired voltage and current data and then transmitting signals to an upper computer;
and 5: the data processing module of the upper computer carries out comprehensive processing on the data sent by the signal acquisition module, and a characteristic curve of the calibration piece is drawn (the characteristic curve mainly confirms the precision of the test system, if the precision is in a reasonable range, the test on the electron gun is meaningful, and if the precision is out of tolerance, the test data is invalid) and is used for calibration test;
wherein, the steps 1-5 are calibration test steps, and are only used when the test system is used for the first time or needs to be reused after being used for a long time. After the calibration test is completed, the performance test of the cathode of the electron gun can be carried out, and the test steps are as follows:
step 6: put into test system with the electron gun that awaits measuring, the host computer sends electron gun cathode performance test instruction respectively to electrical power generating system and collection system through monitoring control module:
and 7: the power supply system receives a cathode performance test instruction, the high-voltage power supply and the auxiliary power supply are started, and meanwhile, the sampling circuit sends corresponding power supply voltage and current information to the upper computer to realize real-time monitoring of the output state of the power supply system;
and 8: the acquisition system receives a cathode performance test instruction, the monitoring control module controls the scanning module to perform primary scanning on electron gun cathode emission beam current, and meanwhile, the sensing module receives cathode emission electron beam current information and transmits the information to the signal acquisition module;
and step 9: the signal acquisition module amplifies and A/D converts acquired voltage and current data and then transmits signals to the data processing module;
step 10: the data processing module records the signal in the step 9, and simultaneously sends a test instruction of the next working voltage or space section to the monitoring control module, and the monitoring control module controls the power supply system to change the output voltage or controls the scanning module to change the scanning section so as to realize the scanning of the next voltage or space section;
step 11: the data processing module carries out comprehensive processing on the data sent by the signal acquisition module for multiple times, draws various characteristic curves of the cathode of the electron gun and automatically obtains a deviation point, an inflection point and a characteristic working point in the emission characteristic curve;
step 12: the simulation modeling module carries out three-dimensional simulation on a large number of electron beam signals and electron beam signals of different cross sections acquired by the data processing module, and reproduces the energy density distribution of the electron beams.
Has the advantages that:
1. the testing system can quickly acquire relevant parameters of the electron beam emitted by the cathode, obtain a corresponding characteristic curve through software fitting, truly reflect the emission performance of the electron gun under the full range, remarkably improve the testing efficiency and completely meet the requirements of batch production or emergency replacement.
2. The testing system can obtain the parameters of the electron gun cathode emission beam current at different sections by controlling the scanning module, realizes the three-dimensional simulation modeling of the energy density distribution of the cathode emission electron beam current, and provides more detailed basis for the deep evaluation of the cathode emission characteristic.
3. The testing method adopts the step link of system self calibration, and the system can calibrate the system in time through the calibration piece before testing the electron gun, thereby ensuring the reliability of the system, reducing the influence of external factors on the test data and greatly improving the accuracy of the measured data.
Drawings
FIG. 1 is a schematic block diagram of an automatic testing system and method for electron gun cathode according to the present invention
FIG. 2 is a logic diagram of the calibration test and electron gun cathode test of the automatic test system of the present invention.
FIG. 3 is a flowchart illustrating the electron gun cathode testing process of the automatic testing system of the present invention.
The system comprises a power supply system 1, an acquisition system 2, an upper computer 3, a high-voltage power supply 11, an auxiliary power supply 12, a sampling circuit 13, a scanning module 21, a sensing module 22, a signal acquisition module 23, a data processing module 31, a simulation modeling module 32 and a monitoring control module 33.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides an automatic testing system and a testing method of an electron gun cathode, as shown in figure 1, the system comprises a power supply system 1, an acquisition system 2 and an upper computer 3.
The high-voltage power supply 11 and the auxiliary power supply 12 in the power supply system 1 work under the control of the monitoring control module 33 in the upper computer 3, and the outputs of the high-voltage power supply 11 and the auxiliary power supply 12 are simultaneously connected to the equipment to be tested and the sampling circuit 13. The sampling circuit 13 samples the received electrical signal, and the output thereof is connected to the input of the monitoring control module 33 in the upper computer 3. The scanning module 21 in the acquisition system 2 works under the control of the monitoring control module 33 in the upper computer 3, and the other end of the scanning module is connected to a device to be measured (an electron gun or a calibration piece). The input of the sensing module 22 is connected to the device under test (electron gun or calibration piece) and the output of the sensing module 22 is connected to the input of the signal acquisition module 23. The output of the signal acquisition module 23 is connected to the input of the data processing module 31 in the upper computer 3, and signals after being processed by amplification, A/D conversion and the like are transmitted to the upper computer 3. The output of the data processing module 31 in the upper computer 3 is connected to the inputs of the simulation modeling module 32 and the monitoring control module 33. The inputs of the monitoring control module 33 are connected to the data processing module 31 and the output of the sampling circuit 13, and the outputs of the monitoring control module 33 are connected to the inputs of the high voltage power supply 11, the auxiliary power supply 12 and the scanning module 21, respectively.
The power supply system 1 mainly supplies power to a device to be tested (an electron gun or a calibration piece) under the control of the upper computer 3, and simultaneously uploads the output state to the monitoring control module 33 through the sampling circuit 13.
The acquisition system 2 mainly realizes acquisition of electron beam parameters emitted by a device to be measured (an electron gun or a calibration piece) under the control of the upper computer 3, and transmits data to the upper computer 3 after amplification, A/D conversion and other processing.
The upper computer 3 processes the data transmitted by the acquisition system 2, draws various characteristic curves, automatically obtains special points in the characteristic curves through algorithms such as logarithm and differential, and performs three-dimensional modeling through a simulation module to obtain the energy distribution of the cathode emission electron beams. In addition, the upper computer 3 also needs to complete the control and detection of the power supply system 1 and the acquisition system 2 so as to ensure that the test system can normally and stably complete the tests of different performance parameters.
In a further embodiment, the power supply system 1 is composed of a high voltage power supply 11, an auxiliary power supply 12 and a sampling circuit 13. The high voltage power supply 11 and the auxiliary power supply 12 are used for generating various high voltage power supplies and auxiliary power supplies required by electron gun cathode test and transmitting electric signals to the sampling circuit 13. And the sampling circuit 13 is used for sampling signals such as voltage and current of the high-voltage power supply 11 and the auxiliary power supply 12 and transmitting the result to the upper computer 3.
The acquisition system 2 is composed of a scanning module 21, a sensing module 22 and a signal acquisition module 23. The scanning module 21 is configured to control an electron beam emitted by the cathode to scan an effective area on the surface of the energy absorption device; the sensing module 22 is used for receiving the electron beam signal emitted by the cathode and transmitting the electron beam signal to the signal acquisition module 23; and the signal acquisition module 23 is used for carrying out amplification, A/D conversion and other processing on the signals sent by the sensing module 22 and then transmitting the signals to the upper computer 3.
The upper computer 3 is composed of a data processing module 31, a simulation modeling module 32 and a control module 33. The data processing module 31 is configured to perform comprehensive processing on the data sent by the signal acquisition module 23, draw characteristic curves of the cathode of the electron gun, calculate a special working point representing the performance of the cathode of the electron gun, and transmit the processed data to the simulation modeling module 32 and the monitoring control module 33; the simulation modeling module 32 is used for carrying out three-dimensional simulation on the processed cathode emission electron beam parameters and reproducing the energy density distribution of the electron beam; and the monitoring control module 33 is used for controlling the power supply system 1 and the acquisition system 2 in real time according to the calculation result of the data processing module 31 and the feedback of the sampling circuit.
The working process and principle of the invention are as follows:
the automatic test system provided by the invention mainly comprises the test steps of the calibration piece and the electronic gun to be tested. Firstly, the test of the calibration piece is carried out, and then the performance test of the electron gun can be carried out.
In the test of the calibration piece, the method comprises the following steps:
step 1: put into test system with the calibration piece, host computer 3 sends calibration test instruction respectively to electrical power generating system 1 and collection system 2 through control module 33:
step 2: the power supply system 1 receives a calibration test instruction, the high-voltage power supply 11 and the auxiliary power supply 12 are started, and meanwhile, the sampling circuit 13 is utilized to send corresponding information such as power supply voltage, current and the like to the upper computer 3, so that the real-time monitoring of the output state of the power supply system 1 is realized;
and step 3: the acquisition system 2 receives a calibration test instruction, controls the scanning module 21 to scan the beam current emitted by the calibration piece, and simultaneously the sensing module 22 receives the electron beam current information and transmits the information to the signal acquisition module 23;
and 4, step 4: the signal acquisition module 23 performs amplification, a/D conversion and other processing on acquired data such as voltage, current and the like, and then transmits a signal to the upper computer 3;
and 5: the data processing module 31 of the upper computer 3 performs comprehensive processing on the data sent by the signal acquisition module 23, and draws a characteristic curve of the calibration piece for calibrating the test system.
After the calibration test is finished, the performance test of the cathode of the electron gun is carried out, and the steps are as follows:
step 6: put into test system with the electron gun that awaits measuring, host computer 3 sends electron gun cathode performance test instruction respectively to electrical power generating system 1 and collection system 2 through control module 33:
and 7: the power supply system 1 receives a cathode performance test instruction, the high-voltage power supply 11 and the auxiliary power supply 12 are started, and meanwhile, the sampling circuit 13 is utilized to send corresponding information such as power supply voltage, current and the like to the upper computer 3, so that the real-time monitoring of the output state of the power supply system 1 is realized;
and 8: the acquisition system 2 receives the cathode performance test instruction, controls the scanning module 21 to scan the electron gun cathode emission beam, and simultaneously the sensing module 22 receives the cathode emission electron beam information and transmits the information to the signal acquisition module 23;
and step 9: the upper computer 3 controls the scanning module 21 to move to the next position to be detected, and the step 8 is repeated to obtain beam flow parameters emitted by the cathode of the electron gun at different sections;
step 10: the signal acquisition module 23 performs amplification, a/D conversion and other processing on acquired data such as voltage, current and the like, and then transmits the signal to the signal processing module 31 of the upper computer 3;
step 11: the data processing module 31 of the upper computer 3 comprehensively processes the data sent by the signal acquisition module 23, draws various characteristic curves of the cathode of the electron gun, such as an emission characteristic curve (volt-ampere characteristic curve), a low-heat curve (Miram curve), and effective work function distribution (PWFD), and automatically obtains a deviation point, an inflection point, and a characteristic working point (T80) in the emission characteristic curve by calculating algorithms such as logarithm and differentiation;
step 12: the data processing module 31 processes the parameters of the electron gun cathode emission beam obtained in the step 9 at different cross sections, and performs three-dimensional simulation by using the simulation modeling module 32 to reproduce the energy density distribution of the electron beam.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. An automatic test system for electron gun cathodes is characterized in that the system comprises a power supply system, an acquisition system and an upper computer, and peripheral components are a calibration piece and the electron gun cathodes;
the power supply system generates high voltage and auxiliary electricity required by system calibration test and electron gun cathode test under the control instruction of the upper computer, and simultaneously reports the output voltage and current states of the power supply system to the upper computer;
the acquisition system stores and records voltage, current and temperature parameters of electron beams emitted by a calibration piece or a cathode of an electron gun under the control instruction of the upper computer, and finally transmits acquired data to the upper computer for processing;
the upper computer comprehensively processes various data sent by the acquisition system, automatically draws various characteristic curves of the calibration piece and the electron gun cathode, obtains deviation points, inflection points or characteristic working points in the characteristic curves, simultaneously obtains energy distribution of cathode emission electron beams through three-dimensional modeling, and calibrates the power supply system and the acquisition system by using the calibration piece before carrying out electron gun cathode test.
2. The system for automated testing of electron gun cathodes according to claim 1 wherein the characteristics include emission, underheat, and effective work function profiles.
3. The automatic test system for electron gun cathodes according to claim 2, wherein the power supply system includes a high voltage power supply, an auxiliary power supply, and a sampling circuit; the high-voltage power supply and the auxiliary power supply are used for generating various high-voltage power supplies and auxiliary power supplies required by electron gun cathode test and transmitting electric signals to the sampling circuit; and the sampling circuit is used for sampling voltage and current signals of the high-voltage power supply and the auxiliary power supply and transmitting results to the upper computer.
4. The system for automated testing of electron gun cathodes of claim 3 wherein the acquisition system comprises a scanning module, a sensing module, and a signal acquisition module; the scanning module is used for controlling the electron beam emitted by the cathode to scan in an effective area on the surface of the energy absorption device; the sensing module is used for receiving an electron beam signal emitted by the cathode and transmitting the electron beam signal to the signal acquisition module; and the signal acquisition module is used for amplifying and A/D converting the signals sent by the sensing module and then transmitting the signals to the upper computer.
5. The automatic test system for electron gun cathodes according to claim 4, wherein the upper computer includes a data processing module, a simulation modeling module and a monitoring control module; the data processing module is used for comprehensively processing the data sent by the signal acquisition module, drawing various characteristic curves of the cathode of the electron gun, calculating a special working point for representing the performance of the cathode of the electron gun, and transmitting the processed data to the simulation modeling module and the monitoring control module; the simulation modeling module is used for carrying out three-dimensional simulation on the processed cathode emission electron beam parameters and reproducing the energy density distribution of the electron beam; and the monitoring control module is used for controlling the power supply system and the acquisition system in real time according to the calculation result of the data processing module and the feedback of the sampling circuit.
6. The automatic testing system of electron gun cathode according to claim 1, wherein after the upper computer sends the testing command, the monitoring control module first controls to start the power system and the collecting system, the power system starts to be powered up, and the collecting system starts to scan the beam current emitted from the cathode; in the testing process, the monitoring control module monitors the power supply voltage and current information of the power supply system in real time, judges whether the system works normally or not according to the information, and controls to turn off the power supply and the acquisition system if the system works abnormally; if the system works normally, after the data processing module records the electron beam current information of one working voltage or space section, the data processing module can send a test instruction of the next working voltage or space section to the monitoring control module, the monitoring module controls the power supply system to change the output voltage, or controls the scanning module to change the scanning section, so that the next voltage or space section is scanned, and the monitoring control module can control the power supply system and the acquisition system in real time.
7. A method for automatic testing of electron gun cathodes, using an automatic test system according to any one of claims 1 to 6, characterized in that the method is implemented by the following steps:
step 1: put into test system with the calibration piece, the host computer sends calibration test instruction respectively to electrical power generating system and collection system through monitoring control module:
step 2: the power supply system receives the calibration test instruction, the high-voltage power supply and the auxiliary power supply are started, and meanwhile, the sampling circuit is utilized to send corresponding information such as power supply voltage, current and the like to the upper computer, so that the real-time monitoring of the output state of the power supply system is realized;
and step 3: the acquisition system receives a calibration test instruction, controls the scanning module to scan the beam current emitted by the calibration piece, and simultaneously receives the electron beam current information and transmits the information to the signal acquisition module;
and 4, step 4: the signal acquisition module is used for amplifying and A/D converting acquired voltage and current data and then transmitting signals to an upper computer;
and 5: the data processing module of the upper computer comprehensively processes the data sent by the signal acquisition module, and draws a characteristic curve of the calibration piece for calibration test;
step 6: put into test system with the electron gun that awaits measuring, the host computer sends electron gun cathode performance test instruction respectively to electrical power generating system and collection system through monitoring control module:
and 7: the power supply system receives a cathode performance test instruction, the high-voltage power supply and the auxiliary power supply are started, and meanwhile, the sampling circuit sends corresponding power supply voltage and current information to the upper computer to realize real-time monitoring of the output state of the power supply system;
and 8: the acquisition system receives a cathode performance test instruction, the monitoring control module controls the scanning module to perform primary scanning on electron gun cathode emission beam current, and meanwhile, the sensing module receives cathode emission electron beam current information and transmits the information to the signal acquisition module;
and step 9: the signal acquisition module amplifies and A/D converts acquired voltage and current data and then transmits signals to the data processing module;
step 10: the data processing module records the signal in the step 9, and simultaneously sends a test instruction of the next working voltage or space section to the monitoring control module, and the monitoring control module controls the power supply system to change the output voltage or controls the scanning module to change the scanning section so as to realize the scanning of the next voltage or space section;
step 11: the data processing module carries out comprehensive processing on the data sent by the signal acquisition module for multiple times, draws various characteristic curves of the cathode of the electron gun and automatically obtains a deviation point, an inflection point and a characteristic working point in the emission characteristic curve;
step 12: the simulation modeling module carries out three-dimensional simulation on a large number of electron beam signals and electron beam signals of different cross sections acquired by the data processing module, and reproduces the energy density distribution of the electron beams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341549.3A CN114136535A (en) | 2021-11-12 | 2021-11-12 | Automatic testing system and testing method for cathode of electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341549.3A CN114136535A (en) | 2021-11-12 | 2021-11-12 | Automatic testing system and testing method for cathode of electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114136535A true CN114136535A (en) | 2022-03-04 |
Family
ID=80393067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111341549.3A Pending CN114136535A (en) | 2021-11-12 | 2021-11-12 | Automatic testing system and testing method for cathode of electron gun |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114136535A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030062638A (en) * | 2002-01-18 | 2003-07-28 | 삼성에스디아이 주식회사 | Electron gun for projection cathode ray tube and method for testing alignment thereof |
| JP2010219372A (en) * | 2009-03-18 | 2010-09-30 | Nuflare Technology Inc | Electron beam drawing device, and method of deciding cathode life of electron gun |
| CN102751154A (en) * | 2011-04-22 | 2012-10-24 | 上海凯世通半导体有限公司 | Real-time detection and control device for ion implantation |
| CN104134604A (en) * | 2014-04-18 | 2014-11-05 | 北京大学 | Launching performance evaluation device and evaluation method for electron beam of field emission electron source |
| CN110780145A (en) * | 2019-12-10 | 2020-02-11 | 山东蓝孚高能物理技术股份有限公司 | Emission testing device of direct-current high-voltage type accelerator electron gun |
-
2021
- 2021-11-12 CN CN202111341549.3A patent/CN114136535A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030062638A (en) * | 2002-01-18 | 2003-07-28 | 삼성에스디아이 주식회사 | Electron gun for projection cathode ray tube and method for testing alignment thereof |
| JP2010219372A (en) * | 2009-03-18 | 2010-09-30 | Nuflare Technology Inc | Electron beam drawing device, and method of deciding cathode life of electron gun |
| CN102751154A (en) * | 2011-04-22 | 2012-10-24 | 上海凯世通半导体有限公司 | Real-time detection and control device for ion implantation |
| CN104134604A (en) * | 2014-04-18 | 2014-11-05 | 北京大学 | Launching performance evaluation device and evaluation method for electron beam of field emission electron source |
| CN110780145A (en) * | 2019-12-10 | 2020-02-11 | 山东蓝孚高能物理技术股份有限公司 | Emission testing device of direct-current high-voltage type accelerator electron gun |
Non-Patent Citations (2)
| Title |
|---|
| 刘波, 顾孟平, 池云龙, 杨兴旺, 田双敏: "BEPC实验电子枪***的研究", 高能物理与核物理, no. 05, 21 May 2005 (2005-05-21) * |
| 邓晨晖;王岩;刘俊标;韩立;: "荷电控制电子枪特性的测量", 真空科学与技术学报, no. 09, 15 September 2020 (2020-09-15) * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106814319B (en) | lithium ion battery self-discharge detection system | |
| CN108490325B (en) | Two-section type transformer substation partial discharge signal positioning method and system | |
| CN104266960B (en) | Scan-type microwave reflection carrier recombination lifetime test system and method for testing | |
| Zhu-Mao et al. | Research on thermal fault detection technology of power equipment based on infrared image analysis | |
| CN108732524B (en) | Automatic calibration circuit and system for formation and grading test power supply | |
| CN204228901U (en) | Local discharge detection device | |
| CN104297664A (en) | Mainboard time sequence measuring device and method | |
| CN114136535A (en) | Automatic testing system and testing method for cathode of electron gun | |
| CN111797545B (en) | Wind turbine generator yaw reduction coefficient calculation method based on measured data | |
| CN111678991B (en) | Method for nondestructive testing damage identification of concrete structure | |
| CN112710216A (en) | Measuring device and method for measuring coaxiality of marine diesel engine body hole system by adopting position sensitive sensor | |
| CN110206438A (en) | A kind of anti-pinching car window caliberating device | |
| CN109975722A (en) | A kind of detection method of radio-frequency power supply | |
| CN109708826A (en) | A kind of differential pressure type detection system and method | |
| CN115115192A (en) | Method for detecting welding quality in manual welding process | |
| CN213023588U (en) | Current fault diagnosis device and system for ionization chamber type detector | |
| JP6425824B2 (en) | In-core nuclear instrumentation | |
| CN102072990A (en) | Ageing detection device for laser | |
| CN206058911U (en) | Neutron flux monitoring instrument | |
| CN116359817A (en) | Test system and test method for performance parameters of current sensor | |
| CN212965441U (en) | Sampling type liquid effluent monitor representative point method calibrating device | |
| CN220542262U (en) | Infrared temperature control system of disk body | |
| CN204154617U (en) | Scan-type microwave reflection carrier recombination lifetime test macro | |
| CN108593694A (en) | The x-ray fluorescence online test method of increasing material manufacturing | |
| CN114646640B (en) | Early creep detection method for power station structure based on laser thermal imaging |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |