CN114101475B - Ultrasonic imprinting forming method and forming equipment for high-temperature and high-Jiang Fei crystal alloy micro-die - Google Patents

Ultrasonic imprinting forming method and forming equipment for high-temperature and high-Jiang Fei crystal alloy micro-die Download PDF

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CN114101475B
CN114101475B CN202111189159.9A CN202111189159A CN114101475B CN 114101475 B CN114101475 B CN 114101475B CN 202111189159 A CN202111189159 A CN 202111189159A CN 114101475 B CN114101475 B CN 114101475B
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amorphous alloy
ultrasonic
die
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CN114101475A (en
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沈军
马将
孙飞
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Shenzhen University
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Shenzhen University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21DWORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D35/00Combined processes according to or processes combined with methods covered by groups B21D1/00 - B21D31/00
    • B21D35/002Processes combined with methods covered by groups B21D1/00 - B21D31/00
    • B21D35/008Processes combined with methods covered by groups B21D1/00 - B21D31/00 involving vibration, e.g. ultrasonic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21DWORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00Tools as parts of machines covered by this subclass
    • B21D37/01Selection of materials
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C45/00Amorphous alloys
    • C22C45/04Amorphous alloys with nickel or cobalt as the major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C45/00Amorphous alloys
    • C22C45/10Amorphous alloys with molybdenum, tungsten, niobium, tantalum, titanium, or zirconium or Hf as the major constituent

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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
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  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The invention is suitable for the technical field of amorphous alloy micro-die production, and discloses an ultrasonic imprinting forming method and forming equipment of a high-temperature high-strength amorphous alloy micro-die. The ultrasonic stamping forming method comprises the following steps: preparing an amorphous alloy blank and a positioning seat provided with a female die; arranging the amorphous alloy blank and one surface of the master mold with the microstructure oppositely; and (3) the amorphous alloy blank and the microstructure of the master die generate interaction force through an ultrasonic punch to finish stamping forming. The forming equipment comprises a positioning seat capable of installing a female die, wherein the female die is provided with a microstructure surface capable of being opposite to the amorphous alloy blank; the ultrasonic stamping equipment also comprises an ultrasonic punch which enables the amorphous alloy blank and the microstructure of the master die to generate interaction force to finish stamping forming. The ultrasonic imprinting molding method and the molding equipment for the high-temperature high-strength amorphous alloy micro-mold provided by the invention have the advantages that the material performance of the prepared amorphous alloy micro-mold is good, and the manufacturing cost is low.

Description

Ultrasonic imprinting forming method and forming equipment for high-temperature and high-Jiang Fei crystal alloy micro-die
Technical Field
The invention belongs to the technical field of amorphous alloy micro-die production, and particularly relates to an ultrasonic imprinting forming method and forming equipment of a high-temperature high-strength amorphous alloy micro-die.
Background
There is a great need in the fields of aerospace, armamentarium, information communication and advanced manufacturing for optical glass elements such as aspherical lenses, microlenses and the like, and precision press molding is a leading-edge technique for manufacturing such elements. The press molding temperature of optical glass is usually 500 ℃ or higher, for example, the glass transition point of BK-7 is about 650 ℃, which requires the press mold to maintain high hardness and strength, surface finish, thermal stability, abrasion resistance and chemical stability at high temperature to cope with multiple adverse effects of complex stress, cold and hot cycles, corrosive environment and the like during high temperature service.
Typical mold materials in the prior art, such as tungsten carbide, silicon carbide, etc., require some precious metal alloy films or metal nitride films to be plated on the surfaces to prevent adhesion between the mold and the glass. However, these mold materials are typically hard and brittle materials, which are difficult to process, and the coating process makes the mold expensive to manufacture.
The amorphous alloy has the advantages of uniform structure, high strength, high hardness, abrasion resistance, small thermal expansion coefficient, atomic surface finish and the like, and is an ideal material for preparing high-precision mould pressing dies. However, the traditional amorphous alloy has low glass transition temperature, poor high-temperature strength and thermal stability, so that the service temperature is difficult to exceed 500 ℃, and the requirement of the existing optical glass compression molding temperature cannot be met.
In addition, the traditional micro-die processing means mainly comprise means such as single-point diamond turning, ultra-precise grinding and the like, but the techniques cannot be applied to the processing and forming of Ir-based high-temperature and high-Jiang Fei crystal alloy, because the ultrahigh strength and the ultrahigh hardness of the Ir amorphous alloy can cause the damage of a cutter, and in addition, the intrinsic brittleness of the amorphous alloy can cause the failure of amorphous alloy parts during processing. At present, thermoplastic forming is a better scheme for solving the micro-machining problem of an Ir-based amorphous alloy die, but too high forming temperature (the glass transition point is as high as 820 ℃) has strict requirements on the tolerance, the vacuum degree and the like of thermoplastic forming equipment, so that the processing cost is higher, and the processing process is more complicated. Meanwhile, as the amorphous alloy is a metastable state material, the amorphous alloy is at risk of performance degradation caused by crystallization or relaxation during thermoplastic molding, and the material reliability of the micro-die is poor.
Disclosure of Invention
The invention aims at solving at least one of the technical problems, and provides an ultrasonic imprinting forming method and forming equipment for a high-temperature high-strength amorphous alloy micro-die, and the produced micro-die has good material reliability and low cost.
The technical scheme of the invention is as follows: an ultrasonic imprinting forming method of a high-temperature high-strength amorphous alloy micro-die comprises the following steps:
s1: preparing an amorphous alloy blank and a positioning seat provided with a female die;
s2: arranging the amorphous alloy blank and one surface of the master mold, which has a microstructure, opposite to each other;
s3: and (3) generating interaction force between the amorphous alloy blank and the microstructure of the master die through an ultrasonic punch to finish stamping forming.
Optionally, step S1 includes the following steps:
s11: preparing a female die and a positioning seat with a guide hole, and matching the shape of the female die with the guide hole;
s12: the master mold is placed in the guide hole with the microstructure of the master mold facing upward.
Optionally, step S2 includes the following steps:
s21: and placing the amorphous alloy blank in the guide hole, and enabling the stamping forming surface of the amorphous alloy blank to be positioned on the microstructure facing the master die.
Optionally, the material of the master model is die steel, hard alloy or high-temperature alloy;
and/or the imprint molding surface of the amorphous alloy blank is polished and has a surface roughness Ra <10nm.
Optionally, in step S3, the vibration frequency of the ultrasonic punch is 20000Hz.
Optionally, the master model is made of GH4169 high-temperature nickel alloy, and the microstructure of the master model is formed by single-point diamond machining.
Optionally, the amorphous alloy blank is Ir-Ta-Ni-Se alloy system and has an atomic composition of Ir a -Ta b -Ni c -Se d Wherein Se is at least one of Ru, os, rh, pd, pt, nb, fe, co; a. b, c, d represent atomic composition percentages, wherein a is 12 to 47, b is 18 to 48, c is 15 to 38, d is 0.3 to 40, and a+b+c+d=100.
Optionally, the amorphous alloy is composed of Ir-Ni-Ta-Nb.
Optionally, the ultrasonic punch and the female die are circular in shape, and the diameter of the ultrasonic punch is equal to the diameter of the female die.
The invention also provides ultrasonic imprinting forming equipment of the amorphous alloy micro-die, which comprises a positioning seat capable of installing a female die, wherein the female die is provided with a micro-structure surface capable of being opposite to an amorphous alloy blank;
the ultrasonic stamping equipment further comprises an ultrasonic punch which enables the amorphous alloy blank and the microstructure of the master die to generate interaction force to finish stamping forming.
According to the ultrasonic stamping forming method and the ultrasonic stamping forming equipment for the high-temperature high-strength amorphous alloy micro-die, provided by the invention, the ultrasonic punch gives the amorphous alloy blank reciprocating stamping force in the stamping process, the amorphous alloy is subjected to the reciprocating stamping force and micro-vibration, the surface of the amorphous alloy is softened in the process to replicate the structure of the surface of a master die, so that stamping forming is completed, the processing process is simple, the processing cost is low, the thermoplastic forming mode and other modes are not needed, the risk that the amorphous alloy is subjected to crystallization or relaxation to reduce the performance in the thermoplastic forming process is avoided, and therefore, the amorphous alloy micro-die has good material performance and low manufacturing cost.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an ultrasonic imprinting molding device of a high-temperature high-strength amorphous alloy micro-mold provided by an embodiment of the invention;
FIG. 2 is a schematic perspective view of an amorphous alloy micro-mold manufactured by an ultrasonic imprinting molding device of a high-temperature high-strength amorphous alloy micro-mold according to an embodiment of the present invention;
fig. 3 is a schematic flow chart of an ultrasonic imprinting forming method of a high-temperature high-strength amorphous alloy micro-mold provided by the embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It should be noted that the terms "disposed" and "connected" should be construed broadly, and may be, for example, directly disposed or connected, or indirectly disposed or connected through a central element or a central structure.
In addition, in the embodiments of the present invention, terms of directions or positional relationships indicated by "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., are directions or positional relationships based on the directions or positional relationships shown in the drawings or the conventional placement state or use state, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structures, features, devices or elements to be referred to must have specific directions or positional relationships nor must be constructed and operated in specific directions, and thus should not be construed as limiting the present invention. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
The various features and embodiments described in the detailed description may be combined in any suitable manner, for example, different embodiments may be formed by different combinations of features/embodiments, where not contradictory, and various possible combinations of features/embodiments in the present invention are not described further in order to avoid unnecessary repetition.
As shown in fig. 1 to 3, the ultrasonic imprinting forming method of the high-temperature high-strength amorphous alloy micro-mold provided by the embodiment of the invention comprises the following steps:
s1: preparing an amorphous alloy blank 3 (high-temperature Jiang Feijing alloy) and a positioning seat 5 provided with a female die 2;
s2: arranging the amorphous alloy blank 3 opposite to the surface of the master mold 2 with the microstructure;
s3: and (3) performing impression molding by generating interaction force between the amorphous alloy blank 3 and the microstructure of the master model 2 through an ultrasonic punch 4 to obtain the amorphous alloy micro-die 31.
In this way, the amorphous alloy billet 3 is pressed in the direction of the microstructure of the master model 2 by the ultrasonic punch 4, and the surface of the high-temperature amorphous alloy is softened by the load force of the ultrasonic punch 4 due to the high-frequency ultrasonic vibration, so that the structure on the master model 2 is duplicated, and the amorphous alloy micro-mold 31 is obtained. In a specific application, the ultrasonic punch 4 adopts an ultrasonic vibration punching mode with reciprocating micro-vibration, and the vibration frequency can be 18000 to 22000Hz (20000 Hz in the embodiment); the ultrasonic punch 4 gives the amorphous alloy blank 3 a reciprocating punching force in the punching process, and the punching force can be adjusted between 5N and 1000N; that is, the amorphous alloy is subjected to reciprocating impact force and micro vibration, and the surface of the amorphous alloy is softened in the process to replicate the surface structure of the master mold 2, so that the imprint molding is completed, the processing process is simple, the processing cost is low, the thermoplastic molding and other modes are not needed, the risk that the amorphous alloy is subjected to crystallization or relaxation to cause performance degradation during the thermoplastic molding is avoided, and therefore, the material performance of the amorphous alloy micro mold 31 is good and the manufacturing cost is low.
Specifically, step S1 may include the following steps:
s11: preparing a master model 2 and a positioning seat 5 with a guide hole 51, and matching the shape of the master model 2 with the guide hole 51;
s12: the master mold 2 is placed in the guide hole 51 with the microstructure of the master mold 2 facing upward.
That is, the female die 2 can be placed in the guide hole 51 of the positioning seat 5, the guide hole 51 can limit the female die 2, and the depth of the guide hole 51 can be larger than the thickness of the female die 2.
Specifically, step S2 may include the following steps:
s21: the amorphous alloy blank 3 is placed in the guide hole 51, the stamping forming surface of the amorphous alloy blank 3 is arranged on the microstructure facing the master model 2, namely, the amorphous alloy blank 3 is arranged above the microstructure of the master model 2, the ultrasonic punch 4 acts on the amorphous alloy blank 3, so that the amorphous alloy blank 3 downwardly extrudes the microstructure surface of the master model 2, and then the surface, which is connected with the microstructure surface at the upper end of the master model 2, of the amorphous alloy blank 3 (namely, the stamping forming surface) is stamped and formed with a corresponding required structure, the microstructure of the master model 2 can be provided with a groove structure or a protruding structure, after the stamping forming of the master model 2 and the amorphous alloy blank 3, the stamping forming surface of the amorphous alloy blank 3 forms a corresponding protruding microstructure at the groove structure corresponding to the master model 2, and the stamping forming surface of the amorphous alloy blank 3 forms a corresponding groove microstructure at the protruding structure corresponding to the master model 2, so that the high-temperature high-strength amorphous alloy micro-die 31 which can be used for glass die stamping is obtained.
In a specific application, the bottom of the positioning seat 5 may be provided with a punching base 1, the ultrasonic punch 4 may be longitudinally arranged and located above the guide hole 51, and the ultrasonic punch 4 may move downward to extend into the guide hole 51. In an alternative embodiment, the positioning seat 5 and the ultrasonic punch 4 may be disposed horizontally opposite to each other, i.e., the ultrasonic punch 4 may be disposed laterally and moved in a horizontal direction to extend into the guide hole 51.
Alternatively, the amorphous alloy ingot 3 may be placed first, and then the master mold 2 may be placed, with the microstructure surface of the master mold 2 facing the imprint surface of the amorphous alloy ingot 3, and the ultrasonic punch 4 may be applied to the master mold 2 to imprint the amorphous alloy ingot 3.
In a specific application, the material of the master mold 2 may be mold steel, cemented carbide or superalloy.
In a specific application, the imprint-formed surface of the amorphous alloy blank 3 may be polished and have a surface roughness Ra <10nm. In this example, the imprint molding surface of the amorphous alloy material 3 was polished with at least 800 mesh, 1200 mesh, 2000 mesh sandpaper and diamond polishing paste having a particle size of 0.5 μm in this order to form an amorphous alloy material 3 (amorphous alloy base) having a surface quality Ra of less than 10nm. In a specific application, the polished surface of the amorphous alloy blank 3 is attached to the surface of the master mold 2 having the microstructure.
In this embodiment, the vibration frequency of the ultrasonic horn 4 may be 20000Hz, and of course, the vibration frequency of the ultrasonic horn 4 may be adjusted to other suitable ranges according to the actual situation.
Specifically, the material of the master mold 2 may be GH4169 high-temperature nickel alloy, and the microstructure of the master mold 2 may be formed by single-point diamond machining, however, the material of the master mold 2 may be other alloy materials, or may be formed by other machining methods, such as electric spark machining.
Specifically, the amorphous alloy ingot 3 may be Ir-Ta-Ni-Se alloy system with an atomic composition of Ir a -Ta b -Ni c -Se d Wherein Se may be at least one of Ru, os, rh, pd, pt, nb, fe and Co; a. b, c, d represent atomic composition percentages, wherein a is 12 to 47, b is 18 to 48, c is 15 to 38, d is 0.3 to 40, and a+b+c+d=100.
In this embodiment, the amorphous alloy material 3 may be Ir-Ni-Ta-Nb (Ir) a -Ta b -Ni c -Se d ) Namely, nb is selected as Se, the glass forming capacity is more than 5mm, the glass transition temperature is not less than 830 ℃, the strength is not less than 5.4GPa, and the microhardness is not less than 1000HV. Ir (Ir) a -Ta b -Ni c -Nb d Wherein a, b, c, d denotes an atomic composition percentage, wherein a is 12 to 47, b is 18 to 48, c is 15 to 38, d is 0.3 to 40, and a+b+c+d=100.
Specifically, the shapes of the ultrasonic punch 4 and the female die 2 can be round, the diameter of the ultrasonic punch 4 is equal to that of the female die 2, and the ultrasonic effect is good.
In this embodiment, the master mold 2 may be a disc with a diameter of 5mm, and the thickness may be 1-3mm (in this embodiment, the thickness of the master mold 2 is 2 mm); the diameter of the guide hole 51 may be 5.1mm and the depth may be 5mm; the diameter of the ultrasonic punch 4 may be 5mm.
In a specific application, the amorphous alloy ingot 3 is prepared by arc melting and copper die suction casting. Suction casting to obtain a bar with the diameter of phi 5mm of the amorphous alloy material, and then cutting the bar into target blanks with the thickness of 2mm by using slow wire cutting.
After the amorphous alloy blank 3 and the master mold 2 are stamped and formed, the high-temperature high-strength amorphous alloy micro-mold 31 capable of being used for glass molding is formed, the micro-mold takes Ir-based high-temperature amorphous alloy with high glass transition temperature characteristics as a matrix, and a micro-structure is quickly constructed on the surface of the micro-mold by using an ultrasonic stamping forming method aiming at the problem that the conventional method is difficult to process. As shown in fig. 3, the method comprises the following steps: step S10, fixing a female die 2 with a microstructure on the surface on a positioning seat 5 (a stamping base 1) with a guide hole 51; step S20, placing the high-temperature amorphous alloy plate and the master model 2 in the same guide hole 51 and placing the high-temperature amorphous alloy plate and the master model 2 on the master model 2; and S30, performing ultrasonic stamping forming on the assembled high-temperature amorphous alloy plate to obtain a target structure. The embossing molding of the high-temperature amorphous alloy material is cold molding under the assistance of ultrasound, so that the problem that the high-temperature high-strength amorphous alloy is difficult to process by the traditional machining method is solved, and the risk of performance loss caused by crystallization or relaxation in the thermoplastic molding process of the amorphous alloy is avoided.
The embodiment of the invention also provides ultrasonic imprinting forming equipment of the high-temperature high-strength amorphous alloy micro-die, which comprises a positioning seat 5 capable of being provided with a female die 2, wherein the female die 2 is provided with a micro-structural surface capable of being opposite to the amorphous alloy blank 3; the ultrasonic stamping equipment further comprises an ultrasonic punch 4 for enabling the amorphous alloy blank 3 and the microstructure of the master die 2 to generate interaction force to finish stamping forming. The ultrasonic imprint molding apparatus may implement the above-described ultrasonic imprint molding method. The ultrasonic imprint molding method described above may employ the ultrasonic imprint molding apparatus in the present embodiment.
Specifically, the positioning seat 5 has a guide hole 51 for accommodating the master mold 2, and the outer shape of the master mold 2 matches with the guide hole 51.
Specifically, the depth of the guide hole 51 may be greater than the thickness of the master model 2, and during the ultrasonic stamping forming process, the front end of the ultrasonic punch 4 extends into the guide hole 51 to stamp the amorphous alloy blank 3.
Specifically, the ultrasonic punch 4 is connected with or provided with an ultrasonic vibration generator with a vibration frequency of 20000Hz.
Specifically, the ultrasonic punch 4 is connected with or provided with a punching force adjusting part, so that the punching force of the ultrasonic punch 4 can be freely adjusted between 5N and 1000N.
Specifically, the amorphous alloy billet 3 seated on the master mold 2 is placed in the guide hole 51, and the diameter of the amorphous alloy billet 3 is equal to the diameter of the guide hole 51 or slightly smaller than the diameter of the guide hole 51.
Specifically, the amorphous alloy ingot 3 is placed in the same guide hole 51 as the master mold 2, and is placed on top of the master mold 2. During the assembly process, the polished surface of the amorphous alloy blank 3 is closely adhered to and aligned with the surface of the master mold 2 with the microstructure; in the present invention, the surface roughness Ra of the imprint molding surface of the amorphous alloy material 3 is <10nm, and the imprint molding surface of the amorphous alloy material 3 is polished by a 800 mesh, 1200 mesh, 2000 mesh sand paper and a diamond polishing paste with a particle size of 0.5 μm in order, so that the surface roughness Ra is <10nm.
In a specific application, the guide hole 51 may be optionally provided with a bushing, the amorphous alloy blank 3 and the master mold 2 may be disposed in the bushing, and the amorphous alloy blank 3 and the master mold 2 may be matched with the inner diameter of the bushing.
In some embodiments, the amorphous alloy ingot 3, the master mold 2 may also be positioned by a positioning jig or the like. The positioning jig may be an adjustable jig that can clamp or unclamp the amorphous alloy ingot 3, the master mold 2.
In a specific application, the guide hole 51 of the positioning seat 5 may be a through hole, the punching base 1 may be disposed below the positioning seat 5, the positioning seat 5 may be fixedly connected to the punching base 1, and the bottom of the master mold 2 may be seated on the punching base 1. The positioning seat 5 can be designed in a replaceable way so as to meet the production requirements of amorphous alloy micro-molds 31 with different sizes.
Of course, as an alternative, it is also possible to provide blind holes as guide holes 51 in the positioning socket 5 and to dispense with stamping the base 1.
According to the ultrasonic stamping forming method and the forming equipment of the high-temperature high-strength amorphous alloy micro-die, the ultrasonic punch 4 acts on the amorphous alloy blank 3, so that the amorphous alloy blank 3 is extruded towards the microstructure of the master die 2, the high-temperature high-strength amorphous alloy surface is softened under the action of the load force of high-frequency ultrasonic vibration of the ultrasonic punch 4, and therefore the structure on the master die 2 is replicated, and in specific application, the ultrasonic punch 4 adopts the stamping mode with the reciprocating micro-vibration, the ultrasonic punch 4 gives the reciprocating stamping force to the amorphous alloy blank 3 in the stamping process, and the stamping force can be freely adjusted between 5N and 1000N; that is, the amorphous alloy is subjected to reciprocating impact force and micro vibration, and the surface of the amorphous alloy is softened in the process to replicate the surface structure of the master mold 2, so that the imprint molding is completed, the processing process is simple, the processing cost is low, the thermoplastic molding and other modes are not needed, the risk that the amorphous alloy is subjected to crystallization or relaxation to cause performance degradation during the thermoplastic molding is avoided, and therefore, the material performance of the amorphous alloy micro mold 31 is good.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, or alternatives falling within the spirit and principles of the invention.

Claims (9)

1. The ultrasonic imprinting forming method of the high-temperature high-strength amorphous alloy micro-die is characterized by comprising the following steps of:
s1: preparing an amorphous alloy blank and a positioning seat provided with a master mold, wherein the amorphous alloy blank is an Ir-Ta-Ni-Se alloy system, and Se is at least one of Ru, os, rh, pd, pt, nb, fe, co; the master model is made of die steel, hard alloy or high-temperature alloy, and/or the stamping molding surface of the amorphous alloy blank is polished and has a surface roughness Ra <10 nm;
s2: arranging the amorphous alloy blank and one surface of the master mold, which has a microstructure, opposite to each other;
s3: the ultrasonic punch is connected with or provided with a punching force adjusting part, so that the punching force of the ultrasonic punch is freely adjusted between 5N and 1000N, and the ultrasonic punch gives the amorphous alloy blank reciprocating punching force, so that the amorphous alloy blank and the microstructure of the master die generate interaction force to finish stamping forming.
2. The ultrasonic imprint molding method of a high-temperature high-strength amorphous alloy micro-mold according to claim 1, wherein the step S1 comprises the steps of:
s11: preparing a female die and a positioning seat with a guide hole, and matching the shape of the female die with the guide hole;
s12: the master mold is placed in the guide hole with the microstructure of the master mold facing upward.
3. The ultrasonic imprint molding method of a high-temperature high-strength amorphous alloy micro-mold according to claim 2, wherein the step S2 comprises the steps of:
s21: and placing the amorphous alloy blank in the guide hole, and enabling the stamping forming surface of the amorphous alloy blank to be positioned on the microstructure facing the master die.
4. A method of ultrasonic imprint molding of a high-temperature high-strength amorphous alloy micro-mold according to any one of claims 1 to 3, wherein in step S3, the vibration frequency of the ultrasonic punch is 20000Hz.
5. The ultrasonic stamping forming method of the high-temperature high-strength amorphous alloy micro-die according to any one of claims 1 to 3, wherein the master die is made of GH4169 high-temperature nickel alloy, and the microstructure of the master die is formed by single-point diamond machining.
6. A method for ultrasonic imprinting forming of a high-temperature high-strength amorphous alloy micro-mold according to any one of claims 1 to 3, wherein the amorphous alloy blank has an atomic composition of Ir a -Ta b -Ni c -Se d The method comprises the steps of carrying out a first treatment on the surface of the a. b, c, d represent atomic composition percentages, wherein a is 12 to 47, b is 18 to 48, c is 15 to 38, d is 0.3 to 40, and a+b+c+d=100.
7. A method of ultrasonic imprint molding of a high-temperature high-strength amorphous alloy micro-mold according to any one of claims 1 to 3, wherein the amorphous alloy is composed of Ir-Ni-Ta-Nb.
8. A method of ultrasonic imprint molding of a high-temperature high-strength amorphous alloy micro-mold according to any one of claims 1 to 3, wherein the outer shapes of the ultrasonic punch and the master mold are circular, and the diameter of the ultrasonic punch is equal to the diameter of the master mold.
9. An ultrasonic stamping forming device of a high-temperature high-strength amorphous alloy micro-die, which adopts the ultrasonic stamping forming method of the high-temperature high-Jiang Fei crystal alloy micro-die according to any one of claims 1 to 8, and is characterized by comprising a positioning seat capable of being provided with a female die, wherein the female die is provided with a micro-structure surface capable of being opposite to an amorphous alloy blank;
the ultrasonic stamping forming equipment further comprises an ultrasonic punch which enables the amorphous alloy blank and the microstructure of the master die to generate interaction force to finish stamping forming.
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