CN114053796A - Main frame of storage device - Google Patents

Main frame of storage device Download PDF

Info

Publication number
CN114053796A
CN114053796A CN202110867138.1A CN202110867138A CN114053796A CN 114053796 A CN114053796 A CN 114053796A CN 202110867138 A CN202110867138 A CN 202110867138A CN 114053796 A CN114053796 A CN 114053796A
Authority
CN
China
Prior art keywords
wheel
main frame
dust
exhausting
collecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110867138.1A
Other languages
Chinese (zh)
Inventor
秦光杓
朴生万
朴玄友
闵官弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rorze Systems Corp
Original Assignee
Rorze Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Systems Corp filed Critical Rorze Systems Corp
Publication of CN114053796A publication Critical patent/CN114053796A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
    • B01D46/0041—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding
    • B01D46/0045—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding by using vanes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B08B5/043—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G69/00—Auxiliary measures taken, or devices used, in connection with loading or unloading
    • B65G69/18—Preventing escape of dust
    • B65G69/185—Preventing escape of dust by means of non-sealed systems
    • B65G69/186—Preventing escape of dust by means of non-sealed systems with aspiration means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

The invention provides a main frame of a storage device, the main frame for transferring a card box stored in the storage device comprises wheels running along a transfer track; and a wheel cover including a body part covering the outer surface of the wheel and a dust collecting and exhausting part collecting the contaminants flowing into the body part and exhausting the purified air to the outside. Therefore, in the process of the main frame running, polluted air containing particles generated by the friction between the wheels and the moving track and pollutants such as fine dust and the like laminated on the moving track flows into the wheel cover, and the inflowing polluted air can be discharged into the storage device after being subjected to dust collection and air exhaust by the dust collection and filtration. Therefore, the defects of the substrate caused by the pollutants such as fine dust and particles accumulated on the surface of the substrate stored or transferred in the storage device can be eliminated.

Description

Main frame of storage device
Technical Field
The present invention relates to a main frame that travels inside a depository that deposits cartridges, and more particularly to a main frame for removing contaminants such as fine dust or particles.
Background
In general, a process of manufacturing a display device such as a liquid crystal display device and an organic light emitting display device includes a manufacturing process of repeating a deposition (deposition) process, a photolithography (photo lithography) process, and an etching (etching) process of forming a thin film of a predetermined substance on a transparent glass substrate a plurality of times, and in addition, may include various different processes such as cleaning, bonding, and cutting.
The manufacturing process of the display device including such many unit processes is performed in a clean room, and a plurality of substrates, which have been processed by a specific process facility in the clean room, are loaded into a cassette (cassette), and then stored in the clean room or transferred to another process facility by an automatic transfer system.
Among them, the automatic transfer system organically connects the storage and transfer of substrates between processes in a clean room to improve the productivity of the entire manufacturing system, and a typical example is a Stocker (Stocker).
The substrate, which has been processed or loaded with the cassette in other engineering equipment, is temporarily stored in the stocker. The stocker includes a main frame (rack master) moving inside the stocker to store and transfer the cartridges, and a rail (rail) provided on a bottom surface of the stocker to seat and move a traveling wheel of the main frame.
Although the inside of such a stocker must be kept clean so that the substrates housed in the cartridges are not contaminated by particles such as fine dust or particles, fine dust or particles are generated inside the stocker due to the travel of the main frame. The fine dust or particles thus generated may be scattered inside the storage, resulting in a problem of contaminating the substrate inside the storage.
Disclosure of Invention
Technical problem
An object of the present invention is to provide a main frame of a storage for removing contaminants including fine dust and particles, etc. generated during the driving of the main frame.
Technical scheme
In order to achieve the above object, a main frame for transferring a cartridge received in a stocker according to an embodiment of the present invention may include wheels traveling along a transfer rail, and a wheel housing including a body portion covering an outer surface of the wheels and a dust collecting and exhausting portion collecting contaminants flowing into the body portion and exhausting purified air to the outside.
According to one embodiment, the dust collection and exhaust part may include an exhaust fan disposed adjacent to the suction port communicating with the inside of the body part, and a dust collection filter disposed between the exhaust fan and an exhaust port to the outside.
According to one embodiment, the body part includes a curved surface part covering a curved surface of the wheel contacting the transfer rail, and a side surface part covering a circular side surface of the wheel connected to the curved surface, and the first opening part is formed at a portion adjacent to the transfer rail, and the second opening part communicating with the dust collection/exhaust part may be formed.
According to one embodiment, the dust collecting and exhausting part may be disposed at a portion of the curved part.
According to one embodiment, the dust collecting and exhausting part may be disposed at a part of the side surface part.
According to one embodiment, the dust collecting and exhausting part may be disposed at least a part of the curved part and the side part.
Technical effects
According to the main frame of the storage according to the embodiment of the present invention, the contaminated air including particles generated by friction between the wheels and the moving rail during the travel of the main frame and contaminants such as fine dust deposited on the moving rail flows into the wheel housing, and the air flowing in is collected and filtered by the dust and air collecting and discharging unit so that the purified air can be discharged into the storage.
Therefore, it is possible to remove the defects of the substrate caused by the deposition of contaminants such as fine dust and particles on the surface of the substrate stored or transferred in the storage.
Drawings
FIG. 1 is a schematic conceptual diagram of a depository used to illustrate one embodiment of the present invention;
fig. 2 is a perspective view of a traveling wheel unit for explaining an embodiment of the present invention;
FIG. 3 is a perspective view of a wheel cover for illustrating one embodiment of the present invention;
FIG. 4 is a perspective view for explaining a dust collecting and exhausting part included in a wheel cover according to an embodiment of the present invention;
fig. 5 is a conceptual diagram for explaining the operation of the wheel cover according to the embodiment of the present invention.
Description of reference numerals:
100: the storage device 500: main frame
600: traveling wheel portion 710: wheel
730: the wheel motor 800: wheel cover
810: body portion 850: dust collecting and exhausting part
811: curved surface portion 812: side surface part
813: first opening 814: a second opening part
851: an exhaust hood 852: suction inlet
853: exhaust fan 854: dust collecting filter
855: exhaust port
Detailed Description
Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings.
Fig. 1 is a schematic conceptual diagram of a depository for explaining one embodiment of the present invention.
Referring to fig. 1, the Stocker (Stocker)100 may include a plurality of shelves 300, a transfer rail 400, and a main frame (Rack Master) 500.
The shelves 300 are disposed at both sides of the storage 100, and can receive the cartridges 30, and the cartridges 30 receive substrates therein.
The transfer rail 400 may be provided at a bottom surface to cross between the plurality of shelves 300 disposed at both sides of the stocker 100. The transfer rail 400 may serve as a moving mechanism of the main frame 500.
The main frame 500 may include a body 510, a robot arm 530, and a travel wheel portion 600. The robot arm 530 is mounted to the body 510, and can load the plurality of cartridges 30 onto the plurality of shelves 300 or unload the plurality of cartridges 30 received in the plurality of shelves 300. The traveling wheel unit 600 is mounted on a lower portion of the body 510 and travels along the transfer rail 400. Thereby, the main frame 500 can be moved inside the stocker 100 along the transfer rail 400 by the driving of the traveling wheel 600.
The travel Wheel unit 600 may include wheels (wheels), a Wheel motor for driving the wheels, and a Wheel cover for covering the outer circumferential surfaces of the wheels. The wheel cover may include a body part covering an outer surface of the wheel, and a dust collecting and exhausting part collecting dust flowing into the body part and exhausting purified air to the outside. The wheel cover can remove contaminants generated at the traveling wheel part 600 in the traveling process of the main frame 500 in time through the dust and air collecting and discharging part.
Therefore, it is possible to prevent the contamination from being accumulated in the storage 100, thereby preventing the substrate from being damaged due to the contamination accumulated on the surface of the substrate stored or moved.
Fig. 2 is a perspective view of a travel wheel unit for explaining an embodiment of the present invention.
Referring to fig. 2, the travel wheel portion 600 may include a wheel 710, a wheel motor 730, and a wheel housing 800.
The wheel 710 may have a cylindrical shape including a curved surface 711 and a first circular side 712 contacting the curved surface 711 and a second circular side 713 opposite to the first circular side 712. The curved surface 711 of the wheel 710 rotates while contacting a transfer rail provided on the bottom surface of the stocker.
The wheel motor 730 drives the wheel 710 and may be located on the first circular side 712.
The wheel cover 800 covers the wheel 710.
According to one embodiment, it is possible to suck polluted air including fine dust and particles generated during the travel of the wheels 710, collect the pollutants, and discharge the purified air to the outside.
The wheel cover 800 includes a body 810 and a dust/air collecting/discharging unit 850.
The body 810 may include a curved surface portion 811, a side surface portion 812, a first opening portion 813, and a second opening portion 814.
The curved surface portion 811 may cover the curved surface 711 of the wheel 710.
The side surface part 812 may cover the second circular side surface 713 of the wheel 710 where the wheel motor 730 is not provided.
The first opening 813 may expose a portion of the wheel 710 attached to the transfer rail. The first opening 813 allows contaminated air including fine dust and particles generated during the travel of the wheel 710 to flow into the wheel cover 800.
The second opening 814 may be formed in the body 810 of the wheel guard 800 so as to communicate with the interior of the dust/exhaust part 850. The second opening 814 may be formed in at least one of the curved surface 811 and the side surface 812 according to the position of the dust/air collecting/discharging part 850.
The dust and air collecting and exhausting part 850 can suck in the polluted air flowing into the wheel house 800 through the second opening 814, collect the pollutants such as fine dust and particles in the polluted air, and exhaust the purified air to the outside.
According to the embodiment, as the main frame travels, in the traveling of the traveling wheel part, contaminated air including particles generated by friction between the wheels 710 and the transfer rail and contaminants such as fine dust deposited on the transfer rail flows into the wheel housing 800 through the first opening 813 of the wheel housing 800, the flowed contaminated air flows into the wheel housing 800 through the second opening 814, and the contaminants are collected and filtered by the dust and gas collecting and discharging part 850, and the purified air can be discharged to the outside.
According to one embodiment, the exhaust fan of the dust collection and exhaust unit 850 prevents the contaminated air inside the wheel cover 800 from scattering to the outside, and the dust collection filter of the dust collection and exhaust unit 850 filters the contaminants to discharge the purified air to the outside.
Therefore, the defects of the substrate caused by the accumulation of pollutants such as fine dust and particles on the surface of the substrate stored in the storage or moved can be eliminated.
Fig. 3 is a perspective view of a wheel cover for explaining an embodiment of the present invention. Fig. 4 is a perspective view for explaining a dust collecting and exhausting part included in the wheel cover according to the embodiment of the present invention.
Referring to fig. 3 and 4, the wheel cover 800 may include a curved surface portion 811, a side surface portion 812, a first opening portion 813, a second opening portion 814, and a dust/exhaust portion 850.
As shown, the dust/air collecting/discharging part 850 may be disposed at a first portion of the curved part 811 of the wheel cover 800. The position of the dust collection/exhaust unit 850 is not limited to this, and may be disposed at various positions of the wheel cover 800. For example, the dust/air collecting/discharging part 850 may be disposed at a second portion other than the first portion of the curved part 811. Alternatively, the dust collection/exhaust unit 850 may be disposed on a side surface of the wheel cover 800.
The dust collecting/discharging unit 850 may be disposed at various positions. For example, the dust/air collecting/discharging unit 850 may be disposed on at least a part of the curved surface portion 811 and the side surface portion 812 of the wheel cover 800.
The dust and air collecting and exhausting unit 850 may include an exhaust hood 851, an inlet 852, an exhaust fan 853, a dust collecting filter 854, and an exhaust port 855.
The contaminated air in the wheel house 800 can be prevented from being scattered to the outside by the exhaust fan 853 of the dust and exhaust unit 850, and the purified air can be discharged to the outside by filtering the contaminants by the dust collection filter 854 of the dust and exhaust unit 850.
The exhaust hood 851 includes a receiving space for receiving the exhaust fan 853 and the dust collection filter 854.
The suction port 852 communicating with the second opening 814 of the wheel cover 800 is formed at a first side surface of the exhaust cover 851, and the exhaust port 855 communicating with the outside is formed at a second side surface opposite to the first side surface.
The contaminated air inside the wheel cover 800 may flow into the suction opening 852 through the second opening portion 814 of the wheel cover 800.
The exhaust fan 853 includes a first side portion adjacent to the suction port 852 and a second side portion adjacent to the dust collection filter 854. The exhaust fan 853 discharges the contaminated air flowing into the suction port 852 toward the dust collection filter 854. The exhaust fan 853 can prevent the contaminated air flowing into the wheel cover 800 from being scattered to the outside of the wheel cover 800.
The dust collecting filter 854 includes a first side portion adjacent to the exhaust fan 853 and a second side portion adjacent to the exhaust port 855, collects dust and filters contaminants, such as fine dust and particles, etc., in the polluted air passing through the exhaust fan 853.
The air purified by the dust collection filter 854 can be discharged to the outside through the exhaust port 855.
According to the present embodiment, the contaminated air in the wheel house 800 is discharged to the outside by the exhaust fan 853 by the driving of the exhaust fan 853, and the contaminants can be filtered by the dust collection filter 854.
According to the present embodiment, in the traveling of the main frame, contaminated air including contaminants such as fine dust and particles generated by friction between the wheels 710 and the transfer rail or deposited on the transfer rail flows into the wheel housing 800, the contaminated air flowing into the wheel housing 800 is collected and filtered by the dust and air collecting and discharging unit 850, and the purified air can be discharged to the outside.
Therefore, by purifying the air discharged into the storage, it is possible to remove the defects of the substrate caused by the accumulation of contaminants such as fine dust and particles on the surface of the substrate stored in the storage or moved.
Fig. 5 is a conceptual diagram for explaining the operation of the wheel cover according to the embodiment of the present invention.
Referring to fig. 1, 2, 3, 4 and 5, shelves 300 for storing the cartridges 30 are disposed at both sides of the depository, and a transfer rail 400 is provided at the bottom of the depository between the shelves 300 disposed at both sides. The main chassis 500 loads and unloads the cartridges 30 on and from the shelves 300 disposed at both sides in a row while moving along the transfer rail 400.
In the process of moving the main frame 500, contaminants generated by friction between the wheels 710 of the main frame 500 and the transfer rail 400 and contaminants deposited on the transfer rail 400 flow into the wheel housing 800 through the first opening 813 of the wheel housing 800.
The polluted air flowing into the wheel cover 800 flows into the dust collecting and exhausting part 850 through the second opening 814 of the body part 810 and the suction opening 852 of the dust collecting and exhausting part 850.
The exhaust fan 853 of the dust collection/exhaust unit 850 discharges the contaminated air flowing into the suction port 852 to the dust collection filter 854.
The exhaust fan 853 can prevent contaminated air generated in the wheel 710 and the transfer rail from being scattered to the outside of the wheel housing 800.
The dust collecting filter 854 collects dust and filters contaminants, such as fine dust and particles, etc., in the polluted air passing through the exhaust fan 853.
The air purified by the dust collection filter 854 can be discharged to the outside through the exhaust port 855. The suction area of the wheel housing 800 may depend on the capacity of the exhaust fan 853.
According to the present embodiment, the contaminated air in the wheel house 800 is discharged to the outside by the exhaust fan 853 by the driving of the exhaust fan 853, and the contaminants can be filtered by the dust collection filter 854.
According to the embodiments of the present invention, the contaminated air inside the wheel cover can be prevented from being scattered to the outside by the wheel cover including the dust collection and exhaust part during the traveling of the main frame.
Further, when contaminants are discharged by a Down Flow (Down Flow) Flow inside the stocker, the contaminants in a region where the contaminant floating force is strong may cause a defect of the substrate due to a pressure change of the Down Flow caused when the main frame is operated. In this respect, the dust collecting and exhausting part, which is always driven when the main frame runs, can remove the pollutants generated during running in time to prevent the pollutants from being accumulated in the storage device, thereby eliminating the substrate defects.
While the invention has been described with reference to the preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (6)

1. A main frame of a depository for transferring a cartridge received in the depository, comprising:
wheels running along the transfer rail; and
the wheel cover comprises a body part covering the outer surface of the wheel and a wheel cover of a dust collecting and exhausting part which collects pollutants flowing into the body part and exhausts the purified air to the outside.
2. The depositor main frame of claim 1,
the dust collection and exhaust part includes an exhaust fan disposed adjacent to the suction port communicating with the inside of the body part and a dust collection filter disposed between the exhaust fan and the exhaust port communicating with the outside.
3. A depositor main frame according to claim 2, characterized in that:
the body portion includes a curved surface portion covering a curved surface of the wheel in contact with the transfer rail and a side surface portion covering a circular side surface of the wheel connected to the curved surface of the wheel,
the first opening is formed at the part adjacent to the transfer track and is provided with a second opening communicated with the dust and air collecting and exhausting part.
4. A depositor main frame according to claim 3, characterized in that:
the dust collecting and exhausting part is arranged on a part of the curved surface part of the body part.
5. A depositor main frame according to claim 3, characterized in that:
the dust collecting and exhausting part is arranged on a part of the side surface part of the main body part.
6. A depositor main frame according to claim 3, characterized in that:
the dust collecting and exhausting part is arranged on at least one part of the curved surface part and the side surface part of the main body part.
CN202110867138.1A 2020-07-31 2021-07-29 Main frame of storage device Pending CN114053796A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2020-0095952 2020-07-31
KR1020200095952A KR20220015654A (en) 2020-07-31 2020-07-31 Rack master of stocker

Publications (1)

Publication Number Publication Date
CN114053796A true CN114053796A (en) 2022-02-18

Family

ID=80233452

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110867138.1A Pending CN114053796A (en) 2020-07-31 2021-07-29 Main frame of storage device

Country Status (2)

Country Link
KR (1) KR20220015654A (en)
CN (1) CN114053796A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114754447B (en) * 2022-04-22 2024-05-14 西安建筑科技大学 Multistage remote pollutant transportation system and method

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001110869A (en) * 1999-10-14 2001-04-20 Tsubakimoto Chain Co Track running truck equipped with dust-collecting mechanism
CN101074069A (en) * 2006-05-17 2007-11-21 Nec液晶技术株式会社 Substrate transportation method and apparatus
JP2009147163A (en) * 2007-12-14 2009-07-02 Hitachi Plant Technologies Ltd Carriage
CN102310992A (en) * 2010-06-23 2012-01-11 村田机械株式会社 The track mounted jumbo system
KR20120105689A (en) * 2011-03-16 2012-09-26 주식회사 신성에프에이 Stacker having dust collecting function
US20130019909A1 (en) * 2011-07-20 2013-01-24 Dms Co., Ltd. Apparatus for treating substrate
KR20130070194A (en) * 2011-12-19 2013-06-27 주식회사 신성에프에이 Wheels dust collector of overhead hoist transport
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
CN110167653A (en) * 2017-01-18 2019-08-23 曼·胡默尔有限公司 Road vehicle, surrounding air cleaning equipment and filter element with surrounding air cleaning equipment

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001110869A (en) * 1999-10-14 2001-04-20 Tsubakimoto Chain Co Track running truck equipped with dust-collecting mechanism
CN101074069A (en) * 2006-05-17 2007-11-21 Nec液晶技术株式会社 Substrate transportation method and apparatus
JP2009147163A (en) * 2007-12-14 2009-07-02 Hitachi Plant Technologies Ltd Carriage
CN102310992A (en) * 2010-06-23 2012-01-11 村田机械株式会社 The track mounted jumbo system
KR20120105689A (en) * 2011-03-16 2012-09-26 주식회사 신성에프에이 Stacker having dust collecting function
US20130019909A1 (en) * 2011-07-20 2013-01-24 Dms Co., Ltd. Apparatus for treating substrate
KR20130070194A (en) * 2011-12-19 2013-06-27 주식회사 신성에프에이 Wheels dust collector of overhead hoist transport
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
CN110167653A (en) * 2017-01-18 2019-08-23 曼·胡默尔有限公司 Road vehicle, surrounding air cleaning equipment and filter element with surrounding air cleaning equipment

Also Published As

Publication number Publication date
KR20220015654A (en) 2022-02-08

Similar Documents

Publication Publication Date Title
KR100514716B1 (en) Apparatus for cleaning air and method for the same
JPH08192361A (en) Surface polishing device
CN114053796A (en) Main frame of storage device
JP2000299265A (en) Cleaning method of microelectronic manufacturing system and microelectronic manufacturing system cleaned using the same
JP3803130B2 (en) Polishing apparatus and polishing method
JP2004116987A (en) Air cleaner and treatment device
JPH09303838A (en) Storage chamber for clean material
KR102322274B1 (en) Cartridge filter module for dust collector providing improved replacement convenience and cartridge type dust collector including the same
KR101289629B1 (en) Cassette conveyor having dust collector, and dust collecting method thereof
KR20120058703A (en) Stacker robot for transfering cassette
JP3415730B2 (en) Gaseous impurity treatment system and particle removal filter
JPH10230461A (en) Polishing device equipped with chemical filter
US5053122A (en) Oil filtration and exhaust apparatus
KR20120007415A (en) Cassette conveyor
JP3673792B2 (en) Polishing device
JP4943478B2 (en) Polishing device
JP4405965B2 (en) Polishing device
JPH1085541A (en) Gaseous impurity treating system
CN218108796U (en) Track cleaning trolley
JP3797635B2 (en) SPACE CLEANING MATERIAL AND SPACE CLEANING METHOD USING THE SAME
KR200410417Y1 (en) Transfer cassette
JP4320936B2 (en) Transport vehicle
JPH11322068A (en) Air current control device for automated guided vehicle
KR20060073181A (en) A vehicle for transfering a cassette
JPH07272992A (en) Clean space system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20220218

RJ01 Rejection of invention patent application after publication