CN113997452A - Production process of outer guide cylinder of single crystal furnace - Google Patents
Production process of outer guide cylinder of single crystal furnace Download PDFInfo
- Publication number
- CN113997452A CN113997452A CN202111296637.6A CN202111296637A CN113997452A CN 113997452 A CN113997452 A CN 113997452A CN 202111296637 A CN202111296637 A CN 202111296637A CN 113997452 A CN113997452 A CN 113997452A
- Authority
- CN
- China
- Prior art keywords
- needling
- mold
- single crystal
- foam
- workshop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000013078 crystal Substances 0.000 title claims abstract description 16
- 239000003292 glue Substances 0.000 claims abstract description 12
- 239000002023 wood Substances 0.000 claims abstract description 12
- 239000006260 foam Substances 0.000 claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 8
- 230000001680 brushing effect Effects 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 239000004744 fabric Substances 0.000 claims abstract description 8
- 239000002131 composite material Substances 0.000 claims abstract description 6
- 238000003754 machining Methods 0.000 claims abstract description 6
- 238000005498 polishing Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 238000003763 carbonization Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000005470 impregnation Methods 0.000 claims description 2
- 239000003345 natural gas Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 230000002950 deficient Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000000835 fiber Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B11/00—Making preforms
- B29B11/14—Making preforms characterised by structure or composition
- B29B11/16—Making preforms characterised by structure or composition comprising fillers or reinforcement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/68—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts by incorporating or moulding on preformed parts, e.g. inserts or layers, e.g. foam blocks
- B29C70/681—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/68—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts by incorporating or moulding on preformed parts, e.g. inserts or layers, e.g. foam blocks
- B29C70/70—Completely encapsulating inserts
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Abstract
The invention relates to the field of production of a needled carbon heat shield outer container, discloses a production process of an outer guide cylinder of a single crystal furnace, and provides the following scheme aiming at the problems of complex production process and deficient product performance of the outer guide cylinder of the single crystal furnace in the prior art, wherein the production process comprises the following steps: s1, according to the customer drawing, sending the die to a machining workshop for size processing and surface polishing, designing the processing size of the prefabricated part on the drawing, and sending the prefabricated part to the workshop; s2, designing a corresponding mold by a workshop according to a drawing of the prefabricated part; s3, adopting a direct glue brushing mode, directly pasting the foam to the mold after the all-purpose glue on the foam and the wood pattern is completely dried after glue brushing is finished, and then installing the mold with the foam pasted to the needling equipment. The invention adopts the wood mould as the mould, has convenient disassembly and assembly, simple operation and fast needling progress speed of the outer draft tube, and increases the production efficiency by adopting composite cloth needling.
Description
Technical Field
The invention relates to the field of production of a needled carbon heat shield outer container, in particular to a production process of an outer guide cylinder of a single crystal furnace.
Background
In recent two years, with the continuous increase of the size of the thermal field of the single crystal furnace, the guide cylinder is used as an important part of the single crystal furnace, plays an important role in the production of the single crystal silicon, and has great influence on the crystal growth. The guide cylinder can reduce the flowing vortex cells of argon gas at the upper part of the furnace body, thereby reducing the deposition of the oxidation hanging on the upper part of the single crystal furnace and ensuring that the drawn single crystal silicon rod has high quality.
Because the outer draft tube has different purposes with the crucible, the pot support and the heat-insulating barrel, the technical problem to be solved in the production process is how to improve the performance of the product while saving materials in the process of producing the outer draft tube of the single crystal furnace at present.
Disclosure of Invention
The invention provides a production process of an outer guide cylinder of a single crystal furnace, which solves the problems of complex production process and insufficient product performance of the outer guide cylinder of the single crystal furnace in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a production process of an outer guide cylinder of a single crystal furnace comprises the following steps:
s1, according to the customer drawing, sending the die to a machining workshop for size processing and surface polishing, designing the processing size of the prefabricated part on the drawing, and sending the prefabricated part to the workshop;
s2, designing a corresponding mold by a workshop according to a drawing of the prefabricated part;
s3, adopting a direct glue brushing mode, directly sticking the foam to the mold after the all-purpose glue on the foam and the wood pattern is completely dried after glue brushing is finished, and then installing the mold with the foam stuck on a needling device;
s4, preparing a net tire with the gram weight required by the draft tube;
s5, carrying out flat needling on the prepared net tire and the prepared carbon cloth to obtain composite cloth;
s6, sleeving the mould with the flange on the equipment shaft;
s7, using 4 rows of needle plates according to the process requirements, fixing the needle plates with the length of 130cm by using G-shaped clamps, and keeping the needle plates on another straight line;
s8, layering and needling: 1-10 layers of the layers are arranged according to the process requirement, and the needling depth of the layers is 12-14mm
The 10 th layer has 13-15mm of layering needling depth according to the process requirements;
s9, processing to the size of a finished product, and then demoulding and baking;
and S10, after baking, carrying out natural gas deposition, resin impregnation, carbonization, machining, high temperature, hole sealing and other processes to obtain the guide shell required by the drawing size of a customer.
Preferably, the mold in the step S2 is made of a wood material.
In the invention:
1. the carbon/carbon composite material is formed by densifying, carbonizing and graphitizing a mesh tire, a mesh tire and carbon cloth which are made of carbon fibers, and has the excellent performances of high specific strength, high specific modulus, high temperature resistance, ablation resistance, small thermal expansion coefficient, rapid cooling and heating resistance, no deformation, no cracking and the like;
2. the wood mold is adopted as the mold, so that the disassembly and the assembly are convenient, the operation is simple, and the needling progress speed of the outer draft tube is high;
3. and the production efficiency is increased by adopting composite cloth needling.
Drawings
FIG. 1 is a diagram of a desired wood pattern design of the present invention;
FIG. 2 is a flow chart of the needling process and a brief description of the film.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1:
referring to fig. 1-2, a production process of an outer draft tube of a single crystal furnace comprises the steps of firstly designing a wood pattern required by the draft tube, issuing a wood pattern drawing to a machining workshop, carrying out size processing and surface polishing, and then carrying out the following steps
Step one, conveying the processed mould to a mould workshop for film pasting, adopting a direct glue brushing mode, and after the universal glue on the foam and the wood mould is completely dried after the glue brushing is finished, enabling the bonding gap at each position of the foam to be less than 3 mm;
step two, preparing a net tire, namely cutting fibers into 7-8cm short fibers, processing the short fibers by a net tire machine to obtain the net tire with gram weight required by the process, and performing flat needling to obtain the composite cloth required by the process;
sleeving the mould with the flange on an equipment shaft, lifting an inclined screw to form 0 degree with a table top, manually rotating the mould, fixing top screws on two sides of the flange after confirming that the port of the shaft is completely contacted with the bottom of the mould, and then checking a machine to keep a needle plate and a straight section of a wood mould horizontal;
step four, using 4 rows of needle plates according to the process requirements, fixing the needle plates with the length of 130cm by using G-shaped clamps, and keeping the needle plates on another straight line;
fifthly, puncturing frequency/frequency conversion: the frequency conversion/puncture frequency at A (frequency conversion: 0.35 plus or minus 0.02 puncture frequency: 32), the frequency conversion/puncture frequency at B (frequency conversion: 0.38 plus or minus 0.05 puncture frequency: 35), and the frequency conversion/puncture frequency at C/D (frequency conversion: 0.40 plus or minus 0.05 puncture frequency: 35);
sixthly, processing the product to the size of a finished product, demoulding, and then sending the product into an oven for baking and shaping for 4 hours;
step seven, putting the shaped preform into a deposition furnace for deposition for 300 hours at 1200 ℃, and introducing a proper amount of carbon source gas and carrier gas;
step eight: cleaning surface residues after deposition is finished, and putting the guide shell into resin for soaking for 24 hours according to the density condition;
step nine: standing and drying the dipped guide cylinder, and then putting the guide cylinder into a high-pressure curing tank for curing for 48 hours;
step ten: putting the cured guide shell into a carbonization furnace, carbonizing at 900 ℃ for 50h, and decomposing the resin at high temperature into pyrolytic carbon;
step eleven: and processing the carbonized guide shell into a corresponding shape according to a drawing required by a customer to achieve the required functional appearance.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (2)
1. The production process of the outer guide cylinder of the single crystal furnace is characterized by comprising the following steps of:
s1, according to the customer drawing, sending the die to a machining workshop for size processing and surface polishing, designing the processing size of the prefabricated part on the drawing, and sending the prefabricated part to the workshop;
s2, designing a corresponding mold by a workshop according to a drawing of the prefabricated part;
s3, adopting a direct glue brushing mode, directly sticking the foam to the mold after the all-purpose glue on the foam and the wood pattern is completely dried after glue brushing is finished, and then installing the mold with the foam stuck on a needling device;
s4, preparing a net tire with the gram weight required by the draft tube;
s5, carrying out flat needling on the prepared net tire and the prepared carbon cloth to obtain composite cloth;
s6, sleeving the mould with the flange on the equipment shaft;
s7, using 4 rows of needle plates according to the process requirements, fixing the needle plates with the length of 130cm by using G-shaped clamps, and keeping the needle plates on another straight line;
s8, layering and needling: 1-10 layers of the layers are arranged according to the process requirement, and the needling depth of the layers is 12-14mm
The 10 th layer has 13-15mm of layering needling depth according to the process requirements;
s9, processing to the size of a finished product, and then demoulding and baking;
and S10, after baking, carrying out natural gas deposition, resin impregnation, carbonization, machining, high temperature, hole sealing and other processes to obtain the guide shell required by the drawing size of a customer.
2. The process for producing the outer guide shell of the single crystal furnace according to claim 1, wherein the mold in the step S2 is made of a wood material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111296637.6A CN113997452A (en) | 2021-11-04 | 2021-11-04 | Production process of outer guide cylinder of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111296637.6A CN113997452A (en) | 2021-11-04 | 2021-11-04 | Production process of outer guide cylinder of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113997452A true CN113997452A (en) | 2022-02-01 |
Family
ID=79927113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111296637.6A Pending CN113997452A (en) | 2021-11-04 | 2021-11-04 | Production process of outer guide cylinder of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113997452A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1907915A (en) * | 2006-07-20 | 2007-02-07 | 西安超码科技有限公司 | Method for manufacture thermal field charcoal/charcoal draft tube for single crystal silicon pulling furnace |
| CN111848203A (en) * | 2020-07-29 | 2020-10-30 | 上海大学绍兴研究院 | Method and die for net size forming of carbon fiber needling preform |
| CN112553779A (en) * | 2020-12-20 | 2021-03-26 | 西安美兰德新材料有限责任公司 | Production process of needled carbon crucible support |
-
2021
- 2021-11-04 CN CN202111296637.6A patent/CN113997452A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1907915A (en) * | 2006-07-20 | 2007-02-07 | 西安超码科技有限公司 | Method for manufacture thermal field charcoal/charcoal draft tube for single crystal silicon pulling furnace |
| CN111848203A (en) * | 2020-07-29 | 2020-10-30 | 上海大学绍兴研究院 | Method and die for net size forming of carbon fiber needling preform |
| CN112553779A (en) * | 2020-12-20 | 2021-03-26 | 西安美兰德新材料有限责任公司 | Production process of needled carbon crucible support |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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Application publication date: 20220201 |