CN113993263A - Atmospheric pressure plasma generator, preparation method and plasma generating device - Google Patents
Atmospheric pressure plasma generator, preparation method and plasma generating device Download PDFInfo
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- CN113993263A CN113993263A CN202111358288.6A CN202111358288A CN113993263A CN 113993263 A CN113993263 A CN 113993263A CN 202111358288 A CN202111358288 A CN 202111358288A CN 113993263 A CN113993263 A CN 113993263A
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- porous medium
- atmospheric pressure
- molten metal
- wire electrode
- plasma
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- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 53
- 239000002184 metal Substances 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 230000005284 excitation Effects 0.000 abstract description 4
- 238000002679 ablation Methods 0.000 abstract description 3
- 238000004093 laser heating Methods 0.000 abstract description 3
- 210000002381 plasma Anatomy 0.000 description 61
- 239000003570 air Substances 0.000 description 16
- 239000011521 glass Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000012080 ambient air Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Abstract
The invention discloses an atmospheric pressure plasma generator, a preparation method and a plasma generating device, wherein the atmospheric pressure plasma generator is provided with a tubular porous medium tube micro-needle, the porous medium tube micro-needle comprises a metal wire electrode channel arranged at an axis position and a plurality of micro-needle air inlet channels which are uniformly distributed by taking the axis as the center circumference, and a molten metal pole-thin wire electrode is embedded in the metal wire electrode channel; after molten metal is injected into the porous medium tube, the atmospheric pressure plasma generator is prepared by a laser heating and drawing method, and the method has the advantages of simple preparation method, low plasma excitation voltage and the like; and the molten metal pole-thin wire electrode in the plasma generator is separated from the working gas, thereby avoiding the influence of the electrode on the working gas and simultaneously avoiding the bombardment and ablation of the plasma on the electrode, greatly improving the discharge stability of the plasma and prolonging the service life of the electrode.
Description
Technical Field
The invention relates to the technical field of low-temperature plasmas, in particular to an atmospheric pressure plasma generator, a preparation method and a plasma generating device.
Background
The atmospheric low-temperature plasma is an atmospheric low-temperature plasma which has high electron energy and low ion energy and is at a temperature of between room temperature and several hundred degrees centigrade. The nano-composite material has the advantages of low temperature, multiple types of active particles, large quantity, strong activity, no need of a complex vacuum system and the like, and has wide application prospect in the fields of material surface processing and biomedicine. By controlling the diameter of the atmospheric pressure low-temperature plasma beam spot, atmospheric pressure extremely fine plasma with the diameter of dozens of micrometers or even nanometer magnitude can be obtained, so that the limitation on a mask can be eliminated during the patterning processing of the surface of a material, and the direct-writing micro-nano processing can be realized. In addition, in some special applications of the atmospheric pressure low temperature plasma, such as single quantum dot modification, single cell targeting treatment, etc., the atmospheric pressure ultra-fine plasma with the beam spot diameter in the micrometer or even nanometer scale is also required. However, the preparation of an atmospheric pressure plasma generator with stable discharge is a big problem in the field of atmospheric pressure low-temperature plasma at present.
The existing method mainly comprises the steps of heating and drawing a glass tube to obtain a capillary glass tube with the diameter of a few micrometers, and inserting a metal wire electrode and introducing working gas to generate atmospheric pressure superfine plasma. However, this method is unstable in discharge and high in excitation voltage, and is liable to puncture or ablate the tip of the capillary glass tube. The metal wire electrode is directly inserted into the air inlet channel, and can also influence working airflow, so that the discharge stability of the plasma is greatly influenced. In addition, it is difficult to ensure that the wire electrode is at the centerline of the capillary glass tube, and the direct exposure of the wire electrode to the plasma discharge region also has an effect on the wire electrode life. In addition to the method of drawing a glass tube by heating, the silicon wafer-based deep silicon etching method is also a common method for generating the ultra-fine plasma at atmospheric pressure. After the required micropores are etched on the silicon chip by a deep silicon etching process, the silicon chip is connected with the glass tube by glue, so that plasma generated in the glass tube can be sprayed out through the micropores on the silicon chip to generate atmospheric pressure ultrafine plasma. However, this method requires expensive processing equipment, and has a long processing period and high cost. In addition, the bonding position of the silicon chip and the glass tube is difficult to process, and the plasma ejection and stability are greatly influenced.
In view of the above-mentioned drawbacks, the inventors of the present invention have finally obtained the present invention through a long period of research and practice.
Disclosure of Invention
In order to solve the technical defects, the technical scheme adopted by the invention is to provide an atmospheric pressure plasma generator which is a tubular porous medium tube micro-needle, wherein the porous medium tube micro-needle comprises a metal wire electrode channel arranged at an axis position and a plurality of micro-needle air inlet channels uniformly distributed around the axis, and a molten metal electrode wire electrode is embedded in the metal wire electrode channel.
Preferably, a method for preparing the atmospheric pressure plasma generator includes the steps of:
s1, injecting molten metal into the central channel of the porous medium pipe and cooling;
s2, heating the middle part of the porous medium pipe through laser, and applying axial tension to two ends of the porous medium pipe;
s3, necking and breaking the porous medium tube and the molten metal from a heating position to form two sections of porous medium tube micro-needles embedded with the molten metal pole-filament electrodes; the two porous medium tube micro-needles are both the atmospheric pressure plasma generator, and the central channel in which the molten metal is arranged forms the metal wire electrode channel.
Preferably, the porous medium pipe comprises a central channel arranged at the position of an axis and a plurality of air inlet channels uniformly distributed around the axis, and the air inlet channels after necking and breaking form the microneedle air inlet channels.
Preferably, the melting point of the molten metal is lower than the melting point of the porous medium pipe.
Preferably, the molten metal is gold or silver or platinum.
Preferably, the atmospheric pressure ultrafine plasma generating device comprises the atmospheric pressure plasma generator, a power source and a gas source, wherein the power source is connected with the molten metal ultrafine wire electrode, the gas source is connected with the microneedle gas inlet channel, working gas in the gas source flows in through the microneedle gas inlet channel and forms a microabraw flow at the tip of the microneedle of the porous medium tube, and the tip of the molten metal ultrafine wire electrode generates atmospheric pressure ultrafine plasma jet.
Preferably, the number of the microneedle air inlet channels is 2, and the microneedle air inlet channels are respectively and symmetrically arranged on two sides of the metal wire electrode channel.
Compared with the prior art, the invention has the beneficial effects that: 1, after molten metal is injected into the porous medium tube, the atmospheric pressure plasma generator is prepared by a laser heating and drawing method, and the method has the advantages of simple preparation method, low plasma excitation voltage and the like; the molten metal very thin wire electrode in the plasma generator is separated from the working gas, so that the influence of the electrode on the working gas is avoided, and the bombardment and ablation of the plasma on the electrode can be avoided, so that the discharge stability of the plasma is greatly improved, and the service life of the electrode can be prolonged; 2, the microneedle gas inlet channels are uniformly distributed around the metal wire electrode channel, so that the influence of ambient air on the generated atmosphere ultrafine plasma can be reduced while working gas is provided, and the state of the micro gas flow can be adjusted by reasonably designing the number and the positions of the microneedle gas inlet channels, thereby realizing the regulation and control of the plasma characteristics.
Drawings
FIG. 1 is a schematic flow diagram of a method of making the atmospheric pressure plasma generator;
FIG. 2 is a structural view of the porous media tube;
FIG. 3 is a structural cross-sectional view of the porous medium tube;
FIG. 4 is a structural view of the porous media tube after step S1 is completed;
FIG. 5 is a structural cross-sectional view of the porous media tube after step S1 is completed;
FIG. 6 is a structural view of the atmospheric pressure plasma generator;
FIG. 7 is a sectional view of the atmospheric pressure plasma generator;
FIG. 8 is a view showing the structure of an atmospheric pressure ultrafine plasma generating apparatus.
The figures in the drawings represent:
1-a porous medium tube; 2-molten metal; 3-porous medium tube microneedle; 4-a molten metal very thin wire electrode; 5-atmospheric pressure ultrafine plasma jet; 6-micro air flow; 7-a power source; 8-gas source; 101-a central channel; 102-an intake passage; 301-wire electrode channel; 302-microneedle air inlet channels.
Detailed Description
The above and further features and advantages of the present invention are described in more detail below with reference to the accompanying drawings.
Example one
As shown in fig. 1 to 7, fig. 1 is a schematic flow chart of a method for manufacturing the atmospheric pressure plasma generator; FIG. 2 is a structural view of the porous media tube; FIG. 3 is a structural cross-sectional view of the porous medium tube; FIG. 4 is a structural view of the porous media tube after step S1 is completed; FIG. 5 is a structural cross-sectional view of the porous media tube after step S1 is completed; FIG. 6 is a structural view of the atmospheric pressure plasma generator; fig. 7 is a structural sectional view of the atmospheric pressure plasma generator.
The atmospheric pressure plasma generator is provided with a tubular porous medium tube micro needle 3, the porous medium tube micro needle 3 comprises a metal wire electrode channel 301 arranged at an axis position and a plurality of micro needle air inlet channels 302 uniformly distributed around the axis as a center, and a molten metal pole and thin wire electrode 4 is embedded in the metal wire electrode channel 301.
The preparation method of the atmospheric pressure plasma generator comprises the following steps:
s1, injecting molten metal 2 into the central channel 101 of the porous medium pipe 1 and cooling;
s2, heating the middle part of the porous medium tube 1 by laser, applying axial tension to the two ends of the porous medium tube 1, and determining laser power, heating time and tension values of the two ends of the porous medium tube 1 according to the processing requirement of the beam spot diameter of the ultra-fine plasma of atmospheric pressure;
s3, necking and snapping the porous medium tube 1 and the molten metal 2 from the center to form two sections of porous medium tube micro-needles 3 embedded with the molten metal pole-filament electrodes 4; the two porous medium tube micro-needles 3 are both the atmospheric pressure plasma generator, and the central channel 101 in which the molten metal 2 is arranged forms the metal wire electrode channel 301.
The porous medium tube 1 comprises a central channel 101 arranged at an axis position and a plurality of air inlet channels 102 uniformly distributed around the axis, and the air inlet channels 102 after necking and breaking form the microneedle air inlet channel 302.
Specifically, the melting point of the molten metal 2 is lower than the melting point of the porous medium pipe 1.
Preferably, the molten metal 2 may be gold, silver or platinum.
After molten metal is injected into the porous medium tube, the atmospheric pressure plasma generator is prepared by a laser heating and drawing method, and the method has the advantages of simple preparation method, low plasma excitation voltage and the like; and the molten metal pole-thin wire electrode in the plasma generator is separated from the working gas, thereby avoiding the influence of the electrode on the working gas and simultaneously avoiding the bombardment and ablation of the plasma on the electrode, greatly improving the discharge stability of the plasma and prolonging the service life of the electrode.
Example two
As shown in fig. 8, fig. 8 is a structural view of an atmospheric pressure ultrafine plasma generating apparatus; the atmospheric pressure ultrafine plasma generating device comprises the atmospheric pressure plasma generator, a power source 7 and a gas source 8, wherein the power source 7 is connected with the molten metal ultrafine wire electrode 4, the gas source 8 is connected with the microneedle gas inlet channel 302, working gas in the gas source 8 flows in through the microneedle gas inlet channel 302, and a microair 6 is formed at the tip of the porous medium tube microneedle 3.
Specifically, the micro-gas flow 6 can provide working gas for plasma generation and can also be used as shielding gas to protect the generated plasma from ambient air.
When the power source 7 is switched on and working gas is introduced, the atmospheric pressure ultrafine plasma jet 5 can be generated at the tip of the molten metal ultrafine wire electrode 4.
In this embodiment, the number of the microneedle air inlet channels 302 is designed to be 2, and the microneedle air inlet channels are respectively and symmetrically arranged on two sides of the wire electrode channel 301.
In other embodiments, the number and arrangement of the microneedle air inlet channels 302 can be increased or decreased to prepare different structural forms of atmospheric pressure plasma generators.
The microneedle gas inlet channels are uniformly distributed and designed around the metal wire electrode channel, so that the influence of ambient air on the generated atmosphere ultrafine plasma can be reduced while working gas is provided, and the state of the microaeration flow can be adjusted by reasonably designing the number and the positions of the microneedle gas inlet channels, thereby realizing the regulation and control of the plasma characteristics.
The invention can draw the atmospheric pressure plasma generator with different tip diameters (from several nanometers to several hundred micrometers) by adjusting laser drawing parameters such as laser power, heating time, applied tension and the like, thereby generating superfine plasmas with different beam spot diameters in an atmospheric pressure environment.
The foregoing is merely a preferred embodiment of the invention, which is intended to be illustrative and not limiting. It will be understood by those skilled in the art that various changes, modifications and equivalents may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. The atmospheric pressure plasma generator is characterized in that a tubular porous medium tube micro needle is arranged, the porous medium tube micro needle comprises a metal wire electrode channel arranged at an axis position and a plurality of micro needle air inlet channels which are uniformly distributed around the axis, and a molten metal electrode wire electrode is embedded in the metal wire electrode channel.
2. A method of making an atmospheric pressure plasma generator as defined in claim 1, comprising the steps of:
s1, injecting molten metal into the central channel of the porous medium pipe and cooling;
s2, heating the middle part of the porous medium pipe through laser, and applying axial tension to two ends of the porous medium pipe;
s3, necking and breaking the porous medium tube and the molten metal from a heating position to form two sections of porous medium tube micro-needles embedded with the molten metal pole-filament electrodes; the two porous medium tube micro-needles are both the atmospheric pressure plasma generator, and the central channel in which the molten metal is arranged forms the metal wire electrode channel.
3. The preparation method according to claim 2, wherein the porous medium tube comprises the central channel arranged at an axial position and a plurality of air inlet channels uniformly distributed around the axis, and the air inlet channels after necking and breaking form the microneedle air inlet channels.
4. The method of claim 2, wherein the molten metal has a melting point lower than the porous media tube.
5. The method of claim 2, wherein the molten metal is gold or silver or platinum.
6. An atmospheric pressure ultrafine plasma generating device, which is characterized by comprising the atmospheric pressure plasma generator, a power source and a gas source according to claim 1, wherein the power source is connected with the molten metal ultrafine wire electrode, the gas source is connected with the microneedle gas inlet channel, working gas in the gas source flows in through the microneedle gas inlet channel and forms a microabraw flow at the tip of the porous medium tube microneedle, and the tip of the molten metal ultrafine wire electrode generates an atmospheric pressure ultrafine plasma jet.
7. The atmospheric-pressure ultrafine plasma generation device according to claim 6, wherein the number of the microneedle gas inlet channels is 2, and the microneedle gas inlet channels are symmetrically arranged on two sides of the metal wire electrode channel respectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111358288.6A CN113993263B (en) | 2021-11-15 | 2021-11-15 | Atmospheric pressure plasma generator, preparation method and plasma generating device |
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| CN202111358288.6A CN113993263B (en) | 2021-11-15 | 2021-11-15 | Atmospheric pressure plasma generator, preparation method and plasma generating device |
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| CN113993263B CN113993263B (en) | 2024-03-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023179610A1 (en) * | 2022-03-22 | 2023-09-28 | 深圳市合元科技有限公司 | Aerosol generation device |
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| CN113993263B (en) | 2024-03-22 |
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