CN113865775A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN113865775A CN113865775A CN202111031234.9A CN202111031234A CN113865775A CN 113865775 A CN113865775 A CN 113865775A CN 202111031234 A CN202111031234 A CN 202111031234A CN 113865775 A CN113865775 A CN 113865775A
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- liquid outlet
- pressure sensor
- pressure
- liquid metal
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- 239000007788 liquid Substances 0.000 claims abstract description 78
- 229910001338 liquidmetal Inorganic materials 0.000 claims abstract description 56
- 238000005259 measurement Methods 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/18—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/18—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges
- G01L7/182—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges constructional details, e.g. mounting
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a pressure sensor, which comprises a resistance unit and a pressure sensing unit, wherein the resistance unit comprises a first electrode, a second electrode and a plurality of connecting positions between the first electrode and the second electrode, and a resistor is arranged between the adjacent connecting positions; the pressure sensing unit comprises a third electrode, a contact surface, a containing cavity and a liquid outlet end, liquid metal is arranged in the containing cavity, and the third electrode is connected with the liquid metal; the liquid outlet end holds the liquid metal overflowing from the cavity after the contact surface is pressed, and the liquid metal is in contact with the connecting position. According to the pressure sensor provided by the invention, the liquid metal in the cavity is extruded after the contact surface is pressed and deformed, so that the liquid metal enters the liquid outlet end, the connection positions corresponding to the liquid outlet end in a one-to-one correspondence mode are contacted with the liquid metal, a loop is formed by the first electrode or the second electrode and the third electrode, and based on the resistance value of the effective resistor connected in series with the connected connection positions, the pressure value is finally obtained according to the preset relation between the resistance or the current and the pressure.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a pressure sensor.
Background
The pressure sensor is a common sensor, and can convert pressure data to be detected, such as pressure, air pressure, hydraulic pressure and the like of an object, into an electric signal and read an electronic device of a pressure value. Common pressure sensor types employ principles of resistance, capacitance, piezoelectric, and the like. These sensors have merits, and the resistive pressure sensor has advantages of simple structure, low cost, accurate result, and so on, and thus is widely used.
Liquid metal, as a new type of metal material, has the characteristics of high conductivity, flowability, easy deformation, and self-recovery after pressure is removed, and has been noted by researchers and applied to the field of sensors. The existing technology of applying liquid metal to a sensor is to use liquid metal as an electrode material of a flexible pressure sensor and utilize pressure to cause resistance change of a composite electrode to generate electric signal change. Due to the flexible characteristic of the electrode, the pressure resistance and the service life of the electrode can be improved, but the pressure measuring range of the scheme is limited.
However, the requirement of improving the sensitivity by utilizing the compressive deformation of the liquid metal itself to perform pressure sensing to improve the testing range of the pressure sensor is an important issue to be solved in the industry at present.
Disclosure of Invention
The invention provides a pressure sensor, which is used for solving the technical blank that the pressure sensor is not used for sensing pressure by utilizing the self pressure deformation of liquid metal in the prior art so as to improve the test range of the pressure sensor and improve the sensitivity, realizing that the liquid metal in a containing cavity enters a liquid outlet end to be contacted with a connecting position after the contact surface is deformed by pressure to form a loop, and calculating the pressure according to the resistance value of an effective resistor in the loop.
The present invention provides a pressure sensor, comprising:
the resistance unit comprises a first electrode, a second electrode and a plurality of connection positions between the first electrode and the second electrode, and a resistor is arranged between the adjacent connection positions;
the pressure sensing unit comprises a third electrode, a contact surface, a containing cavity and liquid outlet ends, liquid metal is arranged in the containing cavity, the third electrode is connected with the liquid metal, the contact surface is used for bearing pressure, and the liquid outlet ends are in one-to-one correspondence with the connecting positions;
the liquid outlet end is used for accommodating the liquid metal overflowing from the accommodating cavity after the contact surface is pressed, and the liquid metal is in contact with the connecting position.
According to the pressure sensor provided by the invention, the first electrode and the third electrode are connected on a measuring circuit or the second electrode and the third electrode are connected on the measuring circuit.
According to the pressure sensor provided by the invention, the height of each liquid outlet end is equal, and the cross sectional area of each liquid outlet end is distributed in a gradient manner.
According to the pressure sensor provided by the invention, the liquid outlet ends with the cross sectional areas arranged from large to small continuously correspond to the connecting positions from the first electrode to the second electrode in sequence,
or the liquid outlet ends with the cross sectional areas arranged from large to small continuously correspond to the connecting positions from the second electrode to the first electrode in sequence.
According to the pressure sensor provided by the invention, each connecting position of the resistance unit is correspondingly provided with a conductive needle, and the conductive needles extend into the liquid outlet end, wherein the lengths of the conductive needles are the same.
According to the pressure sensor provided by the invention, each connecting position of the resistance unit is correspondingly provided with a conductive needle, the conductive needle extends into the liquid outlet end, and the lengths of the conductive needles are distributed in a gradient manner.
According to the pressure sensor provided by the invention, the height of each liquid outlet end is equal, and the cross sectional area of each liquid outlet end is equal.
According to the pressure sensor provided by the invention, the length of the conductive needle is sequentially connected with the connecting position from the first electrode to the second electrode from long to short,
or the lengths of the conductive pins are sequentially connected with the connecting positions from the second electrode to the first electrode from long to short.
According to the pressure sensor provided by the invention, the liquid metal is any one or combination of mercury, gallium-based alloy and bismuth-based alloy.
According to the pressure sensor provided by the invention, the resistances of the resistors are equal or the resistances of the resistors are changed in a gradient manner from the first electrode to the second electrode.
According to the pressure sensor provided by the invention, the liquid metal in the cavity is extruded after the contact surface is pressed and deformed, so that the liquid metal enters the liquid outlet end, the connection positions corresponding to the liquid outlet end in a one-to-one correspondence mode are contacted with the liquid metal, a loop is formed by the first electrode or the second electrode and the third electrode, and based on the resistance value of the effective resistor connected in series with the connected connection positions, the pressure value is finally obtained according to the preset relation between the resistance or the current and the pressure.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of a pressure sensor according to the present invention in a compressed state;
FIG. 2 is a schematic view of a pressure sensor according to the present invention in a pressurized state;
FIG. 3 is a schematic structural view of one of the liquid outlet end arrangements provided by the present invention;
FIG. 4 is a schematic structural view of a second arrangement of liquid outlet ends according to the present invention;
FIG. 5 is a second schematic view of a pressure sensor according to the present invention in a pressurized state;
FIG. 6 is a third schematic view of a structure of the pressure sensor according to the present invention in a pressed state;
fig. 7 is a schematic structural diagram of a pressure sensor provided by the present invention, which uses a resistance coil.
Reference numerals:
100: a resistance unit; 101: a first electrode; 102: a second electrode;
103: a connection bit; 104: a resistor; 105: a conductive pin;
200: a pressure sensing unit; 201: a third electrode; 202: a contact surface;
203: a cavity; 204: a liquid outlet end; 110: a resistance coil;
111: a spiral portion.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the embodiments of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
An embodiment of the present invention will be described below with reference to fig. 1 to 7. It is to be understood that the following description is only exemplary embodiments of the present invention and is not intended to limit the present invention.
As shown in fig. 1, the present invention provides a pressure sensor including: the pressure sensing device comprises a resistance unit 100 and a pressure sensing unit 200, wherein the resistance unit 100 comprises a first electrode 101, a second electrode 102 and a plurality of connection positions 103 between the first electrode 101 and the second electrode 102, and a resistor 104 is arranged between adjacent connection positions 103.
The pressure sensing unit 200 comprises a third electrode 201, a contact surface 202, a cavity 203 and a liquid outlet end 204, liquid metal is arranged in the cavity 203, the third electrode 201 is connected with the liquid metal, the contact surface 202 is used for bearing pressure, and the liquid outlet end 204 is in one-to-one correspondence with the connection position 103.
The liquid outlet end 204 receives the liquid metal overflowing from the cavity 203 after the contact surface 202 is pressed, and the liquid metal is in contact with the connecting position 103.
Specifically, the first electrode 101 and the second electrode 102 are the first end and the last end of the resistance unit 100, and are used for connecting with a measurement circuit. Of course, in the present embodiment, the first electrode 101 and the second electrode 102 may be made of a liquid metal material or an electrode material such as copper. The connection position 103 is used for connecting with the liquid metal overflowing from the liquid outlet end 204 of the pressure sensing unit 200, so as to form a loop. The resistor 104 is used for confirming the effective resistance value of the liquid metal corresponding to the liquid outlet end 204 after the different connecting positions 103 are connected, so that the magnitude of the pressure value can be calculated conveniently. The resistance of the resistor 104 is known.
Furthermore, the connection sites 103 and the resistors 104 are alternately distributed between the first electrode 101 and the second electrode 102, the resistors 104 may also be arranged between the first electrode 101 and the connection site 103 closest thereto and/or the resistors 104 may also be arranged between the second electrode 102 and the connection site 103 closest thereto.
Further, the pressure sensing unit 200 may be an integrated device, for example, the pressure sensing unit 200 is a box, a cavity 203 is formed in the box for accommodating liquid metal, and the bottom of the box is sealed and connected by an elastic material such as rubber or polydimethylsiloxane to form the contact surface 202. The surface opposite to the contact surface 202 is provided with a plurality of liquid outlet ends 204 corresponding to the connecting positions 103, each liquid outlet end 204 is provided with an independent cavity, the liquid outlet ends 204 can protrude from the upper end of the box body or can be sunken in the box body, and the cavities of the liquid outlet ends 204 are communicated with the accommodating cavity 203. The third electrode 201 is connected to the liquid metal in the cavity 203 and led out to the outside of the pressure sensing unit 200 to be connected to the measurement circuit, and of course, the third electrode 201 may be made of a liquid metal material or an electrode material such as copper.
When the contact surface 202 is not subjected to any pressure, the liquid metal is placed in the cavity 203 and fills the cavity 203; after the contact surface 202 is deformed by pressure, the liquid metal in the cavity 203 enters the cavity of the liquid outlet end 204 from the cavity 203, and due to the influence of the degree of deformation of the contact surface 202 by pressure, the liquid metal in one or more liquid outlet ends 204 contacts with the corresponding connecting position 103 to form a loop. Based on the resistance of the series effective resistors 104 in the circuit, the magnitude of the pressure applied to the contact surface 202 is calculated. After the pressure is released, the contact surface 202 is restored.
In an optional embodiment of the present invention, the liquid metal is any one or a combination of mercury, gallium-based alloy and bismuth-based alloy. In other words, the liquid metal is a simple metal or an alloy that is in a liquid state at normal temperature.
Further, in one embodiment of the present invention, the first electrode 101 and the third electrode 201 are connected to a measurement circuit or the second electrode 102 and the third electrode 201 are connected to a measurement circuit.
In other words, the third electrode 201 is connected in common with one of the first electrode 101 and the second electrode 102 in the measurement circuit. The measuring circuit can achieve the purpose of testing the pressure value by measuring the effective resistance or current between the third electrode 201 and the first electrode 101 or the second electrode 102 according to the relationship between the resistance and the calibration voltage or according to the relationship between the current and the calibration voltage. Embodiments of the present invention are not limited to a specific circuit configuration of the measurement circuit.
As shown in fig. 1 and fig. 2, in an alternative embodiment of the present invention, a conductive pin 105 is correspondingly disposed at each connection position 103 of the resistor unit 100, the conductive pin 105 extends into the liquid outlet end 204, wherein the lengths of the conductive pins 105 are distributed in a gradient manner.
Specifically, the gradient distribution of the conductive pins 105 includes the connection sites 103 from the first electrode 101 to the second electrode 102, and the lengths of the conductive pins 105 increase in sequence; or the connection site 103 from the first electrode 101 to the second electrode 102, the length of the conductive pin 105 decreases in sequence. The conductive pins 105 are made of a material such as copper or stainless steel that is resistant to corrosion by liquid metal. The metal can be made of liquid metal.
In addition, as shown in fig. 1 to 4, in some embodiments of the present invention, each of the liquid outlet ends 204 has the same height, and the cross-sectional area of each of the liquid outlet ends 204 is the same. In other words, each liquid outlet end 204 has the same structure. Of course, it should be understood that the resistance unit 100 is at the same height from each of the outlet ends 204. In other words, each connecting position 103 has a uniform height from the corresponding liquid outlet end 204. In this embodiment, the lengths of the conductive pins 105 between each pair of connection sites 103 and the liquid outlet end 204 are different.
In addition, in an alternative embodiment of the present invention, the lengths of the conductive pins 105 are sequentially connected from the first electrode 101 to the connection site 103 of the second electrode 102 from long to short, or the lengths of the conductive pins 105 are sequentially connected from the second electrode 102 to the connection site 103 of the first electrode 101 from long to short. In short, the connection site 103 is connected in series between the first electrode 101 and the second electrode 102, and the conductive pins 105 are connected to the connection site 103 sequentially from long to short or from short to long.
As shown in fig. 3 and 4, the trace of the resistor unit 100 is determined according to the shape of the contact surface 202 of the pressure sensing unit 200 and the distribution of the liquid outlet ends 204. For example, the contact surface 202 is rectangular, and the liquid outlet ends 204 may be arranged in a row at the upper part of the cavity 203, or for example, the contact surface 202 is circular, and the liquid outlet ends 204 may be distributed at the upper part of the cavity 203 in a plurality of concentric circles; of course, the contact surface 202 may have other shapes, and the liquid outlet end 204 may be arranged in other forms. The connection position 103, the conductive pin 105 and the liquid outlet 204 are ensured to correspond in sequence, so as to determine the routing track. Moreover, the liquid outlet ends 204, the connecting positions 103 and the conductive pins 105 are in one-to-one correspondence, and the sensitivity of the pressure sensor is higher when the quantity is larger. Moreover, whether the liquid outlet ends 204 are uniformly distributed at the upper part of the cavity 203 does not influence the use of the whole pressure sensor.
Meanwhile, in the present embodiment, the resistors 104 have the same resistance value or have a gradient change from the first electrode 101 to the second electrode 102. For example, in the example shown in fig. 2, including 5 liquid outlet ends 204 and corresponding 5 connection sites 103 and 5 conductive pins 105 with sequentially increasing lengths, there are resistors 104 disposed between adjacent connection sites 103, that is, there are 4 resistors 104, and the resistance values thereof are R1, R2, R3 and R4, respectively. Wherein, R1 ═ R2 ═ R3 ═ R4, or R1> R2> R3> R4, or R1< R2< R3< R4 may be used.
In the present embodiment, the first electrode 101 and the third electrode 201 are connected in a measurement circuit. In the state shown in fig. 1, the contact surface 202 is not pressed, and the first electrode 101 and the third electrode 201 are not connected. After the contact surface 202 is subjected to the pressure F1 as shown in fig. 2, the contact surface 202 is deformed by pressure, so that the liquid metal in the cavity 203 is pressed into the liquid outlet end 204, and the liquid metal is firstly contacted with the longest conductive pin 105 in the liquid outlet end 204. If the pressure F1 is kept constant, the first electrode 101, the 4 resistors 104 with the resistance values of R1, R2, R3 and R4, the conductive pin 105 with the first length, the liquid metal and the third electrode 201 form a loop. The effective resistance value of the access circuit is R1+ R2+ R3+ R4, and the measuring circuit finally obtains a pressure value according to the effective resistance value or current of the access circuit.
As shown in fig. 5, the pressure of the contact surface 202 is continuously increased to F2, wherein F1< F2, the degree of the compression deformation of the contact surface 202 is increased, the liquid metal entering the liquid outlet end 204 continuously rises to contact with the conductive pin 105B with the length of the last but one, the pressure is kept unchanged, and the first electrode 101, 3 resistors 104 with resistance values of R2, R3 and R4, the second long conductive pin 105 with the length of the last but one, the liquid metal and the third electrode 201 form a loop. The effective resistance value of the access circuit is R2+ R3+ R4, and the pressure value is finally obtained by the measuring circuit according to the effective resistance value or current of the access circuit. If the pressure at the contact surface 202 is increasing, the pressure values are obtained by analogy.
In summary, the resistance is used to measure the pressure value, and in this embodiment, the smaller the resistance, the larger the pressure, and the resistance is inversely proportional to the pressure. The pressure value is measured by using current, and in the embodiment, the larger the current is, the larger the pressure is, and the current is proportional to the pressure.
Similarly, if the second electrode 102 and the third electrode 201 are connected to a measuring circuit and the resistance is used to measure the pressure value, in this embodiment, the smaller the resistance is, the smaller the pressure is, and the resistance is proportional to the pressure. The pressure value is measured by using current, and in the embodiment, the larger the current, the smaller the pressure, and the current is inversely proportional to the pressure.
In another alternative embodiment of the present invention, as shown in fig. 6, the height of each outlet end 204 is equal, and the cross-sectional area of the outlet end 204 is distributed in a gradient manner.
In other words, the cross-sectional area of the outlet end 204 is distributed in a gradient including a sequence of continuously ranging from the largest to the smallest cross-sectional area or a sequence of continuously ranging from the smallest to the largest cross-sectional area. The sequence of the liquid outlet end 204 is closely related to the sequence of the connecting position 103. The specific relationship is as follows.
Specifically, in the embodiment of the present invention, the liquid outlet ends 204 with cross-sectional areas arranged continuously from large to small correspond to the connection sites 103 from the first electrode 101 to the second electrode 102 in sequence; or the liquid outlet ends 204 with the cross sectional areas arranged from large to small continuously correspond to the connecting positions 103 from the second electrode 102 to the first electrode 101 in sequence.
For example, as shown in fig. 6, the liquid outlet ends 204 are sequentially arranged at the upper portions of the cavities 203 from large to small in cross-sectional area in the column direction, the first electrodes 101 and the second electrodes 102 are also arranged in the column direction, and the connecting positions 103 sequentially correspond to the liquid outlet ends 204 with decreasing cross-sectional areas. Of course, when the liquid outlet ends 204 are arranged in other arrangement manners, the connection trend of the cross-sectional area of each liquid outlet end 204 from large to small is the layout trend of the resistance unit 100, the liquid outlet end 204 with the largest cross-sectional area corresponds to the closest connection position 103 of the first electrode 101 or the closest connection position 103 of the second electrode 102, and so on. Namely, the liquid outlet end 204 and the connecting position 103 are ensured to be sequentially and continuously corresponding.
Meanwhile, in the present embodiment, the resistors 104 have the same resistance value or have a gradient change from the first electrode 101 to the second electrode 102. For example, in the example shown in fig. 6, the liquid outlet end 204 with 5 sequentially increasing cross-sectional areas and the corresponding 5 connection positions 103 are included, and the resistors 104 are arranged between the adjacent connection positions 103, that is, the resistors 104 include 4 resistors 104, the resistance values of which are R1, R2, R3 and R4, respectively. Wherein, R1 ═ R2 ═ R3 ═ R4, or R1> R2> R3> R4, or R1< R2< R3< R4 may be used.
In the present embodiment, the first electrode 101 and the third electrode 201 are connected in a measurement circuit. After the contact surface 202 is pressed, the contact surface 202 is pressed and deformed, liquid metal in the cavity 203 is extruded into the liquid outlet ends 204, and the liquid outlet ends 204 with the smallest cross sectional areas are connected with the connecting position 103 to connect a measuring circuit, because the liquid outlet ends 204 have the same height and different cross sectional areas, the liquid level height is the highest, and the liquid outlet ends 204 with the smallest cross sectional areas are firstly connected with the connecting position 103.
For example, in fig. 6, the liquid metal is in contact with the corresponding connection point 103 in the liquid outlet end 204 with the smallest cross-sectional area, and the first electrode 101, the 4 resistors 104 with resistance values R1, R2, R3, and R4, the liquid metal, and the third electrode 201 form a loop in a state where the pressure is kept unchanged. The effective resistance value of the access circuit is R1+ R2+ R3+ R4, and the measuring circuit finally obtains a pressure value according to the effective resistance value or current of the access circuit. If the pressure is increased continuously and the liquid metal in the liquid outlet end 204 with the second smallest cross-sectional area is in contact with the corresponding connection position 103, the effective resistance value of the access circuit will be R2+ R3+ R4. And so on.
In summary, the resistance is used to measure the pressure value, and in this embodiment, the smaller the resistance, the larger the pressure, and the resistance is inversely proportional to the pressure. The pressure value is measured by using current, and in the embodiment, the larger the current is, the larger the pressure is, and the current is proportional to the pressure.
Similarly, if the second electrode 102 and the third electrode 201 are connected to a measuring circuit and the resistance is used to measure the pressure value, in this embodiment, the smaller the resistance is, the smaller the pressure is, and the resistance is proportional to the pressure. The pressure value is measured by using current, and in the embodiment, the larger the current, the smaller the pressure, and the current is inversely proportional to the pressure.
In addition, in another embodiment of the present invention, each connection position 103 of the resistance unit 100 is correspondingly provided with a conductive pin 105, and the conductive pin 105 extends into the liquid outlet end 204, wherein the lengths of the conductive pins 105 are the same. The conductive pins 105 are made of a material such as copper or stainless steel that is resistant to corrosion by liquid metal.
In an alternative embodiment of the present invention, as shown in fig. 7, the resistance unit 100 may be a resistance coil 110, and the resistance coil 110 includes a plurality of spiral parts 111, and each spiral part 111 corresponds to one connection site 103. The resistance coil 110 between the adjacent connection sites 103 corresponds to the resistor 104. The resistance coil 110 is made of nickel-chromium alloy or copper, and the resistance wire with proper resistivity is selected according to the pressure sensitivity of the pressure sensor. The resistance coil 110 has an insulating varnish on an outer surface thereof. The more the spiral part 111, the higher the sensitivity of the pressure sensor.
According to the pressure sensor provided by the invention, the liquid metal in the cavity is extruded after the contact surface is pressed and deformed, so that the liquid metal enters the liquid outlet end, the connection positions corresponding to the liquid outlet end in a one-to-one correspondence mode are contacted with the liquid metal, a loop is formed by the first electrode or the second electrode and the third electrode, and based on the resistance value of the effective resistor connected in series with the connected connection positions, the pressure value is finally obtained according to the preset relation between the resistance or the current and the pressure.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A pressure sensor, comprising:
the resistance unit comprises a first electrode, a second electrode and a plurality of connection positions between the first electrode and the second electrode, and a resistor is arranged between the adjacent connection positions;
the pressure sensing unit comprises a third electrode, a contact surface, a containing cavity and liquid outlet ends, liquid metal is arranged in the containing cavity, the third electrode is connected with the liquid metal, the contact surface is used for bearing pressure, and the liquid outlet ends are in one-to-one correspondence with the connecting positions;
the liquid outlet end is used for accommodating the liquid metal overflowing from the accommodating cavity after the contact surface is pressed, and the liquid metal is in contact with the connecting position.
2. A pressure sensor as claimed in claim 1, wherein the first and third electrodes are connected on a measurement circuit or the second and third electrodes are connected on the measurement circuit.
3. The pressure sensor of claim 1, wherein each of the outlet ends has an equal height, and the cross-sectional area of the outlet ends is distributed in a gradient manner.
4. The pressure sensor according to claim 3, wherein the liquid outlet ends whose cross-sectional areas are arranged continuously from large to small correspond to the connection positions from the first electrode to the second electrode in turn,
or the liquid outlet ends with the cross sectional areas arranged from large to small continuously correspond to the connecting positions from the second electrode to the first electrode in sequence.
5. The pressure sensor according to claim 4, wherein each of the connection positions of the resistor unit is correspondingly provided with a conductive pin, the conductive pins extend into the liquid outlet end, and the lengths of the conductive pins are the same.
6. The pressure sensor according to claim 1, wherein each of the connection positions of the resistor unit is provided with a conductive pin correspondingly, the conductive pin extends into the liquid outlet end, and the lengths of the conductive pins are distributed in a gradient manner.
7. The pressure sensor of claim 6, wherein each of the liquid outlet ends has an equal height and a cross-sectional area.
8. The pressure sensor of claim 7, wherein the conductive pins are sequentially connected from long to short in length with the connection sites from the first electrode to the second electrode,
or the lengths of the conductive pins are sequentially connected with the connecting positions from the second electrode to the first electrode from long to short.
9. The pressure sensor of claim 1, wherein the liquid metal is one or more of mercury, gallium-based alloy, and bismuth-based alloy.
10. A pressure sensor according to any of claims 1 to 9, wherein the resistors are all equal in resistance or vary in resistance in a gradient from the first electrode to the second electrode.
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| CN117988908A (en) * | 2024-04-03 | 2024-05-07 | 武汉大学 | Graded early warning anchor rod based on liquid metal and early warning method |
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| CN113865775B (en) | 2023-06-23 |
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