CN113862607A

CN113862607A - Plasma treatment device for surface of die part

Info

Publication number: CN113862607A
Application number: CN202111184020.5A
Authority: CN
Inventors: 武新江
Original assignee: Yunhao Precision Mould Hardware Shenzhen Co ltd
Current assignee: Yunhao Precision Mould Hardware Shenzhen Co ltd
Priority date: 2021-10-11
Filing date: 2021-10-11
Publication date: 2021-12-31
Anticipated expiration: 2041-10-11
Also published as: CN113862607B

Abstract

The invention provides a plasma processing device for the surface of a mold part, which comprises a vacuum chamber, wherein the lower part of the vacuum chamber is provided with a rotating platform used for placing the mold part, a plasma processor is arranged above the vacuum chamber and comprises a first inlet and a second inlet, the first inlet and the second inlet are respectively communicated with a mixing cavity, an electrode assembly is arranged at the upper part of the mixing cavity, a nozzle is arranged at the lower part of the mixing cavity, a molten alloy material is pressed into the mixing cavity through the first inlet, and forms plasma fog-shaped molten drops under the action of the electrode assembly after meeting with inert gas flowing at high speed from the second inlet, and the plasma fog-shaped molten drops are sprayed to the surface of the mold part through the nozzle to form an alloy film. The invention provides a vacuum plasma coating mode, which can carry out coating control according to different requirements of mould parts.

Description

Plasma treatment device for surface of die part

Technical Field

The invention relates to the technical field of surface treatment of die parts, in particular to a plasma treatment device for the surface of a die part.

Background

The traditional mould parts need to be coated after being produced, but because some mould parts are used in a high-temperature environment, an alloy film needs to be coated on the surface of the mould parts.

In the disclosed technology, for example, publication numbers are: in the patent document "CN 110004411A", a method for plating an alloy film is disclosed, which comprises the following steps:

step S1, deoiling and electrolytically cleaning the steel plate and then sending the steel plate into a vacuum chamber;

step S2, preheating the steel plate in the vacuum chamber and then carrying out surface ion cleaning;

and step S3, sending the cleaned steel plate into an evaporation device for bimetal mixed coating, single metal-single metal composite coating or single metal-bimetal mixed-single metal composite coating.

The bimetal mixed coating film comprises the following components: heating the metal in the two metal melting containers to a gas state, conveying metal steam to a mixed steam box through a main steam pipeline, fully mixing the metal steam in the mixed steam box, and spraying the metal steam out of an air nozzle to deposit on the surface of a steel plate to form a bimetal mixed film;

in the step S3, the single metal-single metal composite plating film is: respectively heating the metal in the two metal melting containers to a gas state, and spraying out the first metal vapor through the gas nozzles of the first vapor distribution pipeline to deposit on the surface of the steel plate; the steel plate continues to move, and the second metal vapor is sprayed out through the air nozzle of the second vapor distribution pipeline and deposited on the surface of the steel plate; forming a single metal-single metal composite film;

in the step S3, the single metal-bimetal mixed-single metal composite plating film is: heating the metal in the two metal melting containers to a gas state, and spraying out the first metal vapor through the gas nozzles of the first vapor distribution pipeline to deposit on the surface of the steel plate; the steel plate continues to move, and the mixed metal steam in the mixed steam box is sprayed out from the air nozzle and deposited on the surface of the steel plate; the steel plate continues to move, and the second metal vapor is sprayed out through the air nozzle of the second vapor distribution pipeline and deposited on the surface of the steel plate; finally forming the single metal-double metal mixed-single metal composite film.

However, the above-mentioned technical method is not the best way at present, because the low-temperature plasma has the characteristics of low temperature, high charge density and the like, it is widely applied in the field of material surface treatment at present, and because it has high energy, the low-temperature plasma can also be used as a carrier of material particles, so that the material particles have high energy, and deposition and film formation are facilitated. Therefore, vacuum plasma coating is the most ideal means at present.

Disclosure of Invention

In view of the above, the main objective of the present invention is to provide a plasma processing apparatus for the surface of a mold part.

The technical scheme adopted by the invention is as follows:

a plasma processing device for the surface of a mould part comprises a vacuum chamber,

the lower part of the vacuum chamber is provided with a rotating table used for placing the die parts,

and a plasma processor is arranged above the vacuum chamber and comprises a first inlet and a second inlet, the first inlet and the second inlet are respectively communicated with the mixing cavity, an electrode assembly is arranged at the upper part of the mixing cavity, a nozzle is arranged at the lower part of the mixing cavity, a molten alloy material is pressed into the mixing cavity through the first inlet, meets with the inert gas flowing at high speed from the second inlet to form plasma mist molten drops under the action of the electrode assembly, and the plasma mist molten drops are sprayed to the surface of the die part through the nozzle to form an alloy film.

Preferably, the alloy film is formed by controlling the ratio of the molten alloy material and the inert gas flowing into the mixing chamber by the control device based on the requirement of coating the surface of the die part, driving the droplets of the mixed inert gas to form plasma by controlling the power of the electrode assembly by the control device, atomizing the plasma, and spraying the atomized plasma onto the surface of the die part by the nozzle.

Preferably, the lower part of the vacuum chamber is provided with a separation plate which separates the lower part of the vacuum chamber to form an electric configuration chamber, a rotating motor is arranged in the electric configuration chamber, and a motor shaft of the rotating motor penetrates through the separation plate to be connected with a connecting part arranged at the lower part of the rotating table;

when an alloy film is formed on the surface of the die part, the rotation of the motor is controlled by the control device to drive the die part to rotate at a constant speed along with the rotating table so as to assist in controlling film formation.

Preferably, the plasma processor comprises

The nozzle with loudspeaker form, the flange that docks that sets up with nozzle an organic whole to and the upper portion of nozzle have a efflux pipe, and this efflux pipe outwards extends by the flange middle part of docking, and the extension of efflux pipe passes flange and inner tube butt joint down, the outside of inner tube sets up by outer jacket, inner tube and outer jacket lower part are fixed with lower flange, it has a plurality of cyclic annular heat insulating blocks to fill between outer jacket and the inner tube, and

the upper parts of the inner pipe and the outer pipe sleeve are fixed with the upper flange;

the electrode valve seat is fixed on the upper part of the upper flange, an electrode assembly is arranged on the electrode valve seat, the electrode assembly extends into a mixing cavity in the electrode valve seat, and a first inlet and a second inlet are arranged on the electrode valve seat and are communicated with the mixing cavity;

the butt flange, the lower flange and the upper flange are fixed through fixing pieces.

Preferably, the electrode assembly comprises

An electrode body having a cable portion connected to a power supply at an upper portion thereof;

the lower part of the electrode body is provided with a cathode part, the outer side of the cathode part is provided with an insulating sleeve,

the lower part of the mounting seat is provided with a mounting lug which horizontally protrudes outwards, and the mounting lug is fixed with the electrode valve seat through a screw;

the inside of the mounting seat is a mounting groove, the insulating sleeve extends into the mounting groove for fixation, the cathode part extends downwards from the insulating sleeve to the arc column converging tube which is fixed in a mixing cavity in the electrode valve seat, the lower opening of the arc column converging tube is positioned at the jet flow groove,

an anode part is arranged on the outer side of the jet flow groove in the upper flange, and a wiring part of the anode part is also arranged on the upper flange;

the cathode part, the arc column converging tube and the anode part form an anode-cathode system;

the molten alloy material is pressed into the mixing cavity through the first inlet, and forms plasma fog-like molten drops under the action of an anode-cathode system after meeting with the inert gas flowing at high speed from the second inlet, the molten drops are sprayed to the nozzle through the inner pipe and the jet pipe from the jet groove, and the molten drops are sprayed to the surface of the die part through the nozzle to form an alloy film.

Preferably, the upper part of the arc column converging tube is a cylindrical butt joint tube, the lower part of the arc column converging tube is a conical tube, the butt joint tube is clamped on a boss at the upper part of the mixing cavity and is partially sleeved with the insulating sleeve, the conical tube is positioned in the middle of the mixing cavity and extends to the jet flow groove, and the electrode extends into the conical tube after the insulating sleeve and the butt joint tube are sleeved;

and a mixing space is formed between the conical pipe and the mixing cavity, and the first inlet and the second inlet are respectively communicated with the mixing space part.

Preferably, the conical pipe, the jet flow groove, the inner pipe, the jet flow pipe and the nozzle are positioned on the same axis.

Preferably, the jet flow groove is in an inverted trumpet shape.

Preferably, the aperture of the jet pipe is gradually increased from the middle to the two sides.

Preferably, a sealing ring is arranged at the joint of the lower flange and the jet pipe.

The invention provides a vacuum plasma coating mode, which can carry out coating control according to different requirements of mould parts.

Drawings

The invention is illustrated and described only by way of example and not by way of limitation in the scope of the invention as set forth in the following drawings, in which:

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of a plasma processor according to the present invention;

FIG. 3 is a schematic view of the structure of FIG. 2B according to the present invention;

FIG. 4 is a schematic view of the structure of FIG. 2A according to the present invention;

fig. 5 is a schematic perspective view of a plasma processor according to the present invention.

Detailed Description

In order to make the objects, technical solutions, design methods, and advantages of the present invention more apparent, the present invention will be further described in detail by specific embodiments with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1 to 5, the present invention provides a plasma processing apparatus for mold part surface, which uses a control device 9 to control the ratio of the molten alloy material and inert gas flowing into a mixing chamber 323 based on the coating requirement of the mold part surface and a control device 9 to control the power of an electrode assembly to drive the droplets of the mixed inert gas to form plasma and atomize the plasma, and then sprays the plasma onto the mold part surface through a nozzle 300 to form an alloy film.

The method specifically comprises the following steps: a vacuum chamber (4) for holding a vacuum,

the lower part of the vacuum chamber 4 is provided with a rotary table 6, which rotary table 6 is used for the placement of the mould parts,

above the vacuum chamber 4 is arranged a plasma processor 3,

the plasma processor 3 includes:

the nozzle 300 is in a horn shape, the butt flange 301 is arranged integrally with the nozzle 300, the upper portion of the nozzle 300 is provided with a jet pipe 305, the jet pipe 305 extends outwards from the middle of the butt flange, the extending portion of the jet pipe 305 penetrates through the lower flange 303 to be in butt joint with the inner pipe 309, a channel 325 is arranged in the middle of the inner pipe 309 and used for conveying plasma fog-shaped molten drops to the nozzle 300, the outer portion of the inner pipe 309 is provided with an outer sleeve 308, the lower portions of the inner pipe 309 and the outer sleeve 308 are fixed with the lower flange 303, a plurality of annular heat insulation blocks 310 are filled between the outer sleeve 308 and the inner pipe 309, and

the upper parts of the inner pipe 309 and the outer pipe sleeve 308 are fixed with an upper flange 312; and an inner pipe sealing ring 324 is arranged at the joint part of the inner pipe and the upper flange 312;

an electrode valve seat 313 fixed on the upper part of the upper flange 312, an electrode assembly provided on the electrode valve seat 312 and extending into the mixing chamber 323 in the electrode valve seat 312, and a first inlet 100 and a second inlet 200 provided on the electrode valve seat 312, the first inlet 100 and the second inlet 200 communicating with the mixing chamber 323;

the docking flange 301, the lower flange 303 and the upper flange 312 are fixed by fasteners 307.

In the above, the electrode assembly includes:

an electrode body having a cable portion 316 connected to a power supply at an upper portion thereof;

the lower part of the electrode body is provided with a cathode part 315, and the outside of the cathode part 315 is provided with an insulating sleeve 322,

a mounting seat 326, wherein the lower part of the mounting seat 326 is provided with a mounting lug 327 protruding outwards horizontally, and the mounting lug 327 is fixed with the electrode valve seat 312 through a screw 319;

the inside of the mounting seat 326 is a mounting groove, the insulating sleeve 322 extends into the mounting groove for fixation, the cathode portion 315 extends downwards from the insulating sleeve 322 to the arc column convergence tube 314, the arc column convergence tube 314 is used for electrode arc column correction, in a manner of arc column deflection, the arc column convergence tube 314 is fixed in a mixing cavity 323 in the electrode valve seat 312, the lower opening of the arc column convergence tube 314 is positioned at the jet groove 311,

an anode part 304 is arranged on the outer side of the jet flow groove 311 in the upper flange 312, and a wiring part 306 of the anode part is also arranged on the upper flange;

the cathode part 315, the arc column converging tube 314, the anode part 304 and the power supply form an anode-cathode system;

molten alloy material is pressed into the mixing cavity 323 through the first inlet 100, plasma fog droplets are formed by the inert gas flowing at high speed from the second inlet 200 under the action of an anode-cathode system after meeting the mixing cavity, the molten alloy material passes through the inner pipe 309 and the jet pipe 305 from the jet groove 311 to the nozzle 300, and the molten alloy material is sprayed to the surface of the die part through the nozzle 300 to form an alloy film.

In the above, the lower part of the vacuum chamber 4 has a partition plate 7, the partition plate 7 partitions the lower part of the vacuum chamber to form an electrical configuration chamber 8, a rotating motor 5 is arranged in the electrical configuration chamber 8, and a motor shaft of the rotating motor 5 passes through the partition plate to be connected with a connecting part arranged at the lower part of the rotating table;

when an alloy film is formed on the surface of the die part, the rotation of the motor 5 is controlled by the control device to drive the die part to rotate at a constant speed along with the rotating platform 6 so as to assist in controlling film formation.

In the above, the upper part of the arc column converging tube is a cylindrical butt joint tube 320, the lower part of the arc column converging tube is a conical tube, the butt joint tube 320 is clamped on a boss 321 at the upper part of the mixing cavity and is partially sleeved with the insulating sleeve 322, the conical tube is positioned in the middle of the mixing cavity 323 and extends to the jet flow groove, and the electrode extends into the conical tube after the insulating sleeve 322 and the butt joint tube are sleeved;

the tapered pipe forms a mixing space with the mixing chamber 323, and the first inlet 100 and the second inlet 200 are partially communicated with the mixing space, respectively.

In the above, the conical tube, the jet groove 311, the inner tube 309, the jet pipe 305, and the nozzle 300 are on the same axis.

In the above, the jet flow groove is in an inverted trumpet shape.

In the above, the aperture of the jet pipe gradually increases from the middle to both sides.

In the above, the joint of the lower flange and the jet pipe is provided with a seal ring.

The technical principle of the invention is as follows: the die part is placed on the rotating platform 6, and when an alloy film is formed on the surface of the die part, the rotation of the motor 5 is controlled by the control device 9 to drive the die part to rotate at a constant speed along with the rotating platform 6 so as to assist in controlling film formation. Molten alloy material is pressed into the mixing cavity through the first inlet 100, and forms plasma fog-like molten drops under the action of an anode-cathode system after meeting with the inert gas flowing at high speed from the second inlet 200 in the mixing cavity, and the molten drops are sprayed to the surface of a die part through the inner pipe and the jet pipe from the jet groove and the nozzle to form an alloy film.

The proportion of the molten alloy material and the inert gas flowing into the mixing cavity is controlled by the control device based on the surface coating requirements of the die parts, the power of the electrode assembly is controlled by the control device 9 to drive the molten drops of the mixed inert gas to form plasma, the plasma is changed and atomized, and the plasma is sprayed to the surfaces of the die parts by the nozzles to form alloy films.

For the surface treatment of different parts, the film forming mechanism can be set according to the difference of materials and use environments, the film forming mechanism can be preset in the control device, and when different parts are treated, the control device is only required to load the corresponding film forming mechanism.

Meanwhile, the invention also provides a plasma treatment method for the surface of the die part, which comprises the following steps,

1) cleaning and drying the die parts, and putting the die parts into a rotating table 6, wherein the rotating table is provided with a plurality of stations which can be used for placing a plurality of die parts;

2) the parts are placed on a rotating platform 6, the rotation of a motor 5 is controlled by a control device 9 to drive the die parts to rotate at a constant speed along with the rotating platform so as to assist in controlling film formation, meanwhile, the control device controls molten alloy materials to be pressed into a mixing cavity through a first inlet, the molten alloy materials and inert gases flowing at a high speed from a second inlet form plasma fog-shaped molten drops under the action of an anode-cathode system after meeting the mixing cavity, and the plasma fog-shaped molten drops are sprayed to the surface of the die parts through an inner pipe and a jet pipe by a jet groove to form an alloy film.

In the process, the molten alloy material is electrified in the mixing cavity to break down the low-temperature plasma, the gas introduced from the gas source reaches the breakdown voltage under the action of the power supply with the excitation source, and the low-temperature plasma is generated by conducting discharge excitation.

In order to achieve accurate proportion control, a first flow meter 11 and a second flow meter 21 are respectively arranged on a connecting pipeline of a first inlet and a connecting pipeline of a second inlet, the first flow meter 11 is arranged on a conveying pipeline of a first container tank 1, a fusion material is placed in the first container tank 1, the second flow meter 21 is arranged on a pipeline of an air source 2, the first flow meter 11 and the second flow meter 21 are connected with a control device 9, and data collection and feedback processing are facilitated.

Meanwhile, the vacuum chamber is convenient to assemble, a notch can be formed in the upper portion of the vacuum chamber, the butt flange is placed in the vacuum chamber and then connected with the lower flange through the notch, and in order to guarantee sealing performance, a sealing ring can be arranged at the notch, the butt flange and the fixed end of the lower flange. Of course, the above-mentioned fixing manner is only to facilitate the assembly with the vacuum chamber, and it also includes other forms, and also belongs to the protection scheme of the present invention.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A plasma treatment device for the surface of a die part is characterized by comprising

A vacuum chamber is arranged in the vacuum chamber,

2. The apparatus according to claim 1, wherein the alloy film is formed by spraying the alloy film onto the surface of the mold part through a nozzle after the ratio of the molten alloy material to the inert gas flowing into the mixing chamber is controlled by the control means based on the requirement of the surface coating of the mold part and the droplet formation plasma of the inert gas is changed and atomized by the control means by driving the power of the electrode assembly.

3. The apparatus for plasma processing surface of mold part as claimed in claim 1, wherein the lower part of the vacuum chamber has a partition plate partitioning the lower part of the vacuum chamber to form an electrical disposition chamber in which a rotary motor having a motor shaft connected to a connection part provided at the lower part of the rotary table is provided;

4. The apparatus of claim 1, wherein the plasma processor comprises a plasma processing chamber

5. The apparatus of claim 4, wherein the electrode assembly comprises

6. The apparatus of claim 5, wherein the arc-shaped convergence tube has a cylindrical upper portion and a lower portion, the upper portion being a cylindrical butt-joint tube, the lower portion being a tapered tube, the butt-joint tube being clamped on a boss at the upper portion of the mixing chamber and partially sleeved with the insulating sleeve, the tapered tube being located in the middle of the mixing chamber and extending to the injection chute, the electrode extending into the tapered tube after the insulating sleeve and the butt-joint tube are sleeved;

7. The mold part surface plasma treatment apparatus of claim 5, wherein the conical tube, the jet groove, the inner tube, the jet tube, and the nozzle are on the same axis.

8. The apparatus of claim 5 or 7, wherein the jet grooves are of an inverted trumpet shape.

9. The mold part surface plasma treatment apparatus as claimed in claim 4, 5 or 7, wherein the jet pipe is gradually increased in aperture from the middle to both sides.

10. The apparatus of claim 4, wherein a sealing ring is disposed at the connection between the lower flange and the jet pipe.