CN113835311A - Diaphragm and laser - Google Patents

Diaphragm and laser Download PDF

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Publication number
CN113835311A
CN113835311A CN202111149749.9A CN202111149749A CN113835311A CN 113835311 A CN113835311 A CN 113835311A CN 202111149749 A CN202111149749 A CN 202111149749A CN 113835311 A CN113835311 A CN 113835311A
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CN
China
Prior art keywords
diaphragm
light
mirror
aperture
transmitting
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Pending
Application number
CN202111149749.9A
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Chinese (zh)
Inventor
陈乃奇
陈钢
张向非
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Shenzhen Anteland Technology Co Ltd
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Shenzhen Anteland Technology Co Ltd
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Publication date
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Priority to CN202111149749.9A priority Critical patent/CN113835311A/en
Publication of CN113835311A publication Critical patent/CN113835311A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70941Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss

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  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The embodiment of the invention discloses a diaphragm and a laser, wherein a dustproof mirror is arranged on a diaphragm substrate to prevent dust deposition of an optical system, and meanwhile, an arc-shaped curved surface of the dustproof mirror is obliquely arranged, so that adverse effects on the performance of the optical system caused by the arrangement of the dustproof mirror are greatly reduced. The diaphragm in the embodiment of the invention comprises a diaphragm base body and a dustproof mirror, wherein the available light emergent end of the diaphragm base body is provided with a diaphragm hole; the dustproof mirror is designed into a circular arc-shaped curved surface; the dustproof mirror is provided with a light-transmitting and non-light-transmitting hole for transmitting the usable light emitted from the diaphragm hole; the dust-proof mirror is fixed on the outer end face of the available light emergent end of the diaphragm substrate.

Description

Diaphragm and laser
Technical Field
The embodiment of the invention provides a diaphragm and a laser, which relate to the field of optics, in particular to an optical element in the field of optics.
Background
In an optical system, a diaphragm is commonly used to constrain a light beam to obtain a better usable light beam, but during the use of the optical system, dust often falls onto optical elements such as a lens or a light source through a diaphragm hole or an end face hole of a diaphragm base body. Dust falling on optical elements such as lenses or light sources is difficult to clean in time due to the structure of the optical system and the like.
The nature of dust is the tiny particulate matter of various materials, and the phenomenon such as transmission, diffuse reflection, refraction can take place when the light shines on the dust. Therefore, dust falls on optical elements such as a lens or a light source and is accumulated to have a great influence on the performance of the optical system; the influence is particularly prominent in photoetching direct-writing equipment with high precision requirement, and the dust accumulation in an optical system in laser welding or laser cutting equipment can also greatly influence the service performance of the equipment.
Disclosure of Invention
The embodiment of the invention provides a diaphragm and a laser, wherein the dust-proof mirror is arranged on a diaphragm substrate to solve the problem of dust deposition of an optical system, and the side surface of the dust-proof mirror is obliquely arranged to solve the problem of adverse influence on the performance of the optical system due to the arrangement of the dust-proof mirror.
A first aspect of the embodiments of the present invention provides a diaphragm, where an available light exit end of a diaphragm substrate has a diaphragm hole; the dustproof mirror is designed into a circular arc-shaped curved surface; the dustproof mirror is provided with a light-transmitting and non-light-transmitting hole for transmitting the usable light emitted from the diaphragm hole; the dust-proof mirror is fixed on the outer end face of the available light emergent end of the diaphragm substrate.
Optionally, as a possible implementation manner, the dust-proof mirror is recessed in the inner space of the cylindrical structure of the diaphragm base body, or protrudes out of the inner space of the cylindrical structure of the diaphragm base body.
Optionally, as a possible implementation manner, the inner end surface of the available light exit end of the diaphragm base body is an inclined surface inclined to the vertical surface of the main optical axis.
Optionally, as a possible implementation manner, the outer end face of the usable light exit end of the diaphragm base body is provided with a glue retaining groove.
Optionally, as a possible embodiment, the surface of the inner hole of the diaphragm base body is a rough surface.
Optionally, as a possible embodiment, the body of the diaphragm base is made of a heat conductive material; and a layer of light absorption material is arranged on the surface of the inner hole of the main body of the diaphragm base body.
A second aspect of the embodiments of the present invention provides a diaphragm, which may include a diaphragm substrate and a dust-proof mirror, wherein the dust-proof mirror has a light-transmitting hole that is light-transmitting and non-light-transmitting, and other portions of the dust-proof mirror except the light-transmitting hole are non-light-transmitting portions;
the dustproof mirror is designed into a circular arc-shaped curved surface and is fixed on the outer end surface of the available light emergent end of the diaphragm substrate.
Optionally, as a possible implementation, the inner surface of the dust-proof mirror is a rough surface.
Optionally, as a possible implementation manner, the main body of the diaphragm base body is made of a heat conducting material, and a layer of light absorbing material is disposed on the surface of the inner hole of the main body of the diaphragm base body.
A third aspect of embodiments of the present invention provides a laser, which includes a light source circuit, a laser base, and a diaphragm as in any possible implementation manner of the first aspect and the second aspect; wherein the diaphragm is mounted on the laser base; an accommodating space for accommodating the light source circuit is arranged in the laser base in an extending manner; the light source circuit is used for generating laser with a preset wavelength in a preset laser propagation direction.
Has the advantages that: the dustproof mirror in the technical scheme of the invention is provided with the light-transmitting hole which is light-transmitting and does not pass through air, so that dust can be prevented from being deposited on the optical lens. The dustproof mirror is an arc-shaped curved surface, namely the curved surface of the light transmission hole of the dustproof mirror is not vertically arranged relative to the main optical axis of the optical system, and the reflected light reflected by the light transmission hole can obliquely irradiate the surface of the inner hole of the diaphragm base body, so that the half-wave loss of the available light under the condition of grazing incidence or vertical incidence can be avoided, and the power of the available light is reduced. Because the light reflected by the dustproof light reflects to the inner hole surface of the diaphragm substrate, the light reflected by the dustproof light can be prevented from being converged on the lens and the light source to form energy concentration, and therefore the influence of the reflected light on the service life of the lens and the light source is weakened.
Secondly, the surface of the diaphragm base body is provided with a layer of light absorption material, and the light absorption material can absorb most of light irradiated to the surface of the diaphragm base body, so that the influence of stray light on available light beams can be reduced. The heat energy that the light absorbing material produced after absorbing the light energy can be shifted to the heat conduction material to further outside shifting to optical system through the heat conduction material, can also reduce the temperature and to optical system's influence, avoid near the high temperature of light source can produce the adverse effect to the life of light source.
Drawings
FIG. 1 is a schematic view of the optical path of a usable light beam through a dust-proof mirror when the dust-proof mirror is disposed perpendicular to the primary optical axis of an optical system;
FIG. 2 is a schematic perspective view of an alternative construction of a diaphragm substrate in an embodiment of the invention;
FIG. 3 is a schematic perspective view of an alternative construction of a dust mirror in an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of an alternative configuration of an aperture in an embodiment of the invention;
FIG. 5 is a schematic representation of the reflection of light toward the dust mirror of the diaphragm in an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of an alternative configuration of an aperture in an embodiment of the invention;
fig. 7 is a schematic cross-sectional view of an alternative configuration of an aperture in an embodiment of the invention.
Detailed Description
The main optical axis in the present document refers to a straight line passing through the centers of two spherical surfaces of a thin lens in geometric optics; "usable light" is understood to mean that the light emitted by the light source is a portion of the light beam which is refracted by the lens and then focused on the main optical axis; the term "aperture" is understood to mean an optical space (shape) for confining light emitted from an optical element such as a lens or a light source to the "aperture" to obtain a desired light beam for a machining operation of a part, and may be a through hole without filling or a light-transmitting hole filled with a transparent material, and the shape of the hole may be circular or other polygonal shapes such as a hexagon. Other words, phrases, and phrases in this document are generally understood in their ordinary meaning (in the case of difficult understanding, in conjunction with the context in which they are connected) if they are terminology used in the optical field (since the technical solution of the present invention is resolved by geometrical optics, the corresponding terminology is preferably also understood in the meaning used in geometrical optics, and only when the meaning of this terminology is not specified by geometrical optics will the words, phrases, and phrases be understood in the optical field as a whole).
In the prior art, because the diaphragms are usually positioned at the tail ends of the optical systems, the optical lenses are directly contacted with the outside air. In order to prevent dust accumulation on the optical lenses, the applicant has noted that a dust-proof mirror can be provided at the available light exit end of the diaphragm base body to achieve the effect of preventing dust from passing through the diaphragm aperture or the end face aperture of the diaphragm base body into the interior of the optical system.
As shown in fig. 1, the applicant further noticed that when a glass protective layer is provided at the aperture, if the glass protective layer is perpendicular to the main optical axis 100 of the optical system, so that part of the usable light is reflected back when passing through the glass protective layer and the direction of the reflected light 400 is exactly opposite to the exit direction of the usable light beam 300, the phase of the reflected light wave relative to the incident light wave changes by pi, half-wave loss occurs, and the usable power of the usable light 300 is reduced. And a part of the light is refracted by the lens and then converged on the light source, and the service life of the lens and the light source is influenced due to the concentration of energy. Therefore, there is a need for further improvements in diaphragms that avoid the above-mentioned drawbacks.
For the convenience of understanding, the diaphragm structure in the embodiment of the present invention is described below with reference to fig. 2 to 4. The diaphragm may comprise a diaphragm base 1 and a dust-proof mirror 2. In one possible embodiment, as shown in fig. 2, the main body structure of the diaphragm base 1 may be a hollow cylindrical structure (the side surface may be a circular arc curved surface or a flat surface), and the usable light exit end of the diaphragm base 1 has a diaphragm hole 3. Referring to fig. 3, the dust-proof mirror 2 is designed as a circular arc-shaped curved surface; the dust-proof mirror 2 is provided with a light-transmitting and non-light-transmitting hole 2-1 for transmitting the available light emitted from the diaphragm hole 3; the dust-proof mirror 2 is fixed on the outer end face of the diaphragm base body 1 at the available light exit end. Specifically, the dust-proof mirror 2 can be mounted on the diaphragm base 1 in a clamping manner or a UV adhesive bonding manner, and a specific fixing manner is not limited herein.
The light can be refracted and reflected after being irradiated to the solidified glue. If the glue is solidified on the surface of the inner hole of the diaphragm substrate, a part of light is reflected or refracted to an available light beam after the solidified glue is irradiated by the light, and the performance of an optical system is influenced. In order to avoid the above problem, alternatively, as a possible embodiment, the outer end surface of the usable light exit end of the diaphragm base body 1 has a glue retaining groove 1-1. The glue retaining groove 1-1 is arranged on the outer end face for placing the dustproof mirror 2, so that glue can be prevented from overflowing to the surface of the inner hole of the diaphragm substrate 1 when the dustproof mirror 2 is bonded with the diaphragm substrate 1.
It should be noted that, in fig. 4, the dust-proof mirror is disposed to protrude from the internal space of the cylindrical structure of the diaphragm base, and in practical applications, the dust-proof mirror may also be recessed into the internal space of the cylindrical structure of the diaphragm base, which is not limited herein.
As shown in fig. 5, when the dust-proof mirror 2 protrudes out of the inner space of the cylindrical structure of the diaphragm substrate 1, the arc-shaped curved surface of the dust-proof mirror 2 is disposed obliquely to the main optical axis 100 rather than perpendicularly to the main optical axis 100, and the arc-shaped curved surface of the dust-proof mirror 2 can deflect the direction of the part of the reflected light 200 reflected back by the dust-proof mirror 2 and emit the reflected light to the inner hole surface of the diaphragm substrate 1. This avoids the half-wave loss during reflection of the usable light 300 at grazing or normal incidence, which would result in a reduction in the power of the usable light. Meanwhile, the light reflected back by the dustproof mirror is reflected to the surface of the inner hole of the diaphragm base body, so that the light reflected back by the dustproof mirror can be prevented from being converged on the lens and the light source to form energy concentration, and the influence of the reflected light on the service life of the lens and the light source is reduced.
Alternatively, as a possible embodiment, the inner bore surface of the diaphragm base 1 may be provided as a rough surface. The rough surface can make the inner hole surface of the diaphragm base body 1 generate diffuse reflection, reduce the reflected light to be converged on the lens and the light source, weaken the concentration effect of energy at the lens and the light source, and prolong the service life of the lens and the light source.
In order to further reduce the effect of condensing the reflected light at the lens, as shown in fig. 6, optionally, as a possible embodiment, the inner end surface of the available light exit end of the diaphragm base 1 may be provided with a slope inclined to the vertical plane of the main optical axis. The inner end surface of the light emitting end may include a single inclined surface, or may include a plurality of inclined surfaces, which is not limited herein.
Alternatively, as a possible embodiment, the main body of the diaphragm base body 1 is made of a heat conductive material (e.g., a mixture of heat conductive silicon and copper particles, etc., graphene, alumina heat conductive rubber, boron nitride heat conductive rubber, etc.). Optionally, a layer of light absorbing material is disposed on the surface of the inner hole of the main body of the diaphragm base 1 (the light absorbing material means that light is irradiated on objects, and no transmission exists outside the illumination, and mapping and bulk flare and reflection are not generated, such as carbon nanotube black bodies and the like).
Referring to fig. 7, an embodiment of the invention further provides a diaphragm, which may include a substrate 1 and a dust-proof mirror 2. The main structure of the diaphragm base 1 may be a vertically straight tubular structure (the side surface may be an arc curved surface or a flat surface). The dustproof mirror 2 is provided with a light-transmitting hole 2-1 which is light-transmitting and is not communicated, and the other parts 2-2 of the dustproof mirror 2 except the light-transmitting hole 2-1 are light-tight parts; the dust-proof mirror 2 is designed as a circular arc-shaped curved surface, and the dust-proof mirror 2 is fixed on the outer end surface of the usable light emitting end of the diaphragm base body 1. Optionally, the dust-proof mirror 2 may be mounted on the diaphragm base 1 by means of clamping or UV glue, and a specific fixing manner is not limited herein.
Alternatively, as a possible embodiment, the main body 1-2 of the diaphragm base body 1 is made of a heat conductive material (e.g., a mixture of heat conductive silicone rubber and copper particles, etc., graphene, alumina heat conductive rubber, boron nitride heat conductive rubber, etc.). Optionally, a layer of light absorbing material 1-3 is disposed on the surface of the inner hole of the main body of the diaphragm substrate 1 (the light absorbing material is a material that does not transmit light when irradiated on an object, does not generate mapping and massive flare or reflection, but diffuses and reflects part of light after absorbing the light, thereby maintaining regular light and shade levels, such as carbon nanotube black body, etc.).
The applicant has noticed that the usable light beam is often reflected back by a small portion when it strikes the surface of the machined part, and the reflected light is reflected back onto the machined part after it strikes the surface of the dust-proof mirror, thereby affecting the machining accuracy of the optical system. In order to overcome the above-mentioned drawbacks, the outer surface of the dust-proof mirror in the embodiment of the present invention may be optionally provided with a rough surface, and diffuse reflection may occur when light is irradiated to the surfaces on the dust-proof mirror. The presence of a rough surface of the dust-proof mirror facing the inner bore of the diaphragm base can reduce the adverse effect of reflected light on the usable light beam.
On the basis of any one of the above embodiments, an embodiment of the present invention further provides a laser, which may include a light source circuit, a laser base, and the diaphragm in any one of the above embodiments.
The diaphragm is installed on the laser base, and the specific connection mode may be detachable connection or non-detachable connection, and is not limited herein.
The laser base is internally provided with an accommodating space for accommodating the light source circuit in an extending manner, and the specific shape of the laser base can be reasonably arranged according to requirements without limitation.
The light source circuit of the laser is used for generating laser with preset wavelength in the preset laser propagation direction. The specific implementation manner of the light source circuit is a mature prior art, and is not described herein.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A diaphragm comprises a diaphragm base body and a dustproof mirror, and is characterized in that a diaphragm hole is formed at the available light emergent end of the diaphragm base body; the dustproof mirror is designed into a circular arc-shaped curved surface; the dustproof mirror is provided with a light-transmitting and non-light-transmitting hole for transmitting the usable light emitted from the diaphragm hole; the dust-proof mirror is fixed on the outer end face of the available light emergent end of the diaphragm substrate.
2. An optical diaphragm according to claim 1, wherein the dust-proof mirror is recessed in the inner space of the cylindrical structure of the diaphragm base body or protruded from the inner space of the cylindrical structure of the diaphragm base body.
3. An aperture stop according to claim 1, characterised in that the inner end surface of the available light exit end of the aperture base body is bevelled obliquely to the vertical plane of the main optical axis.
4. An optical diaphragm according to claim 1, wherein the outer end face of the light-emitting end of the diaphragm base body is provided with a glue retaining groove.
5. An aperture according to any one of claims 1 to 4, wherein the surface of the inner bore of the aperture base is roughened.
6. An aperture according to any one of claims 1 to 4, characterised in that the body of the aperture base is made of a heat-conducting material; and a layer of light absorption material is arranged on the surface of the inner hole of the main body of the diaphragm base body.
7. A diaphragm comprises a diaphragm base body and a dustproof mirror, and is characterized in that the dustproof mirror is provided with a light-transmitting hole which is light-transmitting and not light-transmitting, and the other parts of the dustproof mirror except the light-transmitting hole are light-proof parts;
the dustproof mirror is designed into a circular arc-shaped curved surface and is fixed on the outer end surface of the available light emergent end of the diaphragm substrate.
8. An aperture according to claim 7, wherein the inner surface of the dust mirror is roughened.
9. An aperture according to claim 7 or 8, characterized in that the body of the aperture body is made of a heat conducting material, and the surface of the inner bore of the body of the aperture body is provided with a layer of light absorbing material.
10. A laser comprising a light source circuit, a laser base and a diaphragm according to any one of claims 1 to 9; wherein the content of the first and second substances,
the diaphragm is arranged on the laser base;
an accommodating space for accommodating the light source circuit is arranged in the laser base in an extending manner; the light source circuit is used for generating laser with preset wavelength in a preset laser propagation direction.
CN202111149749.9A 2021-09-29 2021-09-29 Diaphragm and laser Pending CN113835311A (en)

Priority Applications (1)

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CN202111149749.9A CN113835311A (en) 2021-09-29 2021-09-29 Diaphragm and laser

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Application Number Priority Date Filing Date Title
CN202111149749.9A CN113835311A (en) 2021-09-29 2021-09-29 Diaphragm and laser

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CN113835311A true CN113835311A (en) 2021-12-24

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0899187A (en) * 1994-09-30 1996-04-16 Mitsubishi Electric Corp Lens cover for laser beam machine
JP2001071553A (en) * 1999-09-01 2001-03-21 Ricoh Co Ltd Laser beam light source
CN106785815A (en) * 2016-12-23 2017-05-31 中国科学院光电研究院 A kind of spuious light collector
CN106838754A (en) * 2015-12-03 2017-06-13 深圳市光峰光电技术有限公司 Vehicle light illumination system and its driving method
CN111050043A (en) * 2019-12-23 2020-04-21 维沃移动通信(杭州)有限公司 Camera module and electronic equipment
CN112531447A (en) * 2020-12-18 2021-03-19 上海波刺自动化科技有限公司 Stray light absorbing device, laser processing head and fiber laser
CN113130094A (en) * 2019-12-30 2021-07-16 核工业西南物理研究院 Compact laser swallow ware

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0899187A (en) * 1994-09-30 1996-04-16 Mitsubishi Electric Corp Lens cover for laser beam machine
JP2001071553A (en) * 1999-09-01 2001-03-21 Ricoh Co Ltd Laser beam light source
CN106838754A (en) * 2015-12-03 2017-06-13 深圳市光峰光电技术有限公司 Vehicle light illumination system and its driving method
CN106785815A (en) * 2016-12-23 2017-05-31 中国科学院光电研究院 A kind of spuious light collector
CN111050043A (en) * 2019-12-23 2020-04-21 维沃移动通信(杭州)有限公司 Camera module and electronic equipment
CN113130094A (en) * 2019-12-30 2021-07-16 核工业西南物理研究院 Compact laser swallow ware
CN112531447A (en) * 2020-12-18 2021-03-19 上海波刺自动化科技有限公司 Stray light absorbing device, laser processing head and fiber laser

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