CN113835310A - Diaphragm and laser - Google Patents
Diaphragm and laser Download PDFInfo
- Publication number
- CN113835310A CN113835310A CN202111149357.2A CN202111149357A CN113835310A CN 113835310 A CN113835310 A CN 113835310A CN 202111149357 A CN202111149357 A CN 202111149357A CN 113835310 A CN113835310 A CN 113835310A
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- Prior art keywords
- diaphragm
- light
- mirror
- laser
- dustproof
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- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 239000000428 dust Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 10
- 239000003292 glue Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011358 absorbing material Substances 0.000 claims description 5
- 230000031700 light absorption Effects 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 230000002411 adverse Effects 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
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- 238000003698 laser cutting Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The application discloses diaphragm and laser instrument prevents optical system's dust deposit through setting up the dustproof mirror on the diaphragm base member, and the side slope of dustproof mirror sets up simultaneously, and greatly reduced again has set up the adverse effect that produces optical system performance because of the dustproof mirror. The diaphragm provided in the embodiment of the present invention may include: the dustproof mirror is provided with a light-transmitting and non-light-transmitting diaphragm hole, and other parts except the diaphragm hole on the dustproof mirror are light-transmitting parts; the dust-proof mirror is arranged to be an inclined plane which takes the vertical plane of the main optical axis as a horizontal reference; the dustproof mirror is arranged on the end face of the available light emergent end of the diaphragm base body.
Description
Technical Field
The embodiment of the application provides a diaphragm and a laser, and relates to the field of optics, in particular to an optical element except a lens in the field of optics.
Background
In an optical system, a diaphragm is commonly used for restricting a light beam to obtain a better usable light beam, but dust often falls onto optical elements such as a lens or a light source through a diaphragm hole or an end face hole of a diaphragm base body in the use process of the optical system; dust falling on optical elements such as a lens or a light source is difficult to clean in time due to the structure of an optical system and the like.
The nature of dust is the tiny particulate matter of various materials, and the phenomenon such as transmission, diffuse reflection, refraction can take place when the light shines on the dust. Therefore, dust falls on optical elements such as a lens or a light source and is accumulated to have a great influence on the performance of the optical system; the influence is particularly prominent in photoetching direct-writing equipment with high precision requirement, and the dust accumulation in an optical system in laser welding or laser cutting equipment can also greatly influence the service performance of the equipment.
Disclosure of Invention
The first aspect of the embodiments of the present application provides a diaphragm and a laser, in which a dust-proof mirror is disposed on a diaphragm substrate to solve the problem of dust deposition on an optical system, and a side surface of the dust-proof mirror is disposed obliquely to solve the problem of adverse effect on performance of the optical system due to the disposition of the dust-proof mirror.
The first aspect of the embodiment of the application provides a diaphragm, which comprises a diaphragm base body and a dustproof mirror, wherein the dustproof mirror is provided with a light-transmitting and non-light-transmitting diaphragm hole, and other parts except the diaphragm hole on the dustproof mirror are non-light-transmitting parts; the dust-proof mirror is arranged to be an inclined plane which takes the vertical plane of the main optical axis as a horizontal reference; the dustproof mirror is fixed on the end face of the available light emergent end of the diaphragm base body.
According to the scheme, the inclined dustproof mirror enables the part of the usable light reflected by the dustproof mirror to be emitted to the surface of the inner hole of the diaphragm base body, so that the usable light is far away from the usable light beam and the lens.
Optionally, as a possible implementation, the included angle between the inclined plane and the vertical plane of the main optical axis is 1 degree to 8 degrees.
Optionally, as a possible implementation, the inclined surface is provided with a glue retaining groove.
Alternatively, as a possible embodiment, the surface of the dust-proof mirror at other positions in the usable light propagation direction is a rough surface.
Alternatively, as a possible embodiment, the outer edge of the end face of the usable light exit end of the diaphragm base body is provided with a flange protruding in the usable light propagation direction for limiting the dust-proof mirror.
Alternatively, as a possible embodiment, the inner surface of the flange is designed with an inwardly inclined shape to facilitate installation of the dust mirror.
Optionally, as a possible implementation manner, the diaphragm base body is made of a heat conducting material.
Alternatively, as a possible implementation, the inner hole surface of the diaphragm base body made of the heat conductive material is provided with a layer of light absorbing material.
Optionally, as a possible implementation manner, the diaphragm base body is made of light absorption material.
A second aspect of the embodiments of the present application provides a laser, which may include a light source circuit, a laser base, and a diaphragm as in any one of the possible implementations of the first aspect; wherein the content of the first and second substances,
the diaphragm is arranged on the laser base;
an accommodating space for accommodating the light source circuit is arranged in the laser base in an extending manner;
the light source circuit is used for generating laser with preset wavelength in a preset laser propagation direction.
The beneficial effects are as follows: the utility model provides a dustproof mirror among the technical scheme is that the slope sets up in the primary optical axis rather than perpendicular primary optical axis, and the dustproof mirror sets up the hole surface that can make that some light that available light reflected back through dustproof mirror is directed to the diaphragm base member for optical system's primary optical axis slope to make it keep away from available light beam and lens. This avoids half-wave losses in the case of grazing or normal incidence of the incident light, which leads to a reduction in the power of the usable light. Meanwhile, the light reflected by the dustproof mirror reflects to the surface of the inner hole of the diaphragm base body, so that the light reflected by the dustproof mirror can be prevented from being converged on the lens and the light source to form energy concentration, and the influence of the reflected light on the service life of the lens and the light source is reduced.
The surface of the diaphragm base body is provided with a layer of light absorption material, and the light absorption material can absorb most of light irradiated on the surface of the diaphragm base body, so that the influence of stray light on available light beams can be reduced. The heat energy generated after the light absorption material absorbs the light energy can be transferred to the heat conduction material, so that the heat energy is further transferred to the outside of the optical system through the heat conduction material, the influence of the temperature on the optical system can be reduced, and the adverse effect on the service life of the light source caused by the overhigh temperature near the light source can be avoided.
Drawings
FIG. 1 is a schematic diagram of reflection, refraction, etc. of light that can be directed to a dust-proof mirror of a diaphragm when the dust-proof mirror is disposed perpendicular to a main optical axis of an optical system;
FIG. 2 is a schematic structural diagram of a dustproof mirror of a diaphragm provided in an embodiment of the present application;
FIG. 3 is a cross-sectional view of an aperture provided in an embodiment of the present application;
FIG. 4 is a schematic diagram of light reflected by a dust-proof mirror of the diaphragm when the dust-proof mirror is tilted with respect to a primary optical axis of the optical system;
FIG. 5 is a schematic view of the distribution of heat absorbing materials in the diaphragm substrate provided by the embodiment of the present application;
fig. 6 is a sectional view of the diaphragm base body in which a usable light exit end is provided with a flange.
Detailed Description
The main optical axis in the present document refers to a straight line passing through the centers of two spherical surfaces of a thin lens in geometric optics; "usable light" is understood to mean that the light emitted by the light source is a portion of the light beam which is refracted by the lens and then focused on the main optical axis; other words, phrases and phrases in the present specification are understood to have the meaning defined by the technical term in the optical field if they are the term in the art (since the technical solution of the present application is resolved by geometrical optics, the corresponding term in the optical field is preferably understood by the meaning defined by geometrical optics, and the meaning of the term in the optical field is extended only when geometrical optics does not specify the meaning of the term in the optical field), and other words, phrases and phrases in addition to the term in the optical field are generally understood to have the ordinary meaning (when understanding is difficult, the understanding is made by combining the context of the term).
In the prior art, since the diaphragms are usually arranged at the tail ends of the optical system, the optical lenses are usually in direct contact with the outside air. In order to prevent dust accumulation on the optical lenses, the applicant has noted that a dust-proof mirror can be provided at the available light exit end of the diaphragm base body to achieve the effect of preventing dust from passing through the diaphragm aperture or the end face aperture of the diaphragm base body into the interior of the optical system.
As shown in fig. 1, the applicant further noticed that when a glass protection layer is disposed at the aperture, if the glass protection layer is perpendicular to the main optical axis 100 of the optical system, the direction of the reflected light 200, in which part of the light is reflected when the usable light 300 passes through the glass protection layer, is exactly opposite to the exit direction of the usable light beam 300, and the phase of the reflected light wave is abruptly changed by pi with respect to the incident light wave, half-wave loss occurs, so that the usable power of the usable light is reduced. And a part of the light is refracted by the lens and then converged on the light source, and the service life of the lens and the light source is influenced due to the concentration of energy. Therefore, there is a need for further improvements in diaphragms that avoid the above-mentioned drawbacks.
Referring to fig. 2 to 3, an aperture stop provided in an embodiment of the present application includes an aperture base 1 and a dust-proof mirror 2. The main structure of the diaphragm base 1 may be a hollow cylindrical structure (the side surface may be an arc curved surface or a plane). As shown in fig. 2, the dust-proof mirror 2 has a light-transmitting and non-light-transmitting diaphragm aperture 2-1, and the other parts of the dust-proof mirror 2 except the diaphragm aperture 2-1 are non-light-transmitting parts 2-2.
It should be noted that the appearance of the dust-proof mirror 2 in the embodiment of the present application is only illustrated by taking a circle as an example, and other shapes, such as a polygon, may also be used in practical applications. The aperture 2-1 is understood to mean an optical space (shape) for confining light emitted from an optical element such as a lens or a light source to the "aperture hole" to obtain a desired light beam for a machining operation of a part, and may be a light-transmitting hole filled with a transparent material, and the shape of the hole may be circular or other polygonal shapes such as a hexagon.
As shown in fig. 4, the dust-proof mirror 2 of the diaphragm in the embodiment of the present application is disposed obliquely to the vertical plane of the principal optical axis 100, and the dust-proof mirror 2 is not perpendicular with respect to the principal optical axis of the optical system, so that the part of the reflected light 200 of the usable light 300 reflected by the dust-proof mirror 2 is directed toward the inner hole surface of the diaphragm base 1, and is thus away from the usable light 300 and the lens 500. This avoids the half-wave loss during reflection of the usable light 300 at grazing or normal incidence, which would result in a reduction in the power of the usable light. Because most of the reflected light reflected by the dustproof mirror irradiates the surface of the inner hole of the diaphragm base body, the phenomenon that the light reflected by the dustproof mirror converges on the lens and the light source to form energy concentration can be weakened, and therefore the influence of the reflected light on the service life of the lens and the light source is reduced.
On the basis of the embodiment, if the dustproof mirror is fixed by glue, the glue is solidified on the surface of the inner hole of the diaphragm substrate, and a part of light is reflected or refracted to an available light beam after the solidified glue is irradiated by the light, so that the performance of the optical system is influenced. The end face of the usable light emergent end of the diaphragm base body 1 in the embodiment of the application is provided with a glue retaining groove 1-1. The dust-proof mirror 2 is adhesively fixed to the end face of the usable light-emitting end of the diaphragm base body 1 by an adhesive (e.g., UV paste) in the glue retaining groove 1-1, and is mounted such that the center line of the diaphragm aperture 2-1 of the dust-proof mirror 2 coincides with the center line of the main body of the diaphragm base body 1. The glue retaining groove 1-1 can prevent glue from overflowing to the surface of the inner hole of the diaphragm substrate when the dustproof mirror and the diaphragm substrate are bonded.
Alternatively, as a possible embodiment, the surface of the dust-proof mirror 2 at other portions than the diaphragm hole 2-1 in the usable light propagation direction is rough, so that the other portions can reduce the reflected light reflected to the lens.
Alternatively, as a possible implementation manner, the main body of the diaphragm base body 1 in the embodiment of the present application may be made into a cylindrical shape by using a heat conduction material (for example, a mixture of heat conduction silica gel and copper particles, graphene, alumina heat conduction rubber, boron nitride heat conduction rubber, or the like).
Alternatively, as shown in fig. 5, a layer of light absorbing material may be disposed on the inner hole surface of the main body of the cylindrical diaphragm base 1 by painting or bonding, etc. (the light absorbing material means that light irradiates on the object, and no transmission exists outside the illumination, and mapping and bulk flare and reflection are not generated, such as carbon nanotube black body, etc.).
Optionally, as a possible implementation manner, in order to make the reflected light collected at the light source or the lens as less as possible, the included angle between the inclined plane and the vertical plane of the main optical axis in the embodiment of the present application is 1 degree to 8 degrees.
As shown in fig. 6, a flange 1-4 protruding in the usable light propagation direction for limiting the dust-proof mirror 2 is provided on the outer edge of the end face of the usable light exit end of the diaphragm base body 1. The inner surface of the flange 600 is designed as an inwardly inclined ramp to facilitate installation of the dust mirror 2.
Alternatively, as a possible embodiment, the dust mirror 2 can be made of a single piece of round glass, the dimensions of which are matched to the dimensions of the mounting location of the dust mirror 2 on the diaphragm base 1. The position of the diaphragm hole and other positions which do not need to be processed by rough surface are protected by a protective film, and then the whole glass is put into an etching solution to etch the surface which needs to be processed by rough surface to form the rough surface. And finally, forming a layer of opaque layer on the rough surface of the glass formed by etching by smearing opaque materials or chemically plating, so that the dustproof mirror 2 is manufactured. The dustproof mirror 2 can also be obtained by firstly obtaining a dustproof mirror 2 matrix which is provided with a round through hole at the center and forms a needed rough surface during injection molding in an injection molding mode, and then installing a piece of light-transmitting plane white glass on the center hole of the matrix in a glue bonding or embedding mode to manufacture the dustproof mirror 2.
The diaphragm substrate 1 can be formed by pouring a mixture of heat-conducting silica gel, copper particles and the like in a liquid state into a mold, and then cooling and solidifying the mixture to form the diaphragm substrate 1. The diaphragm formed by combining the diaphragm base body 1 and the dustproof mirror 2 can be combined with the light source base in a threaded manner to form an optical system of the photoetching equipment.
On the basis of any one of the diaphragm embodiments, the embodiment of the application further provides a laser, which can comprise a light source circuit, a laser base and the diaphragm in any one of the diaphragm embodiments. Wherein the content of the first and second substances,
the diaphragm is installed on the laser base, and the specific connection mode may be detachable connection or non-detachable connection, and is not limited herein.
The laser base is internally provided with an accommodating space for accommodating the light source circuit in an extending manner, and the specific shape of the laser base can be reasonably arranged according to requirements without limitation.
The light source circuit of the laser is used for generating laser with preset wavelength in the preset laser propagation direction. The specific implementation manner of the light source circuit is a mature prior art, and is not described herein.
The above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
Claims (10)
1. A diaphragm is characterized by comprising a diaphragm base body and a dustproof mirror, wherein the dustproof mirror is provided with a light-transmitting and non-light-transmitting diaphragm hole, and the other parts except the diaphragm hole on the dustproof mirror are non-light-transmitting parts;
the dust-proof mirror is arranged to be an inclined plane which takes the vertical plane of the main optical axis as a horizontal reference;
the dustproof mirror is fixed on the end face of the available light emergent end of the diaphragm base body.
2. An optical diaphragm according to claim 1, characterized in that the end face of the diaphragm body, which is available for the light exit end, is provided with a glue retaining groove.
3. An optical diaphragm according to claim 1, wherein the angle between the inclined surface and a perpendicular to the main optical axis is in the range 1 to 8 degrees.
4. An aperture according to any one of claims 1 to 3, characterised in that: the surfaces of other parts except the diaphragm hole on the dustproof mirror are rough surfaces.
5. An aperture according to any one of claims 1 to 3, characterised in that: the outer edge of the end face of the usable light emergent end of the diaphragm base body is provided with a flange which is used for limiting the dustproof mirror and protrudes along the usable light transmission direction.
6. An aperture according to any one of claims 1 to 3, characterised in that: the inner surface of the flange is designed to be inwardly slanted for facilitating the installation of the dust mirror.
7. An aperture according to any one of claims 1 to 3, characterised in that: the diaphragm base body is made of heat conducting materials.
8. An aperture according to claim 7, characterised in that: the surface of the inner hole of the diaphragm base body made of the heat conducting material is provided with a layer of light absorbing material.
9. A diaphragm according to any one of claims 1 to 3, wherein: the diaphragm substrate is made of light absorption materials.
10. A laser comprising a light source circuit, a laser base and a diaphragm according to any one of claims 1 to 9; wherein the content of the first and second substances,
the diaphragm is arranged on the laser base;
an accommodating space for accommodating the light source circuit is arranged in the laser base in an extending manner;
the light source circuit is used for generating laser with preset wavelength in a preset laser propagation direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111149357.2A CN113835310A (en) | 2021-09-29 | 2021-09-29 | Diaphragm and laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111149357.2A CN113835310A (en) | 2021-09-29 | 2021-09-29 | Diaphragm and laser |
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| Publication Number | Publication Date |
|---|---|
| CN113835310A true CN113835310A (en) | 2021-12-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111149357.2A Pending CN113835310A (en) | 2021-09-29 | 2021-09-29 | Diaphragm and laser |
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| CN109861063A (en) * | 2019-04-09 | 2019-06-07 | 武汉锐科光纤激光技术股份有限公司 | A kind of laser strike-machine device |
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| CN210524146U (en) * | 2019-08-30 | 2020-05-15 | 佛山市宏石激光技术有限公司 | Optical fiber laser head diaphragm |
| CN210894914U (en) * | 2019-12-05 | 2020-06-30 | 黄剑鸣 | Array type aperture structure and camera electronic equipment |
| CN215641912U (en) * | 2021-09-29 | 2022-01-25 | 深圳市先地图像科技有限公司 | Diaphragm and laser |
| CN215641913U (en) * | 2021-09-29 | 2022-01-25 | 深圳市先地图像科技有限公司 | Diaphragm and laser |
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2021
- 2021-09-29 CN CN202111149357.2A patent/CN113835310A/en active Pending
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| JPH0899187A (en) * | 1994-09-30 | 1996-04-16 | Mitsubishi Electric Corp | Lens cover for laser beam machine |
| JP2001071553A (en) * | 1999-09-01 | 2001-03-21 | Ricoh Co Ltd | Laser beam light source |
| CN201156091Y (en) * | 2007-12-29 | 2008-11-26 | 深圳市大族激光科技股份有限公司 | Collimation diaphragm |
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