CN113833765B - Rigidity-adjustable air-float guide rail - Google Patents
Rigidity-adjustable air-float guide rail Download PDFInfo
- Publication number
- CN113833765B CN113833765B CN202111197728.4A CN202111197728A CN113833765B CN 113833765 B CN113833765 B CN 113833765B CN 202111197728 A CN202111197728 A CN 202111197728A CN 113833765 B CN113833765 B CN 113833765B
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- air
- guide rail
- horizontal part
- coil
- cavity
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- 230000001105 regulatory effect Effects 0.000 abstract description 8
- 230000003993 interaction Effects 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an air-float guide rail with adjustable rigidity, and relates to the technical field of ultra-precise machinery. Including guide rail and carriage, the guide rail includes cavity and supporting part, and the supporting part sets up in cavity top both sides, and the carriage includes horizontal part and perpendicular portion, and horizontal part is parallel with the supporting part, has first air film clearance between horizontal part and the supporting part, and perpendicular portion sets up in horizontal part bottom side, and the cavity bottom sets up the coil, sets up the electro-magnet on the perpendicular portion, and horizontal part top sets up the regulation chamber, adjusts the intracavity and sets up the air pressure regulator, and the air pressure regulator is magnetostrictive actuator, and magnetostrictive actuator's flexible direction corresponds the magnetic field direction of coil. According to the air floatation guide rail provided by the invention, the guide rail is close to or far away from the slide carriage through interaction of the electromagnet and the coil, the bearing capacity of the air floatation guide rail is regulated, the air pressure in the regulating cavity is controlled to be prolonged or shortened through the air pressure regulator, and the air pressure in the first air film gap is changed to regulate the rigidity of the air floatation guide rail.
Description
Technical Field
The invention relates to the technical field of ultra-precision machinery, in particular to an air floatation guide rail with adjustable rigidity.
Background
The air-float guide rail is a precise mechanical component developed according to the gas lubrication technology, compressed air is filled in a gap between the sliding block and the guide rail to form a high-pressure air film, a certain supporting force is provided for a moving component, the sliding block does not contact when moving on the guide rail, smooth movement without friction and vibration can be realized, and the air-float guide rail has the characteristics of high movement precision, good thermal stability, cleanness, no pollution and the like. Based on the advantages, the air floatation guide rail is widely applied to the technical fields of measuring machines, space simulation devices, experimental measuring devices, semiconductor equipment, PCB equipment, photoetching machines, micro-tables and the like. When the gap (namely the thickness of the air film) between the sliding block and the guide rail is reduced, the pressure of the air film is increased, the bearing capacity of the air-float guide rail is increased, and the air-float guide rail has certain rigidity. That is, the load-bearing capacity and stiffness of the air bearing rail constitute one of the key factors in its performance in various applications. The problem of low rigidity of the air-float guide rail directly influences the motion precision and the anti-interference capability of the guide rail, and has great influence on the application and the performance of the air-float guide rail. With the development of ultra-precise movement and ultra-precise measurement technology, the requirement of the air floatation guide rail with adjustable rigidity is increasingly urgent, and the problem is solved.
Disclosure of Invention
The invention mainly aims to provide an air floatation guide rail with adjustable rigidity so as to solve the existing problems.
In order to solve the technical problems, the invention adopts the following technical scheme:
the rigidity-adjustable air floatation guide rail comprises a guide rail and a slide carriage, wherein the guide rail comprises a concave cavity and supporting parts, the supporting parts are arranged on two sides of the top of the concave cavity, the slide carriage comprises a horizontal part and a vertical part, the horizontal part is parallel to the supporting parts, a first air film gap is arranged between the horizontal part and the supporting parts, the vertical part is arranged on the bottom side of the horizontal part, the vertical part is vertical to the bottom surface of the concave cavity,
the bottom of the concave cavity is provided with a coil, the vertical part is provided with an electromagnet, the top end of the horizontal part is provided with an adjusting cavity, the adjusting cavity is internally provided with a pneumatic regulator, the pneumatic regulator is a magnetostrictive actuator, the telescoping direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil,
the upper surface of the horizontal part is provided with a first air inlet hole, the lower surface of the horizontal part is provided with a first throttling hole, and the first air inlet hole and the first throttling hole are communicated with the adjusting cavity.
Furthermore, guide plates are respectively arranged on two sides of the vertical part and are parallel to the side wall of the concave cavity, and a second air film gap is formed between the guide plates and the side wall of the concave cavity.
Further, a second air inlet hole is formed in the guide plate, a second throttling hole is formed in the side wall, corresponding to the side wall of the concave cavity, of the guide plate, and a small hole throttling device is arranged in the second throttling hole.
Further, a small orifice restrictor is arranged in the first orifice.
Further, the supporting portion is perpendicular to the concave cavity, and the horizontal portion is perpendicular to the perpendicular portion.
Further, the first and second air film gaps are each 5 μm to 30 μm.
Further, the number of the electromagnets is two, and the electromagnets are respectively arranged at the bottoms of the guide plates at two sides of the vertical part.
Further, the outside of the electromagnet is wrapped with a magnetic shielding sleeve, an opening is formed in the magnetic shielding sleeve, and the opening direction of the magnetic shielding sleeve corresponds to the magnetic field direction of the coil.
Compared with the prior art, the rigidity-adjustable air floatation guide rail provided by the invention has the following beneficial effects:
the coil is arranged on the guide rail, the electromagnet is arranged on the slide carriage, and the guide rail and the slide carriage are close to each other or far away from each other by the interaction of the electromagnet generating a permanent magnetic field and the coil generating an alternating magnetic field, namely the magnetic fields between the electromagnet and the coil generating an alternating magnetic field attract or repel each other, so that the size of a first air film gap is changed, the bearing capacity of the air floatation guide rail is increased or reduced, and finally the rigidity of the air floatation guide rail is changed;
the air pressure regulator is a magnetostrictive actuator, the air pressure regulator stretches or shortens in the magnetization direction, when the magnetic field of the coil passes through the air pressure regulator, the air pressure regulator stretches or shortens in the regulating cavity, so that the volume of the regulating cavity is changed, the air pressure in the regulating cavity is controlled, the pressure of air entering the first throttling hole from the regulating cavity is controlled, and the rigidity of the air floatation guide rail is regulated by changing the air pressure in the first air film gap.
Drawings
FIG. 1 is an exploded view of the overall structure of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
The device comprises a 1-guide rail, a 11-concave cavity, a 12-supporting part, a 13-coil, a 2-slide carriage, a 21-horizontal part, a 22-vertical part, a 23-electromagnet, a 24-magnetic shielding sleeve, a 25-adjusting cavity, a 26-air pressure regulator, a 27-first air inlet hole, a 28-first throttling hole, a 3-guide plate, a 31-second air inlet hole, a 32-second throttling hole, a 4-first air film gap, a 5-second air film gap and a 6-small hole throttling device.
Detailed Description
The technical scheme of the invention is further described below through the attached drawings and the embodiments.
Referring to fig. 1 to 2, the present invention provides an air-floating guide rail with adjustable rigidity, which comprises a guide rail 1 and a slide carriage 2, wherein the guide rail 1 comprises a concave cavity 11 and a supporting portion 12, the supporting portion 12 is disposed on two sides of the top of the concave cavity 11, the slide carriage 2 comprises a horizontal portion 21 and a vertical portion 22, the horizontal portion 21 is parallel to the supporting portion 12, a first air film gap 4 is provided between the horizontal portion 21 and the supporting portion 12, so that the slide carriage 2 does not have contact when moving on the guide rail 1, smooth movement without friction and vibration can be realized, the vertical portion 22 is disposed on the bottom side of the horizontal portion 21, the vertical portion 22 is perpendicular to the bottom surface of the concave cavity 11, in this embodiment, the supporting portion 12 is perpendicular to the concave cavity 11, and the horizontal portion 21 is perpendicular to the vertical portion 22, so that the whole air-floating guide rail runs more stably and vertically.
The bottom of the concave cavity 11 is provided with a coil 13, the vertical part 22 is provided with an electromagnet 23, the coil 13 and the electromagnet 23 are started, and the guide rail 1 and the slide carriage 2 are close to or far away from each other through the interaction of the electromagnet 23 generating a permanent magnetic field and the coil 13 generating an alternating magnetic field, namely, the magnetic fields between the two are mutually attracted or repelled, namely, the size of the first air film gap 4 is changed, the bearing capacity of the air floatation guide rail is increased or reduced, and finally, the rigidity of the air floatation guide rail is changed. In another embodiment, the coil 13 is also connected to a controller, and the magnitude and direction of the current input to the coil 13 are adjusted by the controller, so that the rigidity of the floating rail is quickly adjusted. The top of the horizontal part 21 is provided with an adjusting cavity 25, the adjusting cavity 25 is internally provided with a gas pressure regulator 26, the gas pressure regulator 26 is a magnetostrictive actuator, the telescopic direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil 13, the upper surface of the horizontal part 21 is provided with a first air inlet hole 27, the lower surface of the horizontal part 21 is provided with a first throttling hole 28, the first air inlet hole 27 and the first throttling hole 28 are both communicated with the adjusting cavity 25, the first throttling hole 28 is internally provided with a small-hole throttling device 6, the gas pressure regulator 26 can deform, so that the volume of the adjusting cavity 25 is changed, the gas pressure in the adjusting cavity 25 is controlled, the pressure of gas entering the first throttling hole 28 from the adjusting cavity 25 is controlled, and the rigidity of the air floating guide rail is adjusted by changing the gas pressure in the first air film gap 4. When the air pressure regulator 26 is contracted, the volume in the regulating cavity 25 will increase, the pressure of the air flowing into the first orifice 28 will decrease, the pressure of the air film will decrease, the slide carriage 2 will decrease accordingly, the first air film gap 4 between the guide rail 1 and the slide carriage 2 will decrease, the bearing capacity will decrease, and the rigidity will decrease, otherwise the rigidity of the air floating guide rail will increase. In the present invention, the air pressure regulator 26 is a magnetostrictive actuator, and the air pressure regulator 26 is stretched or shortened in the adjusting chamber 25 when the magnetic field of the coil 13 passes through the air pressure regulator 26.
Further, guide plates 3 are respectively arranged on two sides of the vertical portion 22, the guide plates 3 are parallel to the side wall of the concave cavity 11, a second air film gap 5 is formed between the guide plates 3 and the side wall of the concave cavity 11, a second air inlet hole 31 is formed in the guide plates 3, a second orifice 32 is formed in the side wall, corresponding to the side wall of the concave cavity 11, of the guide plates 3, small hole throttlers are arranged in the second orifice 32, two second air film gaps 5 are formed between the two guide plates 3 on two sides of the vertical portion 22 and the side wall of the concave cavity 11, and the second air film gap 5 and the first air film gap 4 jointly act to improve air film rigidity. The first air film gap 4 and the second air film gap 5 are both 5-30 μm.
Further, the number of the electromagnets 23 is two, the electromagnets are respectively arranged at the bottoms of the guide plates 3 at two sides of the vertical portion 22, the magnetic shielding sleeve 23 is wrapped outside the electromagnets 23, an opening is arranged on the magnetic shielding sleeve 24, and the opening direction of the magnetic shielding sleeve 24 corresponds to the magnetic field direction of the coil 13.
Working principle: according to the rigidity-adjustable air-float guide rail provided by the invention, external air simultaneously enters the first air inlet hole 27 and the second air inlet hole 31, the air enters the adjusting cavity 25 from the first air inlet hole 27, then enters the first air film gap 4 through the first throttling hole 28, the air enters the second throttling hole 32 through the second throttling hole 32, and then enters the second air film gap 5 through the second throttling hole 32, when the load of an object on the slide carriage 2 is increased or reduced, the rigidity of the air-float guide rail is required to be adjusted, the guide rail 1 is enabled to approach or separate from the slide carriage 2 through the interaction of the electromagnet 23 and the coil 13, the bearing capacity of the air-float guide rail can be adjusted, the air pressure in the adjusting cavity 25 is controlled to be prolonged or shortened through the air pressure regulator 26, the air pressure in the first air film gap 4 is changed, the rigidity of the air-float guide rail can be adjusted, the movement precision of the air-float guide rail is ensured, and the anti-interference capability of the air-float guide rail is improved.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiments according to the technical principles of the present invention still fall within the scope of the technical solutions of the present invention.
Claims (6)
1. The rigidity-adjustable air floatation guide rail is characterized by comprising a guide rail and a slide carriage, wherein the guide rail comprises a concave cavity and supporting parts, the supporting parts are arranged on two sides of the top of the concave cavity, the slide carriage comprises a horizontal part and a vertical part, the horizontal part is parallel to the supporting parts, a first air film gap is arranged between the horizontal part and the supporting parts, the vertical part is arranged on the bottom side of the horizontal part, the vertical part is vertical to the bottom surface of the concave cavity,
the bottom of the concave cavity is provided with a coil, the vertical part is provided with an electromagnet, the top end of the horizontal part is provided with an adjusting cavity, the adjusting cavity is internally provided with a pneumatic regulator, the pneumatic regulator is a magnetostrictive actuator, the telescoping direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil,
the upper surface of the horizontal part is provided with a first air inlet, the lower surface of the horizontal part is provided with a first throttling hole, and the first air inlet and the first throttling hole are communicated with the adjusting cavity;
the number of the electromagnets is two, and the electromagnets are respectively arranged at the bottoms of the guide plates at the two sides of the vertical part;
the outside of the electromagnet is wrapped with a magnetic shielding sleeve, an opening is formed in the magnetic shielding sleeve, and the opening direction of the magnetic shielding sleeve corresponds to the magnetic field direction of the coil;
the coil is also connected with a controller, and the magnitude and the direction of the input current of the coil are adjusted through the controller.
2. An air bearing guide rail with adjustable rigidity as claimed in claim 1, wherein two sides of the vertical part are respectively provided with a guide plate, the guide plates are parallel to the side wall of the concave cavity, and a second air film gap is arranged between the guide plates and the side wall of the concave cavity.
3. An air bearing guide rail with adjustable rigidity as claimed in claim 2, wherein a second air inlet hole is formed in the guide plate, a second orifice is formed in the side wall of the guide plate corresponding to the side wall of the concave cavity, and a small orifice restrictor is arranged in the second orifice.
4. An adjustable stiffness air rail according to claim 1 wherein a orifice restrictor is disposed within the first orifice.
5. An air bearing rail with adjustable rigidity as claimed in claim 1, wherein the supporting portion is arranged vertically to the concave cavity, and the horizontal portion is arranged vertically to the vertical portion.
6. An air bearing rail with adjustable rigidity as claimed in claim 2, wherein the first air film gap and the second air film gap are each 5 μm to 30 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111197728.4A CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111197728.4A CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113833765A CN113833765A (en) | 2021-12-24 |
| CN113833765B true CN113833765B (en) | 2024-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111197728.4A Active CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
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| CN (1) | CN113833765B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828565A (en) * | 1994-07-18 | 1996-02-02 | Sony Corp | Static pressure gas bearing |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
| CN102878203A (en) * | 2012-10-22 | 2013-01-16 | 中国科学院光电技术研究所 | Air suspension guide rail |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN110000570A (en) * | 2019-05-09 | 2019-07-12 | 南京艾提瑞精密机械有限公司 | A kind of air-float guide rail of diamond-shaped configuration |
| CN110762118A (en) * | 2019-11-21 | 2020-02-07 | 江苏集萃精凯高端装备技术有限公司 | Air-oil mixed static pressure guide rail |
| CN113417940A (en) * | 2021-07-23 | 2021-09-21 | 中国工程物理研究院机械制造工艺研究所 | Vacuum preloading air floatation supporting structure and application thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002349569A (en) * | 2001-05-25 | 2002-12-04 | Canon Inc | Static pressure bearing device and stage device using it |
-
2021
- 2021-10-14 CN CN202111197728.4A patent/CN113833765B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828565A (en) * | 1994-07-18 | 1996-02-02 | Sony Corp | Static pressure gas bearing |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
| CN102878203A (en) * | 2012-10-22 | 2013-01-16 | 中国科学院光电技术研究所 | Air suspension guide rail |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN110000570A (en) * | 2019-05-09 | 2019-07-12 | 南京艾提瑞精密机械有限公司 | A kind of air-float guide rail of diamond-shaped configuration |
| CN110762118A (en) * | 2019-11-21 | 2020-02-07 | 江苏集萃精凯高端装备技术有限公司 | Air-oil mixed static pressure guide rail |
| CN113417940A (en) * | 2021-07-23 | 2021-09-21 | 中国工程物理研究院机械制造工艺研究所 | Vacuum preloading air floatation supporting structure and application thereof |
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| Publication number | Publication date |
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| CN113833765A (en) | 2021-12-24 |
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