CN110336485A - A kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel - Google Patents
A kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel Download PDFInfo
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- CN110336485A CN110336485A CN201910620375.0A CN201910620375A CN110336485A CN 110336485 A CN110336485 A CN 110336485A CN 201910620375 A CN201910620375 A CN 201910620375A CN 110336485 A CN110336485 A CN 110336485A
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 38
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 239000011324 bead Substances 0.000 claims abstract description 15
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 7
- 229920006335 epoxy glue Polymers 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 9
- 230000004044 response Effects 0.000 abstract description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention discloses a kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel, two-dimensional micromotion platform is formed by mover, flexible support, pedestal and piezoelectric actuator, micromotion platform is fixed on the top of pedestal, magnet is fixed on the center of pedestal and passes through the through-hole of mover, the bead of mover corner location is coupled with the undermost wearing layer friction of plate, the ferromagnetic layer of plate time lower layer is attracted the precompression to be formed between mover by magnet, realizes across the scale precise motion of plate two-dimensional parallel under the sawtooth voltage effect of piezoelectric actuator.Structure of the invention is compact, easy to control, displacement resolution is high, fast response time, movement travel are big, can further promote application effect of the Precision Piezoelectric locating platform in the microscopic systems such as STM, AFM.
Description
Technical field
The invention belongs to Precision Piezoelectrics to drive micro-displacement platform equipment technical field, be specifically related to a kind of piezoelectric impact drive
Dynamic across the scale precisely locating platform of two-dimensional parallel.
Background technique
The fast development of micro-nano science and technology, the occasion for being related to carrying out small object precision positioning operation is more and more, and such as half
The electrology characteristic of transistor is tested in conductor manufacture, the mechanical performance of nanostructure characterizes, in MEMS in material science
The carrying assembly of element, capture injection of cell etc. in biomedical engineering, these occasions are often required that pacifies in small space
Fill precisely locating platform, more than the above displacement resolution of realization submicron order, the grade multiple degrees of freedom collaboration across scale stroke
Movement.What application was most at present is the micromotion platform based on piezoelectric actuator and flexible hinge, patent No. CN101887761B,
The two-dimensional parallel micromotion platform that CN102962683B is proposed, such platform have many advantages, such as that compact-sized, displacement resolution is high, but
Problem is still to be difficult to reach grade even if the motion range using displacement amplifying mechanism, platform.Further increase movement model
The most simple measures enclosed are using impact driving principle, and patent No. CN108696179A, CN107104608A uses Piezoelectric Driving
The stator of device and flexible hinge realizes that across scale precise motion, such platform have compact-sized, control to impact driving sliding block
The advantages that facilitating, but stator side and shoe contact are all used in designing, it can only realize the movement of single-degree-of-freedom, and multiple degrees of freedom
Movement will face the problems such as frictional force coupling, precompression applying mode.Therefore, it is necessary to combine micromotion platform and impact driving principle
A kind of cramped construction realization across scale precise motion of multiple degrees of freedom is designed, it is aobvious in STM, AFM etc. to promote Precision Piezoelectric locating platform
Application effect in micro-system.
Summary of the invention
The purpose of the present invention is to solve the above-mentioned problems, provides a kind of piezoelectric impact driving across scale essence of two-dimensional parallel
Close locating platform improves frictional force coupling and precompression applying mode, to realize in conjunction with micromotion platform and impact driving principle
Across the scale precise motion of two-dimensional parallel, the locating platform is with compact-sized, easy to control, displacement resolution is high, response speed
Fastly, the advantages that movement travel is big.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel, including micromotion platform, pedestal, plate and magnetic
Iron, the micromotion platform are made of mover, flexible support, pedestal and piezoelectric actuator；
The mover is set to the center of micromotion platform and is connect by four groups of flexible supports with pedestal, the piezoelectricity
Driver is mounted between flexible support and pedestal and mover is pushed to carry out the displacement of the direction XY；
The micromotion platform is fixed on the top of pedestal by pedestal, and the center of the mover is provided with through-hole, institute
State the through-hole that magnet is fixed on the center of pedestal and passes through mover；
The corner location of the mover is arranged symmetrically, and there are four beads；
The plate includes at least two layers, and lowest level is wearing layer, couples with the friction of the bead of mover, and secondary lower layer is ferromagnetic
Layer, is attracted the precompression to be formed between plate and mover by magnet.
Further, the quantity at least two of the piezoelectric actuator.
Further, the micromotion platform is generally rectangular, and flexible support described in every group includes orthogonal hinge
Structure；
The piezoelectric actuator is piezoelectric element, is provided with holding screw for adjusting with the contact position of the pedestal
Save the pretightning force of piezoelectric actuator；
The mover is generally rectangular, and the through-hole of center is circle, and the corner location of the mover is symmetrical arranged
There is counterbore, and bead is consolidated by epoxy glue respectively.
Further, the pedestal is generally rectangular, and the corner location of upper surface is provided with boss, the center of upper surface
Position is provided with counterbore, and the pedestal of the micromotion platform is fixedly mounted on the boss of pedestal by screw, and the magnet is circle
Cylindricality, bottom are fixedly arranged in the counterbore of base center by epoxy glue.
Beneficial effects of the present invention:
(1) the friction coupling of X-direction and Y-direction is formed using the wearing layer of four beads and plate symmetrical on mover
It closes, point-to-surface contact improves the contact stabilization between mover and plate, and symmetric configuration improves the one of four bead frictional force
Cause property eliminates the irregular rotation of plate caused by unbalanced moments；
(2) precompression between plate and mover is formed using magnetic attracting force, magnet is fixed on base center, ferromagnetic layer
With treadmill exercise, improve the stability of magnetic attracting force in the course of work, magnet passes through the through-hole of mover, reduce magnet with it is ferromagnetic
The distance of layer and improve the precompression between plate and mover, the through-hole of mover reduces the quality of mover and improves micromotion platform
Intrinsic frequency.
Detailed description of the invention
Present invention is further described in detail in the following with reference to the drawings and specific embodiments.
Fig. 1 is explosive view of the present invention.
Fig. 2 is side view of the present invention.
Fig. 3 is top view of the present invention.
Fig. 4 is displacement diagram of the micromotion platform of the present invention in X-direction.
Fig. 5 is the mode of oscillation schematic diagram of micromotion platform of the present invention.
Fig. 6 is the test result of step motion of the two-dimensional parallel of the present invention across scale precisely locating platform.
Fig. 7 is the test result of smooth motion of the two-dimensional parallel of the present invention across scale precisely locating platform.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1-3, a kind of piezoelectric impact driving across scale precisely locating platform of two-dimensional parallel, including micromotion platform 1,
Pedestal 2, plate 3 and magnet 4, the micromotion platform 1 are made of mover 5, flexible support 6, pedestal 7 and piezoelectric actuator 8；
The mover 5 is set to the center of micromotion platform 1 and is connect by four groups of flexible supports 6 with pedestal 7, described
Piezoelectric actuator 8 is mounted between adjacent flexible support 6 and pedestal 7 and mover 5 is pushed to realize the displacement of the direction XY；
The micromotion platform 1 is fixed on 2 top of pedestal by pedestal 7, and the center of the mover 5 is provided with through-hole,
The magnet 4 is fixed on the center of pedestal 2 and passes through the through-hole of mover 5；
The corner location of the mover 5 is arranged symmetrically, and there are four beads 9；
The plate 3 includes at least two layers, and lowest level is wearing layer 11, couples with the friction of the bead 9 of mover 5, secondary lower layer
For ferromagnetic layer 12, attracted the precompression to be formed between plate 3 and mover 5 by magnet；
The quantity at least two of the piezoelectric actuator 8, installation in that orthogonal direction, and push mover 5 to carry out respectively
The displacement of the direction XY；
The micromotion platform 1 is generally rectangular, and every group of flexible support 6 includes orthogonal hinge arrangement；
The piezoelectric actuator 8 is piezoelectric element, is provided with holding screw 10 for adjusting with the contact position of pedestal 7
Save the pretightning force of piezoelectric actuator 8；
The mover 5 is generally rectangular, and the through-hole of center is circle, and it is heavy that the corner location of mover 5 is symmetrically arranged with
Hole, and bead 9 is consolidated by epoxy glue respectively；
The pedestal 2 is generally rectangular, and the corner location of upper surface is provided with boss 13, the center setting of upper surface
There is counterbore 14, the pedestal 7 of the micromotion platform 1 is fixedly mounted on the boss 13 of pedestal 2 by screw, and the magnet 4 is
Cylinder, bottom are fixedly arranged in the counterbore 14 at 2 center of pedestal by epoxy glue.
One specific embodiment of the present embodiment includes the following steps:
By taking X-direction moves as an example, micromotion platform 1 is fixed on pedestal 7 in 8 one end of piezoelectric actuator of X-direction, the other end
Apply thrust under voltage effect in the flexible support 6 of X-direction, so that mover 5 be pushed to realize X-direction displacement；Magnet 4 is fixed on
The lower section of plate 3 is arranged in the center of pedestal 2 and the through-hole for passing through mover 5, and plate 3 is since ferromagnetic layer 12 is by the attraction of magnet 4
And it is attached on four beads 9 of mover 5 and forms the precompression between plate 3 and mover 5；The piezoelectric actuator 8 of X-direction exists
The lower sawtooth wave displacement for pushing mover 5 to generate X-direction of sawtooth voltage effect, the wearing layer 11 of plate 3 and the bead 9 of mover 5
Since precompression generates friction coupling, plate 3 is formed under low frequency sawtooth effect in the stick-slip step motion of X-direction, in height
Plate 3 is formed under the effect of frequency sawtooth wave in the sliding smooth motion of X-direction；
The piezoelectric actuator 8 in the direction XY independently generates mover 5 in the displacement in the direction XY, the wearing layer 11 of plate 3 with
Friction coupling can be generated in the direction XY respectively between the bead 9 of mover 5, plate 3 is by impact driving effect respectively in the direction XY
Stick-slip or sliding sliding movement are formed, realizes across the scale movement of the two-dimensional parallel of the precisely locating platform；
As shown in Figure 4,5, under typical material size, the piezoelectric actuator 8 of micromotion platform 1 can push mover 5 to generate 5 μm
Single-degree-of-freedom displacement, the eigentone of micromotion platform 1 are up to 11530Hz, it is meant that the precisely locating platform has higher
Displacement output ability and wider operating frequency range；
As shown in Figure 6,7, prototyping testing the result shows that, 100Hz sawtooth wave below, which acts on lower plate 3, can form stick-slip step
Into movement, it is about 3 μm that 50Hz sawtooth wave, which acts on lower step-wise displacement of the plate 3 in the direction XY, under the sawtooth wave effect of 100Hz or more
Plate 3 can form sliding continuous movement, and it is about 1.8m/s that 500Hz sawtooth wave, which acts on lower movement velocity of the plate 3 in the direction XY, table
High-resolution step motion can be thus achieved in the bright precisely locating platform, and the continuous movement of quick response may be implemented.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one implementation of the invention
In example or example.In the present specification, schematic expression of the above terms may not refer to the same embodiment or example.
Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples to close
Suitable mode combines.
Above content is only to structure of the invention example and explanation, affiliated those skilled in the art couple
Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from invention
Structure or beyond the scope defined by this claim, is within the scope of protection of the invention.
Claims (4)
1. a kind of piezoelectric impact drives across the scale precisely locating platform of two-dimensional parallel, it is characterised in that: including micromotion platform, bottom
Seat, plate and magnet, the micromotion platform are made of mover, flexible support, pedestal and piezoelectric actuator；
The mover is set to the center of micromotion platform and is connect by four groups of flexible supports with pedestal, the Piezoelectric Driving
Device is mounted between flexible support and pedestal and mover is pushed to carry out the displacement of the direction XY；
The micromotion platform is fixed on the top of pedestal by pedestal, and the center of the mover is provided with through-hole, the magnetic
Center of the ferropexy in pedestal and the through-hole across mover；
The corner location of the mover is arranged symmetrically, and there are four beads；
The plate includes at least two layers, and lowest level is wearing layer, couples with the friction of the bead of mover, and secondary lower layer is ferromagnetic layer,
Attracted the precompression to be formed between plate and mover by magnet.
2. a kind of piezoelectric impact according to claim 1 drives across the scale precisely locating platform of two-dimensional parallel, feature exists
In: the quantity at least two of the piezoelectric actuator, installation in that orthogonal direction, and push mover to carry out XY direction position respectively
It moves.
3. a kind of piezoelectric impact according to claim 1 drives across the scale precisely locating platform of two-dimensional parallel, feature exists
In: the micromotion platform is generally rectangular, and flexible support described in every group includes orthogonal hinge arrangement；
The piezoelectric actuator be piezoelectric element, with the contact position of the pedestal be provided with holding screw for adjust pressure
The pretightning force of electric drive；
The mover is generally rectangular, and the through-hole of center is circle, and it is heavy that the corner location of the mover is symmetrically arranged with
Hole, and bead is consolidated by epoxy glue respectively.
4. a kind of piezoelectric impact according to claim 1 drives across the scale precisely locating platform of two-dimensional parallel, feature exists
In: the pedestal is generally rectangular, and the corner location of upper surface is provided with boss, and it is heavy that the center of upper surface is provided with
The pedestal in hole, the micromotion platform is fixedly mounted on the boss of pedestal by screw, and the magnet is cylinder, and bottom passes through
Epoxy glue is fixedly arranged in the counterbore of base center.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910620375.0A CN110336485B (en) | 2019-07-10 | 2019-07-10 | Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform |
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| CN201910620375.0A CN110336485B (en) | 2019-07-10 | 2019-07-10 | Piezoelectric impact driven two-dimensional parallel cross-scale precision positioning platform |
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| CN110336485B CN110336485B (en) | 2020-12-11 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111451791A (en) * | 2020-03-24 | 2020-07-28 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
| CN112067850A (en) * | 2020-08-27 | 2020-12-11 | 华中科技大学 | Two-dimensional nanometer positioning platform |
| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN112994512A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
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| CN112994512A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
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