CN113737149A - Continuous vacuum coating sealing lock for metal strip - Google Patents
Continuous vacuum coating sealing lock for metal strip Download PDFInfo
- Publication number
- CN113737149A CN113737149A CN202010465269.2A CN202010465269A CN113737149A CN 113737149 A CN113737149 A CN 113737149A CN 202010465269 A CN202010465269 A CN 202010465269A CN 113737149 A CN113737149 A CN 113737149A
- Authority
- CN
- China
- Prior art keywords
- sealing
- rollers
- subchamber
- class
- lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 190
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 63
- 239000002184 metal Substances 0.000 title claims abstract description 63
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 35
- 229910000831 Steel Inorganic materials 0.000 claims description 9
- 239000010959 steel Substances 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000003044 adaptive effect Effects 0.000 claims description 2
- 239000013536 elastomeric material Substances 0.000 claims 2
- 238000000034 method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 238000007747 plating Methods 0.000 description 10
- 238000005265 energy consumption Methods 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 239000013013 elastic material Substances 0.000 description 4
- 239000010960 cold rolled steel Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 239000007888 film coating Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229910000797 Ultra-high-strength steel Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- -1 zinc-aluminum-magnesium Chemical compound 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Abstract
The invention discloses a continuous vacuum coating sealing lock for a metal strip, which comprises a detachable upper sealing cover, a detachable lower sealing cover and a sealing roller arranged between the upper sealing cover and the lower sealing cover, wherein shaft shells matched with the sealing roller are arranged on the upper sealing cover and the lower sealing cover; the inner surface of the shaft shell is provided with a shaft shell flexible layer; the sealing rollers comprise a plurality of upper sealing rollers and a plurality of lower sealing rollers, the upper sealing rollers and the lower sealing rollers are arranged in a staggered mode, sealing roller flexible layers are arranged on the upper sealing rollers and the lower sealing rollers, and the sealing roller flexible layers of the upper sealing rollers are in contact with the surfaces of the sealing roller flexible layers of the lower sealing rollers; a sub-chamber is formed between every 3 adjacent sealing rollers; the sub-chamber is connected with a vacuum pump; the metal strip passes between the upper sealing roll and the lower sealing roll. According to the continuous vacuum coating sealing lock for the metal strip, the inlet chamber is divided into a plurality of sub-chambers, and the shaft shell form, the shaft shell flexible layer and the sealing roller flexible layer are adopted for sealing, so that the vacuumizing efficiency is greatly improved.
Description
Technical Field
The invention relates to the field of vacuum plating equipment, in particular to a continuous vacuum coating sealing lock for a metal strip, which is mainly applied to a metal strip inlet and/or outlet on vacuum plating equipment for vacuum coating on the surface of the continuously running metal strip.
Background
When the metal strip is used, the corrosion resistance of the metal strip is improved by plating a corrosion-resistant coating on the surface of the metal strip so as to prolong the service life of the metal strip; the material and application of the metal strip may vary with the selected coating material and coating technique, for example, the coating material may be zinc, zinc-aluminum-magnesium, aluminum-silicon, etc., and the coating technique may be hot-dip, electroplating, vacuum plating, etc. For mild steel, the electroplating process has the problems of difficult production of a thick coating, high energy consumption, wastewater discharge in the electroplating process and the like; the hot-dip technology has the problems of difficult speed improvement, poor platability of steel containing B and the like; for common high-strength steel (less than 780MPa), the electroplating process has the problems of difficult improvement of the thickness of a plating layer, large energy consumption, wastewater discharge in the electroplating process and the like; the hot-dip process has the problems of high alloy content, poor platability of steel containing B, limited speed and the like. For ultrahigh strength steel (greater than or equal to 780MPa), the problems of serious hydrogen embrittlement, difficult improvement of the thickness of a plating layer and the like exist in an electroplating process; the hot-dip plating process has the problems of poor platability, high alloy content, difficulty in improving the strength level, hydrogen embrittlement and the like.
Compared with electroplating and hot-dip plating processes, the vacuum coating has the advantages of environmental protection, good film performance, diversity of platable substances and the like; in recent years, with the wide application of vacuum coating technology in the industries of electronics, glass, plastics and the like and the requirements on the aspects of continuous coating, high efficiency, large-scale production and the like, the research on the continuous vacuum coating technology of metal strips is gradually turned to at home and abroad, and the research finds that the continuous vacuum coating technology of metal strips has high efficiency, good coating performance and little environmental pollution; in order to realize the continuous vacuum coating production of the metal strip, a dynamic sealing device needs to be developed to realize that the metal strip continuously enters a vacuum environment from an atmospheric environment and then enters the atmospheric environment from the vacuum environment.
In prior studies, such as application No. 200480014221.9, a sealing lock for the deposition on preferably metallic, endless strips in a vacuum chamber is disclosed, the metal roller being mounted on a carriage fixed to the lid and being immovable like the latter; the rollers of the same pair have their axes arranged in the same vertical plane and have different diameters, the position of the roller with the smaller diameter being alternately higher and lower when passing from a given roller pair to the next; the support brackets for the two rollers of the same pair have a transverse projection towards the centre, which defines a second gap with respect to the clearance of the foundation for the rollers; also, for example, application No. 201010568966.7 discloses a vacuum plating sealing device, which comprises a partition board dividing a box body into a plurality of chambers, and upper and lower rollers at the opening of the partition board, wherein a sealing seat is arranged at the opening of the partition board, the sealing seat is communicated with the chamber at the other side of the partition board, a sealing element is arranged between the sealing seat and the upper and lower rollers, and the partition board, the sealing seat, the upper and lower rollers and the sealing element form a sealing chamber; the device realizes that each chamber is relatively sealed in the vacuum plating and conveying of the coiled steel plate, and the method of gradually improving the vacuum degree is adopted to achieve the aim of high vacuum degree. Although the above solution is designed for a vacuum-tight lock, the following problems also exist: 1. the vacuum cavity is large, and the energy consumption is high during vacuum pumping; 2. the sealing performance between adjacent cavities is not good enough, and the vacuumizing difficulty is large.
In view of the above circumstances, it is desirable to design a novel sealing lock for continuous vacuum coating of metal strips, which has small vacuum cavity, good sealing performance of adjacent cavities, small difficulty during vacuum pumping and low energy consumption.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a continuous vacuum coating sealing lock for a metal strip.
In order to achieve the purpose, the invention adopts the following technical scheme:
a continuous vacuum coating sealing lock for a metal strip comprises a detachable upper sealing cover, a detachable lower sealing cover and a sealing roller arranged between the upper sealing cover and the lower sealing cover, wherein shaft housings which are matched with the sealing roller are arranged on the upper sealing cover and the lower sealing cover; the inner surface of the shaft shell is provided with a shaft shell flexible layer;
the sealing rollers comprise a plurality of upper sealing rollers and a plurality of lower sealing rollers, the upper sealing rollers and the lower sealing rollers are arranged in a staggered mode, sealing roller flexible layers are arranged on the upper sealing rollers and the lower sealing rollers, and the sealing roller flexible layers of the upper sealing rollers are in contact with the surfaces of the sealing roller flexible layers of the lower sealing rollers; a subchamber is formed between every 3 adjacent sealing rollers; the sub-chambers are connected with a vacuum pump;
the metal strip passes between the upper sealing roller and the lower sealing roller.
Preferably, the sealing roller is detachably mounted on bearings arranged on the upper sealing cover and the lower sealing cover.
Preferably, the lowest pressure in said subchambers is not less than 10-3Pa。
Preferably, the subchambers include a stage 1 subchamber, a stage 2 subchamber, a stage 3 subchamber, a stage 4 subchamber, and a stage 5 subchamber.
Preferably, the metal strip enters the sealing lock from the atmospheric pressure environment and sequentially passes through the grade 1 subchamber, the grade 2 subchamber, the grade 3 subchamber, the grade 4 subchamber and the grade 5 subchamber, and the vacuum degrees of the grade 1 subchamber, the grade 2 subchamber, the grade 3 subchamber, the grade 4 subchamber and the grade 5 subchamber are gradually increased.
Preferably, the upper sealing cover and the lower sealing cover are made of stainless steel.
Preferably, the sealing roller is a metal sealing roller.
Preferably, the shaft housing flexible layer and the sealing roller flexible layer are made of elastic materials.
Preferably, the elastic material is rubber.
Preferably, the metal strip comprises a strip steel, an aluminum strip, a copper strip and a stainless steel strip.
The invention has the beneficial effects that:
1. according to the sealing lock for the continuous vacuum coating on the metal strip, the inlet chamber is divided into the plurality of sub-chambers, and the shaft shell form, the shaft shell flexible layer and the sealing roller flexible layer are adopted for sealing, so that air leakage among the sub-chambers is reduced, the vacuumizing efficiency is improved, and the energy consumption is reduced;
2. according to the continuous vacuum coating sealing lock for the metal strip, the shaft shell flexible layer is arranged on the inner surface of the shaft shell, and the sealing roller flexible layers are arranged on the surfaces of the upper sealing roller and the lower sealing roller, so that the contact surfaces between the shaft shell and the sealing rollers, between the upper sealing roller and the lower sealing roller, and between the sealing rollers and the metal strip are elastic, close fit can be formed on the contact surfaces, and good sealing can be formed between sub-chambers and between the metal strip and the sealing rollers.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a schematic structural diagram of a continuous vacuum coating sealing lock for a metal strip according to the embodiment.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way.
As shown in fig. 1, the continuous vacuum coating sealing lock for metal strips provided by the embodiment comprises an upper sealing cover 1 and a lower sealing cover 10 which are detachable, and a sealing roller arranged between the upper sealing cover 1 and the lower sealing cover 10;
the upper sealing cover 1 and the lower sealing cover 10 are made of stainless steel; the upper sealing cover 1 and the lower sealing cover 10 are provided with shaft shells 2 which are adaptive to the sealing rollers, namely, the corresponding surfaces of the upper sealing cover 1 and the lower sealing cover 10 and the sealing rollers are arranged in the form of the shaft shells 2; the inner surface of the shaft shell 2 is provided with a shaft shell flexible layer 3; the shaft shell flexible layer 3 is made of elastic materials such as rubber;
the sealing rollers comprise a plurality of upper sealing rollers 6 and a plurality of lower sealing rollers 13, the upper sealing rollers 6 and the lower sealing rollers 13 are arranged in a staggered mode, the sealing roller flexible layers 3 are arranged on the upper sealing rollers 6 and the lower sealing rollers 13, and the sealing roller flexible layers 3 of the upper sealing rollers 6 are in contact with the surfaces of the sealing roller flexible layers 3 of the lower sealing rollers 13; wherein the sealing roller flexible layer 3 is made of elastic material, such as rubber; the sealing roller is fastened to shaft seats on the side surfaces of the upper sealing cover 1 and the lower sealing cover 10, a bearing 7 for mounting the sealing roller is arranged on each shaft seat, and the sealing roller can be detached; the sealing roller is a metal sealing roller.
A sub-chamber is formed between every 3 adjacent sealing rollers; the sub-chamber is connected with a vacuum pump; the subchambers comprise a stage 1 subchamber 5, a stage 2 subchamber 11, a stage 3 subchamber 8, a stage 4 subchamber 12 and a stage 5 subchamber 9, wherein the lowest pressure in the subchambers is not lower than 10-3Pa, and vacuumizing through a connected vacuum pump to ensure that the coating environment of the metal strip is high vacuum.
The metal strip passes between the upper sealing roller 6 and the lower sealing roller 13, and the metal strip passes through the sealing rollers in an S shape due to the staggered arrangement of the upper sealing roller 6 and the lower sealing roller 13; the metal strip enters the sealing lock from the atmospheric pressure environment and sequentially passes through the stage 1 subchamber 5, the stage 2 subchamber 11, the stage 3 subchamber 8, the stage 4 subchamber 12 and the stage 5 subchamber 9, and the vacuum degrees of the stage 1 subchamber 5, the stage 2 subchamber 11, the stage 3 subchamber 8, the stage 4 subchamber 12 and the stage 5 subchamber 9 are gradually increased.
The metal strips include strip steel, aluminum strips, copper strips, stainless steel strips and the like.
Because the shaft shell flexible layer 3, the upper sealing roller 6 and the sealing roller flexible layer 3 are arranged on the surfaces of the shaft shell 2 of the upper sealing cover 1 and the shaft shell 2 of the lower sealing cover 10, the shaft shell flexible layer 3 and the sealing roller flexible layer 3 are closely matched, the air leakage between sub-chambers is reduced, the vacuumizing efficiency in the sub-chambers is improved, and the energy consumption is reduced; in addition, when no metal strip passes through, the sealing roller flexible layer 3 of the upper sealing roller 6 and the sealing roller flexible layer 3 of the lower sealing roller 13 are in direct contact in the width direction of the metal strip and are extruded and deformed under certain pressure, so that better sealing is formed on the contact surface; when the metal strip passes through, the sealing roller flexible layer 3 is in contact with the metal strip and is extruded and deformed under certain pressure, so that better sealing can be formed on the contact surface.
Taking the cold-rolled steel strip as an example, the cold-rolled steel strip after surface cleaning is welded with the tail part of the previous roll of cold-rolled steel strip and is pulled by the previous roll of steel strip to move. In this embodiment useIn the continuous vacuum coating sealing lock on the metal strip, the shaft shell flexible layer 3 on the inner surface of the shaft shell 2 and the sealing roller flexible layers 3 on the surfaces of the upper sealing roller 13 and the lower sealing roller 13 are made of rubber; the cold-rolled strip steel enters a film coating chamber after passing through a stage 1 sub-chamber 5, a stage 2 sub-chamber 11, a stage 3 sub-chamber 8, a stage 4 sub-chamber 12 and a stage 5 sub-chamber 9 in sequence, and plasma cleaning, film coating and other treatment are carried out in the film coating chamber; wherein, the 1-stage sub-chamber 5 adopts a rotary vane pump to 2000Pa, the 2-stage sub-chamber 11 adopts a rotary vane pump and a Roots pump to 100Pa, and the 3-stage sub-chamber 8 adopts a rotary vane pump and a Roots pump to 2 Pa; the 4-stage sub-chamber 12 is pumped to 5 × 10 by using rotary vane pump, roots pump and molecular pump-2Pa, 5-stage sub-chamber 9 sub-chamber adopting rotary vane pump, Roots pump and molecular pump to 5 × 10-3Pa; the coating chamber adopts a rotary vane pump, a Roots pump and a molecular pump to 9 x 10-4Pa。
According to the sealing lock for the continuous vacuum coating on the metal strip, the inlet chamber is divided into the plurality of sub-chambers, and the shaft shell form, the shaft shell flexible layer and the sealing roller flexible layer are adopted for sealing, so that air leakage among the sub-chambers is reduced, the vacuumizing efficiency is improved, and the energy consumption is reduced; this a sealed lock of continuous vacuum coating for on metal strip sets up the flexible layer of sealed roller through the surface that sets up axle housing flexible layer and upper and lower sealed roller at the axle housing internal surface for the contact surface between axle housing and sealed roller, upper seal roller and lower sealed roller, sealed roller and the metal strip has elasticity, can form in the contact surface and cooperate closely, guarantees between each subchamber and the contact surface of metal strip and sealed roller forms fine sealed.
The continuous vacuum coating sealing lock for the metal strip is mainly applied to the field of metal strip vacuum coating, is used for sealing the continuous vacuum coating of the metal strip, and can improve the vacuum pumping efficiency and reduce the energy consumption; the invention has strong industrial applicability, and can be output in a set with a vacuum coating technology in the future.
Although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (10)
1. A continuous vacuum coating sealing lock used on a metal strip comprises a detachable upper sealing cover, a detachable lower sealing cover and a sealing roller arranged between the upper sealing cover and the lower sealing cover, and is characterized in that,
the upper sealing cover and the lower sealing cover are provided with shaft housings which are adaptive to the sealing rollers; the inner surface of the shaft shell is provided with a shaft shell flexible layer;
the sealing rollers comprise a plurality of upper sealing rollers and a plurality of lower sealing rollers, the upper sealing rollers and the lower sealing rollers are arranged in a staggered mode, sealing roller flexible layers are arranged on the upper sealing rollers and the lower sealing rollers, and the sealing roller flexible layers of the upper sealing rollers are in contact with the surfaces of the sealing roller flexible layers of the lower sealing rollers; a subchamber is formed between every 3 adjacent sealing rollers; the sub-chambers are connected with a vacuum pump;
the metal strip passes between the upper sealing roller and the lower sealing roller.
2. A continuous vacuum coating sealing lock for metal strips according to claim 1, wherein said sealing roller is detachably mounted on bearings provided on said upper and lower sealing covers.
3. The continuous vacuum coating seal lock on metal strip of claim 1, wherein the minimum pressure in said subchambers is not less than 10 ≤-3Pa。
4. The continuous vacuum coating hermetic lock for metal strips according to claim 1, wherein said sub-chambers comprise a class 1 sub-chamber, a class 2 sub-chamber, a class 3 sub-chamber, a class 4 sub-chamber and a class 5 sub-chamber.
5. The continuous vacuum coating sealing lock for metal strips according to claim 4, wherein the metal strip enters the sealing lock from the atmospheric pressure environment through the class 1 subchamber, the class 2 subchamber, the class 3 subchamber, the class 4 subchamber and the class 5 subchamber in sequence, and the vacuum degrees of the class 1 subchamber, the class 2 subchamber, the class 3 subchamber, the class 4 subchamber and the class 5 subchamber are increased gradually.
6. The continuous vacuum coating sealing lock for metal strips according to claim 1, wherein the upper sealing cover and the lower sealing cover are made of stainless steel.
7. A continuous vacuum coating sealing lock for metal strips according to claim 1, characterised in that said sealing rolls are metal sealing rolls.
8. The continuous vacuum coating seal lock on metal strip of claim 1 wherein said flexible layer of mandrel shell and said flexible layer of sealing roll are made of elastomeric material.
9. The continuous vacuum coating seal lock on metal strips of claim 8 wherein said elastomeric material is rubber.
10. The continuous vacuum coating sealing lock for metal strips according to any one of claims 1 to 9, wherein the metal strips comprise steel strips, aluminum strips, copper strips and stainless steel strips.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010465269.2A CN113737149A (en) | 2020-05-28 | 2020-05-28 | Continuous vacuum coating sealing lock for metal strip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010465269.2A CN113737149A (en) | 2020-05-28 | 2020-05-28 | Continuous vacuum coating sealing lock for metal strip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113737149A true CN113737149A (en) | 2021-12-03 |
Family
ID=78723946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010465269.2A Pending CN113737149A (en) | 2020-05-28 | 2020-05-28 | Continuous vacuum coating sealing lock for metal strip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113737149A (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3367667A (en) * | 1965-07-16 | 1968-02-06 | United States Steel Corp | Roll seal for vacuum strip-treating chamber |
| US3904553A (en) * | 1973-08-20 | 1975-09-09 | Corning Glass Works | Thermally stable composite base metal oxide catalysts |
| GB1451704A (en) * | 1974-06-28 | 1976-10-06 | Head Wrightson & Co Ltd | Strip cooling |
| GB2084264A (en) * | 1980-07-30 | 1982-04-07 | Hitachi Ltd | Continuous vacuum treating apparatus |
| US4501428A (en) * | 1983-06-17 | 1985-02-26 | Hitachi, Ltd. | Roll seal boxes for continuous vacuum treating apparatus |
| JPS62169830A (en) * | 1986-01-22 | 1987-07-27 | Matsushita Electric Works Ltd | Vacuum sealing apparatus |
| JPS637368A (en) * | 1986-06-27 | 1988-01-13 | Hitachi Ltd | Side sealing device for roll type sealing system |
| CN1198213A (en) * | 1995-09-29 | 1998-11-04 | 松下电器产业株式会社 | Gas senser and manufacturing process thereof |
| US5842855A (en) * | 1995-02-16 | 1998-12-01 | Nisshin Steel Co., Ltd. | Sealing apparatus for inlet/outlet of compartment of continuous heat treatment furnace, continuous vacuum evaporation facility or the like |
| DE29819627U1 (en) * | 1998-11-04 | 1999-01-28 | Harenberg Holger | Lock for dust protection housing |
| EP1479789A1 (en) * | 2003-05-23 | 2004-11-24 | Recherche Et Developpement Du Groupe Cockerill Sambre | Sealing lock for an in-line vaccum deposition apparatus |
| US20070107781A1 (en) * | 2004-05-25 | 2007-05-17 | Stefan Hein | Lock valve in particular for a strip processing unit |
| CN102080215A (en) * | 2010-12-01 | 2011-06-01 | 常州常松金属复合材料有限公司 | Vacuum deposition sealing device |
| DE102014103613A1 (en) * | 2014-03-17 | 2015-09-17 | Von Ardenne Gmbh | Vacuum lock of a vacuum treatment plant |
-
2020
- 2020-05-28 CN CN202010465269.2A patent/CN113737149A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3367667A (en) * | 1965-07-16 | 1968-02-06 | United States Steel Corp | Roll seal for vacuum strip-treating chamber |
| US3904553A (en) * | 1973-08-20 | 1975-09-09 | Corning Glass Works | Thermally stable composite base metal oxide catalysts |
| GB1451704A (en) * | 1974-06-28 | 1976-10-06 | Head Wrightson & Co Ltd | Strip cooling |
| GB2084264A (en) * | 1980-07-30 | 1982-04-07 | Hitachi Ltd | Continuous vacuum treating apparatus |
| US4501428A (en) * | 1983-06-17 | 1985-02-26 | Hitachi, Ltd. | Roll seal boxes for continuous vacuum treating apparatus |
| JPS62169830A (en) * | 1986-01-22 | 1987-07-27 | Matsushita Electric Works Ltd | Vacuum sealing apparatus |
| JPS637368A (en) * | 1986-06-27 | 1988-01-13 | Hitachi Ltd | Side sealing device for roll type sealing system |
| US5842855A (en) * | 1995-02-16 | 1998-12-01 | Nisshin Steel Co., Ltd. | Sealing apparatus for inlet/outlet of compartment of continuous heat treatment furnace, continuous vacuum evaporation facility or the like |
| CN1198213A (en) * | 1995-09-29 | 1998-11-04 | 松下电器产业株式会社 | Gas senser and manufacturing process thereof |
| DE29819627U1 (en) * | 1998-11-04 | 1999-01-28 | Harenberg Holger | Lock for dust protection housing |
| EP1479789A1 (en) * | 2003-05-23 | 2004-11-24 | Recherche Et Developpement Du Groupe Cockerill Sambre | Sealing lock for an in-line vaccum deposition apparatus |
| CN1795288A (en) * | 2003-05-23 | 2006-06-28 | 于西纳股份有限公司 | Sealing lock for an in-line vaccum deposition apparatus |
| US20070107781A1 (en) * | 2004-05-25 | 2007-05-17 | Stefan Hein | Lock valve in particular for a strip processing unit |
| CN102080215A (en) * | 2010-12-01 | 2011-06-01 | 常州常松金属复合材料有限公司 | Vacuum deposition sealing device |
| DE102014103613A1 (en) * | 2014-03-17 | 2015-09-17 | Von Ardenne Gmbh | Vacuum lock of a vacuum treatment plant |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113737149A (en) | Continuous vacuum coating sealing lock for metal strip | |
| JP2003297380A (en) | Stainless steel separator for fuel cell | |
| CA2524938C (en) | Sealing lock for an in vacuo line for deposition on a flat product | |
| CN109957783B (en) | High-efficiency linear vacuum coating assembly line for workpiece surface coating | |
| EP3876307A1 (en) | Film and preparation process | |
| CN102453929A (en) | Closed-type electro-winning cell | |
| CN101487111A (en) | Winding film coating machine | |
| CN210122596U (en) | Anodic oxidation device for die-casting aluminum alloy | |
| KR100438941B1 (en) | Multi-layer deposition method using plasma | |
| CN210886217U (en) | Split type multi-process vacuum coating device | |
| EP3872907B1 (en) | Film and manufacturing process thereof | |
| EA035334B1 (en) | Vacuum coating installation and coating method | |
| CN207828396U (en) | A kind of tin stove for copper wire tin-plating | |
| CN116564778A (en) | Multi-level vacuum chamber structure | |
| CN111893455A (en) | Metal substrate carbon nano-film material manufacturing equipment and preparation method thereof | |
| JP2000192286A (en) | Masking device for surface treatment of cylinder block | |
| CN212864959U (en) | Large-scale superhard nano-film coating equipment | |
| CN220057079U (en) | Surface post-treatment machine coating groove internal submerged roller end sealing structure | |
| CN1543516A (en) | Surface treatment system and method | |
| CN111118456B (en) | Strip steel vacuum coating equipment and process | |
| JP2007186775A (en) | Film-forming method and apparatus | |
| CN117587404A (en) | Clamp type horizontal coating equipment for battery piece | |
| CN116356272A (en) | Magnetron sputtering double-sided coating device and method | |
| CN111285614A (en) | Tubular glass product vacuum coating device | |
| CN112011770A (en) | Fast beat high brightness reflectivity environmental protection aluminum mirror production line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20211203 |
|
| WD01 | Invention patent application deemed withdrawn after publication |