CN113734806A - Vacuum adsorption device, conveying mechanical arm and conveying system - Google Patents
Vacuum adsorption device, conveying mechanical arm and conveying system Download PDFInfo
- Publication number
- CN113734806A CN113734806A CN202111034016.0A CN202111034016A CN113734806A CN 113734806 A CN113734806 A CN 113734806A CN 202111034016 A CN202111034016 A CN 202111034016A CN 113734806 A CN113734806 A CN 113734806A
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- base
- suction nozzle
- communicating hole
- communicated
- vacuum adsorption
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 48
- 238000004891 communication Methods 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 12
- 229920001296 polysiloxane Polymers 0.000 claims 2
- 239000011521 glass Substances 0.000 abstract description 35
- 239000000758 substrate Substances 0.000 abstract description 35
- 239000007779 soft material Substances 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000741 silica gel Substances 0.000 description 3
- 229910002027 silica gel Inorganic materials 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/42—Soft elements to prevent damage to articles, e.g. bristles, foam
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A vacuum adsorption device comprises a conveying mechanical arm and a conveying system of the vacuum adsorption device, wherein the vacuum adsorption device is provided with a cavity structure, so that foreign matters are easy to remain in the cavity structure and cannot be in contact with a glass substrate, the glass substrate is prevented from being cut by the foreign matters, and the phenomenon (mura) of uneven brightness of the contact part of a product and the cavity structure is avoided due to the fact that the contact area of the cavity structure and the glass substrate is small. In addition, the cavity structure is made of soft materials, so even if foreign matters remain on the edge of the cavity structure, the characteristic of the soft materials can prevent a gap from being generated between the glass substrate and the vacuum adsorption device, and the reduction of the adsorption force of the vacuum adsorption device on the glass substrate due to the influence of the foreign matters is avoided.
Description
[ technical field ] A method for producing a semiconductor device
The application relates to the field of panel carrying, in particular to a vacuum adsorption device, a carrying mechanical arm comprising the vacuum adsorption device and a carrying system.
[ background of the invention ]
In the liquid crystal panel industry, a carrying robot is usually used to carry a glass substrate, however, referring to fig. 1, in the existing production process, the contact area between the circular suction cup 900 for supporting the glass substrate on the arm fork and the glass substrate is large, so that the uneven brightness (mura) appears on the contact surface between the product and the circular suction cup 900, in addition, the polarizing plate of the glass substrate is easily punctured by the foreign matter remaining on the circular suction cup 900, and the foreign matter can cause the gap between the glass substrate and the circular suction cup 900, so that the vacuum adsorption function is abnormal, thereby affecting the adsorption effect of the suction cup on the glass substrate.
Therefore, a new type of adsorption device needs to be developed to solve the above technical problems.
[ summary of the invention ]
In order to solve the above problem, the present application provides a vacuum adsorption apparatus, comprising: the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole; the vent pipe is communicated with the second communication hole; the sealing element is arranged in the groove; a base, the periphery of the base being hermetically disposed above the base; the suction nozzle is arranged on the base; the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
Furthermore, the orthographic projection shape of the cavity structure is rectangular, oval or polygonal, and the material of the suction nozzle is silica gel.
Furthermore, four corners of the base are provided with first holes, four corners of the base are provided with second holes, and the positions of the first holes correspond to the positions of the second holes.
Further, the base has a protrusion, the suction nozzle is fixed on the base through the protrusion, and the sealing member is an O-ring.
In order to solve the above problem, the present application further provides a transfer robot including: a vertical shaft; the moving element is arranged on one side of the vertical shaft; the arm shaft is arranged on one side of the moving element; and a plurality of teeth fork, with the arm axle be connected and with the arm axle extends toward same direction, wherein, every one surface of teeth fork is provided with the concave surface, it has vacuum adsorption device to inlay in the concave surface, vacuum adsorption device includes by supreme down: the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole; the vent pipe is communicated with the second communication hole; the sealing element is arranged in the groove; a base, the periphery of the base being hermetically disposed above the base; the suction nozzle is arranged on the base; the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
Furthermore, the edge of the upper part of the suction nozzle is higher than the upper surface of the base.
Furthermore, the orthographic projection shape of the cavity structure is rectangular, oval or polygonal, and the material of the suction nozzle is silica gel.
Furthermore, four corners of the base are provided with first holes, four corners of the base are provided with second holes, and the positions of the first holes correspond to the positions of the second holes.
Further, the base has a protrusion, the suction nozzle is fixed on the base through the protrusion, and the sealing member is an O-ring.
In order to solve the above problem, the present application also provides a conveyance system including:
a running shaft; the fixing frame is arranged on the walking shaft; the rotating shaft is arranged on the fixed frame; and a carrying robot arm; wherein the conveying mechanical arm comprises; the vertical shaft is pivoted with the fixed frame through the rotating shaft; the moving element is arranged on one side of the vertical shaft; the arm shaft is arranged on one side of the moving element; and a plurality of teeth fork, with the arm axle be connected and with the arm axle extends toward same direction, wherein, every one surface of teeth fork is provided with the concave surface, it has vacuum adsorption device to inlay in the concave surface, vacuum adsorption device includes by supreme down: the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole; the vent pipe is communicated with the second communication hole; the sealing element is arranged in the groove; a base, the periphery of the base being hermetically disposed above the base; the suction nozzle is arranged on the base; the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
The vacuum adsorption device has the beneficial effects that the upper part of the vacuum adsorption device forms a cavity structure with the orthographic projection being rectangular, oval or polygonal, and the contact area between the edge colloid supporting part and the glass substrate is small, so that foreign matters are not easy to remain on the supporting part but are easy to deposit in the cavity structure, the contact condition between the foreign matters and the glass substrate is reduced, even if the foreign matters fall on the colloid supporting part, the colloid supporting part can provide better elasticity to prevent the foreign matters from stabbing the protective film of the polarizing plate of the glass substrate and prevent vacuum abnormity, the quality problems of the polarizing plate stabbing, the sucking disc mura and the like caused by the existing circular sucking disc are effectively solved, the downtime and the frequency caused by the vacuum abnormity of the conveying manipulator are reduced, and the product yield and the production line are improved.
In order to make the aforementioned and other objects of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of a conventional circular chuck.
Fig. 2 is a schematic structural diagram of a vacuum adsorption device according to an embodiment of the present application.
Fig. 3 is an exploded view of a vacuum suction device according to an embodiment of the present disclosure.
Fig. 4 is a schematic structural diagram of a conveying system according to an embodiment of the present application.
Fig. 5 is an enlarged schematic view of a fork of a transfer robot according to an embodiment of the present disclosure.
Fig. 6 is an exploded view of a fork and a vacuum suction device of a transfer robot according to an embodiment of the present disclosure.
[ detailed description ] embodiments
In order to make the aforementioned and other objects, features and advantages of the present disclosure comprehensible, preferred embodiments accompanied with figures are described in detail below. Furthermore, directional phrases used in this disclosure, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, lateral, peripheral, central, horizontal, lateral, vertical, longitudinal, axial, radial, uppermost or lowermost, etc., refer only to the orientation of the attached drawings. Accordingly, the directional terms used are used for the purpose of illustration and understanding of the present disclosure, and are not used to limit the present disclosure.
The following embodiments respectively illustrate how to solve the above technical problems by providing a vacuum suction apparatus, a handling robot arm including the same, and a handling system provided by the present application.
Referring to fig. 2 and 3, one embodiment of the present application provides a vacuum adsorption apparatus 100, including: the structure comprises a base 1000, wherein the upper surface of the base 1000 comprises a groove 50, a first communication hole 501 is arranged in the groove 50, a second communication hole 502 is arranged on the side surface of the base 1000, and the first communication hole 501 is communicated with the second communication hole 502; a vent pipe 1004 communicating with the second communication hole 502; a seal 1001 disposed within the groove 50; a base 1002, a periphery of the base 1002 being hermetically disposed above the base 1000; and a suction nozzle 1003 disposed on the base 1002; the base 1002 and the suction nozzle 1003 form a cavity structure, and the suction nozzle 1003 is communicated with the base 1000 through the base 1002.
Specifically, in the present embodiment, the cavity structure is used for bearing the glass substrate, that is, the glass substrate is adsorbed by the edge portion of the upper portion of the suction nozzle 1003, since the portion of the cavity structure contacting the glass substrate is only located at the edge of the upper portion of the suction nozzle 1003, the contact area is small, and the foreign matter is not easy to remain at the edge of the upper portion of the suction nozzle 1003 but is easy to deposit in the cavity structure, so that the condition that the foreign matter contacts the glass substrate is reduced, and compared with the existing circular suction cup, the vacuum adsorption apparatus 100 provided in the present embodiment can effectively reduce the risk that the polarizing plate of the glass substrate is punctured, the suction cup mura and the vacuum adsorption abnormality are caused by the foreign matter remaining on the suction cup.
The orthographic projection shape of the cavity structure can be rectangular, oval or polygonal, namely the cavity structure can be cuboid, cylindrical or polygonal, the specific shape can be determined according to actual conditions, and the contact area between the cavity and the glass substrate is reduced as much as possible under the condition that the adsorption force between the cavity and the glass substrate is enough.
In this embodiment, most of the foreign matters are deposited inside the cavity structure and do not contact with the glass substrate, so that the risk of pricking the polarizing plate of the glass substrate by the foreign matters is effectively reduced, the suction nozzle 1003 is made of a soft material, and the soft material has good elasticity, so that even if a small amount of foreign matters remain on the edge of the upper portion of the suction nozzle 1003, compared with an adsorption disc made of a hard material in the prior art, the suction nozzle can prevent the polarizing plate of the glass substrate from being pricked by the foreign matters to a certain extent, and the soft material of the silica gel can prevent the gap between the edge of the upper portion of the suction nozzle 1003 and the glass substrate due to the foreign matters, thereby effectively solving the problem of abnormal vacuum adsorption caused by the foreign matters of the existing adsorption disc and the glass substrate.
In this embodiment, the base 1002 has a protrusion 60, the suction nozzle 1003 is sleeved on the base 1002 through the protrusion 60, the installation process is simple, the vent pipe 1004 is connected to an air extractor (not shown), the air extractor vacuumizes the interior of the vacuum adsorption device 100 through the vent pipe 1004, the first communication hole 501 and the second communication hole 502 which are communicated with each other, the sealing member 1001 may be an O-ring, when the air extractor operates, the pressure inside the vacuum adsorption device 100 is lower than the external pressure, and the sealing member 1001 may prevent external air from entering the vacuum adsorption device 100 to ensure that the interior of the vacuum adsorption device 100 is in a vacuum state, thereby ensuring that the vacuum adsorption device 100 can stably adsorb the glass substrate.
In this embodiment, the four corners of the base 1000 are provided with first holes 503, the four corners of the base 1002 are provided with second holes 504, the positions of the first holes 503 and the second holes 504 correspond, and the base 1000 and the base 1002 can be fixed to each other through screws, the first holes 503 and the second holes 504.
Second embodiment
Further, referring to fig. 3 and 4, another embodiment of the present application further provides a transfer robot 10, including: a vertical shaft 200; a moving element 300 disposed at one side of the vertical shaft 200; an arm shaft 400 disposed at one side of the moving element 300; and a plurality of teeth forks 500 connected to the arm shaft 400 and extending in the same direction as the arm shaft 400, wherein a concave surface 5001 is formed on one surface of each tooth fork 500, a vacuum adsorption device 100 is embedded in the concave surface 5001, and the vacuum adsorption device 100 comprises, from bottom to top: the base 1000, the upper surface of the base 1000 includes a groove 50, a first communication hole 501 is arranged in the groove 50, a second communication hole 502 is arranged on the side surface of the base 1000, and the first communication hole 501 is communicated with the second communication hole 502; a vent pipe 1004 communicating with the second communication hole 502; a seal 1001 disposed within the groove 50; a base 1002, a periphery of the base 1002 being hermetically disposed above the base 1000; and a suction nozzle 1003 disposed on the base 1002; the base 1002 and the suction nozzle 1003 together form a cavity structure, and the suction nozzle 1003 is communicated with the base 1000 through the base 1002.
Referring to fig. 5 and 6, it should be noted that the vacuum suction device 100 in this embodiment is inserted into the concave 5001 of the fork 500 to ensure that the vacuum suction device 100 is not dislocated during the process of carrying the glass substrate, further, the vent pipe 1004 is disposed inside the fork 500 and extends along the length direction of the fork 500, the base 1000 of the vacuum suction device 100 is connected to the fork 500 through the second communication hole 502, and the edge of the upper portion of the suction nozzle 1003 is higher than the upper surface of the base 1002 to ensure that the suction nozzle 1003 can normally suck the glass substrate.
The vertical shaft 200 includes a slide rail (not shown), and the moving element 300 can vertically move along the slide rail to drive the arm shaft 400 to vertically move, so that the plurality of tooth forks 500 connected to the arm shaft 400 can drive the glass substrate to vertically move through the vacuum adsorption apparatus 100.
The features of the vacuum suction apparatus 100 have been described in the first embodiment, and please refer to the first embodiment for details, which are not repeated herein.
Third embodiment
Further, referring to fig. 3 to 6, another embodiment of the present application further provides a conveying system 1, including: a running shaft 20; the fixing frame 30 is arranged on the walking shaft 20 and can move along the walking shaft 20; a rotating shaft 40 disposed on the fixing frame 30; and a transfer robot 10; the conveying mechanical arm 10 comprises a vertical shaft 200 which is pivoted with the fixed frame 30 through the rotating shaft 40; a moving element 300 disposed at one side of the vertical shaft 200; an arm shaft 400 disposed at one side of the moving element 300; and a plurality of teeth forks 500 connected to the arm shaft 400 and extending in the same direction as the arm shaft 400, wherein a concave surface 5001 is formed on one surface of each tooth fork 500, a vacuum adsorption device 100 is embedded in the concave surface 5001, and the vacuum adsorption device 100 comprises, from bottom to top: the structure comprises a base 1000, wherein the upper surface of the base 1000 comprises a groove 50, a first communication hole 501 is arranged in the groove 50, a second communication hole 502 is arranged on the side surface of the base 1000, and the first communication hole 501 is communicated with the second communication hole 502; a vent pipe 1004 communicating with the second communication hole 502; a seal 1001 disposed within the groove 50; a base 1002, a periphery of the base 1002 being hermetically disposed above the base 1000; and a suction nozzle 1003 disposed on the base 1002; the base 1002 and the suction nozzle 1003 together form a cavity structure, and the suction nozzle 1003 is communicated with the base 1000 through the base 1002.
The features of the vacuum suction apparatus 100 have been described in the first embodiment, and please refer to the first embodiment for details, which are not repeated herein.
In summary, the present application provides a vacuum adsorption device, a carrying robot arm including the same, and a carrying system, wherein the vacuum adsorption device has a cavity structure, so that a foreign object is easily remained in the cavity structure and does not contact with a glass substrate, thereby preventing the foreign object from cutting a polarizing plate of the glass substrate, and because the contact area between the cavity structure and the glass substrate is small, the mura phenomenon at the contact part between a product and the cavity structure is avoided. In addition, the cavity structure is made of soft materials, so even if foreign matters remain on the edge of the cavity structure, the characteristic of the soft materials can prevent a gap from being generated between the glass substrate and the vacuum adsorption device, and the phenomenon that the adsorption force of the vacuum adsorption device on the glass substrate is reduced due to the influence of the foreign matters is avoided.
The foregoing is merely a preferred embodiment of the present disclosure, and it should be noted that modifications and refinements may be made by those skilled in the art without departing from the principle of the present disclosure, and these modifications and refinements should also be construed as the protection scope of the present disclosure.
Claims (10)
1. A vacuum adsorption apparatus, comprising:
the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole;
the vent pipe is communicated with the second communication hole;
the sealing element is arranged in the groove;
a base, the periphery of the base being hermetically disposed above the base; and
the suction nozzle is arranged on the base;
the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
2. The vacuum suction device according to claim 1, wherein the cavity structure has an orthogonal projection shape of a rectangle, an ellipse, or a polygon, and the suction nozzle is made of silicone.
3. The vacuum suction device as claimed in claim 1, wherein the base has first holes at four corners thereof, and the base has second holes at four corners thereof, the first holes corresponding to the second holes.
4. The vacuum chucking device as recited in claim 1, wherein the base has a projection, the suction nozzle is secured to the base by the projection, and the sealing member is an O-ring.
5. A transfer robot, comprising:
a vertical shaft;
the moving element is arranged on one side of the vertical shaft;
the arm shaft is arranged on one side of the moving element; and
a plurality of teeth fork, with the arm axle be connected and with the arm axle extends toward same direction, wherein, every one surface of tooth fork is provided with the concave surface, it has vacuum adsorption device to inlay in the concave surface, vacuum adsorption device is by supreme including down:
the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole;
the vent pipe is communicated with the second communication hole;
the sealing element is arranged in the groove;
a base, the periphery of the base being hermetically disposed above the base; and
the suction nozzle is arranged on the base;
the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
6. The handling robot as recited in claim 5, wherein the edge of the upper portion of the suction nozzle is higher than the upper surface of the base.
7. The handling robot as claimed in claim 5, wherein the cavity structure has an orthogonal projection shape of a rectangle, an ellipse, or a polygon, and the suction nozzle is made of silicone.
8. The handling robot as claimed in claim 5, wherein the base has first holes at four corners thereof, and the base has second holes at four corners thereof, the first holes corresponding to the second holes.
9. The handling robot as claimed in claim 5, wherein the base has a protrusion, the suction nozzle is fixed on the base by the protrusion, and the sealing member is an O-ring.
10. A conveyance system, characterized by comprising:
a running shaft;
the fixing frame is arranged on the walking shaft;
the rotating shaft is arranged on the fixed frame; and
a conveying mechanical arm;
wherein the conveying mechanical arm comprises;
the vertical shaft is pivoted with the fixed frame through the rotating shaft;
the moving element is arranged on one side of the vertical shaft;
the arm shaft is arranged on one side of the moving element; and
a plurality of teeth fork, with the arm axle be connected and with the arm axle extends toward same direction, wherein, every one surface of tooth fork is provided with the concave surface, it has vacuum adsorption device to inlay in the concave surface, vacuum adsorption device is by supreme including down:
the upper surface of the base comprises a groove, a first communicating hole is formed in the groove, a second communicating hole is formed in the side face of the base, and the first communicating hole is communicated with the second communicating hole;
the vent pipe is communicated with the second communication hole;
the sealing element is arranged in the groove;
a base, the periphery of the base being hermetically disposed above the base; and
the suction nozzle is arranged on the base;
the base and the suction nozzle jointly form a cavity structure, and the suction nozzle is communicated with the base through the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111034016.0A CN113734806A (en) | 2021-09-03 | 2021-09-03 | Vacuum adsorption device, conveying mechanical arm and conveying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111034016.0A CN113734806A (en) | 2021-09-03 | 2021-09-03 | Vacuum adsorption device, conveying mechanical arm and conveying system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113734806A true CN113734806A (en) | 2021-12-03 |
Family
ID=78735564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111034016.0A Pending CN113734806A (en) | 2021-09-03 | 2021-09-03 | Vacuum adsorption device, conveying mechanical arm and conveying system |
Country Status (1)
| Country | Link |
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| CN (1) | CN113734806A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130121659A (en) * | 2012-04-27 | 2013-11-06 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Substrate suction apparatus |
| US20140126988A1 (en) * | 2012-11-02 | 2014-05-08 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Transportation System For Moving Flat Panel And Mechanical Apparatus Thereof And Method For Moving The Same |
| CN206886203U (en) * | 2017-04-11 | 2018-01-16 | 创研科技股份有限公司 | Carrier with constant temperature suction nozzle |
| CN208326659U (en) * | 2018-04-28 | 2019-01-04 | 佛山智汇君彰新材料科技有限公司 | A kind of carbon fiber Ya Cha mechanism and Ya Cha robot |
| CN209175597U (en) * | 2018-11-12 | 2019-07-30 | 浙江台佳电子信息科技有限公司 | Vacuum suction jig |
| CN210650183U (en) * | 2019-08-20 | 2020-06-02 | 浙江晶特光学科技有限公司 | Wafer sucking disc and wafer finishing impression fixing device |
| CN213068679U (en) * | 2020-07-24 | 2021-04-27 | 领松智能科技(苏州)有限公司 | Visual inspection tester for glass laminating equipment |
-
2021
- 2021-09-03 CN CN202111034016.0A patent/CN113734806A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130121659A (en) * | 2012-04-27 | 2013-11-06 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Substrate suction apparatus |
| US20140126988A1 (en) * | 2012-11-02 | 2014-05-08 | Shenzhen China Star Optoelectronics Technology Co. Ltd. | Transportation System For Moving Flat Panel And Mechanical Apparatus Thereof And Method For Moving The Same |
| CN206886203U (en) * | 2017-04-11 | 2018-01-16 | 创研科技股份有限公司 | Carrier with constant temperature suction nozzle |
| CN208326659U (en) * | 2018-04-28 | 2019-01-04 | 佛山智汇君彰新材料科技有限公司 | A kind of carbon fiber Ya Cha mechanism and Ya Cha robot |
| CN209175597U (en) * | 2018-11-12 | 2019-07-30 | 浙江台佳电子信息科技有限公司 | Vacuum suction jig |
| CN210650183U (en) * | 2019-08-20 | 2020-06-02 | 浙江晶特光学科技有限公司 | Wafer sucking disc and wafer finishing impression fixing device |
| CN213068679U (en) * | 2020-07-24 | 2021-04-27 | 领松智能科技(苏州)有限公司 | Visual inspection tester for glass laminating equipment |
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Application publication date: 20211203 |