CN113733535A

CN113733535A - Demoulding device

Info

Publication number: CN113733535A
Application number: CN202111015909.0A
Authority: CN
Inventors: 张学颖; 邓启威; 孙理斌; 汪杰; 陈远
Original assignee: Ningbo Sunny Olai Technology Co ltd
Current assignee: Shunyu Aolai Micro Nano Optics (Shanghai) Co.,Ltd.
Priority date: 2021-08-31
Filing date: 2021-08-31
Publication date: 2021-12-03
Anticipated expiration: 2041-08-31
Also published as: CN113733535B

Abstract

The invention provides a demolding device. The demolding device comprises: the loading platform is provided with a loading groove, the piece to be demoulded is placed on the loading platform, and at least one part of the piece to be demoulded is positioned at the loading groove so as to protect a structural surface of one side, facing the loading platform, of the piece to be demoulded; demoulding structure has the adsorption plane towards one side of cargo platform, the adsorption plane is the cambered surface, drive assembly is connected with demoulding structure drive, when demoulding structure is in initial position and final position, first predetermined height has between adsorption plane and the cargo platform, when demoulding structure is in adsorption process, demoulding structure is in the second and predetermines the height, the second is predetermine highly to be less than first predetermined height, in adsorption process, the adsorption plane all the time with treat drawing of patterns piece line contact, so that the soft mould that the one end of treating drawing of patterns piece was followed to the other end of treating drawing of patterns piece crimping gradually and drive and treating drawing of patterns piece breaks away from the base plate of treating drawing of patterns piece to the adsorption plane. The invention solves the problems of unsatisfactory demoulding effect and large volume of the demoulding device in the prior art.

Description

Demoulding device

Technical Field

The invention relates to the technical field of nanoimprint equipment, in particular to a demoulding device.

Background

In the nanoimprinting process, after a pattern on a flexible mold is transferred to a resin of a substrate, the mold is peeled off from the substrate, that is, a mold releasing step. In the existing demolding, a mold is usually rolled up by a roller, the roller is in a perfect circle shape, and the center of the roller does not move on a substrate in the vertical direction but moves in the horizontal direction, so that the demolding is completed. With such an apparatus configuration, the larger the imprinting area, the larger the diameter of the roller required. Meanwhile, since vertical mold release is preferably performed so as not to damage the patterns beside the apparatus, it is preferable that the diameter of the roller is larger, but if the diameter of the roller is larger, the size of the apparatus is increased, and thus the apparatus cannot be downsized.

That is, the demolding device in the prior art has the problems of unsatisfactory demolding effect and large volume.

Disclosure of Invention

The invention mainly aims to provide a demoulding device, which solves the problems of unsatisfactory demoulding effect and large volume of the demoulding device in the prior art.

In order to achieve the above object, the present invention provides a demolding device including: the loading platform is provided with a loading groove, the piece to be demoulded is placed on the loading platform, and at least one part of the piece to be demoulded is positioned in the loading groove so as to protect a structural surface of one side, facing the loading platform, of the piece to be demoulded; the side, facing the loading platform, of the demolding structure is provided with an adsorption surface, the adsorption surface is an arc surface, and the arc center of the arc surface is located above the demolding structure; drive assembly, drive assembly is connected with demoulding structure drive, demoulding structure has initial position, adsorption process and end position, when demoulding structure is in initial position and end position, first predetermined height has between adsorption plane and the cargo platform, when demoulding structure is in adsorption process, demoulding structure is in the second and predetermines the height, the second is predetermine the height and is less than first predetermined height, in adsorption process, the adsorption plane all the time with treat drawing of patterns piece line contact, so that the soft mould that the piece was treated in the one end of treating drawing of patterns piece to the other end crimping gradually of treating drawing of patterns piece and drive to the adsorption plane breaks away from the base plate of treating drawing of patterns piece.

Further, the demolding structure includes a demolding plate having an adsorption surface.

Further, the demolding structure includes: the driving assembly is in driving connection with the rotating shaft; and the demoulding part is provided with a demoulding plate and a plurality of connecting plates, the connecting plates are respectively connected with two opposite side edges of the demoulding plate, the other ends of the connecting plates are connected with a rotating shaft, and the distance between the rotating shaft and the adsorption surface is smaller than the curvature radius of the adsorption surface.

Further, demoulding structure is provided with the through-hole including adsorbing the piece on the stripper plate, adsorbs piece and through-hole intercommunication to make the through-hole produce the negative pressure.

Further, the adsorption pieces are at least positioned at two ends of the moving direction of the demolding structure.

Further, the thickness of the stripper plate is less than 100 mm.

Further, the demolding device also comprises a pressure mechanism, the pressure mechanism is positioned on one side of the demolding plate far away from the objective table, and the pressure mechanism can press the demolding plate onto the to-be-demolded part.

Further, the radius of curvature of the suction surface is greater than 50 mm.

Further, the drive assembly includes: the demolding structure is movably arranged on the frame body; the height adjusting device is in driving connection with the frame body so as to drive the frame body to move to adjust the distance between the demolding structure and the carrying platform; the driving piece is in driving connection with the demolding structure, and the driving piece drives the demolding structure to rotate along the direction parallel to the loading platform.

Further, the support body includes: the height adjusting device is in driving connection with the connecting piece; support piece, support piece and connecting piece are connected, form the accommodation space between connecting piece and the support piece, and at least a part of demoulding structure is located the accommodation space, and support piece has the trompil of intercommunication accommodation space, and the adsorption plane is located the outside of accommodation space, and the adsorption plane can swing in the trompil.

Further, the frame body further comprises two blocking devices, the two blocking devices are arranged in the accommodating space at intervals, the rotating shaft of the demolding structure moves between the two blocking devices, and the blocking devices form stopping stops for the demolding structure to enable the demolding structure to stop moving.

Further, the driving piece is connected with the demolding structure gear.

Further, the loading platform further comprises an adsorption structure, and the adsorption structure is arranged on the loading platform to adsorb the piece to be demoulded.

Further, the depth of the carrying groove is more than or equal to 1 mm and less than or equal to 5 mm.

Further, demoulding structure includes the adsorption element, and the adsorption element includes static chuck, vacuum chuck, magnetism and inhales one of piece, couple.

By applying the technical scheme of the invention, the demolding device comprises a carrying platform, a demolding structure and a driving assembly, wherein the carrying platform is provided with a carrying groove, a piece to be demolded is placed on the carrying platform, and at least one part of the piece to be demolded is positioned at the carrying groove so as to protect a structural surface of one side, facing the carrying platform, of the piece to be demolded; one side of the demoulding structure facing the loading platform is provided with an adsorption surface which is an arc surface, and the arc center of the arc surface is positioned above the demoulding structure; drive assembly is connected with demoulding structure drive, demoulding structure has initial position, adsorption process and end position, when demoulding structure is in initial position and end position, it predetermines the height to have first between adsorption plane and the cargo platform, when demoulding structure is in adsorption process, demoulding structure is in the second and predetermines the height, the second is predetermine the height and is less than first preset height, in adsorption process, the adsorption plane all the time with treat drawing of patterns piece line contact, so that the soft mould that the piece was treated in the one end of treating drawing of patterns piece to the other end crimping gradually of treating drawing of patterns piece and drive to the adsorption plane breaks away from the base plate of treating drawing of patterns piece.

The setting of cargo platform can be used for supporting the piece of waiting to demold to make and wait each parallel and level of the piece of drawing of patterns, the demoulding structure of being convenient for is treated the piece of drawing of patterns and is carried out the drawing of patterns and handle. The adsorption surface can adsorb the soft mold of the to-be-demoulded part so as to enable the soft mold to be demoulded from the substrate. The setting of adsorption plane can guarantee at the in-process of drawing of patterns, and the soft mould is laminated with the adsorption plane all the time to guarantee demoulding structure to soft mould adsorption affinity, separate the soft mould from the base plate with quick intact. Drive assembly's setting can drive demoulding structure and move at horizontal direction and vertical direction simultaneously to make the adsorption surface adsorb the soft mould completely, in order to guarantee the integrality of treating the drawing of patterns piece drawing of patterns. The movement trajectory of the ejector structure is similar to the trajectory of the edge movement of an oscillating bell, but the height of the ejector structure is the same in the initial and end positions, but the ejector structure is displaced in the horizontal direction. And in the demoulding process, the demoulding structure gradually moves from the first preset height to the second preset height, and simultaneously moves in the horizontal direction, so that the adsorption surface gradually adsorbs the soft mould. Meanwhile, the soft mold which is firstly adsorbed is gradually separated from the substrate in the process of gradual movement of the demolding structure. The demolding structure gradually moves from the second preset height to the first preset height, and meanwhile, the demolding structure continuously moves in the horizontal direction, so that the adsorption surface further adsorbs the soft mold, the soft mold adsorbed firstly is gradually separated from the substrate in the gradual movement process of the demolding structure, until the demolding structure reaches the end position, the demolding structure returns to the first preset height, and at the moment, the soft mold is completely separated from the substrate, so that the demolding process is completed. And placing the piece to be demoulded at the position of the carrying groove, so that the microstructure on the other side of the piece to be demoulded extends into the carrying groove, and the integrity of the microstructure on the other side of the piece to be demoulded is ensured.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 shows a schematic structural view of a demolding device according to an alternative embodiment of the invention; and

FIG. 2 shows a working state diagram of the demolding structure in FIG. 1;

FIG. 3 shows a state diagram of the ejector structure of FIG. 1 in an initial position;

FIG. 4 shows the demold structure of FIG. 1 during demolding;

fig. 5 shows a state diagram of the ejector structure in fig. 1 in the end position.

Wherein the figures include the following reference numerals:

10. a carrier platform; 20. a demolding structure; 21. an adsorption surface; 22. a rotating shaft; 23. a connecting plate; 30. a drive assembly; 31. a frame body; 311. a connecting member; 312. a support member; 313. an accommodating space; 314. a barrier.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

It is noted that, unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

In the present invention, unless specified to the contrary, use of the terms of orientation such as "upper, lower, top, bottom" or the like, generally refer to the orientation as shown in the drawings, or to the component itself in a vertical, perpendicular, or gravitational orientation; likewise, for ease of understanding and description, "inner and outer" refer to the inner and outer relative to the profile of the components themselves, but the above directional words are not intended to limit the invention.

The invention provides a demoulding device, which aims to solve the problems of unsatisfactory demoulding effect and large size of the demoulding device in the prior art.

As shown in fig. 1 to 5, the demolding device includes a carrying platform 10, a demolding structure 20 and a driving assembly 30, the carrying platform 10 has a carrying groove, the to-be-demolded member is placed on the carrying platform 10, and at least a part of the to-be-demolded member is located at the carrying groove to protect a structural surface of the to-be-demolded member facing to one side of the carrying platform 10; one side of the demolding structure 20, which faces the loading platform 10, is provided with an adsorption surface 21, the adsorption surface 21 is an arc surface, and the arc center of the arc surface is located above the demolding structure 20; drive assembly 30 is connected with demoulding structure 20 drive, demoulding structure 20 has initial position, adsorption process and end position, when demoulding structure 20 was in initial position and end position, first preset height has between adsorption plane 21 and the cargo platform 10, when demoulding structure 20 was in the adsorption process, demoulding structure 20 was in the second preset height, the second preset height is less than first preset height, in adsorption process, adsorption plane 21 all the time with treat the line contact of drawing of patterns, so that adsorption plane 21 from treat that the one end of drawing of patterns to treat the other end of drawing of patterns crimping gradually and drive the soft mould of the piece of drawing of patterns and break away from the base plate of the piece of treating drawing of patterns.

The carrier platform 10 can be used to support the member to be demolded so that the member to be demolded is flush throughout, facilitating the demolding operation of the demolding structure 20. The suction surface 21 can suck the soft mold of the mold to be released so that the soft mold is released from the substrate. The setting of adsorption plane 21 can guarantee at the in-process of drawing of patterns, and the soft mould is laminated with adsorption plane 21 all the time to guarantee demoulding structure 20 to the adsorption affinity of soft mould, separate the soft mould from the base plate with quick intact ground. The driving assembly 30 is arranged to drive the demolding structure 20 to move in the horizontal direction and the vertical direction simultaneously, so that the soft mold is completely adsorbed by the adsorption surface 21, and the completeness of demolding of the piece to be demolded is guaranteed. The movement trajectory of the ejector structure 20 is similar to the trajectory of the edge movement of an oscillating bell, the height of the ejector structure 20 in the initial and end positions being the same, but the ejector structure 20 is displaced in the horizontal direction. In the demolding process, the demolding structure 20 gradually moves from the first preset height to the second preset height, and meanwhile, the demolding structure 20 moves in the horizontal direction, so that the adsorption surface 21 gradually adsorbs the soft mold. And at the same time, the soft mold, which is first adsorbed, is gradually separated from the substrate during the gradual movement of the demolding structure 20. The demolding structure 20 gradually moves from the second preset height to the first preset height, and the demolding structure 20 continues to move in the horizontal direction, so that the adsorption surface 21 further adsorbs the soft mold, and the soft mold adsorbed first gradually separates from the substrate in the gradual movement process of the demolding structure 20, until the demolding structure 20 reaches the end position, the demolding structure 20 returns to the first preset height, and at the moment, the soft mold completely separates from the substrate, and the demolding process is completed. And placing the piece to be demoulded at the carrying groove, so that the microstructure on the structural surface on the other side of the piece to be demoulded is positioned at the carrying groove, and the microstructure is prevented from being pressed, so that the integrity of the microstructure on the other side of the piece to be demoulded is ensured.

It should be noted that the cambered surface is not a cylindrical surface, but a flat cambered surface, and has two opposite sides, and during the demolding process, one side firstly adsorbs the soft mold, and gradually adsorbs the soft mold to the other side. The adsorption surface 21 has horizontal movement and vertical movement in the movement process, so that the soft mold is conveniently separated from the substrate.

It should be noted that, an ejector pin is disposed on the carrying platform 10, and the to-be-demolded piece is placed above the ejector pin, so that the ejector pin can eject the to-be-demolded piece out.

It should be noted that, when the demolding structure 20 is located at the end position, the soft mold is completely separated from the substrate, the soft mold is completely attached to the adsorption surface 21, and the demolding structure 20 drives the soft mold to move upward, so that the soft mold is separated from the substrate, and then the adsorption function on the adsorption surface 21 is stopped, so that the soft mold can be taken down, and the robot can be used for automatic removal or manual removal.

When the workpiece to be demoulded is demoulded on two sides, the workpiece to be demoulded needs to be placed on the loading platform 10 after being overturned, and is fixed by using the adsorption structure. In order to avoid damage to the structure on the substrate, the substrate is placed above the carrying groove, so that the microstructure on the substrate is positioned at the carrying groove, the microstructure is prevented from being pressed, and the microstructure is protected. And then stripping the soft mold on the other side of the mold to be stripped, wherein the stripping method is the same as that of the soft mold. And after demolding is finished, the substrate on the loading platform 10 is recovered, and can be automatically recovered in a robot and ejector pin ejection mode or manually recovered. If a pressure ring is used, recovery is also required.

When the piece to be demoulded is turned, the robot can be used for automatic turning or manual turning.

Specifically, the stripper structure 20 includes a stripper plate having an adsorption surface 21. The demoulding plate has certain hardness, so that the demoulding plate is not easy to deform, the soft mould can be stably adsorbed by the adsorption surface 21 in the demoulding process, the soft mould can be rapidly separated from the base plate in the moving process of the demoulding structure, and the demoulding efficiency is effectively ensured.

As shown in fig. 1 and 2, the demolding structure 20 comprises a rotating shaft 22 and a demolding member, and a driving assembly 30 is in driving connection with the rotating shaft 22; the demoulding part is provided with a demoulding plate and a plurality of connecting plates 23, the connecting plates 23 are respectively connected with two opposite side edges of the demoulding plate, the other ends of the connecting plates 23 are connected with a rotating shaft 22, and the distance between the rotating shaft 22 and the adsorption surface 21 is smaller than the curvature radius of the adsorption surface 21. Drive assembly 30 can drive axis of rotation 22 and rotate, drive assembly 30 can drive demoulding structure 20 and move simultaneously at vertical direction and horizontal direction, at the in-process of drive assembly 30 drive demoulding structure 20 motion, adsorption plane 21 and soft mould are laminated gradually in the place ahead of axis of rotation 22, and the soft mould breaks away from gradually with the base plate in the rear of axis of rotation 22, realized that adsorption plane 21 drives soft mould and base plate and breaks away from gradually in the motion, greatly increased drawing of patterns efficiency. The connecting plate 23 connects the stripper plate to the rotary shaft 22 so that the position of the connecting plate is relatively fixed to ensure the stability of the stripping.

It should be noted that the forward direction refers to the forward direction of the rotating shaft 22 during the movement, and the backward direction refers to the opposite direction of the forward direction.

The distance between the rotation axis 22 and the suction surface 21 is smaller than the radius of curvature of the suction surface 21. The rotation axis 22 is located lower than the center point of the radius of curvature of the suction surface 21. The curvature radius of the adsorption surface 21 is increased due to the arrangement, the adsorption surface 21 is not affected, the design is thinner, the height of the demolding device can be reduced, and the miniaturization design of equipment is facilitated.

Specifically, the demolding structure 20 includes an adsorbing member, and the demolding plate is provided with a through hole, and the adsorbing member is communicated with the through hole to enable the through hole to generate negative pressure. The adsorption piece is the structure of breathing in inwards, and through setting up the through-hole on the stripper plate, the adsorption piece is breathed in order to produce the negative pressure in through-hole department to make soft mould adsorbed on the stripper plate, and then guarantee to laminate with adsorption surface 21 all the time at the in-process soft mould of drawing of patterns, and then guarantee demoulding structure 20's demoulding effect.

It should be noted that the adsorption member can be an electrostatic chuck, a vacuum chuck, a magnetic attraction member, a hook, etc., and it is only necessary to connect the soft mold to the adsorption surface and move along with the adsorption surface. That is, the adsorption form between the adsorption member and the soft mold may be an adsorption form of electrostatic adsorption, vacuum adsorption, magnetic adsorption, and hook adsorption.

In this embodiment, the suction members are located at least at both ends in the moving direction of the ejector structure 20. Through holes are formed in the two ends of the demoulding plate in the moving direction, so that the adsorption force of the two ends of the demoulding structure 20 is large, the two ends of the demoulding plate are always attached to the soft mould, and the soft mould is conveniently separated from the substrate. It should be noted that the suction surface 21 can be always sucked to the soft mold in the demolding process only by forming through holes at the two ends of the demolding plate.

Of course, the through holes may be provided not only at both ends in the moving direction of the stripper plate but also at a position in the middle of the stripper plate, but both ends of the stripper plate must have through holes and the middle position may or may not have through holes.

The suction members may be disposed not only at both ends of the moving direction of the mold release structure 20, but also at the middle position of the mold release structure 20, but the suction members are necessarily disposed at both ends of the mold release structure 20, and the suction members may be disposed at the middle position or not.

Specifically, the thickness of the stripper plate is less than 100 mm. If the thickness of the stripper plate is larger than 100 mm, the thickness of the stripper plate is too large, so that the volume of the stripper plate is too large, and under the condition of the same-density material, the weight of the stripper plate is also larger, so that the stripper plate is too heavy, and the stripper plate is not favorable for moving and working. And the thickness of the stripping plate is limited within the range of less than 100 mm, so that the stripping plate is relatively light and convenient to stably work. The thickness of the demoulding plate is reasonably controlled, so that the demoulding device is designed to be thinner and lighter, and the miniaturization of the demoulding device is facilitated.

Preferably, the thickness of the stripper plate is less than 50 mm.

Specifically, the demolding device further comprises a pressure mechanism, the pressure mechanism is located on one side, away from the objective table, of the demolding plate, and the pressure mechanism can press the demolding plate onto the to-be-demolded piece. The demolding device further comprises a pressure mechanism, the pressure mechanism can press the demolding plate on the to-be-demolded piece, the pressure applied by the pressure mechanism is adjustable, and the demolding plate is stably pressed on the to-be-demolded piece by adjusting the pressure applied by the pressure mechanism, so that the demolding plate can conveniently adsorb the to-be-demolded piece. The pressing pressure can also be controlled by air pressure, physical pressure and the like, and the product molding can be completed through certain stress.

The pressure mechanism can be a pneumatic cylinder, an oil pressure cylinder and the like, and the pressing pressure is adjusted and certain pressure is applied to press the adsorption surface 21 on the to-be-demoulded piece.

The section of the demoulding part in the vertical direction is a sector.

The area of the adsorption surface 21 is larger than that of the module to be released, so that all positions of the module to be released can be attached to the adsorption surface for adsorption.

Specifically, the radius of curvature of the suction surface 21 is larger than 50 mm. If the radius of curvature of the suction surface 21 is less than 50 mm, the size of the suction surface 21 becomes too small to easily detach the entire soft mold. The radius of curvature of the suction surface 21 is larger than 50 mm, so that the suction surface 21 has a certain area, which is convenient for releasing a general soft mold with a conventional size, and the suction surface 21 with a large radius can be used for a large-size soft mold. The closer the releasing direction of the substrate and the soft mold is to the vertical during demolding, the smaller the stress to the adjacent structure, so the curvature radius of the adsorption surface is set to be close to the vertical releasing.

Preferably, the radius of curvature of the suction surface 21 is greater than 500 mm.

More preferably, the radius of curvature of the suction surface 21 is greater than 1000 mm or more.

In addition, the bending degree of the suction surface 21 is not too small, otherwise the suction surface 21 is inclined more to the plane, so that the effect of sucking the soft mold on one side of the suction surface 21 and separating the soft mold from the substrate on the other side cannot be ensured during the arc-shaped movement of the demolding structure 20. Therefore, only vertical force is applied in the demolding process, so that the patterns are easy to break, and the demolding effect is not easy to guarantee.

As shown in fig. 1, the driving assembly 30 includes a frame body 31, a height adjusting device and a driving member, and the demolding structure 20 is movably disposed on the frame body 31; the height adjusting device is in driving connection with the frame body 31 to drive the frame body 31 to move so as to adjust the distance between the demolding structure 20 and the carrying platform 10; the driving member is in driving connection with the demolding structure 20, and the driving member drives the demolding structure 20 to rotate in a direction parallel to the loading platform 10. The height adjusting device is in driving connection with the frame body 31 to drive the frame body 31 to move in the height direction, so that the whole adsorption surface 21 can move up and down, and the adsorption surface 21 and the upper soft mold on the objective table are kept in a contact state. Meanwhile, when the adsorption surface 21 moves horizontally, the adsorption surface 21 moves up and down in the direction perpendicular to the objective table, so that the adsorption surface 21 is tightly attached to the soft mold, and at the moment, the attaching force comes from the downward weight of the demolding structure 20 and the upward stress of the objective table 10. It is preferable to press the suction surface 21 against the member to be released by adjusting the pressing pressure and applying a certain pressure by using a pneumatic cylinder, an oil pressure cylinder, or the like. The driving piece can drive the rotation shaft 22 to move in the horizontal direction, so that the demolding structure 20 can move up and down and left and right simultaneously, and the rotation shaft 22 can rotate simultaneously, so that the adsorption surface 21 can be driven to swing.

That is, when the height adjusting device drives the frame body 31 to move up and down, the driving member drives the rotating shaft 22 to rotate, and the rotating shaft moves forward, so that the soft mold adsorbed on the adsorbing surface 21 is separated from the substrate.

As shown in fig. 1, the frame 31 includes a connecting member 311 and a supporting member 312, and the height adjusting device is drivingly connected to the connecting member 311; the supporting member 312 is connected to the connecting member 311, an accommodating space 313 is formed between the connecting member 311 and the supporting member 312, at least a portion of the demolding structure 20 is located in the accommodating space 313, the supporting member 312 has an opening communicated with the accommodating space 313, the adsorption surface 21 is located outside the accommodating space 313, and the adsorption surface 21 can swing in the opening. The rotating shaft 22 rotates in the accommodating space 313, so that other structures are prevented from stopping the rotating shaft 22, and the stability of the movement of the rotating shaft 22 is ensured. At least one part of the connecting plate 23 extends to the outer side of the accommodating space 313 from the opening, and the suction surface 21 is located at the outer side of the accommodating space 313, so that the suction surface 21 can swing in the opening to separate the soft mold from the substrate.

As shown in fig. 1 and 2, the frame 31 further includes two blocking devices 314, the two blocking devices 314 are spaced apart from each other in the accommodating space 313, the rotating shaft 22 of the demolding device moves between the two blocking devices 314, and the blocking devices 314 form a stop for the demolding structure 20 to stop the movement of the demolding structure 20. The blocking members 314 are arranged to stop the rotating shaft 22, one blocking member 314 is arranged to stop the rotating shaft 22 when the rotating shaft 22 is located at the initial position, and one blocking member 314 is arranged to stop the rotating shaft 22 when the rotating shaft 22 moves to the final position. The two blocking devices 314 are arranged to limit the rotating shaft 22, so that the initial position and the end position of the adsorption surface 21 are positioned, and the working efficiency of the demolding device can be effectively guaranteed.

The blocking device 314 limits the rotation axis 22 by stopping both ends of the ejector structure 20. After the demolding structure 20 touches the stopper 314, the resistance when the rotating shaft 22 rotates increases to restrict the rotation of the rotating shaft 22.

As shown in fig. 3, the first end of the demolding structure 20 contacts the right-side stopper 314, so that the demolding structure 20 is at the initial position, and the adsorption surface 21 of the second end of the demolding structure 20 is adsorbed with the soft film. As shown in fig. 4, during the demolding process, the rotating shaft 22 gradually moves to the left side and moves downward, so that the middle position of the demolding structure 20 gradually absorbs the soft film, and the two ends of the demolding structure 20 are spaced from the two stoppers 314. As shown in fig. 5, the mold release structure 20 moves to the end position, the second end of the mold release structure 20 contacts the left stopper 314, so that the mold release structure 20 is at the end position, and the suction surface 21 of the first end of the mold release structure 20 is sucked to the soft film.

In addition, the rotating shaft 22 moves between the two obstructers 314 during the adsorption process.

In a specific embodiment, not shown in the drawings, the initial position and the end position of the suction surface 21 are not located by the form of the blocking device 314, but two limit convex edges are provided on the suction surface 21, and the two limit convex edges are respectively located at two ends of the movement direction of the suction surface 21 to determine the initial position and the end position of the suction surface.

Specifically, the driving member is geared with the demolding structure 20. The driver is geared to the stripper structure 20 so that the driver and stripper structure 20 can rotate and move forward. Meanwhile, the gear connection can ensure the stability of connection between the driving piece and the demolding structure 20, and further ensure the working stability of the demolding structure 20.

In particular, the drive member is geared to the rotating shaft 22.

Specifically, the loading platform 10 further includes an adsorption structure, and the adsorption structure is arranged on the loading platform 10 to adsorb the to-be-demolded member located on the loading surface. The piece to be demoulded is adsorbed on the platform surface of the loading platform 10 by the adsorption structure, so that the relative movement between the piece to be demoulded and the loading platform 10 can be avoided, and the stability of the demoulding of the piece to be demoulded by the demoulding structure 20 is ensured.

The adsorption structure is an electrostatic chuck or a vacuum chuck.

Specifically, the depth of the loading groove is more than or equal to 1 mm and less than or equal to 5 mm. If the depth of the carrying groove is less than 1 mm, the microstructures on the structural surface of the substrate cannot be completely accommodated in the carrying groove, so that the protection effect of the carrying groove is ineffective. If the degree of depth of carrying the thing recess is greater than 5 millimeters, just make the degree of depth of carrying the thing recess too big, be unfavorable for treating that the drawing of patterns piece is placed on the objective platform is balanced.

It is to be understood that the above-described embodiments are only a few, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and it should be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of features, steps, operations, devices, components, and/or combinations thereof.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A demolding device, characterized by comprising:

the loading platform (10), the loading platform (10) is provided with a loading groove, the piece to be demoulded is placed on the loading platform (10), and at least one part of the piece to be demoulded is positioned in the loading groove to protect a structural surface of one side of the piece to be demoulded, which faces the loading platform (10);

the demolding structure (20), one side of the demolding structure (20) facing the loading platform (10) is provided with an adsorption surface (21), the adsorption surface (21) is an arc surface, and the arc center of the arc surface is positioned above the demolding structure (20);

a drive assembly (30), the drive assembly (30) being in driving connection with the demolding structure (20), the demolding structure (20) having an initial position, an adsorption process and an end position, when the demoulding structure (20) is at the initial position and the end position, a first preset height is formed between the adsorption surface (21) and the loading platform (10), when the demolding structure (20) is in the adsorption process, the demolding structure (20) is at a second preset height, and the second preset height is smaller than the first preset height, in the adsorption process, the adsorption surface (21) is always in line contact with the piece to be demoulded, so that the adsorption surface (21) is gradually pressed from one end of the to-be-demoulded piece to the other end of the to-be-demoulded piece and drives the soft mold of the to-be-demoulded piece to be separated from the substrate of the to-be-demoulded piece.

2. The demolding device according to claim 1, characterized in that the demolding structure (20) comprises a demolding plate having the suction surface (21).

3. The demolding device according to claim 2, wherein the demolding structure (20) comprises:

a rotating shaft (22), wherein the driving assembly (30) is in driving connection with the rotating shaft (22);

the demolding part is provided with the demolding plate and a plurality of connecting plates (23), the connecting plates (23) are respectively connected with two opposite side edges of the demolding plate, the other ends of the connecting plates (23) are connected with the rotating shaft (22), and the distance between the rotating shaft (22) and the adsorption surface (21) is smaller than the curvature radius of the adsorption surface (21).

4. A stripping device as claimed in claim 2, characterized in that the stripping structure (20) comprises an absorbing element, and the stripping plate is provided with a through hole, and the absorbing element communicates with the through hole to generate a negative pressure in the through hole.

5. Demoulding device according to claim 4, wherein the suction elements are located at least at both ends in the direction of movement of the demoulding structure (20).

6. The stripper device of claim 2, wherein the thickness of the stripper plate is less than 100 millimeters.

7. The stripper device of claim 2, further comprising a press mechanism on a side of the stripper plate remote from the stage, the press mechanism being capable of pressing the stripper plate onto the part to be stripped.

8. Demoulding device according to claim 1, wherein the radius of curvature of the suction surface (21) is greater than 50 mm.

9. The stripping device according to any one of claims 1 to 8, characterized in that the drive assembly (30) comprises:

the demolding structure (20) is movably arranged on the frame body (31);

the height adjusting device is in driving connection with the frame body (31) to drive the frame body (31) to move so as to adjust the distance between the demolding structure (20) and the carrying platform (10);

the driving piece is in driving connection with the demolding structure (20), and the driving piece drives the demolding structure (20) to rotate in a direction parallel to the loading platform (10).

10. The ejector apparatus of any one of claims 1 to 8, wherein the depth of said carrier groove is 1 mm or more and 5 mm or less.